JP2001135672A - Anisotropic conducting connection body, manufacturing method therefor and paste connection material - Google Patents
Anisotropic conducting connection body, manufacturing method therefor and paste connection materialInfo
- Publication number
- JP2001135672A JP2001135672A JP31132999A JP31132999A JP2001135672A JP 2001135672 A JP2001135672 A JP 2001135672A JP 31132999 A JP31132999 A JP 31132999A JP 31132999 A JP31132999 A JP 31132999A JP 2001135672 A JP2001135672 A JP 2001135672A
- Authority
- JP
- Japan
- Prior art keywords
- paste
- connection
- area
- region
- connection material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
Landscapes
- Wire Bonding (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は相対する電極を有す
る被接続部材間が熱硬化性樹脂を含むペースト状接続材
料を介在させて接続された異方性導電接続体、およびそ
の製造方法ならびにペースト状接続材料に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anisotropic conductive connector in which members to be connected having opposing electrodes are connected via a paste-like connecting material containing a thermosetting resin, a method of manufacturing the same, and a paste. It relates to a connection material in a shape.
【0002】[0002]
【従来の技術】半導体装置を回路基板に実装する技術と
して、ICやLSIのベアチップ等の半導体素子を異方
性導電接続材料により直接基板に接続する方法がある。
この方法では半導体素子と基板の電極を対向させ、両者
の間隙に異方性導電接続材料を介在させて熱圧着により
硬化させ接続を行っている。LCD(液晶ディスプレ
イ)ではガラス基板上のITO(Indium Tin Oxide)膜と
ドライバーICのICチップやTCP(Tape Carrier P
ackage)との接続などが同様に接続されている。また一
般のプリント回路基板とFPC(フレキシブルプリント
基板)との接続も同様に行われている。2. Description of the Related Art As a technique for mounting a semiconductor device on a circuit board, there is a method of directly connecting a semiconductor element such as a bare chip of an IC or an LSI to the board by using an anisotropic conductive connection material.
In this method, a semiconductor element and an electrode of a substrate are opposed to each other, and an anisotropic conductive connection material is interposed in a gap between the semiconductor element and the semiconductor element to be cured by thermocompression to perform connection. In LCD (Liquid Crystal Display), an ITO (Indium Tin Oxide) film on a glass substrate and an IC chip of driver IC or TCP (Tape Carrier P)
ackage) and so on. The connection between a general printed circuit board and an FPC (flexible printed circuit board) is also made in the same manner.
【0003】このような被接続部材の接続材料として、
異方性導電ペースト(以下、ACPという場合があ
る)、絶縁ペースト(以下、NCPという場合があ
る)、異方性導電膜(以下、ACFという場合がある)
などがある。このうちNCPは熱硬化性樹脂を含有する
接着剤成分を含むペーストであり、またACPは熱硬化
性樹脂を含有する接着剤成分と導電性粒子とを含むペー
ストであり、どちらもディスペンサ等により吐出して使
用される。ACFはACPと同様に熱硬化性樹脂を含有
する接着剤成分と導電性粒子を含む系であって、剥離フ
ィルム上に塗布して乾燥させフィルム状にしたものであ
り、剥離フィルムから必要な大きさに切り出して使用さ
れる。[0003] As a connection material for such a connected member,
Anisotropic conductive paste (hereinafter sometimes referred to as ACP), insulating paste (hereinafter sometimes referred to as NCP), anisotropic conductive film (hereinafter sometimes referred to as ACF)
and so on. NCP is a paste containing an adhesive component containing a thermosetting resin, and ACP is a paste containing an adhesive component containing a thermosetting resin and conductive particles, both of which are discharged by a dispenser or the like. Used as ACF is a system containing an adhesive component containing a thermosetting resin and conductive particles, similar to ACP, and is coated on a release film and dried to form a film. Cut out and used.
【0004】ACPおよびNCPのようなペースト状接
続材料とACFはそれぞれの特性に合わせて使用されて
おり、一般にACFは所定寸法に切り出して使用できる
ため、必要量を必要個所に比較的正確に分配して接続で
きる。これに対し、ペースト状接続材料は必要量を吐出
しても流動状態にあるため必要個所に正確に分配するこ
とは困難である。[0004] Paste-like connecting materials such as ACP and NCP and ACF are used in accordance with their respective characteristics. Generally, ACF can be cut out to a predetermined size and used, so that a necessary amount is relatively accurately distributed to a necessary place. You can connect. On the other hand, since the paste-like connection material is in a fluid state even when the required amount is discharged, it is difficult to accurately distribute the paste-like connection material to a required portion.
【0005】一般にペースト状接続材料による接続はデ
ィスペンサによりペースト状接続材料を基板の接続領域
の中心部に吐出し、被接続部材を重ねて熱圧着して行わ
れている。この場合ペースト状接続材料は流動状態にあ
るため、ペースト状接続材料は円形に広がって行く。被
接続部材である基板や半導体素子は通常四辺形に形成さ
れているため、両者を接続する接続領域は通常四辺形に
なる。このため熱圧着によりペースト状接続材料の一部
は接続領域の辺部からはみ出す。[0005] Generally, the connection using the paste-like connection material is performed by discharging the paste-like connection material to the central portion of the connection region of the substrate by a dispenser, stacking the members to be connected, and thermocompression bonding. In this case, since the paste-like connection material is in a fluid state, the paste-like connection material spreads in a circular shape. Since the substrate or the semiconductor element as the member to be connected is usually formed in a quadrilateral, the connection region connecting the two usually has a quadrilateral. Therefore, a part of the paste-like connection material protrudes from the side of the connection region by thermocompression bonding.
【0006】この状態で熱圧着を続けてペースト状接続
材料を硬化させると、接続領域の周辺部の狭い領域には
熱が伝わるため硬化が起こるが、この硬化可能領域外に
はみ出したペースト状接続材料は未硬化のまま残留す
る。ところが未硬化のペースト状接続材料には塩素イオ
ン等の不純物が存在するため電蝕が起こり、被接続部材
の電蝕が発生する。これを避けるために辺部からはみ出
さない量のペースト状接続材料を用いると、角部におけ
るペースト状接続材料が不足して、角部の接続が不十分
になるなどの問題点がある。When the paste-like connection material is cured by continuing thermocompression bonding in this state, the heat is transmitted to a narrow area around the connection area, so that the paste is hardened. The material remains uncured. However, since the uncured paste-like connection material contains impurities such as chlorine ions, electric corrosion occurs, and electric corrosion of the connected member occurs. If an amount of the paste-like connecting material that does not protrude from the side is used to avoid this, there is a problem that the paste-like connecting material at the corner is insufficient and the connection at the corner is insufficient.
【0007】[0007]
【発明が解決しようとする課題】本発明の課題は、ペー
スト状接続材料を用いる接続において、ペースト状接続
材料が未硬化のまま残留せず、しかも被接続部材の全接
続領域において優れた電気的接続および機械的固着性が
得られる異方性導電接続体を提供することである。本発
明の他の課題は、上記のような異方性導電接続体を効率
よく製造することができる製造方法およびそのためのペ
ースト状接続材料を提供することである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a connection using a paste-like connecting material, in which the paste-like connecting material does not remain uncured and remains excellent in the entire connection region of the member to be connected. An object of the present invention is to provide an anisotropic conductive connection body which can provide connection and mechanical fixation. Another object of the present invention is to provide a production method capable of efficiently producing the above-described anisotropic conductive connection body and a paste-like connection material therefor.
【0008】[0008]
【課題を解決するための手段】本発明は次の異方性導電
接続体、その製造方法およびペースト状接続材料であ
る。 (1) 相対する電極を有する被接続部材を、両者間に
介在させたペースト状接続材料の硬化物により接続した
異方性導電接続体において、前記ペースト状接続材料は
下記式(I)で示されるYの1.1〜1.5倍量であっ
て、接続領域の間隙に充満し、かつ接続領域周辺部の硬
化可能領域に実質的に均一に分布して硬化していること
を特徴とする異方性導電接続体。SUMMARY OF THE INVENTION The present invention relates to the following anisotropic conductive connector, a method for producing the same, and a paste-like connecting material. (1) In an anisotropic conductive connector in which connected members having opposing electrodes are connected by a cured product of a paste-like connecting material interposed therebetween, the paste-like connecting material is represented by the following formula (I). 1.1 to 1.5 times the amount of Y which is filled in the gaps of the connection region, and is substantially uniformly distributed and cured in the curable region around the connection region. Anisotropic conductive connectors.
【数3】 Y=(一方の被接続部材の電極の高さ+他方の被接続部材の電極の高さ)× 接続領域の面積 …(I) (2) 被接続部材が回路基板および/または半導体素
子である上記(1)記載の異方性導電接続体。 (3) 相対する電極を有する被接続部材を、両者間に
介在させたペースト状接続材料の硬化により接続した異
方性導電接続体の製造方法において、前記式(I)で示
されるYの1.1〜1.5倍量のペースト状接続材料
を、熱圧着により流動したときに接続領域の全域と硬化
可能領域に分配されるような塗布領域に塗布して被接続
部材を熱圧着することを特徴とする異方性導電接続体の
製造方法。 (4) ペースト状接続材料の一部を接続領域内の塗布
領域に塗布し、他の一部を接続領域の対角線状に吐出し
て熱圧着を行う上記(3)記載の方法。 (5) ペースト状接続材料を塗布する塗布領域は接続
領域内の70〜95%の領域である上記(4)記載の方
法。 (6) ペースト状接続材料を対角線状に吐出する吐出
長は対角線の80〜100%の長さである上記(4)ま
たは(5)記載の方法。 (7) ペースト状接続材料の均一塗布分と対角線状吐
出分の容量比は1:0.4〜1:1.7である上記
(4)ないし(6)のいずれかに記載の方法。 (8) 相対する電極を有する被接続部材間に介在さ
せ、硬化させて異方性導電接続体を製造するためのペー
スト状接続材料であって、熱硬化性樹脂を含有する接着
剤成分を含み、固有粘度が1〜1000Pa・sである
ペースト状接続材料。 (9) 接着剤成分とともに導電性粒子を含む上記
(8)記載のペースト状接続材料。Y = (height of electrode of one connected member + height of electrode of other connected member) × area of connection region (I) (2) The connected member is a circuit board and / or The anisotropic conductive connector according to the above (1), which is a semiconductor element. (3) In a method for manufacturing an anisotropic conductive connector in which connected members having opposing electrodes are connected by curing a paste-like connecting material interposed therebetween, the Y of 1 represented by the formula (I) may be used. .1 to 1.5 times the amount of paste-like connection material applied to an application area that is distributed to the entire connection area and the curable area when flowing by thermocompression, and thermocompression-bonds the connected member. A method for producing an anisotropic conductive connector, characterized in that: (4) The method according to the above (3), wherein a part of the paste-like connection material is applied to an application area in the connection area, and another part is discharged diagonally in the connection area to perform thermocompression bonding. (5) The method according to the above (4), wherein the application area for applying the paste-like connection material is an area of 70 to 95% of the connection area. (6) The method according to the above (4) or (5), wherein the discharge length for discharging the paste-like connecting material diagonally is 80 to 100% of the diagonal. (7) The method according to any one of (4) to (6) above, wherein the volume ratio of the uniform application of the paste-like connection material to the diagonal discharge is from 1: 0.4 to 1: 1.7. (8) A paste-like connecting material for producing an anisotropic conductive connection body by being interposed between connected members having opposing electrodes and cured to include an adhesive component containing a thermosetting resin. And a paste-like connecting material having an intrinsic viscosity of 1 to 1000 Pa · s. (9) The paste-like connection material according to the above (8), which contains conductive particles together with the adhesive component.
【0009】本発明において接続の対象となる被接続部
材は、相対する電極、特に多数の電極を有する部材がす
べて対象となる。その中でもLCDのガラス基板に実装
するドライバーICやTCP、あるいは一般の基板に実
装するベアチップ等の半導体チップのように半導体素子
を回路基板に接続する場合に適しているが、通常の回路
基板とFPCの接続のように基板同士、あるいは半導体
素子同士の接続の場合にも適用できる。また被接続部材
は半導体素子と回路基板のように外形が異なり、一方が
接続領域よりも大きい場合に適しているが、両者間に接
続領域が形成される限り、外形が同じものであってもよ
い。In the present invention, the connected members to be connected include all electrodes having opposing electrodes, in particular, members having many electrodes. Among them, it is suitable for connecting a semiconductor element to a circuit board such as a driver IC or TCP mounted on a glass substrate of an LCD or a semiconductor chip such as a bare chip mounted on a general substrate. As in the above connection, the present invention can be applied to the connection between substrates or between semiconductor elements. Also, the connected member has a different outer shape like a semiconductor element and a circuit board, and is suitable when one is larger than the connection region. However, as long as the connection region is formed between the two, the connected member may have the same outer shape. Good.
【0010】ペースト状接続材料は熱硬化性樹脂を含有
する接着剤成分を含み、このペースト状接続材料を接続
領域の被接続部材間に介在させ、両側から加圧して相対
する電極を押しつけて接触させ、接着剤成分を電極の存
在しない部分に集めた状態で硬化させて接着することに
より、電気的接続と機械的固着を行うように構成され
る。ペースト状接続材料は導電性粒子を含まないNCP
であってもよく、また導電性粒子を含むACPであって
もよい。このため電極間はNCPにより直接接触させて
もよく、またACPにより導電性粒子を存在させて接触
させてもよい。スタッドバンプのように電極の突出部の
面積が小さい場合(例えば1000μm2以下の場合)
に直接接触させることができるが、電極面積が大きい場
合には導電性粒子を存在させるのが好ましい。導電性粒
子を存在させるためには接着剤成分中に導電性粒子を配
合する。The paste-like connection material contains an adhesive component containing a thermosetting resin. The paste-like connection material is interposed between the connected members in the connection area, and is pressed from both sides to press the opposing electrodes to make contact. Then, the adhesive component is cured and adhered in a state where the adhesive component is gathered in a portion where no electrode is present, so that electrical connection and mechanical fixation are performed. Paste-like connection material is NCP without conductive particles
Or an ACP containing conductive particles. Therefore, the electrodes may be brought into direct contact with each other by NCP, or may be brought into contact with conductive particles by ACP. When the area of the protruding portion of the electrode is small like a stud bump (for example, when it is 1000 μm 2 or less)
Can be directly contacted, but it is preferable that conductive particles be present when the electrode area is large. In order to make the conductive particles exist, the conductive particles are blended in the adhesive component.
【0011】ペースト状接続材料に用いる熱硬化性樹脂
の主剤樹脂としてはエポキシ樹脂、ウレタン樹脂、フェ
ノール樹脂、水酸基含有ポリエステル樹脂、水酸基含有
アクリル樹脂など、硬化剤との併用により加熱下または
UV等の光照射下に硬化する樹脂が制限なく使用できる
が、特にその硬化温度、時間、保存安定性等のバランス
からエポキシ樹脂が好ましい。エポキシ樹脂としては、
ビスフェノール型エポキシ樹脂、エポキシノボラック樹
脂または分子内に2個以上のオキシラン基を有するエポ
キシ化合物等が使用できる。このほかラジカル重合型の
樹脂であってもよい。これらの樹脂には市販品がそのま
ま使用できる。The main resin of the thermosetting resin used for the paste-like connection material is an epoxy resin, a urethane resin, a phenol resin, a hydroxyl group-containing polyester resin, a hydroxyl group-containing acrylic resin, etc. Although a resin that cures under light irradiation can be used without limitation, an epoxy resin is particularly preferred in view of the balance among the curing temperature, time, storage stability and the like. As epoxy resin,
A bisphenol type epoxy resin, an epoxy novolak resin or an epoxy compound having two or more oxirane groups in a molecule can be used. In addition, a radical polymerization type resin may be used. Commercially available products can be used as such resins.
【0012】上記の熱硬化性樹脂の主剤樹脂は一般に硬
化剤と併用することにより硬化反応を行うことができる
が、主剤樹脂に硬化反応に寄与する官能基が結合してい
る場合は硬化剤を省略することができる。硬化剤として
はイミダゾール、アミン、酸無水物、ヒドラジッド、ジ
シアンジアミド、イソシアネート、これらの変性物な
ど、加熱、光照射等により主剤樹脂と反応して硬化反応
を行うものが使用でき、市販品でもよい。このような硬
化剤としては潜在性硬化剤が好ましい。The main resin of the above-mentioned thermosetting resin can generally perform a curing reaction by being used in combination with a curing agent. However, when a functional group contributing to the curing reaction is bonded to the main resin, the curing agent is used. Can be omitted. As the curing agent, imidazole, amine, acid anhydride, hydrazide, dicyandiamide, isocyanate, modified products thereof, and the like which react with the base resin by heating, light irradiation, or the like to perform a curing reaction can be used, and commercially available products may be used. As such a curing agent, a latent curing agent is preferable.
【0013】潜在性硬化剤は常温における製造、保存な
らびに比較的低温(40〜100℃)による乾燥時には
硬化反応を行わず、硬化温度における加熱加圧(熱圧
着)またはUV等の光照射により硬化反応を行う硬化剤
である。このような潜在性硬化剤としてはイミダゾー
ル、アミン等の上記の硬化剤成分をマイクロカプセル化
したものなどが特に好ましく、市販品をそのまま使用す
ることもできる。熱活性の場合、硬化開始温度としては
80〜150℃のものが好ましい。The latent curing agent does not undergo a curing reaction during production and storage at room temperature and drying at a relatively low temperature (40 to 100 ° C.), and is cured by heating and pressurization (thermocompression bonding) at the curing temperature or light irradiation such as UV. It is a curing agent that performs a reaction. As such a latent curing agent, those obtained by microencapsulating the above curing agent components such as imidazole and amine are particularly preferable, and commercially available products can be used as they are. In the case of thermal activation, the curing start temperature is preferably from 80 to 150C.
【0014】ペースト状接続材料は塗布性を付与するた
めに熱可塑性高分子材料を含んでいてもよい。このよう
な熱可塑性高分子材料としてはフェノキシ樹脂、ポリエ
ステル樹脂、アクリル樹脂、ポリウレタン樹脂、ブチラ
ール樹脂、NBR、SBR等が使用できる。またペース
ト状接続材料の粘度を調整するために無機フィラーを含
むことができる。無機フィラーとしてはシリカ、アルミ
ナ、タルク等が使用できる。このほか本発明の接続材料
にはカップリング剤、老化防止剤等の添加剤を含んでい
てもよい。[0014] The paste-like connecting material may contain a thermoplastic polymer material for imparting applicability. As such a thermoplastic polymer material, phenoxy resin, polyester resin, acrylic resin, polyurethane resin, butyral resin, NBR, SBR and the like can be used. Further, an inorganic filler can be included to adjust the viscosity of the paste-like connecting material. Silica, alumina, talc and the like can be used as the inorganic filler. In addition, the connection material of the present invention may contain additives such as a coupling agent and an antioxidant.
【0015】ペースト状接続材料がACPの場合、AC
Pに用いる導電性粒子としては、半田、ニッケル等の金
属粒子、高分子核材粒子をメッキ等により導電材で被覆
した導電被覆粒子、またはこれらの導電性の粒子を絶縁
性樹脂で被覆した絶縁被覆導電粒子などを含んでいても
よい。これらの導電性粒子の粒径は1〜10μm、好ま
しくは2〜8μmとすることができる。When the paste-like connecting material is ACP, AC
As the conductive particles used for P, metal particles such as solder and nickel, conductive coated particles obtained by coating polymer core material particles with a conductive material by plating or the like, or insulating materials obtained by coating these conductive particles with an insulating resin. It may include coated conductive particles and the like. The particle size of these conductive particles can be 1 to 10 μm, preferably 2 to 8 μm.
【0016】上記各成分の配合割合は次の通りとするこ
とができる。接着剤成分中の熱可塑性高分子材料は熱硬
化性樹脂に対して0〜40重量%、好ましくは1〜30
重量%、無機フィラーは0〜70重量%、好ましくは0
〜50重量%、他の添加剤は樹脂成分の合計量に対して
0〜10重量%、好ましくは1〜5重量%とすることが
できる。導電性粒子の配合割合はこれらの接着剤成分の
合計に対し0〜40容量%、好ましくは1〜30容量%
である。The mixing ratio of the above components can be as follows. The thermoplastic polymer material in the adhesive component is 0 to 40% by weight, preferably 1 to 30% by weight based on the thermosetting resin.
% By weight, and 0 to 70% by weight, preferably 0
The other additives may be 0 to 10% by weight, preferably 1 to 5% by weight, based on the total amount of the resin components. The mixing ratio of the conductive particles is 0 to 40% by volume, preferably 1 to 30% by volume based on the total of these adhesive components.
It is.
【0017】本発明で使用するペースト状接続材料は上
記のような成分であり、その25℃における固有粘度は
1〜1000Pa・s、好ましくは1〜200Pa・s
とされる。このような粘度のペーストは気泡の発生を防
止するため溶剤を含んでいないのが好ましい。各成分の
種類および配合割合を選択することにより、特に無機フ
ィラーの配合割合を変えることにより、上記粘度に調整
することができる。The paste-like connecting material used in the present invention has the above-mentioned components, and has an intrinsic viscosity at 25 ° C. of 1 to 1000 Pa · s, preferably 1 to 200 Pa · s.
It is said. The paste having such a viscosity preferably does not contain a solvent in order to prevent generation of bubbles. The above viscosity can be adjusted by selecting the type and blending ratio of each component, particularly by changing the blending ratio of the inorganic filler.
【0018】上記のペースト状接続材料を被接続部材の
接続領域に塗布して被接続部材を熱圧着すると、ペース
ト状接続材料は周辺方向に広がる。この場合、ペースト
状接続材料は抵抗の少ない方向に流れ、一般的には円形
に広がり、接続領域が四辺形の場合、辺部と角部で差が
生じる。被接続部材間の間隙にペースト状接続材料が完
全に充満するためには、ペースト状接続材料は過剰量必
要であり、本発明では前記式(1)のYの1.1〜1.
5倍量を用いる。When the paste-like connecting material is applied to the connection region of the member to be connected and the member to be connected is thermocompression-bonded, the paste-like connecting material spreads in the peripheral direction. In this case, the paste-like connection material flows in a direction with low resistance, generally spreads in a circular shape, and when the connection region is a quadrilateral, a difference occurs between the side and the corner. In order to completely fill the gap between the connected members with the paste-like connecting material, an excessive amount of the paste-like connecting material is necessary. In the present invention, 1.1 to 1..
Use 5 volumes.
【0019】このように過剰量のペースト状接続材料を
接続領域の中心部に塗布して熱圧着すると、ペースト状
接続材料はほぼ円形に広がるため、辺部においてペース
ト状接続材料がはみ出すが、はみ出部が大きくなると、
熱圧着時に熱が伝わらなくて未硬化のまま残る部分が生
じる。これを避けるために本発明では、ペースト状接続
材料が熱圧着により流動したときに、接続領域の全域と
その周辺の硬化可能領域のみに分配され、硬化可能領域
より外に流出しないような塗布領域に塗布して、被接続
部材を熱圧着する。When an excessive amount of the paste-like connection material is applied to the center of the connection region and thermocompression-bonded, the paste-like connection material spreads in a substantially circular shape. When the department gets bigger,
During thermocompression bonding, heat is not transmitted, and there is a portion that remains uncured. In order to avoid this, in the present invention, when the paste-like connection material flows by thermocompression bonding, the paste-like connection material is distributed only to the entire connection region and the surrounding curable region, and does not flow out of the curable region. And the member to be connected is thermocompression-bonded.
【0020】上記の接続領域は被接続部材を対向させて
ペースト状接続材料で接続を行う領域であり、基板に半
導体素子を接続する場合は両者が重なる領域、すなわち
半導体素子の外形により区画される領域である。硬化可
能領域はこのような接続領域に熱圧着ヘッドを当てて熱
圧着したときに、周辺部に熱が伝導してペースト状接続
材料が硬化する領域であり、条件によって異なるが、一
般的には接続領域の境界部から2mm以内、好ましくは
1mm以内の領域である。このような硬化可能領域内に
過剰のペースト状接続材料が流出した場合には、硬化に
より接続領域の周辺部にフィレットが形成され、接続領
域を保護する。そして硬化可能領域外にペースト状接続
材料が流出しないため未硬化部は残留せず、マイグレー
ションによる短絡を防止する。The connection region is a region where the members to be connected are opposed to each other and a connection is made with a paste-like connection material. When a semiconductor element is connected to a substrate, the two are overlapped with each other, that is, defined by the outer shape of the semiconductor element. Area. The curable region is a region where when the thermocompression bonding head is applied to such a connection region and thermocompression bonding is performed, heat is conducted to the peripheral portion to cure the paste-like connection material. It is an area within 2 mm, preferably within 1 mm from the boundary of the connection area. If excess paste-like connection material flows into such a curable region, the curing forms a fillet around the connection region to protect the connection region. Since the paste-like connecting material does not flow out of the curable region, the uncured portion does not remain, thereby preventing a short circuit due to migration.
【0021】塗布領域は接続領域内にペースト状接続材
料を塗布して熱圧着したときに、ペースト状接続材料が
流動して接続領域の間隙に充満し、かつ過剰分が流出す
る際硬化可能領域に均一に分配され、接続領域の外側に
均一なフィレットを形成できるような領域である。この
ような領域はペースト状接続材料の粘度、流動性、被接
続部材の構造等により変わるが、一般的には接続領域よ
り内側に後退した領域であり、角部より辺部で後退幅が
大きくなる形状である。In the application area, when the paste-like connection material is applied in the connection area and thermocompression-bonded, the paste-like connection material flows and fills the gap between the connection areas, and when the excess flows out, the curable area is formed. The area is such that a uniform fillet can be formed outside the connection area. Such a region varies depending on the viscosity of the paste-like connection material, the fluidity, the structure of the connected member, and the like, but is generally a region receding inward from the connection region, and the receding width is larger at the side than at the corner. Shape.
【0022】このような塗布領域にペースト状接続材料
を塗布する好ましい方法として、ペースト状接続材料の
一部を接続領域内の塗布領域に印刷等により均一に塗布
し、他の一部を接続領域の対角線状に吐出して熱圧着を
行うことができる。塗布領域は接続領域が縮小した任意
の領域であり、一般的には相似形の領域が好ましい。対
角線状に吐出するペースト状接続材料は印刷等により均
一に塗布されたペースト状接続材料に重ねて吐出するも
ので塗布領域を超えてさらに外側に吐出するのが好まし
い。As a preferred method of applying the paste-like connection material to such an application area, a part of the paste-like connection material is uniformly applied to the application area in the connection area by printing or the like, and the other part is applied to the connection area. To perform thermocompression bonding. The application region is an arbitrary region in which the connection region is reduced, and a region having a similar shape is generally preferable. The paste-like connecting material discharged in a diagonal shape is discharged in such a manner as to overlap the paste-like connecting material uniformly applied by printing or the like, and is preferably discharged further outside beyond the application region.
【0023】ペースト状接続材料を印刷等により均一に
塗布する塗布領域は接続領域の70〜95%の面積の縮
小領域とするのが好ましい。対角線状に吐出する吐出長
は対角線の80〜100%の長さであることが好まし
い。またペースト状接続材料の印刷による塗布分と、対
角線状の吐出分の容量比は1:0.4〜1.7とするの
が好ましい。The application region where the paste-like connection material is uniformly applied by printing or the like is preferably a reduced region having an area of 70 to 95% of the connection region. It is preferable that the discharge length for discharging diagonally is 80 to 100% of the diagonal. Further, it is preferable that the volume ratio of the application amount of the paste-like connection material by printing and the diagonal ejection amount is 1: 0.4 to 1.7.
【0024】上記のような塗布領域にペースト状接続材
料を塗布して被接続部材を熱圧着すると、ペースト状接
続材料は流動して接続領域に充満し、過剰分は周辺部の
硬化可能領域に均一に流出して硬化し、フィレットが形
成されて、異方性導電接続体が得られる。過剰分の流出
は硬化可能領域に限られるから、未硬化分は残留せず、
電蝕による絶縁不良は発生しない。またフィレットは接
続領域の周囲に均一に形成され、接続部を保護する。When the paste-like connection material is applied to the application region as described above and the member to be connected is thermocompression-bonded, the paste-like connection material flows and fills the connection region, and the excess portion is applied to the peripheral curable region. It flows out and hardens uniformly to form a fillet, and an anisotropic conductive connection is obtained. Since the excess spill is limited to the curable area, the uncured part does not remain,
No insulation failure due to electrolytic corrosion occurs. Also, the fillet is formed uniformly around the connection area to protect the connection.
【0025】こうして得られる異方性導電接続体は被接
続部材はペースト状接続材料により接続されるため機械
的固着とともに、対向する電極間は電気的接続が得ら
れ、隣接する電極間は絶縁性を保ち、異方導電性が得ら
れる。In the thus obtained anisotropic conductive connector, the members to be connected are connected by the paste-like connecting material, so that the members are mechanically fixed, and electrical connection is obtained between the opposing electrodes, and insulating property is provided between the adjacent electrodes. And anisotropic conductivity is obtained.
【0026】[0026]
【発明の効果】本発明の異方性導電接続体の製造方法
は、特定の過剰量のペースト状接続材料を特定の塗布領
域に塗布して熱圧着するようにしたので、接続領域の間
隙にペースト状接続材料を充満させ、過剰分を接続領域
の周辺部に均一に分配させてフィレットを形成すること
ができ、これにより機械的固着および電気的接続性に優
れ、未硬化物による電蝕の生じない異方性導電接続体を
効率的に製造することができる。According to the method of manufacturing an anisotropic conductive connector of the present invention, a specific excess amount of paste-like connecting material is applied to a specific application region and thermocompression-bonded. Filling the paste-like connection material and uniformly distributing the excess to the periphery of the connection area can form a fillet, which provides excellent mechanical fixation and electrical connectivity, and prevents corrosion due to uncured material. An anisotropic conductive connector that does not occur can be efficiently manufactured.
【0027】ペースト状接続材料の一部を印刷し、他の
一部を対角線状に吐出して熱圧縮することにより、上記
のペースト状接続材料の分配を容易に行うことができ、
塗布面積、塗布量を変えることにより、異種の接続体の
製造に対応することが可能になる。By printing a part of the paste-like connecting material and discharging the other part diagonally and thermally compressing the paste-like connecting material, the paste-like connecting material can be easily distributed.
By changing the application area and the application amount, it becomes possible to cope with the manufacture of different types of connectors.
【0028】本発明のペースト状接続材料は、特定の成
分と固有粘度を有するため、上記の製造を効率よく行う
ことが可能になる。本発明の異方性導電接続体は、上記
方法で製造されるため、接続領域の間隙にペースト状接
続材料を充満させ、過剰分を接続領域の周辺部に均一に
分配させてフィレットを形成することができ、これによ
り機械的固着および電気的接続性に優れ、未硬化物によ
る電蝕の生じない異方性導電接続体が得られる。Since the paste-like connecting material of the present invention has a specific component and an intrinsic viscosity, the above-mentioned production can be performed efficiently. Since the anisotropic conductive connector of the present invention is manufactured by the above-described method, the gap in the connection region is filled with the paste-like connection material, and the excess is uniformly distributed to the periphery of the connection region to form a fillet. As a result, an anisotropic conductive connector excellent in mechanical fixation and electrical connectivity and free from electric corrosion by an uncured material can be obtained.
【0029】[0029]
【発明の実施の形態】以下、本発明の実施の形態を図面
により説明する。図1(a)は実施形態の異方性導電接
続体の接続前の断面図、(b)は接続後の断面図であっ
て図2(a)のA−A相当断面図、図2(a)、(b)
は実施形態の、(c)、(d)は比較例の接続前の平面
透視図による説明図である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1A is a cross-sectional view of the anisotropic conductive connector of the embodiment before connection, FIG. 1B is a cross-sectional view after connection, and is a cross-sectional view corresponding to AA in FIG. a), (b)
FIGS. 4C and 4D are explanatory views of a comparative example, which are plan perspective views before connection.
【0030】図1および図2(a)において、1は一方
の被接続部材となる回路基板であって、その表面に先端
部が電極2となる回路パターン3が形成されている。4
は他方の被接続部材となる半導体素子としてのICチッ
プ4であって、バンプのような電極5を有する。電極5
はICチップ4の周辺部の電極2に対向する位置に設け
られている。一方の被接続部材であるICチップ4は他
方の被接続部材である基板1より小さい外形を有し、両
者の重なる部分すなわちICチップ4の外形に相当する
領域が接続領域vとして、ペースト状接続材料6により
接続される。ペースト状接続材料がACPの場合は接着
剤成分11、導電性粒子12からなり、NCPの場合は
導電性粒子は含まれない。電極2、5は接続領域vの周
辺部の全域にわたって設けられ、回路パターン3は電極
2から上下、左右の全方向に伸びているが、図2では
(a)に一部のみ図示され、他は省略されている。In FIG. 1 and FIG. 2A, reference numeral 1 denotes a circuit board serving as one connected member, and a circuit pattern 3 having an electrode 2 at the tip is formed on the surface of the circuit board. 4
Is an IC chip 4 as a semiconductor element serving as the other connected member, and has an electrode 5 such as a bump. Electrode 5
Is provided at a position facing the electrode 2 in the peripheral portion of the IC chip 4. The IC chip 4 as one of the connected members has an outer shape smaller than that of the substrate 1 as the other connected member, and a portion where both of them are overlapped, that is, a region corresponding to the outer shape of the IC chip 4 is defined as a connection region v as a paste-like connection. Connected by material 6. When the paste-like connecting material is ACP, the paste-like connecting material is composed of the adhesive component 11 and the conductive particles 12, and when the paste-like connecting material is NCP, the conductive particles are not included. The electrodes 2 and 5 are provided over the entire periphery of the connection region v, and the circuit pattern 3 extends from the electrode 2 in all directions, up and down, left and right, but only a part is shown in FIG. Has been omitted.
【0031】ペースト状接続材料6は図1(a)に示す
ように、基板1およびICチップ4間の間隙7の塗布領
域uに塗布され、基板1とICチップ4を重ねて、x、
y方向に熱圧着することにより間隙7に充満し、さらに
周辺方向に流動して接続領域vの外側の硬化可能領域w
に均一に流動して硬化し、接続領域vの外側に均一なフ
ィレット8を形成する。As shown in FIG. 1A, the paste-like connecting material 6 is applied to an application area u of a gap 7 between the substrate 1 and the IC chip 4, and the substrate 1 and the IC chip 4 are superimposed and x,
The gap 7 is filled by thermocompression bonding in the y-direction, and further flows in the peripheral direction, and the curable area w outside the connection area v
To form a uniform fillet 8 outside the connection region v.
【0032】これにより電極2、5間に導電性粒子12
が挟まった状態で、または電極2、5が直接接触した状
態で接着剤成分11が硬化し、これにより基板1、IC
チップ4間の機械的固着とともに、対向する電極方向の
電気的接続が得られ、隣接する電極2,2間または5,
5間は導電性粒子12は分散しているか、または存在し
ていないため、絶縁性が保たれ、異方性導電接続体10
が製造される。接続領域v外に流出するペースト状接続
材料6は硬化可能領域w内に均一に流出するため熱圧着
時に硬化し、フィレット8を形成して接続領域vの周囲
を保護し、水分の浸入による剥離等を防止する。As a result, the conductive particles 12 are placed between the electrodes 2 and 5.
The adhesive component 11 is cured in a state where the electrodes 2 and 5 are in direct contact with each other, so that the substrate 1 and the IC
Along with the mechanical fixation between the chips 4, an electrical connection in the direction of the opposing electrodes is obtained, and between the adjacent electrodes 2, 2 or 5.
5, the conductive particles 12 are dispersed or absent, so that insulation is maintained and the anisotropic conductive connector 10
Is manufactured. The paste-like connection material 6 flowing out of the connection region v hardens at the time of thermocompression to uniformly flow into the curable region w, forms a fillet 8 to protect the periphery of the connection region v, and peels off due to ingress of moisture. And so on.
【0033】従来の製造方法ではペースト状接続材料6
は接続領域vの中心部にディスペンサにより吐出して熱
圧着が行われたため、円形に広がり、角部13にペース
ト状接続材料6が充満しないか、あるいは角部13にペ
ースト状接続材料6が充満するようにペースト状接続材
料6を吐出すると、辺部14のはみ出しが多くなり未硬
化部が残ってパターン3の電蝕が起こる。そこで図2
(c)に示すようにペースト状接続材料6の塗布領域u
を接続領域vの内側に相似形にし、印刷等により均一に
ペースト状接続材料6を塗布して熱圧着すると、ペース
ト状接続材料6の流出した外周部sは角部13に充満せ
ず導通不良を生じる。一方、図2(d)に示すように対
角線状にペースト状接続材料6を塗布するとペースト状
接続材料6の外周部sは辺部14に充満しない。In the conventional manufacturing method, the paste-like connecting material 6 is used.
Is discharged by a dispenser at the center of the connection region v and subjected to thermocompression bonding, so that it spreads in a circular shape and the corner 13 is not filled with the paste-like connection material 6 or the corner 13 is filled with the paste-like connection material 6 When the paste-like connection material 6 is discharged in such a manner, the protrusion of the side portion 14 increases, an uncured portion remains, and electrolytic corrosion of the pattern 3 occurs. So Figure 2
As shown in (c), the application region u of the paste-like connection material 6 is applied.
When the paste-like connection material 6 is uniformly applied by printing or the like and then thermocompression-bonded, the outer peripheral portion s from which the paste-like connection material 6 flows out is not filled in the corner portion 13 and the conduction is poor. Is generated. On the other hand, when the paste-like connection material 6 is applied diagonally as shown in FIG. 2D, the outer peripheral portion s of the paste-like connection material 6 does not fill the side portion 14.
【0034】本発明では熱圧着によりペースト状接続材
6が流出した外周部sが硬化可能領域wに一致するよう
にペースト状接続材料6の塗布領域uを決める。ペース
ト状接続材料6の流出方向は基本的には放射方向である
が、抵抗の小さい方向に流れるので、若干辺部14の中
央側に修正された方向に流出する。このため、印刷等に
より均一に塗布する場合は図2(c)と(d)の中間的
な領域として図2(a)に示すように角部13よりも辺
部14の中心側が後退した領域が塗布領域uとなる。In the present invention, the application region u of the paste-like connection material 6 is determined so that the outer peripheral portion s from which the paste-like connection material 6 has flowed out by thermocompression corresponds to the curable region w. Although the outflow direction of the paste-like connection material 6 is basically a radial direction, it flows in a direction in which the resistance is small. For this reason, in the case of uniform application by printing or the like, as shown in FIG. 2A, an area where the center side of the side portion 14 is recessed from the corner portion 13 as an intermediate area between FIGS. 2C and 2D. Is the application area u.
【0035】塗布領域uに塗布するペースト状接続材料
6の量によって外周部sは変わるので、図2(b)に示
すように、接続領域v内の相似形の塗布領域uに一部の
ペースト状接続材料6aを印刷等により均一に塗布し、
その上に接続領域vの対角線方向吐出領域zに他の一部
のペースト状接続材料6bを吐出して熱圧着を行うと、
(a)の場合と同様にペースト状接続材料6の外周部s
は硬化可能領域wと一致する。この場合吐出領域zの長
さ、幅、厚さあるいは形状を変えることにより外周部s
の形状を変えることができるため、基板1、ICチップ
4の形状、構造、その他の条件に合わせて調整が可能で
ある。Since the outer peripheral portion s changes depending on the amount of the paste-like connection material 6 applied to the application region u, as shown in FIG. Coating material 6a is uniformly applied by printing or the like,
When another paste-like connection material 6b is discharged onto the diagonal direction discharge region z of the connection region v and thermocompression bonding is performed thereon,
As in the case of (a), the outer peripheral portion s of the paste-like connection material 6
Corresponds to the curable region w. In this case, by changing the length, width, thickness or shape of the discharge region z, the outer peripheral portion s
Can be adjusted according to the shape, structure, and other conditions of the substrate 1 and the IC chip 4.
【0036】図2(a)、(b)において塗布領域uお
よび吐出領域zの形状は塗布もしくは吐出したペースト
状接続材料の厚さまたは量によって異なる。(b)にお
ける塗布領域uおよび吐出領域zの形状、長さ等も両者
の関係に伴って変わり、塗布領域uは相似形でなくても
よく、また吐出領域zも直線状でなくてもよく、点線状
その他の形状でもよい。2 (a) and 2 (b), the shapes of the application region u and the discharge region z differ depending on the thickness or amount of the applied or discharged paste connection material. The shapes, lengths, and the like of the application region u and the ejection region z in (b) also change according to the relationship between the two, and the application region u may not be similar, and the ejection region z may not be linear. , A dotted line or other shapes.
【0037】[0037]
【実施例】以下、本発明の実施例について説明する。 実施例1〜9、比較例1〜5 エポキシ樹脂(ビスフェノールA型、エポキシ当量13
5〜165g/eq)60重量%、および潜在性硬化剤
(イミダゾール変性型)40重量%を含有する接着剤成
分に対して、無機フィラーとしてシリカ(平均粒径1.
5μm)を30〜50重量%添加して固有粘度を0.9
〜1500Pa・sに調整してペースト状接続材料を調
製したところ、0.9Pa・sではペーストが流れて角
部に充満せず、また150Pa・sではディスペンサに
よる吐出が困難であり、1〜1000Pa・sが良好で
あることがわかった。そこで固有粘度が10Pa・sの
ものを以下のペースト状接続材料に用いた。Embodiments of the present invention will be described below. Examples 1 to 9, Comparative Examples 1 to 5 Epoxy resin (bisphenol A type, epoxy equivalent 13
As an inorganic filler, silica (average particle size: 1.65 g / eq), 60% by weight, and 40% by weight of a latent curing agent (imidazole-modified type) is used as an inorganic filler.
5 .mu.m) and an intrinsic viscosity of 0.9 to 50% by weight.
When the paste-like connection material was prepared by adjusting to 状 1500 Pa · s, the paste flowed at 0.9 Pa · s and did not fill the corners, and at 150 Pa · s, it was difficult to discharge with a dispenser.・ S was found to be good. Therefore, a paste material having an intrinsic viscosity of 10 Pa · s was used for the following paste-like connection material.
【0038】実施例1〜9および比較例1〜2として、
図2(b)に示すように、回路基板とICチップの接続
として、塗布領域uに一部のペースト状接続材料6aを
印刷で均一に塗布し、吐出領域zに他の一部のペースト
状接続材料6bを吐出して190℃、10秒間で熱圧着
した。比較例3は図2(c)のように塗布領域のみにペ
ースト状接続材料6aを印刷で塗布し、比較例4は接続
領域vより広い領域にペースト状接続材料6aを塗布
し、比較例5は図2(d)に示すように対角線方向の吐
出領域zのみペースト状接続材料6bを吐出して熱圧着
した。As Examples 1 to 9 and Comparative Examples 1 and 2,
As shown in FIG. 2 (b), as a connection between the circuit board and the IC chip, a paste-like connecting material 6a is uniformly applied to the application region u by printing, and another paste-like connection material is applied to the discharge region z. The connection material 6b was discharged and thermocompression-bonded at 190 ° C. for 10 seconds. In Comparative Example 3, as shown in FIG. 2C, the paste-like connection material 6a is applied only to the application area by printing, and in Comparative Example 4, the paste-like connection material 6a is applied to an area wider than the connection area v. As shown in FIG. 2 (d), the paste-like connecting material 6b was discharged and thermocompression-bonded only in the discharge region z in the diagonal direction.
【0039】上記により得られた接続体につき次の試験
を行った。マイグレーション試験、85℃、相対湿度8
5%中10Vの電圧を印加し、短絡が500時間を起え
て生じないものを○、100を超え500時間以内に生
じたものを△、100時間以内に生じるものを×とし
た。 PCT(Pressure Cooker Tes
t):110℃、相対湿度85%に維持し、導通不良が
100時間を超えて生じないものを○、50時間を超え
100時間以内に生じたものを△、50時間以内に生じ
たものを×とした。 TCT(Thermal Cycle Test):−
40℃と+100℃をそれぞれ30分間保持するサイク
ルを繰り返し、導通不良が1000サイクルを超えて生
じなかったものを○、100を超え1000サイクル以
内に生じたものを△、100サイクル以内に生じたもの
を×とした。The following test was performed on the connection body obtained as described above. Migration test, 85 ° C, relative humidity 8
A voltage of 10 V in 5% was applied, and when the short circuit did not occur after 500 hours, ○, when it exceeded 100 and within 500 hours, and Δ when it occurred within 100 hours. PCT (Pressure Cooker Tes)
t): Maintained at 110 ° C. and a relative humidity of 85%, 導 通 indicates that conduction failure did not occur for more than 100 hours, Δ indicates that occurred for more than 50 hours and within 100 hours, and Δ indicates that it occurred within 50 hours. X. TCT (Thermal Cycle Test):-
A cycle in which the temperature was maintained at 40 ° C. and + 100 ° C. for 30 minutes each was repeated. ○: No conduction failure occurred for more than 1000 cycles, ○: 100 to 1000 cycles, Δ: 100 cycles Is indicated by x.
【0040】結果を表1に示す。表1において、比較例
1は塗布量が少ないため角部の充填量が少なく不良が発
生した。比較例2は塗布量が多いため辺部の中心部付近
に未硬化部が残留し、多量に付着したり絶縁不良が発生
した。比較例3は角部の充填量が少なく、辺部の中心部
で未硬化部が発生した。比較例4は全体的に未硬化物が
残り、絶縁不良が発生した。比較例5は辺部の初期導通
不良が発生した。これに対し、実施例1〜9はいずれの
テストも合格であった。The results are shown in Table 1. In Table 1, Comparative Example 1 had a small amount of application and therefore had a small amount of filling at the corners, resulting in failure. In Comparative Example 2, since the amount of application was large, an uncured portion remained near the center of the side portion, and a large amount of adhered portion and insulation failure occurred. In Comparative Example 3, the filling amount at the corners was small, and an uncured portion occurred at the center of the side. In Comparative Example 4, an uncured product remained as a whole, and insulation failure occurred. In Comparative Example 5, an initial conduction defect at the side portion occurred. In contrast, Examples 1 to 9 passed all the tests.
【0041】[0041]
【表1】 *1:図2(b)〜(d)の図番 *2:全塗布量=式(I)のYの容量倍 *3:塗布領域=接続領域の面積に対する% *4:吐出領域=接続領域の対角線の長さに対する% *5:6aの塗布量と6bの吐出量の容量比[Table 1] * 1: Figures in FIGS. 2 (b) to (d) * 2: Total coating amount = times the capacity of Y in formula (I) * 3: Coating area =% of area of connection area * 4: Ejection area = Connection % To the length of the diagonal line of the area * 5: The capacity ratio between the application amount of 6a and the ejection amount of 6b
【図1】(a)は実施形態の異方性導電接続体の接続前
の断面図、(b)は接続後の断面図であって、図2
(a)のA−A相当断面図である。1A is a cross-sectional view before connection of an anisotropic conductive connector according to an embodiment, and FIG. 1B is a cross-sectional view after connection;
It is AA equivalent sectional drawing of (a).
【図2】(a)、(b)は実施形態の、(c)、(d)
は比較例の接続前の平面透視図による説明図である。FIGS. 2 (a) and 2 (b) are (c) and (d) of the embodiment.
FIG. 5 is an explanatory diagram in a perspective plan view before connection in a comparative example.
1 基板 2、5 電極 3 回路パターン 4 ICチップ 6 ペースト状接続材料 7 間隙 8 フィレット 10 異方性導電接続体 11 接着剤成分 12 導伝性粒子 13 角部 14 辺部 DESCRIPTION OF SYMBOLS 1 Substrate 2, 5 electrode 3 Circuit pattern 4 IC chip 6 Paste-like connection material 7 Gap 8 Fillet 10 Anisotropic conductive connector 11 Adhesive component 12 Conductive particle 13 Corner part 14 Side part
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成11年11月26日(1999.11.
26)[Submission Date] November 26, 1999 (1999.11.
26)
【手続補正1】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】0027[Correction target item name] 0027
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【0027】ペースト状接続材料の一部を印刷し、他の
一部を対角線状に吐出して熱圧着することにより、上記
のペースト状接続材料の分配を容易に行うことができ、
塗布面積、塗布量を変えることにより、異種の接続体の
製造に対応することが可能になる。The printed part of the paste-like connecting material, by hot press wear by discharging a part of the other diagonally, can be easily performed distribution of the paste-like connecting material,
By changing the application area and the application amount, it becomes possible to cope with the manufacture of different types of connectors.
【手続補正2】[Procedure amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】0037[Correction target item name] 0037
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【0037】[0037]
【実施例】以下、本発明の実施例について説明する。 実施例1〜9、比較例1〜5 エポキシ樹脂(ビスフェノールA型、エポキシ当量13
5〜165g/eq)60重量%、および潜在性硬化剤
(イミダゾール変性型)40重量%を含有する接着剤成
分に対して、無機フィラーとしてシリカ(平均粒径1.
5μm)を30〜50重量%添加して固有粘度を0.9
〜1500Pa・sに調整してペースト状接続材料を調
製したところ、0.9Pa・sではペーストが流れて角
部に充満せず、また1500Pa・sではディスペンサ
による吐出が困難であり、1〜1000Pa・sが良好
であることがわかった。そこで固有粘度が10Pa・s
のものを以下のペースト状接続材料に用いた。Embodiments of the present invention will be described below. Examples 1 to 9, Comparative Examples 1 to 5 Epoxy resin (bisphenol A type, epoxy equivalent 13
As an inorganic filler, silica (average particle size: 1.65 g / eq), 60% by weight, and 40% by weight of a latent curing agent (imidazole-modified type) is used as an inorganic filler.
5 .mu.m) and an intrinsic viscosity of 0.9 to 50% by weight.
When the paste-like connecting material was prepared by adjusting to ~ 1500 Pa · s, the paste flowed at 0.9 Pa · s and did not fill the corners, and at 1500 Pa · s, it was difficult to discharge with a dispenser. It was found that 1000 Pa · s was good. Therefore, the intrinsic viscosity is 10 Pa · s
Was used for the following paste connection material.
【手続補正3】[Procedure amendment 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】符号の説明[Correction target item name] Explanation of sign
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【符号の説明】 1 基板 2、5 電極 3 回路パターン 4 ICチップ 6 ペースト状接続材料 7 間隙 8 フィレット 10 異方性導電接続体 11 接着剤成分 12 導電性粒子 13 角部 14 辺部[EXPLANATION OF SYMBOLS] 1 substrate 2,5 electrode 3 circuit pattern 4 IC chip 6 pasty bonding material 7 gaps 8 fillets 10 anisotropic conductive connector 11 adhesive component 12 conductive particle 13 corner portion 14 side portion
【手続補正4】[Procedure amendment 4]
【補正対象書類名】図面[Document name to be amended] Drawing
【補正対象項目名】図1[Correction target item name] Fig. 1
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【図1】 FIG.
Claims (9)
者間に介在させたペースト状接続材料の硬化物により接
続した異方性導電接続体において、 前記ペースト状接続材料は下記式(I)で示されるYの
1.1〜1.5倍量であって、接続領域の間隙に充満
し、かつ接続領域周辺部の硬化可能領域に実質的に均一
に分布して硬化していることを特徴とする異方性導電接
続体。 【数1】 Y=(一方の被接続部材の電極の高さ+他方の被接続部材の電極の高さ)× 接続領域の面積 …(I)1. An anisotropic conductive connector in which a member to be connected having opposing electrodes is connected by a cured product of a paste-like connection material interposed therebetween, wherein the paste-like connection material is represented by the following formula (I): 1.1 to 1.5 times the amount of Y represented by the formula, filling the gaps in the connection region, and substantially uniformly distributing and curing in the curable region around the connection region. A characteristic anisotropic conductive connector. Y = (height of the electrode of one connected member + height of the electrode of the other connected member) × area of the connection region (I)
導体素子である請求項1記載の異方性導電接続体。2. The anisotropic conductive connector according to claim 1, wherein the connected member is a circuit board and / or a semiconductor element.
者間に介在させたペースト状接続材料の硬化により接続
した異方性導電接続体の製造方法において、 下記式(I)で示されるYの1.1〜1.5倍量のペー
スト状接続材料を、熱圧着により流動したときに接続領
域の全域と硬化可能領域に分配されるような塗布領域に
塗布して被接続部材を熱圧着することを特徴とする異方
性導電接続体の製造方法。 【数2】 Y=(一方の被接続部材の電極の高さ+他方の被接続部材の電極の高さ)× 接続領域の面積 …(I)3. A method of manufacturing an anisotropic conductive connector in which members to be connected having opposing electrodes are connected by curing a paste-like connecting material interposed therebetween, the method comprising the steps of: 1.1 to 1.5 times the amount of the paste-like connection material is applied to an application area that is distributed to the entire connection area and the curable area when flowed by thermocompression, and the connected member is thermocompression-bonded. A method for manufacturing an anisotropic conductive connector. Y = (height of the electrode of one connected member + height of the electrode of the other connected member) × area of connection region (I)
の塗布領域に塗布し、他の一部を接続領域の対角線状に
吐出して熱圧着を行う請求項3記載の方法。4. The method according to claim 3, wherein a part of the paste-like connection material is applied to the application area in the connection area, and the other part is discharged diagonally of the connection area to perform thermocompression bonding.
は接続領域内の70〜95%の領域である請求項4記載
の方法。5. The method according to claim 4, wherein the application area for applying the paste-like connection material is an area of 70 to 95% of the connection area.
る吐出長は対角線の80〜100%の長さである請求項
4または5記載の方法。6. The method according to claim 4, wherein the discharge length for discharging the paste-like connecting material diagonally is 80 to 100% of the diagonal.
線状吐出分の容量比は1:0.4〜1:1.7である請
求項4ないし6のいずれかに記載の方法。7. The method according to claim 4, wherein a volume ratio of the paste-like connection material to the uniform application and the diagonal discharge is from 1: 0.4 to 1: 1.7.
在させ、硬化させて異方性導電接続体を製造するための
ペースト状接続材料であって、 熱硬化性樹脂を含有する接着剤成分を含み、 固有粘度が1〜1000Pa・sであるペースト状接続
材料。8. An adhesive component containing a thermosetting resin, which is interposed between connected members having opposed electrodes and cured to produce an anisotropic conductive connector. And a paste-like connection material having an intrinsic viscosity of 1 to 1000 Pa · s.
求項8記載のペースト状接続材料。9. The paste-like connection material according to claim 8, comprising conductive particles together with the adhesive component.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008159624A (en) * | 2006-12-20 | 2008-07-10 | Nippon Mektron Ltd | Flip-chip interconnection method by no-flow underfill |
KR101214061B1 (en) * | 2010-08-18 | 2012-12-20 | 한국생산기술연구원 | Method of manufacturing electric connecting structure using low price anisotropic conductive paste |
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JPH1167828A (en) * | 1997-08-25 | 1999-03-09 | Matsushita Electric Ind Co Ltd | Mounting of electronic component with bump |
JPH11148059A (en) * | 1997-09-11 | 1999-06-02 | Hitachi Chem Co Ltd | Adhesive and electronic parts |
JPH11330152A (en) * | 1998-05-19 | 1999-11-30 | Sony Chem Corp | Particle-shaped anisotropic conductive bonding agent |
Cited By (2)
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JP2008159624A (en) * | 2006-12-20 | 2008-07-10 | Nippon Mektron Ltd | Flip-chip interconnection method by no-flow underfill |
KR101214061B1 (en) * | 2010-08-18 | 2012-12-20 | 한국생산기술연구원 | Method of manufacturing electric connecting structure using low price anisotropic conductive paste |
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