JP2001131500A - Double coated adhesive tape for abrasive cloth fixing - Google Patents
Double coated adhesive tape for abrasive cloth fixingInfo
- Publication number
- JP2001131500A JP2001131500A JP31265899A JP31265899A JP2001131500A JP 2001131500 A JP2001131500 A JP 2001131500A JP 31265899 A JP31265899 A JP 31265899A JP 31265899 A JP31265899 A JP 31265899A JP 2001131500 A JP2001131500 A JP 2001131500A
- Authority
- JP
- Japan
- Prior art keywords
- adhesive tape
- separator
- sensitive adhesive
- pressure
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は研磨布固定用両面粘
着テープに関する。The present invention relates to a double-sided adhesive tape for fixing a polishing cloth.
【0002】[0002]
【従来の技術】従来より、レンズ、ガラス、アルミディ
スク、ウェハー等を研磨する方法として、硬質のウレタ
ン発泡体や微細孔を有する合成皮革からなる研磨材を、
ポリシッングマシンの定盤に両面粘着テープで貼合わせ
て設置した研磨布により、研磨する方法が行われてい
る。さらに、被研磨材も両面粘着テープを用いて固定す
る場合がある。2. Description of the Related Art Conventionally, as a method of polishing a lens, glass, an aluminum disk, a wafer, etc., an abrasive made of a hard urethane foam or a synthetic leather having fine pores has been used.
2. Description of the Related Art A method of polishing using a polishing cloth attached to a surface plate of a polishing machine with a double-sided adhesive tape has been used. Further, the material to be polished may be fixed using a double-sided adhesive tape.
【0003】研磨布を固定する両面粘着テープに要求さ
れる性能としては、研磨時に、研磨材、被研磨材及び定
盤を強固に接着し、且つ、酸性やアルカリ性の研磨砥粒
液の存在下で加熱や加圧によって剥がれを生じることが
なく、研磨終了後は定盤から剥離できることである。こ
のため、例えば特開昭63−241086号公報には両
面粘着テープの基材として切断し難い特殊フィルムを採
用した研磨用粘着テープ、特開平6−172721号公
報には強固に接着するため工夫がなされた研磨材固定用
テープ、特開昭61−23673号公報には高温下で極
端に接着力を低下させる粘着剤からなる両面粘着テープ
もしくはシートが、それぞれ提案されている。[0003] The performance required of a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth is as follows. During polishing, the polishing material, the material to be polished and the surface plate are firmly adhered to each other, and the polishing is performed in the presence of an acidic or alkaline polishing liquid. Does not peel off due to heat or pressure, and can be peeled off from the surface plate after polishing. For this reason, for example, JP-A-63-241086 discloses a polishing adhesive tape employing a hard-to-cut special film as a base material of a double-sided adhesive tape, and JP-A-6-172721 discloses a device for firmly adhering. A double-sided pressure-sensitive adhesive tape or sheet made of a pressure-sensitive adhesive which extremely lowers the adhesive force at high temperatures has been proposed in Japanese Patent Laid-Open Publication No. Sho 61-23673.
【0004】最近では、一部の研磨布が巨大化傾向(直
径1.5m以上の円形や0.8m×2.5mの長方形
等)になってきており、特に後者のようなサイズになる
と、両面粘着テープに要求される性能はさらに追加さ
れ、セパレータによって浮きが起こらないことが重要な
要求性能となってきている。この業界では、通常研磨布
と両面粘着テープを貼合わせた後搬送し、研磨メーカー
においてセパレータを剥がして定盤に装着する。In recent years, some polishing cloths have become larger (circles having a diameter of 1.5 m or more, rectangles having a size of 0.8 m × 2.5 m, and the like). The performance required for the double-sided pressure-sensitive adhesive tape is further added, and it is becoming an important required performance that the floating does not occur due to the separator. In this industry, usually, a polishing cloth and a double-sided adhesive tape are bonded and then conveyed, and a polishing maker removes a separator and mounts the separator on a surface plate.
【0005】しかしながら、巨大化した研磨布テープを
搬送するにはロール状に巻回せざるを得ず、このため巻
回物を定盤に装着する際には、巻き戻して一旦平坦にす
る作業が必要となるが、従来から用いられているセパレ
ータでは、腰が強く反発力により浮きが発生して、粘着
剤とセパレータ間でトンネリングを生じ、これに起因し
て粘着面が荒れ、このまま使用すると均一な研磨作業に
支障を来すという問題点があった。However, in order to transport a gigantic polishing cloth tape, it must be wound in a roll shape. For this reason, when the wound material is mounted on a platen, it is necessary to rewind and temporarily flatten the tape. Although it is necessary, in the conventionally used separator, the stiffness is strong and floating occurs due to the repulsive force, tunneling occurs between the adhesive and the separator, the adhesive surface is roughened due to this, and if used as it is, it will be uniform There is a problem that it hinders a smooth polishing operation.
【0006】[0006]
【発明が解決しようとする課題】本発明は、上記問題点
を解決し、両面粘着テープの片面にセパレータが貼付け
られ、もう一方の面に研磨布が貼付けられた状態で巻回
物として出荷されても、定盤に装着する際にセパレータ
の反発力により浮きが起こらない研磨布固定用両面粘着
テープを提供することを目的とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and is shipped as a roll in a state where a separator is attached to one side of a double-sided adhesive tape and an abrasive cloth is attached to the other side. In particular, it is an object of the present invention to provide a double-sided adhesive tape for fixing a polishing cloth, which does not float due to the repulsive force of a separator when mounted on a surface plate.
【0007】[0007]
【課題を解決するための手段】本発明の研磨布固定用両
面粘着テープは、研磨材をポリシッングマシンの定盤に
固定するための両面粘着テープであって、定盤に貼付け
られる粘着面側のセパレータがポリエチレンからなるこ
とを特徴とする。The double-sided pressure-sensitive adhesive tape for fixing a polishing cloth of the present invention is a double-sided pressure-sensitive adhesive tape for fixing an abrasive to a surface plate of a polishing machine. The separator on the side is made of polyethylene.
【0008】上記研磨布固定用両面粘着テープとして
は、基材層の片面には定盤に貼付けるための粘着剤層
(以下、一次面粘着剤層という)が設けられ、もう一方
の面には硬質のウレタン発泡体や微細孔を有する合成皮
革からなる研磨材を貼付けるための粘着剤層(以下、二
次面粘着剤層という)が設けられたものが用いられる。
上記一次面粘着剤層には再剥離性のゴム系又はアクリル
系粘着剤が、二次面粘着剤層には研磨材と接着し易いゴ
ム系又はアクリル系の粘着剤が用いられる。In the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth, a pressure-sensitive adhesive layer (hereinafter, referred to as a primary-surface pressure-sensitive adhesive layer) is provided on one surface of the base material layer, and the other surface is provided on the other surface. The one provided with a pressure-sensitive adhesive layer (hereinafter referred to as a secondary surface pressure-sensitive adhesive layer) for attaching an abrasive made of a hard urethane foam or a synthetic leather having fine pores is used.
For the primary surface pressure-sensitive adhesive layer, a removable rubber-based or acrylic pressure-sensitive adhesive is used, and for the secondary surface pressure-sensitive adhesive layer, a rubber-based or acrylic-based pressure-sensitive adhesive that easily adheres to an abrasive is used.
【0009】上記基材層には、例えば、軟質塩化ビニル
樹脂フィルム、ポリエチレンテレフタレート(PET)
フィルム、ポリウレタンフィルム等の熱可塑性樹脂フィ
ルムが用いられる。中でも、25μm厚程度のPETフ
ィルムが好適である。上記基材層には、粘着剤層との接
着性を向上させるために、コロナ処理が施されてもよ
い。The base material layer may be, for example, a soft vinyl chloride resin film, polyethylene terephthalate (PET)
A thermoplastic resin film such as a film and a polyurethane film is used. Among them, a PET film having a thickness of about 25 μm is preferable. The base material layer may be subjected to a corona treatment in order to improve the adhesiveness with the pressure-sensitive adhesive layer.
【0010】上記定盤に貼付けられる側の粘着面(一次
粘着面)には、粘着剤層を保護するためのセパレータと
してポリエチレンフィルムが用いられる。ポリエチレン
としては、高密度ポリエチレンよりも柔軟性を有する低
密度ポリエチレンが好ましい。上記セパレータの厚み
は、手で剥離する際の作業性の点から100μm以上が
好ましい、しかし、あまり厚くなると腰が強くなって、
巻き戻し時の浮きが大きくなるため、300μm以下が
好ましい。A polyethylene film is used as a separator for protecting the pressure-sensitive adhesive layer on the pressure-sensitive adhesive surface (primary pressure-sensitive surface) on the side attached to the surface plate. As the polyethylene, a low-density polyethylene having more flexibility than a high-density polyethylene is preferable. The thickness of the separator is preferably 100 μm or more from the viewpoint of workability at the time of peeling by hand.
Since the floating at the time of rewinding becomes large, it is preferably 300 μm or less.
【0011】これに対して、ウレタン樹脂フィルム、二
軸延伸ポリプロピレン(OPP)フィルムのセパレータ
は、粘着剤層と接着してセパレータが剥離し難くなる等
の作業性、経時に接着昂進が進行する等の粘着性や、コ
スト等に難があるため、使用が困難である。On the other hand, a separator made of a urethane resin film or a biaxially oriented polypropylene (OPP) film adheres to the pressure-sensitive adhesive layer to make it difficult for the separator to peel off. Is difficult to use because of its poor adhesion and cost.
【0012】もう一方の研磨材を貼付けるための粘着面
(二次粘着面)に用いられるセパレータには特に制限が
ない。There is no particular limitation on the separator used for the adhesive surface (secondary adhesive surface) for attaching the other abrasive.
【0013】上記粘着剤層は、例えば、基材層に粘着剤
を直接塗工する直接塗布法;一旦工程紙に粘着剤を塗布
乾燥して形成した粘着剤層を基材層に貼合わせる転写法
などによって形成することができる。The above-mentioned pressure-sensitive adhesive layer can be formed, for example, by a direct coating method in which a pressure-sensitive adhesive is directly applied to a substrate layer; It can be formed by a method or the like.
【0014】[0014]
【発明の実施の形態】以下に、本発明の実施例を説明す
る。 (実施例)基材層である23μm厚のPETフィルム
(二村化学社製「FE#2002」、両面コロナ処理)
の片面に、一次面粘着剤としてアクリル系粘着剤(綜研
化学社製「SK−1501B」、固形分30重量%)及
び硬化剤(日本ポリウレタン社製「コロネートL−4
5」、固形分45重量%)の液液重量比100:2.5
混合物を乾燥後の厚みが50μmなるように塗工乾燥
し、もう一方の面に二次面粘着剤としてアクリル系粘着
剤(積水化学社製「WHD糊」、固形分40重量%)及
び硬化剤(日本ポリウレタン社製「コロネートL−55
E」、固形分55重量%)の液液重量比100:1.6
混合物を乾燥後の厚みが50μmなるように塗工乾燥し
た。次いで、一次面粘着剤のセパレータとしてポリエチ
レンシート(積水フィルム西日本社製「ポリロンTP−
W」、厚み100μm)を積層し、研磨布固定用両面粘
着テープを得た。Embodiments of the present invention will be described below. (Example) A 23 μm-thick PET film (“FE # 2002” manufactured by Nimura Chemical Co., a double-sided corona treatment) as a base material layer
On one side, an acrylic pressure-sensitive adhesive (“SK-1501B” manufactured by Soken Chemical Co., 30% by weight solid content) as a primary surface pressure-sensitive adhesive and a curing agent (“Coronate L-4” manufactured by Nippon Polyurethane KK)
5 ", solid content: 45% by weight).
The mixture is dried so as to have a thickness of 50 μm after drying, and an acrylic adhesive (“WHD glue” manufactured by Sekisui Chemical Co., Ltd., solid content 40% by weight) and a curing agent are applied to the other surface as a secondary surface adhesive. (Nippon Polyurethane Co., Ltd. "Coronate L-55
E ", solid content 55% by weight).
The mixture was applied and dried so that the thickness after drying was 50 μm. Next, a polyethylene sheet (“Polylon TP- manufactured by Sekisui Film Nishi Nihon Co., Ltd.) was used as a separator for the primary surface adhesive.
W ", thickness 100 µm) to obtain a double-sided adhesive tape for fixing a polishing cloth.
【0015】上記研磨布固定用両面粘着テープをA4サ
イズに切断した後、二次面粘着剤層に研磨布(富士紡績
社製「H7000SPH」)のフィルム面(反対面が研
磨材面)を貼合わせた。次いで、研磨布側が表面となる
ように丸めて巻き輪ゴム止めをして1日間放置した後輪
ゴムを取り外し、セパレータが上側となるように自然状
態で平板上に放置し、さらに60℃、60%RHの条件
で3日間放置した後、セパレータの浮きの有無を目視観
察した。上記評価はサンプル数n=5で行ったところ、
5個のサンプル全てが平坦な状態になり、浮きの発生し
たものは1個も認められなかった。After the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is cut into A4 size, a film surface of a polishing cloth (“H7000SPH” manufactured by Fuji Boseki Co., Ltd.) is applied to the secondary pressure-sensitive adhesive layer. I combined. Next, the polishing pad was rolled so that the polishing cloth side became the surface, and the rubber band was stopped. The rubber band was left to stand for one day, the rubber band was removed, and the plate was left naturally on a flat plate with the separator facing upward. After standing for 3 days under the above conditions, the presence or absence of floating of the separator was visually observed. When the above evaluation was performed with the number of samples n = 5,
All five samples were in a flat state, and none of the samples had floating.
【0016】(比較例)一次面粘着剤層のセパレータと
して、通常の両面粘着テープに使用されている紙セパレ
ータ(サンエー化研社製「WHW−80白」、厚み13
0μm)を用いたこと以外は、実施例1と同様にして研
磨布固定用両面粘着テープを得た。上記研磨布固定用両
面粘着テープについて、実施例1と同様の方法でセパレ
ータの浮きの有無を目視観察したところ、5個のサンプ
ル全てについて浮きの発生が認められた。(Comparative Example) A paper separator ("WHW-80 White" manufactured by San-A Kaken Co., Ltd., having a thickness of 13) used for an ordinary double-sided pressure-sensitive adhesive tape was used as a separator for the primary-side pressure-sensitive adhesive layer.
0 μm), except that a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth was obtained in the same manner as in Example 1. The double-sided pressure-sensitive adhesive tape for fixing the polishing cloth was visually observed for the presence or absence of floating of the separator in the same manner as in Example 1, and the occurrence of floating was observed in all five samples.
【0017】[0017]
【発明の効果】本発明の研磨布固定用両面粘着テープ
は、上述の構成であり、一次面粘着剤層にセパレータが
貼付けられ、二次面粘着剤層に研磨布が貼付けられた状
態で巻回物として出荷されても、定盤に装着する際の巻
き戻し作業においてセパレータの反発力により浮きが起
こらない。The double-sided pressure-sensitive adhesive tape for fixing a polishing cloth of the present invention has the above-mentioned structure, and is wound in a state in which a separator is attached to a primary-side pressure-sensitive adhesive layer and a polishing cloth is adhered to a secondary-side pressure-sensitive adhesive layer. Even if it is shipped as a batch, no lifting will occur due to the repulsive force of the separator in the rewinding work when mounting on a surface plate.
Claims (1)
定するための両面粘着テープであって、定盤に貼付けら
れる粘着面側のセパレータがポリエチレンからなること
を特徴とする研磨布固定用両面粘着テープ。1. A double-sided pressure-sensitive adhesive tape for fixing an abrasive to a surface plate of a polishing machine, wherein the separator on the side of the adhesive surface attached to the surface plate is made of polyethylene. Double-sided adhesive tape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31265899A JP2001131500A (en) | 1999-11-02 | 1999-11-02 | Double coated adhesive tape for abrasive cloth fixing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31265899A JP2001131500A (en) | 1999-11-02 | 1999-11-02 | Double coated adhesive tape for abrasive cloth fixing |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001131500A true JP2001131500A (en) | 2001-05-15 |
Family
ID=18031874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31265899A Pending JP2001131500A (en) | 1999-11-02 | 1999-11-02 | Double coated adhesive tape for abrasive cloth fixing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2001131500A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005054072A (en) * | 2003-08-05 | 2005-03-03 | Toyo Ink Mfg Co Ltd | Double-sided pressure-sensitive adhesive sheet and abrasive cloth layered product |
JP2014088572A (en) * | 2013-12-26 | 2014-05-15 | Toyo Ink Sc Holdings Co Ltd | Double side pressure-sensitive adhesive sheet for fixing polishing material |
-
1999
- 1999-11-02 JP JP31265899A patent/JP2001131500A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005054072A (en) * | 2003-08-05 | 2005-03-03 | Toyo Ink Mfg Co Ltd | Double-sided pressure-sensitive adhesive sheet and abrasive cloth layered product |
JP2014088572A (en) * | 2013-12-26 | 2014-05-15 | Toyo Ink Sc Holdings Co Ltd | Double side pressure-sensitive adhesive sheet for fixing polishing material |
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