JP2001137837A - Treating device for water containing volatile organic material, and non-polluting treating device for groundwater - Google Patents

Treating device for water containing volatile organic material, and non-polluting treating device for groundwater

Info

Publication number
JP2001137837A
JP2001137837A JP32393699A JP32393699A JP2001137837A JP 2001137837 A JP2001137837 A JP 2001137837A JP 32393699 A JP32393699 A JP 32393699A JP 32393699 A JP32393699 A JP 32393699A JP 2001137837 A JP2001137837 A JP 2001137837A
Authority
JP
Japan
Prior art keywords
volatile organic
water
pressure low
substance
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32393699A
Other languages
Japanese (ja)
Inventor
Daisaku Yano
大作 矢野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Japan Organo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Organo Corp, Japan Organo Co Ltd filed Critical Organo Corp
Priority to JP32393699A priority Critical patent/JP2001137837A/en
Publication of JP2001137837A publication Critical patent/JP2001137837A/en
Pending legal-status Critical Current

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Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Abstract

PROBLEM TO BE SOLVED: To provide a treating device for water which is capable of cost effectively and efficiently subjecting the volatile organic materials in water to a non-polluting treatment. SOLUTION: The water containing the volatile organic materials is treated by a means for migrating the volatile organic material in the water to a gaseous phase, such as a membrane deaeration means 10, by which the water is subjected to the separation of gas from the liquid to the gas containing the volatile organic material and the water removed of the volatile organic material. The gas containing the volatile organic material is transferred to an atmospheric pressure low-temperature plasma device like an atmospheric pressure low- temperature microwave device 20 and is subjected to a cracking treatment by the plasma in this device 20, by which the gas is made non-polluting. The water removed of the volatile organic material is discharged as treated water from the means 10, by which the non-polluting treatment of the water containing the volatile organic material is executed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、揮発性有機物質を
含む水の処理装置に関し、特に常圧低温プラズマ装置を
利用した装置に関する。また、本発明は上記処理装置を
応用し、常圧低温プラズマ装置を利用して地下水中に含
まれる有機ハロゲン化物質を無害化する地下水の無害化
処理装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for treating water containing volatile organic substances, and more particularly to an apparatus utilizing a low-pressure plasma apparatus under normal pressure. In addition, the present invention relates to a detoxification apparatus for groundwater that applies the above-described processing apparatus and detoxifies organic halogenated substances contained in groundwater using a normal-pressure low-temperature plasma apparatus.

【0002】[0002]

【従来の技術】近年、河川水中の有機物濃度の増加に伴
って、殺菌あるいは浄化用の塩素が多量に用られる傾向
にあり、これら有機物と塩素が反応することにより生じ
る発ガン性物質あるいは変異原性物質であるトリハロメ
タンの濃度が増大し、水道水中に微量ながら溶存するこ
とが問題となっている。
2. Description of the Related Art In recent years, with the increase in the concentration of organic substances in river water, a large amount of chlorine for sterilization or purification has tended to be used, and carcinogenic substances or mutagens generated by the reaction of these organic substances with chlorine. There is a problem that the concentration of trihalomethane, which is a toxic substance, is increased, and the trihalomethane is slightly dissolved in tap water.

【0003】また、機械工業、電子工業、クリーニング
業など各種の産業において、脱脂や洗浄を目的として使
用されるトリクロロエチレン、1,1,1−トリクロロ
エタン、テトラクロロエチレン、四塩化炭素、1,1,
2−トリクロロエタン、1,2−ジクロロエタン等の有
機ハロゲン化物質、またベンゼンのような揮発性有機物
質を含む工場排液が地下に浸透し、地下水が汚染される
ことも同時に問題となっている。地下水は流速が極めて
緩慢であり、希釈拡散も期待できないなどの特殊性を有
しており、一旦汚染されると回復が困難であることか
ら、汚染された地下水を効果的に浄化する技術について
の要望は大きい。さらに、地下水だけでなく、これら有
機ハロゲン化物質を含む揮発性有機物質により汚染され
た河川水、湖沼水等についても、これを浄化する技術が
望まれている。さらに、食品や薬品関係の工業用水中に
は、これらの有機ハロゲン化物質が微量でも存在するこ
とは非常に危険であり、この分野の業界では水中に溶存
する微量の有機ハロゲン化物質を除去する技術が待望さ
れている。
In various industries such as the machinery industry, the electronics industry, and the cleaning industry, trichloroethylene, 1,1,1-trichloroethane, tetrachloroethylene, carbon tetrachloride, 1,1,1,1-trichloroethane used for the purpose of degreasing and cleaning.
It is also a problem that factory effluents containing organic halogenated substances such as 2-trichloroethane and 1,2-dichloroethane and volatile organic substances such as benzene permeate underground and contaminate groundwater. Groundwater has special characteristics such as extremely slow flow velocity and no dilution / diffusion.It is difficult to recover once it is contaminated. The demand is great. Further, a technique for purifying not only groundwater but also river water, lake water and the like contaminated by volatile organic substances including these organic halogenated substances is desired. Furthermore, it is very dangerous that even small amounts of these organic halogenated substances are present in industrial water for food and medicine, and the industry in this field removes trace organic halogenated substances dissolved in water. Technology is long-awaited.

【0004】従来、水中に溶存する揮発性有機物質を処
理する方法としては様々な方法が知られている。特開平
9−276850号には、揮発性有機物質を含有する排
水を充填曝気塔へ投入して処理し、水中に溶存する揮発
性有機物質を気相に移行させ、前記気体を溶媒が循環す
る吸収塔へ導入して、揮発性有機物質を溶媒に吸収させ
る溶媒抽出法が開示されている。また、特開平6−47
370号には、中空糸膜の中空部に揮発性有機物質を溶
存する排水を流して膜表面を排気するか、または中空糸
膜の外表面に揮発性有機物質を溶存する排水を流して中
空糸膜の中空部を排気することにより揮発性有機物質を
気相に移行させ、揮発性有機物質を含む気体を活性炭の
ような吸着剤に吸着させることにより吸着処理する装置
が開示されている。さらに、特開平7−308660号
には、地下水中の有機塩素化合物を曝気処理槽で処理
し、水中の有機塩素化合物を気相に移行させ、得られた
気体を加熱して固体触媒を含む反応槽に供給し、有機塩
素化合物を加熱分解する触媒分解法に用いる地下水の浄
化処理設備が開示されている。また、実開平4−701
26号には、揮発性有機塩素化合物を含んだ排水を曝気
することにより排出される気体中の揮発性有機物質に紫
外線を照射して揮発性有機塩素化合物を分解する紫外線
分解法が開示されている。
Conventionally, various methods have been known for treating volatile organic substances dissolved in water. Japanese Patent Application Laid-Open No. 9-276850 discloses that wastewater containing a volatile organic substance is introduced into a packed aeration tower for treatment, the volatile organic substance dissolved in water is transferred to a gas phase, and the solvent is circulated through the gas. A solvent extraction method in which a volatile organic substance is absorbed into a solvent by introducing the solvent into an absorption tower is disclosed. Also, Japanese Patent Application Laid-Open No. 6-47
No. 370 discloses a method in which drainage in which a volatile organic substance is dissolved is flowed into the hollow portion of a hollow fiber membrane to exhaust the membrane surface, or a wastewater in which a volatile organic substance is dissolved is flown to the outer surface of the hollow fiber membrane to form a hollow fiber. An apparatus is disclosed in which a volatile organic substance is transferred to a gas phase by exhausting a hollow portion of a yarn membrane and a gas containing the volatile organic substance is adsorbed by an adsorbent such as activated carbon to perform an adsorption treatment. Further, Japanese Patent Application Laid-Open No. 7-308660 discloses that an organochlorine compound in groundwater is treated in an aeration tank, the organochlorine compound in the water is transferred to a gaseous phase, and the obtained gas is heated to contain a reaction containing a solid catalyst. A groundwater purification treatment facility is disclosed which is supplied to a tank and used in a catalytic decomposition method for thermally decomposing an organic chlorine compound. In addition, the actual opening 4-701
No. 26 discloses an ultraviolet ray decomposition method of decomposing a volatile organic chlorine compound by irradiating a volatile organic substance in a gas discharged by aerating a wastewater containing the volatile organic chlorine compound with ultraviolet rays. I have.

【0005】[0005]

【発明が解決しようとする課題】しかし、上述の従来法
では、水中の揮発性有機物質を気相に移行させてからの
処理において、それぞれ次のような問題が存在してい
る。溶媒抽出法は揮発性有機物質を分離するだけであ
り、この方法では揮発性有機物質を分解処理できないた
め、分離した揮発性有機物質を含む溶媒の焼却など別途
処理する必要が生じ、さらなる設備および手間を必要と
する。また、揮発性有機物質を活性炭等に吸着させる吸
着処理法も揮発性有機物質を分解するのではなく、単に
分離するだけであり、最終的には活性炭に吸着した揮発
性有機物質を熱処理等によって活性炭から脱離させて揮
発性有機物質を回収し、その回収した揮発性有機物質を
別途無害化処理するためにさらなる設備を要することと
なる。また、長期の使用による吸着剤の能力の劣化が避
けられず、一定期間ごとに吸着剤の交換、再生処理等を
行う必要が生じ、コスト高でありかつ煩雑である。ま
た、触媒分解法においては揮発性有機物質の低濃度条件
下における分解効率が悪く、水中から曝気処理等により
揮発性有機物質を気相に移行したのみでは、気体中の揮
発性有機物質の濃度が低いので濃縮手段が必要となる場
合がある。また、共存物質によって触媒反応が阻害され
るため、反応前の気体を前処理する手段が必要になる場
合もある。さらに、触媒反応塔自体も比較的大規模とな
るため、気相移行から分解反応までの装置全体の設置面
積が大規模になる。また、紫外線分解法も分解効率の悪
さの問題を有している。
However, in the above-mentioned conventional methods, the following problems exist in the treatment after the volatile organic substance in the water is transferred to the gas phase. The solvent extraction method only separates the volatile organic substances, and this method cannot decompose the volatile organic substances.Therefore, it is necessary to perform a separate treatment such as incineration of the solvent containing the separated volatile organic substances. Requires effort. In addition, the adsorption treatment method of adsorbing volatile organic substances on activated carbon or the like does not decompose the volatile organic substances but merely separates them.Finally, the volatile organic substances adsorbed on the activated carbon are subjected to heat treatment or the like. Further equipment is required to separate volatile organic substances by desorbing them from activated carbon, and to separately treat the collected volatile organic substances to be harmless. In addition, deterioration of the performance of the adsorbent due to long-term use is unavoidable, and it becomes necessary to exchange and regenerate the adsorbent at regular intervals, which is costly and complicated. In addition, in the catalytic decomposition method, the decomposition efficiency of volatile organic substances under low concentration conditions is poor, and the concentration of volatile organic substances in the gas can be reduced only by transferring the volatile organic substances from the water to the gas phase by aeration treatment. , The concentration means may be required. In addition, since the catalytic reaction is inhibited by the coexisting substance, a means for pretreating the gas before the reaction may be required in some cases. Furthermore, since the catalytic reaction tower itself is relatively large, the installation area of the entire apparatus from the gas phase transfer to the decomposition reaction is large. Further, the UV decomposition method also has a problem of poor decomposition efficiency.

【0006】本発明は、このような事情に鑑みてなされ
たものであって、請求項1に係る発明の揮発性有機物質
を含む水の処理装置は、水中の揮発性有機物質を経済的
かつ効率よく無害化処理できるようにすることを目的と
し、そして、請求項2に係る発明の揮発性有機物質を含
む水の処理装置は、水中の揮発性有機物質をより経済的
かつ効率良く無害化処理できるようにすることを目的と
し、さらに、請求項3に係る発明の揮発性有機物質を含
む水の処理装置は、水中の揮発性有機物質をさらにより
経済的かつ効率よく無害化処理できるようにすることを
目的とする。また、請求項4に係る発明の有機ハロゲン
化物質を含む地下水の無害化処理装置は、地下水中の有
機ハロゲン化物質を経済的かつ効率よく無害化処理でき
るようにすることを目的とし、そして、請求項5に係る
発明の有機ハロゲン化物質を含む地下水の無害化処理装
置は、地下水中の有機ハロゲン化物質を経済的かつ効率
よく無害化処理すると共に、処理の際に生じるハロゲン
化水素による二次汚染を防止できるようにすることを目
的とし、さらに、請求項6に係る発明の有機ハロゲン化
物質を含む地下水の無害化処理装置は、請求項4および
請求項5に係る発明による無害化処理をさらにより経済
的かつ効率よくできるようにすることを目的とする。
The present invention has been made in view of such circumstances, and a water treatment apparatus containing a volatile organic substance according to the first aspect of the present invention is capable of economically and efficiently processing a volatile organic substance in water. It is an object of the present invention to efficiently perform detoxification processing, and a water treatment apparatus containing a volatile organic substance according to the invention of claim 2 is capable of detoxifying volatile organic substances in water more economically and efficiently. The treatment apparatus for water containing a volatile organic substance according to the third aspect of the present invention is intended to be capable of treating the volatile organic substance in water so as to be able to detoxify the volatile organic substance in water even more economically and efficiently. The purpose is to. Further, the detoxification apparatus for groundwater containing an organic halogenated substance according to the invention according to claim 4 aims to economically and efficiently detoxify an organic halogenated substance in groundwater, and The detoxification apparatus for groundwater containing an organic halogenated substance according to the fifth aspect of the present invention is capable of economically and efficiently detoxifying an organic halogenated substance in groundwater, and is capable of detoxifying an organic halogenated substance by hydrogen halide generated during the treatment. The detoxification apparatus for groundwater containing an organic halogenated substance according to the invention according to claim 6 is intended to prevent secondary pollution, and the detoxification processing apparatus according to the invention according to claims 4 and 5 It is intended to be able to more economically and efficiently.

【0007】[0007]

【課題を解決するための手段】本発明は請求項1とし
て、揮発性有機物質を含む水から揮発性有機物質を気相
へ移行させる手段と、前記手段により得られる気体中の
揮発性有機物質を分解処理する常圧低温プラズマ装置と
を有することを特徴とする揮発性有機物質を含む水の処
理装置を提供する。また、本発明は請求項2として、請
求項1に記載の水の処理装置であって、揮発性有機物質
を含む水から揮発性有機物質を気相へ移行させる手段が
曝気手段または膜脱気手段を備えた装置である揮発性有
機物質を含む水の処理装置を提供する。また、本発明は
請求項3として、請求項1または請求項2に記載の水の
処理装置であって、常圧低温プラズマ装置が常圧低温マ
イクロ波プラズマ装置または常圧低温放電プラズマ装置
である揮発性有機物質を含む水の処理装置を提供する。
また、本発明は請求項4として、有機ハロゲン化物質を
含む地下水を含有する土壌中に埋設された井戸と、前記
井戸を通して有機ハロゲン化物質を含む地下水を吸引す
るポンプと、前記ポンプによって吸引した有機ハロゲン
化物質を含む地下水から有機ハロゲン化物質を気相へ移
行させる曝気処理槽と、前記曝気処理槽から生じる気体
中の有機ハロゲン化物質を分解処理する常圧低温プラズ
マ装置とを有することを特徴とする有機ハロゲン化物質
を含む地下水の無害化処理装置を提供する。また、本発
明は請求項5として、請求項4に記載の地下水の無害化
処理装置であって、常圧低温プラズマ装置による処理後
の排ガスをアルカリ液と接触させる手段をさらに有する
ことを特徴とする有機ハロゲン化物質を含む地下水の無
害化処理装置を提供する。また、本発明は請求項6とし
て、請求項4または請求項5に記載の地下水の無害化処
理装置であって、常圧低温プラズマ装置が常圧低温マイ
クロ波プラズマ装置または常圧低温放電プラズマ装置で
ある有機ハロゲン化物質を含む地下水の無害化処理装置
を提供する。
According to the present invention, there is provided a means for transferring a volatile organic substance from water containing a volatile organic substance to a gaseous phase, and a volatile organic substance in a gas obtained by the means. And a normal-pressure low-temperature plasma device for decomposing water. According to a second aspect of the present invention, there is provided the water treatment apparatus according to the first aspect, wherein the means for transferring the volatile organic substance from water containing the volatile organic substance to the gaseous phase is an aeration means or a film deaeration. There is provided an apparatus for treating water containing volatile organic substances, the apparatus comprising means. According to a third aspect of the present invention, there is provided the water treatment apparatus according to the first or second aspect, wherein the normal-pressure low-temperature plasma apparatus is a normal-pressure low-temperature microwave plasma apparatus or a normal-pressure low-temperature discharge plasma apparatus. An apparatus for treating water containing volatile organic substances is provided.
According to the present invention, a well buried in soil containing groundwater containing an organic halide, a pump for sucking groundwater containing an organic halide through the well, and suction by the pump An aeration tank for transferring the organic halide substance from the groundwater containing the organic halide substance to the gas phase, and a normal-pressure low-temperature plasma apparatus for decomposing the organic halide substance in the gas generated from the aeration tank. Provided is a detoxification treatment device for groundwater containing a characteristic organic halogenated substance. According to a fifth aspect of the present invention, there is provided the detoxification apparatus for groundwater according to the fourth aspect, further comprising means for contacting the exhaust gas after the treatment with the normal-pressure low-temperature plasma apparatus with an alkali solution. To provide a detoxification apparatus for groundwater containing organic halogenated substances. According to a sixth aspect of the present invention, there is provided the detoxification apparatus for groundwater according to the fourth or fifth aspect, wherein the normal-pressure low-temperature plasma apparatus is a normal-pressure low-temperature microwave plasma apparatus or a normal-pressure low-temperature discharge plasma apparatus. The present invention provides a detoxification apparatus for groundwater containing an organic halogenated substance.

【0008】[0008]

【発明の実施の形態】本発明における揮発性有機物質と
しては、例えば、有機ハロゲン化物質、臭気物質を含む
以下のものが挙げられるが、これらに限定されるもので
はない。 (炭化水素類)ベンゼン、トルエン、キシレン、メタ
ン、エタン、ブタン、ヘキサン、シクロヘキサン、ヘキ
セン; (アルコール類)イソプロピルアルコール、メタノー
ル; (ケトン類)アセトン、メチルエチルケトン; (有機酸類)ギ酸、酢酸; (アルデヒド類)ホルムアルデヒド、アセトアルデヒ
ド; (エステル類)エチルアセテート、ブチルアセテート; (有機ハロゲン化物質類)トリクロロエチレン、1,
1,1−トリクロロエタン、テトラクロロエチレン、四
塩化炭素、1,1,2−トリクロロエタン、1,2−ジ
クロロエタン、フレオン−12(CFC−12)、フレ
オン−113(CFC−113)、臭化メチル; (臭気物質類)ジメチルスルフィド、メルカプタン、ア
ンモニア;
BEST MODE FOR CARRYING OUT THE INVENTION The volatile organic substances in the present invention include, but are not limited to, the following, including organic halogenated substances and odorous substances. (Hydrocarbons) benzene, toluene, xylene, methane, ethane, butane, hexane, cyclohexane, hexene; (alcohols) isopropyl alcohol, methanol; (ketones) acetone, methyl ethyl ketone; (organic acids) formic acid, acetic acid; (aldehyde (Formers) formaldehyde, acetaldehyde; (esters) ethyl acetate, butyl acetate; (organic halogenated substances) trichloroethylene, 1,
1,1-trichloroethane, tetrachloroethylene, carbon tetrachloride, 1,1,2-trichloroethane, 1,2-dichloroethane, Freon-12 (CFC-12), Freon-113 (CFC-113), methyl bromide; Substances) dimethyl sulfide, mercaptan, ammonia;

【0009】本発明における水とは如何なる由来の水で
あっても良く、例えば、水道水、工業用水、地下水、井
戸水、河川水、湖沼水、下水、工業排水等が挙げられる
がこれらに限定されない。また、地下水とは、地下土壌
の下部の帯水層に存在する水をいう。
The water in the present invention may be water of any origin, and includes, for example, tap water, industrial water, groundwater, well water, river water, lake water, sewage, industrial wastewater, and the like. . In addition, groundwater refers to water existing in the aquifer below the underground soil.

【0010】次に、本発明の実施の形態である、揮発性
有機物質を含む水の処理装置のフローシートを図1に示
し、以下これを説明する。図1に示す態様では、水中の
揮発性有機物質を気相へ移行させる手段として膜脱気手
段10が用いられ、常圧低温プラズマ装置として常圧低
温マイクロ波プラズマ装置20が用いられている。膜脱
気手段10において水中の揮発性有機物質は気相に移行
され、揮発性有機物質を含む気体と揮発性有機物質が除
かれた水とに気液分離される。揮発性物質が除かれた水
は処理水として膜脱気手段10から排出される。処理水
は可能であれば如何なる用途にも用いられることがで
き、冷却水、洗浄水などの工業用水とか農業用水などに
利用され、また、消毒殺菌して飲料水などにも利用され
ることができる。水中の揮発性有機物質を気相に移行さ
せる手段としては膜脱気手段10のほか、曝気手段また
は煮沸手段などを適用することができるが、加熱等の処
理が不要であり簡易であるという観点から、曝気手段ま
たは膜脱気手段が好ましい。ここで、曝気手段を備えた
装置としては、例えば、図3に示されるような曝気処理
槽などが挙げられるがこれらに限定されない。
Next, FIG. 1 shows a flow sheet of an apparatus for treating water containing a volatile organic substance according to an embodiment of the present invention, which will be described below. In the embodiment shown in FIG. 1, a film degassing means 10 is used as a means for transferring a volatile organic substance in water to a gas phase, and a normal-pressure low-temperature microwave plasma device 20 is used as a normal-pressure low-temperature plasma device. In the membrane deaerator 10, the volatile organic substance in the water is transferred to the gas phase, and is separated into a gas containing the volatile organic substance and water from which the volatile organic substance has been removed. The water from which the volatile substances have been removed is discharged from the membrane deaerator 10 as treated water. The treated water can be used for any purpose if possible, and is used for industrial water such as cooling water and washing water or agricultural water, and also used for drinking water after disinfection. it can. As means for transferring volatile organic substances in water to the gaseous phase, in addition to the membrane deaerator 10, an aeration unit or a boiling unit can be applied, but a process such as heating is not required and the viewpoint is simple. Therefore, aeration means or membrane deaeration means is preferred. Here, examples of the apparatus provided with the aeration means include, but are not limited to, an aeration treatment tank as shown in FIG.

【0011】図1の膜脱気手段10の容器11は外気を
吸い込む吸気口12および揮発性有機物質および水蒸気
を含む気体の排気口13を有する容器であり、該容器1
1の内部には多数本の中空糸膜14が所定の間隔を置い
てその両端部がポッティング剤15により支持固定され
るように配置されている。また、容器11の一端には前
記ポッティング剤15により支持固定された中空糸膜1
4と容器11の内壁とで形成される空間部に連通する揮
発性有機物質を含む水の導入口16が設けられ、他端に
は揮発性有機物質が除かれた処理水が排出される導出口
17が設けてある。前記ポッティング剤15により、前
記多数本の中空糸膜14、14・・・、14間に形成さ
れる空間と前記揮発性有機物質を含む水の導入口16お
よび導出口17とを遮断する隔壁が形成される。さら
に、容器11の周面の一部には排気口13が設けられて
おり、排気口13の途中には減圧機(吸気ブロアー)1
8が設置されている。前記減圧機18により容器11内
の気体を吸引することにより、容器11に設置される吸
気口12から外部の空気が容器11内に取り込まれ、さ
らに、中空糸膜14内部を流れる揮発性有機物質を含む
水から、揮発性有機物質が中空糸膜14を通過して気相
に移行される。この構成により、揮発性有機物質を含む
気体が容器11に設置された排気口13から排出され
る。
A container 11 of the membrane deaerator 10 shown in FIG. 1 is a container having an air inlet 12 for sucking in outside air and an outlet 13 for a gas containing volatile organic substances and water vapor.
A large number of hollow fiber membranes 14 are arranged in the inside 1 at predetermined intervals so that both ends thereof are supported and fixed by a potting agent 15. Further, at one end of the container 11, the hollow fiber membrane 1 supported and fixed by the potting agent 15 is provided.
An inlet 16 for water containing a volatile organic substance is provided which communicates with a space formed by the inner wall of the container 4 and the inner wall of the container 11. An outlet 17 is provided. By the potting agent 15, a partition wall that blocks a space formed between the plurality of hollow fiber membranes 14, 14,..., And the inlet 16 and the outlet 17 of the water containing the volatile organic substance is formed. It is formed. Further, an exhaust port 13 is provided on a part of the peripheral surface of the container 11, and a decompressor (intake blower) 1 is provided in the middle of the exhaust port 13.
8 are installed. When the gas in the container 11 is sucked by the decompressor 18, external air is taken into the container 11 from an air inlet 12 provided in the container 11, and further, volatile organic substances flowing inside the hollow fiber membrane 14. The volatile organic substance is transferred from the water containing to the gas phase through the hollow fiber membrane 14. With this configuration, the gas containing the volatile organic substance is discharged from the exhaust port 13 provided in the container 11.

【0012】中空糸膜14としては細孔径が0.05μ
m以下の疎水性多孔質膜を用いることもできるが、長時
間使用すると水蒸気が漏れてしまい、その結果、水が多
孔質膜から漏れてしまう危険性があることから、8μm
以下の膜厚の均質膜および補強機能を受け持つ多孔質膜
からなる多層複合中空糸膜であって、均質膜と多孔質膜
とが交互に積層され、該多層複合中空糸膜の水溶液と接
する側の層が均質膜あるいは多孔質膜であり、水溶液と
接しない側の層が多孔質膜である構造を有し、且つ、複
合中空糸膜のクロロホルム透過速度が1×10−3(c
(STP)/cm/sec/cmHg)以上の透
過性能を有する中空糸膜であることが好ましい。クロロ
ホルム透過速度が1×10−3(cm(STP)/c
/sec/cmHg)未満では、水中に含まれる揮
発性有機物質の複合膜を透過する透過速度が遅く、効率
的に揮発性有機物質を気相に移行することができない。
The hollow fiber membrane 14 has a pore diameter of 0.05 μm.
m or less can be used, but if used for a long time, water vapor leaks, and as a result, water may leak from the porous membrane.
A multilayer composite hollow fiber membrane comprising a homogeneous membrane having the following film thickness and a porous membrane having a reinforcing function, wherein a homogeneous membrane and a porous membrane are alternately laminated, and a side of the multilayer composite hollow fiber membrane which comes into contact with an aqueous solution. Is a homogeneous membrane or a porous membrane, the layer not in contact with the aqueous solution is a porous membrane, and the composite hollow fiber membrane has a chloroform permeation rate of 1 × 10 −3 (c
It is preferable that the hollow fiber membrane has a permeability of at least m 3 (STP) / cm 2 / sec / cmHg. Chloroform transmission rate is 1 × 10 −3 (cm 3 (STP) / c
If the pressure is less than m 2 / sec / cmHg), the permeation rate of the volatile organic substance contained in water through the composite membrane is low, and the volatile organic substance cannot be efficiently transferred to the gas phase.

【0013】このような複合膜の多孔質層を形成する素
材としては、ポリエチレン、ポリプロピレン、ポリ3−
メチルブテン−1、ポリ4−メチルペンテン−1等のポ
リオレフィンやフッ化ビニリデン、ポリテトラフロロエ
チレン等のフッ素系ポリマー、ポリスルホンやポリエー
テルケトン、ポリエーテルエーテルケトン等のポリマー
を用いることができるが、好ましくは容易に多孔質形成
が可能な結晶性のポリマーであるポリオレフィンが好ま
しい。また、前記複合膜の均質層に用いられる素材とし
ては、セグメント化ポリウレタン、シリコン系ポリマ
ー、低密度ポリエチレンやポリ4−メチルペンテン−1
等のポリオレフィンや、ポリアクリルアミド等が考えら
れるが、揮発性有機物質と親和性の高いポリマーが好ま
しい。
Materials for forming the porous layer of such a composite membrane include polyethylene, polypropylene, poly-3-
Polyolefins such as methylbutene-1, poly-4-methylpentene-1 and the like, vinylidene fluoride, fluorinated polymers such as polytetrafluoroethylene, and polymers such as polysulfone, polyetherketone, and polyetheretherketone can be used. Is preferably a polyolefin which is a crystalline polymer capable of easily forming a porous material. Materials used for the homogeneous layer of the composite film include segmented polyurethane, silicon-based polymer, low-density polyethylene, and poly-4-methylpentene-1.
And polyacrylamide, etc., and a polymer having high affinity for volatile organic substances is preferable.

【0014】水中の揮発性有機物質を気相に移行する手
段と常圧低温プラズマ装置は接続されており、前記排気
口13から排出される揮発性有機物質を含む気体が常圧
低温プラズマ装置に移送される。常圧低温プラズマ装置
においては、移送された気体中の揮発性有機物質が前記
装置により生じるプラズマと反応して分解され、分解反
応後の気体が常圧低温プラズマ装置から排出される。常
圧低温プラズマ装置とは、常圧下において、電子温度の
みが極めて高い状態となっているプラズマを生じさせる
プラズマ装置であって揮発性有機物質を分解することが
できるものであれば良く、好ましくは常圧低温マイクロ
波プラズマ装置または常圧低温放電プラズマ装置が挙げ
られ、図1には常圧低温マイクロ波プラズマ装置20が
示される。
The means for transferring the volatile organic substance in the water into the gas phase is connected to the low-pressure plasma apparatus at normal pressure, and the gas containing the volatile organic substance discharged from the exhaust port 13 is supplied to the low-temperature plasma apparatus at normal pressure. Be transported. In a normal-pressure low-temperature plasma device, volatile organic substances in the transferred gas react with plasma generated by the device to be decomposed, and the gas after the decomposition reaction is discharged from the normal-pressure low-temperature plasma device. The normal-pressure low-temperature plasma device is a plasma device that generates plasma in which only the electron temperature is extremely high under normal pressure, as long as it can decompose volatile organic substances, and is preferably An ordinary-pressure low-temperature microwave plasma apparatus or an ordinary-pressure low-temperature discharge plasma apparatus can be used, and FIG. 1 shows an ordinary-pressure low-temperature microwave plasma apparatus 20.

【0015】図1の常圧低温マイクロ波プラズマ装置2
0は、マイクロ波源21を有し、これは導波管22によ
ってマイクロ波空洞23に接続されており、マイクロ波
空洞23の中には容器24が設置されている。マイクロ
波源21のスイッチが入るとマイクロ波空洞23内にマ
イクロ波の場が発生し、その中に設置される容器24内
にもマイクロ波の場が発生する。容器24にはガス入口
27が設けられており、水中の揮発性有機物質を気相に
移行する手段の排気口13から排出される揮発性有機物
質を含む気体が前記ガス入口27を通じて容器24内に
導入され、プラズマ26の燃料となる。プラズマ26を
発生させるのに通常必要とされるマイクロ波の出力は
0.3〜5kWである。容器24内のプラズマ26が高
温になることに鑑みて、容器壁は石英などの耐熱材で造
られる。
Normal pressure low-temperature microwave plasma apparatus 2 shown in FIG.
0 has a microwave source 21 which is connected by a waveguide 22 to a microwave cavity 23 in which a container 24 is placed. When the microwave source 21 is turned on, a microwave field is generated in the microwave cavity 23, and a microwave field is also generated in the container 24 installed therein. The container 24 is provided with a gas inlet 27, and a gas containing the volatile organic substance discharged from the exhaust port 13 of the means for transferring the volatile organic substance in the water to the gas phase passes through the gas inlet 27 into the container 24. And becomes fuel of the plasma 26. The microwave power typically required to generate the plasma 26 is 0.3-5 kW. In view of the high temperature of the plasma 26 in the container 24, the container wall is made of a heat-resistant material such as quartz.

【0016】容器24には点火口28も設けられてお
り、プラズマを生起させる際に、点火口28を通じて電
極29が挿入される。電極29が容器24内に存在する
ことによって、電極29の先端に隣接した部位のマイク
ロ波の場の強さが増大し、この領域のマイクロ波の場の
強さが充分大きくなると放電が始まる。その結果、電極
29の周辺の気体がイオン化し、プラズマ26が形成さ
れて容器24内の上部に浮遊する。容器24内にプラズ
マ26が生起した後、電極29は容器24から引き抜か
れる。電極29は尖った先端を有する細長い部材であ
り、導電材料で造られていればよいが、マイクロ波の場
に影響を与えないという観点から、電極材料としては炭
素繊維が好ましい。容器24内のプラズマ26の大きさ
は、マイクロ波源21の出力レベルを変化させることに
よって調節される。容器24の下部には排気口25が設
けられており、揮発性有機物質がプラズマと反応した後
のガスが排気口25から排気される。
The container 24 is also provided with an ignition port 28, and an electrode 29 is inserted through the ignition port 28 when generating plasma. The presence of the electrode 29 in the container 24 increases the intensity of the microwave field at a portion adjacent to the tip of the electrode 29, and discharge starts when the intensity of the microwave field in this region becomes sufficiently large. As a result, the gas around the electrode 29 is ionized, and the plasma 26 is formed and floats on the upper part in the container 24. After the plasma 26 is generated in the container 24, the electrode 29 is pulled out of the container 24. The electrode 29 is an elongated member having a pointed tip, and may be made of a conductive material. From the viewpoint of not affecting the microwave field, the electrode material is preferably carbon fiber. The size of the plasma 26 in the container 24 is adjusted by changing the output level of the microwave source 21. An exhaust port 25 is provided at a lower portion of the container 24, and a gas after the volatile organic substance has reacted with the plasma is exhausted from the exhaust port 25.

【0017】図2は、本発明の水の処理装置に使用する
ことができる常圧低温プラズマ装置の別の態様である、
常圧低温放電プラズマ装置の縦断面図である。図2の円
筒形の常圧低温放電プラズマ装置はパックドベッド式放
電のものであり、内部電極31および外部電極32を有
しており、プラズマ処理室39内であって、両電極の間
に粒状多孔質吸着剤33と粒状強誘電体物質34が物理
混合されて充填されている。内部電極31と外部電極3
2の間には、電源35によって高電圧が印加される。プ
ラズマ処理室39の両端にはテフロン製キャップ36お
よび押え板37が設けられている。また、該装置はガス
入口38を有しており、揮発性有機物質を含む気体が前
記ガス入口38から導入される。導入された揮発性有機
物質を含む気体は、矢印aの流路で一端側のテフロン製
押さえ板37の透孔を通って多孔質吸着剤33を強誘電
体物質34に混合して充填したプラズマ処理室39に導
入され、揮発性有機物質がプラズマにより分解処理され
た後、処理後の気体は他端側の押さえ板37の透孔から
矢印bで示す流れとして、排気口40から排出される。
FIG. 2 shows another embodiment of a normal-pressure low-temperature plasma apparatus that can be used in the water treatment apparatus of the present invention.
It is a longitudinal cross-sectional view of a normal-pressure low-temperature discharge plasma device. The cylindrical normal-pressure low-temperature discharge plasma apparatus shown in FIG. 2 is of a packed-bed discharge type, has an internal electrode 31 and an external electrode 32, and is located in a plasma processing chamber 39 between the two electrodes. The porous adsorbent 33 and the granular ferroelectric substance 34 are physically mixed and filled. Internal electrode 31 and external electrode 3
During the period 2, a high voltage is applied by the power supply 35. At both ends of the plasma processing chamber 39, a Teflon cap 36 and a holding plate 37 are provided. The apparatus also has a gas inlet 38 through which gas containing volatile organic substances is introduced. The introduced gas containing the volatile organic substance is mixed with the porous adsorbent 33 into the ferroelectric substance 34 through the through-hole of the Teflon pressing plate 37 at one end in the flow path indicated by the arrow a to fill the plasma. After being introduced into the processing chamber 39 and the volatile organic substance is decomposed by the plasma, the gas after the processing is exhausted from the exhaust port 40 as a flow indicated by an arrow b from the through hole of the holding plate 37 at the other end. .

【0018】多孔質吸着剤33としてはプラズマを発生
させるという観点から、非導電性物質が用いられ、無機
多孔質物質が好ましく、例えば、Al、Si
、ゼオライト(A型、X型、Y型など)、TiO
等が挙げられる。強誘電体物質34および多孔質吸着剤
33は、充填層中に気体の通路を形成し得るようにする
ため粒状であることが好ましい。粒剤のサイズは、円柱
体の底面、楕円ないしは球状体の直径が1〜3mm、よ
り好ましくは1〜2mmである。電源35によって内部
電極31と外部電極32の間に印加する電圧は、処理す
る気体中の揮発性有機物質の濃度等により変化するが、
通常1〜10kV/cm、好ましくは1〜5kV/cm
である。
As the porous adsorbent 33, a non-conductive substance is used from the viewpoint of generating plasma, and an inorganic porous substance is preferable. For example, Al 2 O 3 , Si
O 2 , zeolite (A type, X type, Y type, etc.), TiO 2
And the like. The ferroelectric substance 34 and the porous adsorbent 33 are preferably in a granular form so that a gas passage can be formed in the packed bed. As for the size of the granule, the diameter of the bottom surface of the cylindrical body, the ellipse or the spherical body is 1 to 3 mm, and more preferably 1 to 2 mm. The voltage applied between the internal electrode 31 and the external electrode 32 by the power supply 35 changes depending on the concentration of the volatile organic substance in the gas to be processed,
Usually 1 to 10 kV / cm, preferably 1 to 5 kV / cm
It is.

【0019】常圧低温放電プラズマ装置としては、図2
に示したものの他に、例えば、沿面放電、バリア放電、
パルス放電またはキャピラリチューブ式放電などの放電
方法を用いるプラズマ装置が挙げられるが、これらに限
定されるものではない。
FIG. 2 shows an ordinary-pressure low-temperature discharge plasma apparatus.
In addition to those shown in, for example, surface discharge, barrier discharge,
Examples include, but are not limited to, a plasma device using a discharge method such as pulse discharge or capillary tube discharge.

【0020】本発明の他の実施の形態である有機ハロゲ
ン化物質を含む地下水の無害化処理装置のフローシート
を図3に示し、以下、これを説明する。本発明に係る有
機ハロゲン化物質を含む地下水の無害化処理装置は、ト
リクロロエチレンなどの有機ハロゲン化物質によって汚
染された地下水を有する帯水層に到達するように掘削さ
れた井戸41を有する。本発明に係る地下水の無害化処
理装置においては前記井戸41は採取すべき地下水の量
および地域などに応じて、必要な本数だけ掘削され使用
されることができる。前記井戸41から有機ハロゲン化
物質を含む地下水を採取するために、地下水を揚水する
揚水装置としての揚水ポンプ42が設置される。前記揚
水ポンプ42によって揚水された地下水は、水中の有機
ハロゲン化物質を気相へ移行させる手段である曝気処理
槽43に移送される。図3においては揚水ポンプは地上
に設置され、配管を介して揚水しているが、前記揚水ポ
ンプとしては地上に設置されるタイプに限らず、井戸の
地下水内に投入されて地下水を揚水するタイプのポンプ
等、各種のポンプが使用できる。
FIG. 3 shows a flow sheet of a detoxification apparatus for groundwater containing an organic halogenated substance according to another embodiment of the present invention, which will be described below. The detoxification apparatus for groundwater containing an organic halogenated substance according to the present invention has a well 41 excavated so as to reach an aquifer having groundwater contaminated with an organic halogenated substance such as trichlorethylene. In the groundwater detoxification apparatus according to the present invention, the wells 41 can be excavated and used in a required number according to the amount of groundwater to be collected and the area. In order to collect groundwater containing an organic halogenated substance from the well 41, a pump 42 as a pump for pumping groundwater is installed. The groundwater pumped by the pump 42 is transferred to an aeration tank 43 which is a means for transferring the organic halogenated substance in the water to the gas phase. In FIG. 3, the pump is installed on the ground and pumps water through pipes. However, the pump is not limited to the type installed on the ground, and is a type that is pumped into groundwater of a well to pump groundwater. Various pumps, such as the above pump, can be used.

【0021】曝気処理槽43はその上部に汚染水導入の
ための配管44が設置されており、前記揚水42ポンプ
から移送された、有機ハロゲン化物質を含有する地下水
が前記配管44を介して曝気処理槽43の上部に投入さ
れる。曝気処理槽43内には、ラシヒリング、テラレッ
トパッキン等の充填材45が充填され、その曝気処理槽
の下部に処理水の排水管46と吸気用のブロワー47と
が接続され、汚染地下水を曝気処理して有機ハロゲン化
物質を気相に移行させ、有機ハロゲン化物質を含む気体
と有機ハロゲン化物質が除かれた地下水とに気液分離す
るように構成されている。曝気処理により有機ハロゲン
化物質が分離された後の処理水は排水管46から排出さ
れ、冷却水、洗浄水などの工業用水とか農業用水などに
利用され、また、消毒殺菌して飲料水などにも利用され
る。地盤沈下のおそれがあるような箇所では地下に戻さ
れる場合もある。
A pipe 44 for introducing contaminated water is installed in the upper part of the aeration tank 43, and groundwater containing an organic halogenated substance transferred from the pump 42 is aerated through the pipe 44. It is put into the upper part of the processing tank 43. The aeration tank 43 is filled with a filler 45 such as Raschig ring or teralet packing, and a drainage pipe 46 for treated water and a blower 47 for suction are connected to the lower part of the aeration tank to aerate contaminated groundwater. The organic halide material is converted into a gaseous phase by the treatment, and gas-liquid separation is performed between a gas containing the organic halide material and groundwater from which the organic halide material has been removed. The treated water after the organic halogenated substance is separated by aeration treatment is discharged from the drain pipe 46, and is used for industrial water such as cooling water, washing water or agricultural water, and is also disinfected and sterilized into drinking water. Is also used. In places where there is a risk of land subsidence, it may be returned underground.

【0022】曝気処理槽43の上部には、有機ハロゲン
化物質を含む気体を排出する配管48が設けられてお
り、前記配管48は常圧低温プラズマ装置のガス入口2
7に接続されており、曝気処理槽43において気相に移
行された有機ハロゲン化物質を含む気体が前記配管48
を介して常圧低温プラズマ装置に移送される。常圧低温
プラズマ装置に導入された有機ハロゲン化物質はプラズ
マと反応して分解され、分解後の気体は容器の排気口2
5から排気される。本発明の地下水の無害化処理装置を
構成する常圧低温プラズマ装置は、常圧下において、電
子温度のみが極めて高い状態となっているプラズマを生
じさせるプラズマ装置であって有機ハロゲン化物質を分
解することができるものであれば良く、図3に示される
常圧低温マイクロ波プラズマ装置だけでなく、図2に示
されるような常圧低温放電プラズマ装置であっても良
い。
A pipe 48 for discharging a gas containing an organic halogenated substance is provided above the aeration tank 43, and the pipe 48 is connected to the gas inlet 2 of the normal-pressure low-temperature plasma apparatus.
The gas containing the organic halogenated substance which has been transferred to the gas phase in the aeration tank 43 is connected to the pipe 48.
Is transferred to the normal pressure low temperature plasma apparatus through The organic halogenated substance introduced into the atmospheric pressure low-temperature plasma apparatus is decomposed by reacting with the plasma, and the decomposed gas is supplied to the exhaust port 2 of the container.
5 is exhausted. The normal-pressure low-temperature plasma apparatus constituting the detoxification apparatus for groundwater of the present invention is a plasma apparatus that generates plasma in which only the electron temperature is extremely high under normal pressure, and decomposes organic halogenated substances. Any normal pressure low-temperature microwave plasma apparatus shown in FIG. 3 may be used, as well as a normal pressure low-temperature discharge plasma apparatus as shown in FIG.

【0023】本発明の有機ハロゲン化物質を含む地下水
の無害化処理装置の他の実施の形態として、常圧低温プ
ラズマ装置の後に常圧低温プラズマ装置による処理後の
排ガスをアルカリ液と接触させる手段を接続することが
できる。この構成により、常圧低温プラズマ装置におい
て有機ハロゲン化物質が分解処理される場合に副生する
塩化水素のようなハロゲン化水素類の酸性ガスをアルカ
リ液中に吸収させ、処理後の排ガス中に含まれる有害な
酸性ガスによる二次的汚染を防止することが可能とな
る。排ガスをアルカリ液と接触させる手段としては、上
述のように常圧低温プラズマ装置において副生するハロ
ゲン化水素ガスをアルカリ液と接触させ、排ガスを中和
することができるものであれば任意の手段が可能であ
り、例えば、ハロゲン化水素類を含む処理後の排ガスに
アルカリ水溶液を散液供給して気液接触させる手段を有
するアルカリスクラバー、または空気通過孔の極く細か
い特殊多孔質板にハロゲン化水素を含む処理後の排ガス
を通し、微細な気泡を作り多孔質板上のアルカリ液に接
触させる手段を有する充填塔等が挙げられる。排ガスを
アルカリ液と接触させるための手段としては、経済性、
効率性という観点から図3に示されるようなアルカリス
クラバー50であることが好ましい。
As another embodiment of the detoxification apparatus for groundwater containing an organic halogenated substance according to the present invention, a means for contacting an exhaust gas treated by an ordinary-pressure low-temperature plasma apparatus with an alkali liquid after an ordinary-pressure low-temperature plasma apparatus. Can be connected. With this configuration, when an organic halogenated substance is decomposed in a normal-pressure low-temperature plasma apparatus, an acid gas of hydrogen halides such as hydrogen chloride produced as a by-product is absorbed in the alkaline liquid, and the gas is treated in the exhaust gas after the treatment. It is possible to prevent secondary contamination due to the contained harmful acidic gas. As a means for bringing the exhaust gas into contact with the alkaline liquid, any means can be used as long as the hydrogen halide gas by-produced in the normal-pressure low-temperature plasma apparatus can be brought into contact with the alkaline liquid to neutralize the exhaust gas. For example, an alkali scrubber having a means for spraying and supplying an aqueous alkali solution to a treated exhaust gas containing hydrogen halides to make gas-liquid contact, or a special porous plate having an extremely fine air passage hole may be used. A packed tower or the like having a means for passing the treated exhaust gas containing hydrogen hydride to form fine bubbles and contact the alkaline solution on the porous plate is exemplified. Means for bringing the exhaust gas into contact with the alkaline liquid include economy,
From the viewpoint of efficiency, an alkaline scrubber 50 as shown in FIG. 3 is preferable.

【0024】アルカリスクラバー50はラシヒリングや
テラレットパッキンなどの接触材52を充填した充填塔
53の下部水槽54と、接触材52の上方に設けた散液
ノズル55とを循環ポンプ56を介装した循環用配管を
介して接続し、下部水槽54は比較的濃度の高いアルカ
リ液の貯留タンク58と、補給ポンプ57を介した補給
管59で接続されて構成されている。循環用配管にはア
ルカリ水溶液のpHを測定するpH計が付設され、この
pH計で測定されるアルカリ水溶液のpHが一定の値に
維持されるように補給ポンプ57をオン−オフ制御する
ように構成されることができる。また、充填塔53の下
部には常圧低温プラズマ装置から排気されるハロゲン化
水素を含む気体を塔内に導入するためのガス入口51が
設けられており、充填塔53の上部には処理後の気体を
排出するための排気口60が設けられている。この構成
により、常圧低温プラズマ装置における有機ハロゲン化
物質の分解により生じたハロゲン化水素類の酸性ガス
は、ガス入口51から充填塔53内へ供給されることに
より、充填塔53の散液ノズル55から散液流下された
アルカリ水溶液と接触する。これにより、酸性ガス成分
はアルカリ水溶液中に吸収除去され、処理後の気体が排
気口60から排気される。
The alkaline scrubber 50 has a lower water tank 54 of a packed tower 53 filled with a contact material 52 such as Raschig ring or teralet packing, and a spray nozzle 55 provided above the contact material 52 with a circulation pump 56 interposed therebetween. The lower water tank 54 is connected via a circulation pipe, and is connected to a storage tank 58 for an alkaline solution having a relatively high concentration and a supply pipe 59 via a supply pump 57. The circulation pipe is provided with a pH meter for measuring the pH of the alkaline aqueous solution, and the supply pump 57 is controlled to be on-off so that the pH of the alkaline aqueous solution measured by the pH meter is maintained at a constant value. Can be configured. Further, a gas inlet 51 for introducing a gas containing hydrogen halide exhausted from the normal-pressure low-temperature plasma apparatus into the tower is provided at a lower part of the packed tower 53, and a gas inlet 51 is provided at an upper part of the packed tower 53 after treatment. An exhaust port 60 for exhausting the gas is provided. With this configuration, the acidic gas of hydrogen halides generated by the decomposition of the organic halogenated substance in the normal-pressure low-temperature plasma apparatus is supplied from the gas inlet 51 into the packed tower 53, so that the liquid spray nozzle of the packed tower 53 It comes into contact with the aqueous alkali solution that has been sprinkled from 55. As a result, the acidic gas component is absorbed and removed in the alkaline aqueous solution, and the treated gas is exhausted from the exhaust port 60.

【0025】排ガスをアルカリ水溶液と接触させる手段
で用いられるアルカリ液としては、ハロゲン化水素類を
中和できるものであれば任意のものを用いることができ
るが、経済性および取り扱いの容易性という観点から、
水酸化ナトリウム水溶液または炭酸ナトリウム水溶液が
好ましい。また、アルカリ液はアルカリ性であればいか
なるpHの液も使用可能であるが、装置の耐久性、中和
効率および取り扱いの容易性等を考慮してpHが8.0
〜12.0の範囲が好ましい。
As the alkaline liquid used in the means for bringing the exhaust gas into contact with the aqueous alkaline solution, any alkaline liquid can be used as long as it can neutralize hydrogen halides, but from the viewpoint of economy and easy handling. From
An aqueous sodium hydroxide solution or an aqueous sodium carbonate solution is preferred. As the alkaline solution, any pH solution can be used as long as it is alkaline. However, the pH is 8.0 in consideration of the durability of the apparatus, the neutralization efficiency, the ease of handling, and the like.
The range of ~ 12.0 is preferred.

【0026】[0026]

【発明の効果】以上説明したように、請求項1乃至請求
項3に係る発明の揮発性有機物質を含む水の処理装置に
よれば、水中に含まれる揮発性有機物質を気相に移行さ
せて生じた気体中の揮発性有機物質を常圧低温プラズマ
装置で分解処理するので、水中に存在する揮発性有機物
質を単離するだけでなく直接分解することが可能とな
る。また、水中に含まれる揮発性有機物質が低濃度であ
っても、濃縮等の操作が不要なため低コストで効率的に
分解することができる。さらに、従来の手段による揮発
性有機物質の処理に比べ設備面およびスペース面で有利
である。
As described above, according to the water treatment apparatus containing a volatile organic substance according to the first to third aspects of the present invention, the volatile organic substance contained in the water is transferred to the gas phase. Since the volatile organic substance in the generated gas is decomposed by the low-pressure plasma apparatus at normal pressure, it is possible to not only isolate the volatile organic substance present in the water but also directly decompose it. In addition, even if the volatile organic substance contained in the water has a low concentration, it can be efficiently decomposed at low cost because an operation such as concentration is unnecessary. Furthermore, it is advantageous in terms of equipment and space as compared with the treatment of volatile organic substances by conventional means.

【0027】また、請求項4および請求項6に係る発明
の有機ハロゲン化物質を含む地下水の無害化処理装置に
よれば、有機ハロゲン化物質を含む地下水を揚水し、曝
気処理槽で処理して有機ハロゲン化物質を気相に移行さ
せ、気体中の有機ハロゲン化物質を常圧低温プラズマ装
置で分解処理するので、地下水中に存在する有機ハロゲ
ン化物質を単離するだけでなく直接分解することが可能
となる。また、地下水中に含まれる有機ハロゲン化物質
が低濃度であっても、濃縮等の操作が不要なため低コス
トで効率的に分解することができる。さらに、従来の手
段による有機ハロゲン化物質の処理に比べ設備面および
スペース面で有利である。
According to the apparatus for detoxifying groundwater containing an organic halogenated substance of the invention according to claims 4 and 6, the groundwater containing an organic halogenated substance is pumped and treated in an aeration tank. The organic halogenated substances are transferred to the gas phase, and the organic halogenated substances in the gas are decomposed by the low-pressure plasma apparatus at normal pressure. Becomes possible. Further, even if the organic halogenated substance contained in the groundwater has a low concentration, it can be efficiently decomposed at low cost because an operation such as concentration is unnecessary. Further, it is advantageous in terms of equipment and space as compared with the treatment of organic halogenated substances by conventional means.

【0028】また、請求項5および請求項6に係る発明
の有機ハロゲン化物質を含む地下水の無害化処理装置に
よれば、有機ハロゲン化物質を含む地下水を揚水し、曝
気処理槽で処理して有機ハロゲン化物質を気相に移行さ
せ、気体中の有機ハロゲン化物質を常圧低温プラズマ装
置で分解処理し、さらに前記分解処理によって生じるハ
ロゲン化水素を中和して除去する手段を有することか
ら、請求項4に係る発明の装置による効果に加え、酸性
物質であるハロゲン化水素による二次汚染を防止でき、
全体として有機ハロゲン化物質を経済的かつ効率よく無
害化処理できることとなる。
According to the detoxification apparatus for groundwater containing an organic halogenated substance according to the fifth and sixth aspects of the present invention, groundwater containing an organic halogenated substance is pumped and treated in an aeration tank. Since the organic halide substance is transferred to the gaseous phase, the organic halide substance in the gas is decomposed by a normal-pressure low-temperature plasma apparatus, and further, a means for neutralizing and removing hydrogen halide generated by the decomposition processing is provided. In addition to the effects of the device of the invention according to claim 4, it is possible to prevent secondary contamination by hydrogen halide as an acidic substance,
As a whole, the organic halogenated substance can be economically and efficiently detoxified.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 図1は本発明に係る水の処理装置の一態様を
示すフローシートである。
FIG. 1 is a flow sheet showing one embodiment of a water treatment apparatus according to the present invention.

【図2】 図2は本発明に係る水の処理装置に用いるこ
とができる常圧低温放電プラズマ処理装置の一態様であ
る。
FIG. 2 is an embodiment of a normal-pressure low-temperature discharge plasma processing apparatus that can be used in the water processing apparatus according to the present invention.

【図3】 図3は本発明に係る地下水の無害化処理装置
の一態様を示すフローシートである。
FIG. 3 is a flow sheet showing one embodiment of a detoxification apparatus for groundwater according to the present invention.

【符号の説明】[Explanation of symbols]

10 膜脱気手段 20 常圧低温マイクロ波プラズマ装置 41 井戸 42 揚水ポンプ 43 曝気処理槽 50 アルカリスクラバー DESCRIPTION OF SYMBOLS 10 Membrane deaeration means 20 Normal pressure low-temperature microwave plasma apparatus 41 Well 42 Pumping pump 43 Aeration tank 50 Alkaline scrubber

フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C02F 1/58 B01D 53/34 134E Fターム(参考) 4D002 AA21 AC10 BA02 BA05 BA09 CA07 CA11 DA02 DA12 DA16 EA02 GA03 GB09 4D011 AA15 AA17 AB01 AD03 4D037 AA01 AB14 BA23 BB05 CA03 CA12 CA14 4D038 AA02 AB14 BA02 BA04 BB03 BB07 BB09 BB13 BB16 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (Reference) C02F 1/58 B01D 53/34 134E F-term (Reference) 4D002 AA21 AC10 BA02 BA05 BA09 CA07 CA11 DA02 DA12 DA16 EA02 GA03 GB09 4D011 AA15 AA17 AB01 AD03 4D037 AA01 AB14 BA23 BB05 CA03 CA12 CA14 4D038 AA02 AB14 BA02 BA04 BB03 BB07 BB09 BB13 BB16

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 揮発性有機物質を含む水から揮発性有機
物質を気相へ移行させる手段と、前記手段により得られ
る気体中の揮発性有機物質を分解処理する常圧低温プラ
ズマ装置とを有することを特徴とする揮発性有機物質を
含む水の処理装置。
1. A means for transferring a volatile organic substance from water containing a volatile organic substance to a gaseous phase, and a normal-pressure low-temperature plasma apparatus for decomposing a volatile organic substance in a gas obtained by the means. An apparatus for treating water containing volatile organic substances.
【請求項2】 請求項1に記載の水の処理装置であっ
て、揮発性有機物質を含む水から揮発性有機物質を気相
へ移行させる手段が曝気手段または膜脱気手段を備えた
装置である揮発性有機物質を含む水の処理装置。
2. The water treatment apparatus according to claim 1, wherein the means for transferring the volatile organic substance from water containing the volatile organic substance to the gas phase comprises aeration means or film deaeration means. Water treatment apparatus containing volatile organic substances.
【請求項3】 請求項1または請求項2に記載の水の処
理装置であって、常圧低温プラズマ装置が常圧低温マイ
クロ波プラズマ装置または常圧低温放電プラズマ装置で
ある揮発性有機物質を含む水の処理装置。
3. The water treatment apparatus according to claim 1, wherein the normal-pressure low-temperature plasma apparatus is a normal-pressure low-temperature microwave plasma apparatus or a normal-pressure low-temperature discharge plasma apparatus. Including water treatment equipment.
【請求項4】 有機ハロゲン化物質を含む地下水を含有
する土壌中に埋設された井戸と、前記井戸を通して有機
ハロゲン化物質を含む地下水を吸引するポンプと、前記
ポンプによって吸引した有機ハロゲン化物質を含む地下
水から有機ハロゲン化物質を気相へ移行させる曝気処理
槽と、前記曝気処理槽から生じる気体中の有機ハロゲン
化物質を分解処理する常圧低温プラズマ装置とを有する
ことを特徴とする有機ハロゲン化物質を含む地下水の無
害化処理装置。
4. A well buried in soil containing groundwater containing an organic halide, a pump for sucking groundwater containing the organic halide through the well, and an organic halide sucked by the pump. Organic halogen, comprising: an aeration tank for transferring an organic halide substance from a groundwater containing gas into a gaseous phase; and a normal-pressure low-temperature plasma apparatus for decomposing an organic halide substance in a gas generated from the aeration tank. Detoxification equipment for groundwater containing chemical substances.
【請求項5】 請求項4に記載の地下水の無害化処理装
置であって、常圧低温プラズマ装置による処理後の排ガ
スをアルカリ液と接触させる手段をさらに有することを
特徴とする有機ハロゲン化物質を含む地下水の無害化処
理装置。
5. The apparatus for detoxifying underground water according to claim 4, further comprising means for contacting the exhaust gas after the treatment with a normal-pressure low-temperature plasma apparatus with an alkali solution. Detoxification equipment for underground water.
【請求項6】 請求項4または請求項5に記載の地下水
の無害化処理装置であって、常圧低温プラズマ装置が常
圧低温マイクロ波プラズマ装置または常圧低温放電プラ
ズマ装置である有機ハロゲン化物質を含む地下水の無害
化処理装置。
6. The organic halogenation treatment apparatus according to claim 4, wherein the atmospheric pressure low-temperature plasma apparatus is an ordinary pressure low-temperature microwave plasma apparatus or an ordinary pressure low-temperature discharge plasma apparatus. Detoxification equipment for groundwater containing substances.
JP32393699A 1999-11-15 1999-11-15 Treating device for water containing volatile organic material, and non-polluting treating device for groundwater Pending JP2001137837A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32393699A JP2001137837A (en) 1999-11-15 1999-11-15 Treating device for water containing volatile organic material, and non-polluting treating device for groundwater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32393699A JP2001137837A (en) 1999-11-15 1999-11-15 Treating device for water containing volatile organic material, and non-polluting treating device for groundwater

Publications (1)

Publication Number Publication Date
JP2001137837A true JP2001137837A (en) 2001-05-22

Family

ID=18160293

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003103109A (en) * 2001-05-29 2003-04-08 Commiss Energ Atom Method and apparatus for selectively removing organic compound having functional group in liquid medium
KR100592981B1 (en) * 2002-01-21 2006-06-23 주식회사 셈테크놀러지 Method for abatement of hazardous gases and hybrid system therefor
KR100709983B1 (en) 2006-08-21 2007-04-20 대전광역시(관리부서:대전과학고등학교) Selectable purifying apparatus for hard-degradable dyed effluent with cold plasma
JP2013202475A (en) * 2012-03-28 2013-10-07 Sumitomo Metal Mining Engineering Co Ltd Method of removing ammonia from ammonia-containing wastewater
CN104865205A (en) * 2015-04-23 2015-08-26 南京大学 Device for detection of concentration of organic matters in water body by combination of low temperature plasma and full spectrum technique
CN112441671A (en) * 2020-11-03 2021-03-05 铜陵有色金属集团股份有限公司 Treatment method for non-ferrous mine ore dressing circulating water volatile gas and application thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003103109A (en) * 2001-05-29 2003-04-08 Commiss Energ Atom Method and apparatus for selectively removing organic compound having functional group in liquid medium
JP4551052B2 (en) * 2001-05-29 2010-09-22 コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ Method and apparatus for selectively removing an organic compound having a functional group in a liquid medium
KR100592981B1 (en) * 2002-01-21 2006-06-23 주식회사 셈테크놀러지 Method for abatement of hazardous gases and hybrid system therefor
KR100709983B1 (en) 2006-08-21 2007-04-20 대전광역시(관리부서:대전과학고등학교) Selectable purifying apparatus for hard-degradable dyed effluent with cold plasma
JP2013202475A (en) * 2012-03-28 2013-10-07 Sumitomo Metal Mining Engineering Co Ltd Method of removing ammonia from ammonia-containing wastewater
CN104865205A (en) * 2015-04-23 2015-08-26 南京大学 Device for detection of concentration of organic matters in water body by combination of low temperature plasma and full spectrum technique
CN112441671A (en) * 2020-11-03 2021-03-05 铜陵有色金属集团股份有限公司 Treatment method for non-ferrous mine ore dressing circulating water volatile gas and application thereof

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