JP2001198766A - Member for moving and positioning device and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a larger surface plate excellent in abrasion resistance and rust resistance at a relative low cost, in a surface plate to be used for a device for moving a substrate and positioning it. SOLUTION: A surface plate 20 is composed of a base material 21 made of metal and a ceramic layer 22 formed on the base material 21. It is desirable that the ceramic layer 22 has the thickness not less than 5 μm and the Vickers hardness not less than 700 kg/mm2. It is desirable that a tolerance value of the flatness of the using surface of the ceramic layer 22 is not more than 46 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a member used for an apparatus for positioning a substrate by moving the substrate and a method for manufacturing the same, and more particularly, to a projection exposure apparatus, an electron beam lithography apparatus,
A member used for an apparatus used for manufacturing a semiconductor device such as a wire bonder, a liquid crystal device and the like, a precision processing machine, a precision measuring instrument, and the like for moving and positioning a substrate such as a wafer, and a method of manufacturing the same. With regard to
More specifically, in the above apparatus, the present invention relates to a stage for moving a substrate, a large member such as a surface plate for arranging the stage, and a method of manufacturing the same.

[0002]

2. Description of the Related Art For example, FIG. 1 shows a specific example of a movement guide device for moving and positioning a substrate in an exposure apparatus, an electron beam drawing apparatus, a wire bonder and the like used for manufacturing semiconductor devices, liquid crystal devices and the like. Show. In the apparatus, a Y stage 12 extending along a Y guide 11 and an X stage 14 extending along an X guide 13 are provided on the upper surface (reference surface) of a surface plate (base) 10 via a necessary driving mechanism (not shown). Then, each stage is moved. The substrate 15 placed on the X stage 14 is moved and positioned via a driving mechanism.

[0003] The components of such a movement guide device, for example, the platen and each stage, have heretofore been made of metal mainly composed of cast iron. Some were made of natural stone. Further, in recent years, an X stage and a Y stage made of ceramics have been proposed for the purpose of reducing the weight and increasing the rigidity.

[0004]

However, a member made of a metal such as cast iron is not excellent in abrasion resistance and has a problem of generating rust. In addition, natural stones have a problem in that rough stones that can be used for large-sized members are depleted, so that the cost is relatively high and the weight of the members is relatively large. A member made of ceramic has a problem that the cost is relatively high, it is difficult to increase the size in manufacturing, and it is difficult to process.

[0005] An object of the present invention is to solve the above-mentioned problems, to provide relatively low cost, excellent wear resistance, and excellent rust prevention.
An object of the present invention is to provide a technique capable of supplying a larger member.

[0006]

SUMMARY OF THE INVENTION A member for a movement positioning device according to the present invention is a member used for a device for moving and positioning a substrate, and comprises a base made of metal and formed on the base. It is characterized by being composed of a ceramic layer.

In the member according to the present invention, the ceramic layer preferably has a thickness of 50 μm or more and a Vickers hardness of 700 kg / mm ² or more.

In particular, the present invention can be applied to a member having at least one side having a length of 1 m or more. In the present invention, the tolerance value of the flatness of the used surface of the ceramic layer is 4
Preferably it is 6 μm or less.

Further, according to the present invention, there is provided a method of manufacturing the above-mentioned member for a moving positioning device, the method comprising the steps of: flattening a surface of a base material made of metal; and spraying ceramics on the flattened surface. It is characterized by including at least a step of forming a ceramic layer on the base material and a step of grinding the ceramic layer to flatten its surface.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 2, for example, a member 20 according to the present invention has a structure in which a ceramic layer 22 is formed on a base material 21 made of metal. The surface 22 a of the ceramic layer 22 constitutes a use surface of the member 20. Here, the used surface refers to a surface used for functioning the member, such as a surface for arranging another member necessary for moving and positioning the substrate or the substrate itself. For example, if the member 20 is a surface plate as described above, other members necessary for moving and positioning the substrate, such as a guide and a stage,
It is arranged on the surface 22a. Further, the member 20 can be another member necessary for the movement positioning of the substrate, such as the stage described above.

In the present invention, the base material is, for example, cast iron,
Made of stainless steel such as chrome steel
it can. Vickers hardness of metal is, for example, 3
00kg / mm^Two350kg / mm in chrome steel^TwoIs
However, as it is, the surface is flat due to surface wear during use
The accuracy of the degree could be remarkably deteriorated. Also metal
In the case of a sprayed coating of an alloy, for example, 55
0 kg / mm^Two450kg / m with CoNiCrAlY
m^TwoThe degree was insufficient. In contrast, metal-based
Wear resistance by providing a ceramic layer on the surface of the material
Surface with good flatness
Came. In the present invention, the ceramic layer is formed of a metal substrate.
High hardness, for example, 700 k
g / mm ^TwoExcellent if it has the above Vickers hardness
It can exhibit abrasion resistance. Of ceramic layer
The material is, for example, alumina (Al_TwoO_Three) (Vickers
Hardness 850kg / mm^Two), Chromium oxide (Cr_TwoO_Three)
(Vickers hardness 950 kg / mm^Two), Tungsten carbide
Ten (WC) (Vickers hardness 1150kg / m
m^Two), Chromium carbide (Cr_ThreeC_Two) (Vickers hardness 90)
0 kg / mm^Two), Titanium carbide (TiC) (Vickers
Hardness 900 kg / mm^Two), Zirconia (ZrO)_Two) (B
Vickers hardness 750kg / mm^Two) Etc.
You.

In the present invention, it is preferable that the surface of the ceramic layer constituting the surface to be used is appropriately flat.
In applications such as a surface plate, the function is impaired if the surface irregularities are significantly large.
Preferably it is 46 μm or less. Also, JIS B
According to 7513, the use surface of the member according to the present invention as a surface plate can satisfy at least the second grade, and more preferably the first grade, in the tolerance value of the flatness. A flat ceramic layer surface can be obtained by grinding.

In the present invention, the thickness of the ceramic layer can be appropriately set so as to satisfy wear resistance, flatness, and corrosion resistance. If the ceramic layer is extremely thin, peeling or deformation due to abrasion or impact occurs, so the thickness is preferably 50 μm or more. For the formation of the ceramic layer, techniques generally used for surface treatment, such as CVD, PVD, ion plating, sputtering, application of a ceramic dispersion, and thermal spraying can be used. In particular, when it is desired to form a thick ceramic layer on a large member, a method of spraying ceramic onto a metal substrate is more practical.

The ceramic layer has a color inherent to the material, but may be colored if necessary. High-purity alumina, zirconia, titania, etc. usually present white,
For example, alumina can be colored by adding titania or the like. The coloring enhances the commercial value of the product, and prevents discoloration due to dirt attached during the assembly process or normal use.

When stainless steel is used as the base material, rust can be effectively prevented from being used over a long period of time. On the other hand, when a highly rigid cast iron or the like is used for the base material, there is a possibility that rust may occur in long-term use. If the ceramic layer covering the base material is airtight, it can block the effects of moisture and the like in the use atmosphere, and there is no problem that rust occurs at the boundary between the ceramic and the metal. If it does, it is preferable to fill the voids with an organic resin or the like and perform a sealing treatment to prevent rust on the base material. 1m
When a ceramic layer having a thickness of 50 μm or more is formed on a large member having at least one of the above sides, it is preferable to form the ceramic layer by thermal spraying from the viewpoint of practicality such as cost. Pores may be present in an amount of 5 to 10%, and depending on the material of the base metal and the use environment, the generation of rust becomes a problem. In such a case, it is desirable to perform a sealing process by spraying or applying an organic resin such as an epoxy resin diluted in a liquid state to the sprayed surface, allowing the resin to penetrate into the inside, and then drying and curing the resin.

The present invention is preferably applied to a large-sized member having a side having a length of 1 m or more, in which it is difficult to manufacture an integral member from ceramics or natural stone from a technical or cost viewpoint.

In the method for manufacturing a member for a moving positioning device according to the present invention, first, the surface of a base material made of metal is flattened. Flattening can be performed by a surface grinder. If the surface of the flattened metal substrate is appropriately roughened microscopically, the adhesion of the ceramic layer increases, so blasting is performed as necessary. After an appropriate cleaning step, a base material may be sprayed on the flattened substrate surface, if necessary, and then ceramics may be sprayed to form a ceramic layer thereon. As the thermal spraying method, gas thermal spraying such as flame thermal spraying, electric thermal spraying such as plasma thermal spraying or laser thermal spraying can be used. In particular, plasma spraying that can handle large sizes at high temperatures is preferable. The obtained ceramic layer is
Preferably, the surface is flattened by grinding. The grinding is preferably performed using a surface grinder. The surface roughness (Ra) of the ceramic layer after grinding can be set to 1 μm or less, and if necessary, 0.5 μm
It is also possible to: When the obtained ceramic layer has pores, the pores can be impregnated with an organic resin such as an epoxy resin, if necessary, to perform a sealing treatment.
Hereinafter, the present invention will be further described with reference to examples, but the present invention is not limited to the examples.

[0018]

EXAMPLE A cast iron base material having a size of 2100 mm × 1800 mm in upper plane and a thickness of 350 mm and processed into a predetermined shape was prepared. The surface of the cast iron base material was ground using a surface grinder, and finished to have a flatness tolerance of 25 μm. Then, on the surface of the flat cast iron base material,
After blasting and NiAl undercoat spraying, N ₂
Ceramic layers having the materials and properties shown in Table 1 below were formed by gas plasma spraying. The average particle size of the ceramic powder used for thermal spraying was 30 μm.
A dense ceramic layer could be obtained by thermal spraying. Next, the surface of the obtained ceramic layer is ground using a surface grinder, and the tolerance value of the flatness of the used surface is
A flattening process was performed so as to have the values shown in Table 1. When the thus obtained member was evaluated for use as a surface plate for a projection exposure apparatus, in any case, surface roughness did not occur during use, and good use results were obtained. On the other hand, when the same use evaluation was performed on a cast iron platen having no ceramic layer just by flattening the surface, the surface was roughened and rust occurred during use.

[0019]

[Table 1]

[0020]

According to the present invention, a wear-resistant coating is formed on a relatively inexpensive metal, so that the cost is relatively low.
It is possible to supply larger members with excellent wear resistance and excellent rust prevention. In particular, the present invention is to move a substrate such as a wafer in a projection exposure apparatus, an electron beam drawing apparatus, a semiconductor device such as a wire bonder, an apparatus used for manufacturing a liquid crystal device, a precision processing machine, a precision measuring instrument, and the like. It is useful for a member used in a device for performing positioning by using the apparatus, and is advantageous for, for example, a stage for moving a substrate and a surface plate for disposing the stage.

[Brief description of the drawings]

FIG. 1 is a side view showing a specific example of a movement guide device that moves and positions a substrate.

FIG. 2 is a sectional view schematically showing the structure of a member according to the present invention.

[Explanation of symbols]

10 surface plate, 11 Y guide, 12 Y stage, 13
X guide, 14 X stage, 20 member according to the present invention, 21 base material made of metal, 22 ceramic layer.

Claims (4)

[Claims] 1. A member used in an apparatus for positioning a substrate by moving the substrate, comprising: a metal base material; and a ceramic layer formed on the base material. Equipment members. 2. The member according to claim 1, wherein the ceramic layer has a thickness of 50 μm or more and a Vickers hardness of 700 kg / mm ² or more. 3. The ceramic layer according to claim 1, wherein the ceramic layer has at least one side having a length of 1 m or more, and a tolerance of flatness of a use surface of the ceramic layer is 46 μm or less. For moving positioning device. 4. The method for manufacturing a member for a movement positioning device according to claim 1, wherein a step of flattening a surface of a base material made of metal, A method for forming a ceramic layer on the base material by thermal spraying, and a step of grinding the ceramic layer to flatten its surface.