JP2001154109A - Microscope unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microscope unit in which the relative distance between an objective lens and a work can be kept constant by changing a main body attachment or main body assembling when a revolver is attached/detached even after the main body is attached to an equipment having been installed once. SOLUTION: The objective lens 3 is attached to the main body 1 directly or indirectly through the revolver 2, and the main body 1 is attached to the attaching plate 100 of the equipment to be installed through an attaching part 5. This unit is provided with first attaching parts 5A and 5B used when the lens 3 is directly attached to the main body 1 so that the relative distance between the work and the lens 3 becomes constant and second attaching parts 5B and 5C used when the lens 3 is indirectly attached to the main body 1 through the revolver 2. The distance between the lens 3 and the work becomes constant regardless of the fact whether or not the revolver 2 is attached to the main body 1, so that the lens 3 does not interfere with the work in the case of the attaching operation of the revolver 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a video microscope unit which can be incorporated into a target device for video observation and other microscope units.

[0002]

2. Description of the Related Art Conventionally, a video microscope unit for connecting a device such as a video device for video observation of a work has been used. The video observation unit includes a main body in which an optical axis is formed, and an objective lens mounted on the main body, and a mounting tool provided on a device to be installed is engaged with a mounting hole formed in the main body. Is attached to the equipment to be installed.

Further, as a video microscope unit, there is a laser processing video microscope unit provided with a processing laser for processing a fine thin film of a semiconductor, a liquid crystal or the like or cutting an aluminum wiring of an integrated circuit (IC). In this laser processing microscope unit, a laser processing optical axis coinciding with the optical axis of the objective lens, and an epi-illumination optical axis and an observation optical axis respectively orthogonal to the laser optical axis are formed inside the main body.

In order to change the epi-illumination optical axis and the observation optical axis toward the objective lens, respective beam splitters are positioned and attached to the main body. Of these, a correction plate for correcting a positional shift of the laser processing optical axis is provided in the main body in the vicinity of the beam splitter for changing the epi-illumination optical axis. In the above microscope unit, the objective lens may be directly attached to the main body,
In order to easily change the magnification, a plurality may be attached to the main body indirectly via a revolver. This revolver is interposed between the objective lens and the main body.

[0005]

In the prior art, the structure in which the revolver is interposed between the objective lens and the main body,
The distance from the mounting hole of the main body to the objective lens differs between the video microscope unit without a revolver and the video microscope unit with a revolver. For this reason, for example, after designing a video microscope unit without a revolver to the target device, if it is necessary to easily change the magnification and want to replace it with a video microscope unit with a revolver, Since the position of the lens changes, there is a problem that the lens cannot be easily replaced due to a problem such as interference with the work.

In particular, in the laser processing microscope unit, the distance from the laser light source to the objective lens differs between the case with the revolver and the case without the revolver, so that the beam thickness of the laser light changes and a part of the light beam is vignetted (chipped). There is a problem that laser power cannot be used effectively due to a problem such as generation of a laser beam. Further, a problem may be caused by a change in the degree of laser focusing, for example, the objective lens may be damaged due to excessive focusing of laser light. In positioning the epi-illumination unit, the epi-illumination unit is rotated about the laser processing optical axis together with the beam splitter that directs the epi-illumination optical axis toward the objective lens. While this beam splitter is attached to the epi-illumination unit side, the correction plate is fixed to the main body, so that the mounting error between these optical members and the main body causes the laser processing optical axis to be displaced. Power is not something that can be used effectively. For this reason, the direction in which the epi-illumination is pulled out (the direction around the laser processing optical axis) is limited, and the degree of freedom in incorporating the laser processing video microscope unit into the target device is restricted.

[0007] A first object of the present invention is to change the mounting of the main body or the combination of the main body, when the revolver is to be attached and detached, even after the main body is once attached to the equipment to be installed. It is an object of the present invention to provide a microscope unit capable of keeping a relative distance to the microscope unit constant. A second object of the present invention is to provide a microscope unit that can effectively use laser power.

[0008]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to achieve the first object by keeping the position of the objective lens relative to the mounting portion regardless of whether the revolver is mounted or not. Specifically, the microscope unit of the present invention is a microscope unit in which an objective lens is directly or indirectly attached to a main body via a revolver, and the main body can be attached to a device to be installed via an attachment portion. The mounting portion is a first mounting portion when the objective lens is directly mounted on the main body so that the relative distance between the workpiece and the objective lens is constant, and the objective lens is provided via the revolver. And a second mounting portion when indirectly mounted on the main body.

In the present invention having this configuration, when the objective lens is directly mounted on the main body, the main body and the equipment to be installed are mounted on the first mounting portion. Thereafter, a revolver equipped with an objective lens is attached to the main body in order to perform observation in which the magnification can be easily changed. Therefore, the attachment position of the main body to the installation target device is changed from the first attachment portion to the second attachment portion. Irrespective of the presence or absence of the revolver, the distance between the objective lens and the work is constant, so that the objective lens does not interfere with the work, and the revolver can be attached and detached.

Here, the first mounting portion may be a plurality of first mounting holes, and the second mounting portion may be a plurality of second mounting holes. Hole and the second
The configuration may be such that a part of the mounting hole is also used. In this configuration, since the mounting portion on the main body side is formed from the mounting hole, the mounting portion can be easily formed. In addition, since the first mounting hole and the second mounting hole are partially used, it is not necessary to form a hole in the main body more than necessary, and the microscope can be easily manufactured.

In the microscope unit of the present invention, there is provided a microscope unit in which an objective lens is attached to a main body directly or indirectly via a revolver, and the main body can be attached to a device to be installed via an attaching portion. , The main body includes an objective lens-side main body, and a mounting portion-side main body,
Between the objective-side body and the mounting-side body,
A spacer member inside which an optical axis can be formed is detachably attached so that the relative distance between the workpiece and the objective lens is constant.

In the present invention having this configuration, when the objective lens is directly mounted on the main body, the spacer member is interposed between the main body on the objective lens side and the main body on the mounting portion side. Thereafter, in order to perform observation in which the magnification can be easily changed, a revolver equipped with an objective lens is attached to the objective-side main body. At this time, the spacer member is removed from between the main bodies, and the main bodies are joined to each other. Accordingly, the distance between the objective lens and the work becomes constant regardless of the presence or absence of the revolver, and the revolver can be attached and detached.

Another object of the present invention is to achieve the second object of the present invention by making the positions of the objective lens and the laser light source constant in the laser processing video microscope regardless of whether the revolver is mounted or not. Specifically, in the microscope unit of the present invention, the objective lens is directly or indirectly attached to the main body via a revolver, and the main body can be attached to an installation target device via an attachment portion, and the In a microscope unit in which a laser processing optical axis and an observation optical axis and / or an illumination optical axis intersecting with the laser processing optical axis are formed, the main body includes an objective lens side main body, a mounting part side main body, A spacer member inside which an optical axis can be formed is attached and detached between the objective lens side main body and the mounting portion side main body so that the relative distance between the work and the objective lens is constant. It is characterized by being freely attached.

In the present invention having this configuration, the laser light emitted from the laser light source is applied to the work from the objective lens through the laser processing optical axis. Here, the revolver is attached / detached to replace the objective lens, and the spacer member is removed or attached in accordance with the attachment / detachment, so that the distance between the objective lens and the work becomes constant. Therefore, the distance between the laser light source and the objective lens becomes constant, and the problems such as the change of the beam thickness of the laser beam and the occurrence of vignetting (cracking) in a part of the light beam are avoided, and the laser power can be used effectively. In addition, since the laser beam does not condense too much,
The objective lens is not damaged.

Further, the present invention is to achieve the second object by integrating a beam splitter and a correction plate in a laser processing video microscope. Specifically, the microscope unit of the present invention enables epi-illumination light to be applied by a beam splitter from a direction intersecting the laser processing optical axis, or extracts observation light by a beam splitter in a direction intersecting the laser processing axis. In a microscope unit which is enabled, a correction plate for correcting a displacement of the laser processing optical axis is provided integrally with the beam splitter.

In the present invention having this configuration, since the beam splitter and the correction plate are integrally formed, the epi-illumination unit is positioned together with the beam splitter for directing the epi-illumination optical axis toward the objective lens when positioning the epi-illumination unit. Even when the laser beam is rotated around the laser processing optical axis, the beam splitter and the correction plate rotate integrally. Therefore, there is no displacement of the optical axis of the laser processing, and the laser power can be used effectively. In addition, since the direction in which the epi-illumination is extracted is not limited, the degree of freedom in incorporating the laser processing video microscope unit into the target device is eliminated.

Here, an absolute value of an angle formed by the laser processing optical axis and the beam splitter may be equal to an angle formed by the laser processing optical axis and the correction plate. Further, the material and thickness of the beam splitter and the correction plate may be substantially the same. With this configuration, the work of assembling the beam splitter and the correction plate becomes easy, and the number of parts can be reduced by sharing these members.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of a microscope unit according to the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same components will be denoted by the same reference numerals, and the description thereof will be omitted or simplified. [First Embodiment] A first embodiment is shown in FIG.
The first embodiment is an example in which the present invention is applied to a video microscope unit. FIG. 1A is a sectional view showing a state where the objective lens is directly attached to the main body, and FIG. 1B is a sectional view showing a state where the objective lens is indirectly attached via a revolver.

1A and 1B, a microscope unit 10 of the first embodiment has a main body 1 having an optical axis formed therein, a revolver 2 detachably attached to the main body 1, and a main body 1 And an objective lens 3 attached directly or indirectly via a revolver 2. The revolver 2 has a plurality of objective lenses 3 mounted thereon and is rotatably mounted on the main body 1. The main body 1 includes a first main body 11 having an observation optical axis A formed therein,
A second main body 12 branched from the first main body 11 and having an illumination optical axis B formed therein. The observation optical axis A is coaxial with the objective lens 3, and the illumination optical axis B and the observation optical axis A are orthogonal to each other. In the first embodiment, an illumination optical axis may be formed inside the first main body 11, and the second main body 12
The observation optical axis may be formed inside.

The first main body 11 includes a cylindrical member 13 connected to an observation device (not shown) such as a CCD camera, and a rectangular tube connected to the cylindrical member 13 and provided with a plurality of lenses 4 therein. It comprises a member 14 and a branching member 15 connected to the square tube member 14 and the second main body 12. The mounting portion 5 for mounting the video microscope unit 10 to a mounting plate 100 of a device to be installed (not shown) is formed on one outer surface of the square tube member 14.

The mounting portion 5 is formed of three mounting holes 5A, 5B, and 5C, two at three locations along the axial direction of the observation optical axis A. These mounting holes 5A, 5B, 5C can be screwed to the mounting plate 100 and bolts (not shown). The two mounting holes 5A formed on the side of the rectangular tube member 14 and the two mounting holes 5B formed at the intermediate position are first mounting holes when the objective lens 3 is directly mounted on the main body 1. The mounting hole 5B at the intermediate position and the two mounting holes 5C formed on the branching member 15 side
This is a second attachment hole when indirectly attached to the main body 1 via the. The two mounting holes 5B at the intermediate position also serve as the first mounting hole and the second mounting hole.

Dimensions between the mounting holes 5A and 5B,
The dimension between the mounting hole 5B and the mounting hole 5C is T, and this dimension T is the same as the dimension along the observation optical axis A of the revolver 2 attached to the main body 1. In order to directly attach the objective lens 3 to the main body 1, the video microscope unit 10 is mounted on the mounting plate 10 through the first mounting holes 5A and 5B.
0 and the objective lens 3 is attached to the revolver 2
The video microscope unit 10 is mounted on the mounting plate 100 through the second mounting holes 5B and 5C for mounting on the main body 1 through the
In this case, the distance between the mounting plate 100 and the objective lens 3, that is, the relative distance between the work (not shown) and the objective lens 3 is constant.

The splitting member 15 is provided therein with a beam splitter 6 for directing the illumination light passing on the illumination optical axis B to the objective lens 3. Revolver 2 for branching member 15
Can be mounted with a mounting ring 7 and a mounting screw 8. The second main body 12 has a plurality of lenses 9 provided therein, one end of which is inserted into the branching member 15, and the other end of which is connected to an illumination light source (not shown) through an optical fiber 9A.

Therefore, in the first embodiment, the objective lens 3
Is attached to the main body 1 directly or indirectly via the revolver 2, and the main body 1 can be attached to the equipment to be installed via the attaching section 5, and the attaching section 5 is moved relative to the workpiece and the objective lens 3. The first mounting portion 5 when the objective lens 3 is directly mounted on the main body 1 so that the distance is constant.
A, 5B, and the objective lens 3 are connected to the main body 1 via the revolver 2.
Second mounting portions 5B and 5C when indirectly mounted on the
Since the distance between the objective lens 3 and the work is constant regardless of whether the revolver 2 is mounted on the main body 1 or not, the objective lens 3 interferes with the work when the revolver 2 is mounted. Is gone, revolver 2
Can be attached and detached.

Further, the first mounting portion is a plurality of first mounting holes 5A and 5B, and the second mounting portion is a plurality of second mounting holes 5B and 5C. Molding is easy. Moreover, since the first mounting holes 5A, 5B and the second mounting holes 5B, 5C also serve as the mounting holes 5C, it is not necessary to form holes in the main body 1 more than necessary, and the microscope can be manufactured. It will be easier.

[Second Embodiment] Next, a second embodiment of the present invention will be described with reference to FIGS. Second
The embodiment is an example in which the present invention is applied to a laser processing microscope unit. FIG. 2A is a cross-sectional view showing a state where the objective lens is directly attached to the main body, and FIG. 2B is a cross-sectional view showing a state where the objective lens is indirectly attached via a revolver.

2A and 2B, the laser processing microscope unit 20 of the second embodiment includes a main body 20A having an optical axis formed therein, a revolver 2 detachably attached to the main body 20A, The objective lens 3 is directly or indirectly attached via the revolver 2 to the main body 20A. The revolver 2 is rotatably attached to the main body 20A.

The main body 20A includes a first main body 21 having a laser processing optical axis C formed therein, a second main body 22 branched from the first main body 21 and having an observation optical axis A formed therein, A third main body 23 which is branched from the main body and has an incident illumination optical axis B formed therein. Laser processing optical axis C
Is coaxial with the objective lens 3, the observation optical axis A is made parallel to the laser processing optical axis C after being branched orthogonal to the laser processing optical axis C, and the incident illumination optical axis B and the laser processing optical axis C Are orthogonal to each other. In the second embodiment, an illumination optical axis and an observation optical axis may be formed inside the first main body 21, and a laser processing optical axis and an illumination optical axis may be formed inside the second main body 22. Further, a laser processing optical axis and an observation optical axis may be formed inside the third main body 23.

The first main body 21 is divided into an objective lens side main body 24 and a mounting section side main body 25.
Between the lenses 4 and 25, an intermediate lens barrel 26 is detachably attached. The intermediate barrel 26 functions as a spacer member for keeping the relative distance between the workpiece and the objective lens 3 regardless of whether the revolver 2 is mounted or not, and a laser processing optical axis C can be formed therein. It has been.

The axial dimension T of the intermediate barrel 26 is the same as the dimension along the observation optical axis A of the revolver 2 attached to the main body 1. The intermediate lens barrel 26 is attached to the objective lens side main body 24 and the mounting section side main body 25 by mounting screws 51 and 52. When the intermediate lens barrel 26 is not attached to the first main body 21, the objective lens side main body 24 and the mounting section side main body 2
5 are attached to each other with attachment screws 52.

A beam splitter 31 for applying epi-illumination light from a direction orthogonal to the laser processing optical axis C and a correction plate 32 for correcting a displacement of the laser processing optical axis C are mounted inside the objective lens side main body 24. The beam splitter 31 and the correction plate 32 are provided integrally via a plate 33.
The mounting plate 33 is fixed to the third main body 23. Angle α between laser processing optical axis C and beam splitter 31
And the absolute value of the angle α between the laser processing optical axis C and the correction plate 32 is equal to 45 degrees. The beam splitter 31 and the correction plate 32 are made of the same optical material such as glass or hard plastic, and have the same thickness of 3 mm.

The mounting portion side body 25 includes a cylindrical member 27 connected to a laser light source (not shown), a plurality of lenses 4 connected to the cylindrical member 27, and a beam splitter 34 therein.
Are provided, and a connection pipe 29 for connecting the rectangular tube member 28 and the second main body 22 is provided. The square tube member 28 has an attachment hole (attachment portion) 27A for attaching the laser processing microscope unit 20 to a device to be installed (not shown) on one outer surface thereof. The beam splitter 34 is similar to the beam splitter 31,
The material is molded from an optical material such as glass or hard plastic, and has a thickness of 1 mm.

The second main body 22 has therein a first cylindrical member 41 connected to the connection pipe 29 and a mirror 42 connected to the first cylindrical member 41 and changing the observation optical axis A to a right angle. And a second cylindrical member 43.
Reference numeral 3 is connected to an observation device (not shown) such as a CCD camera. The second main body 22 forms an observation unit. Third body 23
Has a plurality of lenses 9 provided therein, one end of which is inserted into the objective lens side body 24 and the other end of which is an optical fiber 9A.
Through to an unillustrated illumination light source. The third main body 23 forms an epi-illumination unit.

The movement of the laser processing light of the second embodiment is shown in FIG.
It will be described based on. In FIG. 3, a laser beam P emitted from a laser light source (not shown) has a light speed of about 3 mm square at an emission port of a shutter unit (not shown) that can be opened and closed, but has a slight spread. After passing through the beam splitter 34, the lens 4 portion is approximately 4.2 m.
It will be m square. Thereafter, the laser light P is gently stopped down, passes through the correction plate 32 and the beam splitter 31, and the incident light speed of the objective lens 3 becomes approximately 3.6 mm or less.

Here, since the beam splitter 34 provided on the mounting portion side main body 25 is a thin one of 1 mm or less, the positional deviation of the laser beam is small. The thickness of the beam splitter 31 and the correction plate 32 on the objective lens 3 side is 3
mm and the same material, the positional deviation of the laser light P passing therethrough is 1 mm or more. However, since the beam splitter 31 and the correction plate 32 are arranged as shown in FIG. The misalignment is corrected by the member.

Therefore, in the second embodiment, the objective lens 3
Is directly or indirectly attached to the main body 20A via the revolver 2, and the main body 20A can be attached to the equipment to be installed via the attaching portion 27A.
Comprises an objective lens side main body 24 and a mounting section side main body 25, and these objective lens side main body 24 and the mounting section side main body 25 are provided.
An intermediate lens barrel 26 having an optical axis formed therein is detachably mounted between the revolver 2 and the object lens 3 so that the relative distance between the workpiece and the objective lens 3 is constant.
Irrespective of the presence or absence, the distance between the objective lens 3 and the work becomes constant, and the work of attaching and detaching the revolver becomes possible.

Further, in the microscope unit of the second embodiment, a laser processing optical axis C, an observation optical axis A and an illumination optical axis B orthogonal to the laser processing optical axis C are formed inside the main body 21. Since the laser processing microscope unit is used, when the revolver 2 is attached and detached to replace the objective lens 3, the intermediate lens barrel 26 is removed or attached in accordance with the attachment or detachment, so that the distance between the objective lens 3 and the work is constant. Become. Therefore, the distance between the laser light source (not shown) and the objective lens 3 becomes constant, the problems such as the change of the beam thickness of the laser beam and the occurrence of vignetting in a part of the light beam are avoided, and the laser power can be used effectively. The effect can be achieved. In addition, since the laser light is not condensed too much, the objective lens is not damaged.

Further, since the correction plate 32 for correcting the displacement of the laser processing optical axis C is provided integrally with the beam splitter 31 and the epi-illumination unit (the third main unit 23), the epi-illumination unit (the third main unit 23) is positioned. In doing so, the epi-illumination optical axis B
Even if the epi-illumination unit is rotated about the laser processing optical axis together with the beam splitter 31 that directs the laser beam toward the objective lens, the beam splitter 31 and the correction plate 32 rotate integrally, so that the positional deviation of the laser processing optical axis C is eliminated. The laser power can be used effectively. In addition, since the direction in which the epi-illumination is extracted is not limited, the degree of freedom in incorporating the laser processing video microscope unit into the target device is eliminated.

Further, the absolute value of the angle α between the laser processing optical axis C and the beam splitter 31 and the angle α between the laser processing optical axis C and the correction plate 32 are both 45 degrees. Can be easily assembled. Further, since the material and the thickness of the beam splitter 31 and the correction plate 32 are substantially the same, the number of parts can be reduced by sharing the members.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the gist of the present invention. Is possible. For example,
In each of the above embodiments, the microscope unit is a video microscope unit or a laser processing microscope unit. However, in the present invention, if the microscope is configured so that the revolver 2 can be attached to and detached from the main body 1 and 20A, an image is displayed on the video device. Instead of observing through an eyepiece, a configuration of observing through an eyepiece may be used.

Further, in the first embodiment, the mounting portion need not be the mounting holes 5A, 5B, 5C, but may be, for example, a projection that engages with the mounting hole formed in the mounting plate 100. Further, although a part of the mounting holes 5B of the mounting holes 5A, 5B, and 5C is also used as the first mounting part and the second mounting part, in the present invention, these mounting holes are not necessarily partly used. It does not matter that the configuration is

In the second embodiment, the spacer member is the intermediate lens barrel 26. However, the outer shape of the spacer member is not limited to a cylindrical shape, and may be, for example, a rectangular tube shape. Furthermore, the thickness dimensions and materials of the optical members such as the beam splitters 31 and 33 and the correction plate 32 are not limited to those described in the second embodiment, but can be set as appropriate.

[0043]

As described above, according to the present invention, even when the main body is once attached to the equipment to be installed, when the revolver is to be attached / detached, the objective can be changed by attaching the main body or changing the combination of the main bodies. The effect that the relative distance between the lens and the work can be kept constant can be achieved. Further, according to the present invention, the effect that the laser power can be effectively used can be achieved. Furthermore, since the laser light is not condensed too much, the objective lens is not damaged.

[Brief description of the drawings]

FIG. 1 shows a first embodiment of the present invention, in which (A) is a cross-sectional view of a video microscope unit without a revolver, and (B) is a cross-sectional view of a video microscope unit with a revolver mounted. .

FIG. 2 shows a second embodiment of the present invention, in which (A) is a cross-sectional view of a laser processing microscope unit without a revolver, and (B) is a cross-sectional view of a laser processing microscope unit with a revolver mounted. Sectional view.

FIG. 3 is an enlarged sectional view of a main part of FIG. 2 (A).

[Explanation of symbols]

 1, 20A Main body 2 Revolver 3 Objective lens 5A, 5B First mounting hole (first mounting part) 5B, 5C Second mounting hole (second mounting part) 10 Video microscope unit 20 Laser processing microscope unit 21 Main body 24 Objective Lens side body 25 Mounting section side body 31 Beam splitter 32 Correction plate A Observation optical axis B Illumination optical axis C Laser processing optical axis

Claims (7)

[Claims] 1. A microscope unit in which an objective lens is directly or indirectly attached to a main body via a revolver, and the main body can be attached to an installation target device via an attachment portion. A first attachment portion when the objective lens is directly attached to the main body, and the objective lens is indirectly attached to the main body via the revolver such that a relative distance between the objective lens and the objective lens is constant. And a second mounting portion. 2. The microscope unit according to claim 1, wherein the first mounting portion is a plurality of first mounting holes, and the second mounting portion is a plurality of second mounting holes. First
A microscope unit, wherein a part of the mounting hole is also used as the second mounting hole. 3. A microscope unit in which an objective lens is directly or indirectly attached to a main body via a revolver, and the main body can be attached to an equipment to be installed via an attaching portion. An optical axis is provided internally between the objective lens-side main body and the mounting-part-side main body so that the relative distance between the workpiece and the objective lens is constant. A microscope unit, wherein a spacer member that can be formed is detachably attached. 4. An object lens is directly or indirectly attached to a main body via a revolver, and the main body is attachable to a device to be installed via an attachment portion. And a microscope unit in which an observation optical axis and / or an illumination optical axis intersecting with the laser processing optical axis are formed, wherein the main body includes an objective lens side main body and a mounting part side main body. Between the side body and the mounting part side body, a spacer member capable of forming an optical axis inside is detachably attached so that the relative distance between the workpiece and the objective lens is constant. A microscope unit. 5. A microscope unit in which epi-illumination light can be applied by a beam splitter from a direction intersecting a laser processing optical axis, or observation light can be extracted by a beam splitter in a direction intersecting a laser processing axis. A microscope unit, wherein a correction plate for correcting a displacement of the laser processing optical axis is provided integrally with the beam splitter. 6. The microscope unit according to claim 5, wherein an absolute value of an angle formed by the laser processing optical axis and the beam splitter is equal to an angle formed by the laser processing optical axis and the correction plate. A microscope unit. 7. The microscope unit according to claim 5, wherein the beam splitter and the correction plate have substantially the same material and thickness.