JP2001185986A - Piezoelectric vibrator, piezoelectric oscillator and method for sealing the vibrator and oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sealing method which can prevent deformation of a cover when this body is sealed with an electronic beam and can yield a piezoelectric vibrator and a piezoelectric oscillator which have high quality. SOLUTION: In a method for sealing a piezoelectric vibrator, a piezoelectric vibration element 31, a base 32 which stores the element 31 and a metallic cover 33 which seals up the base 32 storing the element 31 are provided. The thickness of the cover 33 is set at about 0.02-0.05 mm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator having a piezoelectric vibrating element sealed by joining a base for accommodating a piezoelectric vibrating element and a lid for sealing the base. The present invention relates to an improvement in a piezoelectric oscillator and a sealing method thereof.

[0002]

2. Description of the Related Art FIG. 10 is a partially cut perspective view showing an example of a general piezoelectric vibrator.

The piezoelectric vibrator 10 has a box-shaped base 12 having a space 12a for accommodating a plate-shaped piezoelectric vibration element 11, and a plate-like base 12 joined to the base 12 so as to seal the space 12a. Is provided. The piezoelectric vibrating element 11 is connected and fixed via an adhesive (not shown) to an electrode 14 provided at one end 11a in a step portion integrally provided in the space 12a, and the other end 11b is connected to a free end. Have been. The base 12 and the lid 13 are joined via a sealing material (a brazing material) 15.

Here, for example, quartz is used as the material of the piezoelectric vibrating element 11, ceramic such as alumina is used as the material of the base 12, and metal such as kovar or alumina is used as the material of the lid 13. And the like are used. As a material of the sealing material 15, low melting glass, silver brazing, solder, AuSn, nickel, or the like is used. That is, the piezoelectric vibrator 1
0 is specifically manufactured by the steps shown in the flowchart of FIG.

In FIG. 1, first, a base 12 is formed of a ceramic material such as alumina, and a piezoelectric vibrator 10 is formed.
The electrode portion is formed by, for example, plating or the like (ST1).

A piezoelectric vibrating element 11 having an excitation electrode and a connection electrode formed on the electrode portion of the base 12 by base evaporation.
Are mounted via a conductive adhesive as shown in FIG. 10 (ST2). Next, the frequency is adjusted by applying an electron beam or the like to the surface of the piezoelectric vibration element 11 and adjusting the weight (ST3).

Then, a lid 13 is placed on the base 12 as shown in FIG. 10, and the surface of the lid 13 is irradiated with an electron beam from above, for example, as described later, thereby sealing the surface. Is performed (ST4).

After completion of the sealing, marking is performed on the surface of the lid 13 to write necessary characters and the like by means of printing or the like (ST5), and the marking is sent to an inspection process (ST6). Then, a pass is determined by a necessary inspection, and the piezoelectric vibrator or the piezoelectric oscillator is completed.

Incidentally, the sealing step of ST4 is performed by irradiating the surface of the lid 13 with an electron beam. The sealing with such an electron beam is shown in FIG.
An electron beam irradiation device 16 as shown in FIG.

In FIG. 1, an electron beam irradiation device 16 is
An electron gun 17 for irradiating the electron beam E;
A converging lens 19a for converging the electron beam E emitted from 7 and a deflector 19b for applying a predetermined magnetic field to the converged electron beam E and controlling the irradiation direction thereof.

As a result, the electron beam irradiation device 16
The sample can be appropriately irradiated with the electron beam E based on the function of the deflector 19b.

Using such an electron beam irradiation apparatus 16, the above sealing step is performed as shown in FIG.

First, a sealing material 15 is arranged on the joining surface side of the lid 13 formed in a predetermined shape. The sealing material 15 is, for example, a silver braze. Then, the sealing material 15 is placed on the base 12.
Is placed with the joining surface of the lid 13 on which the is disposed.

Here, a metal coating layer 12e formed by laminating a plurality of types of metals is provided on a bonding surface of the base 12 to the lid 13. The metal coating layer 12e is formed of a coating layer 12 of gold (Au) from above.
d, a coating layer 12b made of nickel (Ni) and a tungsten coating layer 12c made of tungsten (W).

In this state, the surface of the lid 13 is irradiated with an electron beam E from above, so that the sealing material 15 and gold (A
u) and the coating layer 12b made of nickel (Ni) are heated and melted to form the base 12 and the lid 13.
Are joined.

Specifically, the upper surface of the lid 13 is irradiated with the electron beam E, and the heated heat is applied to the sealing material 15 immediately below the beam irradiation position, the coating layer 12d of gold (Au) and nickel (Au). Ni) and the cover 13 around the region P irradiated with the electron beam E.
Is melted and fixed between the lower surface of the base and the upper end surface of the base 12.

[0017]

However, according to such a sealing method using an electron beam, a problem as shown in FIG. 14 may occur.

That is, when the surface of the lid 13 is irradiated with the electron beam E from above, the lid 13 may be deformed as shown in the figure. That is, as shown in an enlarged manner in the lower part of FIG. 14, the end 13 a is deformed so that the end 13 a is bent upward on the surface of the lid 13 irradiated with the electron beam E, and the distance SU between the lid 13 and the base 12 is changed. Will occur.

Further, this causes a problem that rust is generated for the reason described later, which impairs the quality of the product.

In order to minimize such deformation of the lid 13, the following method can be considered.

FIG. 15 is a schematic exploded perspective view showing an example of a sealing jig used in the above-described sealing step of the piezoelectric vibrator 10. FIG. FIG. 4 is a schematic cross-sectional view showing a state where a lid 13 is held.

In these figures, the sealing jig 20
Is a pressing jig having a positioning hole 23 for accommodating the base 12 of the piezoelectric vibrator 10 and a pressing means as a pressing means for supporting the lid 13 mounted on the base 12 from above in the drawing. A plate 21 is provided.

The positioning jig 22 is the main body of the sealing jig 20 and has a positioning hole 23 formed on the upper surface. The positioning hole 23 is formed slightly larger along the outer shape of the base 12 so that the positioning hole 23 can be held so as not to move while the base 12 is housed. The lid 13 is also guided by the positioning holes 23.

The holding plate 21 as a holding means is, for example, a flat plate and has a through hole 24. As will be described later, the through hole 24 is formed slightly smaller than the outer shape of the base 12, and is pressed from above while the lid 13 is sandwiched between the through hole 24 and the base 12.
The base 12 and the lid 13 are held so as not to be displaced from each other.

Thus, the pressing plate 21 presses the lid 13 by applying a load from above, thereby preventing the end of the lid 13 from being deformed.

However, such a method requires special preparation of the above-mentioned jig composed of a plurality of members. Moreover, even if sealing was attempted using such a sealing jig 20, deformation of the lid 13 could not be reliably suppressed.

An object of the present invention is to solve the above-mentioned problems, to prevent deformation of the lid at the time of sealing by an electron beam, and to obtain a high-quality piezoelectric vibrator and piezoelectric oscillator. Another object of the present invention is to provide a piezoelectric vibrator and a piezoelectric oscillator manufactured by this sealing method.

[0028]

According to the first aspect of the present invention, there is provided a piezoelectric vibrating element, a base for accommodating the piezoelectric vibrating element, and a state in which the piezoelectric vibrating element is accommodated in the base. In the method of sealing a piezoelectric vibrator for sealing the base by irradiating an electron beam with a metal lid for sealing the base, the thickness of the lid, the lid is In a state where the thickness of the electron beam applied to the lid surface is thicker than the limit thickness that is deflected by the atmospheric pressure, and the heat of the electron beam is set to be equal to or lower than the melting point of the metal material forming the lid body,
To the brazing material on the back surface of the lid, the thickness at which the temperature at which the brazing material can be melted is set to a thickness that does not hinder the transmission, by the method of sealing the piezoelectric vibrator,
Achieved.

According to the first aspect of the present invention, in the sealing method of the present invention, first, regarding the thickness of the lid of the piezoelectric vibrator, the thickness of the lid is thicker than the limit thickness at which the lid bends due to the atmospheric pressure and the surface of the lid is The heat of the irradiated electron beam is set to be equal to or lower than the melting point of the metal material forming the lid. This is because, as described above, the inventors of the present invention have examined various causes of the deformation of the lid in the sealing step using the electron beam, and found that the deformation of the lid is caused by the irradiation of the electron beam. It has been found that warpage occurs due to melting of the surface of the lid. That is, it is considered that such a warp occurs when the cover is heated to a temperature higher than the melting point of the metal material. Further, even if the calorific value of the electron beam is appropriate, it was confirmed that if the thickness of the lid is too thin, the lid may be deformed at atmospheric pressure after sealing.

[0030] Such a deformation creates a gap between the lid and the base. In addition, heat that is higher than the melting point of the metal material that forms the lid acts on the portion of the lid surface where the electron beam is irradiated, leaving traces of melting on the surface, leaving such gaps and surfaces. It has been found that when moisture based on the humidity in the atmosphere solidifies in the uneven portion of the trace of melting, it hardly evaporates and causes rust. Then, since the surface of the lid is melted, the plating of the lid is peeled off and the metal of the material is exposed, which also causes rust.

In the structure of the first aspect, the thickness is set to such an extent that the temperature at which the brazing material can be melted is not transmitted to the brazing material on the back surface of the lid. This is based on the fact that in the sealing step using an electron beam, the bonding is performed by melting the brazing material on the back surface side, which is the bonding surface of the lid, by the heat of the electron beam applied to the surface of the lid. . Therefore, if the thickness of the lid is unnecessarily large, the brazing material cannot be melted sufficiently, so that proper joining is not performed.

According to a second aspect of the present invention, in the configuration of the first aspect, the lid is made of a Kovar plate, and the thickness of the lid is set to about 0.02 mm to 0.05 mm.
By irradiating the surface of the lid with an electron beam, the lid and the base are sealed.

According to the second aspect of the present invention, when a normal sealing electron beam is irradiated, the thickness of the Kovar lid is set to about 0.02 mm to 0.05 mm, so that an appropriate thickness can be obtained. Sealing can be performed. That is, if the thickness of the lid is less than 0.02 mm, the lid is crushed and deformed by the atmospheric pressure. Further, when the thickness of the lid is greater than 0.05 mm, the heat of the electron beam is prevented from being transmitted to the brazing material as heat equal to or higher than the melting point of the brazing material.

According to a third aspect of the present invention, in the configuration of the second aspect, the size of the lid is about 2.0 mm to 3.5 mm and 2.2 mm wide in a state where the lid is placed on the base.
About 5.0 mm.

According to a fourth aspect of the present invention, in the configuration of any one of the first to third aspects, silver (Ag) brazing is clad and arranged on the joint surface of the lid with the base. .

According to a fifth aspect of the present invention, there is provided a piezoelectric vibrating element, a base for accommodating the piezoelectric vibrating element, and the base with the piezoelectric vibrating element accommodated in the base. A metal lid for sealing, the piezoelectric vibrator sealed by irradiating the surface of the lid with an electron beam, with respect to the thickness of the lid, than the limit thickness at which the lid bends due to atmospheric pressure This brazing material can be melted into the brazing material on the back surface of the lid in a state in which the heat of the electron beam applied to the surface of the lid is thick and set to be equal to or lower than the melting point of the metal material constituting the lid. This is achieved by a piezoelectric vibrator set to a thickness that does not prevent the transmission of temperature.

According to the fifth aspect of the present invention, by forming the thickness of the lid of the piezoelectric vibrator in this manner, a high-precision piezoelectric vibrator which is appropriately sealed can be provided as in the case of the first aspect. Obtainable.

According to a sixth aspect of the present invention, in the configuration of the fifth aspect, the lid is made of a Kovar plate, and the thickness of the lid is set to about 0.02 mm to 0.05 mm.
The lid and the base are sealed by irradiating the surface of the lid with an electron beam.

According to a seventh aspect of the present invention, in the configuration of the sixth aspect, the size of the lid is 2.0 mm to 3.5 mm and 2.2 mm to 5 mm wide with the lid placed on the base. It is characterized in that it is set to about 0.0 mm.

According to an eighth aspect of the present invention, in the structure of any of the fifth to seventh aspects, silver (Ag) brazing is clad and arranged on the joint surface of the lid with the base. .

According to a ninth aspect of the present invention, there is provided a piezoelectric vibrating element, a base for mounting an integrated circuit on a conductive pattern formed on a surface and accommodating the piezoelectric vibrating element, and A metal lid for sealing the base in a state in which the vibration element is housed in the base, and a sealing method of a piezoelectric oscillator for sealing by irradiating an electron beam to the surface of the lid, Regarding the thickness of the lid, the lid is thicker than the limit thickness at which the lid bends due to the atmospheric pressure, and the heat of the electron beam applied to the lid surface is set to be equal to or lower than the melting point of the metal material constituting the lid, This is achieved by a method for sealing a piezoelectric oscillator in which the thickness is set so as not to prevent the temperature at which the brazing material can be melted from being transmitted to the brazing material on the back surface of the body.

According to the configuration of the ninth aspect, by adopting the configuration common to the first aspect also in the piezoelectric oscillator, it is possible to prevent the lid from being deformed at the time of sealing.

Further, according to the present invention, there is provided a piezoelectric vibrating element, a base for mounting an integrated circuit on a conductive pattern formed on a surface and accommodating the piezoelectric vibrating element, and the piezoelectric vibrating element. A metal lid for sealing the base in a state where the vibration element is housed in the base; and a piezoelectric oscillator sealed by irradiating the surface of the lid with an electron beam. Regarding, the lid is thicker than the limit thickness that bends due to atmospheric pressure,
In a state where the heat of the electron beam applied to the surface of the lid is set to be equal to or lower than the melting point of the metal material constituting the lid, the temperature at which the brazing material can be melted into the brazing material on the back surface of the lid. This is achieved by a piezoelectric oscillator set to a thickness that does not prevent transmission.

[0044]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the piezoelectric vibrator of the present invention.

The piezoelectric vibrator 30 has a box-shaped base 32 in which a space 32a for accommodating a plate-shaped piezoelectric vibration element 31 is formed, and a plate-shaped base 32 joined to the base 32 so as to seal the space 32a. Is provided.

The base 32 has electrodes 3 as shown in FIG.
4 are provided, and the piezoelectric vibrating element 31 has one end 31.
a is connected and fixed via a conductive adhesive 42 to an electrode 34 disposed in the space 32a, and the other end 31
b is a free end. Accordingly, the vibration can be performed at a predetermined frequency by the driving voltage applied from the electrode 34.

The base 32 and the lid 33 are joined via a sealing material 35. Here, as a material of the piezoelectric vibration element 31, for example, quartz is used, and as a material of the base 32, for example, ceramic such as alumina is used.

The lid 33 is made of a metal material, and is preferably made of Kovar or 42 alloy having a linear expansion coefficient close to that of ceramics such as alumina. In this embodiment, it is particularly preferable to use Kovar.

On the joining surface, which is the upper end surface of the base 32,
A metal coating layer 41 is provided. This metal coating layer 41
Is formed by laminating a plurality of types of metals in layers. For example, as shown in an enlarged manner in a part of FIG. 1, the layers are sequentially formed from a tungsten layer 32b, a nickel plating 32c, and a gold plating 32d from the bottom.

Here, for example, the thickness of the tungsten layer 32b is 10 to 30 μm, the thickness of the nickel plating 32c is 6 to 8 μm, and the thickness of the gold plating 32d is
0.5 to 2 μm.

FIG. 3 shows the piezoelectric vibrator 30 before the lid 33 is placed on the base 32 and sealed. In the figure, illustration of the piezoelectric vibrating element 31 and the like is omitted in the base 32, but their configuration is the same as in FIGS.

That is, FIG. 3 shows a state immediately before the lid 33 is placed on the base 32 and sealed, and the structure of the lid 33 will be described in more detail.

As described above, the lid 33 is formed of Kovar, and the sealing material 35 is arranged on the lower surface, that is, the surface to be joined to the base 32. The sealing material 35 is, for example, silver (Ag) brazing, and has a thickness of about 15 μm.

The lid 33 has an outer periphery substantially coincident with the outer periphery of the upper end of the base 32 (see FIG. 1). For this reason, the piezoelectric vibrator 30 has a lid 33 when viewed from the top.
The base 32 covered with the lid 33 also has, for example, a substantially rectangular shape. In addition, in this rectangular shape, the size is particularly set to about 2.0 mm to 3.5 mm in length and about 2.2 mm to 5.0 mm in width. This size will be further described later.

As shown in the lower part of FIG. 3, in the piezoelectric vibrator 30 of the present embodiment, the thickness d of the cover 33 is limited to the limit that the cover 33 bends due to the atmospheric pressure when the cover is formed of Kovar. In a state where the thickness of the electron beam applied to the surface of the lid 33 is larger than the thickness and the heat of the electron beam is set to a metal material constituting the lid 33, that is, a melting point of Kovar or less, for example, about 1450 degrees Celsius or less. Silver wax 35 on the back of 33
In addition, the thickness is set to such an extent that the temperature at which the silver solder 35 can be melted is not prevented from being transmitted.
Specifically, the thickness d of the lid 33 is set to 0.02 mm to 0.
It is set to about 05 mm.

FIG. 4 is a schematic sectional view showing the structure of a piezoelectric oscillator according to an embodiment of the present invention.

In FIG. 4, portions denoted by the same reference numerals as those in FIG. 2 have the same configuration.

In the figure, the base 32 of the piezoelectric oscillator 50
In FIG. 1, a step portion is provided inside as compared with FIG. 1, and an inner space 52 that is one step lower is provided. The integrated circuit 51 is mounted on the conductive pattern formed on the upper surface of the base 32, housed in the internal space 52, and connected to the electrode section 53. As a result, a predetermined drive voltage is applied to the piezoelectric vibration element 31 to cause it to vibrate, and its output is input to the integrated circuit 51, thereby extracting a signal of a predetermined frequency.

In this piezoelectric oscillator 50, the base 3
1 is formed on the upper end surface of the cover 2 and a brazing material such as silver brazing is provided on a lower surface of the lid 33 as a sealing material (not shown). The same sealing method as that of the piezoelectric vibrator 30 is applied.

Next, this sealing method will be described. According to the present invention, the piezoelectric vibrator 30 is manufactured through the manufacturing process described with reference to FIG. 11, and the piezoelectric vibrator 30 shown in FIGS.
Is also sealed by the same sealing method.

FIG. 5 shows a state in which the surface of the lid 33 of the piezoelectric vibrator 30 is irradiated with an electron beam E from above and sealed.

In this case, the electron beam irradiating apparatus for irradiating the surface of the lid 33 with the electron beam can use the one having the configuration described in FIG. 12 as it is, and similarly as described in FIG. The surface of the lid 33 is irradiated from above. However, the sealing can be performed without using a special jig or the like that presses the lid from above as described with reference to FIG.

FIG. 6 shows a state in which the base 32 of the piezoelectric vibrator 30 is joined from the upper end portion in this sealing method.
FIG. 5 is a diagram in which the distance to the surface of the lid 33 is plotted on the horizontal axis based on the distance of the thickness d of the lid 33, and the temperature of the lid 33 formed of Kovar is measured.

As shown in this figure, a melting point temperature of the brazing material 35 which is a silver brazing material, a temperature exceeding 700 degrees Celsius, is secured at the position of the distance 0 in the graph (the position of the joining surface of the lid 33). When the output of the electron beam E is set as described above, if the thickness d of the lid 33 exceeds approximately 0.05 mm,
It can be seen that the melting point of Kovar exceeds 1450 degrees Celsius on the surface. For this reason, the thickness d of the lid 33 is approximately 0.0
If it exceeds 5 mm, the temperature rises to such an extent that the lid 33 is deformed.

FIGS. 7, 8 and 9 show the lid when the electron beam is irradiated and sealed with respect to the piezoelectric vibrator 30 (lid 33) having a predetermined length and width. The relationship between the thickness of the cover 33 and the amount of deformation or deflection (indicated by T in FIG. 14) of the lid 33 is summarized in a graph.

Here, FIG. 7 shows the aspect ratio of the piezoelectric vibrator 30 being 3.2 mm × 5.0 mm, FIG. 8 shows the aspect ratio of the piezoelectric vibrator 30 being 2.5 mm × 3.2 mm, and FIG. The aspect ratio of the piezoelectric vibrator 30 is 2.0 mm × 2.5 mm.
2.0 mm in height described above for the size of the piezoelectric vibrator 30
To about 3.5 mm and a width of about 2.2 mm to about 5.0 mm.

As can be seen with reference to these figures, regardless of the size of the lid 33, if the thickness d is approximately 0.02 mm or more, the lid 33 is not affected by the atmospheric pressure. Accordingly, the amount of deformation caused by the deformation can be set to 20 μm or less. This deformation amount is a reference amount that does not hinder the performance of the product.

Therefore, the thickness d of the lid 33 is set to 0.02
When the thickness is in the range of 0.05 to 0.05 mm, a high-quality piezoelectric vibrator 30 can be obtained without the need for a special jig when sealing using an electron beam is performed.

Further, the thickness d of the conventional lid is 0.15 m.
In comparison with the case of about m, in the case of 0.05 mm, the required amount of heat is about half, and the production cost of the product can be suppressed accordingly.

[0071]

As described above, according to the present invention, a high-quality piezoelectric vibrator and a high-quality piezoelectric oscillator can be obtained by preventing deformation of the lid at the time of sealing by an electron beam. And a piezoelectric vibrator and a piezoelectric oscillator manufactured by this sealing method.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a piezoelectric vibrator of the present invention.

FIG. 2 is a schematic sectional view of the piezoelectric vibrator of FIG.

FIG. 3 is a schematic sectional view showing a state immediately before sealing of the piezoelectric vibrator of FIGS. 1 and 2;

FIG. 4 is a schematic sectional view showing an embodiment of the piezoelectric oscillator of the present invention.

FIG. 5 is a schematic sectional view showing a state after sealing of the piezoelectric vibrator of FIGS. 1 and 2;

FIG. 6 is a graph showing the relationship between the thickness of the lid of the piezoelectric vibrator of FIGS. 1 and 2 and the surface temperature of the lid.

FIG. 7 is a graph showing the relationship between the thickness of the lid of the piezoelectric vibrator shown in FIGS. 1 and 2 and the amount of deformation of the lid.

8 is a graph showing the relationship between the thickness of the lid of the piezoelectric vibrator of FIGS. 1 and 2 and the amount of deformation of the lid.

FIG. 9 is a graph showing the relationship between the thickness of the lid of the piezoelectric vibrator of FIGS. 1 and 2 and the amount of deformation of the lid.

FIG. 10 is a partially cut perspective view showing an example of a general piezoelectric vibrator.

FIG. 11 is a flowchart showing an outline of a manufacturing process of the piezoelectric vibrator of FIG. 10;

FIG. 12 is a schematic diagram showing a configuration of an electron beam device used in a sealing step of the piezoelectric vibrator of FIG.

FIG. 13 is an enlarged view showing a main part of a sealing step of the piezoelectric vibrator of FIG. 10;

14 is a schematic side sectional view showing a state where the piezoelectric vibrator of FIG. 10 is sealed with an electron beam.

15 is a schematic exploded perspective view showing a positioning jig used for sealing the piezoelectric vibrator of FIG. 10 with an electron beam.

FIG. 16 is a schematic cross-sectional view showing a state in which a piezoelectric vibrator is sealed using the positioning jig of FIG.

[Explanation of symbols]

Reference Signs List 30 piezoelectric vibrator 31 piezoelectric vibrating element 32 base (storage part) 32a internal space 32b tungsten coating part (tungsten metallized) 32c nickel coating part (nickel plating) 32d gold coating part (gold plating) 33 lid body 34 electrode 35 sealing material 41 Metal coating 42 Conductive adhesive

Claims (10)

[Claims] 1. A piezoelectric vibrating element, comprising: a base for accommodating the piezoelectric vibrating element; and a metal lid for sealing the base with the piezoelectric vibrating element accommodated in the base. In a method of sealing a piezoelectric vibrator for sealing by irradiating an electron beam on a surface of a lid, the thickness of the lid is larger than a limit thickness at which the lid bends due to atmospheric pressure, and the surface of the lid is irradiated. In a state where the heat of the electron beam is set to be equal to or lower than the melting point of the metal material constituting the lid, it is possible to prevent the temperature at which the brazing material can be melted from being transmitted to the brazing material on the back surface of the lid. A method for sealing a piezoelectric vibrator, characterized in that the thickness is set to a thickness that is not so large. 2. The lid is made of a Kovar plate, the thickness of the lid is set to about 0.02 mm to 0.05 mm, and the surface of the lid is irradiated with an electron beam. The method for sealing a piezoelectric vibrator according to claim 1, wherein the base and the base are sealed. 3. The apparatus according to claim 2, wherein a size of the lid is set to about 2.0 mm to 3.5 mm and a width of about 2.2 mm to 5.0 mm in a state where the lid is placed on the base. A method for sealing a piezoelectric vibrator as described in the above. 4. The method for sealing a piezoelectric vibrator according to claim 1, wherein a silver (Ag) brazing is clad on a surface of the lid body joined to the base. 5. A piezoelectric vibrating element, comprising: a base for accommodating the piezoelectric vibrating element; and a metal lid for sealing the base in a state where the piezoelectric vibrating element is accommodated in the base. In the piezoelectric vibrator sealed by irradiating the surface of the lid with an electron beam, the thickness of the lid is larger than the limit thickness at which the lid bends due to the atmospheric pressure, and the thickness of the electron beam irradiated on the surface of the lid. In a state where the heat is set to be equal to or lower than the melting point of the metal material constituting the lid, the thickness is such that the temperature at which the brazing material can be melted is not transmitted to the brazing material on the back surface of the lid. A piezoelectric vibrator characterized in that: 6. The lid is made of a Kovar plate material, the thickness of the lid is set to a thickness of about 0.02 mm to 0.05 mm, and the surface of the lid is irradiated with an electron beam. The piezoelectric vibrator according to claim 5, wherein the base and the base are sealed. 7. A state in which the lid is placed on the base and has a size of 2.0 mm to 3.5 mm in length and 2.0 mm in width.
The piezoelectric vibrator according to claim 6, wherein the piezoelectric vibrator is set to about 2 mm to 5.0 mm. 8. The piezoelectric vibrator according to claim 5, wherein a silver (Ag) brazing is clad on a bonding surface of the lid with the base. 9. A piezoelectric vibrating element, a base for mounting an integrated circuit on a conductive pattern formed on a surface thereof and accommodating the piezoelectric vibrating element, and mounting the base with the piezoelectric vibrating element accommodated in the base. A sealing method for a piezoelectric oscillator, comprising: a metal lid for sealing; and irradiating the surface of the lid with an electron beam to seal the piezoelectric oscillator. This brazing material is melted into the brazing material on the back surface of the lid while the heat of the electron beam applied to the lid surface is set to be lower than the melting point of the metal material constituting the lid. A method for sealing a piezoelectric oscillator, characterized in that the thickness is set so as not to prevent transmission of a temperature that can be transmitted. 10. A piezoelectric vibrating element, a base for mounting an integrated circuit on a conductive pattern formed on a surface thereof and accommodating the piezoelectric vibrating element, and the base in a state where the piezoelectric vibrating element is accommodated in the base. A metal lid for sealing, wherein the piezoelectric oscillator sealed by irradiating the surface of the lid with an electron beam, wherein the thickness of the lid is greater than a limit thickness at which the lid bends due to atmospheric pressure. This brazing material can be melted into the brazing material on the back surface of the lid in a state in which the heat of the electron beam applied to the surface of the lid is thick and set to be equal to or lower than the melting point of the metal material constituting the lid. A piezoelectric oscillator characterized in that the thickness is set so as not to prevent transmission of temperature.