JP2001104052A - Washing brush - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve high-grade washing quality required for washing a substrate. SOLUTION: In this washing brush 1, a fluid is supplied to a brush body 5 implanted with a number of brush bristles 7 on the outer surface thereof from inside, the brush body 5 is rotated by the fluid, and the fluid is discharged to the outer surface of the brush body 5 through a fluid passage 6 formed in the brush body 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning brush used for cleaning a liquid crystal display, a semiconductor substrate, and the like.

[0002]

2. Description of the Related Art In recent years, in a process of cleaning a work such as a liquid crystal display or a semiconductor substrate, cleaning using a cleaning brush is performed, and the brush is rotated while showering pure water or a cleaning liquid to scrub the work. Is going.

[0003]

However, in the above-described conventional cleaning brush, although cleaning is performed while showering pure water or a cleaning liquid, foreign matter removed from the work and abrasion powder of the brush itself stay in the brush. As a result, they cannot be washed off quickly, re-contaminating the work surface with stagnant foreign matter or abrasion powder, and also scratching the surface, thus becoming required. High cleaning quality can no longer be achieved.

[0004] The present invention has been proposed in view of the above,
An object of the present invention is to provide a cleaning brush capable of achieving a high cleaning quality required for cleaning a liquid crystal display, a semiconductor substrate, and the like.

[0005]

In order to achieve the above object, according to the first aspect of the present invention, a fluid is supplied from the inside to a brush body having a large number of brush bristles implanted on an outer surface, and the brush is supplied with the fluid. The main body is rotated, and the fluid is discharged to the outer surface of the brush main body through a fluid passage formed in the brush main body.

According to a second aspect of the present invention, in addition to the configuration of the first aspect of the present invention, the fluid passage is provided corresponding to a flocked portion of the brush body. .

According to a third aspect of the present invention, there is provided a cylindrical brush body having a large number of bristles implanted on an outer surface thereof; a shaft provided inside the brush body via a bearing; A channel hole formed in the axial direction and having a fluid outlet communicating with a space between the shaft and the brush body at at least one position, and formed in a flocked portion of the brush body and communicating with the space. A body-side fluid passage having a fluid outlet in the flocked portion, and a rotation drive unit that rotates the brush body by receiving a flow of a fluid supplied to the channel hole of the shaft and introduced from the fluid outlet into the empty space. It is characterized by having.

According to a fourth aspect of the present invention, in addition to the configuration of the third aspect of the present invention, the rotation drive section includes a fixed wing fixed to a shaft and an inner peripheral surface of a brush body. And a rotating wing fixed to the rotor.

Further, the invention according to claim 5 is characterized in that a flow path hole formed in the inside in the axial direction and having a fluid outlet at one end side;
A shaft provided with an enlarged-diameter opening provided closer to the other end than the fluid outlet; one end rotatably fitted to the enlarged-diameter opening of the shaft via a bearing; A body-side fluid that is formed in a disc-shaped brush body in which a brush is planted, and that is formed in the bristled portion of the brush body, communicates with a space between the enlarged diameter opening of the shaft and the brush body, and has a fluid outlet in the planted portion. A passage, a rotation drive unit that rotates the brush body by receiving a flow of the fluid supplied to the flow passage hole of the shaft and introduced from the fluid outlet into the empty space,
It is characterized by having.

[0010]

Embodiments of the present invention will be described below in detail with reference to the drawings. First, a first embodiment will be described with reference to FIGS. 1, 2, and 3. FIG.

FIG. 1 is a front sectional view showing the structure of the cleaning brush of the present invention, FIG. 2 is a sectional view taken along line II of FIG. 1, and FIG. 3 is a sectional view taken along line II-II of FIG. In these figures,
The cleaning brush 1 of the present invention includes a cylindrical brush body 5 having a large number of bristles 7.
And a shaft 3 provided through bearings 4a and 4b.

A body-side fluid passage 6 communicating with the space R between the brush body 5 and the shaft 3 is formed at a plurality of appropriate positions of the brush body 5 so that the fluid flowing into the space R is supplied to the body side. Through the fluid passage 6, the roots 7a of the brush bristles 7 are discharged to the outside as fluid outlets.

The shaft 3 is fixed at both ends thereof to support portions 31 and the like. Inside the shaft 3, a flow path hole 2 having an open end is formed along the axial direction. The bearings 4a and 4b described above are fitted between the shaft 3 and the brush main body 5 at positions corresponding to both ends of the brush main body 5, respectively. The shaft 3 is provided with fluid outlets 8a and 8b that open in four directions and communicate with the space R from the flow path hole 2 slightly inside the bearings 4a and 4b, respectively.

A little further inward of the fluid outlets 8a and 8b, a rotary drive 9 is provided between the shaft 3 and the brush body 5.
a, 9b are provided. These rotation drive units 9a, 9b
Are fixed wings 9 fixed to the outer peripheral surface of the shaft 3 respectively.
1a and 91b, and rotating blades 92a and 92b fixed to the inner peripheral surface of the brush body 5. Rotation drive unit 9a,
9b receives the flow of the fluid supplied to the flow passage hole 2 and introduced into the cavity R from the fluid outlets 8a and 8b, and receives the fixed blade 9b.
1a and 91b make the flow a diagonal flow, and the rotating blades 92a and 92b are rotated by the diagonal flow. And
The brush body 5 is integrated with the rotation of the rotary wings 92a and 92b.
Rotates.

In the cleaning brush 1 having the above-described structure, the fluid supplied from the one end opening of the shaft 3 to the flow passage hole 2 passes through the front-stage fluid outlet 8a or the rear-stage fluid outlet 8b and passes through the empty space. R, the rotation drive units 9a, 9b
After rotating the brush body 5 and passing through the rotation driving portions 9a and 9b, the brush body 5 enters the body-side fluid passages 6 formed at a plurality of locations, and is discharged to the outside from the flocked root portion 7a.

As described above, in the first embodiment, by rotating the brush body 5 with the fluid supplied from the inside of the brush body 5, the work is rubbed and washed with the brush bristles 7 and the fluid is washed. Since the bristles 7 are discharged to the outside through the side fluid passage 6, the foreign matter and abrasion powder which tend to stay inside the brush bristles 7. Can be washed off quickly. Therefore, the work surface can be prevented from being recontaminated or damaged by the staying foreign matter or abrasion powder, and a high cleaning quality required for cleaning a liquid crystal display, a semiconductor substrate, or the like can be achieved.

Further, since the cleaning brush 1 is rotated without using the motor driving source, cleaning can be performed at low cost, and noise can be reduced to enable cleaning in a clean environment.

Next, a second embodiment will be described with reference to FIGS.

FIG. 4 is a front sectional view showing a main part of a cleaning brush according to a second embodiment of the present invention, and FIG. 5 is a sectional view taken along line III-III of FIG. In these figures,
The cleaning brush 10 according to the second embodiment includes a shaft 1
3 and a brush body 15. The shaft 13 has a flow passage hole 12 formed in the axial direction therein and having a fluid outlet 18 at one end side in four directions perpendicular to the axial direction, and the other end from the fluid outlet 18. And a diameter-enlarged opening 130 provided on the side.

The brush body 15 has a thick disk-shaped plate portion 151 and a peripheral wall portion 1 having a diameter smaller than the outer diameter of the plate portion 151 and standing upright on the back surface of the plate portion 151.
52, and the peripheral wall portion 152 on one end side
Are rotatably fitted to the large-diameter opening 130 via a bearing 14, and a large number of brush bristles 17 are implanted on the outer surface of the plate portion 151 on the other end side. A plurality of portions of the plate portion 151 of the brush main body 15 are provided between the plate portion 151 and the shaft
Body side fluid passage 16 communicating with the empty space R1 surrounded by
The fluid that has flowed into the empty space R1 passes through the main body side fluid passage 16 and the roots 1 of the brush bristles 17.
7a is discharged to the outside as a fluid outlet.

A little closer to one end of the fluid outlet 18 of the shaft 13 is a shaft 13 and a brush body 15.
The rotation driving unit 19 is provided between the rotation driving unit 19 and the peripheral wall 152. The rotation drive unit 19 includes a fixed wing 191 fixed to the outer peripheral surface of the shaft 13 and a peripheral wall portion 15 of the brush body 15.
2 and a rotary wing 192 fixed to the inner peripheral surface. The rotation drive unit 19 is supplied to the channel hole 12 and the fluid outlet 1
8 receives the flow of the fluid introduced into the empty space R1, the stationary blade 191 changes the flow into a mixed flow, and the mixed flow
92 rotates. Then, the brush body 15 rotates integrally with the rotation of the rotary wing 192.

In the cleaning brush 10 having the above configuration, the fluid supplied to the flow passage hole 12 from the other end side opening (not shown) of the shaft 13 passes through the fluid outlet 18 and enters the empty space R1, where the fluid is rotated. After flowing into the drive unit 19, the brush body 1
5 is rotated, and after passing through the rotation drive unit 19, enters the body-side fluid passages 16 formed at a plurality of locations, and
It is discharged from 7a to the outside.

As described above, also in the second embodiment, as in the case of the first embodiment described above, the brush body 15 is rotated by the fluid supplied from the back side of the brush body 15, thereby making the work Is washed with brush bristles 17 and the fluid is discharged to the outside from the planted root portion 17a through the main body side fluid passage 16.
Foreign matter and abrasion powder which tend to stay inside the brush bristles 17 can be quickly washed away by the fluid flowing from the root side of the brush bristles 17. Therefore, the work surface can be prevented from being recontaminated or damaged by the staying foreign matter or abrasion powder, and a high cleaning quality required for cleaning a liquid crystal display, a semiconductor substrate, or the like can be achieved.

Further, since the cleaning brush 10 is rotated without using the motor driving source, cleaning can be performed at low cost, and noise can be reduced to enable cleaning in a clean environment.

Next, a third embodiment will be described with reference to FIGS.

FIG. 6 is a front sectional view showing a main part of a cleaning brush according to a third embodiment of the present invention, and FIG. 7 is a sectional view taken along line IV-IV of FIG. The difference between the cleaning brush 20 according to the third embodiment and the cleaning brush 10 according to the above-described second embodiment is that a fluid outlet 28 formed in the shaft 13 is configured as shown in FIG. This is a point formed obliquely downward with respect to the axial direction of the shaft and formed in three directions by being inclined in the circumferential direction, as shown in FIG. 7, and a point formed by only the fixed wing 291 of the rotation drive unit 29. . With this configuration, the fluid outlet 2 is guided by the flow path hole 12.
8, the fluid ejected from the three-way outlet is directly transferred to the fixed blade 29.
1 and collided with each other, rotating the fixed wing 291,
The brush body 15 is rotated.

Therefore, the cleaning brush 20 according to the third embodiment can achieve the above-described high cleaning quality and perform cleaning in a clean environment with a simpler configuration.

Next, a fourth embodiment will be described with reference to FIGS.

FIG. 8 is a front sectional view showing a main part of a cleaning brush according to a fourth embodiment of the present invention, and FIG. 9 is a sectional view taken along line VV of FIG. The difference between the cleaning brush 30 according to the fourth embodiment and the cleaning brush 10 according to the second embodiment is that the cleaning brush 30 according to the second embodiment is different from the cleaning brush 10 according to the second embodiment.
The fluid outlet 38 is formed in the widened portion 320, and the fluid outlet 38 is directed obliquely downward with respect to the shaft axis direction as shown in FIG. As shown, it is formed in six directions by being inclined in the circumferential direction.
Is that the rotation drive unit 39 fixed to the inner peripheral surface is formed of an annular plate, and the inner peripheral surface of the plate has a saw-tooth shape.

With this configuration, the fluid that has been guided through the flow path hole 12 and jetted from the six-way outlet of the fluid outlet 38 directly mixes with the diagonal flow on the inner peripheral surface of the saw-toothed plate of the rotary drive unit 39. As a result, the rotation drive unit 39 is rotated, and the brush body 15 is rotated.

Therefore, the cleaning brush 20 according to the fourth embodiment has the above-described high cleaning quality under an even simpler configuration without using a rotating blade or a fixed blade having a complicated shape. Achievement and cleaning in a clean environment are possible.

In the first embodiment described above, the main body side fluid passages 6 are formed at a plurality of appropriate locations on the brush main body 5, but as shown in FIG. Root portion 7 present in brush body 5 in large numbers
a. Similarly,
In the above-described second to fourth embodiments, the main body-side fluid passage 16 is formed at a plurality of appropriate locations of the brush main body 15, but as shown in FIG. Flocked root portion 17a present in large number in main body 15
May be formed in each of the.

With this configuration, the brush bristles 7,
The effect of flowing down foreign matter and abrasion powder that tends to stay inside 17 is further strengthened, so that the work surface can be more reliably prevented from being recontaminated or damaged by the staying foreign matter or abrasion powder, Even higher cleaning quality can be achieved.

[0034]

Since the present invention has the above-described configuration,
The following effects can be obtained.

According to the first aspect of the present invention, by rotating the brush main body with the fluid supplied from the inside of the brush main body, the work is rubbed and washed with the brush bristles, and the fluid is implanted through the main body side fluid passage. Since the material is discharged from the root portion to the outside, the foreign matter and abrasion powder which tend to stay inside the brush bristle can be quickly washed down by the fluid flowing from the root side of the brush bristle. Therefore, the work surface can be prevented from being re-contaminated or damaged by the staying foreign matter or abrasion powder, and a high cleaning quality required for cleaning a liquid crystal display, a semiconductor substrate, or the like can be achieved.

In addition, since the cleaning brush is rotated without using the motor drive source, cleaning can be performed at low cost, and noise can be reduced to enable cleaning in a clean environment.

According to the second aspect of the present invention, since the fluid passage is provided corresponding to the flocked portion of the brush main body, the action of flowing down foreign matter and abrasion powder which tend to stay in the brush bristle is enhanced. Therefore, it is possible to more reliably prevent the work surface from being recontaminated or damaged by the staying foreign matter or abrasion powder, and to achieve a higher cleaning quality.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing a configuration of a cleaning brush of the present invention.

FIG. 2 is a sectional view taken along line II of FIG. 1;

FIG. 3 is a sectional view taken along line II-II of FIG. 1;

FIG. 4 is a front sectional view showing a configuration of a main part of a cleaning brush according to a second embodiment of the present invention.

FIG. 5 is a sectional view taken along line III-III of FIG. 4;

FIG. 6 is a front sectional view showing a configuration of a main part of a cleaning brush according to a third embodiment of the present invention.

FIG. 7 is a sectional view taken along line IV-IV of FIG. 6;

FIG. 8 is a front sectional view showing a configuration of a main part of a cleaning brush according to a fourth embodiment of the present invention.

FIG. 9 is a sectional view taken along line VV of FIG. 8;

FIG. 10 is a diagram showing a case where a body-side fluid passage is formed in each root portion of the brush hair in the first embodiment.

FIG. 11 is a view showing a case where a body-side fluid passage is formed in each of the roots of brush bristles in the second to fourth embodiments.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning brush 2 Flow path hole 3 Shaft 4a Bearing 4b Bearing 5 Brush main body 6 Main body side fluid passage 7 Brush bristles 7a Flocked root part 8a Fluid outlet 8b Fluid outlet 9a Rotary driving part 9b Rotary driving part 10 Cleaning brush 12 Flow path Hole 13 Shaft 14 Bearing 15 Brush body 16 Body side fluid passage 17 Brush bristles 17a Flocked root portion 18 Fluid outlet 19 Rotary drive unit 20 Cleaning brush 28 Fluid outlet 29 Rotary drive unit 30 Cleaning brush 31 Supporting unit 38 Fluid outlet 39 Rotation Drive unit 91a Fixed wing 91b Fixed wing 92a Rotating wing 92b Rotating wing 130 Large diameter opening 151 Plate part 152 Peripheral wall part 191 Fixed wing 192 Rotating wing 291 Fixed wing 320 Widened part R Empty part R1 Empty part

Claims (5)

[Claims] 1. A brush body in which a plurality of brush bristles are implanted on an outer surface, a fluid is supplied from the inside, the brush body is rotated by the fluid, and the fluid is passed through a fluid passage formed in the brush body. A cleaning brush, wherein the brush is discharged to an outer surface of the cleaning brush. 2. The cleaning brush according to claim 1, wherein the fluid passage is provided corresponding to a flocked portion of the brush main body. 3. A cylindrical brush body having a plurality of bristles implanted on an outer surface thereof; a shaft provided inside the brush body via a bearing; and at least one shaft formed inside the shaft in an axial direction. A flow path hole provided with a fluid outlet communicating with a space between the shaft and the brush body at a location; and a body formed in a flocked portion of the brush body and communicating with the space and having a fluid outlet in the flocked portion. A cleaning brush comprising: a side fluid passage; and a rotation drive unit configured to rotate a brush body by receiving a flow of a fluid supplied to a flow passage hole of the shaft and introduced from a fluid outlet into an empty space. . 4. The cleaning brush according to claim 3, wherein the rotation drive section includes a fixed blade fixed to a shaft and a rotary blade fixed to an inner peripheral surface of the brush main body. 5. A shaft provided with a flow passage hole formed in the axial direction and having a fluid outlet on one end side, and a diameter-enlarged opening provided on the other end side from the fluid outlet. A disk-shaped brush body rotatably fitted to the radial opening via a bearing, and a large number of brush bristles implanted on the other end surface; a brush-formed opening formed in the brush implanted portion of the brush body; And a body-side fluid passage communicating with the space between the brush body and the flocked portion and having a fluid outlet, and a flow of fluid supplied to the flow passage hole of the shaft and introduced from the fluid outlet into the space. A rotary drive for receiving and rotating the brush body; and a cleaning brush.