JP2003322800A - Microscope unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope unit which can effectively utilize laser power. <P>SOLUTION: The unit is provided with a correcting plate 32 for correcting the mispositioning of an optical axis C of laser beam machining integrally with a beam splitter 31. Even if a vertical illuminating section is rotated around the optical axis of laser beam machining together with the beam splitter 31 for directing the optical axis B of vertical illuminating toward an objective lens side in positioning the vertical illuminating section, the beam splitter 31 and the correcting plate 32 rotate integrally and therefore there is no more mispositioning of the optical axis C of laser beam machining and the laser power can be effectively utilized. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a video microscope unit that can be incorporated in a target device to perform video observation and other microscope units.

[0002]

2. Description of the Related Art Conventionally, a video microscope unit for connecting a device such as a video device and observing a work by video has been used. This video observation unit includes a main body in which an optical axis is formed and an objective lens attached to the main body, and a mounting hole formed in the main body is engaged with a mounting tool provided in a device to be installed. It is attached to the installed equipment.

Further, the video microscope unit includes a laser processing video microscope unit equipped with a processing laser for processing fine thin films such as semiconductors and liquid crystals and cutting aluminum wiring of integrated circuits (ICs). In this laser processing microscope unit, a laser processing optical axis that coincides with the optical axis of the objective lens, and an epi-illumination optical axis and an observation optical axis that are respectively orthogonal to the laser optical axis are formed inside the main body.

In order to change the epi-illumination optical axis and the observation optical axis toward the objective lens, a beam splitter is positioned and attached to the main body. Among these, a correction plate for correcting the positional deviation of the laser processing optical axis is provided in the main body in the vicinity of the beam splitter that changes the epi-illumination optical axis. In the above microscope unit, the objective lens may be directly attached to the main body,
Multiples may be indirectly attached to the body via a revolver to easily change the magnification. This revolver is interposed between the objective lens and the main body.

[0005]

In the conventional example, due to the structure in which the revolver is interposed between the objective lens and the main body,
The video microscope unit without the revolver and the video microscope unit with the revolver have different distances from the mounting holes of the main body to the objective lens. For this reason, for example, if a video microscope unit without a revolver is designed to be attached to the target device, and it becomes necessary to easily change the magnification, and you want to replace the video microscope unit with a revolver, the objective Since the position of the lens changes, there is a disadvantage that it cannot be easily replaced due to problems such as interference with the work.

Particularly, in the laser processing microscope unit, since the distance from the laser light source to the objective lens is different between with and without the revolver, the beam thickness of the laser light changes, and vignetting (chipped) occurs in a part of the light beam. There is a problem in that the laser power cannot be effectively used due to problems such as occurrence of noise. Further, the objective lens may be damaged due to a change in the degree of laser focusing, for example, excessive focusing of laser light. Further, in the conventional example, when the epi-illumination unit is positioned, the epi-illumination unit is rotated around the laser processing optical axis together with the beam splitter that directs the epi-illumination optical axis toward the objective lens side. This beam splitter is mounted on the side of the epi-illumination unit, whereas the correction plate is fixed to the main body, so the mounting error between these optical members and the main body causes a positional deviation of the laser processing optical axis,
The laser power cannot always be used effectively. Therefore, the direction in which the epi-illumination is pulled out (the direction around the laser processing optical axis) is limited, and the degree of freedom in incorporating the laser processing video microscope unit into the target device is limited.

An object of the present invention is to provide a microscope unit that can effectively use laser power.

[0008]

Therefore, the present invention is intended to achieve the above object by integrating a beam splitter and a correction plate in a laser processing video microscope. Specifically, the microscope unit of the present invention makes it possible to apply epi-illumination light from a direction intersecting the laser processing optical axis with a beam splitter, or extract observation light with a beam splitter in a direction intersecting the laser processing axis. In the enabled microscope unit, a correction plate for correcting the positional deviation of the laser processing optical axis is provided integrally with the beam splitter.

In the present invention having this structure, since the beam splitter and the correction plate are integrally formed, when the epi-illumination unit is positioned, the epi-illumination unit and the beam splitter for directing the epi-illumination optical axis toward the objective lens side are provided. The beam splitter and the correction plate rotate together even if they are rotated around the laser processing optical axis. Therefore, the laser processing optical axis is not displaced, so that the laser power can be effectively used. Further, since there is no restriction on the direction in which the epi-illumination is pulled out, there is no restriction on the degree of freedom in incorporating the laser processing video microscope unit into the target device.

Here, the absolute value of the angle formed by the laser processing optical axis and the beam splitter may be equal to the absolute value of the angle formed by the laser processing optical axis and the correction plate. Further, the material and thickness of the beam splitter and the correction plate may be substantially the same. With this configuration, the work of assembling the beam splitter and the correction plate is facilitated, and the number of parts can be reduced by sharing these members.

[0011]

Preferred embodiments of the microscope unit of the present invention will be described below in detail with reference to the accompanying drawings. First, a related art of the present invention will be described before describing an embodiment of the present invention. [Related Technology] Related technology is shown in FIG. The related technology is an example applied to a video microscope unit. Figure 1
FIG. 1A is a sectional view showing a state in which an objective lens is directly attached to a main body, and FIG. 1B is a sectional view showing a state in which an objective lens is indirectly attached via a revolver.

1A and 1B, a microscope unit 10 of the first embodiment has a main body 1 in which an optical axis is formed, a revolver 2 detachably attached to the main body 1, and a main body 1. And an objective lens 3 which is directly or indirectly attached via a revolver 2. The revolver 2 has a plurality of objective lenses 3 attached thereto and is rotatably attached to the main body 1. The main body 1 includes a first main body 11 having an observation optical axis A formed therein,
The second main body 12 is branched from the first main body 11 and has an illumination optical axis B formed therein. The observation optical axis A is coaxial with the objective lens 3, and the illumination optical axis B and the observation optical axis A are orthogonal to each other. In the first embodiment, the illumination optical axis may be formed inside the first main body 11, and the second main body 12
The observation optical axis may be formed inside the.

The first main body 11 is a rectangular tube 13 having a cylindrical member 13 connected to an observing device (not shown) such as a CCD camera, and a plurality of lenses 4 provided inside the cylindrical member 13. It is composed of a member 14 and a branch member 15 connected to the rectangular tube member 14 and the second main body 12. A mounting portion 5 for mounting the video microscope unit 10 on a mounting plate 100 of a device to be installed (not shown) is formed on one outer surface of the rectangular tube member 14.

The mounting portion 5 is formed from three mounting holes 5A, 5B, and 5C, two in each of three positions along the axial direction of the observation optical axis A. These mounting holes 5A, 5B and 5C can be screwed into the mounting plate 100 and a bolt (not shown). The two mounting holes 5A formed on the side of the rectangular tube member 14 and the two mounting holes 5B formed at the intermediate position are the first mounting holes when the objective lens 3 is directly mounted on the main body 1. The objective lens 3 has the mounting hole 5B at the intermediate position and the two mounting holes 5C formed on the branch member 15 side.
It is a second attachment hole when it is indirectly attached to the main body 1 via. The two mounting holes 5B at the intermediate position serve as both the first mounting hole and the second mounting hole.

The dimensions between the mounting holes 5A and 5B,
The dimension between the attachment holes 5B and 5C is T, and this dimension T is the same as the dimension along the observation optical axis A of the revolver 2 in the state of being attached to the main body 1. In order to directly attach the objective lens 3 to the main body 1, the video microscope unit 10 has the first attachment holes 5A and 5B and the attachment plate 10
0, the objective lens 3 and the revolver 2
The video microscope unit 10 is attached to the main body 1 via the mounting plate 100 with the second mounting holes 5B and 5C.
The distance between the mounting plate 100 and the objective lens 3, that is, the relative distance between the workpiece (not shown) and the objective lens 3 becomes constant.

The branching member 15 is provided therein with a beam splitter 6 for directing the illumination light passing on the illumination optical axis B to the objective lens 3. Revolver 2 for branch member 15
Can be mounted with a mounting ring 7 and a mounting screw 8. The second body 12 has a plurality of lenses 9 provided therein, one end of which is inserted into the branch member 15 and the other end of which is connected to an illumination light source (not shown) through the optical fiber 9A.

Therefore, in the first related art, the objective lens 3
Is directly or indirectly attached to the main body 1 via the revolver 2, and the main body 1 can be attached to the device to be installed via the attachment portion 5. The first mounting portion 5 when the objective lens 3 is directly mounted on the main body 1 so that the distance becomes constant.
A, 5B and the objective lens 3 through the revolver 2 into the main body 1
Second attachment portions 5B and 5C when indirectly attached to
Since the revolver 2 is configured to include, since the distance between the objective lens 3 and the work is constant regardless of whether the revolver 2 is attached to the main body 1, the objective lens 3 interferes with the work when the revolver 2 is attached. No more, Revolver 2
Can be attached and detached.

Further, the first mounting portion is the plurality of first mounting holes 5A and 5B, and the second mounting portion is the plurality of second mounting holes 5B and 5C. Can be easily molded. Moreover, since the first mounting holes 5A, 5B and the second mounting holes 5B, 5C also serve as the mounting holes 5C, it is not necessary to form more holes in the main body 1 than necessary, and the microscope can be manufactured. It will be easy.

[Embodiment] Next, an embodiment of the present invention will be described with reference to FIGS. This embodiment is an example in which the present invention is applied to a laser processing microscope unit. In the following description, the same components as those of the related art will be designated by the same reference numerals, and the description thereof will be omitted or simplified. 2A is a sectional view showing a state where the objective lens is directly attached to the main body, and FIG. 2B is a sectional view showing a state where the objective lens is indirectly attached via a revolver.

2A and 2B, a laser processing microscope unit 20 of the present embodiment has a main body 20A having an optical axis formed therein, a revolver 2 detachably attached to the main body 20A, and a main body. The objective lens 3 is attached to the 20A directly or indirectly via the revolver 2. The revolver 2 is rotatably attached to the main body 20A.

The main body 20A includes a first main body 21 in which a laser processing optical axis C is formed, a second main body 22 branched from the first main body 21 and in which an observation optical axis A is formed, and a first main body 21. The third main body 23 is branched from the main body and has an incident illumination optical axis B formed therein. Laser processing optical axis C
Is coaxial with the objective lens 3, the observation optical axis A is branched orthogonally to the laser processing optical axis C and then parallel to the laser processing optical axis C, and the epi-illumination optical axis B and the laser processing optical axis C are provided. Are orthogonal to each other. In the second embodiment, the illumination optical axis and the observation optical axis may be formed inside the first main body 21, and the laser processing optical axis and the illumination optical axis may be formed inside the second main body 22. Further, the laser processing optical axis and the observation optical axis may be formed inside the third main body 23.

The first main body 21 is divided into an objective lens side main body 24 and a mounting portion side main body 25.
An intermediate lens barrel 26 is removably attached between 4 and 25. The intermediate lens barrel 26 functions as a spacer member that keeps the relative distance between the workpiece and the objective lens 3 constant regardless of whether or not the revolver 2 is attached, and the laser processing optical axis C can be formed therein. It is said that.

The axial dimension T of the intermediate lens barrel 26 is the same as the dimension along the observation optical axis A of the revolver 2 attached to the main body 1. The intermediate lens barrel 26 is attached to the objective lens side main body 24 and the attachment portion side main body 25 with the attaching screws 51 and 52. When the intermediate lens barrel 26 cannot be attached to the first body 21, the objective lens side body 24 and the attachment portion side body 2
5 and 5 are attached to each other by attaching screws 52.

A beam splitter 31 for applying epi-illumination light from a direction orthogonal to the laser processing optical axis C and a correction plate 32 for correcting the positional deviation of the laser processing optical axis C are mounted inside the objective lens side body 24. The beam splitter 31 and the correction plate 32 are integrally provided via a plate 33.
The mounting plate 33 is fixed to the third main body 23. Angle α formed by laser processing optical axis C and beam splitter 31
And the absolute value of the angle α formed by the laser processing optical axis C and the correction plate 32 is equal to 45 degrees. The beam splitter 31 and the correction plate 32 are made of the same optical material such as glass and hard plastic, and have the same thickness of 3 mm.

The mounting portion side body 25 has a cylindrical member 27 connected to a laser light source (not shown), a plurality of lenses 4 connected to the cylindrical member 27, and a beam splitter 34.
And a connecting pipe 29 connecting the rectangular tube member 28 and the second main body 22. An attachment hole (attachment portion) 27A for attaching the laser processing microscope unit 20 to a device to be installed (not shown) is formed on one outer surface of the rectangular tube member 28. The beam splitter 34, like the beam splitter 31,
The material is molded from an optical material such as glass or hard plastic, and has a thickness of 1 mm.

The second main body 22 is internally provided with a first cylindrical member 41 connected to the connecting tube 29 and a mirror 42 connected to the first cylindrical member 41 and changing the observation optical axis A to a right angle. The second tubular member 43 and the second tubular member 43.
3 is connected to an observation device (not shown) such as a CCD camera. The second main body 22 constitutes an observation section. Third body 23
Has a plurality of lenses 9 inside, one end of which is inserted into the objective lens side body 24 and the other end of which is the optical fiber 9A.
Through an illumination light source (not shown). The third main body 23 constitutes an epi-illumination unit.

The movement of the laser processing light of this embodiment will be described with reference to FIG. In FIG. 3, the laser light P emitted from a laser light source (not shown) has a light speed thickness of approximately 3 mm square at the exit of a shutter portion (not shown) that can be opened and closed, but has a slight spread. , After passing through the beam splitter 34, the lens 4 is about 4.2 mm
It becomes the thickness of the corner. After that, the laser light P is gently narrowed and passes through the correction plate 32 and the beam splitter 31, and the incident light velocity thickness of the objective lens 3 becomes approximately 3.6 mm or less.

Here, since the beam splitter 34 provided in the attachment-side main body 25 is a thin one having a thickness of 1 mm or less, the positional deviation of the laser beam is small. The thickness of the beam splitter 31 and the correction plate 32 on the objective lens 3 side is 3
Since the laser beam P is 1 mm or more and the material is the same, the positional deviation of the laser light P transmitted therethrough is 1 mm or more. However, since the beam splitter 31 and the correction plate 32 are arranged as shown in FIG. The displacement is corrected by the member.

Therefore, in this embodiment, the objective lens 3 is directly or indirectly attached to the main body 20A via the revolver 2, and the main body 20A can be attached to the equipment to be installed via the attachment portion 27A. The main body 20A is
An objective lens side body 24 and a mounting portion side body 25 are provided,
Between the objective lens side main body 24 and the mounting portion side main body 25, an intermediate lens barrel 26 in which an optical axis can be formed so that the relative distance between the work and the objective lens 3 is constant.
Is detachably attached, the distance between the objective lens 3 and the workpiece is constant regardless of the presence or absence of the revolver 2, and the revolver can be attached and detached.

Further, the microscope unit of this embodiment is
Since the laser processing optical axis C and the observation optical axis A and the illumination optical axis B orthogonal to the laser processing optical axis C are formed inside the main body 21, the objective lens 3 can be replaced. Therefore, when the revolver 2 is attached or detached, the intermediate lens barrel 26 is detached or attached in accordance with this, so that the distance between the objective lens 3 and the work becomes constant. Therefore, the distance between the laser light source (not shown) and the objective lens 3 becomes constant, the beam thickness of the laser light changes,
The problem of vignetting occurring in a part of the light flux can be avoided, and the effect that the laser power can be effectively used can be achieved.
Moreover, since the laser light is not focused too much, the objective lens is not damaged.

Further, since the correction plate 32 for correcting the positional deviation of the laser processing optical axis C is provided integrally with the beam splitter 31 and the epi-illumination unit (third main body 23), the epi-illumination unit (third main body 23) is positioned. In doing so, epi-illumination optical axis B
Even if the epi-illumination unit is rotated around the laser processing optical axis together with the beam splitter 31 that directs the beam toward the objective lens side, the beam splitter 31 and the correction plate 32 rotate integrally, so that the laser processing optical axis C is not displaced. , Laser power can be effectively used. Further, since there is no restriction on the direction in which the epi-illumination is pulled out, there is no restriction on the degree of freedom in incorporating the laser processing video microscope unit into the target device.

Further, since the absolute value of the angle α formed by the laser processing optical axis C and the beam splitter 31 and the angle α formed by the laser processing optical axis C and the correction plate 32 are both 45 degrees, these members are It will be easier to assemble. Further, since the beam splitter 31 and the correction plate 32 are made of substantially the same material and have the same thickness, the number of parts can be reduced by sharing the members.

The preferred embodiments of the present invention have been described above, but the present invention is not limited to these embodiments, and various improvements and design changes are made without departing from the gist of the present invention. Is possible. For example,
In the above-described embodiments and the like, the microscope unit is a video microscope unit or a laser processing microscope unit. However, in the present invention, if the revolver 2 is a microscope configured to be attachable / detachable to / from the main body 1 or 20A, a video device can display an image. Instead of observing through the eyepiece, the eyepiece may be used for observing.

Further, in the related art, the mounting portion does not have to be the mounting holes 5A, 5B, 5C, but may be, for example, a protrusion that engages with the mounting hole formed in the mounting plate 100. Furthermore, a part of the mounting holes 5A, 5B, 5C
Although the first mounting portion and the second mounting portion have the same function as B, in the present invention, some of these mounting holes do not necessarily have to be commonly used.

Although the spacer member is the intermediate lens barrel 26 in the above embodiment, the outer shape of the spacer member is not limited to the cylindrical shape, and may be, for example, a rectangular tube shape. Further, the thickness dimensions and materials of the optical members such as the beam splitters 31 and 33 and the correction plate 32 are not limited to those described in the second embodiment, and can be set as appropriate.

[0036]

As described above, according to the present invention, the effect that the laser power can be effectively utilized can be achieved.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a video microscope unit in which a revolver is not attached, and FIG. 1B is a cross-sectional view of a video microscope unit in which a revolver is attached, showing a related technique of the present invention.

2A and 2B show an embodiment of the present invention, in which FIG. 2A is a cross-sectional view of a laser processing microscope unit without a revolver attached, and FIG. 2B is a cross section of a laser processing microscope unit with a revolver attached. Fig.

FIG. 3 is an enlarged cross-sectional view of a main part of FIG.

[Explanation of symbols]

1,20A body 2 revolver 3 Objective lens 5A, 5B 1st mounting hole (1st mounting part) 5B, 5C 2nd mounting hole (2nd mounting part) 10 Video microscope unit 20 Laser processing microscope unit 21 body 24 Objective lens side body 25 Mounting side body 31 beam splitter 32 correction plate A observation optical axis B illumination optical axis C laser processing optical axis

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Claims (3)

[Claims] 1. A microscope unit in which epi-illumination light can be applied by a beam splitter from a direction intersecting the laser processing optical axis, or observation light can be extracted by a beam splitter in a direction intersecting the laser processing axis, A microscope unit, wherein a correction plate for correcting the positional deviation of the laser processing optical axis is provided integrally with the beam splitter. 2. The microscope unit according to claim 1, wherein an absolute angle between an angle formed by the laser processing optical axis and the beam splitter and an angle formed by the laser processing optical axis and the correction plate are equal to each other. Microscope unit characterized by. 3. The microscope unit according to claim 1, wherein the beam splitter and the correction plate are made of substantially the same material and have the same thickness.