JP2001195788A - Method for manufacturing disk-shaped optical recording medium and handling device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently deposit high-accuracy recording layers, etc., on disk substrates by expelling the sputter flakes peeled from mask members. SOLUTION: Mounting of the disk substrates 2 to be carried into and out of a deposition device with respect to the holder section 13 of the pallet 11 and taking out of the disk substrates 2 formed with the recording parts 5, etc., are carried out by a handling device 20. The handling device 20 mounts the disk substrates 2 by a mounting head 22 to holder sections 13 by means of the mask members 16 and 17 and removes the sputter flakes 19, etc., sticking to the disk substrates 2 by executing air flow to the disk substrates by a cleaning head 23. The disk substrates 2 are subjected to film making of the recording parts 5, etc., in this state.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a disk-shaped optical recording medium such as an optical disk or a magneto-optical disk, and a handling apparatus. The present invention relates to a handling device suitable for use in performing this handling.

[0002]

2. Description of the Related Art A disk-shaped optical recording medium has a recording portion formed of a functional film such as a recording layer or a reflection layer formed on a transparent disk substrate formed of a polycarbonate resin, glass, or the like. Recording or reproduction of an information signal or the like is performed. The disc-shaped optical recording medium is a reproduction type (RO
(M-type) digital audio disks, optical video disks (laser disks), recording / reproducing (RAM-type) magneto-optical disks, phase-change optical disks, and the like have been put to practical use.

[0003] Generally, in a reproduction type optical disk, an uneven pre-bit corresponding to an information signal or the like is formed at a depth of about 1/4 wavelength of a reproduction laser beam on a disk substrate, and a reflection film covering the pre-bit is formed. A film is formed.
The reproduction type optical disc reproduces an information signal or the like by utilizing the fact that when the irradiated laser light is reflected by the reflection film, the reflectivity changes due to light interference by the pre-bit.

In a recording / reproducing optical disk, for example, a magneto-optical disk, information signals and the like are recorded by an optical pickup for emitting laser light and a magnetic head for applying a magnetic field. The magneto-optical disk has a recording unit having a four-layer structure in which a recording magnetic film layer is covered with a dielectric film and a reflection film on a disk substrate. For a magneto-optical disk, the recording magnetic film is T
A dielectric film composed of a bFeCo film, which prevents oxidation of the recording magnetic film layer and enhances a magneto-optical signal by multiple interference, is composed of, for example, a SiN film, and a reflective film is composed of an Al film. In a magneto-optical disk, a recording unit is magnetized in an upward or downward direction by a magnetic head according to an information signal or the like. The magneto-optical disk reproduces information signals and the like by detecting the rotation angle (Kerr rotation angle) when the reflected laser light of the irradiated laser light is magnetically affected and linearly polarized.

A phase-change optical disk records information signals and the like by changing the recording layer from a crystalline state to an amorphous state according to the information signals and the like. The phase-change optical disk reproduces an information signal or the like by detecting a change in reflectivity due to a state of a recording layer of a laser beam. The phase-change type optical disk also has a four-layered recording unit in which a phase-change film is covered with a dielectric film and a reflective film, and is formed on a disk substrate. The phase-change optical disk has a phase-change film made of a GeSbTe film, and a dielectric film for preventing oxidation of the phase-change film and enhancing a magneto-optical signal by multiple interference is made of, for example, transparent ZnS-Si.
The reflection film is made of an Al film, and the reflection film is made of an O ₂ film.

A phase-change optical disk is generally formed by forming a recording layer or the like on the main surface of a disk substrate by a film forming apparatus such as a sputtering apparatus or a vacuum evaporation apparatus, and then coating a protective layer made of an ultraviolet curable resin by a spin coating method. And the like. When forming a recording layer or the like on a disk substrate by a film forming apparatus, a phase change optical disk is loaded with a large number of disk substrates on a pallet and carried into the film forming apparatus.

[0007] The pallet is formed in a disk shape as a whole, and a plurality of holder portions for mounting the respective disk substrates are formed concentrically. Each disk board is
It is mounted and held in the holder via an inner peripheral mask member that covers the inner peripheral part and an outer peripheral mask member that covers the outer peripheral part. In each disk substrate, an inner peripheral portion and an outer peripheral portion covered by the inner peripheral mask member and the outer peripheral mask member are non-film formation regions of the recording layer.

Each disk substrate is mounted on and removed from the pallet holder by the handling device. The handling device simultaneously attaches and detaches the inner and outer mask members to and from the holder portion when attaching and detaching the disk substrate. The handling device is
For example, the inner peripheral mask member and the outer peripheral mask member are simultaneously attracted and held together with the disk substrate by vacuum suction.

[0009]

By the way, in the conventional method of manufacturing a phase change type optical disk, when forming a film such as a recording layer as described above, the film formation area such as the recording layer is regulated and the disk is formed. An inner mask member and an outer mask member that hold the substrate are used. The inner peripheral mask member and the outer peripheral mask member are used continuously when the disk substrate on which the film forming process has been performed is removed from the holder and the non-film forming disk substrate is mounted on the holder. A film forming material such as a recording layer adheres to the surface of the inner peripheral mask member and the outer peripheral mask member by the previous film forming process, so that a so-called sputter flake is formed.

For this reason, in the conventional method of manufacturing a phase-change optical disk, when a non-film-forming disk substrate is mounted on a holder of a pallet by a handling device, a sputtering device formed on an inner peripheral mask member or an outer peripheral mask member is used. In some cases, the flakes peeled off and adhered to the surface of the non-film-formed disk substrate. In a conventional method of manufacturing a phase-change optical disk, when a recording layer or the like is formed on a disk substrate in this state, a recording layer or the like having a uniform thickness is not formed and a pin is formed. Generate holes and the like. Such a phase-change type optical disk has a problem that a pinhole or the like has a great effect on recording / reproducing characteristics of an information signal or the like and reliability is deteriorated.

In the conventional method for manufacturing a phase-change optical disk, a projection or the like is formed when a protective layer is formed on a recording layer or the like. Such a phase-change type optical disk causes a problem that not only the appearance is impaired by a projection or the like, but also the magnetic head is damaged. Therefore, the conventional method for manufacturing a phase-change optical disk has a problem in that the yield in the process of forming a recording layer or the like is poor. Such a problem occurs not only in the phase change type optical disk but also in the above-mentioned other disk-shaped optical recording medium manufacturing processes.

Accordingly, the present invention solves the above-mentioned conventional problems, and eliminates the influence of sputter flakes to enable efficient formation of a highly accurate recording layer or the like. It has been proposed for the purpose of providing a medium manufacturing method and a handling device.

[0013]

A disk optical recording medium manufacturing method according to the present invention, which achieves the above-mentioned objects, comprises a step of setting up a large number of disk substrates formed in a disk substrate forming step. After forming an intermediate by performing a film forming process of a recording layer or the like by a film apparatus, a step of supplying the intermediate to a next step through a post-processing step is included. The method for manufacturing a disc-shaped optical recording medium includes a plurality of holders on each of which a disk substrate is mounted in a setup step and a post-processing step, and a pallet carried in and out of a film forming apparatus; A handling apparatus including a mounting head for attaching and detaching a disk substrate to and from the unit and a cleaning head having an air blow mechanism and a vacuum mechanism is used.

According to the method of manufacturing a disk-shaped optical recording medium of the present invention, a disk mounting step of mounting each disk substrate on each holder of a pallet by a mounting head, and a cleaning head pressed against the holder. A cleaning process is performed in which air is blown to each disk substrate by an air blow mechanism while suction is performed by a vacuum mechanism to remove deposits on the main surface.
According to the method of manufacturing a disc-shaped optical recording medium, when a disk substrate is mounted on each holder of a pallet, a vacuum mechanism is used to remove attached substances and the like adhered to the surface of the pallet by air blow and not scatter around. Is sucked and discharged.

Therefore, according to the method for manufacturing a disc-shaped optical recording medium, a highly accurate recording layer or the like free of pinholes and projections can be efficiently formed on a disk substrate. . Further, according to the method for manufacturing a disc-shaped optical recording medium, for example, even when the inner peripheral mask member and the outer peripheral mask member that hold the disk substrate in the holder portion and regulate the film formation region of the recording layer are used continuously. The sputter flakes adhered to the inner and outer peripheral mask members are prevented from adhering to the disk substrate, and a highly accurate recording layer and the like can be efficiently formed.

Further, the apparatus for handling a disc-shaped optical recording medium according to the present invention, which achieves the above-mentioned object, carries a large number of formed disk substrates into a film forming apparatus to perform a film forming process for a recording layer or the like. After forming the intermediate, the intermediate is carried out of the film forming apparatus, and is used in a manufacturing process of a disc-shaped optical recording medium for supplying the intermediate to the next step. In a disk-shaped optical recording medium handling apparatus, a plurality of holders are provided, and disk substrates are respectively mounted on holders of a pallet which is inserted into and removed from a film forming apparatus. The disc-shaped optical recording medium handling device includes a mounting head having a vacuum suction mechanism and a disk substrate for each holder of the pallet, and a cleaning head having an air blow mechanism and a vacuum mechanism. Is done.

According to the disk-shaped optical recording medium handling apparatus of the present invention configured as described above, the cleaning head is mounted on the pallet while the disk substrates are mounted on the pallet by the mounting head. Is crimped. In this state, the handling device for the disk-shaped optical recording medium removes the deposits attached to the main surface of the disk substrate by performing air blowing on the disk substrate with the air blowing mechanism while performing suction with the vacuum mechanism. According to the disk-shaped optical recording medium handling device, the adhering matter removed from the disk substrate by the air blow is sucked and discharged by the vacuum mechanism without scattering to the surroundings.

According to the apparatus for handling a disk-shaped optical recording medium, a pallet having the disk substrate subjected to the above-described processing mounted on each holder is carried into the film forming apparatus, and the recording layer is applied to each disk substrate. And so on. Therefore, according to the apparatus for handling a disc-shaped optical recording medium, it is possible to efficiently form a high-precision recording layer or the like having no pinholes or projections on a disk substrate. Further, according to the disk-shaped optical recording medium handling apparatus, for example, even when the inner peripheral mask member and the outer peripheral mask member that hold the disk substrate in the holder and regulate the film formation region of the recording layer are used continuously. The sputter flakes adhered to the inner and outer peripheral mask members are prevented from adhering to the disk substrate, and a highly accurate recording layer or the like is efficiently formed.

[0019]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the embodiment, as shown in FIG. 1, a diameter of 120 mm formed by joining a dummy substrate 3 to a disk substrate 2 and an overall thickness of 1.2 mm
This is an example of application to a phase change optical disk (hereinafter, simply referred to as an optical disk) 1. In the optical disk 1, a disk substrate 2 and a dummy substrate 3 are each formed of, for example, a transparent polycarbonate resin, and are joined by a curable adhesive 4. On the disk substrate 2, a recording unit 5 described in detail later is formed.

The optical disk 1 is manufactured through the steps shown in FIG. That is, in the manufacturing process of the optical disk 1, the disk substrate 2 formed in the disk substrate forming step in step 1 is set up in order to form the recording unit 5 in the film formation setting step in step 2, and then the step 3 is performed. Is formed. In the manufacturing process of the optical disc 1, after the recording portion 5 is formed, a predetermined post-processing process of Step 4 is performed, and a bonding process of Step 5 of bonding the dummy substrate 3 with the curable adhesive 4 is performed. . In the manufacturing process of the optical disc 1, in the commercialization process of step 6, for example, predetermined labeling, packaging, and the like are performed to commercialize the optical disc 1.

In the manufacturing process of the optical disk 1, each of the above-described processes is a main process. In the film forming setup process, the disk substrate 2 is mounted on the pallet 11 using the handling device 20 as described in detail later. Then, a disk mounting process of step 2-1 and a cleaning process of step 2-2 for removing the deposits and the like attached to the disk substrate 2 and keeping the disk substrate 2 in a clean state are performed.

The disk substrate 2 is formed into a disk shape having a center hole 2a by a molding die. A pre-groove 2c having a predetermined pattern is transferred and formed on one main surface 2b by a stamper provided in the molding die. Be done. As will be described in detail later, the disk substrate 2 has a recording portion 5 formed of a multilayer film on the main surface 2b and a protective layer 6 covering the recording portion 5. The recording unit 5
As shown in FIG. 1, on the main surface 2b, a recording layer 8, a second dielectric layer 9, and a reflective layer 10 are formed in this order by using a first dielectric layer 7 as a first layer. Be done.

The disk substrate 2 includes a first dielectric layer 7 and a second dielectric layer 9 each formed of transparent ZnS-SiO _2.
It is formed by a film. The disk substrate 2 has a recording layer 8
The phase change film is formed of a GeSbTe film. In the disk substrate 2, the reflection layer 10 is formed of an Al film. In the disk substrate 2, the recording unit 5 composed of the multilayer films 7 to 10 is formed on the main surface 2b in a vacuum atmosphere by a sputtering device.

As shown in FIGS. 1 and 4, an inner peripheral area 2d surrounding the center hole 2a and an outer peripheral area 2e along the outer peripheral edge of the disk substrate 2 are non-recording areas where the recording section 5 is not formed. . After the above-described recording section 5 is formed and formed on the disk substrate 2, the protective layer 6 is formed and formed by using, for example, an ultraviolet curable resin by a spin coating method. The disk substrate 2 has an overall thickness of approximately 0.6 mm in a state where the above-described layers are formed on the main surface 2b.

On the disk substrate 2, an adhesive 4 is applied to the protective layer 6.
Is applied, the dummy substrate 3 is bonded. The dummy substrate 3 is also formed into a disc shape having a center hole 3a and having a thickness of 0.6 mm and a diameter of 120 mm. The center hole 3a is aligned with the center hole 2a and is centered with respect to the disk substrate 2. The main surface 3b is joined.

Although the optical disk 1 is a single-sided optical disk constituted by bonding a dummy substrate 3 to a disk substrate 2, a double-sided optical disk formed by bonding a pair of disk substrates 2 on which a recording section 5 and the like are formed is shown. Of course, it may be. In this case, the optical disc 1 is bonded using the protective layer 6 or the reflective layer 10 as a bonding surface. The optical disk 1 is not limited to the recording unit 5 having the above-described configuration, and is not limited to a phase-change optical disk.

The disk substrate 2 is mounted on the pallet 11 by the handling device 20 shown in FIG.
Of each layer is performed. The pallet 11, as shown in FIGS. 3 to 6, is a disk member having a predetermined thickness that allows eight disk substrates 2 to be mounted at the same time. A fulcrum concave portion 12 formed in the center portion is fitted to the rotation shaft of the rotation drive mechanism. When the sputtering apparatus starts the sputtering operation, the pallet 11 is rotated by the rotation driving mechanism with the fulcrum recess 12 as a fulcrum, so that the film forming process on each disk substrate 2 is performed uniformly.

As shown in FIG. 5, the pallet 11 is provided with eight holders 13 formed on the main surface 11a of the pallet 11 and composed of circular recesses located on the same circumference centered on the fulcrum recess 12. I have. As shown in FIGS. 5 and 6, each holder portion 13 is formed to have an inner diameter slightly larger than the outer diameter of the disk substrate 2 and a depth substantially equal to its thickness. Each of the holder portions 13 is provided with a circular positioning concave portion 14 located at the center. The positioning recess 14 has an inside diameter substantially equal to the center hole 2a of the disk substrate 2, and is mounted in a state where the disk substrate 2 is positioned in the holder portion 13 via the inner peripheral mask member 17 as described later. To

Although the holder 13 has a positioning recess 14 corresponding to the center hole 2a and the disk substrate 2 is positioned via the inner peripheral mask member 17, the present invention is not limited to this configuration. Not. The holder unit 13
For example, a positioning projection may be integrally provided at the center of the disk substrate 2, and the disk substrate 2 may be positioned by directly fitting into the center hole 2a. The positioning projection is
The distal end portion may be formed to have a gradually decreasing diameter so as to be smoothly fitted into the center hole 2a.

As shown in FIGS. 4 and 6, a first magnet 15 and a second magnet 16, which are located in the respective holder portions 13 and have a ring shape, are embedded in the pallet 11. The first magnet 15 is buried so as to surround the positioning recess 14, and is constituted by a small-diameter magnet corresponding to the inner peripheral region 2 d of the disk substrate 2. First magnet 15
Holds the inner peripheral mask member 17 by suction as described later. The second magnet 16 is buried along the inner peripheral wall of the holder 13, and is constituted by a large-diameter magnet corresponding to the outer peripheral area 2 e of the disk substrate 2. The second magnet 16 attracts and holds the outer peripheral mask member 18 as described later.

The pallet 11 has the first magnets 15 and the second magnets 16 embedded in the respective holder portions 13, but the present invention is not limited to such a configuration. The pallet 11 may be configured by embedding a single disk-shaped or ring-shaped magnet having a size facing the respective holder portions 13, for example. Further, the pallet 11 may have a disc-shaped magnet embedded therein corresponding to each holder 13. Further, the pallet 11 may be configured such that the first magnet 15 and the second magnet 16 are configured by burying a plurality of arc-shaped magnets on the same circumference.

The pallet 11 has an attraction force of the first magnet 15 and the second magnet 16 or the other magnets described above with respect to the inner peripheral mask member 17 and the outer peripheral mask member 18 in each holder portion 13. It is preferable to be acted evenly in the circumferential direction. The inner peripheral mask member 17 and the outer peripheral mask member 18 are formed of a ferromagnetic material so as to be attracted and held in the holder portion 13 by the first magnet 15 and the second magnet 16.

As described above, the inner peripheral mask member 17 is formed in the inner peripheral area 5d where the recording portion 5 of the disk substrate 2 is not formed.
Is formed in a disk shape having an outer diameter sufficient to cover the substrate. As shown in FIG. 4, a fitting projection 17a corresponding to the positioning recess 14 is formed at the center of the inner peripheral mask member 17. As shown in FIG. 6, when the disk substrate 2 is mounted in the holder 13 as shown in FIG.
It is fitted into the positioning recess 14. Inner circumference mask member 17
Are combined with each other while being positioned with respect to the disk substrate 2, and are attracted to the first magnet 15 to hold the inner peripheral portion of the disk substrate 2.

As described above, the outer peripheral mask member 18 is formed on the outer peripheral area 5e where the recording portion 5 of the disk substrate 2 is not formed.
And a ring shape having an outer diameter slightly smaller than the inner diameter of the holder portion 13. The outer peripheral mask member 18 is positioned with respect to the disk substrate 2 by the outer peripheral portion being restricted by the inner peripheral wall of the holder portion 13 when the disk substrate 2 is mounted in the holder portion 13 as shown in FIG. While being assembled in this state, it is attracted to the second magnet 16 and holds the outer peripheral portion of the disk substrate 2.

Inner peripheral mask member 17 and outer peripheral mask member 1
8 holds the disk substrate 2 in each holder portion 13 by being attracted by the first magnet 15 and the second magnet 16 as described in detail later,
Only the formation area of the recording section 5 of each disk substrate 2 is exposed. Inner peripheral mask member 17 and outer peripheral mask member 1
Reference numeral 8 is used when each disk substrate 2 is mounted on the pallet 11, and is removed after the recording unit 5 is formed on each disk substrate 2.

Inner peripheral mask member 17 and outer peripheral mask member 18
Is used continuously when each new disk substrate 2 is mounted on the pallet 11 in order to increase the efficiency of the film forming process and reduce costs. Since the inner peripheral mask member 17 and the outer peripheral mask member 18 are not particularly subjected to a cleaning step, when reused, spatter flakes 19 are attached to the surfaces thereof as shown in FIG. Therefore, a part of the sputter flakes 19 is easily separated and scattered from the inner peripheral mask member 17 and the outer peripheral mask member 18.

The handling device 20 is configured such that the recording unit 5 is formed on the disk substrate 2 by the sputtering device in a state where sputter flakes 19 peeled off from the inner peripheral mask member 17 and the outer peripheral mask member 18 are removed as described later. I do. Although not described in detail, the handling device 20 is reciprocated between the supply portion of the disk substrate 2 and the mounting portion on the pallet 11, and the disk device 2 is mounted on the pallet 11 and the recording portion 5 is moved from the pallet 11. The formed disk substrate 2 is taken out. The handling device 20 includes a robot arm 21 as shown in FIG.
A mounting head 22 for attaching and detaching the disk substrate 2 to and from the pallet 11, and a cleaning head 2 for removing sputter flakes 19 attached to the main surface 2b of the disk substrate 2.
3 are provided.

In the handling device 20, the robot arm 21 is connected to the supply section of the disk substrate 2 and the pallet 1
A drive mechanism (not shown) is provided for moving between the mounting unit and the mounting unit 1. Although not described in detail, the handling device 20 is provided with a vacuum pump 24, which causes the mounting head 22 to generate vacuum suction characteristics as described later. Although not described in detail, the handling device 20 is provided with a vacuum pump 25 and a blow pump 26, and causes the cleaning head 23 to generate exhaust characteristics and air blow characteristics as described later.

The handling device 20 is driven by controlling these driving mechanisms, vacuum pumps and the like at a predetermined timing by a control unit (not shown). In the handling device 20, the vacuum pump 24, the vacuum pump 25, and the blow pump 26 are configured by, for example, one vacuum pump, and the mounting head 22 and the cleaning head are switched by switching the air flow path via a valve mechanism. The above-described characteristics may be generated for the head 23.

As shown in FIGS. 3 and 7, the mounting head 22 is supported on the robot arm 21 via a drive mechanism (not shown) so as to be able to freely contact and separate from the pallet 11. The mounting head 22 includes a shaft base 28 in which an intake hole 27 communicated with the vacuum pump 24 is formed, and a substantially cup-shaped suction head 29 formed integrally with a tip of the shaft base 28. Consists of The suction head portion 29 has therein a suction space portion 29a slightly larger than the outer diameter and thickness of the disk substrate 2.

The suction head 27 of the mounting head 22 has an opening in the suction space 29a. When the vacuum pump 24 is driven, the suction space 29a is brought into a negative pressure state to hold the disk substrate 2 by suction. . The mounting head 22
The vacuum attraction to the disk substrate 2 is larger than the magnetic attraction applied between the inner peripheral mask member 17 and the first magnet 15 and between the outer peripheral mask member 18 and the second magnet 16. Therefore, the mounting head 22 is mounted on the pallet 11 on which the disk substrate 2 is mounted, as will be described later.
When the vacuum pump 24 is driven by being pressed against the disk substrate 3, the disk substrate 2 is taken out from the holder 13.

The mounting head 22 configured as described above
Is used in the film formation setup step and the post-processing step as described above. More specifically, the mounting head 22 performs a series of disk substrate mounting operations shown in FIG.
Is mounted on the holder 13 of the pallet 11. In this case, the mounting head 22 mounts the disk substrate 2 on the predetermined holder 13 via the inner peripheral mask member 17 and the outer peripheral mask member 18 as described above.

The mounting head 22 is located at a position corresponding to the supply section of the disk substrate 2 via the robot arm 21 (s-
1). In this state, the vacuum pump 24
Is activated, a vacuum suction force is generated in the suction space 29a of the suction head 29 (s-2). The mounting head 22 includes the inner peripheral mask member 17 and the outer peripheral mask member 1.
8 is vacuum-sucked into the suction space 29a (s-3).
When the disk substrate 2 is supplied to the mounting head 22 in this state, the disk substrate 2 is vacuum-sucked into the suction space 29a (s-4).

The mounting head 22 is moved to the pallet 11 by driving the robot arm 21 (s).
-5). The mounting head 22 moves from the robot arm 21 to the pallet 11 side, and the suction head unit 29 is abutted against the main surface 11a corresponding to the predetermined holder unit 13, thereby aligning the mounted disk substrate 2 ( s-6). The disk substrate 2 is positioned with respect to the holder portion 13 by aligning the center hole 2a of the disk substrate 2 with the positioning concave portion 14 via the fitting convex portion 17a of the inner peripheral mask member 17. When the vacuum pump 24 stops in this state, the mounting head 22 releases the vacuum suction force to the disk substrate 2 and the inner and outer peripheral mask members 17 and 18 (s-7).

Inner peripheral mask member 17 and outer peripheral mask member 18
Means that the magnetic force is applied from the first magnet 15 and the second magnet 16 to move from the mounting head 22 to the holder portion 13 and to be sucked and held therein (s-
8). The disk substrate 2 is also positioned in the positioning recess 14 via the inner peripheral mask member 17, and moves into the holder 13 together with the inner peripheral mask member 17 and the outer peripheral mask member 18. The disk substrate 2 has an inner peripheral mask member 17 magnetically attracted by the first magnet 15 and the second magnet 16.
Is held in the holder portion 13 by being sandwiched by the outer peripheral mask member 18. When the pallet 11 is driven, the mounting head 22 is positioned corresponding to the next holder 13 (s-9). The mounting head 22 sequentially mounts the disk substrate 2 on the holder 13 of the pallet 11 by repeating the above-described operation.

The mounting head 22 carries out a series of disk substrate removal operations shown in FIG.
Remove from 3. The mounting head 22 is moved to the pallet 11 by driving the robot arm 21, and the suction head unit 29 is abutted against the main surface 11a corresponding to the predetermined holder unit 13 (s-10). The mounting head 22 generates a vacuum suction force in the suction space 29a by driving the vacuum pump 24 in this state (s-11).

The mounting head 22 separates the inner peripheral mask member 17 and the outer peripheral mask member 18 from the holder portion 13 against the magnetic force of the first magnet 15 and the second magnet 16 by the vacuum suction force. Then, it is vacuum-sucked into the suction space 29a together with the disk substrate 2 (s-12).
The mounting head 22 is moved to the next process disk substrate supply unit by driving the robot arm 21 while holding the disk substrate 2 by suction (s-13). In the mounting head 22, the vacuum pump 24 is stopped (s-1).
4), the held disk substrate 2 is taken out (s-15). The mounting head 22 sequentially takes out the disk substrates 2 from the holder 13 of the pallet 11 and supplies them to the next process by repeating the above-described operation.

The cleaning head 23 is also shown in FIGS.
As shown in FIG. 3, the robot arm 21 is supported so as to be freely movable toward and away from the pallet 11 via a drive mechanism (not shown). The cleaning head 23 has an exhaust port 30 formed in communication with the vacuum pump 25 and an axial base 32 into which a blow pipe 31 communicated with the blow pump 26 is inserted, and a distal end of the axial base 32. And a substantially cup-shaped cleaning head 33. The cleaning head unit 33 has a large-diameter exhaust head unit 34 which is concentric with each other and is substantially cup-shaped.
And a small diameter blow head 35.

The exhaust head 34 has a diameter slightly larger than the outer diameter of the holder 13 of the pallet 11, and an exhaust hole 30 is opened therein to form an exhaust space 34a. The exhaust head portion 34 is formed, for example, by thinning at least the opening edge so that the opening edge is elastically deformed and brought into close contact with the main surface 11a in a state of being pressed against the main surface 11a of the pallet 11 as described later. The exhaust space 34a may be sealed. Exhaust head 3
4 exhausts the exhaust space portion 34a by driving the vacuum pump 25.

The blow head section 35 has substantially the same diameter as the outer diameter of the holder section 13 of the pallet 11, and a nozzle 31a formed at the tip of the blow pipe 31 faces the inside thereof. Is configured. As shown in FIG. 8, the opening edge of the blow head section 35 is located slightly inside the opening edge of the exhaust head section 34. Therefore, when the exhaust head portion 34 is pressed against the main surface 11a of the pallet 11, the opening edge of the blow head portion 35 is located slightly inward from the main surface 11a, and the outer peripheral portion has an annular exhaust space portion. 34a.

The blow head section 35 includes the blow pump 26
Is driven to blow air from the nozzle 31a of the blow pipe 31 into the blow space 35a. The blow head unit 35 is provided with a voltage reducer (not shown) between the blow pump 26 and the blow pipe 31 so that the air that has been gradually discharged from the nozzle 31a is blown into the blow space 35a.

The cleaning head 23 configured as described above is used in the cleaning step of the film formation setup step as described above. Cleaning head 23
Specifically, by performing a series of cleaning operations shown in FIG. 10, an adhering substance adhering to the main surface of the disk substrate 2,
The scatterer flakes 19 adhered to the inner peripheral mask member 17 and the outer peripheral mask member 17 and separated at the above-described mounting operation on the pallet 11 and adhered to the disk substrate 2 are removed.

When the operation of mounting the disk substrate 2 on the holder 13 of the pallet 11 by the mounting head 22 is completed, the cleaning head 23
(T-1). The cleaning head 23 projects from the robot arm 21 toward the pallet 11 so that the cleaning head 33
a (t-2). Cleaning head 23
As a result, the opening edge of the cleaning head section 33 is brought into close contact with the outer peripheral edge of the holder section 13 to seal the exhaust space section 34a.

When the vacuum pump 25 is started, the cleaning head 23 puts the exhaust space 34a into a negative pressure state and sucks the internal air from the exhaust holes 30 (t-3). The cleaning head 23 performs the air blow from the nozzle 31a of the blow pipe 31 into the blow space 35a when the blow pump 26 is started slightly later than the start of the vacuum pump 25 (t).
-4). The cleaning head 23 includes the nozzle 31a
The air blow blows off the scatterer flakes 19 adhered to the surface of the disk substrate 2 to blow them out and discharges the scatterer flakes 19 to the outside through the exhaust space 34a. Cleaning head 23
The cleaning of the disk substrate 2 is performed without causing the scatterer flakes 19 to be scattered by the close contact of the exhaust head section 34 with the main surface 11a of the pallet 11 as described above (t-5).

When the cleaning operation described above is completed, the blow pump 26 is stopped, and the air blowing operation for the disk substrate 2 is completed (t-6). Cleaning head 23
Is slightly delayed from the stop of the blow pump 26, the vacuum pump 25 is stopped.
The exhaust operation from is ended (t-7). Thereafter, the cleaning head 23 is separated from the pallet 11 and returns to the initial position, and the pallet 11 rotates to be positioned corresponding to the next holder 13 (t-8). The cleaning head 23 repeatedly performs a cleaning operation on a plurality of disk substrates 2 mounted on the pallet 11 below.

As described above, the handling device 20 allows each holder 13 of the pallet 11 to be moved by the mounting head 22.
After the disk substrates 2 are mounted on the disk substrates 2, respectively, cleaning is performed by the cleaning head 23 to remove the deposits attached to the disk substrates 2 and the scatterer flakes 19. The handling device 20 moves the pallet 1 in this state.
1 is loaded into the sputtering apparatus and each disk substrate 2
The recording process of the recording unit 5 is performed. Therefore, by forming a predetermined film on the main surface of each disk substrate 2 in a clean state free from foreign matter, a high-precision recording unit 5 free of pinholes and projections is formed. . In each disk substrate 2, the inner peripheral region 2 d and the outer peripheral region 2 e are covered with the inner peripheral mask member 17 and the outer peripheral mask member 18 so that these regions are covered by the recording unit 5.
Is a non-forming region.

The optical disk is cleaned by using the above-described handling device 20 under the following conditions to produce 160 optical disks of Examples 1 to 3, and the optical disk of the comparative example according to the conventional method is manufactured. Made. 8 for each optical disc
Five pallets 11 having individual holders 13 were used, and these were used sequentially and continuously. Each optical disc 1 has a thickness of 0.6 mm by polycarbonate resin,
A disk substrate 2 having a diameter of 120 mm was used, and four layers of recording portions 5 were formed by a sputtering apparatus.

In each optical disk 1, the recording portion 5, specifically, the first dielectric layer 7 is made of transparent ZnS having a thickness of 100 nm.
Formed by -SiO ₂ film, the recording layer 8 thickness 30n
The second dielectric layer 9 is formed of a transparent ZnS—SiO ₂ film having a thickness of 20 nm. Each optical disc 1 has a reflective layer 10 of 100n.
m of Al. After forming the recording portion 5 and the reflective layer 10 on each optical disk 1, a protective layer 6 is formed by applying an ultraviolet curable resin to the average thickness of 8 μm by spin coating.

In the optical disk of the first embodiment, the disk substrate 2 is mounted in the holder 13 of the pallet 11 and the nozzles 31a through 196k of the blow head 35 are mounted.
A cleaning process was performed in which the air slowly charged at a pressure of pa (2 kgf / cm2) was blown into the blow space 35a for 10 seconds to remove the scatterer flakes 19 and the like attached to the disk substrate 2. Handling device 20
Is set so that the exhaust process by the exhaust head unit 34 is not performed during the cleaning process, and is not brought into close contact with the main surface 11a of the pallet 11.

In the optical disk of the second embodiment, when the disk substrate 2 is mounted in the holder 13 of the pallet 11, the nozzle
A cleaning process was performed in which the air slowly charged at a pressure of pa (2 kgf / cm2) was blown into the blow space 35a for 10 seconds to remove the scatterer flakes 19 and the like attached to the disk substrate 2. Handling device 20
In the example, the exhaust processing was performed by the exhaust head unit 34 during the cleaning processing, but was set so as not to be in close contact with the main surface 11 a of the pallet 11.

In the optical disk of the third embodiment, the disk substrate 2 is mounted in the holder 13 of the pallet 11 and the nozzles 31a through 196k of the blow head 35 are mounted.
A cleaning process was performed in which the air slowly charged at a pressure of pa (2 kgf / cm2) was blown into the blow space 35a for 10 seconds to remove the scatterer flakes 19 and the like attached to the disk substrate 2. Handling device 20
Is set to a state in which the exhaust processing by the exhaust head unit 34 is performed during the cleaning processing, and the pallet 11 is in close contact with the main surface 11a.

The cleaning conditions for the 160 optical disks of Example 1 to 3 and the optical disk of Comparative Example manufactured as described above are shown in Table 1.
It is as follows. In Table 1, a circle indicates a case where the condition in the left column is set, and a cross indicates a case where the condition in the left column is not set.

[0063]

[Table 1]

The measurement was performed by a disk inspection machine on 160 optical disks of Example 1 to 3 and the optical disk of Comparative Example manufactured under the above-described cleaning conditions, and a protrusion of 5 μm or more was formed on the surface of the protective layer 10. The number of generated protective layer defects was counted.
The results of the counting are as shown in Table 2. Table 2
In the above, the total number of protrusions of the protective layer is the total number generated on 160 sheets.

[0065]

[Table 2]

As is apparent from Table 2, according to the conventional method (Comparative Example), it was confirmed that as many as 95 protective layer defects were generated in 160 optical disks in total. In the optical disc of Example 1, 73 protective layer defects were counted in total. In the first embodiment, as described above, the cleaning process of simply blowing air to the disk substrate 2 without performing the exhaust and the sealing of the blow space portion 35a is performed. Therefore, in the first embodiment, the subtta flakes 19 and the like once removed by the air blow are reused for the disk substrate 2.
To cause a defect in the protective layer.

In the optical disk of the second embodiment, there are 37 protective layer defects in total, and the number of occurrences is smaller than that of the comparative example and the first embodiment. In Example 2,
As described above, the cleaning process of simply performing air blowing on the disk substrate 2 while performing exhaust while the sealing of the blow space portion 35a is not performed is performed. Therefore, in the second embodiment, the effect of removing the scatterer flakes 19 and the like adhered to the disk substrate 2 by the air blow and discharging the scatterer flakes 19 to the outside is achieved. Is attached to the disk substrate 2 to cause a protective layer defect.

On the other hand, the optical disk of Example 3 had a total of 16 protective layer defects, and the number of occurrences was significantly reduced as compared with the comparative example and Examples 1 and 2 described above. I have. In the third embodiment, as described above, the cleaning process is performed in which the air is simply blown to the disk substrate 2 while the air is exhausted while the blow space 35a is sealed. Therefore, in the third embodiment, the blaster flakes 19 and the like adhered to the disk substrate 2 are removed by the air blow, and are reliably discharged to the outside without being scattered to other holder portions 13 and the like. The film forming process of the recording unit 5 is performed while being kept in a good state.

[0069]

As described above in detail, according to the method of manufacturing a disc-shaped optical recording medium according to the present invention, a plurality of holders to which disk substrates are respectively mounted are provided and a film forming apparatus is provided. And a handling device having a cleaning head having an air blow mechanism and a vacuum mechanism, and a mounting head for attaching and detaching a disk substrate to and from each holder, respectively. A disk mounting process of mounting each of the pallets on each holder portion of the pallet, and performing air blowing on each disk substrate by an air blowing mechanism while performing suction with a vacuum mechanism while the cleaning head is pressed against the holder portion. The cleaning process to remove the adhering matter is applied to the disk substrate. In mounting each holder portion of the pallet, deposits or the like adhering to the surface is to be discharged is sucked by a vacuum mechanism without scattered around while being removed by air blow. Therefore, according to the method for manufacturing a disc-shaped optical recording medium, a highly accurate recording layer or the like free of pinholes and projections is efficiently formed on a disk substrate. Further, according to the method for manufacturing a disc-shaped optical recording medium, for example, even when the inner peripheral mask member and the outer peripheral mask member that hold the disk substrate in the holder portion and regulate the film formation region of the recording layer are used continuously. The sputter flakes adhered to the inner and outer peripheral mask members are prevented from adhering to the disk substrate, and a highly accurate recording layer and the like can be efficiently formed.

Further, according to the disk-shaped optical recording medium handling apparatus of the present invention, a mounting head having a vacuum suction mechanism and attaching and detaching a disk substrate to and from each holder of a pallet, an air blow mechanism and a vacuum And a cleaning head having a mechanism, a plurality of holder portions are provided, and the disk substrates are respectively mounted on the respective holder portions of the pallet inserted into and removed from the film forming apparatus. In a disk-shaped optical recording medium handling device, the cleaning head is pressed against the holder portion while the respective disk substrates are mounted on the respective holder portions of the pallet by the mounting head, and suction is performed by the vacuum mechanism. The air blow mechanism performs air blow to remove the deposits attached to the main surface, so the deposits removed from the disk substrate by the air blow are sucked by the vacuum mechanism without being scattered around and reliably discharged. I do. Therefore, according to the apparatus for handling a disc-shaped optical recording medium, it is possible to efficiently form a high-precision recording layer or the like having no pinholes or projections on a disk substrate. Further, according to the disk-shaped optical recording medium handling apparatus, for example, even when the inner peripheral mask member and the outer peripheral mask member that hold the disk substrate in the holder and regulate the film formation region of the recording layer are used continuously. ,
The sputter flakes adhering to the inner and outer mask members are prevented from adhering to the disk substrate, and a highly accurate recording layer or the like is efficiently formed.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part of a phase change optical disk.

FIG. 2 is a main manufacturing process diagram of the optical disc.

FIG. 3 is a perspective view of an essential part for explaining a schematic configuration of a handling device used in a manufacturing process of the optical disc.

FIG. 4 is an exploded perspective view showing a pallet holder, a disk substrate mounted inside the pallet, and inner and outer peripheral mask members.

FIG. 5 is a plan view of a pallet showing a state in which a disk substrate, an inner peripheral mask member, and an outer peripheral mask member are mounted in some of the holder portions;

FIG. 6 is a longitudinal sectional view of a main part of the pallet.

FIG. 7 is an exploded vertical sectional view of a main part of a pallet holder and a mounting head on which a disk substrate is mounted.

FIG. 8 is a longitudinal sectional view of a main part of a pallet holder and a cleaning head.

FIG. 9 is a flowchart for explaining the operation of the mounting head for mounting and dismounting the disk substrate with respect to the holder portion of the pallet. FIG. 9A shows the mounting operation, and FIG. 9B shows the unloading operation.

FIG. 10 is a flowchart illustrating an operation of a cleaning head that cleans a disk substrate mounted on a pallet holder.

[Explanation of symbols]

1 optical disk, 2 disk substrate, 3 dummy substrate,
4 adhesive, 5 recording section, 6 protective layer, 10 reflective layer,
Reference Signs List 11 pallet, 13 holder part, 14 positioning concave part, 15 first magnet, 16 second magnet, 17 inner peripheral mask member, 18 outer peripheral mask member, 19 spatter flake, 20 handling device, 21 robot arm,
22 mounting head, 23 cleaning head, 24
Vacuum pump, 25 vacuum pump, 26 blow pump, 29 suction head, 31 blow pipe, 33
Cleaning head, 34 exhaust head, 35 blow head

Claims (8)

[Claims] An intermediate is formed by performing a film-forming process on a recording layer or the like by a film-forming apparatus through a setup process on a large number of disk substrates formed in a disk-substrate forming process, and then forming the intermediate. In a method for manufacturing a disc-shaped optical recording medium having a step of supplying to a next step through a post-processing step, the setup step and the post-processing step are provided with a plurality of holder portions to which the disk substrates are respectively mounted. A pallet that is carried in and out of the film forming apparatus, and a handling apparatus that includes a mounting head that detaches a disk substrate with respect to each of the holder units and a cleaning head that has an air blow mechanism and a vacuum mechanism are used. In the setup step, the disk heads are mounted on the holders of the pallet by the mounting head. A disk mounting step, and air suction is performed by the air blow mechanism on the disk substrates while suction is performed by the vacuum mechanism in a state in which the cleaning head is pressed against the holder portion, to remove adhered substances on the main surface. A method for producing a disc-shaped optical recording medium, which comprises performing a cleaning step. 2. The disk substrate, wherein an inner peripheral portion and an outer peripheral portion serving as a non-film-forming portion such as a recording layer are covered with an inner peripheral mask member and an outer peripheral mask member. 2. The method for manufacturing a disc-shaped optical recording medium according to claim 1, wherein the disc-shaped optical recording medium is mounted on each of the sections. 3. The disk drive according to claim 1, wherein the inner peripheral mask member and the outer peripheral mask member are formed of a magnetic material, and the disk substrate is mounted on the holder portion by being attracted by a magnet disposed on the pallet. The method for producing a disc-shaped optical recording medium according to claim 2. 4. The holder of the pallet is formed of a recess having an inner diameter slightly larger than the outer diameter of the disk substrate, and a center hole of the disk substrate is fitted into a positioning projection protruding from a central portion thereof. 2. The method for manufacturing a disc-shaped optical recording medium according to claim 1, wherein the disk substrate is mounted in a positioned state by the method. 5. A method in which a large number of molded disk substrates are carried into a film forming apparatus, subjected to film forming processing such as a recording layer to form an intermediate, and then carried out of the film forming apparatus. In a disc-shaped optical recording medium handling device used in a manufacturing process of a disc-shaped optical recording medium to be supplied to a next process, a plurality of holder portions to which the disc substrates are respectively mounted are provided, and the A pallet that is inserted and removed, a mounting head that has a vacuum suction mechanism, and attaches and detaches the disk substrate to and from each holder of the pallet, and a cleaning head that has an air blow mechanism and a vacuum mechanism, With the disk substrates being mounted on the holders of the pallet by the mounting head, the cleaning head is mounted on the holders. After removing the deposits on the main surface by performing air blowing with the air blowing mechanism on each of the disk substrates while performing suction by the vacuum mechanism while being attached, the pallet is carried into the film forming apparatus. An apparatus for handling a disk-shaped optical recording medium, characterized in that a film forming process is performed by using the same. 6. An inner mask member and an outer mask member for covering an inner peripheral portion and an outer peripheral portion of a non-film-forming portion such as a recording layer of the disk substrate, wherein the inner peripheral mask member and the outer peripheral mask member are provided. 6. The apparatus for handling a disc-shaped optical recording medium according to claim 5, wherein the mounting head mounts the disk substrate in a holder of the pallet via the mounting head. 7. A magnet is provided on a holder portion of the pallet, and the pallet is attached and held by sucking the inner peripheral mask member and the outer peripheral mask member formed of a magnetic material and sandwiching the disk substrate. 7. The apparatus for handling a disc-shaped optical recording medium according to claim 6, wherein: 8. The pallet holder comprises a concave portion having an inner diameter slightly larger than the outer diameter of the disk substrate, and a center hole of the disk substrate is positioned at a positioning portion provided at a central portion thereof. 6. The apparatus for handling a disc-shaped optical recording medium according to claim 5, wherein the substrate is mounted in a positioned state.