JP2001155385A - Disk holding mechanism and disk warpage inspection device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a disk holding mechanism capable of surely holding a disk and a weight when the warpage of the optical disk is inspected, and a disk warping inspection device using the same. SOLUTION: A weight W is held by a holder 57 provided in an arm 55, and loaded/unloaded on a disk 10. Then, a holding part 72 provided in the weight W is positioned and held inside the holder 57, and when the weight W is loaded on the disk 10, the arm 55 side is further lowered after the weight W is brought into contact with the disk 10, and thereby the weight W is relatively moved upward in the movable space S of the holder 57 to form a gap with the arm 55, and the holder 57 is prevented from being brought into contact with the weight W.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to, for example, digital
The present invention relates to a disk holding mechanism suitable for manufacturing an optical disk such as a video / versatile disk (hereinafter abbreviated as DVD) and the like, and a disk warpage inspection apparatus using the same.

[0002]

2. Description of the Related Art An optical disk such as a DVD has a predetermined standard for the amount of warpage.
It is known that, with a 2N ± 0.5N weight placed on the center thereof, the warping dimension is within a predetermined value. As a general device for optical disk warpage inspection, the optical disk is supported by a rotating spindle, and with a weight placed on the optical disk, the optical disk is rotated while the warp is measured by a sensor arranged opposite to the optical disk. There is something to do. At this time, measurement is performed by a sensor at predetermined time intervals, whereby the warp angles of the disk at a plurality of locations on the disk are detected.

[0003]

However, when the optical disk is rotated at a high speed during the inspection, the weight may come off. In this case, the inspection is interrupted, and in addition, the warp inspection device is used for the optical disk. In the case of an in-line type that is integrally mounted on the manufacturing device, the production of the optical disk itself will be interrupted due to the falling off of the weight,
Affects its production efficiency. Also, when mounting an optical disk on the rotating spindle of the inspection device, it is necessary to mount a weight on the optical disk. In the case of an in-line type, of course, the weight is automatically mounted on the optical disk to increase efficiency. A mechanism such as an arm that can be placed is required. However, when the optical disc is rotated and inspected after the weight is mounted, it is not preferable that a load other than the weight, such as an arm, is applied to the optical disc.
For this reason, it is conceivable to provide, for example, a mechanism such as a chuck or a vacuum suction, which can release the weight after placing the held weight on the optical disk. However, this increases the complexity of the apparatus and increases the cost. Further, if the weight is completely separated, as described above, when the weight comes off the optical disc, it takes time and effort to restore the weight. In addition, since the weight is simply mounted on the optical disk supported by the rotating spindle, when the optical disk is rotated at a predetermined rotation speed with the weight mounted, the rotation spindle, Due to the difference between the rotational moments of the optical disk and the weight, slippage may occur between the rotary spindle and the optical disk, and between the optical disk and the weight, and abrasion may occur on the optical disk and its appearance quality may be impaired. The present invention has been made in consideration of the above points, and has a disk holding mechanism capable of securely holding a disk and a weight when performing a warp inspection of an optical disk, and a disk warpage inspection apparatus using the same. The task is to provide

[0004]

Means for Solving the Problems The invention according to claim 1
A disk supporting member for supporting the disk, a weight placed on the disk, a weight moving member for placing and removing the weight on and from the disk, and rotating the disk supporting member. And a drive mechanism for rotating the disk.The holder is formed on the weight moving member, the holder holding the holding portion of the weight inside. A movable space that allows upward movement of the weight is formed, and when the weight is placed on the disk, the holding unit moves upward in the movable space and moves between the weight and the holder. It is characterized in that a void is formed and is not in contact with the weight.

[0005] The weight can be placed on and removed from the disk by the weight moving member. When placing the weight on the disk, after the weight contacts the disk, if the weight moving member is further lowered, the weight will move relatively upward in the movable space, and the weight will move between the weight and the weight moving member. An air gap is formed so that the holder is not in contact with the weight. By rotating the disk in this state, only the weight load acts on the disk. In addition, even during rotation, since the holding portion of the weight is located inside the holder, it is possible to prevent the weight from coming off when it comes to come off.

The invention according to claim 2 is characterized in that the contact portion between the weight and the holder has a substantially inverted truncated cone shape that gradually expands upward from the lower end thereof.

Thus, if the disk supporting member is lowered after the weight is placed on the disk, a gap is generated at the contact portion. When the weight is moved away from the disk, if the disk support member is raised, the weight can be held in a state in which both are in contact at the contact portion. At this time, since the contact portion has a substantially inverted truncated conical shape, the weight is reliably positioned with respect to the disk support member, and the displacement of the weight can be prevented even when the weight is placed again thereafter.

The invention according to claim 3 is characterized in that the disk supporting member is provided with a suction mechanism for sucking the disk.

The invention according to claim 4 is characterized in that, when the disk support member is rotated by the drive mechanism, the disk is sucked by the suction mechanism only at the time of acceleration / deceleration. I have.

By causing the disk to be attracted to the disk supporting member by the suction mechanism, the disk can be prevented from slipping during acceleration or deceleration when rotating the disk.

The invention according to claim 5 is characterized in that the weight moving member is provided with a weight fixing mechanism which can fix the weight by pressing the weight against the holder.

Thus, when the weight is moved by the weight moving member or the like, the weight can be prevented from being displaced by pressing the weight against the holder by the weight fixing mechanism.

The invention according to claim 6 is the invention according to claims 1 to 5
A sensor for detecting a warped state of the disk held by the disk holding mechanism according to any one of the above items is provided.

Thus, the disk is supported on the disk support member, and the disk is rotated while the weight is mounted on the disk, and the warpage of the disk is measured by the sensor to measure the warpage of the disk. can do. In order to detect the warp state of the disk, for example, the reflected light of the laser beam applied to the disk surface is received by the sensor light receiving surface, and the displacement of the return position is measured to detect the warp angle of the disk surface. I just need. Note that when rotating the disk with the weight mounted on the disk, the weight moving member is in a non-contact state with the weight, so only the weight load acts on the disk, and the inspection must be performed under predetermined conditions. Can be.

According to a seventh aspect of the present invention, one of the sensor and the disk support member has a moving mechanism that moves in the radial direction of the disk, and the sensor or the disk support member is moved by the moving mechanism. It is characterized by having a configuration.

By measuring the sensor a plurality of times at predetermined intervals while moving the sensor in the radial direction with respect to the disk, the warpage can be measured at a plurality of points on the disk. That,
As the number of times of measurement is increased, the accuracy of measuring the warpage of the disk can be improved.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a disk holding mechanism and a disk warpage inspection apparatus using the same according to the present invention will be described below with reference to FIGS. Here, for example, a description will be given using an example in which a warpage inspection device is built in a DVD manufacturing device.

The DVD manufacturing apparatus shown in FIG. 1 is schematically composed of a disk substrate take-out area R1, a disk creation area R2, a disk inspection area R3, and a disk stacking area R4. This is the same as the optical disk manufacturing apparatus described in Japanese Patent Application No. 11-180965.

The disk substrate take-out region R1 includes a stock area A1 in which the first disk substrate 1a and the second disk substrate 1b are held in a stacked state by the disk holder 7, and a first area held in the disk holder 7. And the second disk substrate 1a. And a take-out area A2 for taking out 1b one by one.

The disc preparation region R2 includes a coating stage B having a drop irradiation device 4 for dropping the cation type ultraviolet curable resin onto the first disk substrate 1a, and the cation type ultraviolet curable resin of the first disk substrate 1a falling. The first and second disk substrates 1a and 1b are overlapped with each other, and the transport device 19 transports the disk 10 formed by the overlapping device 5. , A disk stacking / separating device D for performing the spreading and end surface hardening processing of the disk 10, and a transfer device 20 for transferring the disk 10 from the disk stacking / separating device D to the disk inspection area R3.

Further, the disk inspection region R3 is constituted by a disk inspection device (disk warpage inspection device) 31 for inspecting the quality of the formed disk 10 for good or defective, and the disk laminated region R4 is provided for the defective disk 10 And discs for stacking discs 10 determined not to be defective on the disc holder 7.
It is constituted by a laminating device 32.

These disk substrate take-out area R1, disk creation area R2, disk inspection area R3,
The disk lamination regions R4 are sequentially arranged so as to form a substantially U-shape in plan view, and the disk substrate take-out region R1 and the disk lamination region R4 are disposed at the fulcrum and end point of the U-shape, respectively. And, between the disk substrate take-out region R1 and the disk lamination region R4,
A transport path 33 for transporting an empty disk holder 7 is formed.

Next, an outline of a DVD manufacturing process in the above apparatus will be described. The first disk substrate 1a stacked on the stock area A1 in the disk substrate take-out region R1 is supplied to the disk creation region R2. In the stock area A1, a plurality of first disk substrates 1a are stored in a stacked state on the disk holders 7, 7,..., And when the disk holder 7 is taken out of the stock area A1 and moved to the area A2, By the transport means (not shown), one of the outermost layers of the first disk substrates 1a stacked on the disk holder 7 is moved to the disk creation region R2.
Is transferred to the supply position B1 on the rotary table 3 of the coating stage B in the above. Thus, the first disk substrate 1a is sequentially supplied to the disk creation region R2.

The first disk substrate 1a supplied to the supply position B1 of the coating stage B moves to the coating position B2 when the rotary table 3 rotates in the direction of the arrow in the figure.

First disk substrate 1 located at application position B2
The cation type ultraviolet curable composition 45 irradiated with ultraviolet rays by the drop irradiation device 4 is dropped and applied in a ring shape on a. When the application of the cationic ultraviolet curable composition 45 is completed, the turntable 3 rotates in the direction of the arrow in the figure until the first disk substrate 1a moves to the transfer position B3. The first disk substrate 1a at the transport position B3 is transported to the overlay device 5 of the overlay stage C in the disk creation region R2 by transport means (not shown).

The second disk substrate 1b, which has been transported from the take-out area A2 by the transport means (not shown), is on standby at the superposition stage C. The first disk substrate 1a is superimposed on the second disk substrate 1b by the superposing device 5. Of course, the two disk substrates are superposed via the cationic ultraviolet curable composition 45. In addition, what was superimposed is hereinafter simply referred to as disk 1.
Called 0.

The disk 10 is transported along the transport device 19
The disk is transported to the disk stacking / separating device D provided in the disk creation area R2, and is transported onto the disk holder 7 arranged at the first position 11 in the disk stacking / separating device D. The spreading process is performed by the disc laminating / separating device D
Is performed in a state where a plurality of disks 10 are stacked.

The disk holder 7 on which the disks 10 are stacked in this manner is moved to the fifth upper position 15 provided in the disk stacking / separating apparatus D. Then, at the fifth position 15, the elongation processing is performed by passing a predetermined time.

When the spreading process is completed, the disk 10
Is transported to the end face hardening device E provided at the sixth position 16 on the disk stacking / separating device D. The end face curing treatment is a treatment for the following purposes. The cationic ultraviolet curable composition exposed to the outside from the bonding surface of the disk 10 has a delay in curing, which causes trouble in disk handling. Therefore,
By means of irradiating the end face with ultraviolet light or heating the disk, the curing of the cationic ultraviolet curable composition is promoted.

When the end face processing is completed, the disk holder 7 on which the disk 10 is mounted is moved to the disk stacking / separating device D.
It is conveyed to the upper second position 17. This second position 17
In, the disk 10 is transferred to the disk inspection area R3 by a transporting means (not shown).

The disk 10 transferred from the disk stacking / separating device D to the disk inspection device 31 has a good
An inspection for defects is performed. The disk 10 after the inspection is transferred by the transfer device 20 to the disk sorting / stacking device 32. Here, discs determined to be defective in the disc inspection device 31 are sorted out, and only discs determined to be non-defective are placed on the disc holder 7 that has moved from the disc substrate take-out region R1 through the transport path 33. They are arranged in a stack. Discs 10 stacked in this manner
Is mounted on the disk holder 7 and transported to the next step.

In the DVD manufacturing apparatus having the above-described schematic configuration, the disk inspection apparatus 31 has the following configuration. As shown in FIG. 2, the disk inspection device 31 has a schematic configuration in which a disk drive unit 40 and a weight moving unit 50 are provided on a base 35.

The disk drive section 40 includes a slide base 42 slidably movable along a pair of rails (moving mechanisms) 41 laid on a base 35, and a rotation provided on the slide base 42. Spindle (drive mechanism)
43. The slide base 42 is driven forward and backward by a predetermined stroke in a direction indicated by an arrow in FIG. The rotary spindle 43 has a disk support (disk support) 44 at its upper end for supporting the disk 10 in a substantially horizontal state.
The drive mechanism drives the disk 10 to be rotated by the motor 45 provided above.

As shown in FIG. 3, the disk support 44
Has a support surface 44a which is a substantially horizontal plane.
4a, a boss 46 projecting upward by a predetermined dimension is formed, and a hole 10a at the center of the disk 10 is inserted into the boss 4a.
6, the disk 10 is supported by bringing the lower surface of the disk 10 into contact with the support surface 44a. On the support surface 44a,
On its upper surface, a groove or a plurality of holes 47 located on the same circumference is formed as a suction mechanism for the disk 10.
A negative pressure source such as a vacuum pump (not shown) is connected to the groove or hole 47 via a pipe 48 penetrating through the rotary spindle 43. The groove or hole 47 is formed such that its inner side surface 47a is continuous with the outer peripheral surface of the boss 46, and its outer side surface 47b is formed so as to be located inside the outer peripheral portion of the disk support portion 44 by a predetermined dimension. . Thus, the support surface 44a supporting the disk 10 has a substantially ring shape. Here, for example, in a DVD,
The area for clamping (holding) the disk 10 is 22 ≦
Since it is known that the range of φ ≦ 33 (mm) is set (refer to the symbol (a) in the figure), the supporting surface 44a is set so that the supporting surface 44a contacts the disk 10 within the range of the clamp area. The inner and outer diameters of 44a are set.

As shown in FIG. 2, the weight moving section 50 includes a pair of supporting members 36 (only one of which is shown in FIG. 2) provided integrally with the slide base 42. A guide rod 51 and a ball screw 52 extending in the horizontal direction are provided, and a slide member 53 slidable along the guide rod 51 is provided. The slide member 53 is driven forward and backward in a direction along the guide rod 51, that is, in a substantially horizontal direction by rotating the ball screw 52 with a drive source such as a motor (not shown). The slide member 52 is provided with an arm (weight moving member) 55 that holds the weight W via a vertically moving cylinder 54 that is driven to expand and contract in the up and down direction, and the entire arm 55 is moved up and down by the vertically moving cylinder 54. It has become.

A weight holding mechanism 56 for holding the weight W is provided at the tip of the arm 55. The weight holding mechanism 56
Holder 5 integrally provided on the lower surface of the tip of arm 55
7 and a pressing mechanism (weight fixing mechanism) 5 for pressing the weight W
And 8.

As shown in FIG. 3, the holder 57 has a substantially cylindrical shape in which a circular hole 57a having a predetermined diameter is opened downward, and a portion from a hole 57a at the lower end to a portion above a predetermined size goes upward. Accordingly, a sliver-shaped portion (contact portion) 57b whose inner diameter gradually expands is formed, and further above it is a straight cylindrical portion 57c having a constant inner diameter.

The pressing mechanism 58 has a pin 59 for pressing the weight W downward. The pin 59 is housed in a sleeve 60 provided on the arm 55 at a position on the center axis of the holder 57 so as to be able to move up and down in the vertical direction. More specifically, the pin 59 has a flange portion 59a formed on the upper end thereof to protrude to the outer peripheral side, while the sleeve 60 has the pin 59 inserted through the lower end thereof, so that the pin 59 is larger than the flange portion 59a. A hole 60a having a small diameter is formed, and the pin 59 can protrude downward from the hole 60a. A spring 6 for urging the pin 59 upward is provided between the flange portion 59a of the pin 59 and the peripheral portion of the hole 60a at the lower end of the sleeve 60.
1 and the like are provided. Further, the flange portion 59a of the pin 59 is set to such a size that it can exhibit a sealing property with the inner peripheral surface of the sleeve 60. A supply pipe 62 for supplying air or the like from an air supply source (not shown) is connected to the upper end of the sleeve 60. In such a pressing mechanism 58, by supplying air or the like from the supply pipe 62, the pin 59 is pushed down and protrudes downward from the hole 60a of the sleeve 60, and when the supply of the air or the like is stopped, the spring 61 is attached. The pin 59 is returned upward by the force. Thus, the pressing mechanism 58 has a configuration in which the weight W can be pressed and fixed to the holder 57 by extending and retracting the pin 59. By the way, a thread groove (not shown) is formed on the outer peripheral surface of the sleeve 60. By rotating the sleeve 60, its position with respect to the arm 55 can be adjusted vertically. Thereby, the protrusion dimension of the pin 59 can be adjusted.

The weight W has a predetermined weight, and a weight main body 71 and a holding portion 72 projecting from an upper surface thereof and housed inside the holder 57 are integrally formed. The weight main body 71 has a substantially inverted truncated cone shape whose outer diameter gradually increases as its lower portion 71a goes upward from the lower end. Further, an insertion hole 73 into which the boss 46 is inserted and a clearance 74 formed continuously on the outer peripheral side of the insertion hole 73 are formed on the lower surface of the weight main body 71. Therefore, the weight main body portion 71 comes into contact with the upper surface of the disk 10 at a ring-shaped portion on the outer peripheral side of the relief 74, and the outer diameter of the lower end portion of the weight main body portion 71 and the outer diameter of the relief 74 are the same as those of the ring-shaped portion. The portion is set so as to come into contact with the disk 10 within the range of the clamp area [see the symbol (a)].
On the other hand, the holding portion 72 protrudes upward from the weight body 71,
A shaft portion 72a which is inserted through the hole 57a of the holder 57 and has a smaller diameter than the hole 57a by a predetermined dimension. The shaft portion 72a is continuous with the shaft portion 72a and gradually increases in diameter as going upward to become larger in diameter than the hole 57a. A substantially inverted truncated conical locking portion (contact portion) 72b
The outer peripheral surface of the locking portion 72b is in contact with the sliver-shaped portion 57b of the holder 57. The pin 59 is provided on the upper surface of the locking portion 72b.
A concave portion 75 into which the tip portion of the is inserted is formed.

The weight W is held in a state where the locking portion 72b of the holding portion 72 is housed inside the holder 57. When the locking portion 72b of the weight W and the sliver-shaped portion 57b of the holder 57a are in contact with each other, the holder 57 has a movable portion between the upper surface of the locking portion 72 of the weight W and the arm 55. A space S is formed, so that the weight W can move upward with respect to the holder 57.

In the disk inspection device 31 having such a configuration shown in FIG. 2, when inspecting the warpage of the disk 10, first, the disk is moved from the disk stacking / separating device D (see FIG. 1) onto the disk support portion 44. Put on. At this time, the arm 55 is retracted (leftward in FIG. 2). The disc 10 has its central hole 10a inserted through the boss 46, and the lower surface of the disc 10 abuts against the support surface 44a.

Next, on the weight moving section 50 side, the ball screw 52 is driven to advance the arm 55 holding the weight W toward the disk 10 (to the right in FIG. 2). At this time, as shown in FIG. 3, the weight W is
In a state in which the pin 2b is in contact with the sliver-shaped portion 57b of the holder 57, the pin 59 is further pushed down by the air from the supply pipe 62, and the weight W is pushed down.

When the weight W is located on the center axis of the disk 10, the advance is stopped, and the arm 55, that is, the weight W is lowered by the vertically moving cylinder 54. At the same time, the air supply from the supply pipe 62 is cut off at an appropriate timing, the pin 59 is returned upward by the urging force of the spring 61, and the pin 59 is separated from the weight W to release the pressing. At this time, FIG.
When the weight W is lowered and the lower surface of the weight W comes into contact with the upper surface of the disk 10, the weight W can move to the upper movable space S side. The stop portion 72b is separated from the sliver-shaped portion 57b of the holder 57. In this state, the weight W is attached to the weight moving portion 5 such as the holder 57.
It is in a non-contact state with respect to the 0 side, and is simply placed on the disk 10.

Then, at an appropriate timing after the lower surface of the disk 10 abuts against the support surface 44a of the disk support portion 44, a negative pressure is applied by a vacuum pump or the like (not shown) to suck the lower surface of the disk 10 through the groove or hole 47. Then, the disk 10 is attracted to the support member 44 side. Here, this negative pressure also acts on the weight W via the hole 10 a of the disk 10, and it can be expected that the weight W is attracted to the disk 10.

After setting the disk 10 in this way,
The rotating spindle 43 is driven by the motor 45 shown in FIG. 2, and the disk 10 supported by the support member 44 is rotated. At this time, when the rotation speed of the disk 10 reaches a preset speed, the groove or hole 47 shown in FIG.
Of the disk 10 is released.

Thereafter, in the disk inspection apparatus 31 shown in FIG. 2, the optical sensors 80A and 80B disposed above and below the disk 10, respectively, measure the warp angle of the surface of the disk 10, thereby obtaining the disk 10 Inspect for warpage. The sensors 80A and 80B irradiate a laser beam from an irradiation source (not shown) toward the surface of the disk 10 and receive the light reflected on the surface of the disk 10 on its light receiving surface. When the surface of the disk 10 is warped (the angle is deviated), the light receiving position of the reflected light on the light receiving surface is displaced from the original position, so that the amount of displacement and the sensor 80A, 80B and the surface of the disk 10 are displaced. Is calculated by a control unit (not shown) from the distance (known). The irradiation direction of the laser beam to the disk 10 is
The direction may be a direction perpendicular to the surface, or an inclined direction intersecting the surface of the disk 10 at a predetermined angle. Of course, the measuring method is not limited to the above. At this time, at least while the disk 10 is being rotated, the sensors 80A and 80B perform measurement at predetermined intervals to measure the warp angles of a plurality of points on the disk 10. Further, in the present embodiment, while rotating the disk 10, the slide base 42 on the disk drive unit 40 side is moved along the race 41, and the slide member on the weight moving unit 50 side provided integrally therewith. 53
Are measured at predetermined time intervals by the sensors 80A and 80B while moving at a constant speed along the guide rod 51. Thereby, the warp angle of the surface of the disk 10 is measured at a plurality of points on the spiral line in the disk 10. Based on the data of each point measured in this manner, the disk 1
The model of the shape of 0 is obtained, the warp state of the disk 10 is obtained, and the pass / fail is inspected.

After the completion of the measurement by the sensors 80A and 80B, the rotation of the disk 10 is stopped by reducing the rotation speed of the motor 45. At the time of this deceleration, the disk 10 is sucked by the groove or the hole 47 and the rotation of the disk 10 is performed. When the speed becomes equal to or lower than the preset speed, the suction of the disk 10 in the groove or hole 47 is released. Thereafter or in parallel with this, the arm 55 is retracted to retreat from above the disk 10, and the slide base 42 is returned to the original position, thereby completing the inspection of one disk 10. In addition, as shown in FIG.
0 is transferred by the transfer device 20 from above the disk support portion 44 to the disk sorting / stacking device 32.

In the above-described disk holding mechanism and the disk inspection apparatus 31 using the disk holding mechanism, the weight W can be placed on and withdrawn from the disk 10 by the arm 55, so that the disk 10 can be exchanged efficiently. be able to. When the weight W is placed on the disk 10, the weight W comes into contact with the disk 10, and if the arm 55 is further lowered, the weight W relatively moves upward in the movable space S to be in contact with the arm 55. Since a gap can be formed between the holder 57 and the weight W in a non-contact state, only the load of the weight W can act on the disk 10. In addition, even when rotating, the weight W is detached from the holder 57 because the holding portion 72b of the weight W is located inside the holder 57 because the locking portion 72b having a diameter larger than the hole 57a of the holder 57 is located inside the holder 57. There is no. Moreover, with such a configuration, the weight W can be brought into a non-contact state by merely lowering the holder 57 after placing the weight W on the disk 10 without using a complicated mechanism such as a chuck mechanism or a vacuum mechanism. Thus, the cost of the apparatus can be reduced. Therefore, the disk 10 in the disk inspection device 31
Inspection efficiency can be increased, and a decrease in production efficiency due to falling off of the weight W in the entire disk manufacturing apparatus can be prevented.

In addition, since the contact portion between the weight W and the holder 57 has a substantially inverted truncated cone shape, as described above, when the weight W is to be retreated from the disk 10, it is necessary to raise the holder 57. The weight W can be held in a state in which both are in contact at the contact portion. At this time, since the contact portion has a substantially inverted truncated cone shape, the weight W is securely positioned with respect to the holder 57, and the displacement of the weight W can be prevented even when the weight W is placed again thereafter.

When the weight W is horizontally moved by the arm 55, the weight W is held by the pin 59 of the pressing mechanism 58.
7. Accordingly, it is possible to prevent the displacement of the weight W during the movement of the weight W and the scraping of the contact portion on the holder 57 side due to the displacement.

The disk 10 can be prevented from slipping at the time of acceleration or deceleration when rotating the disk 10 by attracting the disk 10 to the disk support portion 44 through the groove or hole 47. As a result, it is possible to prevent scratches and the like from being made on the disk 10 and prevent quality deterioration.

Further, by measuring the sensors 80A and 80B a plurality of times at predetermined time intervals while moving the sensors 80A and 80B relative to the disk 10 in the radial direction, the warpage can be measured at a plurality of points on the disk 10. Then, as the number of times of measurement is increased, the warpage measurement accuracy of the disk 10 can be improved.

In the above embodiment, the holding portion 72 provided on the weight W is held by the holder 57. However, when the weight W is placed on the disk 10, the weight W
A space can be formed between the weight W and the holder 57 so as to be in a non-contact state with the weight W. Further, since the holding portion 72 of the weight W is housed inside the holder 57, the shape of the holder W It is also possible to adopt a configuration other than the above. For example, the lower portion 71a of the weight main body 71 of the weight W also has a substantially inverted truncated cone shape, and this portion may be held by a ring-shaped holder. In this case, the upper part of the weight main body 71 functions as a holding part. In addition, weight W
The shape, structure, and the like of the device may be other than those described above, and various conditions such as the weight may be set according to the inspection conditions.

Further, in the above embodiment, the disk 1
Although 0 is attracted to the disk support portion 44 side by negative pressure, for example, magnetic force or the like may be used. In this case, displacement of the disk 10 can be prevented by generating a magnetic force between the disk support portion 44 and the weight W. in this case,
Since there is no need to fix the disk 10 with a magnetic force when inspecting the disk, it is desirable to use an electromagnetic force or the like as the magnetic force and to eliminate the magnetic force when unnecessary.

In addition, it goes without saying that the operations of the respective units described in the above-described embodiment may be performed in a different order or overlap each other in order to improve the cycle time.

In addition, in the above-described embodiment, the configuration in which the disk inspection device 31 is incorporated in the DVD manufacturing apparatus has been described as an example. However, the configuration of the DVD manufacturing apparatus other than the disk inspection device 31 is other than that described above. There is no problem even if it is used, and the disk inspection device 31 can be similarly applied to a DVD manufacturing device having another configuration or another manufacturing method. Further, it goes without saying that the present invention can be applied to a case where the disk inspection device 31 is not built in the DVD manufacturing apparatus, that is, the disk warpage inspection apparatus alone.

The present invention can be applied not only to the DVD but also to a warp inspection of various disks such as an optical disk and the like, whereby the same effects as described above can be obtained.

In addition, as described above, the warp inspection method is not always performed while moving the disk 10 with respect to the sensors 80A and 80B, and the sensors 80A and 80B may be moved. Alternatively, the positional relationship between the sensor and the disk 10 may be fixed, and measurement may be performed only at a predetermined position, for example, only at the inner peripheral portion and the outer peripheral portion. However,
As described above, it goes without saying that the inspection accuracy is higher when the inspection is performed at many points on the spiral line, for example. Various other methods can be applied.

Furthermore, in the above-described embodiment, the weight W is placed to apply a predetermined load to the disk 10 when inspecting the warpage of the disk 10. However, the present invention can also be used as a holding mechanism for simply holding the disk 10. The invention is applicable. In this case, the weight W functions as a weight for the purpose of holding the disk 10 and stabilizing the rotation.

Other than this, any configuration may be adopted as long as it does not depart from the gist of the present invention, and it is needless to say that the above-described configurations may be appropriately selectively combined. No.

[0061]

As described above, according to the first aspect,
According to the disk holding mechanism, since the weight can be placed on and removed from the disk by the weight moving member,
Exchange of disks and the like can be performed efficiently. Then, when placing the weight on the disk, after the weight comes into contact with the disk, if the weight moving member side is further lowered, the weight relatively moves upward in the movable space to form a gap between the weight and the weight moving member. Since the holder can be formed in a non-contact state with the weight, only the load of the weight can be applied to the disk. In addition, even during rotation, since the holding portion of the weight is located inside the holder, it is possible to prevent the weight from coming off when it comes to come off. In addition, with such a configuration, the weight can be brought into a non-contact state by merely lowering the holder after placing the weight on the disk without using a complicated mechanism such as a chuck mechanism or a vacuum mechanism. Cost can be reduced.

According to the disk holding mechanism of the second aspect, since the contact portion between the weight and the holder has a substantially inverted truncated cone shape, after the weight is placed on the disk, the disk support member can be lowered. If this is the case, a gap can be formed in the contact portion to make the contact portion non-contact state. In addition, when the weight is withdrawn from above the disk, if the disk support member is raised, the weight can be held in a state where both are in contact at the contact portion. At this time, since the contact portion has a substantially inverted truncated conical shape, the weight is reliably positioned with respect to the disk support member, and the displacement of the weight can be prevented even when the weight is placed again thereafter.

According to the disk holding mechanism of the third and fourth aspects, the disk is attracted to the disk supporting member by the suction mechanism so that the disk slides during acceleration or deceleration when rotating the disk. Can be prevented. As a result, it is possible to prevent scratches and the like from being made on the disc, thereby preventing quality deterioration.

According to the disk holding mechanism of the fifth aspect, when the weight is moved by the weight moving member, the weight fixing mechanism presses the weight against the holder to fix the weight, thereby preventing displacement of the weight. It is also possible to prevent the holder from being scraped.

According to the disk warpage inspection apparatus of the sixth aspect, the disk is supported on the disk support member, and the disk is rotated with the weight mounted on the disk, and the disk surface warp state is detected by the sensor. By measuring, the warpage of the disk can be measured. At this time, only the load of the weight acts on the disk, the inspection can be performed under predetermined conditions, and the weight can be prevented from coming off. Therefore, the inspection efficiency of the disk can be improved, and in particular, when the disk warpage inspection device is of an in-line type integrally mounted on the disk manufacturing device, it is possible to prevent a decrease in production efficiency due to falling off of the weight.

According to the disk warpage inspection apparatus according to the seventh aspect, the warpage is measured at a plurality of points on the disk by measuring the sensor a plurality of times at predetermined intervals while moving the sensor relative to the disk in the radial direction. Can be measured. And
As the number of times of measurement is increased, the accuracy of measuring the warpage of the disk can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram showing an overall configuration of a DVD manufacturing apparatus to which a disk holding mechanism according to the present invention and a disk warpage inspection device using the same are applied.

FIG. 2 is a side sectional view showing the disk warpage inspection device.

FIG. 3 is a side sectional view showing a disk holding mechanism in the disk warpage inspection device.

FIG. 4 is a side sectional view showing a state where the weight shown in FIG. 3 is lowered on a disk.

[Explanation of symbols]

 Reference Signs List 10 disk 31 disk warpage inspection device 41 rail (moving mechanism) 43 rotating spindle (drive mechanism) 44 disk support part (disk support member) 47 groove or hole (suction mechanism) 55 arm (weight moving member) 57 holder 57b sliver-shaped part (Contact part) 58 Pressing mechanism (weight fixing mechanism) 72b Locking part (contact part) 80A, 80B Sensor S Moving space W Weight

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA35 AA45 BB03 BB16 CC03 DD06 FF09 FF43 GG04 GG13 HH12 HH13 JJ05 MM03 MM04 PP11 PP12 PP13 PP22 QQ28 RR05 TT01 5D121 AA02 HH08 HH18 JJ02

Claims (7)

[Claims] 1. A disk support member for supporting a disk, a weight mounted on the disk, a weight moving member for mounting and retreating the weight on and from the disk, and the disk support member And a drive mechanism for rotating the disk by rotating the disk.The weight moving member is formed with a holder for holding the holding portion of the weight inside. ,
A movable space that allows the weight to move upward is formed, and when the weight is placed on the disk, the holding unit moves upward in the movable space to allow the weight and the holder to move. A disc holding mechanism, wherein a gap is formed between the disc and the disc so as not to be in contact with the weight. 2. A contact portion between the weight and the holder,
2. The disk holding mechanism according to claim 1, wherein the disk holding mechanism has a substantially inverted truncated conical shape which gradually expands from the lower end thereof. 3. The disk holding mechanism according to claim 1, wherein said disk support member is provided with a suction mechanism for sucking said disk. 4. The apparatus according to claim 3, wherein said disk support member is configured to suck the disk by the suction mechanism only when the disk support member is rotated by the drive mechanism during acceleration and deceleration. Disk holding mechanism. 5. The disk holding mechanism according to claim 1, wherein the weight moving member is provided with a weight fixing mechanism that can fix the weight by pressing the weight against the holder. . 6. A disk warpage inspection device comprising a sensor for detecting a warp state of a disk held by the disk holding mechanism according to claim 1. Description: 7. A structure in which either one of the sensor and the disk support member includes a moving mechanism that moves in a radial direction of the disk, and the sensor or the disk support member is moved by the moving mechanism. 7. The disk warpage inspection device according to claim 6, wherein: