JP2001108425A - Method and apparatus for measuring end face of pin having microdiameter - Google Patents

Method and apparatus for measuring end face of pin having microdiameter

Info

Publication number
JP2001108425A
JP2001108425A JP28533899A JP28533899A JP2001108425A JP 2001108425 A JP2001108425 A JP 2001108425A JP 28533899 A JP28533899 A JP 28533899A JP 28533899 A JP28533899 A JP 28533899A JP 2001108425 A JP2001108425 A JP 2001108425A
Authority
JP
Japan
Prior art keywords
pin
face
displacement
rotating
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28533899A
Other languages
Japanese (ja)
Other versions
JP3413649B2 (en
Inventor
Yutaka Maruyama
豊 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tnk Sanwa Precision Co Ltd
Original Assignee
Tnk Sanwa Precision Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tnk Sanwa Precision Co Ltd filed Critical Tnk Sanwa Precision Co Ltd
Priority to JP28533899A priority Critical patent/JP3413649B2/en
Publication of JP2001108425A publication Critical patent/JP2001108425A/en
Application granted granted Critical
Publication of JP3413649B2 publication Critical patent/JP3413649B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To measure the perpendicularity at the end of a pin having a microdiameter being used as a gauge pin quickly, accurately and inexpensively. SOLUTION: The end face P2 of a columnar pin P is abutted against a stopper 30 while applying a rotational force to the circumferential side face P1 thereof and displacement of the end face P2 of the turning pin P from the center is measured by means of a displacement sensor L. Perpendicularity of the end face P2 of the pin P is then measured based on the displacement. The measuring apparatus comprises a base 10 for supporting the circumferential side face P1 of the columnar pin P, a rotary belt 20 for imparting a rotational force to the pin P by coming into pressure contact with an upper part of the circumferential side face P1 of the pin P supported horizontally on the supporting base 10, a stopper 30 abutting against the end face P2 of the turning pin P, and a sensor L for measuring the displacement of the end face P2 of the turning pin P from the center.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、極小径ピンを測定
する端面測定方法及び測定装置に係り、特に、直径が0.
7mm 程度の極小径ピンの端面の直角度を測定する極小径
ピンの端面測定方法及び測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an end face measuring method and a measuring apparatus for measuring an extremely small diameter pin.
The present invention relates to a method and an apparatus for measuring the end face of a pin having an extremely small diameter, which measures the perpendicularity of the end face of the pin having a diameter of about 7 mm.

【0002】[0002]

【従来の技術】従来、ピンの端部を測定する方法とし
て、電気マイクロメーターを使用した測定方法が知られ
ている。この電気マイクロメーターは、例えば、ハード
ディスクのスピンドルシャフトにおける端面の直角度を
測定する際に、シャフトの端面に接触する触針の変位量
を測定して端面の直角度を測定する方法である。この測
定方法によると、例えば直径 3mm長さ15mm程度のスピン
ドルシャフト端面を測定することが可能である。
2. Description of the Related Art Conventionally, a measuring method using an electric micrometer has been known as a method for measuring an end of a pin. This electric micrometer is, for example, a method of measuring the perpendicularity of the end face of a spindle shaft of a hard disk by measuring the displacement of a stylus in contact with the end face of the shaft when measuring the perpendicularity of the end face. According to this measuring method, for example, it is possible to measure a spindle shaft end face having a diameter of about 3 mm and a length of about 15 mm.

【0003】一方、極小径ピンが使用される分野とし
て、光ファイバー情報通信技術のMTコネクターに使用
されるガイドピンなどがある。このガイドピンは、外径
0.7mm、全長11.4mm程度の極小径ピンで、主にMTコネ
クターの連結用として用いられ、外径精度は相互差で0.
5 μm 〜2 μm の精度まで加工されている。
On the other hand, as a field in which an extremely small diameter pin is used, there is a guide pin used for an MT connector of optical fiber information communication technology. This guide pin has an outer diameter
An ultra-small pin with a diameter of 0.7mm and a total length of about 11.4mm.It is mainly used for connecting MT connectors.
It is machined to an accuracy of 5 μm to 2 μm.

【0004】また、このような極小径ピンの使用に伴
い、極小径ピンの使用精度を高めるゲージピンのニーズ
も高まっている。この種のゲージピンは、例えば、前記
ガイドピンと同等の寸法、精度に形成された極小径ピン
で、更にピン端部の直角精度が高いものが要求される。
そして、この高精度な直角端面を利用して、他の極小径
ピンの使用精度を高めるものである。
[0004] Further, with the use of such an ultra-small diameter pin, the need for a gauge pin for improving the use accuracy of the ultra-small diameter pin is increasing. This type of gauge pin is required to be, for example, an extremely small diameter pin formed with the same size and accuracy as the guide pin, and having a higher right-angle accuracy at the pin end.
Then, by utilizing the high-precision right-angled end surface, the use accuracy of another ultra-small diameter pin is improved.

【0005】[0005]

【発明が解決しようとする課題】従来の電気マイクロメ
ーターを使用した測定方法では、触針をシャフト端面に
接触して測定する方法であるために、直径 3mm長さ15mm
程度のスピンドルシャフト端面を測定することは可能で
も、触針の接触圧が妨げになり、外径0.7mm 、全長11.4
mm程度のごく軽量な極小径ピンの端面を正確に測定する
ことは不可能であった。しかも、現在では、極小径ピン
の端部を迅速に且つ正確に測定する方法や装置は未だ確
立されていないのが現状である。
In a conventional measuring method using an electric micrometer, a method in which a stylus is brought into contact with an end face of a shaft for measurement is used.
Although it is possible to measure the end surface of the spindle shaft, the contact pressure of the stylus is impeded, the outer diameter is 0.7 mm, and the total length is 11.4.
It has not been possible to accurately measure the end face of a very small diameter pin that is as light as about mm. In addition, at present, no method or device has been established for quickly and accurately measuring the end of an extremely small diameter pin.

【0006】そこで本発明は上述の課題を解決すべく創
出されたもので、例えばゲージピン等に使用される極小
径ピンの端部直角精度を、迅速に且つ正確に測定できる
極小径ピンの端面測定方法及び測定装置の提供を目的と
するものである。
SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problem, and is an end face measurement of an extremely small-diameter pin which can quickly and accurately measure the end right angle accuracy of an extremely small-diameter pin used for a gauge pin or the like. It is intended to provide a method and a measuring device.

【0007】[0007]

【課題を解決するための手段】上述の目的を達成すべく
本発明の第1の手段は、水平に支持した円柱状のピンP
周側面P1に回転力を与えながらピンP端面P2をスト
ッパー30に当接させ、回転するピンP端面P2の中心
から偏移した位置の変位値を変位センサーLで測定し、
この変位測定値からピンP端面P2の直角度を測定する
方法にある。
In order to achieve the above object, a first means of the present invention is to provide a horizontally supported cylindrical pin P.
The pin P end surface P2 is brought into contact with the stopper 30 while applying a rotational force to the peripheral side surface P1, and a displacement value at a position shifted from the center of the rotating pin P end surface P2 is measured by the displacement sensor L.
There is a method of measuring the squareness of the end surface P2 of the pin P from the measured displacement value.

【0008】第2の手段は、円柱状のピンP周側面P1
を点で支持する支持台10と、水平に支持された支持台
10上のピンP周側面P1の上部に圧接してピンPに回
転力を与える回転ベルト20と、回転するピンPの端面
P2に当接するストッパー30と、回転するピンP端面
P2の中心から偏移した位置の変位値を測定する変位セ
ンサーLとを備えた装置にある。
[0008] The second means is a cylindrical pin P peripheral side surface P1
, A rotating belt 20 which presses against the upper side of the peripheral surface P1 of the pin P on the horizontally supported support 10 to apply a rotational force to the pin P, and an end surface P2 of the rotating pin P And a displacement sensor L for measuring a displacement value at a position shifted from the center of the rotating pin P end surface P2.

【0009】第3の手段の変位センサーLは、回転する
ピン端面の中心から偏移した位置にレーザーL1を照射
する非接触式のレーザー変位計を使用する。この場合、
ストッパーとの位置的な干渉をさけるため、45度方向か
ら照射するのが好ましい。
The displacement sensor L of the third means uses a non-contact type laser displacement meter which irradiates a laser L1 to a position shifted from the center of the rotating pin end face. in this case,
In order to avoid positional interference with the stopper, it is preferable to irradiate from a 45 degree direction.

【0010】第4の手段の支持台10は、硬質で摩擦係
数の小さい、例えばルビー球11等の球体を複数個固定
してピンP周側面P1を支持することにある。
The support base 10 of the fourth means is to fix a plurality of spheres such as ruby balls 11 which are hard and have a small coefficient of friction and support the pin P peripheral side surface P1.

【0011】第5の手段の回転ベルト20は、支持台1
0上のピンPをストッパー30側に付勢しながらピンP
の周側面を回転せしめることを課題解消のための手段と
する。
The rotating belt 20 of the fifth means is mounted on the support table 1.
0 while urging the pin P on the
Rotating the peripheral side surface of the vehicle is a means for solving the problem.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の形態を説明
する。本発明測定装置の基本構成は支持台10、回転ベ
ルト20、ストッパー30、変位センサーLから成る
(図1参照)。
Embodiments of the present invention will be described below. The basic configuration of the measuring device of the present invention includes a support 10, a rotating belt 20, a stopper 30, and a displacement sensor L (see FIG. 1).

【0013】支持台10は、円柱状のピンP周側面P1
を支持するもので、測定するピンPを水平に支持し、後
述する回転ベルト20で支持台10上のピンPを回転さ
せる(図3参照)。そのため、回転するピンPと支持台
10との摩擦係数をできるだけ少なくする必要がある。
そこで、支持台10の上面に硬質で摩擦係数の小さいル
ビー球11を複数個固定し、このルビー球11でピンP
の周側面P1を点で支持するように設けている(図4参
照)。図示のルビー球11は、4個使用している状態を
示している。また、ルビー球11は、硬質で摩擦係数の
小さい球体であれば他の材質に変更してもよい。
The support base 10 has a cylindrical pin P peripheral side surface P1.
The pin P to be measured is horizontally supported, and the pin P on the support base 10 is rotated by a rotating belt 20 described later (see FIG. 3). Therefore, it is necessary to reduce the coefficient of friction between the rotating pin P and the support 10 as much as possible.
Therefore, a plurality of hard ruby balls 11 having a small coefficient of friction are fixed to the upper surface of the support base 10, and the pin P
(See FIG. 4) so as to support the peripheral side surface P1 at a point. The illustrated ruby ball 11 shows a state where four balls are used. The ruby ball 11 may be changed to another material as long as it is hard and has a small friction coefficient.

【0014】回転ベルト20は、支持台10上のピンP
を回転せしめるものである(図1参照)。この回転ベル
ト20は、ピンPの周側面P1の上部に圧接してピンP
に回転力を与えると同時にストッパー30側に当接させ
る必要がある。そこで、ピンPにスラストモーションを
発生させるべく、ピンPの周側面P1に対して、直交状
態よりもやや角度を付けて回転ベルト20を走行させ、
ピンPの端面P2を常にストッパー30に当接させるこ
とで、端面の変位量のみを測定することが可能となる
(図2参照)。
The rotating belt 20 is provided with a pin P on the support 10.
Is rotated (see FIG. 1). The rotating belt 20 is pressed against the upper portion of the peripheral side surface P1 of the pin P to
It is necessary to apply a rotational force to the stopper 30 and at the same time contact the stopper 30. Then, in order to generate a thrust motion on the pin P, the rotating belt 20 is caused to run at a slightly greater angle than the orthogonal state with respect to the peripheral side surface P1 of the pin P,
By always bringing the end face P2 of the pin P into contact with the stopper 30, only the displacement of the end face can be measured (see FIG. 2).

【0015】ストッパー30は、ピンPの端面P2に当
接するもので、このストッパー30の位置で端面P2が
回転する(図3参照)。この回転する端面P2の変位置
を変位センサーLで測定する(図2、図3参照)。
The stopper 30 contacts the end face P2 of the pin P, and the end face P2 rotates at the position of the stopper 30 (see FIG. 3). The displacement position of the rotating end face P2 is measured by the displacement sensor L (see FIGS. 2 and 3).

【0016】変位センサーLは、回転するピンP端面P
2の中心から偏移した位置の変位値を測定する(図5参
照)。図示の変位センサーLは、レーザーL1を照射す
る非接触式のレーザー変位計を使用している。この非接
触式のレーザー変位計は、測定精度が高くしかも非接触
式であるので、測定圧の影響を受けず、極めて軽量なピ
ンPの測定に最適である。この変位センサーLによる
と、回転するピンP端面P2の中心から偏移した位置に
レーザーL1を照射し、この位置の変位置を測定するも
のである。
The displacement sensor L has a rotating pin P end face P
The displacement value at the position deviated from the center of 2 is measured (see FIG. 5). The illustrated displacement sensor L uses a non-contact laser displacement meter that irradiates a laser L1. Since the non-contact type laser displacement meter has high measurement accuracy and is non-contact type, the non-contact type laser displacement meter is not affected by the measurement pressure and is most suitable for the measurement of an extremely lightweight pin P. According to the displacement sensor L, a position deviated from the center of the rotating pin P end surface P2 is irradiated with the laser L1, and a change position of this position is measured.

【0017】本発明の測定方法は、上述の測定装置を用
いて次のように行う。すなわち、支持台10上に円柱状
のピンPを水平に支持する(図3参照)。次に、ピンP
周側面P1に回転ベルト20で回転力を与えながらピン
P端面P2をストッパー30に当接させる。更に、回転
するピンP端面P2の中心から偏移した位置の変位値を
変位センサーLで測定し、この変位測定値からピンP端
面P2の直角度を測定するものである。この実施例では
非接触式のレーザー変位計を使用しているので、測定値
は、レーザーL1が端面P2の被測位置に当たるまでの
距離から被測位置における振幅を測定する(図2参
照)。そして、この振幅から端面P2の直角度は次の式
から導き出される。尚、本発明の測定方法及び測定装置
は、極小径ピンの測定に限られるものではなく、前述し
たハードディスクのスピンドルシャフトのような太いピ
ンの測定にも利用できることは言うまでもない。
The measuring method of the present invention is performed as follows using the above-described measuring device. That is, the columnar pin P is horizontally supported on the support base 10 (see FIG. 3). Next, pin P
The pin P end surface P2 is brought into contact with the stopper 30 while applying a rotational force to the peripheral side surface P1 by the rotary belt 20. Further, a displacement value at a position deviated from the center of the rotating pin P end surface P2 is measured by the displacement sensor L, and the squareness of the pin P end surface P2 is measured from the measured displacement value. In this embodiment, since a non-contact type laser displacement meter is used, the measured value measures the amplitude at the measured position from the distance until the laser L1 hits the measured position on the end face P2 (see FIG. 2). Then, the squareness of the end face P2 is derived from the following equation from this amplitude. The measuring method and the measuring apparatus according to the present invention are not limited to the measurement of a pin having a very small diameter, but may be used for the measurement of a thick pin such as the spindle shaft of a hard disk described above.

【0018】[0018]

【数式1】直角度 (μm)=振幅×端面P2の直径/端面
P2の被測位置の直径×1/2 そこで、図5に示す測定方法により得られた図6のデー
タを基に、直角度を導くと次の通りになる。
## EQU1 ## Squareness (μm) = amplitude × diameter of end face P2 / diameter of measured position of end face P2 × 1 / Then, based on the data of FIG. 6 obtained by the measurement method shown in FIG. Deriving the angle gives:

【0019】[0019]

【数式2】1.52μm ×0.7 /0.5 ×1/2=1.06μm この結果、図5に示すピンPの端面P2の直角度が1.06
μm と検出されたことがわかる。
[Formula 2] 1.52 μm × 0.7 / 0.5 × 1/2 = 1.06 μm As a result, the perpendicularity of the end face P2 of the pin P shown in FIG.
It can be seen that it was detected as μm.

【0020】[0020]

【発明の効果】本発明は、上述の如く構成したことによ
り、当初の目的を達成する。
According to the present invention, the above-mentioned configuration achieves the original object.

【0021】すなわち、請求項1に記載の測定方法によ
り、ピン外径基準に正確な回転を与え、ピン1回転のフ
レ量のみを抽出させることにより、ゲージピン等に使用
される極小径ピンの端部直角精度を迅速に且つ正確に測
定することが可能になった。
That is, according to the measuring method of the present invention, an accurate rotation is given to the pin outer diameter reference, and only the amount of deflection of one rotation of the pin is extracted, so that the end of the very small diameter pin used as a gauge pin or the like. It has become possible to measure the right angle accuracy quickly and accurately.

【0022】また、請求項2に記載された測定装置で
は、ピンが軸方向に移動しないよう常にストッパー30
に当接させるしくみによって、極めて短時間で正確な測
定が可能になった。
Further, in the measuring device according to the second aspect, the stopper 30 is always used so that the pin does not move in the axial direction.
The mechanism for contacting the sample allows accurate measurement in a very short time.

【0023】請求項3の変位センサーLとして非接触式
のレーザー変位計を使用したことにより、従来の接触式
測定装置のように、測定圧の影響で軽量なピンが不安定
になったり、接触部の摩擦と端面の表面形状から有害な
キズ等が発生するなど、高精度の測定に悪影響を及ぼす
おそれもないから、極めて軽量なピンPの測定を正確に
行うことができる。
Since a non-contact type laser displacement meter is used as the displacement sensor L according to the third aspect, unlike a conventional contact type measuring device, a lightweight pin becomes unstable due to the influence of a measuring pressure, Since there is no possibility that harmful scratches or the like are generated from the friction of the portion and the surface shape of the end face, there is no possibility of adversely affecting high-precision measurement, the extremely lightweight pin P can be accurately measured.

【0024】請求項4に記載の硬質で摩擦係数の小さい
球体で周側面P1を支持するので、ピンP回転時に生じ
る周側面P1と支持台10との摩擦係数を低減し、回転
がスムーズになるから、極めて正確な測定が可能にな
る。
Since the peripheral surface P1 is supported by the hard sphere having a small friction coefficient according to the fourth aspect, the friction coefficient between the peripheral surface P1 and the support base 10 generated when the pin P rotates is reduced, and the rotation is smooth. This allows extremely accurate measurements.

【0025】請求項5に記載の回転ベルト20によっ
て、ピンPをストッパー30側に付勢しながら周側面P
1に回転を与えることが可能になった。この結果、単純
なシステムで能率の良い測定を行えることになり、本発
明測定装置の製造コストを安価に設定することができ
る。
The pin P is urged toward the stopper 30 by the rotating belt 20 according to the fifth aspect, and the peripheral side P is urged.
It became possible to give rotation to 1. As a result, efficient measurement can be performed with a simple system, and the manufacturing cost of the measuring device of the present invention can be set at low cost.

【0026】このように、本発明によると、例えばゲー
ジピン等に使用される極小径ピンの端部直角精度を、迅
速に且つ正確に、しかも安価な費用で測定できるなどと
いった産業上有益な種々の効果を奏するものである。
As described above, according to the present invention, it is possible to quickly and accurately measure the right angle accuracy of an end portion of an extremely small diameter pin used for a gauge pin or the like at a low cost, and various industrially useful various measures can be obtained. It is effective.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明測定装置の一実施例を示す平面図。FIG. 1 is a plan view showing one embodiment of the measuring apparatus of the present invention.

【図2】本発明測定装置の要部を拡大した平面図。FIG. 2 is an enlarged plan view of a main part of the measuring device of the present invention.

【図3】本発明測定装置の要部を拡大した側面図。FIG. 3 is an enlarged side view of a main part of the measuring device of the present invention.

【図4】本発明測定装置のルビー球を示す拡大断面図。FIG. 4 is an enlarged sectional view showing a ruby ball of the measuring device of the present invention.

【図5】本発明測定方法で被測定位置の変位値を測定す
る状態を示す概念図。
FIG. 5 is a conceptual diagram showing a state in which a displacement value of a measured position is measured by the measuring method of the present invention.

【図6】本発明測定装置における非接触式のレーザー変
位計によって被測定位置の変位値が出力されたチャート
図。
FIG. 6 is a chart in which a displacement value of a position to be measured is output by a non-contact laser displacement meter in the measuring apparatus of the present invention.

【符号の説明】[Explanation of symbols]

P ピン P1 周側面 P2 端面 L 変位センサー L1 レーザー 10 支持台 11 ルビー球 20 回転ベルト 21 シンクロナスモーター 30 ストッパー P Pin P1 Peripheral side surface P2 End surface L Displacement sensor L1 Laser 10 Support base 11 Ruby ball 20 Rotating belt 21 Synchronous motor 30 Stopper

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 水平に支持した円柱状のピン周側面に回
転力を与えながらピン端面をストッパーに当接させ、回
転するピン端面の中心から偏移した位置の変位値を変位
センサーで測定し、この変位測定値からピン端面の直角
度を測定することを特徴とする極小径ピンの端面測定方
法。
A pin end face is brought into contact with a stopper while applying a rotational force to a circumferentially supported cylindrical pin peripheral side face, and a displacement value at a position deviated from the center of the rotating pin end face is measured by a displacement sensor. And measuring the squareness of the pin end face from the measured displacement value.
【請求項2】 円柱状のピン周側面を点で支持する支持
台と、水平に支持された支持台上のピン周側面の上部に
圧接してピンに回転力を与える回転ベルトと、回転する
ピンの端面に当接するストッパーと、回転するピン端面
の中心から偏移した位置の変位値を測定する変位センサ
ーとを備えたことを特徴とする極小径ピンの端面測定装
置。
2. A support base for supporting the peripheral surface of the cylindrical pin at a point, a rotating belt for pressing the upper portion of the peripheral surface of the pin on the horizontally supported support surface to apply a rotational force to the pin, and rotating. An end face measuring device for an extremely small diameter pin, comprising: a stopper that abuts on an end face of a pin; and a displacement sensor that measures a displacement value at a position deviated from the center of the rotating pin end face.
【請求項3】 前記変位センサーは、回転するピン端面
の中心から偏移した位置にレーザーを照射する非接触式
のレーザー変位計を使用する請求項2記載の極小径ピン
の端面測定装置。
3. The end face measuring device for an extremely small diameter pin according to claim 2, wherein the displacement sensor uses a non-contact type laser displacement meter that irradiates a laser to a position deviated from the center of the rotating pin end face.
【請求項4】 前記支持台は、硬質で摩擦係数の小さい
複数の球体を固定してピン周側面を支持する請求項2又
は3記載の極小径ピンの端面測定装置。
4. The end face measuring device for a pin having a very small diameter according to claim 2, wherein the support table supports a plurality of hard spheres having a small coefficient of friction and supports a peripheral surface of the pin.
【請求項5】 前記回転ベルトは、支持台上のピンをス
トッパー側に付勢しながらピンの周側面を回転せしめる
請求項2乃至4いずれか記載の極小径ピンの端面測定装
置。
5. The end face measuring device for an extremely small diameter pin according to claim 2, wherein the rotating belt rotates the peripheral side surface of the pin while urging the pin on the support base toward the stopper.
JP28533899A 1999-10-06 1999-10-06 Method and apparatus for measuring end face of extremely small diameter pin Expired - Fee Related JP3413649B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28533899A JP3413649B2 (en) 1999-10-06 1999-10-06 Method and apparatus for measuring end face of extremely small diameter pin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28533899A JP3413649B2 (en) 1999-10-06 1999-10-06 Method and apparatus for measuring end face of extremely small diameter pin

Publications (2)

Publication Number Publication Date
JP2001108425A true JP2001108425A (en) 2001-04-20
JP3413649B2 JP3413649B2 (en) 2003-06-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7458168B2 (en) 2006-02-03 2008-12-02 Olympus Medical Systems Corp. Concentricity measuring apparatus and method, squareness measuring apparatus and method, and concentricity-squareness measuring apparatus and method
CN107449676A (en) * 2017-08-17 2017-12-08 中广核研究院有限公司 Crackle aperture displacement measurement apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7458168B2 (en) 2006-02-03 2008-12-02 Olympus Medical Systems Corp. Concentricity measuring apparatus and method, squareness measuring apparatus and method, and concentricity-squareness measuring apparatus and method
CN107449676A (en) * 2017-08-17 2017-12-08 中广核研究院有限公司 Crackle aperture displacement measurement apparatus
CN107449676B (en) * 2017-08-17 2024-03-22 中广核研究院有限公司 Crack opening displacement measuring device

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