JP2001183387A - Acceleration sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To correctly detect an acceleration. SOLUTION: The sensor has a sensor element 1 in which a sensor chip 11 for detecting the acceleration is stored, an instrument body 2 in which the sensor element 1 is housed, and buffer members 3A and 3B having an elasticity and set between an inner face of the instrument body 2 and the sensor element 1. Only the instrument body 2 is to be externally fitted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an AB mounted on a vehicle.
The present invention relates to an acceleration sensor incorporated in an S device.

[0002]

2. Description of the Related Art Conventionally, as an acceleration sensor of this type, FIG.
8 is present. This device includes a sensor element B containing a sensor chip A for detecting acceleration, and a body C containing the sensor element B. The sensor element B includes a circuit board D on which the sensor chip A is provided, a resin holder E for holding the circuit board D,
A noise protection circuit board G is provided, on which a holder E is provided and which is electrically connected to a circuit board D by a signal transmission terminal F. The body C supports the sensor element A inside by bonding the noise protection circuit board G thereto.

[0003]

In the above-mentioned conventional acceleration sensor, if the body C is dropped by mistake, the impact due to the drop is transmitted from the body C to the sensor element B, and the sensor element B is dropped. There is a possibility that the circuit board D and the sensor chip A constituting B may be damaged. If the circuit board D and the sensor chip A are damaged in this way, the acceleration cannot be accurately detected. Would.

The present invention has been made in view of the above point, and an object of the present invention is to provide an acceleration sensor capable of accurately detecting acceleration.

[0005]

According to a first aspect of the present invention, there is provided an acceleration sensor, comprising: a sensor element accommodating a sensor chip for detecting acceleration; a container accommodating the sensor element; And a cushioning member disposed between the inner surface of the container and the sensor element, wherein only the container is used for external mounting.

[0006] The acceleration sensor according to the second aspect is the first aspect.
In the acceleration sensor described above, a rigid member having rigidity greater than that of the cushioning member is provided between the sensor chip and the cushioning member.

[0007] The acceleration sensor according to the third aspect is the first aspect.
Alternatively, in the acceleration sensor according to any one of the second to third aspects, the buffer member has a minute gap so as to have elasticity.

According to a fourth aspect of the present invention, there is provided an acceleration sensor according to the first aspect.
In the acceleration sensor described above, the sensor element has a configuration in which a flange portion is extended inside the body, and the buffer member is disposed so as to sandwich the flange portion from both sides.

According to a fifth aspect of the present invention, there is provided an acceleration sensor according to the fourth aspect.
In the acceleration sensor described above, a positioning portion for positioning the buffer member is provided in the body.

[0010] The acceleration sensor according to the sixth aspect is the fourth aspect.
In the acceleration sensor described above, one buffer member is disposed on at least one side of the flange.

According to a seventh aspect of the present invention, there is provided the acceleration sensor according to the fourth aspect.
In the acceleration sensor described above, a wall having a substantially square outer wall when viewed from the standing direction is erected on the sensor element, and a wall having a substantially circular inner wall as viewed from the standing direction is formed by the container. The cushioning member is provided upright on a body, and is arranged between an outer wall surface of the sensor element and an inner wall surface of the container.

[0012] The acceleration sensor according to the eighth aspect is the fourth aspect.
In the acceleration sensor described above, the buffer member has a configuration in which a holding portion that holds the flange portion is provided.

The acceleration sensor according to the ninth aspect is the fourth aspect.
In the acceleration sensor described above, one of the buffer members is provided.

According to a tenth aspect of the present invention, in the acceleration sensor, the flange is extended near the center of gravity of the sensor element.

According to another aspect of the present invention, there is provided an acceleration sensor including a sensor element accommodating a sensor chip for detecting acceleration, a body accommodating the sensor element, and a buffer support having elasticity and suspending and supporting the sensor element in the body. And a member.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An acceleration sensor according to a first embodiment of the present invention will be described below with reference to FIG. The main axis direction of acceleration detection of this acceleration sensor is perpendicular to a circuit board 12 described later.

Reference numeral 1 denotes a sensor element.
1, circuit board 12, holding body 13, noise protection circuit board 1
4. The cover 15 is provided. The sensor chip 11 is formed of a semiconductor into a shape capable of detecting acceleration, and is arranged on an inner surface of a ceramic circuit board 12. The holder 13 is formed by PBT into a box shape with one opening, and the circuit board 12 is bonded to the silicon-based adhesive 17.
The opening is covered by the adhesive holding.
Therefore, the sensor chip 11 disposed on the inner surface of the circuit board 12 in the assembled state is surrounded by the circuit board 12 and the holding body 13.

The noise protection circuit board 14 is a glass epoxy-based board, on which a noise protection circuit (not shown) and a holder 13 are disposed on the surface, and the noise protection circuit board 14 is mounted on the circuit board 12 so as to transmit an output from the sensor chip 11. The signal transmission terminal 16 which is soldered on the outer surface is connected on the back surface by soldering. The cover 15 is formed of an iron-based metal material in a box shape with one opening, and is covered by the holder 13 from the opening side so as to surround the circuit board 12.

Reference numeral 2 denotes a body, which comprises a connector housing 21 and a case 22. When the present acceleration sensor is mounted on the outside, only the body 2 may be appropriately mounted on the outside.

The connector housing 21 is formed of a PBT into a box shape with one opening, and has a housing space 21a for housing the sensor element 1 inside thereof.
The other end of the lead terminal 23, one end of which protrudes into a cylindrical lead lead-out portion 21c provided at the bottom, protrudes from a step 21b provided on a wall around the housing space 21a. Connection lead wire 2 between noise protection circuit board 14
4 are electrically connected.

The case 22 is formed by PBT into a plate shape having a flange 22a around it.
a is an epoxy sealant 26
To surround the sensor element 1 together with the connector housing 21. This case 22
Is provided with a contact portion 22b having a substantially rectangular cross section on its inner surface.

Reference numeral 3A denotes a first cushioning member which is made of silicon rubber and has a base portion 32 having a hemispherical contact portion 31 provided on the surface thereof, and the contact portion 31 is brought into contact with the contacted portion 22b of the case 22. And the base 32 is connected to the noise protection circuit board 1.
4 is disposed between the sensor element 1 and the inner surface of the body 2 in a state of surface contact with the back surface of the sensor element 4.

Reference numeral 3B denotes a second buffer member 3B, which is made of silicon rubber and has a box portion 33 having a hemispherical contact portion 31 provided on the surface thereof.
The contact portion 31 is brought into contact with the inner surface of the wall of the connector housing 21, and the inner surface of the case 2 is brought into surface contact with the outer surface of the cover 15. It is arranged in between.

Since the compression state of both buffer members 3A and 3B is determined by the internal shape of body 2, the variation in the holding force between both buffer members 3A and 3B is small.

In such an acceleration sensor, the shock applied to the body 2 is absorbed by the elasticity of the buffer members 3A and 3B provided between the inner surface of the body 2 and the sensor element 1. , The sensor element 1 is hardly damaged,
Accurate acceleration can be detected.

Further, only the body 2 is used for external mounting, and the sensor elements 1 and
For example, since the circuit board 12 is not used for external mounting, the housing space 21 for housing the sensor element 1 is used.
Since it is not necessary to provide a communication hole communicating with a in the case 2, it is easy to manufacture.

Next, a second embodiment of the present invention will be described below with reference to FIG. Note that members having substantially the same functions as those of the first embodiment are denoted by the same symbols, and only those parts that are different from the first embodiment will be described. This embodiment is basically the same as the first embodiment, except that the rigid members 4 and 4 are more rigid than the first buffer member 3A and the second buffer member 3B.
5 is provided between the sensor chip 1 and the first buffer member 3A and the second buffer member 3B.

The holding body 13 of the sensor element 1 is formed of a ferrous metal material in a box shape with one opening.

The connector housing 21 of the body 2 is made of PB
By T, it is formed in a plate shape having a lead lead-out portion 21c. This connector housing 21 has a lead terminal 23 having one end led into a lead lead-out portion 21c provided on the outer surface.
Is protruded into the inner surface, and the protruding other end and the noise protection circuit board 14 are electrically connected by connection lead wires 24. In addition, the case 22 of the container 2 is provided with an accommodation space 21a and a step portion 21b.

Reference numeral 4 denotes a hermetic header, which forms a part of the sensor element 1 and is formed in a plate shape from an iron-based metal material. The hermetic header 4 has its front surface joined to the noise protection circuit board 14, and the holder 13 is disposed on the back surface with its bottom part in contact with it, and further surrounds the holder 13 and the circuit board 12. , Cover 15
Is covered from the opening side.

Therefore, between the sensor chip 11 and the first buffer member 3A and the second buffer member 3B, an iron-based metal having a higher rigidity than the first buffer member 3A and the second buffer member 3B is provided. This means that a hermetic header (rigid member) 4 and a cover (rigid member) 15 made of a material are provided.

In such an acceleration sensor, in addition to the effects of the first embodiment, even if the first buffer member 3A and the second buffer member 3B are deformed by receiving an impact, a hermetic header (rigid member) is provided. 4 and the cover (rigid member) 15 are harder to deform because they have higher rigidity than the buffer members 3A and 3B, and the sensor chip 11 is displaced due to the deformation of the hermetic header (rigid member) 4 and the cover (rigid member) 15. And acceleration can be detected more accurately.

Next, a third embodiment of the present invention will be described below with reference to FIG. The same members as those in the first embodiment are denoted by the same reference numerals, and only different points from the first embodiment will be described. In the first embodiment, the first buffer member 3
A and the second cushioning member 3B are made of silicon rubber, whereas in the present embodiment, both cushioning members 3A and 3B are made of steel wool having minute voids so as to have elasticity. The gap between the holder 13 and the noise protection circuit board 14 is also filled with steel wool.

In such an acceleration sensor, the first cushioning member 3A and the second cushioning member 3B have high flexibility based on the minute gaps, and therefore absorb the shock applied to the body 2. As a result, the sensor element 1 is less likely to be damaged, so that the effect of the first embodiment that an accurate acceleration can be detected can be further obtained.

The cushioning members 3A and 3B are made of steel wool having minute gaps so as to have elasticity, but are not limited to steel wool. For example, glass wool or rock wool may be used. It may be made of.

Next, a fourth embodiment of the present invention will be described below with reference to FIG. The same members as those in the second embodiment are denoted by the same reference numerals, and only the parts different from those in the second embodiment will be described.

In the second embodiment, the first shock-absorbing member comprises a box portion 33 having a hemispherical abutting portion 31 provided on the surface thereof. In a state where the inner surface of the portion 33 is in surface contact with the outer surface of the cover 15, the inner surface of the portion 33 is disposed between the inner surface of the body 2 and the sensor element 1,
The second cushioning member 3B includes a base 32 having a hemispherical contact portion 31 provided on the surface thereof. The contact portion 31 is brought into contact with the inner surface of the connector housing 21 and the base 32 is attached to the noise protection circuit board 14. With the body 2 in contact with the back
Is arranged between the inner surface of the sensor element 1 and the sensor element 1.

On the other hand, in the present embodiment, the first cushioning member 3A and the second cushioning member 3B are spherical, and the flange 41 is extended from the hermetic header 4 to the inside of the body 2, and the flange is formed. 41 from both sides, a plurality of buffer members 3A, 3B
, Respectively.

The acceleration sensor according to the second embodiment has the same effects as the sensor element 1 according to the second embodiment, in addition to the effects of the second embodiment.
In order to dispose the first cushioning member 3A and the second cushioning member 3B between the outer surface of the sensor body 2 and the inner surface of the body 2, the entire sensor element 1 must be accurately positioned at a predetermined position. The first cushioning member 3 is placed between the flange 41 and the inner surface of the body 2 so as to sandwich the flange 41 of the element 1.
Since the A and the second buffer member 3B are provided, even if the entire sensor element 1 is not accurately positioned at a predetermined position, it is sufficient if the flange 41 is accurately positioned at a predetermined position. In addition, it is not necessary to take time and effort to position the entire sensor element 1 at a predetermined position, which facilitates assembly.

Next, a fifth embodiment of the present invention will be described below with reference to FIG. The same members as those in the first embodiment are denoted by the same reference numerals, and only different points from the first embodiment will be described.

In the first embodiment, the first buffer member 3A
Consists of a base 32 having a hemispherical contact portion 31 provided on the front surface. The contact portion 31 is brought into contact with the case 22 and the base 32 is brought into surface contact with the back surface of the noise protection circuit board 14. The second shock-absorbing member 3B is provided between the inner surface of the body 2 and the sensor element 1 and comprises a box portion 33 having a hemispherical contact portion 31 provided on the surface thereof.
1 is disposed between the inner surface of the housing 2 and the sensor element 1 with the inner surface of the box 33 being in surface contact with the outer surface of the cover 15 while the inner surface 1 is in contact with the inner surface of the wall of the connector housing 21. .

On the other hand, in the present embodiment, the first buffer member 3A and the second buffer member 3B are spherical,
3, the flange 41 is extended into the inside of the body 2 and the flange 41 is provided.
Are sandwiched between a plurality of buffer members 3A and 3B from both sides.

In this acceleration sensor, in addition to the effects of the first embodiment, similarly to the fourth embodiment, the inner surface of the flange 41 and the body 2 is held so as to sandwich the flange 41 of the sensor element 1. Since the first cushioning member 3A and the second cushioning member 3B are disposed in between, the flange 41 can be positioned at a predetermined position even if the entire sensor element 1 is not precisely positioned at a predetermined position. Since it is sufficient if the positioning is well performed, the entire sensor element 1 does not have to be positioned at a predetermined position with much effort, and the assembly is facilitated.

Next, a sixth embodiment of the present invention will be described below with reference to FIG. It is to be noted that the same members as those of the fourth embodiment are denoted by the same reference numerals, and only the parts different from those of the fourth embodiment will be described. In the fourth embodiment, the first buffer member 3
A and the second cushioning member 3B are both spherical,
1 is sandwiched from both sides by a plurality of buffer members 3A and 3B, respectively.
Each of the cushioning member 3A and the second cushioning member 3B has a donut shape, and the flange 41 is sandwiched by one cushioning member 3A, 3B from both sides.

In such an acceleration sensor, in addition to the effect of the fourth embodiment, one first buffer member 3A and one second buffer member 3B are provided on both surfaces of the flange 41 one by one. Therefore, when a plurality of both the buffer members 3A and 3B are arranged on one side, a possible dimensional variation does not occur.

Next, a seventh embodiment of the present invention will be described below with reference to FIG. Note that members having substantially the same functions as those in the sixth embodiment are denoted by the same reference numerals, and only different points from the sixth embodiment will be described. In the sixth embodiment, both surfaces of the flange 41 are sandwiched between the first and second donut-shaped buffer members 3A and 3B.
In the present embodiment, the flange portion 41 is provided by only one cushioning member 3 provided with a holding portion 3a having a substantially U-shaped cross section for holding the flange portion 41.
Is sandwiched.

In this acceleration sensor, in addition to the effects of the sixth embodiment, the buffer member 3 is provided with the holding portions 3a for holding the flange portion 41. Need not be provided, and an effect of facilitating assembly can be further obtained.

Further, since the flange portion 41 is held by the cushioning member 3 provided with the holding portion 3a for holding the flange portion 41,
As compared with the case where the both sides of the flange portion 41 are sandwiched by the two cushioning members 3A and 3B, the number of positioning portions for sandwiching can be reduced, and the dimensional accuracy can be increased.

Further, since the flange 41 is held by the cushioning member 3 provided with the holding portion 3a for holding the flange 41,
The shock absorbing effect in the direction perpendicular to the holding direction is high.

Next, an eighth embodiment of the present invention will be described below with reference to FIGS. It is to be noted that the same members as those of the fourth embodiment are denoted by the same reference numerals, and only the parts different from those of the fourth embodiment will be described. The present embodiment is basically the same as the fourth embodiment, except that the cover 15 of the sensor element 1 is provided with a wall portion having a substantially square outer wall surface 15a when viewed from the standing direction. One side is formed in an open box shape,
The case 22 of the body 2 has an upright wall portion having a substantially circular inner wall surface 22c as viewed from the upright direction, and the outer wall surface 15a of the cover 15 of the sensor element 1 and the inner wall surface 22c of the case 22 of the body 2 The two cushioning members 3A and 3B are arranged between them, and the flange 41 of the hermetic header 4 is sandwiched.

In such an acceleration sensor, in addition to the effects of the fourth embodiment, the cover 15 of the sensor element 1
Between the outer wall surface 15a and the inner wall surface 22c of the case 22 of the case 2, there are four gaps 25 when viewed from the standing direction. By arranging them, it is not necessary to provide a space for arranging both buffer members 3A and 3B, and the acceleration sensor itself can be reduced in size.

Next, a ninth embodiment of the present invention will be described below with reference to FIG. Note that members having substantially the same functions as those in the eighth embodiment are denoted by the same reference numerals, and only different points from the eighth embodiment will be described. This embodiment is basically the same as the eighth embodiment, except that the first cushioning member 3A
The positioning part 22d for positioning the
Is formed on the inner surface of the stepped portion 21b provided in the above. The positioning portion 22d has a concave shape in which the spherical first buffer member 3A is partially fitted.

In this acceleration sensor, in addition to the effects of the eighth embodiment, the first cushioning member 3A is positioned by the positioning portion 22d provided on the inner surface of the body 2, so that the assembly is easy. The effect can be further achieved.

Next, a tenth embodiment of the present invention will be described below with reference to FIGS. Note that members having substantially the same functions as those in the eighth embodiment are denoted by the same reference numerals, and only different points from the eighth embodiment will be described. 8th
In the embodiment, both sides of the flange 41 of the hermetic header 4 are sandwiched between the first and second spherical cushioning members 3A and 3B, whereas in the present embodiment, the flange 41 is sandwiched. 4 provided with a holding portion 3a having a substantially U-shaped cross section
The configuration is such that the flange portion 41 is sandwiched between the two cushioning members 3.

In this acceleration sensor, in addition to the effects of the eighth embodiment, the buffer member 3 has the holding portions 3a for holding the flange portion 41. Need not be provided, and an effect of facilitating assembly can be further obtained.

Further, since the flange portion 41 is held by the cushioning member 3 provided with the holding portion 3a for holding the flange portion 41,
The shock absorbing effect in the direction perpendicular to the holding direction is high.

Next, an eleventh embodiment of the present invention will be described below with reference to FIG. The members having substantially the same functions as those of the fourth embodiment are denoted by the same reference numerals,
Only different points from the embodiment will be described. In the fourth embodiment,
The flange portion 41 extends from the hermetic header 4, whereas, in the present embodiment, the flange portion 41 is substantially at the center of the sensor element 1, that is, the noise protection circuit board 14 and the cover 1.
The sensor element 1 extends from a position near the center of gravity of the sensor element 1 at a substantially center between the bottom of the sensor element 5 and the bottom of the sensor element 5.

In such an acceleration sensor, in addition to the effect of the fourth embodiment, the flange 41 is extended near the center of gravity of the sensor element 1, so that an impact parallel to the flange 41 is applied. In addition, the sensor element 1 does not make a displacement such as shaking the head.

Next, a twelfth embodiment of the present invention will be described below with reference to FIG. In addition, members having substantially the same functions as those of the fourth embodiment are denoted by the same reference numerals, and only different points from the fourth embodiment will be described. In the fourth embodiment, a flange 41 extending from the hermetic header 4 is provided.
In this embodiment, for example, the flange portion 41 extended from the hermetic header 4 and the case 22 of the body 2 are connected to each other. A buffer support member 5 is formed in a U-shape to have elasticity by using a stainless steel or copper metal material, and the sensor element 1 is suspended and supported in the body 2 by the buffer support member 5. .

In such an acceleration sensor, the buffer support member 5 for supporting the sensor element 1 suspended in the body 2 is provided.
Due to the elasticity, the shock applied to the body 2 is absorbed, so that the sensor element 1 is hardly damaged, and an accurate acceleration can be detected.

Further, since the buffer support member 5 is made of a metal material, its physical properties are stable even in a high-temperature or high-humidity environment, and fluttering does not easily occur in acceleration detection.

The shape of the cushioning support member 5 is not limited to a U-shape. For example, an S-shape shown in FIG.
A coil shape shown in FIG. 16 may be used.
A leaf spring having a letter shape may be used.

In the fourth to eighth, tenth, and eleventh embodiments, the positioning part 22d for positioning the cushioning member is not provided. However, as in the ninth embodiment, the positioning part 22d is not provided. By providing 22d,
The effect that assembly becomes easy can be produced.

In the sixth embodiment, each of the first buffer member 3A and the second buffer member 3B has a donut shape, and the flange portion 41 is provided with one buffer member 3 from both sides.
Although it is configured to be sandwiched by A and 3B, even when only one of the first cushioning member 3A or the second cushioning member 3B is made into a donut shape, this may occur when a plurality of cushioning members are arranged on one side. Obtained dimensional variations hardly occur.

Further, in the twelfth embodiment, the cushioning support member 5 is provided between the flange 41 provided on the hermetic header 4 and the body 2, but the flange 41 provided on the cover 15 and the body 2 are provided. Even if the buffer support member 5 is provided between the two, the shock applied to the container body 2 is absorbed by the elasticity of the buffer support member 5, so that the sensor element 1 is hardly damaged, and accurate acceleration can be detected. Can be.

[0066]

According to the acceleration sensor of the present invention, the shock applied to the body is absorbed by the elasticity of the cushioning member disposed between the inner surface of the body and the sensor element. It becomes difficult to be damaged, and accurate acceleration can be detected. Also, since only the body is used for external mounting, and even the sensor element housed in the body is not used for external mounting,
Since there is no need to provide a communication hole communicating with the interior of the sensor element inside the container, manufacturing is facilitated.

The acceleration sensor according to the second aspect is the first aspect.
In addition to the effects of the acceleration sensor described above, even if the shock absorbing member is deformed by receiving an impact, the rigid member is harder to deform because the rigidity is greater than the shock absorbing member. The displacement hardly occurs, and the acceleration can be detected more accurately.

In the acceleration sensor according to the third aspect of the present invention, since the cushioning member has high flexibility based on the minute gap, the shock applied to the body is easily absorbed, and the sensor element is hardly damaged. In addition, it is possible to further achieve the effect described in claim 1 that an accurate acceleration can be detected.

The acceleration sensor according to the fourth aspect is the first aspect.
In addition to the effects of the acceleration sensor described above, in order to dispose a buffer member between the outer surface of the sensor element and the inner surface of the body, the entire sensor element must be accurately positioned at a predetermined position. Since the buffer member is arranged between the flange and the inner surface of the body so as to sandwich the flange, the flange is positioned at the predetermined position even if the entire sensor element is not accurately positioned at the predetermined position. Since it is sufficient if the positioning is performed with high accuracy, the entire sensor element does not have to be positioned at a predetermined position with much trouble, and the assembly becomes easy.

In the acceleration sensor according to the fifth aspect, since the cushioning member is positioned by the positioning portion provided on the inner surface of the body, the effect according to the fourth aspect that the assembly becomes easy can be further achieved.

The acceleration sensor according to the sixth aspect is the fourth aspect.
In addition to the effect of the acceleration sensor described above, since one buffer member is provided on at least one side of the flange portion, when a plurality of buffer members are provided, dimensional variations that can occur do not occur.

The acceleration sensor according to the seventh aspect is the fourth aspect.
In addition to the effects of the acceleration sensor described above, since a gap exists between the outer wall surface of the sensor element and the inner wall surface of the body when viewed from the standing direction, a buffer member is provided in the gap. Thus, it is not necessary to provide a space for disposing the buffer member.

In the acceleration sensor according to the present invention, since the buffer member has the holding portion for holding the flange portion, it is not necessary to dispose the buffer member on both sides of the flange portion, and the assembly is easy. The effect of claim 4 can be further achieved.

The acceleration sensor according to the ninth aspect provides the acceleration sensor according to the eighth aspect.
In addition to the effects described above, since one buffer member is provided, when a plurality of buffer members are provided, possible dimensional variations do not occur.

In the acceleration sensor according to the tenth aspect, in addition to the effect of the invention according to the fourth aspect, since the flange is extended near the center of gravity of the sensor element, the acceleration sensor receives an impact parallel to the flange. In addition, the sensor element does not move as if to shake the head.

In the acceleration sensor according to the eleventh aspect, the shock applied to the body is absorbed by the elasticity of the cushioning support member that suspends and supports the sensor element in the body, so that the sensor element is less likely to be damaged and accurate. Acceleration can be detected.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing a first embodiment of the present invention.

FIG. 2 is a front sectional view showing a second embodiment of the present invention.

FIG. 3 is a front sectional view showing a third embodiment of the present invention.

FIG. 4 is a front sectional view showing a fourth embodiment of the present invention.

FIG. 5 is a front sectional view showing a fifth embodiment of the present invention.

FIG. 6 is a front sectional view showing a cushioning member according to a sixth embodiment of the present invention.

FIG. 7 is a front sectional view showing a cushioning member according to a seventh embodiment of the present invention.

FIG. 8 is an exploded perspective view showing the inside of a vessel according to an eighth embodiment of the present invention.

FIG. 9 is a plan sectional view showing the above.

FIG. 10 is a perspective view showing a case according to a ninth embodiment of the present invention.

FIG. 11 is a perspective view showing a cushioning member according to a tenth embodiment of the present invention.

FIG. 12 is a cross-sectional view showing the cushioning member of the above.

FIG. 13 is a front sectional view showing an eleventh embodiment of the present invention.

FIG. 14 is a front sectional view showing a twelfth embodiment of the present invention.

FIG. 15 is a perspective view showing an S-shaped buffer support member.

FIG. 16 is a perspective view showing a coil-shaped buffer support member.

FIG. 17 may be a leaf spring having an S-shape in plan view.

FIG. 18 is a front sectional view showing a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Sensor element 11 Sensor chip 15 Cover (rigid member) 15a Outer wall surface 2 Body 22c Inner wall surface 22d Positioning part 25 Gap 3 Buffer member 3a Clamping part 3A First buffer member 3B Second buffer member 4 Hermetic header (rigid member) ) 41 flange 5 cushioning support member

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Eiichi Kokubo 1048 Kazumasa Kadoma, Osaka Pref.Matsushita Electric Works, Ltd. (72) Inventor Yasushi Arikawa 1048 Kadoma Kadoma, Kadoma City, Osaka Prefecture Inside Matsushita Electric Works Co., Ltd. 1048 Kadoma Kadoma, Kadoma, Osaka Prefecture F-term in Matsushita Electric Works, Ltd. (reference) 3J048 AA01 BA02 DA03 EA07 3J066 AA01 AA22 BA01 BB01 BC01 BD05

Claims (11)

[Claims] 1. A sensor element containing a sensor chip for detecting acceleration, a body containing the sensor element, a cushioning member having elasticity and disposed between an inner surface of the body and the sensor element, An acceleration sensor, characterized in that only the body is externally mounted. 2. The acceleration sensor according to claim 1, wherein a rigid member having a higher rigidity than the buffer member is provided between the sensor chip and the buffer member. 3. The acceleration sensor according to claim 1, wherein the buffer member has a minute gap so as to have elasticity. 4. The acceleration sensor according to claim 1, wherein the sensor element has a flange portion extending inside the body, and the buffer member is disposed so as to sandwich the flange portion from both sides. 5. The acceleration sensor according to claim 4, wherein a positioning portion for positioning the buffer member is provided in the body. 6. The acceleration sensor according to claim 4, wherein one of said buffer members is provided on at least one side of said flange. 7. A wall having an outer wall surface having a substantially square shape as viewed from an erecting direction is erected on the sensor element, and a wall having an inner wall surface having a substantially circular shape as viewed from the erecting direction is provided on the sensor body. The acceleration sensor according to claim 4, wherein the buffer member is provided between the outer wall surface of the sensor element and the inner wall surface of the body. 8. The acceleration sensor according to claim 4, wherein said buffer member has a holding portion for holding said flange portion. 9. The apparatus according to claim 8, wherein one buffer member is provided.
The acceleration sensor according to any one of the preceding claims. 10. Near the center of gravity of the sensor element,
The acceleration sensor according to claim 4, wherein the flange is extended. 11. A sensor element for accommodating a sensor chip for detecting acceleration, a body for housing the sensor element, and a buffer support member having elasticity and suspending and supporting the sensor element in the body. An acceleration sensor characterized by the above-mentioned.