JP2001121395A - Spherical surface and nonspherical surface polishing method and device - Google Patents

Spherical surface and nonspherical surface polishing method and device

Info

Publication number
JP2001121395A
JP2001121395A JP29855499A JP29855499A JP2001121395A JP 2001121395 A JP2001121395 A JP 2001121395A JP 29855499 A JP29855499 A JP 29855499A JP 29855499 A JP29855499 A JP 29855499A JP 2001121395 A JP2001121395 A JP 2001121395A
Authority
JP
Japan
Prior art keywords
polished
polishing
linear abrasive
abrasive
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP29855499A
Other languages
Japanese (ja)
Inventor
Toshiyuki Kitade
俊之 北出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP29855499A priority Critical patent/JP2001121395A/en
Publication of JP2001121395A publication Critical patent/JP2001121395A/en
Withdrawn legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To finish-polish into a mirror finished surface without breaking surface shape previously formed with high accuracy by grinding or cutting. SOLUTION: This spherical surface and nonspherical surface polishing device comprises a linear polishing material 1 provided with an abrasive; a feeding part 2 provided with a delivery reel 3 for feeding the linear polishing material 1; a winding part 7 provided with a winding reel 8 for winding the linear polishing material 1 delivered from the feeding part 2, at a specified space from the feeding part 2; and a pressure contact means 12 for forcibly bring the linear polishing material 1 traveling between the feeding part 2 and the winding part 7, into pressure contact with a polished surface.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、球面あるいは非球
面レンズまたはこれらのレンズを成形するレンズ成形用
金型の成形面等の高精度に成形加工された球面あるいは
非球面を、その面形状を崩すことなく鏡面に研磨する方
法と装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a spherical or aspherical surface, such as a spherical or aspherical lens, or a molding surface of a lens molding die for molding such a lens with high precision. The present invention relates to a method and an apparatus for polishing a mirror surface without breaking.

【0002】[0002]

【従来の技術】カメラ等光学機器に用いられるレンズの
形状は平面、凹面および凸面の組合わせで構成され、一
般にその凹凸形状は球面である。このような球面形状を
有するプラスチックレンズの成形用金型は、旋盤加工で
球面形状の加工面を削り出した後、図8に示す方法、す
なわち、研磨材等を貼付け等した磨き皿AをカンザシB
により左右に揺動又はある半径をもって回転駆動させな
がら金型Cを一定回転して加工面Dを研磨するという、
球面のガラスレンズ磨きと同じ方法で、加工面Dがレン
ズの成形仕上面として十分に必要な形状と鏡面に仕上げ
られるものであった。
2. Description of the Related Art The shape of a lens used in an optical device such as a camera is formed by a combination of a flat surface, a concave surface and a convex surface. In the mold for molding a plastic lens having such a spherical shape, after a machined surface of a spherical shape is formed by lathe processing, a polishing plate A on which an abrasive or the like is adhered is used in a method shown in FIG. B
Grinding the processing surface D by rotating the mold C constantly while swinging to the right or left or rotating with a certain radius,
In the same manner as in the case of polishing a spherical glass lens, the processed surface D was finished in a shape and a mirror surface which were sufficiently required as a molded finished surface of the lens.

【0003】一方、この発明が対象とする非球面は、凹
および凸形状が上述のように球面体ではなく、放物面、
双曲面、楕円面などの回転二次曲面からなる放物曲面体
や双曲面体およびこれに類似した形状であり、こうした
非球面体は一点を中心にして刃物又は加工物(金型)を
回転する方式では加工することができない。
On the other hand, the aspherical surface to which the present invention is applied is not a spherical body having concave and convex shapes as described above, but a parabolic surface,
It is a paraboloid or a hyperboloid consisting of a hyperboloid, an ellipsoid, or other revolving quadratic surface, or a shape similar to this. Such an aspheric surface rotates a cutting tool or a workpiece (die) about one point. It is not possible to process with the method that does.

【0004】また、プラスチックレンズ成形用金型のレ
ンズ成形仕上面の代表的な精度は、形状精度で1μ(ミ
クロン)以下で表面粗度で0.05〜0.1s程度を必
要とする。このような条件を得るために従来、非球面の
プラスチックレンズを成形するための金型、つまりレン
ズ成形仕上面が非球面体となっている非球面金型の製作
については次のような加工方式が採用されていた。
A typical precision of a lens molding surface of a plastic lens molding die requires a shape precision of 1 μ (micron) or less and a surface roughness of about 0.05 to 0.1 s. In order to obtain such conditions, conventionally, a mold for molding an aspherical plastic lens, that is, an aspherical mold having an aspherical surface on the lens molding surface has been manufactured by the following processing method. Was adopted.

【0005】先ず、金型素材からNC旋盤にて非球面体
の切削加工面を削り出した後、更にNC研削機にて切削
加工面の非球面研削を行い、こうした切削かつ研削加工
により金型の非球面形状の加工面の精度を形状精度で1
μ以内に、表面粗度で1〜2sに維持する。以上の加工
は、数値制御による切削および研削加工であって、いわ
ば非球面体を創成する加工であり、金型を鏡面に仕上げ
るためにはこの後、非球面形状の加工面を研磨しなけれ
ばならない。問題は、この後の研磨加工で、形状精度を
崩すことなく、研削加工で得た表面粗度1〜2sをレン
ズ成形仕上面として必要な0.05〜0.1sまで、ど
のように磨き上げるかにある。
[0005] First, after a cutting surface of an aspherical body is cut out from a die material by an NC lathe, the aspherical surface of the cutting surface is further subjected to an NC grinding machine, and the die is subjected to such cutting and grinding. The accuracy of the aspherical machined surface of the
Within 1 μm, the surface roughness is maintained at 1-2 s. The above processing is cutting and grinding by numerical control, so to speak, a process to create an aspherical body, and in order to finish the mold to a mirror surface, the aspherical surface must be polished afterwards. No. The problem is how to polish the surface roughness 1-2 s obtained by the grinding process to 0.05-0.1 s, which is necessary for the lens forming surface, without losing the shape accuracy in the subsequent polishing process. There is crab.

【0006】従来用いられている非球面体の研磨法を紹
介すると次の通りである。 (1)手磨き法 図9に示すように、非球面体の形状を崩さないように注
意しながら砥石Eを矢印方向に小きざみに動かして、均
一に手動で磨き込んでいく方法である。この方法は、容
易に手がけられるものであり、拡大鏡等の成形用金型に
はすでに実用化されているが、カメラの撮影レンズ等の
如く高精度の形状が要求されるレンズの成形用金型に
は、面形状の均一性という点で十分満足すべきものが得
られない。この欠陥は、手磨き法が部分的に磨いていく
方法であるため、Fで略示するように砥石Eで磨いた跡
が小さい面の集合体のような面状態となり、ミクロ的に
観ると面全体が多面体となっていて、それら多面体が更
に不均一であるところに起因する。
A polishing method for an aspherical body conventionally used is introduced as follows. (1) Hand polishing method As shown in FIG. 9, this is a method in which the grinding stone E is moved in small steps in the direction of the arrow while carefully taking care not to disturb the shape of the aspherical body, and uniformly polished manually. This method is easy to handle, and has already been put to practical use in molding dies such as magnifying glasses, but it is necessary to use a molding die for a lens requiring a high-precision shape such as a camera lens. A mold that is not sufficiently satisfactory in terms of the uniformity of the surface shape cannot be obtained. Since this defect is a method of partially polishing by the hand polishing method, the mark polished by the grindstone E becomes a surface state like an aggregate of small surfaces as schematically indicated by F. This is because the entire surface is a polyhedron, and the polyhedron is more non-uniform.

【0007】(2)弾性体を備えた磨き皿による研磨法 図10に示すように、磨き皿Aの一部に弾性体Gを用
い、図8に示す球面体の磨き方式と同様にカンザシBを
使用した機械磨きを行う。この磨きは、弾性体Gが伸縮
して加工面Dに常に磨き皿Aが接していることができる
という原理に基づいている。しかし、弾性体の伸縮が一
定でないところから、研磨圧が変動し、加工面にうねり
が生じ易い。また、図11に示すような形状の非球面
H、すなわち半径Rの球面Iに比し非球面の度合いJが
大きい形状の非球面に対しては、弾性材の伸縮にも限度
があり、実際上研磨は不可能である。
(2) Polishing method using a polishing dish provided with an elastic body As shown in FIG. 10, an elastic body G is used for a part of a polishing dish A, and a kansashi B is used in the same manner as the polishing method for a spherical body shown in FIG. Polish the machine using. This polishing is based on the principle that the polishing plate A can always be in contact with the processing surface D by the elastic body G expanding and contracting. However, the polishing pressure fluctuates because the expansion and contraction of the elastic body is not constant, and undulation is likely to occur on the processed surface. Further, for an aspherical surface H having a shape as shown in FIG. 11, that is, an aspherical surface having a larger degree of asphericity J than a spherical surface I having a radius R, there is a limit in the expansion and contraction of the elastic material. Top polishing is not possible.

【0008】(3)風船ポリシャによる磨き法 図12に示すように、ナイロン製のシートに砥粒を塗布
してなる研磨シートKが、伸縮しながら、周辺ダレ防止
リングLに囲まれた金型Cの非球面体の加工面Dに接触
し、図8の磨き皿と同様の動きをする。研磨時の加圧は
通孔Mから流入する空気圧により自由に調節できる。本
方式は図10に示す方式に比較して加工面の均一性が良
好ではある。しかしながら、図11に示すような非球面
の度合いが大きい形状の非球面に対しては、本方式も研
磨シートの伸縮が該非球面に追従できなくなり、均一な
磨きを期待することができない。
(3) Polishing Method Using Balloon Polisher As shown in FIG. 12, a polishing sheet K formed by applying abrasive grains to a nylon sheet is expanded and contracted while a die surrounded by a peripheral sag preventing ring L is provided. It comes into contact with the processing surface D of the aspherical body C, and performs the same movement as the polishing dish of FIG. The pressure during polishing can be freely adjusted by the air pressure flowing from the through hole M. This method has better uniformity of the processed surface than the method shown in FIG. However, with respect to an aspherical surface having a large degree of aspherical surface as shown in FIG. 11, even in this method, the expansion and contraction of the polishing sheet cannot follow the aspherical surface, and uniform polishing cannot be expected.

【0009】[0009]

【発明が解決しようとする課題】非球面のプラスチック
レンズを成形するためには高精度の非球面金型が必要で
ある。ところが、非球面金型加工において、レンズの成
形仕上面となる非球面形状の加工面を切削および研削に
より或程度の精度に削り出すことはできても、加工工作
上、最大の隘路は削り出された非球面形状の加工面に対
する最終の研磨加工にある。
In order to mold an aspherical plastic lens, a highly accurate aspherical mold is required. However, in aspherical mold processing, even though the aspherical surface to be the finished surface of the lens can be cut to a certain degree of precision by cutting and grinding, the largest bottleneck in machining work is cut out. The final polishing process is performed on the processed aspheric surface.

【0010】従来の研磨法によれば、上述したように、
いずれも面接触による加工であり、切削あるいは研削に
よる前工程で得られた加工面の高精度の形状を崩してし
まったり、又は加工できる非球面の形状に制限があると
いう問題があった。
According to the conventional polishing method, as described above,
In each case, the processing is performed by surface contact, and there has been a problem that the high-precision shape of the processed surface obtained in the previous process by cutting or grinding is broken, or the aspherical shape that can be processed is limited.

【0011】本発明は、上述の問題点に鑑みてなされた
もので、NC研削加工あるいはNC切削によって高精度
に形状が形成された球面あるいは非球面レンズ若しくは
これらのレンズを成形するレンズ成形用金型の成形面等
の面形状を崩すことなく、粗度の大きな表面を面粗度の
小さな鏡面に研磨仕上げすることのできる球面、非球面
の研磨方法と装置を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has a spherical or aspherical lens whose shape is formed with high precision by NC grinding or NC cutting, or a lens molding metal for molding these lenses. An object of the present invention is to provide a method and an apparatus for polishing spherical and aspherical surfaces capable of polishing and polishing a surface having a large roughness to a mirror surface having a small surface roughness without breaking a surface shape such as a molding surface of a mold.

【0012】[0012]

【課題を解決するための手段】前記目的を達成するため
に、第1の発明に係る球面、非球面の研磨方法は、研磨
剤を具備する線状研磨材をその送給部と巻取部間におい
て走行させるとともに当該線状研磨材の走行工程間にお
いて、線状研磨材と被研磨面とを相対的に移動して、前
記線状研磨材を被研磨面に強制的に圧接しつつ前記被研
磨面を研磨することを特徴とする。
According to a first aspect of the present invention, there is provided a method for polishing a spherical surface or an aspherical surface, comprising the steps of: feeding a linear abrasive containing an abrasive into a feeding portion and a winding portion; While traveling between the linear abrasives during the traveling process, the linear abrasive and the surface to be polished are relatively moved to each other while the linear abrasive is forcibly pressed against the surface to be polished. The surface to be polished is polished.

【0013】また、第2の発明に係る球面、非球面の研
磨方法は、前記第1の発明にあって、前記研磨剤を具備
する線状研磨材は、金属線、ガラス線、合成繊維あるい
は天然繊維等の線状部材にダイヤモンド、酸化クロムあ
るいは焼成アルミナ等の研磨剤を練り込むか、あるいは
含浸することにより形成したことを特徴とする。
In a second aspect of the present invention, there is provided a method for polishing a spherical surface or an aspherical surface according to the first aspect, wherein the linear abrasive containing the abrasive is a metal wire, a glass wire, a synthetic fiber or It is characterized by being formed by kneading or impregnating an abrasive such as diamond, chromium oxide or calcined alumina into a linear member such as a natural fiber.

【0014】さらに、第3の発明に係る球面、非球面の
研磨方法は、前記第1の発明にあって、前記線状研磨材
を被研磨面に強制的に圧接する手段は、前記線状研磨材
の走行方向に対して直交方向に上下動または揺動する圧
接具を介して圧接することを特徴とする。
Further, in the polishing method for spherical and aspherical surfaces according to a third aspect of the present invention, in the first aspect, the means for forcibly pressing the linear abrasive onto the surface to be polished includes the linear abrasive. It is characterized in that it comes into pressure contact with a pressure contact member that moves up and down or swings in a direction perpendicular to the running direction of the abrasive.

【0015】また、第4の発明に係る球面、非球面の研
磨方法は、前記第1の発明にあって、前記線状研磨材
は、所定間隔を隔てて固定された前記送給部と巻取部間
において走行するとともに前記被研磨物の被研磨面は、
前記線状研磨材の走行方向に対して直交方向に立設せし
めつつ支持し、かつ回転および揺動運動せしめつつ支持
することを特徴とする。
In a fourth aspect of the present invention, there is provided a method for polishing a spherical surface or an aspherical surface according to the first aspect, wherein the linear abrasive is wound with the feeding section fixed at a predetermined interval. The surface to be polished of the object to be polished while traveling between the taking sections is
The linear abrasive is supported while being erected in a direction orthogonal to the running direction of the linear abrasive, and is supported while being rotated and oscillated.

【0016】さらに、第5の発明に係る球面、非球面の
研磨方法は、前記第1の発明にあって、前記線状研磨材
は、所定間隔を隔てて固定された前記送給部と巻取部間
において走行するとともに前記被研磨物の被研磨面は、
前記線状研磨材の走行平面に対して平行方向に支持し、
かつ回転および揺動運動せしめつつ支持することを特徴
とする。
In a fifth aspect of the present invention, there is provided a method for polishing a spherical surface or an aspherical surface according to the first aspect, wherein the linear abrasive is wound around the feeding portion fixed at a predetermined interval. The surface to be polished of the object to be polished while traveling between the taking sections is
Support in a direction parallel to the running plane of the linear abrasive,
And it is characterized in that it is supported while rotating and swinging.

【0017】また、第6の発明に係る球面、非球面の研
磨方法は、前記第1の発明にあって、前記線状研磨材の
送給部および巻取部を上下方向に移動するとともに前記
被研磨面を回転し、かつ前記線状研磨材を前記被研磨面
に強制的に圧接する圧接具を、前記被研磨面に沿って揺
動することを特徴とする。
In a sixth aspect of the present invention, the method for polishing a spherical surface or an aspherical surface according to the first aspect is characterized in that the feeding portion and the winding portion of the linear abrasive are moved in a vertical direction, and It is characterized in that a pressing member for rotating the surface to be polished and forcibly pressing the linear abrasive to the surface to be polished is swung along the surface to be polished.

【0018】第7の発明に係る球面、非球面の研磨装置
は、研磨剤を具備する線状研磨材と、この線状研磨材を
送給する送り出しリールを備える送給部と、この送給部
から送り出される前記線状研磨材を、この送給部より所
定間隔を置いて巻き取る巻き取りリールを備える巻取部
と、前記送給部と巻取部間において走行する前記線状研
磨材を被研磨面に強制的に圧接する圧接具とから構成し
たことを特徴とする。
According to a seventh aspect of the present invention, there is provided a spherical or aspherical polishing apparatus comprising: a linear abrasive having an abrasive; a feeding section having a delivery reel for feeding the linear abrasive; A winding unit provided with a take-up reel that winds the linear abrasive sent out from the feeding unit at a predetermined interval from the feeding unit; and the linear abrasive running between the feeding unit and the winding unit. And a pressure-contacting device for forcibly pressing against the surface to be polished.

【0019】また、第8の発明に係る球面、非球面の研
磨装置は、第7の発明にあって、前記圧接具は、先端に
前記線状研磨材の径より小さい幅の溝を外周面に備える
ローラーを回転自在に取付けることにより構成したこと
を特徴とする。
The spherical and aspherical polishing apparatus according to an eighth aspect of the present invention is the polishing apparatus according to the seventh aspect, wherein the pressing member has a groove having a width smaller than a diameter of the linear abrasive at an outer peripheral surface. The roller is provided so as to be rotatable.

【0020】さらに、第9の発明に係る球面、非球面の
研磨装置は、第8の発明にあって、前記圧接具の先端に
回転自在に取付けたローラーはポリウレタン等の弾性材
料にて形成したことを特徴とする。
In a ninth aspect of the present invention, there is provided the polishing apparatus for spherical and aspherical surfaces according to the eighth aspect, wherein the roller rotatably attached to the tip of the pressing member is formed of an elastic material such as polyurethane. It is characterized by the following.

【0021】すなわち、前記第1の発明に係る球面、非
球面の研磨方法にあっては、走行している線状研磨材を
被研磨面に強制的に圧接する。ここで、被研磨面は、前
工程の切削あるいは研削工程により、所望する高精度な
形状精度に加工してある。線状研磨材は、被研磨面に対
して点接触に近い状態で圧接し、その点接触部分と被研
磨面を相対的に移動して被研磨面の全面を、その高精度
に加工してある形状精度を損なうことなく、研磨する。
研磨に際し、走行する線状研磨材は、研磨位置に新たな
研磨剤を連続して供給し、研磨中の研磨能力を安定さ
せ、経時変化による加工誤差を生じさせない。
That is, in the method for polishing a spherical surface or an aspherical surface according to the first aspect of the invention, the running linear abrasive is forcibly pressed against the surface to be polished. Here, the surface to be polished is processed to a desired high-precision shape accuracy by a cutting or grinding process in a previous process. The linear abrasive is pressed against the surface to be polished in a state close to point contact, and the point contact portion and the surface to be polished are relatively moved to process the entire surface to be polished with high precision. Polishing without impairing certain shape accuracy.
During polishing, the running linear abrasive continuously supplies new abrasive to the polishing position, stabilizes the polishing ability during polishing, and does not cause processing errors due to aging.

【0022】また、前記第2の発明に係る球面、非球面
の研磨方法にあっては、線状研磨材は研磨剤を練り込む
か含浸して形成し、研磨中に外部からの研磨剤の供給を
不要にする。
In the method for polishing a spherical surface or an aspherical surface according to the second aspect of the present invention, the linear abrasive is formed by kneading or impregnating an abrasive, and polishing of the abrasive from outside during polishing is performed. Eliminates supply.

【0023】さらに、前記第3の発明に係る球面、非球
面の研磨方法にあっては、線状研磨材を被研磨面に強制
的に圧接する手段を上下動または揺動する圧接具とし、
この圧接具を上下動または揺動して被研磨面に沿って移
動し、被研磨面に対して前記点接触状態で圧接される線
状研磨材により被研磨面の全面を研磨する。
Further, in the method for polishing a spherical surface and an aspherical surface according to the third aspect of the present invention, the means for forcibly pressing the linear abrasive on the surface to be polished is a pressing member for vertically moving or swinging,
The pressing tool is moved up and down or swinging along the surface to be polished, and the entire surface of the surface to be polished is polished by the linear abrasive material pressed against the surface to be polished in the above-mentioned point contact state.

【0024】前記第4の発明に係る球面、非球面の研磨
方法にあっては、被研磨物の被研磨面を線状研磨材の走
行方向に対して直交方向に支持し、被研磨面を回転およ
び揺動運動しつつ被研磨面に対して点接触状態で圧接す
る線状研磨材により被研磨面の全面を研磨する。
In the method for polishing a spherical surface or an aspherical surface according to the fourth aspect of the present invention, the surface to be polished is supported in a direction orthogonal to the running direction of the linear abrasive, and the surface to be polished is The entire surface of the surface to be polished is polished with a linear abrasive material that is pressed against the surface to be polished in a point contact state while rotating and swinging.

【0025】また、前記第5の発明に係る球面、非球面
の研磨方法にあっては、被研磨物の被研磨面を線状研磨
材の走行平面に対して平行方向に支持し、被研磨面を回
転および揺動運動しつつ被研磨面に対して点接触状態で
圧接する線状研磨材により被研磨面の全面を研磨する。
In the method for polishing a spherical surface or an aspherical surface according to the fifth aspect of the present invention, the surface to be polished is supported in a direction parallel to a running plane of the linear abrasive, and The entire surface of the surface to be polished is polished with a linear abrasive material which is pressed against the surface to be polished in a point contact state while rotating and swinging the surface.

【0026】さらに、前記第6の発明に係る球面、非球
面の研磨方法にあっては、回転している被研磨面に対し
て線状研磨材を圧接しつつ圧接具を被研磨面に沿って揺
動し、被研磨面の全面を研磨する。このとき、被研磨面
を研磨している位置、すなわち圧接具の揺動運動に対応
して送給部および巻取部を上下方向に移動し、圧接具に
おける線状研磨材の圧接位置を一定に維持する。
Further, in the method for polishing a spherical surface and an aspherical surface according to the sixth aspect of the present invention, the pressing tool is moved along the surface to be polished while pressing the linear abrasive against the rotating surface to be polished. To polish the entire surface to be polished. At this time, the feed portion and the winding portion are moved up and down in accordance with the position where the surface to be polished is polished, i.e., in response to the swinging motion of the pressing device, so that the pressing position of the linear abrasive in the pressing device is fixed. To maintain.

【0027】前記第7の発明に係る球面、非球面の研磨
装置にあっては、線状研磨材を送給部から送給して巻取
部で巻き取り、送給部と巻取部間で線状研磨材を走行す
る。前記走行する線状研磨材を圧接具により強制的に被
研磨面に対して点接触に近い状態で圧接し、被研磨面を
研磨する。
In the spherical and aspherical polishing apparatus according to the seventh aspect of the present invention, the linear abrasive is fed from the feeding section and wound up by the winding section, and the linear abrasive is wound between the feeding section and the winding section. To travel the linear abrasive. The running linear abrasive material is forcibly pressed into contact with the surface to be polished in a state close to point contact by a pressure welding tool, and the surface to be polished is polished.

【0028】また、前記第8の発明に係る球面、非球面
の研磨装置にあっては、圧接具に線状研磨材の径より小
さい幅の溝を備えるローラーを回転自在に取り付け、こ
の溝に線状研磨材を係合させるとともに被研磨面側の線
状研磨材をローラーより突出させる。突出している線状
研磨材は、圧接具から脱落することなく点接触状態で被
研磨面に圧接し、被研磨面を研磨する。
Also, in the spherical and aspherical polishing apparatus according to the eighth aspect of the present invention, a roller having a groove having a width smaller than the diameter of the linear abrasive is rotatably mounted on the pressing member, and the roller is rotatably mounted on the roller. The linear abrasive is engaged and the linear abrasive on the side to be polished is projected from the roller. The protruding linear abrasive material is brought into pressure contact with the surface to be polished in a point contact state without dropping from the pressure welding device, and polishes the surface to be polished.

【0029】さらに、前記第9の発明に係る球面、非球
面の研磨装置にあっては、圧接具のローラーをポリウレ
タン等の弾性材料にて形成し、被研磨面への線状研磨材
の順応性を向上する。
Furthermore, in the spherical and aspherical polishing apparatus according to the ninth aspect, the roller of the pressing member is formed of an elastic material such as polyurethane, and the linear abrasive is adapted to the surface to be polished. Improve the performance.

【0030】[0030]

【発明の実施の形態】以下、本発明方法に係る球面、非
球面の研磨方法の各実施の形態を、その実施に直接使用
する研磨装置とともに詳細に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of a polishing method for a spherical surface and an aspherical surface according to the method of the present invention will be described in detail together with a polishing apparatus directly used for carrying out the method.

【0031】(実施の形態1)図1(a)、(b)は、
本発明の実施の形態1に使用する研磨装置20の側面図
および平面図である。
(Embodiment 1) FIGS. 1 (a) and 1 (b)
FIG. 2 is a side view and a plan view of a polishing apparatus 20 used in Embodiment 1 of the present invention.

【0032】研磨装置20は、線状研磨材1と、線状研
磨材1を送給する送給部2と、送給部2から送給された
線状研磨材1を巻き取る巻取部7と、線状研磨材1を被
研磨面に圧接する圧接具12とから構成してある。
The polishing apparatus 20 includes a linear abrasive 1, a feeding unit 2 for feeding the linear abrasive 1, and a winding unit for winding the linear abrasive 1 sent from the feeding unit 2. 7 and a pressure welding tool 12 for pressing the linear abrasive 1 against the surface to be polished.

【0033】前記線状研磨材1は、被研磨物の被研磨面
の形状に対応性を有し、所要の引張り強度を有する金属
線、ガラス線、天然あるいは合成繊維からなる線状部材
にダイヤモンド、酸化クロムあるいは焼成アルミナ等の
研磨剤を練り込むか、または含浸することにより形成し
てある。
The linear abrasive material 1 has a shape corresponding to the surface to be polished of the object to be polished, and a linear member made of a metal wire, a glass wire, or a natural or synthetic fiber having a required tensile strength. It is formed by kneading or impregnating an abrasive such as chromium oxide or calcined alumina.

【0034】前記送給部2は、前記線状研磨材1の送り
出しリール3を備えており、この送り出しリール3は送
給部2の台部5に装着したモーター6の回転駆動軸4に
着脱自在に取り付けてある。
The feed unit 2 has a feed reel 3 for feeding the linear abrasive 1, and the feed reel 3 is attached to and detached from a rotary drive shaft 4 of a motor 6 mounted on a base 5 of the feed unit 2. It is freely attached.

【0035】前記巻取部7は、前記線状研磨材1の巻き
取りリール8を備えており、この巻き取りリール8は台
部9に装着したモーター10の回転駆動軸11に着脱自
在に取り付けてある。
The take-up section 7 is provided with a take-up reel 8 for the linear abrasive material 1. The take-up reel 8 is detachably attached to a rotary drive shaft 11 of a motor 10 mounted on a base 9. It is.

【0036】前記圧接具12は、前記送給部2と巻取部
7間に配置してあり、この圧接具12は前記両部2,7
間において走行する線状研磨材1の走行方向に対して直
交方向に上下動自在に支持するとともに、前記両部2,
7の相互間に間隔を隔てて配設してある。すなわち、線
状研磨材1を送給部2より巻取部7に送給するとともに
これを巻取部7にて巻き取ることで、両者2,7間にお
いて線状研磨材1を走行せしめ、この走行工程間におい
て、線状研磨材1を圧接具12を介して被研磨物の被研
磨面に強制的に圧接しつつ研磨する場合に、前記走行工
程間での研磨等の作業および被研磨物を支持してその被
研磨面を線状研磨材1との相対方向に移動する操作に必
要な間隔を隔て、送給部2と巻取部7を配置するもので
ある。
The pressing member 12 is disposed between the feeding section 2 and the winding section 7.
In addition to supporting the linear abrasive 1 traveling between the upper and lower portions in a direction perpendicular to the traveling direction of the linear abrasive 1,
7 are spaced apart from each other. That is, the linear abrasive 1 is fed from the feeding section 2 to the winding section 7 and is wound up by the winding section 7, so that the linear abrasive 1 travels between the two 2 and 7. When the linear abrasive 1 is forcibly pressed against the surface to be polished of the object to be polished via the pressure-welding tool 12 during the traveling process, the work such as polishing between the traveling process and the polishing is performed. The feeding unit 2 and the winding unit 7 are arranged at an interval necessary for an operation of supporting an object and moving the surface to be polished in a direction relative to the linear abrasive 1.

【0037】さらに、送給部2における線状研磨材1の
送り出しと巻取部7における線状研磨材1の巻き取り
は、両モーター6,10の同期をとりつつ行うか、ある
いは必要に応じて、巻取部7のモーター10のみを駆動
することにより実施することも可能である。
Further, the feeding of the linear abrasive 1 in the feeding section 2 and the winding of the linear abrasive 1 in the winding section 7 are performed while synchronizing the motors 6 and 10, or as necessary. It is also possible to implement by driving only the motor 10 of the winding unit 7.

【0038】加えて、両モーター6,10を切り換え装
置(図示しない)により逆転せしめることにより、線状
研磨材1の巻き戻し作業をせずに、巻取部7側に巻き取
られた線状研磨材1をそのまま送給部2側に送り出しつ
つ(すなわち、逆に送給部2側で巻き取ることによ
り)、巻取部7と送給部2間で線状研磨材1を走行せし
めて実施することも可能である。
In addition, by reversing the motors 6 and 10 by a switching device (not shown), the linear abrasive 1 is wound back to the winding section 7 without rewinding the linear abrasive 1. While sending the abrasive material 1 as it is to the feeding unit 2 side (that is, by winding it up on the feeding unit 2 side), the linear abrasive material 1 is caused to travel between the winding unit 7 and the feeding unit 2. It is also possible to carry out.

【0039】また、圧接具12は、図2(a)、(b)
に示す如く、圧接具本体13の先端部13aに凹部14
を形成するとともに、この凹部14に、ポリウレタン等
の弾性材料により形成したローラー15を軸16により
回転自在に取り付けてある。このローラー15の外周面
には、前記線状研磨材1の径より小幅の溝としてのU字
状の環状溝17を設けてある。
The pressing member 12 is shown in FIGS. 2 (a) and 2 (b).
As shown in FIG.
And a roller 15 formed of an elastic material such as polyurethane is rotatably attached to the recess 14 by a shaft 16. The outer peripheral surface of the roller 15 is provided with a U-shaped annular groove 17 as a groove having a width smaller than the diameter of the linear abrasive 1.

【0040】さて、以上の構成からなる研磨装置20に
よって被研磨物としてのレンズ成形用金型18の成形面
19を研磨する方法について、以下に図3(a)、
(b)とともに説明する。
Now, a method of polishing the molding surface 19 of the lens molding die 18 as an object to be polished by the polishing apparatus 20 having the above configuration will be described with reference to FIG.
This will be described together with (b).

【0041】レンズ成形用金型18の成形面19は、N
C旋盤等にて所要の切削加工および研削加工によって、
高精度な非球面形状の加工が施されたもので、これを鏡
面に仕上げるための研磨を前記研磨装置20によって実
施せんとするものである。
The molding surface 19 of the lens molding die 18 is N
By the required cutting and grinding with a C lathe, etc.
This is a high-precision aspherical shape processed, and the polishing for finishing the mirror surface to a mirror surface is performed by the polishing apparatus 20.

【0042】さて、図3(a)に示す如く、研磨装置2
0の線状研磨材1の送給部2と、これの巻取部7間にお
いて、送給部2から巻取部7に送給かつ巻き取られなが
ら走行する線状研磨材1の走行方向に直交する方向、す
なわち図示の場合下側方向に前記レンズ成形用金型18
を立設しつつ支持するとともにその回転中心線イを中心
に回転自在に支持する。
Now, as shown in FIG.
0, between the feeding portion 2 of the linear abrasive 1 and the winding portion 7 thereof, the traveling direction of the linear abrasive 1 traveling while being fed from the feeding portion 2 to the winding portion 7 and wound up. The lens molding die 18 extends in a direction orthogonal to
And supported rotatably about its rotation center line a.

【0043】また、図3(b)に示す如く前記レンズ成
形用金型18の被研磨面としての前記成形面19に対し
て、その放物面状の放物線方向に沿って、前記線状研磨
材1が圧接具12により圧接し、レンズ成形用金型18
の成形面19における中央頂部19aから外周外端部1
9bに至るまで移動するようにレンズ成形用金型18を
図3(b)の矢印ロ方向間に揺動運動自在に支持する。
As shown in FIG. 3B, the linear polishing is performed on the molding surface 19 as the surface to be polished of the lens molding die 18 along the parabolic direction of the paraboloid thereof. The material 1 is pressed by the pressing member 12, and the lens forming die 18 is pressed.
Of the outer peripheral end 1 from the central top 19a on the molding surface 19
The lens molding die 18 is supported so as to swing freely in the direction of arrow B in FIG. 3B so as to move to 9b.

【0044】尚、これらの条件下にレンズ成形用金型1
8を支持する手段については具体的に図示していない
が、機械的な手段により支持することが可能である。
Under these conditions, the lens molding die 1
The means for supporting 8 is not specifically shown, but can be supported by mechanical means.

【0045】しかして、以上の構成下において、レンズ
成形用金型18を定速にて回転中心線イを中心に回転さ
せるとともに図3(b)の矢印ロ方向間に揺動運動さ
せ、かつこのレンズ成形用金型18の成形面19に研磨
装置20の線状研磨材1を圧接具12を介して強制的に
圧接させるとともに、前記研磨装置20の送給部2およ
び巻取部7のモーター6,10を駆動して、両部2,7
間で線状研磨材1を走行することにより、線状研磨材1
の走行に伴うレンズ成形用金型18の揺動、回転運動を
介して、成形面19の全面に線状研磨材1を均一に摺動
せしめることができ、従ってレンズ成形用金型18の成
形面19を鏡面に研磨仕上げすることができる。
In the above configuration, the lens molding die 18 is rotated at a constant speed about the rotation center line A, and is oscillated in the direction of the arrow B in FIG. The linear abrasive material 1 of the polishing device 20 is forcibly pressed against the molding surface 19 of the lens forming die 18 via the pressure welding tool 12, and the feed unit 2 and the winding unit 7 of the polishing device 20 are pressed. Drive the motors 6 and 10,
By moving the linear abrasive 1 between the linear abrasives 1
The linear abrasive 1 can be uniformly slid over the entire surface of the molding surface 19 through the swinging and rotating motions of the lens molding die 18 accompanying the traveling of the lens. The surface 19 can be polished to a mirror surface.

【0046】尚、線状研磨材1の成形面19に対する圧
接は、図2(a)、(b)に示す如く、圧接具12の本
体13先端部に備えるローラー15の環状溝17を線状
研磨材1の上側に係合するとともに当該圧接具12を上
下動自在に支持する支持腕(図示しない)を介して線状
研磨材1を成形面19上に点接触に近い状態で圧接し、
その圧接力は、圧接具12を支持する支持腕とこの支持
腕の上下動機構(図示しない)に備える圧力センサー
(図示しない)の制御部(図示しない)により制御する
ことによって調整しつつ実施する。
As shown in FIGS. 2 (a) and 2 (b), the linear abrasive 1 is pressed against the molding surface 19 by the linear groove 17 of the roller 15 provided at the tip end of the main body 13 of the pressure welding tool 12. The linear abrasive 1 is pressed onto the molding surface 19 in a state close to point contact via a support arm (not shown) that engages with the upper side of the abrasive 1 and supports the press-contacting device 12 so as to be vertically movable,
The pressure contact force is adjusted and controlled by controlling by a control unit (not shown) of a support arm for supporting the pressure welding device 12 and a pressure sensor (not shown) provided in a vertical movement mechanism (not shown) of the support arm. .

【0047】(実施の形態2)図4は本発明の実施の形
態2を示すもので、当該実施の形態の場合には、被研磨
物の被研磨面が非球面の凹球面からなるレンズ成形面2
1を備えるレンズ成形用金型22に対する研磨方法を示
すものである。研磨装置20は実施の形態1と同様に構
成してある。
(Embodiment 2) FIG. 4 shows Embodiment 2 of the present invention. In this embodiment, a lens to be polished has a non-spherical concave spherical surface. Face 2
1 illustrates a polishing method for a lens molding die 22 including the first mold 1. The polishing apparatus 20 has the same configuration as in the first embodiment.

【0048】しかして、当該実施の形態においても、実
施の形態1と同様に、被研磨物としてのレンズ成形用金
型22を、その被研磨面としてのレンズ成形面21を上
側にしつつ立設状態下に支持するとともに回転かつ揺動
自在に支持する。
In this embodiment, similarly to the first embodiment, the lens-forming mold 22 as the object to be polished is erected with the lens-forming surface 21 as the surface to be polished facing upward. It is supported under the condition, and is supported so as to rotate and swing freely.

【0049】しかる後、図4に示す如く、送給部2と巻
取部7間において、線状研磨材1を走行するとともにこ
の走行する線状研磨材1を圧接具12を介して、回転か
つ揺動するレンズ成形用金型22のレンズ成形面21に
強制的に圧接することができる。
Thereafter, as shown in FIG. 4, the linear abrasive 1 travels between the feeding section 2 and the winding section 7 and the traveling linear abrasive 1 is rotated via a pressure welding tool 12. Further, it can be forcibly pressed against the lens molding surface 21 of the swinging lens molding die 22.

【0050】また、研磨装置20側は定位置に固定する
が、被研磨面としてのレンズ成形面21を回転かつ揺動
することにより、レンズ成形面21に対して圧接具12
のローラー15により点接触状態下に強制的に圧接され
る線状研磨材1が、前記レンズ成形用金型22の回転か
つ摺動運動に伴って、レンズ成形面21の全面に均一に
摺動され、実施の形態1のレンズ成形用金型18と同効
状態下にて、鏡面研磨仕上げを行うことができるもので
ある。
The polishing apparatus 20 is fixed at a fixed position, but by rotating and swinging the lens forming surface 21 as the surface to be polished, the pressing member 12 is pressed against the lens forming surface 21.
The linear abrasive 1 forcibly pressed into a point contact state by the roller 15 is uniformly slid over the entire surface of the lens molding surface 21 with the rotation and sliding movement of the lens molding die 22. The mirror polishing can be performed under the same condition as the lens molding die 18 of the first embodiment.

【0051】(実施の形態3)図5は発明の実施の形態
3を示し、特に実施の形態1において、前記線状研磨材
1の走行方向に対してレンズ成形用金型18を直交方向
に立設状態下に支持することにより研磨したのに変え
て、レンズ成形用金型18を線状研磨材1の走行平面に
対して、平行状態下に支持しつつ研磨する実施の形態を
示すものである。
(Embodiment 3) FIG. 5 shows Embodiment 3 of the present invention. In Embodiment 1, in particular, in Embodiment 1, the lens-forming die 18 is perpendicular to the running direction of the linear abrasive 1. An embodiment in which the lens forming die 18 is polished while being supported in a state parallel to the running plane of the linear abrasive 1 instead of being polished by being supported in an upright state. It is.

【0052】しかして、図5に示す如く、当該実施の形
態の場合には、研磨装置20の送給部2と巻取部7間に
被研磨物としてのレンズ成形用金型18を線状研磨材1
の走行平面に対してレンズ成形用金型18の回転中心線
イ間に傾斜角を付与しつつ支持し、被研磨面としての成
形面19の円周方向に沿うように線状研磨材1を圧接具
12を介して圧接し、当該線状研磨材1が成形面19に
対して点接触するように支持した後、レンズ成形用金型
18を回転中心線イ回りに定速回転かつ図5の矢印ハ方
向間に揺動することに加えて、研磨装置20の送給部2
と巻取部7の両モーター6,10を駆動して線状研磨材
1を両部2,7間で走行して、レンズ成形用金型18の
成形面19全体に線状研磨材1を摺接することにより、
実施の形態1と同様に成形面19を均一に鏡面に仕上げ
ることができる。
As shown in FIG. 5, in the case of this embodiment, a lens-forming mold 18 as an object to be polished is linearly disposed between the feeding section 2 and the winding section 7 of the polishing apparatus 20. Abrasive 1
Of the lens forming die 18 is provided with an inclination angle with respect to the running plane of the lens forming die 18, and the linear abrasive 1 is extended along the circumferential direction of the forming surface 19 as a surface to be polished. After the linear abrasive 1 is pressed into contact with the molding surface 19 so as to be in point contact with the molding surface 19, the lens molding die 18 is rotated at a constant speed around the rotation center line A and is pressed in FIG. In addition to swinging in the direction of arrow C, the feed unit 2 of the polishing apparatus 20
By driving both motors 6 and 10 of the winding section 7, the linear abrasive 1 travels between the two sections 2 and 7, and the linear abrasive 1 is applied to the entire molding surface 19 of the lens forming die 18. By sliding,
As in the first embodiment, the molding surface 19 can be uniformly mirror-finished.

【0053】かかる実施の形態3の場合には、被研磨面
がシュミット形状からなる非球面等、実施の形態1の方
法(特に研磨装置20側を定位置に固定して実施する方
法)によっては、被研磨面の前記揺動運動と線状研磨材
1の走行により線状研磨材1を被研磨面に対して全面に
摺接することが困難あるいは不可能な場合に、特に有効
な方法である。
In the case of the third embodiment, depending on the method of the first embodiment (particularly, the method in which the polishing apparatus 20 is fixed at a fixed position) such as an aspheric surface having a Schmidt-shaped surface to be polished. This is a particularly effective method when it is difficult or impossible to bring the linear abrasive 1 into sliding contact with the entire surface to be polished by the swinging motion of the surface to be polished and the running of the linear abrasive 1. .

【0054】(実施の形態4)図6は本発明の実施の形
態4を示し、特に当該実施の形態の場合には、被研磨物
としてのレンズ成形用金型18側を定位置にて回転自在
に支持するとともに、研磨装置20の送給部2と巻取部
7を上下動自在に支持し、かつ圧接具12を被研磨面と
してのレンズ成形面19の球面形状に対応せしめて、図
6に示す矢印ニ方向に揺動することにより研磨する方法
を示すものである。
(Embodiment 4) FIG. 6 shows Embodiment 4 of the present invention. In this embodiment, in particular, the lens-forming die 18 as an object to be polished is rotated at a fixed position. In addition to supporting freely, the feeding unit 2 and the winding unit 7 of the polishing device 20 are supported so as to be vertically movable, and the pressing member 12 corresponds to the spherical shape of the lens forming surface 19 as the surface to be polished. 6 shows a method of polishing by swinging in the direction of arrow D shown in FIG.

【0055】しかして、研磨装置20の送給部2、巻取
部7を駆動して、送給部2より巻取部7方向間に線状研
磨材1を走行するとともにレンズ成形用金型18を回転
中心線イ回りで定位置にて回転し、かつ圧接具12のロ
ーラー15を介して走行する線状研磨材1を下方向に押
圧して回転するレンズ成形用金型18のレンズ成形面1
9に圧接する。
Thus, the feeding unit 2 and the winding unit 7 of the polishing apparatus 20 are driven to move the linear abrasive 1 from the feeding unit 2 in the direction of the winding unit 7 and to mold the lens. The lens forming die 18 rotates by rotating the linear abrasive 1 traveling downward through the rollers 15 of the pressing member 12 while rotating the linear abrasive 18 at a fixed position about the rotation center line a. Face 1
9 is pressed.

【0056】また、圧接具12の押圧によって、レンズ
成形面19に強制的に圧接される線状研磨材1は点接触
的な状態下に圧接するもので、当該接触部分が、レンズ
成形面19の中央頂部19aより下端外周部19bに至
るまで均一に圧接されるように、前記圧接具12を図6
の矢印ニ方向間に揺動運動せしめる。
The linear abrasive 1 which is forcibly pressed against the lens forming surface 19 by pressing the pressing member 12 is pressed against the lens forming surface 19 in a point contact state. 6 is pressed so as to be uniformly pressed from the central top portion 19a to the lower peripheral portion 19b.
Rocking motion between the two directions of arrow.

【0057】当該圧接具12の揺動運動に際して、圧接
具12がレンズ成形面19の中央頂部19aより下端外
周部19b間に揺動するに従って、その両端に配置する
送給部2と巻取部7が一定位置に固定していると、圧接
具12による走行線状研磨材1のレンズ成形面19への
圧接位置が一定点より移動することになるため、その圧
接位置を一定点に維持することができるように、図6に
示す如く、送給部2あるいは巻取部7を圧接具12の揺
動運動に対応せしめて上下方向に移動せしめつつ研磨す
るものである。
During the swinging movement of the pressing member 12, as the pressing member 12 swings between the central top portion 19a and the lower peripheral portion 19b of the lens forming surface 19, the feeding portion 2 and the winding portion disposed at both ends thereof. When the fixing member 7 is fixed at a fixed position, the pressing position of the running linear abrasive 1 against the lens forming surface 19 by the pressing member 12 moves from a fixed point, and the pressed position is maintained at a fixed point. As shown in FIG. 6, the feeding unit 2 or the winding unit 7 is polished while being moved up and down in accordance with the swinging movement of the press-contacting tool 12, as shown in FIG.

【0058】尚、圧接具12をレンズ成形面19の形状
に沿って揺動する方法としては、例えばNC駆動装置を
備えるバイトホルダー等によって圧接具12を保持する
か、あるいは直接圧接具12自体にNC駆動装置を装備
する等の方法により実施することができる。
Incidentally, as a method of swinging the pressure welding tool 12 along the shape of the lens molding surface 19, for example, the pressure welding tool 12 is held by a tool holder or the like having an NC driving device, or the pressure welding tool 12 itself is directly held. It can be implemented by a method such as equipping an NC drive device.

【0059】他の方法については、実施の形態1と同様
の方法により実施するもので、説明を省略する。
The other method is performed by the same method as in the first embodiment, and the description is omitted.

【0060】(実施の形態5)図7は本発明の実施の形
態5を示すもので、特に当該実施の形態の場合は、前記
実施の形態4の方法によってシュミット形状のレンズ成
形面24からなるレンズ成形用金型23を研磨する方法
を示すものである。
(Fifth Embodiment) FIG. 7 shows a fifth embodiment of the present invention. In the fifth embodiment, in particular, the fifth embodiment comprises a Schmitt-shaped lens molding surface 24 by the method of the fourth embodiment. This shows a method of polishing the lens molding die 23.

【0061】しかして、研磨装置20の各部を実施の形
態4の図6と同様に作動するとともに回転する被研磨物
としてのレンズ成形用金型23の加工する被研磨面とし
てのレンズ成形面24に線状研磨材1を強制的に圧接す
る圧接具12を図7の矢印ホ方向間に揺動することによ
って、実施の形態4と同効作用を以て、レンズ成形面2
4を均一に鏡面に仕上げることができるものである。
The respective parts of the polishing apparatus 20 operate in the same manner as in FIG. 6 of the fourth embodiment, and the lens forming surface 24 as the surface to be polished to be processed by the lens forming die 23 as the rotating object to be polished. 7 is swung in the direction of the arrow E in FIG. 7 to forcibly press the linear abrasive 1 on the lens forming surface 2 with the same effect as in the fourth embodiment.
4 can be uniformly mirror-finished.

【0062】特に当該実施の形態の方法によれば前記図
5に示す実施の形態3に比し、線状研磨材1の走行方向
に対してレンズ成形用金型23を直立状態下に一定位置
に支持しつつ研磨することができるので、被研磨面がシ
ュミット形状の如き形状の場合に有効である。
In particular, according to the method of the present embodiment, as compared with the third embodiment shown in FIG. This is effective when the surface to be polished has a shape such as a Schmidt shape.

【0063】また、前述してきた実施の形態1〜5にお
ける研磨方法においては、一般の研磨の場合と同様に、
その研磨量は圧力(研磨圧)と速度(すべり速度)に比
例して大きくなるので、前記線状研磨材1の被研磨面と
しての成形面19,21,24への接触圧は、圧接具1
2の圧接コントロールにより調整するとともに成形面1
9,21,24の回転数と線状研磨材1との走行速度、
回転数を可変することにより、成形面19,21,24
と線状研磨材1のすべり速度をも調整できるので、研磨
量を任意に調整でき、均一研磨を行い易い。
In the polishing method according to Embodiments 1 to 5 described above, as in the case of general polishing,
Since the amount of polishing increases in proportion to the pressure (polishing pressure) and the speed (slip speed), the contact pressure of the linear abrasive 1 on the molding surfaces 19, 21, and 24 as the surfaces to be polished is determined by the pressure welding tool. 1
2 and the molding surface 1
9,21,24 rotation speed and running speed of linear abrasive 1
By varying the number of revolutions, the molding surfaces 19, 21, 24
Also, since the slip speed of the linear abrasive 1 can be adjusted, the polishing amount can be arbitrarily adjusted and uniform polishing can be easily performed.

【0064】さらに、線状研磨材1は研磨作業中、送給
部2より巻取部7間に走行させつつ実施するもので、成
形面19,21,24との接触面に新たな線状研磨材1
が連続して供給されるので目詰まりを解消しつつ実施で
きる。従って、研磨加工中の研磨能力を安定させること
ができるとともに砥石等を使用する研磨方法のように、
砥石の経時変化による加工誤差の発生を防止し得る。
Further, during the polishing operation, the linear abrasive 1 is moved while being moved from the feeding section 2 to the winding section 7, and a new linear abrasive is formed on the contact surface with the forming surfaces 19, 21, 24. Abrasive 1
Is supplied continuously, so that the clogging can be performed while eliminating the clogging. Therefore, it is possible to stabilize the polishing ability during the polishing process and, like the polishing method using a grindstone,
It is possible to prevent the occurrence of a processing error due to a change with time of the grindstone.

【0065】尚、圧接具12のローラー15を前述した
如く、ポリウレタン等の弾性材料によって形成した場合
には、被研磨面への線状研磨材1の順応性を向上し得
る。
When the roller 15 of the pressing member 12 is formed of an elastic material such as polyurethane as described above, the adaptability of the linear abrasive 1 to the surface to be polished can be improved.

【0066】なお、上記した具体的実施の形態から次の
ような構成の技術的思想が導き出される。 (付記) (1)研磨剤を具備する線状研磨材をその送給部と巻取
部間において走行させるとともに当該線状研磨材の走行
工程間において、線状研磨材と被研磨面とを相対的に移
動して、前記線状研磨材を被研磨面に強制的に点接触に
近い状態で圧接しつつ前記被研磨面を研磨することを特
徴とする球面、非球面の研磨方法。
The technical idea having the following configuration is derived from the specific embodiment described above. (Supplementary Note) (1) A linear abrasive having an abrasive is caused to travel between a feeding part and a winding part, and the linear abrasive and the surface to be polished are moved between the traveling steps of the linear abrasive. A method for polishing a spherical or aspherical surface, wherein the polishing is performed while relatively moving and forcibly pressing the linear abrasive onto a surface to be polished in a state close to point contact.

【0067】(2)研磨剤を具備する線状研磨材と、こ
の線状研磨材を送給する送り出しリールを備える送給部
と、この送給部から送り出される前記線状研磨材を、こ
の送給部より所定間隔を置いて巻き取る巻き取りリール
を備える巻取部と、前記送給部と前記巻取部間において
走行する前記線状研磨材を被研磨面に強制的に圧接する
ように移動自在な圧接具とから構成したことを特徴とす
る球面、非球面の研磨装置。
(2) A linear abrasive containing an abrasive, a feeding section provided with a feed reel for feeding the linear abrasive, and the linear abrasive sent out from the feeding section, A winding unit having a take-up reel that winds at a predetermined interval from the feeding unit, and the linear abrasive material running between the feeding unit and the winding unit is forcibly pressed against a surface to be polished. A spherical and aspherical polishing device, comprising:

【0068】(3)前記圧接具は、線状研磨材の走行方
向に対して直交方向に上下動自在であることを特徴とす
る付記(2)に記載の球面、非球面の研磨装置。
(3) The polishing apparatus for spherical and aspherical surfaces according to (2), wherein the pressing member is vertically movable in a direction perpendicular to a running direction of the linear abrasive.

【0069】(4)前記圧接具は、被研磨面形状に沿っ
て揺動自在であることを特徴とする付記(2)または
(3)に記載の球面、非球面の研磨装置。
(4) The polishing apparatus for spherical and aspherical surfaces according to (2) or (3), wherein the pressing member is swingable along the shape of the surface to be polished.

【0070】(5)研磨剤を具備する線状研磨材と、こ
の線状研磨材を送給する送り出しリールを備え上下動自
在な送給部と、この送給部から送り出される前記線状研
磨材を、この送給部より所定間隔を置いて巻き取る巻き
取りリールを備え上下動自在な巻取部と、前記送給部と
前記巻取部間において走行する前記線状研磨材を被研磨
面に強制的に圧接する上下動および揺動自在な圧接具と
から構成したことを特徴とする球面、非球面の研磨装
置。
(5) A linear abrasive material containing an abrasive, a feed unit provided with a feed reel for feeding the linear abrasive material and capable of moving up and down, and the linear polishing sent out from the feed unit A take-up reel, which is provided with a take-up reel for taking up the material at a predetermined interval from the feed unit, and a vertically movable take-up unit, and the linear abrasive material running between the feed unit and the take-up unit is polished. A spherical and aspherical polishing apparatus, comprising: a vertically movable and oscillating pressure-contacting tool forcibly pressing against a surface.

【0071】付記(1)の球面、非球面の研磨方法によ
れば、線状研磨材を圧接具を介して球面あるいは非球面
形状の被研磨面に圧接して部分的に点接触させ、線状研
磨材と被研磨面とを相対的に移動して被研磨面の研磨を
行うようにしたので、線状研磨材が切削あるいは研削加
工済の球面あるいは非球面形状の被研磨面へよく順応し
ながらフィットし、比較的手軽な手段で、切削あるいは
研削加工済みの高精度な形状精度を損なうことなく、均
一な鏡面研磨加工を行うことができる。
According to the polishing method for spherical and aspherical surfaces described in the appendix (1), the linear abrasive is pressed into contact with the spherical or aspherical surface to be polished via a pressure welding tool to make partial contact with the line. Polishing of the polished surface by relatively moving the polished material and the surface to be polished allows the linear abrasive to be well adapted to the polished surface of a spherical or aspherical surface that has been cut or ground. It is possible to perform uniform mirror polishing by a relatively simple means without impairing the high precision of the cut or ground shape.

【0072】付記(2)〜(4)の球面、非球面の研磨
装置によれば、線状研磨材を圧接具を介して球面あるい
は非球面形状の被研磨面に圧接して部分的に点接触さ
せ、線状研磨材と被研磨面とを相対的に移動して被研磨
面の研磨を行うようにしたので、線状研磨材が切削ある
いは研削加工済の球面あるいは非球面形状の被研磨面へ
よく順応しながらフィットし、比較的手軽な手段で、切
削あるいは研削加工済みの高精度な形状精度を損なうこ
となく、均一な鏡面研磨加工を行うことができる。
According to the spherical and aspherical polishing apparatuses of the appendices (2) to (4), the linear abrasive is pressed into contact with the spherical or aspherical surface to be polished via the pressure welding tool, and is partially pointed. When the linear abrasive is polished by cutting or grinding, the linear abrasive and the surface to be polished are moved relative to each other to polish the surface to be polished. The surface can be fitted while being well adapted, and uniform mirror polishing can be performed by a relatively simple means without impairing the high precision of the cut or ground processed high precision shape.

【0073】付記(5)の球面、非球面の研磨装置によ
れば、線状研磨材の送給部および巻取部を上下方向に移
動可能にしたので、非球面度の大きい被研磨面にあって
も対応することができるとともに、被研磨面の全面にお
いて圧接具における線状研磨材の圧接位置を一定に維持
し、切削あるいは研削加工済みの高精度な形状精度を損
なうことなく、均一な鏡面研磨加工を行うことができ
る。
According to the spherical and aspherical polishing apparatus of the appendix (5), the feed portion and the take-up portion of the linear abrasive can be moved in the vertical direction. It is possible to handle even if it is, and to maintain the pressing position of the linear abrasive in the pressing tool on the whole surface to be polished constant, without impairing the high precision shape of the cut or ground, uniform Mirror polishing can be performed.

【0074】[0074]

【発明の効果】以上説明したように、本発明に係る請求
項1の球面、非球面の研磨方法によれば、線状研磨材を
圧接具を介して球面あるいは非球面形状の被研磨面に圧
接して部分的に点接触させ、線状研磨材と被研磨面とを
相対的に移動して被研磨面の研磨を行うようにしたの
で、線状研磨材が切削あるいは研削加工済の球面あるい
は非球面形状の被研磨面へよく順応しながらフィット
し、比較的手軽な手段で、切削あるいは研削加工済みの
高精度な形状精度を損なうことなく、均一な鏡面研磨加
工を行うことができる。
As described above, according to the method for polishing a spherical surface or an aspherical surface according to the first aspect of the present invention, a linear abrasive is applied to a spherical or aspherical surface to be polished via a pressure welding tool. Since the linear abrasive and the surface to be polished are relatively moved to polish the surface to be polished, the linear abrasive is cut or ground. Alternatively, it can be fitted to an aspheric surface to be polished while being well adapted, and uniform mirror polishing can be performed by relatively simple means without impairing high-precision cut or ground precision.

【0075】また、線状研磨材は、研磨に際して走行し
ているので、研磨中常に新しい研磨剤が供給されるため
研磨中の研磨能力が安定しており、研磨剤の経時変化に
よる加工誤差も生じることがない。
Also, since the linear abrasive is running during polishing, a new abrasive is always supplied during polishing, so that the polishing ability during polishing is stable, and the processing error due to the change with time of the abrasive is reduced. Will not occur.

【0076】本発明に係る請求項2の球面、非球面の研
磨方法によれば、線状研磨材として、研磨剤を練り込み
あるいは含浸した線状研磨材を用いるので、外部より供
給する研磨剤が不要となり、したがって研磨剤を垂れ流
しや塗布する装置が不要となる等の効果が得られる。
According to the method for polishing spherical and aspheric surfaces according to the second aspect of the present invention, since the linear abrasive which is kneaded or impregnated with the abrasive is used as the linear abrasive, the abrasive supplied from outside is used. Are not required, so that there is no need for a device for pouring and applying the polishing agent.

【0077】本発明に係る請求項3の球面、非球面の研
磨方法によれば、上下動または揺動する圧接具を介して
線状研磨材を強制的に圧接し被研磨面に部分的に点接触
させつつ研磨する研磨加工なので、被研磨面の形状への
追従性が良好になり、放物面やシュミット形状などの種
々の非球面形状あるいは凹状または凸状の形状に対して
も円滑に研磨加工を行うことができる。
According to the polishing method for spherical and aspheric surfaces according to the third aspect of the present invention, the linear abrasive is forcibly pressed into contact with the surface to be polished through the vertically moving or oscillating pressing member. Since it is a polishing process that polishes while making point contact, it has good followability to the shape of the surface to be polished, and smoothly to various aspherical shapes such as parabolic surface and Schmidt shape or concave or convex shape Polishing can be performed.

【0078】本発明に係る請求項4の球面、非球面の研
磨方法によれば、線状研磨材を圧接具を介して球面ある
いは非球面形状の被研磨面に圧接して部分的に点接触さ
せ、線状研磨材と被研磨面とを相対的に摺動もしくは回
転移動させて被研磨面の研磨を行うようにしたので、線
状研磨材が切削あるいは研削加工済の球面あるいは非球
面形状の被研磨面へよく順応しながらフィットし、比較
的手軽な手段で、切削あるいは研削加工済みの高精度な
形状精度を損なうことなく、均一な鏡面研磨加工を行う
ことができる。
According to the method for polishing spherical and aspherical surfaces according to the fourth aspect of the present invention, the linear abrasive is pressed against the surface to be polished having a spherical or aspherical shape via a press-fitting tool to partially contact the surface. The polishing is performed by relatively sliding or rotating the linear abrasive and the surface to be polished, so that the linear abrasive has a spherical or aspherical shape which has been cut or ground. It is possible to perform uniform mirror polishing by a relatively simple means without impairing the precision of the cut or ground high-precision shape.

【0079】本発明に係る請求項5の球面、非球面の研
磨方法によれば、被研磨面を線状研磨材の走行平面に対
して平行方向に支持したので、非球面度の大きい被研磨
面であっても、線状研磨材を被研磨面の全面に点接触状
態で圧接でき、切削あるいは研削加工済みの高精度な形
状精度を損なうことなく、均一な鏡面研磨加工を行うこ
とができる。
According to the method for polishing a spherical surface and an aspherical surface according to the fifth aspect of the present invention, since the surface to be polished is supported in a direction parallel to the running plane of the linear abrasive, the surface having a large asphericity is polished. Even if it is a surface, the linear abrasive can be pressed against the entire surface to be polished in a point contact state, and uniform mirror polishing can be performed without impairing high precision shape precision after cutting or grinding. .

【0080】本発明に係る請求項6の球面、非球面の研
磨方法によれば、線状研磨材の送給部および巻取部を上
下方向に移動可能にしたので、非球面度の大きい被研磨
面にあっても対応することができるとともに、被研磨面
の全面において圧接具における線状研磨材の圧接位置を
一定に維持することができる。
According to the polishing method for spherical and aspherical surfaces according to the sixth aspect of the present invention, since the feeding portion and the winding portion of the linear abrasive can be moved in the vertical direction, the surface having a large asphericity can be obtained. It is possible to cope with even the polished surface, and it is possible to keep the pressure contact position of the linear abrasive in the pressure welding tool constant over the entire surface to be polished.

【0081】本発明に係る請求項7の球面、非球面の研
磨装置によれば、線状研磨材を圧接具を介して球面ある
いは非球面形状の被研磨面に圧接して部分的に点接触さ
せ、線状研磨材と被研磨面とを相対的に移動して被研磨
面の研磨を行うようにしたので、線状研磨材が切削ある
いは研削加工済の球面あるいは非球面形状の被研磨面へ
よく順応しながらフィットし、比較的手軽な手段で、切
削あるいは研削加工済みの高精度な形状精度を損なうこ
となく、均一な鏡面研磨加工を行うことができる。
According to the polishing apparatus for spherical and aspherical surfaces according to the seventh aspect of the present invention, the linear abrasive is pressed into contact with the spherical or aspherical surface to be polished via the pressure welding tool to partially contact the surface. The linear abrasive is moved relative to the surface to be polished to polish the surface to be polished, so that the linear abrasive has a spherical or aspherical surface to be polished or ground. It is possible to perform a uniform mirror polishing by a relatively simple means without deteriorating the precision of the cut or ground processed high-precision shape.

【0082】本発明に係る請求項8の球面、非球面の研
磨装置によれば、圧接具に線状研磨材の径より小さい幅
の溝を備えるローラーを回転自在に取り付けたので、こ
の溝に線状研磨材を係合させるとともに被研磨面側をロ
ーラーより突出させつつ、圧接具で線状研磨材の走行を
阻害することなく保持し、線状研磨材のローラーから突
出している側を点接触状態で被研磨面に圧接し、被研磨
面を研磨することができる。
According to the spherical and aspherical polishing apparatus of the eighth aspect of the present invention, since the roller provided with the groove having a width smaller than the diameter of the linear abrasive is rotatably attached to the pressing member, the groove is formed in this groove. While engaging the linear abrasive and projecting the surface to be polished from the roller, holding the linear abrasive without impeding the running of the linear abrasive with the pressure-welding tool, spotting the side of the linear abrasive protruding from the roller. The polished surface can be polished by pressing against the polished surface in a contact state.

【0083】前記第9の発明に係る球面、非球面の研磨
装置によれば、圧接具のローラーをポリウレタン等の弾
性材料にて形成したので、被研磨面への線状研磨材の順
応性を向上させることができる。
According to the ninth aspect of the present invention, since the roller of the pressing member is formed of an elastic material such as polyurethane, the adaptability of the linear abrasive to the surface to be polished is improved. Can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の研磨方法の実施に使用する研磨装置を
示し、(a)は側面図、(b)は平面図である。
FIG. 1 shows a polishing apparatus used for carrying out a polishing method of the present invention, wherein (a) is a side view and (b) is a plan view.

【図2】本発明の実施の形態の研磨装置における圧接具
を示し、(a)は部分拡大正面図、(b)は部分拡大側
面図である。
FIGS. 2A and 2B show a pressure welding tool in the polishing apparatus according to the embodiment of the present invention, wherein FIG. 2A is a partially enlarged front view, and FIG.

【図3】本発明の研磨方法の実施の形態1を示す説明図
である。
FIG. 3 is an explanatory view showing Embodiment 1 of the polishing method of the present invention.

【図4】本発明の研磨方法の実施の形態2を示す説明図
である。
FIG. 4 is an explanatory view showing Embodiment 2 of the polishing method of the present invention.

【図5】本発明の研磨方法の実施の形態3を示す説明図
である。
FIG. 5 is an explanatory view showing a polishing method according to a third embodiment of the present invention.

【図6】本発明の研磨方法の実施の形態4を示す説明図
である。
FIG. 6 is an explanatory view showing a polishing method according to a fourth embodiment of the present invention.

【図7】本発明の研磨方法の実施の形態5を示す説明図
である。
FIG. 7 is an explanatory view showing Embodiment 5 of the polishing method of the present invention.

【図8】従来の研磨方法を示す説明図である。FIG. 8 is an explanatory view showing a conventional polishing method.

【図9】従来の研磨方法を示す説明図である。FIG. 9 is an explanatory view showing a conventional polishing method.

【図10】従来の研磨方法を示す説明図である。FIG. 10 is an explanatory view showing a conventional polishing method.

【図11】従来の研磨方法を示す説明図である。FIG. 11 is an explanatory view showing a conventional polishing method.

【図12】従来の研磨方法を示す説明図である。FIG. 12 is an explanatory view showing a conventional polishing method.

【符号の説明】[Explanation of symbols]

1 線状研磨材 2 送給部 3 送り出しリール 4,11 回転駆動軸 5,9 台部 6,10 モーター 7 巻取部 8 巻き取りリール 12 圧接具 13 圧接具本体 14 凹部 15 ローラー 16 軸 17 環状溝 18,22,23 レンズ成形用金型 19,21,24 レンズ成形面 20 研磨装置 DESCRIPTION OF SYMBOLS 1 Linear abrasive 2 Feeding part 3 Sending reel 4, 11 Rotation drive shaft 5, 9 Base part 6, 10 Motor 7 Take-up part 8 Take-up reel 12 Pressure welding device 13 Pressure welding device main body 14 Depression 15 Roller 16 Shaft 17 Ring Grooves 18, 22, 23 Lens molding dies 19, 21, 24 Lens molding surface 20 Polishing device

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 研磨剤を具備する線状研磨材をその送給
部と巻取部間において走行させるとともに当該線状研磨
材の走行工程間において、線状研磨材と被研磨面とを相
対的に移動して、前記線状研磨材を被研磨面に強制的に
圧接しつつ前記被研磨面を研磨することを特徴とする球
面、非球面の研磨方法。
1. A linear abrasive having an abrasive is caused to travel between a feeding portion and a winding portion, and the linear abrasive and a surface to be polished are moved relative to each other during a traveling process of the linear abrasive. And polishing the surface to be polished while forcibly pressing the linear abrasive to the surface to be polished.
【請求項2】 前記研磨剤を具備する線状研磨材は、金
属線、ガラス線、合成繊維あるいは天然繊維等の線状部
材にダイヤモンド、酸化クロムあるいは焼成アルミナ等
の研磨剤を練り込むか、あるいは含浸することにより形
成したことを特徴とする請求項1記載の球面、非球面の
研磨方法。
2. A linear abrasive comprising the abrasive is prepared by kneading an abrasive such as diamond, chromium oxide or calcined alumina into a linear member such as a metal wire, a glass wire, a synthetic fiber or a natural fiber, 2. The method for polishing a spherical surface and an aspherical surface according to claim 1, wherein the polishing method is formed by impregnation.
【請求項3】 前記線状研磨材を被研磨面に強制的に圧
接する手段は、前記線状研磨材の走行方向に対して直交
方向に上下動または揺動する圧接具を介して圧接するこ
とを特徴とする請求項1記載の球面、非球面研磨方法。
3. The means for forcibly pressing the linear abrasive on the surface to be polished is pressed via a pressing member which vertically moves or swings in a direction perpendicular to the running direction of the linear abrasive. The method for polishing spherical and aspherical surfaces according to claim 1, wherein:
【請求項4】 前記線状研磨材は、所定間隔を隔てて固
定された前記送給部と巻取部間において走行するととも
に前記被研磨物の被研磨面は、前記線状研磨材の走行方
向に対して直交方向に立設せしめつつ支持し、かつ回転
および揺動運動せしめつつ支持することを特徴とする請
求項1記載の球面、非球面の研磨方法。
4. The linear abrasive material travels between the feeding unit and the winding unit fixed at a predetermined interval, and the polished surface of the object to be polished moves the linear abrasive material. 2. The method for polishing spherical and aspherical surfaces according to claim 1, wherein the polishing is performed while being supported while being erected in a direction perpendicular to the direction, and supported while being rotated and rocked.
【請求項5】 前記線状研磨材は、所定間隔を隔てて固
定された前記送給部と巻取部間において走行するととも
に前記被研磨物の被研磨面は、前記線状研磨材の走行平
面に対して平行方向に支持し、かつ回転および揺動運動
せしめつつ支持することを特徴とする請求項1記載の球
面、非球面の研磨方法。
5. The linear abrasive material travels between the feeding unit and the winding unit fixed at a predetermined interval, and the polished surface of the object to be polished moves the linear abrasive material. 2. The method for polishing a spherical surface and an aspherical surface according to claim 1, wherein the polishing is carried out in a direction parallel to a plane and is supported while rotating and oscillating.
【請求項6】 前記線状研磨材の送給部および巻取部を
上下方向に移動するとともに前記被研磨面を回転し、か
つ前記線状研磨材を前記被研磨面に強制的に圧接する圧
接具を、前記被研磨面に沿って揺動することを特徴とす
る請求項1記載の球面、非球面の研磨方法。
6. The linear abrasive is moved vertically while moving a feed portion and a take-up portion of the linear abrasive, rotating the surface to be polished, and forcibly pressing the linear abrasive against the surface to be polished. 2. The method for polishing a spherical surface and an aspherical surface according to claim 1, wherein the pressing member is swung along the surface to be polished.
【請求項7】 研磨剤を具備する線状研磨材と、この線
状研磨材を送給する送り出しリールを備える送給部と、
この送給部から送り出される前記線状研磨材を、この送
給部より所定間隔を置いて巻き取る巻き取りリールを備
える巻取部と、前記送給部と前記巻取部間において走行
する前記線状研磨材を被研磨面に強制的に圧接する圧接
具とから構成したことを特徴とする球面、非球面の研磨
装置。
7. A linear abrasive having an abrasive, and a feeding section having a delivery reel for feeding the linear abrasive,
A winding unit including a winding reel that winds the linear abrasive material sent from the feeding unit at a predetermined interval from the feeding unit; and a unit that travels between the feeding unit and the winding unit. And a pressing tool for forcibly pressing the linear abrasive onto the surface to be polished.
【請求項8】 前記圧接具は、先端に前記線状研磨材の
径より小さい幅の溝を外周面に備えるローラーを回転自
在に取付けることにより構成したことを特徴とする請求
項7記載の球面、非球面の研磨装置。
8. The spherical surface according to claim 7, wherein the pressing member is configured by rotatably mounting a roller having a groove having a width smaller than a diameter of the linear abrasive on an outer peripheral surface at a tip end. , Aspheric polishing equipment.
【請求項9】 前記圧接具の先端に回転自在に取付けた
ローラーはポリウレタン等の弾性材料にて形成したこと
を特徴とする請求項8記載の球面、非球面の研磨装置。
9. The polishing apparatus for spherical and aspherical surfaces according to claim 8, wherein the roller rotatably attached to the tip of said pressing member is made of an elastic material such as polyurethane.
JP29855499A 1999-10-20 1999-10-20 Spherical surface and nonspherical surface polishing method and device Withdrawn JP2001121395A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29855499A JP2001121395A (en) 1999-10-20 1999-10-20 Spherical surface and nonspherical surface polishing method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29855499A JP2001121395A (en) 1999-10-20 1999-10-20 Spherical surface and nonspherical surface polishing method and device

Publications (1)

Publication Number Publication Date
JP2001121395A true JP2001121395A (en) 2001-05-08

Family

ID=17861251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29855499A Withdrawn JP2001121395A (en) 1999-10-20 1999-10-20 Spherical surface and nonspherical surface polishing method and device

Country Status (1)

Country Link
JP (1) JP2001121395A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011093057A (en) * 2009-10-30 2011-05-12 Tokyo Seimitsu Co Ltd Wafer edge polishing apparatus and edge polishing method used therein

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011093057A (en) * 2009-10-30 2011-05-12 Tokyo Seimitsu Co Ltd Wafer edge polishing apparatus and edge polishing method used therein

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