JP2001174504A - Tuner for load-pull or source-pull measurement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tuner capable of preventing such a problem that efficient measurement cannot be performed when a VSWR is incorrect or a loss is present in measurement through a triplexer. SOLUTION: This tuner for load-pull or source-pull measurement capable of increasing an impedance as viewed from a high-frequency transistor 8 to a tuner main body 15 side with a VSWR of any phase, comprises a tuner main body 14 formed of a bar-shaped center conductor 14a and a ground conductor 14b formed of a number of metal pieces 14c partly allowed to move vertically relative to the center conductor 14a and an impedance transforming part 12 formed of a number of metal pieces 12c allowed to move, together with a groove-shaped external conductor 12b connected to the ground conductor 14b, vertically relative to the bar-shaped conductor 12a having a diameter different from that of the center conductor 14a. A number of phase regulating lines corresponding to the high-frequency transistor 8 must not be prepared, VSWA of any phase can be increased, and thus an efficient measurement can be performed easily.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load-pull or source-pull measurement tuner used for load-pull measurement and source-pull measurement as a method for evaluating characteristics of a high-frequency transistor.

[0002]

2. Description of the Related Art In recent years, measurement or design techniques for microwave semiconductor devices and devices and microwave circuits have been remarkably advanced in the field of microwave technology, and circuit design has been carried out by evaluating the characteristics of microwave semiconductor devices and devices. In order to make effective use of such characteristics, techniques for accurately measuring these characteristics are becoming increasingly important.

Conventionally, a tuner is connected to an input / output terminal of a high-output device as a microwave semiconductor element, for example, a high-frequency transistor for microwaves, for example, to change the load of the tuner. Accordingly, load-pull measurement or source-pull measurement for examining electrical characteristics such as load dependence and input power dependence of output, efficiency, and distortion characteristics of the high-frequency transistor is performed.

In microwave semiconductor elements and devices, not only fundamental frequency but also higher harmonics such as twice (second harmonic) and triple (third harmonic) the fundamental frequency are used. It is known that the electrical characteristics are improved by taking into account the load. In load-pull measurement or source-pull measurement, measurements are also made in consideration of higher-order harmonics.

FIG. 3 shows a schematic configuration diagram of a conventional load-pull measurement system considering such third harmonics.

In FIG. 3, 21 is an input signal source, 22 is an amplifier for amplifying the signal of the input signal source 21, 23 is a power meter for measuring the power of the input signal, and 24 is a power meter 23 connected to a signal system. 25 is an isolator for preventing signal reflection / leakage to the input signal source 21 side, 26
Is a bias tee for supplying power to the device under test 28, 27 is a tuner for source pull measurement connected between the signal system and the input terminal of the device under test 28, The impedance is set to a desired value in accordance with the specification of the measurement, for example, optimization is performed so as to obtain high gain and low distortion.

Reference numeral 28 denotes a device under test (Device Under Test).
, Hereinafter referred to as DUT), for example, GsAsFE.
It is a high-frequency transistor such as T. Reference numeral 32 denotes a tuner for measuring the load pull for the fundamental frequency, which is connected between the output terminal of the DUT 28 and the signal system via the triplexer 29. Reference numerals 30 and 31 denote the load pull for the second harmonic and the third harmonic, respectively. Tuner. These load-pull measurement tuners 30 to 32 change the impedance on the output side as viewed from the output terminal of the DUT 28 in accordance with the specification of the measurement to obtain a desired value, for example, a value that provides high efficiency and low distortion. Set to optimize. Thus, the load conditions for obtaining the maximum output of the high-frequency transistor as the DUT 28 and the load conditions for obtaining the maximum efficiency and low distortion are obtained.

The tuner 27 having the same configuration as the tuner 27 for measuring the source pull and the tuners 30 to 32 for measuring the load pull is basically used. This tuner has, for example, an elongated cylindrical outer conductor having a U-shaped cross section, a rod-shaped center conductor having a length equal to the length of the outer conductor, disposed in parallel with the center thereof, and electrically connected to the outer conductor. And a movable metal piece set at a predetermined position at a predetermined interval. The outer conductor and the movable metal piece are connected to the ground system of the measurement system, the center conductor is connected to the signal system of the measurement system, and the center conductor has a characteristic impedance.
A predetermined capacitance component that functions as a distributed constant line regarded as a 50Ω transmission line and is determined by the facing area and facing distance of the portion where the center conductor and the movable metal piece face each other, and the transmission line obtained by the remaining portion of the center conductor By changing the length, desired measurement conditions are obtained.

Reference numeral 33 denotes a bias tee for supplying power to the DUT 28; 34, a power meter for measuring the power of the output signal; 35, a coupler for connecting the power meter 34 to a signal system; This is a spectrum analyzer for analyzing frequency components.

The tuners 30 to 32 include a tuner 27 for source pull measurement and a fundamental frequency / secondary frequency based on data calibrated by a network analyzer in advance for use in a measurement system including a tuner body in measurement. As a control device for controlling the load-pull measurement tuners 32, 30 and 31 to various positions (impedance) for the harmonic and the third harmonic,
For example, a personal computer (not shown) is connected.

However, in the measurement system having the above configuration, the VSWR (Voltage Stand-Alone) of the triplexer 29 is used.
In the case where the ing wave ratio (voltage standing wave ratio) is bad or the triplexer 29 has a loss, the VSWR measurable by this measurement system is a load-pull measurement tuner 30 to 32.
May be smaller than VSWR. Therefore, for example, FETs used in power amplifiers for mobile phones
However, there is a problem that a sufficient VSWR may not be obtained when the DUT 28 having a low impedance is measured.

In order to solve such a problem, FIG.
The desired VS can be obtained by using a measurement system having the configuration shown in FIG.
Getting the WR was going on. In FIG. 4, FIG.
The same parts as in are denoted by the same reference numerals. Reference numeral 38 denotes an impedance converter. When a low-impedance DUT 28 such as an FET used in a power amplifier for a mobile phone is to be measured, the characteristic impedance of the transmission line due to the center conductor of the load-pull measurement tuner 32 with respect to the fundamental frequency is 50Ω. In this case, the impedance is set to be lower than 50Ω, such as 30Ω or 20Ω. Reference numeral 37 denotes a phase adjustment line, for example, an air line. The length of the line 37 rotates the load phase to a desired position. The characteristic impedance of this line 37 is 50Ω which is the same as the characteristic impedance of the transmission line of the tuner 32.

By connecting the impedance converter 38 and the phase adjusting line 37 between the DUT 28 and the tuner 32 as described above, the absolute value of the reflection coefficient is increased (the VSWR is increased) by the impedance converter. Since the phase of the DUT 28 is adjusted to a phase at which the performance of the DUT 28 can be extracted by the phase adjustment line, a sufficient VSWR can be obtained, and appropriate measurement can be performed for the DUT 28 having a low impedance.

[0014]

However, the VSWR of the triplexer 29 in the conventional measurement system as shown in FIG.
When the measurement cannot be performed due to poor quality or loss, a measurement system is configured using an impedance converter 38 and a line 37 for phase adjustment as a measurement system as shown in FIG. In that case, DUT28 or its DUT
Since the required amount of phase adjustment (the amount of phase rotation) is different if the target system of 28 is different, there is a problem that a line 37 for phase adjustment must be prepared for the necessary amount.

Therefore, not only is the measuring system itself expensive as the number of lines 37 required is increased, but also it takes time to adjust the phase by the lines 37, which requires a troublesome operation. Was.

The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to provide a conventional method for each phase rotation amount required according to the specification of a high-frequency transistor as a device to be measured. A load pull that can easily perform phase adjustment without preparing a large number of phase adjustment lines, and can perform appropriate measurements on low-impedance high-frequency transistors even when the VSWR of the triplexer is bad or the triplexer has loss. Another object is to provide a tuner for measuring a source pull.

[0017]

A load-pull or source-pull measuring tuner of the present invention is a load-pull or source-pull measuring tuner which is connected to the input side or output side of a high-frequency transistor and evaluates the electrical characteristics of the high-frequency transistor. There is a rod-shaped center conductor, and a cylindrical ground conductor arranged around the center conductor, and a part of the ground conductor along the axial direction is movable in a direction perpendicular to the center conductor. A tuner body composed of a large number of metal pieces, a rod-shaped conductor having a different thickness from the center conductor, a groove-shaped outer conductor disposed around the rod-shaped conductor, and an opening of the outer conductor. A plurality of metal pieces that are vertically movable with respect to the rod-shaped conductor, and one end of the rod-shaped conductor is connected to one end of the center conductor, and The body comprises: an impedance conversion unit connected to the ground conductor; and a rod-shaped conversion conductor having a continuously changed thickness, which smoothly connects one end of the rod-shaped conductor and one end of the center conductor. It is characterized by the following.

According to the load-pull or source-pull measuring tuner of the present invention, the tuner main body is composed of the central conductor for transmitting the high-frequency electric signal and the cylindrical ground conductor disposed around the central conductor, and the axial direction of the ground conductor Is composed of a large number of metal pieces movable in the vertical direction with respect to the center conductor. By moving in the direction, a variable capacitance can be formed at a desired position, and scaling can be performed for measurement. Therefore, even when the center conductor is bent or inclined, the variable range of the capacitance can be widened and the measurement range can be widened, enabling measurement under a wide range of conditions and excellent reproducibility of measurement. It becomes a tuner for measuring load pull or source pull.

According to the tuner for measuring load pull or source pull of the present invention, in addition to the tuner body, a rod-shaped conductor having a thickness different from the center conductor of the tuner body;
The VSWR, which is made up of a groove-shaped outer conductor disposed around the rod-shaped conductor and a plurality of metal pieces movable across the opening of the outer conductor and perpendicular to the rod-shaped conductor, is increased. The tuner body and the center conductor are smoothly connected to each other by a transforming conductor whose thickness is continuously changed.The impedance transforming part has a rod-shaped conductor whose thickness is equal to the center conductor of the tuner body. Has a different thickness, so that its characteristic impedance is different from that of the center conductor of the tuner body, so that it functions as an impedance converter that can increase the VSWR.
A function that can arbitrarily adjust the impedance phase by changing the capacitance component determined by the facing area and spacing of the part where the rod-shaped conductor and the movable metal piece face each other, and the transmission line length obtained by the remaining rod-shaped part VSWR at the desired phase
Can be increased. Therefore, even when the VSWR of the triplexer used in the measurement system is bad or lossy, it is not necessary to prepare a large number of separate lines for phase adjustment depending on the DUT and the system to be subjected to the DUT unlike the conventional measurement system. In addition, complicated phase adjustment using the phase adjustment line is not required, and the measurement system itself can be configured at low cost.

In the impedance conversion section, a part of the outer conductor along the axial direction is constituted by a large number of metal pieces movable in a direction perpendicular to the rod-shaped conductor. By moving the piece in a direction perpendicular to the center conductor, a variable capacitance is formed at a desired position, and scaling can be performed for measurement.

Therefore, even when the center conductor has a bend or has an inclination, as in the case of the tuner body, the variable range of the capacitance can be widened and the measurement range can be widened, and measurement can be performed in a wide range of conditions. In addition, it becomes a load-pull or source-pull measurement tuner with excellent measurement reproducibility.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a tuner for measuring a load pull or a source pull according to the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a schematic configuration diagram showing an example of a measurement system using the load-pull or source-pull measurement tuner of the present invention, taking into account the third harmonic.

In FIG. 1, 1 is an input signal source, 2 is an amplifier for amplifying a signal from the input signal source 1, 3 is a power meter for measuring the power of the input signal, and 4 is a power meter for a signal system. Coupler for connection, 5 is input signal source 1
6 is a bias tee for supplying power to the DUT 8, and 7 is a source pull measurement tuner connected between the signal system and the input terminal of the DUT 8. Yes, the impedance on the input side viewed from the DUT 8 is set to a desired value in accordance with the specification of the measurement, for example, optimization is performed to obtain high gain and low distortion.

Reference numeral 8 denotes a GaAs FET as a DUT, for example.
And 9 is a triplexer.

The reference numeral 15 designates a DU through the triplexer 9.
It is a load pull measurement tuner of the present invention relating to a fundamental frequency, which is connected between an output terminal of T8 and a signal system.
The load-pull measurement tuner 15 of the present invention includes a tuner body 14, an impedance conversion unit 12, and a conversion conductor 13. Reference numerals 10 and 11 denote load pull measurement tuners for the second harmonic and the third harmonic, respectively. These tuners are adjusted independently or in combination, so that the output side from the output terminal of the DUT 8 is viewed from the output terminal. Optimize the impedance according to the measurement specifications,
This is set to a desired value, for example, a value that provides high efficiency and low distortion.

Reference numeral 16 denotes a bias tee for supplying power to the DUT 8, 17 denotes a power meter for measuring the power of the output signal, 18 denotes a coupler for connecting the power meter 17 to a signal system, and 19 denotes an output signal. This is a spectrum analyzer for analyzing frequency components.

In the measurement, tuners 10, 11, and 15
Source pull measurement tuner 7 and load pull measurement tuner 7 based on data obtained by calibrating RF components used for measurement including
For example, a personal computer (not shown) is connected as a control device for controlling the positions 10, 11, and 15 to various positions (impedances).

The load pull measurement tuner 15 of the present invention shown in FIG. 1 is a tuner for the fundamental frequency in this embodiment. FIG. 2 shows an example of an embodiment of the load-pull measurement tuner 15. 2A is a cross-sectional view in the direction along the signal transmission direction, FIG. 2B is a cross-sectional view in the direction orthogonal to the signal transmission direction in the tuner body 14, and FIG.
(C) is a cross-sectional view in a direction orthogonal to the signal transmission direction in the impedance conversion unit 12.

As shown in FIGS. 1 and 2, the load-pull measurement tuner 15 of the present invention includes a tuner body 14, an impedance converter 12, and a conversion conductor 13. In this example, they are configured in a housing 15a that forms a common external conductor. Reference numerals 15b and 15c denote connectors for connecting to the triplexer 9 and the bias tee 16, respectively.

The tuner body 14 has a rod-shaped center conductor 14a.
And a cylindrical grounding conductor arranged around the center conductor 13a, an elongated cylindrical grounding conductor 14b having a U-shaped cross section in this example, and an axial direction corresponding to an opening of the grounding conductor 14b. And a plurality of metal pieces 14c individually movable in a direction perpendicular to the center conductor 14a. The ground conductor 14b is disposed parallel to the center conductor 14a, and the length of the ground conductor 14b and the length of the metal piece 14c are substantially equal to the length of the center conductor 14a. In this example, the casing 15a of the tuner 15 also serves as the grounding conductor 14b, but the cross-sectional shape of the grounding conductor 14b may be U-shaped or circular. Further, the center conductor 14a of the tuner body 14 is set so as to function as a distributed constant line which is generally regarded as a transmission line having a characteristic impedance of 50Ω.

A large number of metal pieces 14c arranged so as to constitute a part of the cylindrical ground conductor 14b are electrically connected to the ground conductor 14b and move the individual metal pieces 14c with respect to the center conductor 14a. In this figure, the metal pieces are arranged so as to be movable in the vertical direction, that is, in the direction perpendicular to the center conductor 14a.
14C shows a state in which 14c is arranged at the same interval with respect to the center conductor 14a.

A large number of metal pieces 14c arranged in this manner
According to the above, these can be arbitrarily combined and independently controlled, and scaling can be performed at a desired position with respect to the center conductor 14a. As a result, a predetermined capacitance component determined by the facing area and the spacing between the metal piece 14c and the center conductor 14a can be obtained at the position where the metal piece 14c is arbitrarily combined, and is obtained by the capacitance component and the remaining portion of the center conductor 14a. With the transmission line used, the impedance on the output side of the DUT 8 can be changed to a desired condition according to the specification of the measurement. As a result, the measurable VSWR can be increased, and the measurement range can be widened.

Further, since each of the large number of metal pieces 14c is fixed at a fixed position in the horizontal direction and movable only in the vertical direction, the reproducibility of the set position of the metal piece 14c is high, and various conditions can be set. When the measurement is repeated, the reproducibility of the measurement can be improved.

The impedance conversion unit 12 includes a tuner main body.
14, a rod-shaped conductor 12a having a thickness different from that of the center conductor 14a, a groove-shaped outer conductor 12b arranged around the rod-shaped conductor 12a at a predetermined interval, and straddling the opening of the groove-shaped outer conductor 12b. And a plurality of metal pieces 12c movable vertically with respect to the rod-shaped conductor 12a. One end of the rod-shaped conductor 12a is connected to one end of the center conductor 14a via the conversion conductor 13, and the outer conductor 12b Are electrically connected to the ground conductor 14b. In this example, similarly to the ground conductor 14b of the tuner body 14, the casing 15a of the tuner 15 also serves as the external conductor 12b.

In this case, the cross-sectional shape of the outer conductor 12b may be U-shaped or circular as well as U-shaped as shown in FIG. 2C. Further, since the outer conductor 12b is movable in the vertical direction with respect to the center conductor 12a, the center conductor 12a of the impedance converter 12 is connected to the tuner body 14a.
Is set as a distributed constant line which is regarded as a transmission line having a characteristic impedance lower than that of 50Ω, so that the DUT 8 having a low impedance can be measured.

A large number of metal pieces 12c arranged across the opening of the groove-shaped outer conductor 12b are electrically connected to the outer conductor 12b while keeping the individual metal pieces 12c at predetermined intervals with respect to the center conductor 12a. In this figure, the metal pieces 12c are arranged so as to be movable in the vertical direction, that is, in the direction perpendicular to the center conductor 12a. FIG.

A large number of metal pieces 12c arranged in this manner
According to the above, at the position where the metal piece 12c faces the center conductor 12a, a predetermined capacitance component determined by the facing area and the facing distance is obtained, and the transmission line obtained by the capacitance component and the remaining portion of the center conductor 12a is obtained. As a result, the VSWR that can measure the impedance on the output side of the DUT 8 in accordance with the measurement specifications can be increased, and the necessary phase rotation can be obtained, so that the measurement range can be widened. This is because the distance between the metal piece 12c and the center conductor 12a can be arbitrarily determined.
And the desired phase rotation can be obtained.

Further, since each of the large number of metal pieces 12c is fixed at a fixed position in the horizontal direction and movable only in the vertical direction, the distance between the central conductor 12a and the metal piece 12c is narrowed at an arbitrary position. Can be set so that the center conductor 12
Even when a is bent or inclined, the variable range of the capacitance can be widened and the measurement range can be widened.
The reproducibility of the set position is high, and the reproducibility of the measurement can be improved when the measurement is repeatedly performed by setting various conditions.

The conversion conductor 13 is a center conductor of the tuner body 14.
For example, a rod-shaped conductor 13a whose thickness is continuously changed in a tapered shape for smoothly connecting one end of the rod-shaped conductor 12a of the impedance conversion section 12 having a different characteristic impedance from the one end of the rod-shaped conductor 12a. . Thus the center conductor
Connection between conductors having different characteristic impedances by smoothly connecting one end of the rod-shaped conductor 12a to the other end by means of a conversion conductor 13 whose thickness has been continuously changed from the thickness of one end to the thickness of one end of the rod-shaped conductor 12a. It is possible to prevent the occurrence of signal reflection at the site and the resulting loss.

The amount of phase change of the length of the conversion conductor 13 varies depending on the length, and the impedance conversion unit 12 and the tuner body 14 also include the amount of change so as to obtain a desired phase. Since the impedance is adjusted, the conversion conductor 13 may be set to a length that can be easily manufactured.

13b is a rod-shaped conductor 12a around the conversion conductor 13.
In this example, like the external conductor 12b, the casing of the tuner 15 also serves as the external conductor 13b of the conversion unit.

As described above, according to the load-pull or source-pull measuring tuner 15 of the present invention, the impedance conversion section 12 having the above configuration is connected to the tuner body 14 having the above configuration via the conversion conductor 13. By doing,
When measuring a low impedance DUT 8 such as an FET used in a power amplifier for a mobile phone, when the characteristic impedance of the transmission line of the center conductor 14a of the tuner body 14 is 50Ω, the impedance conversion unit 12 is changed to 30Ω or 20Ω.
Can be set arbitrarily to an impedance lower than 50Ω, such as Ω, so that the VSWR of the
Even if the power is bad or there is a loss, the impedance conversion unit 12 sets the DU in accordance with the specification of the DUT 8.
The impedance when the output side is viewed from the output terminal of T8 can be optimized and set to a desired value, for example, a value that provides high gain and low distortion, and VSWR can be increased at a desired phase. As a result, it is advantageous in that the VSWR can be increased while the loss including the entire triplexer 9 and the tuner 15 can be suppressed to a low level.
Appropriate measurement can be performed on the low impedance DUT 8 while obtaining WR.

The amount of phase rotation by the impedance converter 12 in the tuner 15 for measuring load pull or source pull of the present invention is determined, for example, by the following procedure.

First, the phase for which the VSWR is to be increased and the absolute value of the reflection coefficient corresponding to the VSWR are input to a tuner control device (not shown) such as a personal computer. Thereafter, the tuner control device performs scaling of the tuner body 14 and the impedance conversion unit 12 according to the values, and determines a phase adjustment value by the impedance conversion unit 12. Then, according to the phase adjustment value, the impedance points at which the load pull measurement or the source pull measurement is actually performed are set to a number of metal pieces 14 c movable in the vertical direction of the tuner body 14 and the impedance conversion section 12.
By setting the vertically movable metal pieces 12c at predetermined intervals and at predetermined positions, and setting the vertically movable outer conductors 12b at predetermined intervals, a desired phase rotation amount is determined.

It should be noted that the present invention is not limited to the above examples, and that various changes and improvements can be made without departing from the spirit of the present invention. For example, in the above example, the tuner for the fundamental frequency has been described as an example of the load pull measurement tuner of the present invention.
Depending on the specifications of T and measurement, for example, the frequency at which the impedance point is determined is set to the second or third harmonic to be used as a tuner for the second or third harmonic, or the source pull measurement on the source side of the DUT Needless to say, it can also be used as a tuner.

[0047]

As described above, according to the load-pull or source-pull measuring tuner of the present invention, the tuner body is composed of the center conductor and the cylindrical grounding conductor, and a part of the grounding conductor along the axial direction is centered. Since it is constituted by a large number of metal pieces movable in the vertical direction with respect to the conductor, by moving these many metal pieces alone or in any combination with respect to the central conductor in the vertical direction, A variable capacitance is formed at the position of, and scaling is performed for measurement. Therefore, the variable range of the capacitance can be widened and the measurement range can be widened, so that a tuner for load-pull or source-pull measurement capable of performing measurement under a wide range of conditions and having excellent measurement reproducibility can be obtained.

According to the load-pull or source-pull measuring tuner of the present invention, in addition to the tuner body, a rod-shaped conductor having a thickness different from the center conductor of the tuner body;
A groove-shaped outer conductor disposed around the rod-shaped conductor, and a number of metal pieces movable vertically in relation to the rod-shaped conductor over the opening of the outer conductor. Since one end is smoothly connected to one end of the center conductor of the tuner main body via the conversion conductor and the external conductor is provided with an impedance conversion part connected to the ground conductor of the tuner main body, a desired impedance conversion part is used. VSWR can be increased at the phase of the above, and the phase can be easily adjusted. Therefore, even when the VSWR of the triplexer used in the measurement system is bad or lossy, the DUT and its DUT are not changed as in the conventional measurement system.
It is not necessary to prepare a large number of separate lines for phase adjustment depending on the target system, which eliminates the need for complicated phase adjustment using the line for phase adjustment and shortens the time required for adjustment and fabrication of the line for phase adjustment. In addition, the measurement system itself can be configured at low cost.

As described above, according to the present invention, for each phase rotation amount required according to the specification of the high-frequency transistor as the device to be measured, it is easy to prepare a large number of phase adjustment lines as in the related art. It is possible to provide a tuner for load-pull or source-pull measurement capable of performing phase adjustment and performing appropriate measurement even for a low-impedance high-frequency transistor even when the VSWR of the triplexer is bad or the triplexer has a loss.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing an example of a measurement system using a load-pull or source-pull measurement tuner of the present invention and considering up to the third harmonic.

2A is a cross-sectional view in a direction along a signal transmission direction showing an example of a load-pull or source-pull measurement tuner according to an embodiment of the present invention, and FIG. 2B is a signal transmission direction in a tuner body; Sectional view in a direction orthogonal to
FIG. 3C is a cross-sectional view in a direction orthogonal to the signal transmission direction in the impedance conversion unit.

FIG. 3 is a schematic configuration diagram showing an example of a measurement system using a conventional load-pull or source-pull measurement tuner and considering up to the third harmonic.

FIG. 4 is a schematic configuration diagram showing another example of a measurement system using a conventional load-pull or source-pull measurement tuner and considering up to the third harmonic.

[Explanation of symbols]

 8 DUT (high-frequency transistor) 12 Impedance converter 12a Bar-shaped conductor 12b External conductor 12c Metal piece 13 Conversion Conductor 14: Tuner body 14a: Central conductor 14b: Ground conductor 14c: Metal piece 15: Tuner for load pull measurement

Claims (1)

[Claims] 1. A load-pull or source-pull measuring tuner which is connected to an input side or an output side of a high-frequency transistor and evaluates electrical characteristics of the high-frequency transistor, comprising: a rod-shaped center conductor; A tuner main body composed of a plurality of metal pieces that are arranged in a cylindrical direction, and a part of the ground conductor along an axial direction is movable in a direction perpendicular to the center conductor; The conductor is a rod-shaped conductor having a different thickness, a groove-shaped outer conductor disposed around the rod-shaped conductor, and a movable in a direction perpendicular to the rod-shaped conductor over the opening of the external conductor. An impedance conversion section comprising a plurality of metal pieces, one end of the rod-shaped conductor being connected to one end of the center conductor, and the external conductor being connected to the ground conductor; and one end of the rod-shaped conductor. A load-pull or source-pull measurement tuner, comprising: a rod-shaped conversion conductor having a continuously changed thickness, which smoothly connects the one end of the center conductor to the other end.