JP2001164379A - Surface treating method and joining method - Google Patents
Surface treating method and joining methodInfo
- Publication number
- JP2001164379A JP2001164379A JP34860699A JP34860699A JP2001164379A JP 2001164379 A JP2001164379 A JP 2001164379A JP 34860699 A JP34860699 A JP 34860699A JP 34860699 A JP34860699 A JP 34860699A JP 2001164379 A JP2001164379 A JP 2001164379A
- Authority
- JP
- Japan
- Prior art keywords
- film
- metal
- coating
- processed
- ultrafine particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、有機材料で表面を
被覆された金属超微粒子、又は非金属超微粒子を用いた
表面処理方法及び接合方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treating method and a joining method using ultrafine metal particles or nonmetallic ultrafine particles whose surface is coated with an organic material.
【０００２】[0002]
【従来の技術】素材の表面処理方法としては、従来、例
えばスパッタリングやメッキなどが知られている。スパ
ッタリングは、真空チャンバを準備し、該真空チャンバ
内でターゲットである金属又は非金属材料と被処理部材
とを平行に配置し、イオンでターゲットを叩くことによ
りターゲット材を被処理部材表面に被着させ、これによ
り緻密な膜が形成される。また、メッキは電解メッキと
無電解メッキとがあるが、いずれにしてもメッキ槽を準
備し、そのメッキ槽内にメッキ液を入れて、そのメッキ
液中に被処理部材を浸漬して行う。2. Description of the Related Art Conventionally, as a surface treatment method for a material, for example, sputtering or plating is known. Sputtering prepares a vacuum chamber, arranges a target metal or non-metallic material and a member to be processed in parallel in the vacuum chamber, and deposits the target material on the surface of the member to be processed by hitting the target with ions. As a result, a dense film is formed. There are two types of plating, electrolytic plating and electroless plating. In any case, a plating bath is prepared, a plating solution is put into the plating bath, and the member to be processed is immersed in the plating solution.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、これら
の方法では、真空チャンバやメッキ槽等複雑な設備及び
プロセスが必要となる。また、金属材料とセラミクス材
料などの複数の種類の材料からなり、その混合比が徐々
に変化する傾斜材料膜を形成することが困難である。さ
らに、スパッタリングでは膜の成長速度が遅いため、厚
い膜を形成するには不向きであり、また粒子同士が緻密
に接合するため、内部引張り応力が大きく、膜の割れの
原因にもなる場合がある。However, these methods require complicated equipment and processes such as a vacuum chamber and a plating tank. In addition, it is difficult to form a gradient material film which is made of a plurality of types of materials such as a metal material and a ceramic material, and whose mixing ratio gradually changes. Furthermore, sputtering is not suitable for forming a thick film because the growth rate of the film is slow, and the particles are tightly bonded to each other, so that the internal tensile stress is large, which may cause cracking of the film. .
【０００４】本発明は、上記事情に鑑みて為されたもの
で、簡単な装置で容易に被処理材料表面の改質やコーテ
ィングを行うことができると共に、混合材料被膜や傾斜
材料被膜を容易に形成することができる表面処理方法を
提供することを目的とする。また、同種又は異種材料の
接合を比較的容易かつ低コストで行うことができる接合
方法を提供することを目的とする。The present invention has been made in view of the above circumstances, and it is possible to easily modify and coat the surface of a material to be treated with a simple apparatus, and to easily form a mixed material film or a gradient material film. It is an object to provide a surface treatment method that can be formed. It is another object of the present invention to provide a joining method capable of joining same or different materials relatively easily and at low cost.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に、請求項１に記載の発明は、有機材料で表面を被覆さ
れた金属超微粒子又は非金属超微粒子を溶媒に分散させ
た溶液を、噴霧装置によって被処理部材表面に噴霧して
微粒子材膜を堆積し、該微粒子材膜を加熱することによ
り、前記溶媒及び前記超微粒子表面の前記有機材料を除
去すると共に、前記被処理部材表面に前記超微粒子同士
が結合した被膜を形成することを特徴とする表面処理方
法である。Means for Solving the Problems In order to achieve the above object, the invention according to claim 1 provides a solution in which ultrafine metal particles or nonmetallic ultrafine particles whose surface is coated with an organic material are dispersed in a solvent. Spraying the surface of the member to be processed by a spray device to deposit a fine particle material film, and heating the fine particle material film to remove the solvent and the organic material on the surface of the ultrafine particles, and to remove the surface of the member to be processed. Forming a film in which the ultrafine particles are bonded to each other.
【０００６】これにより、有機材料で表面を被覆された
金属超微粒子又は非金属超微粒子を溶媒に分散させた溶
液を噴霧して微粒子材膜を形成し、この微粒子材膜を加
熱して被処理部材表面に被膜を形成するので、従来のよ
うに複雑な設備及びプロセスを必要とせずに、噴霧装置
及び加熱装置を用いて簡単に被処理部材表面に超微粒子
からなる被膜を形成することができる。また、噴霧量を
変えることにより、被膜の厚さを容易に変えることがで
き、噴霧量を多くすることにより、比較的厚い被膜を形
成することも容易に可能である。また、被膜の緻密性が
スパッタリングなどに比較して低いため、残留内部応力
が小さく、被膜の割れが生じ難い。さらに、噴霧により
被膜を形成するので、噴霧範囲を設定することにより選
択描画も可能であるため、マスクなどの特別な手段を必
要とせず簡便に被処理部材表面に被膜パターンを形成す
ることもできる。更に、超微粒子は比較的低温で超微粒
子同士の結合が生じるため、高温による処理が必要な
く、これにより内部応力の発生を防止しつつ、強固な結
合体を形成できる。Thus, a solution in which ultrafine metal particles or nonmetallic ultrafine particles whose surface is coated with an organic material is dispersed in a solvent is sprayed to form a fine particle material film, and the fine particle material film is heated to be treated. Since a film is formed on the surface of the member, a film made of ultrafine particles can be easily formed on the surface of the member to be processed by using a spraying device and a heating device without requiring complicated equipment and processes as in the related art. . Further, by changing the spray amount, the thickness of the coating can be easily changed, and by increasing the spray amount, it is possible to easily form a relatively thick coating. Further, since the denseness of the film is lower than that of sputtering or the like, the residual internal stress is small, and the film is less likely to crack. Further, since the coating is formed by spraying, selective drawing can be performed by setting the spraying range, so that a coating pattern can be easily formed on the surface of the member to be processed without requiring special means such as a mask. . Further, since the ultrafine particles are bonded to each other at a relatively low temperature, a treatment at a high temperature is not required, and thereby a strong bonded body can be formed while preventing generation of internal stress.
【０００７】また、請求項１において、前記微粒子材膜
は、２種類以上の材料からなる前記超微粒子を含むもの
とすることが好ましい。In the first aspect, the fine particle material film preferably includes the ultrafine particles made of two or more kinds of materials.
【０００８】これにより、混合する超微粒子の種類及び
割合を変えることにより、種々の複数材料からなる被膜
を被処理部材の表面に容易に形成することができる。２
種類以上の材料からなる超微粒子を含む微粒子材膜を被
処理部材表面に形成する方法としては、予め異なる材料
からなる超微粒子を含む溶液を作製し、この溶液を噴霧
するか、あるいは異なる超微粒子を夫々含む複数種類の
溶液を作製し、これらを別々の噴霧装置から被処理部材
表面に同時に噴霧するようにすればよい。前者の方法で
は、装置が簡略化できる利点があり、一方後者の方法で
は、夫々の噴霧装置の噴霧量を変えることにより、異な
る超微粒子の混合比を容易に変えることができる利点が
ある。Thus, by changing the type and ratio of the ultrafine particles to be mixed, it is possible to easily form a coating made of various materials on the surface of the member to be processed. 2
As a method of forming a fine particle material film containing ultrafine particles composed of more than one kind of material on the surface of a member to be processed, a solution containing ultrafine particles composed of different materials is prepared in advance, and this solution is sprayed, or a different ultrafine particle is formed. May be prepared, and these may be sprayed simultaneously from different spraying devices onto the surface of the member to be processed. The former method has the advantage that the apparatus can be simplified, while the latter method has the advantage that the mixing ratio of different ultrafine particles can be easily changed by changing the spray amount of each spray apparatus.
【０００９】また、請求項２に記載の表面処理方法は、
請求項１において、２種類以上の材料からなる前記超微
粒子の混合比率を変化させて前記微粒子材膜を堆積し、
前記被処理部材表面に傾斜材料からなる被膜を形成する
ことを特徴とする。これにより、混合する超微粒子の種
類及び割合を変えることにより、種々の傾斜材料からな
る被膜を被処理部材の表面に容易に形成することができ
る。Further, the surface treatment method according to claim 2 is
Claim 1 wherein the particulate material film is deposited by changing the mixing ratio of the ultrafine particles made of two or more materials,
A film made of a gradient material is formed on the surface of the member to be processed. Thus, by changing the type and ratio of the ultrafine particles to be mixed, it is possible to easily form films made of various gradient materials on the surface of the member to be processed.
【００１０】また、請求項３に記載の表面処理方法は、
請求項２において、前記傾斜材料からなる被膜は、その
表面がセラミクス材料の超微粒子からなるセラミクス膜
により形成されたものであることを特徴とする。これに
より、耐熱コーティングなどに用いることができる。The surface treatment method according to claim 3 is
According to a second aspect of the present invention, the coating made of the gradient material has a surface formed of a ceramic film made of ultrafine particles of a ceramic material. Thereby, it can be used for heat-resistant coating and the like.
【００１１】また、請求項４に記載のセラミクス部材と
金属部材の接合方法は、セラミクス材料からなる被処理
部材を準備し、該セラミクス材料から表面が金属材料と
なる傾斜材料からなる被膜を請求項２に記載の方法によ
り形成し、前記形成された表面の金属材料層に対して、
他の金属部材をロウ付けにより固定することを特徴とす
る。これにより、熱膨張係数の異なるセラミクス部材と
金属部材を簡単に接合することができる。According to a fourth aspect of the present invention, there is provided a method for joining a ceramic member and a metal member, wherein a member to be processed made of a ceramic material is prepared, and a coating made of an inclined material whose surface is a metal material is prepared from the ceramic material. 2. The metal material layer on the formed surface is formed by the method according to 2.
Another metal member is fixed by brazing. Thereby, the ceramic member and the metal member having different thermal expansion coefficients can be easily joined.
【００１２】請求項５に記載の接合方法は、請求項１乃
至３のいずれかに記載の表面処理方法により、前記被膜
を前記被処理部材表面に形成し、当該被膜と接合対象と
なる部材とを接触させて加熱することにより、前記被膜
を介して前記被処理部材と前記接合対象となる部材とを
接合することを特徴とする。これにより、同種又は異種
の部材をこれらの部材を溶接設備等を用いることなく、
容易に接合することができる。According to a fifth aspect of the present invention, there is provided a bonding method comprising: forming the coating on the surface of the member to be processed by the surface treatment method according to any one of the first to third aspects; And heating the member to be joined to the member to be joined via the coating. Thereby, the same type or different types of members can be used for these members without using welding equipment and the like.
Can be easily joined.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照しながら説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１４】本発明の実施の形態の表面処理方法では、
先ず、図１に示すような有機材料１で表面を被覆された
金属超微粒子２を準備する。ここで、超微粒子２とは、
粒径が１〜１００ｎｍ（ナノメートル）程度、好ましく
は１〜２０ｍｍの極く微細な粒子である。これらの超微
粒子２は例えば、有機金属塩又は金属錯体を有機物が分
解する温度以上で且つ完全に分解する温度未満で熱分解
することにより、有機物１で被覆された金属超微粒子２
が得られる。例えば、ステアリン酸の金属塩を２００〜
６００℃程度で加熱分解することにより、有機物で被覆
された好ましくは１０ｎｍ程度の金属超微粒子２が得ら
れる。また、非水系溶媒中で且つイオン性有機物の存在
下で、金属塩を該金属塩の分解還元温度以上で且つ前記
イオン性有機物の分解温度以下で加熱することにより、
同様にイオン性有機材料１で被覆された金属超微粒子２
が得られる。これらの金属超微粒子２は有機物で被覆さ
れているので化学的に安定であり、且つ良好な分散性が
得られる。In the surface treatment method according to the embodiment of the present invention,
First, metal ultrafine particles 2 whose surface is coated with an organic material 1 as shown in FIG. 1 are prepared. Here, the ultrafine particles 2
Extremely fine particles having a particle size of about 1 to 100 nm (nanometers), preferably 1 to 20 mm. The ultrafine particles 2 are, for example, thermally decomposed at a temperature higher than the temperature at which the organic substance is decomposed by the organic substance and lower than the temperature at which the organic substance is completely decomposed.
Is obtained. For example, a metal salt of stearic acid may be used
By heat decomposition at about 600 ° C., ultrafine metal particles 2 of preferably about 10 nm covered with an organic substance are obtained. Further, in a non-aqueous solvent and in the presence of an ionic organic substance, by heating the metal salt at a temperature not lower than the decomposition reduction temperature of the metal salt and not higher than the decomposition temperature of the ionic organic substance,
Similarly, metal ultrafine particles 2 coated with an ionic organic material 1
Is obtained. Since these metal ultrafine particles 2 are coated with an organic substance, they are chemically stable and good dispersibility can be obtained.
【００１５】そして、この有機物１で被覆された超微粒
子２を有機溶剤、例えばトルエンに分散させ、溶液４を
形成する。上述したように、有機物で被覆された超微粒
子は、良好な分散性を有するため、溶媒中に偏析するこ
となく、高濃度の溶液４を形成できる。Then, the ultrafine particles 2 coated with the organic substance 1 are dispersed in an organic solvent, for example, toluene to form a solution 4. As described above, since the ultrafine particles coated with an organic substance have good dispersibility, a high-concentration solution 4 can be formed without segregation in a solvent.
【００１６】次いで、図２（ａ）に示すように、この溶
液４をタンク５に収納し、噴霧装置６を用いてノズル７
から被処理部材８に噴霧し、被処理部材８の表面に微粒
子材膜９を形成する。ここで、被処理部材８は例えばア
ルミナ等のセラミクス材又は銅等の金属材である。次い
で、この微粒子材膜９を、５００〜６００℃程度に加熱
して、溶媒３及び超微粒子２表面の有機材料１を灰化し
て除去すると共に、超微粒子２同士を結合させて、被処
理部材８の表面に被膜１０を形成する（図２（ｂ））。
ここで、加熱するに際して、例えば水素等の還元性雰囲
気又は不活性ガス雰囲気で行うことが好ましい。これに
より、金属超微粒子２が酸化されることなく、相互に結
合して純粋な金属成分のみの焼成体を形成することがで
きる。尚、この温度は、超微粒子２がその金属が有する
本来の融点よりもかなり低い温度、例えば１５０〜５０
０℃で焼成が可能であり、これにより内部応力の発生が
小さい表面の改質処理が可能となる。Next, as shown in FIG. 2A, the solution 4 is stored in a tank 5 and a nozzle 7 is
Then, the fine particles 9 are formed on the surface of the member 8 to be sprayed. Here, the member to be processed 8 is, for example, a ceramic material such as alumina or a metal material such as copper. Next, the particulate material film 9 is heated to about 500 to 600 ° C. to remove the solvent 3 and the organic material 1 on the surface of the ultrafine particles 2 by incineration, and to bond the ultrafine particles 2 together to form a member to be processed. A coating 10 is formed on the surface 8 (FIG. 2B).
Here, the heating is preferably performed in a reducing atmosphere such as hydrogen or an inert gas atmosphere. Thereby, the metal ultrafine particles 2 can be bonded to each other without being oxidized to form a fired body composed of only a pure metal component. Note that this temperature is set to a temperature much lower than the original melting point of the ultrafine particles 2 of the metal, for example, 150 to 50.
Sintering can be performed at 0 ° C., thereby enabling modification of the surface where generation of internal stress is small.
【００１７】複数材料からなる被膜を形成するには、図
３に示すように、予め異なる材料からなる超微粒子２
Ａ，２Ｂ（この例では２種類の超微粒子）を含む溶液４
Ａを作製し、この溶液４Ａを噴霧装置６を用いてノズル
７から被処理部材８に噴霧し、被処理部材８の表面に微
粒子材膜９Ａを形成し、これを加熱する。また、別の方
法としては、図４に示すように、異なる超微粒子２Ａ，
２Ｂを夫々含む複数種類の溶液４ａ，４ｂを作製し、こ
れらの溶液４ａ，４ｂを別々の噴霧装置６ａ，６ｂを用
いてノズル７ａ，７ｂから被処理部材８に同時に噴霧
し、被処理部材８の表面に両溶液が混合した微粒子材膜
９Ａを形成し、これを加熱する。In order to form a coating made of a plurality of materials, as shown in FIG.
Solution 4 containing A and 2B (two types of ultrafine particles in this example)
A is prepared, and the solution 4A is sprayed onto the member 8 to be processed from the nozzle 7 by using the spraying device 6 to form a fine particle material film 9A on the surface of the member 8 to be processed, and this is heated. Further, as another method, as shown in FIG.
A plurality of types of solutions 4a and 4b each containing 2B are prepared, and these solutions 4a and 4b are simultaneously sprayed from the nozzles 7a and 7b onto the member 8 to be processed using separate spraying devices 6a and 6b. A fine particle material film 9A in which both solutions are mixed is formed on the surface of, and this is heated.
【００１８】被処理部材８の表面に傾斜材料の被膜を形
成するには、例えば図４に示す方法により、複数種類の
超微粒子の混合比率を変えて被膜を順次形成して重ねて
いく。即ち、噴射量を始めは溶液４ａを１００％とし、
溶液４ｂを０％とする。次に、例えば溶液４ａを９０％
とし、溶液４ｂを１０％とする。このようにして、順次
溶液４ａの比率を下げて、溶液４ｂの比率を上げてい
き、最終的に溶液４ａを０％とし、溶液４ｂを１００％
とする。In order to form a coating of a gradient material on the surface of the member 8 to be processed, the coatings are sequentially formed and stacked by changing the mixing ratio of a plurality of types of ultrafine particles, for example, by the method shown in FIG. That is, the injection amount is initially set to 100% for the solution 4a,
The solution 4b is set to 0%. Next, for example, the solution 4a is 90%
And 4% of solution 4b. In this manner, the ratio of the solution 4a is sequentially reduced, and the ratio of the solution 4b is increased. Finally, the solution 4a is set to 0% and the solution 4b is set to 100%.
And
【００１９】図５は、このようにして形成された傾斜材
料からなる被膜１０Ｂの概念図である。同図は、被処理
部材８と同じ材料からなる超微粒子２Ａのみにより形成
された被膜１０Ｂ1 の上に、超微粒子２Ａ，２Ｂの混合
比率を漸次変えた被膜が順次形成され重ねられて、被処
理部材８と異なる材料からなる超微粒子２Ｂのみにより
形成された被膜１０Ｂｎ が最外層になるように組成が
漸次変化する様子を示している。ここで、例えば、金属
材料からなる被処理部材８の表面に、同じ金属材料から
なる超微粒子２Ａの被膜１０Ｂ1 を配置する。そして、
その上層にセラミクスからなる超微粒子２Ｂを少量含む
被膜を配置し、順次セラミクスの比率を増加する。更
に、最上層をセラミクスが１００％となる被膜１０Ｂｎ
を形成するようにすれば、この表面処理方法を金属部材
のセラミクスによる耐熱コーティングなどに利用するこ
とができる。FIG. 5 is a conceptual diagram of the coating 10B made of the gradient material formed as described above. Drawing, on the film 10B 1 formed by only ultrafine particles 2A made of the same material as the member to be processed 8 and ultrafine particles 2A, is gradually changed coatings the mixing ratio of 2B superimposed are sequentially formed, the coating 10B n formed only by ultrafine particles 2B in which the processing member 8 made of different materials have shown how the composition such that the outermost layer gradually changes. Here, for example, on the surface of the workpiece member 8 made of a metal material, placing the film 10B 1 of the ultrafine 2A made of the same metal material. And
A coating containing a small amount of ultrafine particles 2B made of ceramics is arranged on the upper layer, and the ratio of ceramics is sequentially increased. Further, the uppermost layer is a coating 10B n having 100% ceramics.
The surface treatment method can be used for heat-resistant coating of a metal member by ceramics.
【００２０】図６は、セラミクス部材と金属部材とを接
合する方法を示す図である。この接合方法では、セラミ
クス部材（被処理部材）８Ａの表面に、図３又は図４に
示す表面処理方法により、セラミクス材料から、接合し
ようとする金属部材２０と同じ金属材料に漸次変化する
傾斜材料の被膜１０Ｃを形成し、この被膜１０Ｃと金属
部材２０との間でロウ材２１によりロウ付けを行うこと
により、セラミクス部材８Ａと金属部材２０を接合す
る。これにより、セラミクス部材８Ａと金属部材２０と
を接合する接合インサート材を容易に形成することがで
きる。FIG. 6 is a view showing a method of joining a ceramic member and a metal member. In this joining method, a gradient material that gradually changes from the ceramic material to the same metal material as the metal member 20 to be joined from the ceramic material by the surface treatment method shown in FIG. Is formed, and the ceramic member 8A and the metal member 20 are joined by brazing between the coating 10C and the metal member 20 with the brazing material 21. Thereby, a joining insert material for joining the ceramic member 8A and the metal member 20 can be easily formed.
【００２１】図７は、金属部材同士の接合方法を示す図
である。この接合方法では、金属部材（被処理部材）２
２の表面に、図２に示す表面処理方法により、金属材料
からなる超微粒子の被膜１０を形成し、この被膜１０
と、金属部材２２と同じ材料からなる金属部材２３とを
接触させた後、加熱することにより金属部材２２と金属
部材２３とを接合する。この接合方法によれば、超微粒
子からなる被膜１０は、比較的低温で焼成して金属部材
２２，２３とその界面で合金化して接合するので、高温
の接合処理に伴う内部応力を発生することなく、接合し
ようとする金属部材２２，２３を比較的強固に接合する
ことができる。FIG. 7 is a diagram showing a method of joining metal members. In this bonding method, the metal member (member to be processed) 2
2, a coating 10 of ultrafine particles made of a metal material is formed by the surface treatment method shown in FIG.
And the metal member 23 made of the same material as the metal member 22 are brought into contact with each other, and then the metal member 22 and the metal member 23 are joined by heating. According to this bonding method, the coating film 10 made of ultrafine particles is fired at a relatively low temperature and alloyed and bonded at the interface between the metal members 22 and 23. Therefore, the metal members 22 and 23 to be joined can be joined relatively firmly.
【００２２】[0022]
【発明の効果】以上説明したように、本発明によれば、
噴霧装置及び加熱装置により容易に被処理材料表面の改
質やコーティングを行うことができ、また混合材料被膜
や傾斜材料被膜を容易に形成することができる。従っ
て、同種又は異種材料の表面処理又は接合を比較的容易
かつ低コストで行うことができる。As described above, according to the present invention,
The surface of the material to be treated can be easily modified or coated by the spraying device and the heating device, and the mixed material film and the gradient material film can be easily formed. Therefore, surface treatment or joining of the same or different materials can be performed relatively easily and at low cost.
【図１】本発明に係る有機材料で被覆された超微粒子を
示す拡大図である。FIG. 1 is an enlarged view showing ultrafine particles coated with an organic material according to the present invention.
【図２】本発明の実施の形態に係る表面処理方法を説明
するための図であって、図２（ａ）は微粒子材膜を形成
する工程を示す図であり、図２（ｂ）は被膜を形成する
工程を示す図である。FIG. 2 is a view for explaining a surface treatment method according to an embodiment of the present invention, wherein FIG. 2 (a) is a view showing a step of forming a fine particle material film, and FIG. It is a figure showing the process of forming a coat.
【図３】同じく、複数材料からなる微粒子材膜を形成す
る方法を示す図である。FIG. 3 is a view showing a method of forming a fine particle material film composed of a plurality of materials.
【図４】同じく、複数材料からなる微粒子材膜を形成す
る他の方法を示す図である。FIG. 4 is a view showing another method of forming a particulate material film composed of a plurality of materials.
【図５】本発明に係る傾斜材料からなる被膜の概念図で
ある。FIG. 5 is a conceptual diagram of a coating made of a gradient material according to the present invention.
【図６】本発明の実施の形態に係るセラミクス部材と金
属部材との接合方法を示す図である。FIG. 6 is a diagram showing a method of joining a ceramic member and a metal member according to an embodiment of the present invention.
【図７】本発明の実施の形態に係る金属部材同士の接合
方法を示す図である。FIG. 7 is a view showing a method of joining metal members according to the embodiment of the present invention.
１ 有機材料 ２，２Ａ，２Ｂ 超微粒子 ３ 溶媒 ４，４Ａ，４ａ，４ｂ 溶液 ６，６ａ，６ｂ 噴霧装置 ７，７ａ，７ｂ ノズル ８，８Ａ 被処理部材 ９，９Ａ 微粒子材膜 １０，１０Ｂ，１０Ｂ1 ，１０Ｂｎ ，１０Ｃ 被膜 ２０，２２，２３ 金属部材（被処理部材）DESCRIPTION OF SYMBOLS 1 Organic material 2, 2A, 2B Ultrafine particle 3 Solvent 4, 4A, 4a, 4b Solution 6, 6a, 6b Spraying device 7, 7a, 7b Nozzle 8, 8A Member to be processed 9, 9A Fine particle material film 10, 10B, 10B 1, 10B n, 10C coatings 20, 22, 23 metal member (the member to be processed)
───────────────────────────────────────────────────── フロントページの続き (72)発明者 川村 聡 神奈川県藤沢市本藤沢４丁目２番１号 株 式会社荏原総合研究所内 (72)発明者 濱田 聡美 神奈川県藤沢市本藤沢４丁目２番１号 株 式会社荏原総合研究所内 Ｆターム(参考） 4G026 BA01 BB21 BF31 BF42 BF47 BG02 4K044 AA06 AA13 AB01 BA01 BA12 BB03 BC08 BC11 CA15 CA24 CA62 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Satoshi Kawamura 4-2-1 Motofujisawa, Fujisawa City, Kanagawa Prefecture Inside Ebara Research Institute, Inc. (72) Inventor Satomi Hamada 4-2-2 Motofujisawa, Fujisawa City, Kanagawa Prefecture No. 1 F-term in EBARA Research Institute (reference) 4G026 BA01 BB21 BF31 BF42 BF47 BG02 4K044 AA06 AA13 AB01 BA01 BA12 BB03 BC08 BC11 CA15 CA24 CA62
Claims (5)
子又は非金属超微粒子を溶媒に分散させた溶液を、噴霧
装置によって被処理部材表面に噴霧して微粒子材膜を堆
積し、該微粒子材膜を加熱することにより、前記溶媒及
び前記超微粒子表面の前記有機材料を除去すると共に、
前記被処理部材表面に前記超微粒子同士が結合した被膜
を形成することを特徴とする表面処理方法。1. A fine particle material film is deposited by spraying a solution in which a metal ultrafine particle or a nonmetal ultrafine particle whose surface is coated with an organic material is dispersed in a solvent onto a surface of a member to be processed by a spraying device. By heating the material film, while removing the organic material on the surface of the solvent and the ultrafine particles,
A surface treatment method comprising: forming a coating film in which the ultrafine particles are bonded to each other on the surface of the member to be treated.
の混合比率を変化させて前記微粒子材膜を堆積し、前記
被処理部材表面に傾斜材料からなる被膜を形成すること
を特徴とする請求項１に記載の表面処理方法。2. The method according to claim 1, wherein the fine particle material film is deposited by changing a mixing ratio of the ultrafine particles made of two or more kinds of materials, and a film made of a gradient material is formed on the surface of the member to be processed. Item 4. The surface treatment method according to item 1.
がセラミクス材料の超微粒子からなるセラミクス膜によ
り形成されたものであることを特徴とする請求項２に記
載の表面処理方法。3. The surface treatment method according to claim 2, wherein the coating made of the gradient material has a surface formed by a ceramic film made of ultrafine particles of a ceramic material.
備し、該セラミクス材料から表面が金属材料となる傾斜
材料からなる被膜を請求項２に記載の方法により形成
し、前記形成された表面の金属材料層に対して、他の金
属部材をロウ付けにより固定することを特徴とするセラ
ミクス部材と金属部材の接合方法。4. A member to be processed made of a ceramic material is prepared, and a coating made of a graded material whose surface is a metal material is formed from the ceramic material by the method according to claim 2, and the metal on the formed surface is formed. A method for joining a ceramic member and a metal member, wherein another metal member is fixed to the material layer by brazing.
処理方法により、前記被膜を前記被処理部材表面に形成
し、当該被膜と接合対象となる部材とを接触させて加熱
することにより、前記被膜を介して前記被処理部材と前
記接合対象となる部材とを接合することを特徴とする接
合方法。5. The method according to claim 1, wherein the coating is formed on the surface of the member to be processed, and the coating and the member to be joined are brought into contact with each other and heated. Joining the member to be processed and the member to be joined through the coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34860699A JP2001164379A (en) | 1999-12-08 | 1999-12-08 | Surface treating method and joining method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34860699A JP2001164379A (en) | 1999-12-08 | 1999-12-08 | Surface treating method and joining method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001164379A true JP2001164379A (en) | 2001-06-19 |
Family
ID=18398148
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34860699A Pending JP2001164379A (en) | 1999-12-08 | 1999-12-08 | Surface treating method and joining method |
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| Country | Link |
|---|---|
| JP (1) | JP2001164379A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005161185A (en) * | 2003-12-02 | 2005-06-23 | Fujimori Gijutsu Kenkyusho:Kk | Metal film forming method and apparatus therefor |
| JP2006228804A (en) * | 2005-02-15 | 2006-08-31 | Fuji Electric Holdings Co Ltd | Ceramic substrate for semiconductor module and its manufacturing method |
| JP2011212684A (en) * | 2010-03-31 | 2011-10-27 | Hitachi Ltd | Metal bonding member and fabrication method of the same |
| TWI641441B (en) * | 2015-05-18 | 2018-11-21 | 日商拓自達電線股份有限公司 | Solder connection structure and film forming method |
| US10926514B2 (en) | 2015-12-24 | 2021-02-23 | Tatsuta Electric Wire & Cable Co., Ltd. | Solder connection structure and film forming method |
-
1999
- 1999-12-08 JP JP34860699A patent/JP2001164379A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005161185A (en) * | 2003-12-02 | 2005-06-23 | Fujimori Gijutsu Kenkyusho:Kk | Metal film forming method and apparatus therefor |
| JP2006228804A (en) * | 2005-02-15 | 2006-08-31 | Fuji Electric Holdings Co Ltd | Ceramic substrate for semiconductor module and its manufacturing method |
| JP2011212684A (en) * | 2010-03-31 | 2011-10-27 | Hitachi Ltd | Metal bonding member and fabrication method of the same |
| TWI641441B (en) * | 2015-05-18 | 2018-11-21 | 日商拓自達電線股份有限公司 | Solder connection structure and film forming method |
| US10926514B2 (en) | 2015-12-24 | 2021-02-23 | Tatsuta Electric Wire & Cable Co., Ltd. | Solder connection structure and film forming method |
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