JP2001197717A5 - - Google Patents

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Publication number
JP2001197717A5
JP2001197717A5 JP2000003682A JP2000003682A JP2001197717A5 JP 2001197717 A5 JP2001197717 A5 JP 2001197717A5 JP 2000003682 A JP2000003682 A JP 2000003682A JP 2000003682 A JP2000003682 A JP 2000003682A JP 2001197717 A5 JP2001197717 A5 JP 2001197717A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000003682A
Other languages
Japanese (ja)
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JP4478905B2 (ja
JP2001197717A (ja
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Publication date
Application filed filed Critical
Priority to JP2000003682A priority Critical patent/JP4478905B2/ja
Priority claimed from JP2000003682A external-priority patent/JP4478905B2/ja
Publication of JP2001197717A publication Critical patent/JP2001197717A/ja
Publication of JP2001197717A5 publication Critical patent/JP2001197717A5/ja
Application granted granted Critical
Publication of JP4478905B2 publication Critical patent/JP4478905B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000003682A 2000-01-12 2000-01-12 リニアモータ Expired - Fee Related JP4478905B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000003682A JP4478905B2 (ja) 2000-01-12 2000-01-12 リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000003682A JP4478905B2 (ja) 2000-01-12 2000-01-12 リニアモータ

Publications (3)

Publication Number Publication Date
JP2001197717A JP2001197717A (ja) 2001-07-19
JP2001197717A5 true JP2001197717A5 (enrdf_load_stackoverflow) 2007-02-22
JP4478905B2 JP4478905B2 (ja) 2010-06-09

Family

ID=18532587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000003682A Expired - Fee Related JP4478905B2 (ja) 2000-01-12 2000-01-12 リニアモータ

Country Status (1)

Country Link
JP (1) JP4478905B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6803682B1 (en) * 2002-02-21 2004-10-12 Anorad Corporation High performance linear motor and magnet assembly therefor
US7291953B1 (en) 2002-02-21 2007-11-06 Anorad Corporation High performance motor and magnet assembly therefor
JP5711581B2 (ja) 2011-03-25 2015-05-07 東京エレクトロン株式会社 プラズマ処理装置
CN103023269A (zh) * 2012-08-30 2013-04-03 江苏大学 一种单磁极磁通反向永磁直线电机
CN105656282B (zh) * 2016-02-01 2017-12-01 重庆理工大学 一种具有嵌入式位置检测装置的直线永磁伺服电机
CN107124084B (zh) * 2017-06-09 2023-07-25 浙江理工大学 一种永磁直线同步电机非均匀混合永磁体励磁拓扑结构
JP6961132B1 (ja) * 2021-03-29 2021-11-05 三菱電機株式会社 着磁装置

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