JP2001194311A5 - - Google Patents

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Publication number
JP2001194311A5
JP2001194311A5 JP2000325855A JP2000325855A JP2001194311A5 JP 2001194311 A5 JP2001194311 A5 JP 2001194311A5 JP 2000325855 A JP2000325855 A JP 2000325855A JP 2000325855 A JP2000325855 A JP 2000325855A JP 2001194311 A5 JP2001194311 A5 JP 2001194311A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000325855A
Other languages
Japanese (ja)
Other versions
JP2001194311A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000325855A priority Critical patent/JP2001194311A/ja
Priority claimed from JP2000325855A external-priority patent/JP2001194311A/ja
Publication of JP2001194311A publication Critical patent/JP2001194311A/ja
Publication of JP2001194311A5 publication Critical patent/JP2001194311A5/ja
Pending legal-status Critical Current

Links

JP2000325855A 1999-10-25 2000-10-25 基板検査装置 Pending JP2001194311A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000325855A JP2001194311A (ja) 1999-10-25 2000-10-25 基板検査装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-302802 1999-10-25
JP30280299 1999-10-25
JP2000325855A JP2001194311A (ja) 1999-10-25 2000-10-25 基板検査装置

Publications (2)

Publication Number Publication Date
JP2001194311A JP2001194311A (ja) 2001-07-19
JP2001194311A5 true JP2001194311A5 (US06573293-20030603-C00009.png) 2007-12-06

Family

ID=26563274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000325855A Pending JP2001194311A (ja) 1999-10-25 2000-10-25 基板検査装置

Country Status (1)

Country Link
JP (1) JP2001194311A (US06573293-20030603-C00009.png)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100556140B1 (ko) * 2002-05-30 2006-03-03 삼성코닝정밀유리 주식회사 유리기판의 검사 시스템
KR20050089731A (ko) * 2004-10-13 2005-09-08 동일파텍주식회사 액정표시장치용 매크로 검사장치
JP4578383B2 (ja) * 2005-10-25 2010-11-10 株式会社堀場製作所 パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム
KR100783618B1 (ko) * 2006-10-31 2007-12-07 (주)오엘케이 매크로 검사장치
JP5001681B2 (ja) * 2007-03-12 2012-08-15 株式会社日本マイクロニクス インライン自動検査装置及びインライン自動検査システム
JP5249645B2 (ja) * 2008-06-20 2013-07-31 大日本スクリーン製造株式会社 基板処理装置
CN107064171A (zh) * 2017-01-26 2017-08-18 江苏东旭亿泰智能装备有限公司 检查组装件、宏观检查系统以及相关的检查方法
CN113960072A (zh) * 2021-10-15 2022-01-21 德康威尔(苏州)智能科技有限公司 一种用于检测载玻片的直线模组
CN118566240A (zh) * 2024-07-29 2024-08-30 柯尔微电子装备(厦门)有限公司 半自动晶圆表面检查机以及晶圆检查方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3782525B2 (ja) * 1996-10-09 2006-06-07 オリンパス株式会社 基板検査装置
JPH10116869A (ja) * 1996-10-11 1998-05-06 Nikon Corp ウエハ検査装置
JP3907797B2 (ja) * 1997-09-19 2007-04-18 オリンパス株式会社 基板検査装置

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