JP2001153903A - Method and apparatus for measuring resistance - Google Patents

Method and apparatus for measuring resistance

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Publication number
JP2001153903A
JP2001153903A JP33979899A JP33979899A JP2001153903A JP 2001153903 A JP2001153903 A JP 2001153903A JP 33979899 A JP33979899 A JP 33979899A JP 33979899 A JP33979899 A JP 33979899A JP 2001153903 A JP2001153903 A JP 2001153903A
Authority
JP
Japan
Prior art keywords
measured
voltage
constant current
resistor
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33979899A
Other languages
Japanese (ja)
Other versions
JP3878779B2 (en
Inventor
Rintaro Murayama
林太郎 村山
Kenji Kobayashi
健二 小林
Satoshi Uehara
聡 上原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hioki EE Corp
Original Assignee
Hioki EE Corp
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Filing date
Publication date
Application filed by Hioki EE Corp filed Critical Hioki EE Corp
Priority to JP33979899A priority Critical patent/JP3878779B2/en
Publication of JP2001153903A publication Critical patent/JP2001153903A/en
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Publication of JP3878779B2 publication Critical patent/JP3878779B2/en
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  • Measurement Of Resistance Or Impedance (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PROBLEM TO BE SOLVED: To simply and certainly exclude influence of thermoelectromotive force, when the resistance value of a resistor to be measured is measured by a four-terminal method. SOLUTION: As the first measurement, constant current I is caused to flow from a constant DC source 10 to the resistor X to be measured from its first lead L1 side toward the second lead L2 side, and voltage Va generated then in the resistor X is measured. Next, as the second measurement, the constant current I is caused to flow reversely to the resistor X this time, from the second lead L2 side toward the first lead L1 side. After voltage Vb generated then in the resistor X is measured, the average voltage Vc of the voltage Va and the voltage Vb is computed, and from this average voltage Vc and the constant current I the resistance value of the resistor X is found.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は抵抗測定方法および
その装置に関し、さらに詳しく言えば、低抵抗を四端子
法により測定する際に異種金属の接続(接合)部分にお
いて発生する熱起電力の影響を排除して高精度な抵抗測
定を可能とした技術に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring resistance, and more particularly, to the effect of thermoelectromotive force generated at a connection (junction) between dissimilar metals when low resistance is measured by a four-terminal method. The present invention relates to a technology that enables high-precision resistance measurement by eliminating the above.

【0002】[0002]

【従来の技術】抵抗測定法には、二端子法と四端子法と
があるが、低抵抗の測定には四端子法が用いられる。四
端子法の測定原理は、図4に示されているように、直流
定電流源CCより被測定抵抗体Xに一対の電流プローブ
P1,P2を介して定電流Iを供給する。これにより、
被測定抵抗体Xに発生する電圧Vを一対の電圧プローブ
P3,P4を介して電圧計Mで測定する。この定電流I
と測定電圧Vに基づいてオームの法則により、被測定抵
抗体Xの抵抗値RがR=V/Iなる式により求められ
る。
2. Description of the Related Art There are a two-terminal method and a four-terminal method for measuring resistance. A four-terminal method is used for measuring low resistance. The measurement principle of the four-terminal method is that, as shown in FIG. 4, a constant current I is supplied from a DC constant current source CC to a resistor X to be measured via a pair of current probes P1 and P2. This allows
The voltage V generated in the measured resistor X is measured by the voltmeter M via the pair of voltage probes P3 and P4. This constant current I
The resistance value R of the resistor X to be measured is obtained from the equation R = V / I according to Ohm's law based on the following equation:

【0003】[0003]

【発明が解決しようとする課題】この四端子法によれ
ば、電流プローブP1,P2が有する抵抗の影響を受け
ることなく、被測定抵抗体Xの抵抗値Rが正確に測定さ
れるが、低抵抗を測定する際には熱起電力による影響を
無視することができない。
According to the four-terminal method, the resistance value R of the resistance X to be measured can be accurately measured without being affected by the resistances of the current probes P1 and P2. When measuring resistance, the effects of thermoelectromotive force cannot be ignored.

【0004】熱起電力とは、2種類の異種金属からなる
閉回路において、その2接点間に温度差がある場合に発
生し、その大きさは接合部の金属の種類にもよるが、一
般的には数μV/℃〜数十μV/℃程度である。ちなみ
に、この現象を積極的に応用したものが、温度センサと
して知られている熱電対である。
[0004] The thermoelectromotive force is generated when there is a temperature difference between two contacts in a closed circuit made of two kinds of dissimilar metals, and its magnitude depends on the kind of metal at the junction. More specifically, it is about several μV / ° C. to several tens μV / ° C. By the way, a thermocouple known as a temperature sensor applies this phenomenon positively.

【0005】図4の四端子測定において、熱起電力が発
生するおそれがある部分としては、被測定抵抗体Xから
引き出されているリードL1,L2と電圧プローブP
3,P4との各接触部分と、被測定抵抗体Xの抵抗素子
とリードL1,L2との各接合部分である。これらの各
部分での熱起電力をV1,V2,V3,V4とすると、
電圧計Mで実際に測定している電圧Vは、V=IR+
(V1+V2+V3+V4)となる。
[0005] In the four-terminal measurement shown in FIG. 4, the portions where thermal electromotive force may be generated include the leads L 1 and L 2 pulled out from the resistor X to be measured and the voltage probe P.
3 and P4, and the respective junctions between the resistance element of the resistor X to be measured and the leads L1 and L2. Assuming that the thermoelectromotive force at each of these parts is V1, V2, V3, V4,
The voltage V actually measured by the voltmeter M is V = IR +
(V1 + V2 + V3 + V4).

【0006】例えば、一般的な5桁クラスのディジタル
マルチメータ(DMM)の100mVレンジにおける測
定確度は±10μV程度であるが、これは熱起電力の大
きさとほぼ同じである。この熱起電力の影響を排除する
には、電圧プローブP3,P4にリードL1,L2と同
一金属のものを用いればよいのであるが、これは現実的
な解決策ではない。
For example, the measurement accuracy of a general 5-digit class digital multimeter (DMM) in the 100 mV range is about ± 10 μV, which is almost the same as the magnitude of the thermoelectromotive force. To eliminate the effect of the thermoelectromotive force, the voltage probes P3 and P4 may be made of the same metal as the leads L1 and L2, but this is not a practical solution.

【0007】そこで、従来では次善の策として、2つの
接点間に温度差を作らないようにするため、空調機の風
が直接当たらないようにしたり、電圧プローブP3,P
4の接続を手早く行なって体温が伝わらないようにして
いるが、いずれの方法にしても、測定者の人為的な操作
に頼るところが多く、熱起電力による影響を完全にキャ
ンセルすることは不可能であった。
Therefore, conventionally, as a next best measure, in order to prevent a temperature difference from being generated between the two contacts, the air from the air conditioner is prevented from directly hitting, or the voltage probes P3, P
Although connection of 4 is performed quickly to prevent body temperature from being transmitted, in any case, it is not possible to completely cancel the effect of thermoelectromotive force, since many of the methods rely on the human operator's artificial operation. Met.

【0008】[0008]

【課題を解決するための手段】本発明は、このような課
題を解決するためになされたものであって、その目的
は、四端子法により低抵抗を測定するにあたって、測定
者の技量によることなく、熱起電力の影響を簡単かつ確
実に排除することができるようにした抵抗測定方法およ
びその装置を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to measure the low resistance by the four-terminal method by using the skill of a measurer. Instead, it is an object of the present invention to provide a resistance measuring method and an apparatus thereof that can easily and surely eliminate the influence of thermoelectromotive force.

【0009】上述した目的を達成するため、本発明は、
被測定抵抗体から引き出されている第1および第2の各
リードに、一対の電流プローブおよび一対の電圧プロー
ブをそれぞれ同時に接触させた状態で、直流定電流源よ
り上記一対の電流プローブを介して上記被測定抵抗体に
所定の定電流Iを供給し、そのときに上記被測定抵抗体
に発生する電圧Vを上記一対の電圧プローブを介して電
圧測定手段にて測定し、上記定電流Iと上記電圧Vとか
ら、上記被測定抵抗体の抵抗値を求める四端子法による
抵抗測定方法において、まず、上記直流定電流源より上
記被測定抵抗体に対して、上記第1リード側から上記第
2リード側に向けて上記定電流Iを流し、そのときに上
記被測定抵抗体に発生する電圧Vaを上記電圧測定手段
にて測定し、次に、上記直流定電流源より上記被測定抵
抗体に対して、上記第2リード側から上記第1リード側
に向けて上記定電流Iを流し、そのときに上記被測定抵
抗体に発生する電圧Vbを上記電圧測定手段にて測定し
た後、上記電圧Vaと上記電圧Vbの平均電圧Vcを算
出し、この平均電圧Vcと上記定電流Iとから上記被測
定抵抗体の抵抗値を求めることを特徴としている。
In order to achieve the above-mentioned object, the present invention provides:
In a state where a pair of current probes and a pair of voltage probes are simultaneously contacted with the first and second leads, respectively, which are drawn out of the resistor to be measured, a DC constant current source passes through the pair of current probes via the pair of current probes. A predetermined constant current I is supplied to the resistance to be measured, and a voltage V generated at the resistance to be measured at that time is measured by voltage measuring means via the pair of voltage probes, and the constant current I and In the resistance measurement method by the four-terminal method for determining the resistance value of the measured resistor from the voltage V, first, the DC constant current source applies the first measured value from the first lead side to the measured resistor. (2) The constant current I is caused to flow toward the lead side, and the voltage Va generated at the resistor to be measured at that time is measured by the voltage measuring means, and then the resistor to be measured is supplied from the DC constant current source. Against The constant current I is passed from the second lead side to the first lead side, and a voltage Vb generated at the resistor to be measured at that time is measured by the voltage measuring means. It is characterized in that an average voltage Vc of Vb is calculated, and a resistance value of the resistor to be measured is obtained from the average voltage Vc and the constant current I.

【0010】この場合において、上記各リードに対し
て、上記一対の電流プローブの位置を入れ替えることに
より、上記被測定抵抗体に対する上記定電流Iの流れ方
向を切り替えてもよいし、あるいは上記直流定電流源の
正極側および負極側の各電流出力端子と上記一対の電流
プローブとの間に切替手段を設けて、この切替手段によ
り上記被測定抵抗体に対する上記定電流Iの流れ方向を
切り替えるようにしてもよく、いずれの態様も本発明に
含まれる。
In this case, the flow direction of the constant current I with respect to the resistor to be measured may be switched by exchanging the positions of the pair of current probes with respect to the respective leads, or the DC constant may be changed. Switching means is provided between each of the current output terminals on the positive and negative sides of the current source and the pair of current probes, and the switching means switches the flow direction of the constant current I to the measured resistor. Either embodiment may be included in the present invention.

【0011】なお、上記定電流Iの流れ方向を切り替え
る際、上記直流定電流源を一旦オフにして、上記被測定
抵抗体のディスチャージを行なうことが好ましい。
When the direction of flow of the constant current I is switched, it is preferable that the DC constant current source is once turned off to discharge the resistor to be measured.

【0012】また、本発明は、被測定抵抗体に一対の電
流プローブを介して所定の定電流Iを供給する直流定電
流源と、上記被測定抵抗体に発生する電圧Vを一対の電
圧プローブを介して測定する電圧測定手段と、上記直流
定電流源および上記電圧測定手段を監視し、上記定電流
Iと上記電圧Vとから上記被測定抵抗体の抵抗値を算出
する制御手段とを備えている四端子法による抵抗測定装
置において、上記電流プローブの一方を上記直流定電流
源の正極側電流出力端子に接続するとともに、上記電流
プローブの他方を上記直流定電流源の負極側電流出力端
子に接続する第1切替ステージと、上記電流プローブの
一方を上記直流定電流源の負極側電流出力端子に接続す
るとともに、上記電流プローブの他方を上記直流定電流
源の正極側電流出力端子に接続する第2切替ステージと
を有する切替手段を備え、上記被測定抵抗体の抵抗値を
求めるにあたって、上記制御手段は、上記切替手段を上
記第1切替ステージ(もしくは上記第2切替ステージ)
に切り替えて上記電圧測定手段よりそのときに測定され
た電圧Vaを得、次に、上記切替手段を上記第2切替ス
テージ(もしくは上記第1切替ステージ)に切り替えて
上記電圧測定手段よりそのときに測定された電圧Vbを
得た後、上記電圧Vaと上記電圧Vbの平均電圧Vcを
算出し、この平均電圧Vcと上記定電流Iとから上記被
測定抵抗体の抵抗値を求めることを特徴としている。
Further, the present invention provides a DC constant current source for supplying a predetermined constant current I to a resistor to be measured via a pair of current probes, and a pair of voltage probes for applying a voltage V generated in the resistor to be measured. And a control means for monitoring the DC constant current source and the voltage measuring means and calculating a resistance value of the measured resistor from the constant current I and the voltage V. In the resistance measuring apparatus according to the four-terminal method, one of the current probes is connected to a positive-side current output terminal of the DC constant current source, and the other of the current probes is connected to a negative-side current output terminal of the DC constant current source. A first switching stage connected to the DC constant current source and one of the current probes connected to the negative current output terminal of the DC constant current source, and the other of the current probes connected to the positive current output of the DC constant current source. A switching means and a second switching stage to be connected to the terminal, when determining the resistance value of the measuring resistor, the control means, said switching means said first switching stage (or the second switch stage)
To obtain the voltage Va measured at that time from the voltage measuring means, and then switch the switching means to the second switching stage (or the first switching stage), and After obtaining the measured voltage Vb, an average voltage Vc of the voltage Va and the voltage Vb is calculated, and the resistance value of the measured resistor is obtained from the average voltage Vc and the constant current I. I have.

【0013】これによれば、熱起電力による影響を簡単
な方法でキャンセルすることができる。本発明の測定装
置において、上記切替手段は上記制御手段により自動で
切り替えられることが好ましいが、本発明には手動切替
も含まれる。
According to this, the influence of the thermoelectromotive force can be canceled by a simple method. In the measuring device of the present invention, the switching means is preferably automatically switched by the control means, but the present invention also includes manual switching.

【0014】[0014]

【発明の実施の形態】次に、本発明を実施例により具体
的に説明する。図1はこの実施例にかかる抵抗測定装置
の回路構成図である。
Next, the present invention will be described specifically with reference to examples. FIG. 1 is a circuit configuration diagram of the resistance measuring apparatus according to this embodiment.

【0015】この抵抗測定装置は、被測定抵抗体Xに対
して所定の定電流Iを供給する直流定電流源10と、被
測定抵抗体Xに発生する電圧Vを測定する電圧測定部2
0とを備えている。被測定抵抗体Xに対する電流供給は
一対の電流プローブP1,P2を介して行なわれるが、
この場合、直流定電流源10と電流プローブP1,P2
との間には切替器11が接続されている。
This resistance measuring device includes a DC constant current source 10 for supplying a predetermined constant current I to a resistance X to be measured, and a voltage measurement unit 2 for measuring a voltage V generated in the resistance X to be measured.
0. The current is supplied to the measured resistor X through a pair of current probes P1 and P2.
In this case, the DC constant current source 10 and the current probes P1, P2
The switch 11 is connected between the two.

【0016】切替器11には、連動して動作する第1お
よび第2の2つのスイッチ12,13が設けられてい
る。第1スイッチ12は、第1電流プローブP1に接続
された切替接点12aと、第2電流プローブP2に接続
された切替接点12bと、これら切替接点12a,12
bのいずれか一方に切り替えられる可動接点12cとを
有し、この場合、可動接点12cは直流定電流源10の
負極10b側に接続されている。
The switch 11 is provided with first and second two switches 12 and 13 which operate in conjunction with each other. The first switch 12 includes a switching contact 12a connected to the first current probe P1, a switching contact 12b connected to the second current probe P2, and these switching contacts 12a, 12
b, which is connected to the negative electrode 10b of the DC constant current source 10 in this case.

【0017】第2スイッチ13は、第2電流プローブP
2に接続された切替接点13aと、第1電流プローブP
1に接続された切替接点13bと、これら切替接点13
a,13bのいずれか一方に切り替えられる可動接点1
3cとを有し、可動接点13cは直流定電流源10の正
極10a側に接続されている。
The second switch 13 is connected to a second current probe P
Switching contact 13a connected to the first current probe P
1 and the switching contacts 13b
movable contact 1 that can be switched to one of a and 13b
3c, and the movable contact 13c is connected to the positive electrode 10a side of the DC constant current source 10.

【0018】電圧測定部20には、被測定抵抗体Xの電
圧Vを検出するための一対の電圧プローブP3,P4が
接続されている。この実施例において、電圧測定部20
にて測定された電圧はA/D変換器21を介して制御手
段としてのCPU30に与えられる。
A pair of voltage probes P3 and P4 for detecting the voltage V of the resistor X to be measured are connected to the voltage measuring section 20. In this embodiment, the voltage measuring unit 20
Is supplied to the CPU 30 as control means via the A / D converter 21.

【0019】CPU30には、種々の測定条件などを設
定するための入力部31、ディスプレイやプリンタなど
の表示部32およびメモリ33などが接続されている。
CPU30は、各種の演算機能のほかに、直流定電流源
10の電流出力レンジや切替器11を切り替える切替制
御機能などを備えている。
An input unit 31 for setting various measurement conditions and the like, a display unit 32 such as a display or a printer, a memory 33, and the like are connected to the CPU 30.
The CPU 30 has a switching control function for switching the current output range of the DC constant current source 10 and the switch 11 in addition to various arithmetic functions.

【0020】被測定抵抗体Xの抵抗値を測定するにあた
っては、例えば第1電流プローブP1を被測定抵抗体X
の一方のリードL1側に接触させるとともに、第2電流
プローブP2を他方のリードL2に接触させる。また、
一対の電圧プローブP3,P4を各リードL1,L2に
それぞれ接触させる。
In measuring the resistance value of the measured object X, for example, the first current probe P1 is connected to the measured object X
And the second current probe P2 is brought into contact with the other lead L2. Also,
A pair of voltage probes P3 and P4 are brought into contact with the leads L1 and L2, respectively.

【0021】そして、まず、第1回目の測定として、切
替器11の各スイッチ12,13の可動接点12c,1
3cを切替接点12b,13b側に切り替えて、直流定
電流源10より被測定抵抗体Xに定電流を供給する。こ
れにより、先に説明した図4に示されているように、被
測定抵抗体Xには、その一方のリードL1から他方のリ
ードL2に向けて定電流Iが流れる。
First, as a first measurement, the movable contacts 12c, 1 of the switches 12, 13 of the switch 11 are set.
3c is switched to the switching contacts 12b and 13b, and a constant current is supplied from the DC constant current source 10 to the resistor X to be measured. As a result, as shown in FIG. 4 described above, the constant current I flows from the one lead L1 to the other lead L2 in the resistor X to be measured.

【0022】このときに被測定抵抗体Xに発生する電圧
Vaが電圧測定部20にて測定され、A/D変換器21
を介してCPU30に取り込まれる。CPU30はその
電圧Vaをメモリ33に保存する。この電圧Vaの測定
後、一旦直流定電流源10をオフとし、被測定抵抗体X
のディスチャージ(放電)を行なう。このディスチャー
ジは、図示いない短絡回路によりリードL1,L2間を
短絡させることにより実行される。
At this time, the voltage Va generated in the resistor X to be measured is measured by the voltage measuring unit 20 and the voltage is measured by the A / D converter 21.
Via the CPU 30. The CPU 30 stores the voltage Va in the memory 33. After the measurement of the voltage Va, the DC constant current source 10 is once turned off, and the measured resistor X
Is discharged (discharged). This discharge is performed by short-circuiting between the leads L1 and L2 by a short circuit (not shown).

【0023】ここで、被測定抵抗体Xの抵抗値をR、電
圧プローブP3,P4とリードL1,L2との各接触点
で発生する熱起電力をV1,V4、リードL1,L2と
被測定抵抗体Xとの接合部で発生する熱起電力をV2,
V3とすると、電圧測定部20にて測定された電圧Va
は、Va=IR+(V1+V2+V3+V4)である。
Here, the resistance value of the resistor X to be measured is R, the thermoelectromotive force generated at each contact point between the voltage probes P3 and P4 and the leads L1 and L2 is V1 and V4, and the leads L1 and L2 are The thermoelectromotive force generated at the junction with the resistor X is V2,
Let V3 be the voltage Va measured by the voltage measurement unit 20.
Is Va = IR + (V1 + V2 + V3 + V4).

【0024】次に、切替器11を切り替えて第2回目の
測定を行なう。すなわち、今度は各スイッチ12,13
の可動接点12c,13cを切替接点12a,13a側
に切り替えて、直流定電流源10より被測定抵抗体Xに
定電流を供給する。これにより図2に示されているよう
に、被測定抵抗体Xに対して他方のリードL2から一方
のリードL1に向けて定電流Iが流れる。
Next, the switch 11 is switched to perform a second measurement. That is, each of the switches 12, 13
Are switched to the switching contacts 12a and 13a, and a constant current is supplied from the DC constant current source 10 to the resistor X to be measured. As a result, as shown in FIG. 2, the constant current I flows from the other lead L2 to the one lead L1 with respect to the resistor X to be measured.

【0025】このときに被測定抵抗体Xに発生する電圧
Vbが電圧測定部20にて測定され、A/D変換器21
を介してCPU30に取り込まれる。この第2回目の測
定時の電流の流れ方向は第1回目とは逆であるため、電
圧測定部20にて測定される電圧Vbは、Vb=IR−
(V1+V2+V3+V4)で表される。
At this time, the voltage Vb generated in the resistor X to be measured is measured by the voltage measuring section 20 and the voltage is measured by the A / D converter 21.
Via the CPU 30. Since the flow direction of the current at the time of the second measurement is opposite to that of the first measurement, the voltage Vb measured by the voltage measurement unit 20 is Vb = IR−
(V1 + V2 + V3 + V4).

【0026】CPU30は、この第2回目の測定後に、
(Va+Vb)/2なる演算を行なって平均電圧Vcを
求め、この平均電圧Vcと定電流Iとから、被測定抵抗
体Xの抵抗値Rを算出して表示部32に表示する。参考
までに、上記実施例の動作フローチャートを図3に示し
ておく。
After the second measurement, the CPU 30
The average voltage Vc is obtained by performing the calculation of (Va + Vb) / 2, and the resistance value R of the measured resistor X is calculated from the average voltage Vc and the constant current I and displayed on the display unit 32. For reference, an operation flowchart of the above embodiment is shown in FIG.

【0027】このように、被測定抵抗体Xに対して電流
方向を変えて2回測定し、その平均電圧を求めることに
より、熱起電力の影響をキャンセルすることができる。
また、測定回路内のオフセットも除去できる。なお、電
流方向を変えての測定を2回以上、すなわち2×n回
(nは2以上の整数)行なって、その平均電圧を求めて
もよい。
As described above, the influence of the thermoelectromotive force can be canceled by measuring twice with respect to the resistor X to be measured while changing the current direction and obtaining the average voltage.
Further, the offset in the measurement circuit can be removed. The average voltage may be obtained by performing the measurement while changing the current direction two or more times, that is, 2 × n times (n is an integer of 2 or more).

【0028】なお、測定の自動化を図るうえでは、上記
実施例のように切替器11などをCPU30により制御
することが望ましいが、場合によっては、切替器11を
手動で切り替えるようにしてもよい。また、切替器11
によらず、リードL1,L2に対する電流プローブP
1,P2の位置を入れ替えることにより、被測定抵抗体
Xに流れる電流の向きを変えるようにしてもよい。
In order to automate the measurement, it is desirable to control the switch 11 and the like by the CPU 30 as in the above embodiment. However, in some cases, the switch 11 may be switched manually. Also, the switch 11
Current probe P for leads L1 and L2
The direction of the current flowing through the measured resistor X may be changed by exchanging the positions of 1 and P2.

【0029】[0029]

【発明の効果】以上説明したように、本発明によれば、
四端子法により被測定抵抗体の抵抗値を測定する際、被
測定抵抗体に流れる電流の向きを変えて少なくとも2回
にわたって被測定抵抗体に発生する電圧を測定して測定
電圧の平均値を求め、その平均値と測定電流とから被測
定抵抗体の抵抗値を算出するようにしたことにより、測
定者の技量によることなく、熱起電力の影響を簡単かつ
確実に排除することができる。
As described above, according to the present invention,
When measuring the resistance value of the measured resistor by the four-terminal method, the direction of the current flowing through the measured resistor is changed and the voltage generated in the measured resistor is measured at least twice, and the average value of the measured voltages is measured. Since the resistance value of the measured resistor is calculated from the average value and the measured current, the influence of the thermoelectromotive force can be easily and reliably eliminated without depending on the skill of the measurer.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による抵抗測定装置の一実施例を示した
回路構成図。
FIG. 1 is a circuit diagram showing an embodiment of a resistance measuring device according to the present invention.

【図2】被測定抵抗体に流れる電流方向を説明するため
の説明図。
FIG. 2 is an explanatory diagram for explaining a direction of a current flowing through a resistor to be measured.

【図3】本発明の動作フローチャート。FIG. 3 is an operation flowchart of the present invention.

【図4】四端子法による抵抗測定法を説明するための説
明図。
FIG. 4 is an explanatory diagram for explaining a resistance measuring method by a four-terminal method.

【符号の説明】[Explanation of symbols]

10 直流定電流源 11 切替器 20 電圧測定部 21 A/D変換器 30 CPU P1,P2 電流プローブ P3,P4 電圧プローブ X 被測定抵抗体 L1,L2 リード Reference Signs List 10 DC constant current source 11 Switching device 20 Voltage measurement unit 21 A / D converter 30 CPU P1, P2 Current probe P3, P4 Voltage probe X Resistance to be measured L1, L2 Lead

───────────────────────────────────────────────────── フロントページの続き (72)発明者 上原 聡 長野県上田市大字小泉字桜町81番地 日置 電機株式会社内 Fターム(参考) 2F056 PA01 PA09 2G028 AA01 AA04 BB03 CG02 DH03 DH13 FK01 GL07 GL11 HM07 HN11 HN13 LR02  ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Satoshi Uehara 81 Sakuracho, Oizumi, Ueda-shi, Nagano F-term (reference) 2F056 PA01 PA09 2G028 AA01 AA04 BB03 CG02 DH03 DH13 FK01 GL07 GL11 HM07 HN11 HN13 LR02

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 被測定抵抗体から引き出されている第1
および第2の各リードに、一対の電流プローブおよび一
対の電圧プローブをそれぞれ同時に接触させた状態で、
直流定電流源より上記一対の電流プローブを介して上記
被測定抵抗体に所定の定電流Iを供給し、そのときに上
記被測定抵抗体に発生する電圧Vを上記一対の電圧プロ
ーブを介して電圧測定手段にて測定し、上記定電流Iと
上記電圧Vとから、上記被測定抵抗体の抵抗値を求める
四端子法による抵抗測定方法において、 まず、上記直流定電流源より上記被測定抵抗体に対し
て、上記第1リード側から上記第2リード側に向けて上
記定電流Iを流し、そのときに上記被測定抵抗体に発生
する電圧Vaを上記電圧測定手段にて測定し、次に、上
記直流定電流源より上記被測定抵抗体に対して、上記第
2リード側から上記第1リード側に向けて上記定電流I
を流し、そのときに上記被測定抵抗体に発生する電圧V
bを上記電圧測定手段にて測定した後、上記電圧Vaと
上記電圧Vbの平均電圧Vcを算出し、この平均電圧V
cと上記定電流Iとから上記被測定抵抗体の抵抗値を求
めることを特徴とする抵抗測定方法。
A first resistor drawn out of the resistance to be measured;
And a pair of current probes and a pair of voltage probes are simultaneously contacted with the respective second leads,
A predetermined constant current I is supplied from the DC constant current source to the resistor to be measured via the pair of current probes, and a voltage V generated at the resistor to be measured at that time is supplied to the resistor via the pair of voltage probes. In a resistance measurement method by a four-terminal method for measuring the resistance value of the resistor to be measured from the constant current I and the voltage V, the resistance is measured by the DC constant current source. The constant current I is passed from the first lead side to the second lead side to the body, and a voltage Va generated in the resistor to be measured at that time is measured by the voltage measuring means. In addition, the constant current I from the DC constant current source to the resistor to be measured from the second lead side to the first lead side.
And the voltage V generated at the resistor to be measured at that time
b is measured by the voltage measuring means, and an average voltage Vc of the voltage Va and the voltage Vb is calculated.
c) determining a resistance value of the measured resistor from the constant current I and c.
【請求項2】 上記各リードに対して、上記一対の電流
プローブの位置を入れ替えることにより、上記被測定抵
抗体に対する上記定電流Iの流れ方向が切り替えられる
請求項1に記載の抵抗測定方法。
2. The resistance measuring method according to claim 1, wherein the flow direction of the constant current I with respect to the measured resistor is switched by exchanging positions of the pair of current probes with respect to each of the leads.
【請求項3】 上記直流定電流源の正極側および負極側
の各電流出力端子と上記一対の電流プローブとの間に切
替手段が設けられ、同切替手段により上記被測定抵抗体
に対する上記定電流Iの流れ方向が切り替えられる請求
項1に記載の抵抗測定方法。
3. A switching means is provided between each of the current output terminals on the positive electrode side and the negative electrode side of the DC constant current source and the pair of current probes, and the switching means supplies the constant current to the resistor to be measured. 2. The resistance measuring method according to claim 1, wherein the flow direction of I is switched.
【請求項4】 上記定電流Iの流れ方向が切り替えられ
る際、上記直流定電流源が一旦オフにされるとともに、
上記被測定抵抗体のディスチャージが行なわれる請求項
1,2または3に記載の抵抗測定方法。
4. When the direction of flow of the constant current I is switched, the DC constant current source is once turned off,
4. The resistance measuring method according to claim 1, wherein the resistance of the measured resistor is discharged.
【請求項5】 被測定抵抗体に一対の電流プローブを介
して所定の定電流Iを供給する直流定電流源と、上記被
測定抵抗体に発生する電圧Vを一対の電圧プローブを介
して測定する電圧測定手段と、上記直流定電流源および
上記電圧測定手段を監視し、上記定電流Iと上記電圧V
とから上記被測定抵抗体の抵抗値を算出する制御手段と
を備えている四端子法による抵抗測定装置において、 上記電流プローブの一方を上記直流定電流源の正極側電
流出力端子に接続するとともに、上記電流プローブの他
方を上記直流定電流源の負極側電流出力端子に接続する
第1切替ステージと、上記電流プローブの一方を上記直
流定電流源の負極側電流出力端子に接続するとともに、
上記電流プローブの他方を上記直流定電流源の正極側電
流出力端子に接続する第2切替ステージとを有する切替
手段を備え、上記被測定抵抗体の抵抗値を求めるにあた
って、上記制御手段は、上記切替手段を上記第1切替ス
テージ(もしくは上記第2切替ステージ)に切り替えて
上記電圧測定手段よりそのときに測定された電圧Vaを
得、次に、上記切替手段を上記第2切替ステージ(もし
くは上記第1切替ステージ)に切り替えて上記電圧測定
手段よりそのときに測定された電圧Vbを得た後、上記
電圧Vaと上記電圧Vbの平均電圧Vcを算出し、この
平均電圧Vcと上記定電流Iとから上記被測定抵抗体の
抵抗値を求めることを特徴とする抵抗測定装置。
5. A DC constant current source for supplying a predetermined constant current I to a measured resistor through a pair of current probes, and a voltage V generated in the measured resistor is measured via the pair of voltage probes. The constant current I and the voltage V are monitored by monitoring the DC constant current source and the voltage measuring means.
And a control means for calculating a resistance value of the resistance to be measured from the four-terminal method, wherein one of the current probes is connected to a positive side current output terminal of the DC constant current source. A first switching stage for connecting the other of the current probes to the negative current output terminal of the DC constant current source, and connecting one of the current probes to the negative current output terminal of the DC constant current source;
A switching unit having a second switching stage for connecting the other of the current probes to a positive-side current output terminal of the DC constant current source. In obtaining a resistance value of the measured resistor, the control unit includes: The switching means is switched to the first switching stage (or the second switching stage) to obtain the voltage Va measured at that time from the voltage measuring means, and then the switching means is switched to the second switching stage (or the second switching stage). After switching to the first switching stage and obtaining the voltage Vb measured at that time from the voltage measuring means, an average voltage Vc of the voltage Va and the voltage Vb is calculated, and the average voltage Vc and the constant current Ic are calculated. A resistance value of the resistor to be measured.
JP33979899A 1999-11-30 1999-11-30 Resistance measuring method and apparatus Expired - Fee Related JP3878779B2 (en)

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