JP2001197717A5 - - Google Patents

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Publication number
JP2001197717A5
JP2001197717A5 JP2000003682A JP2000003682A JP2001197717A5 JP 2001197717 A5 JP2001197717 A5 JP 2001197717A5 JP 2000003682 A JP2000003682 A JP 2000003682A JP 2000003682 A JP2000003682 A JP 2000003682A JP 2001197717 A5 JP2001197717 A5 JP 2001197717A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000003682A
Other languages
Japanese (ja)
Other versions
JP4478905B2 (ja
JP2001197717A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000003682A priority Critical patent/JP4478905B2/ja
Priority claimed from JP2000003682A external-priority patent/JP4478905B2/ja
Publication of JP2001197717A publication Critical patent/JP2001197717A/ja
Publication of JP2001197717A5 publication Critical patent/JP2001197717A5/ja
Application granted granted Critical
Publication of JP4478905B2 publication Critical patent/JP4478905B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000003682A 2000-01-12 2000-01-12 リニアモータ Expired - Fee Related JP4478905B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000003682A JP4478905B2 (ja) 2000-01-12 2000-01-12 リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000003682A JP4478905B2 (ja) 2000-01-12 2000-01-12 リニアモータ

Publications (3)

Publication Number Publication Date
JP2001197717A JP2001197717A (ja) 2001-07-19
JP2001197717A5 true JP2001197717A5 (hu) 2007-02-22
JP4478905B2 JP4478905B2 (ja) 2010-06-09

Family

ID=18532587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000003682A Expired - Fee Related JP4478905B2 (ja) 2000-01-12 2000-01-12 リニアモータ

Country Status (1)

Country Link
JP (1) JP4478905B2 (hu)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6803682B1 (en) * 2002-02-21 2004-10-12 Anorad Corporation High performance linear motor and magnet assembly therefor
US7291953B1 (en) 2002-02-21 2007-11-06 Anorad Corporation High performance motor and magnet assembly therefor
JP5711581B2 (ja) * 2011-03-25 2015-05-07 東京エレクトロン株式会社 プラズマ処理装置
CN103023269A (zh) * 2012-08-30 2013-04-03 江苏大学 一种单磁极磁通反向永磁直线电机
CN105656282B (zh) * 2016-02-01 2017-12-01 重庆理工大学 一种具有嵌入式位置检测装置的直线永磁伺服电机
CN107124084B (zh) * 2017-06-09 2023-07-25 浙江理工大学 一种永磁直线同步电机非均匀混合永磁体励磁拓扑结构
JP6961132B1 (ja) * 2021-03-29 2021-11-05 三菱電機株式会社 着磁装置

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