JP2001144015A5 - - Google Patents
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- Publication number
- JP2001144015A5 JP2001144015A5 JP2000243194A JP2000243194A JP2001144015A5 JP 2001144015 A5 JP2001144015 A5 JP 2001144015A5 JP 2000243194 A JP2000243194 A JP 2000243194A JP 2000243194 A JP2000243194 A JP 2000243194A JP 2001144015 A5 JP2001144015 A5 JP 2001144015A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000243194A JP5255739B2 (ja) | 1999-08-18 | 2000-08-10 | 半導体装置の作製方法 |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1999231211 | 1999-08-18 | ||
| JP11-231211 | 1999-08-18 | ||
| JP23121199 | 1999-08-18 | ||
| JP11-244204 | 1999-08-31 | ||
| JP24420499 | 1999-08-31 | ||
| JP1999244204 | 1999-08-31 | ||
| JP2000243194A JP5255739B2 (ja) | 1999-08-18 | 2000-08-10 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001144015A JP2001144015A (ja) | 2001-05-25 |
| JP2001144015A5 true JP2001144015A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2007-09-06 |
| JP5255739B2 JP5255739B2 (ja) | 2013-08-07 |
Family
ID=27331739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000243194A Expired - Fee Related JP5255739B2 (ja) | 1999-08-18 | 2000-08-10 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5255739B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6164220B2 (ja) * | 2012-10-23 | 2017-07-19 | 富士電機株式会社 | 半導体装置の製造方法 |
| KR102516486B1 (ko) * | 2017-12-05 | 2023-04-03 | 삼성디스플레이 주식회사 | 레이저 결정화 장치 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815226A (ja) * | 1981-07-20 | 1983-01-28 | Nec Corp | レ−ザアニ−リング法 |
| JPH01155315A (ja) * | 1987-12-14 | 1989-06-19 | Nec Corp | レーザ分割ミラー装置及びこれを使用したレーザ分割装置 |
| JPH04364031A (ja) * | 1991-06-10 | 1992-12-16 | Ii & S:Kk | レーザアニール方法およびレーザアニール装置 |
| JPH0836144A (ja) * | 1994-07-22 | 1996-02-06 | Miyachi Technos Corp | レーザ分岐装置 |
| JPH09246555A (ja) * | 1996-03-04 | 1997-09-19 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタの製造方法 |
| JPH09260676A (ja) * | 1996-03-26 | 1997-10-03 | Sharp Corp | 薄膜トランジスタの製造方法 |
| JPH09266318A (ja) * | 1996-03-29 | 1997-10-07 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタの製造方法 |
| CA2256699C (en) * | 1996-05-28 | 2003-02-25 | The Trustees Of Columbia University In The City Of New York | Crystallization processing of semiconductor film regions on a substrate, and devices made therewith |
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2000
- 2000-08-10 JP JP2000243194A patent/JP5255739B2/ja not_active Expired - Fee Related