JP2001096520A - Pressing jig for producing laminated ceramic component, pressing device and production method of laminated ceramic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressing jig for producing laminated ceramic components, by which operation under reduced pressure in the case of vacuum pressing can be performed in short time and air contained in a ceramic laminate is removed more surely. SOLUTION: The pressing jig 2 is equipped with the body 3 of the jig, in which a recessed part 3a for housing a ceramic laminate 5 is provided and a suction hole 3b perforated from the inner face of the recessed part 3a to the outer surface is formed, and with a cover material 4 air-tightly fitted for the recessed part so as to close the recessed part 3a of the body 3 of the jig.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a press jig, a press apparatus, and a method for manufacturing a multilayer ceramic component used for manufacturing a multilayer ceramic component such as a multilayer ceramic capacitor. And a press device used for vacuum-pressing the same, and a method for manufacturing a laminated ceramic component using the press jig.

[0002]

2. Description of the Related Art Conventionally, in manufacturing a multilayer ceramic component such as a multilayer capacitor, first, an unsintered ceramic laminate in which a plurality of green sheets are stacked is prepared. Next, the ceramic laminate is pressed to bring the ceramic green sheets into close contact with each other and to remove air present inside. Thereafter, the ceramic laminate is fired to obtain a ceramic sintered body.

[0003] When a green ceramic laminate is pressed, a pressing apparatus shown in FIG. 7 has been used. In the press device 51, a press jig 53 is housed in a vacuum chamber 52. In the vacuum chamber 52, a cylindrical chamber wall 55 is fixed to a lower surface of the top plate 54. Further, a cylindrical chamber wall 57 extending upward is fixed on the bottom surface 56. The chamber wall 55 and the chamber wall 57 are pressed against each other via a hermetic seal member 58, whereby the chamber walls 55 and 57 are hermetically sealed. The upper chamber wall 55 is provided with a suction hole 55a.

On the other hand, in the vacuum chamber 52, a lower punch 59 is provided on a bottom surface 56, and an upper punch 60 is provided on a lower surface of the top plate 54. Upper punch 60
Is configured to be able to move up and down independently of the top plate 54. The upper punch 60 is moved up and down by a driving source (not shown).

[0005] The press jig 53 has a concave portion 53 opened upward.
a. The unfired ceramic laminate 61 is housed in the recess 53a. At the time of vacuum pressing, the chamber walls 55 and 57 are pressed against each other while the ceramic laminate 61 is housed in the press jig 53, and vacuum suction is performed from the suction holes 55a. While performing the vacuum suction, the upper punch 60 is lowered, and the ceramic laminate 61 is pressed.

[0006]

A conventional press device 51
In the above, the space in the vacuum chamber 52 was decompressed by vacuum suction from the suction holes 55a. Therefore, it is necessary to decompress the space having a very large volume as compared with the ceramic laminate 61 which has to be depressurized, and it takes a long time to decompress.

Further, since the pressure in the vacuum chamber 52 is reduced, the air in the ceramic laminate 61 cannot be reliably removed unless the vacuum is applied for a sufficient time. If the air inside the ceramic laminate 61 is not sufficiently removed, defects such as delamination occur in the ceramic sintered body obtained after firing.

Accordingly, there is a need for a press jig and a press apparatus which can remove air in the ceramic laminate in a shorter time and more reliably when vacuum-pressing the ceramic laminate, and can be constructed at low cost. Was.

It is an object of the present invention to satisfy the needs described above,
It is an object of the present invention to provide a press jig and a press device for vacuum-pressing a ceramic laminate, wherein the press jig and the press device can reliably remove air in the ceramic laminate in a short time.

It is still another object of the present invention to provide a method for manufacturing a laminated ceramic component having a step of easily and surely removing air in a ceramic laminate.

[0011]

A press jig for producing a laminated ceramic component according to the present invention is a press jig for vacuum-pressing an unfired ceramic laminate in producing a laminated ceramic component. A jig body having a recess for accommodating the laminated body, and a suction hole penetrating from the inner surface to the outer surface of the recess, and the recess so as to close the recess of the jig body; And a lid member that is hermetically attached.

The press apparatus for manufacturing a laminated ceramic component according to the present invention includes the press jig according to the present invention and pressure applying means for bringing the jig body and a cover member close to each other in order to press the ceramic laminate. It is characterized by having.

[0013] The press apparatus according to the present invention may further include a vacuum chamber accommodating the press jig, the lid member, and the pressure applying means. A method for manufacturing a laminated ceramic component according to the present invention includes a step of preparing an unfired ceramic laminated body, and storing the ceramic laminated body in a jig body of the press jig according to claim 1, and using a lid member. A step of hermetically sealing the recess, and a step of pressing the ceramic laminate by bringing the lid member and the jig body close to each other while performing vacuum suction from a suction hole of the jig body. I do.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be clarified by giving specific embodiments of the present invention with reference to the drawings.

FIG. 1 is a sectional view for explaining a press jig and a press apparatus according to one embodiment of the present invention. In the press device 1 of the present embodiment, a press jig 2 is used.
The press jig 2 includes a jig body 3 and a lid member 4. The jig body 3 has a substantially cylindrical shape with a bottom having a concave portion 3a opened upward. The jig body 3 is made of a highly rigid material such as a metal. The concave portion 3 a is formed to accommodate the ceramic laminate 5. The suction hole 3b penetrates the inner surface of the concave portion 3a and the outer surface of the jig body 3.
Are formed. The suction hole 3b is connected to a vacuum suction source such as a vacuum pump (not shown).

The cover member 4 is provided so as to hermetically seal the inside of the recess 3a and to be able to move up and down within the recess 3a. Therefore, the planar shape of the lid member 4 is a shape suitable for the planar shape of the concave portion 3a. The lid member 4 can be made of, for example, an appropriate metal such as stainless steel or ceramics. An annular concave portion 4b is formed on the outer peripheral wall 4a of the lid member 4, and a seal member 6 is mounted in the annular concave portion 4b. The seal member 6 protrudes outside the outer peripheral wall 4 a of the lid member 4. Therefore, the lid material 4
Is inserted into the recess 3a, the sealing member 6
Is pressed into contact with the inner wall, so that the inside of the recess 3a is hermetically sealed.

Although the ceramic laminate 5 has a rectangular plate shape as shown in FIG. 3, the shape of the ceramic laminate may be other shapes such as a disk shape. In this embodiment, a mother ceramic laminate 5 for obtaining a multilayer capacitor is housed in the jig body 3.

In the press device 1, a lower punch 7 is arranged on the lower surface of the jig body 3, and the lower punch 7 is fixed on the bottom surface 1 a of the press device 1. Press jig 2
An upper punch 8 is arranged above the upper part. Upper punch 8
Is connected to the lower surface of the top plate 1b of the press device 1.

The upper punch 8 is configured to be vertically movable independently of the top plate 1b, and is moved vertically by a driving source (not shown). However, the lower punch 7 may be configured to be movable in the vertical direction,
Further, both the lower punch 7 and the upper punch 8 may be movable in the vertical direction. In the present embodiment, the lower punch 7 and the upper punch 8 constitute a pressure applying unit.

Next, the step of vacuum pressing using the press device 1 will be described. First, the unfired ceramic laminate 5 shown in FIG. 3 is prepared. The unfired ceramic laminate 5 can be prepared according to a known method for manufacturing a multilayer ceramic electronic component. That is, it is obtained by printing an internal electrode pattern on a mother ceramic green sheet, stacking a plurality of mother ceramic green sheets on which the internal electrode pattern is printed, and stacking a plain mother ceramic green sheet on top and bottom. .

Next, the ceramic laminate 5 is housed in the recess 3a of the jig body 3. Thereafter, the cover member 4 is inserted into the recess 3a. Next, vacuum suction is performed through the suction hole 3b of the jig body 3 to reduce the pressure inside the recess 3a. While continuing the depressurizing operation, the upper punch 8 is lowered as shown by the arrow in the figure, and the lid 4 is pressed against the jig body 3. Accordingly, the ceramic laminate 5 is pressed while the pressure in the recess 3a is reduced.

In this case, since only the pressure inside the concave portion 3a of the press jig 2 needs to be reduced, the pressure inside the concave portion 3a can be reduced in a short time. Moreover, since the suction holes 3b are provided in the jig main body 3 and vacuum suction is performed in the immediate vicinity of the ceramic laminate 5, air in the ceramic laminate 5 can be more reliably removed.

Since there is no need to construct a large-scale vacuum chamber, the structure of the press device 1 can be simplified and the cost of the press device can be reduced.

As described above, the vacuum pressing of the ceramic laminate 5 is performed. After vacuum pressing, the ceramic laminated body is cut into ceramic laminated bodies in units of individual multilayer capacitors, and fired, to obtain a ceramic sintered body 11 shown in FIG. On the outer surface of the ceramic sintered body 11,
By forming the external electrodes 12 and 13, a multilayer capacitor 14 is obtained. In the ceramic sintered body 11, a plurality of internal electrodes 15 are stacked.

FIG. 5 is a sectional view for explaining a press apparatus according to a second embodiment of the present invention. Press device 21
Is different from the first embodiment in that a vacuum chamber is added to the press apparatus 1 of the first embodiment, and the other points are the same as those of the first embodiment. Therefore,
The same portions are denoted by the same reference numerals, and description thereof will be omitted.

In the press device 21, a cylindrical wall 22 is formed on the lower surface of the top plate 1b. A cylindrical wall 23 extending upward is provided on a bottom surface 21 b of the press device 21. The cylindrical walls 22 and 23 are provided to form a vacuum chamber, and the tips of the cylindrical walls 22 and 23 are pressed against each other via a seal member 24. Further, a suction hole 22 a is formed in the cylindrical wall 22.

Therefore, in the pressing device 21, the cylindrical wall 2
The press jig 2 and the pressure applying means are arranged in a vacuum chamber composed of the seal members 24 and 23.

A suction tube 3c is connected to the suction hole 3b of the press jig 2. Suction tube 3c
Is connected to a vacuum suction source inside or outside the vacuum chamber. Similarly, the suction hole 22a is also connected to a vacuum suction source.

Therefore, in the vacuum pressing, not only the inside of the concave portion 3a of the jig main body 3 is suctioned but also the entire vacuum chamber is suctioned. While maintaining the vacuum suction, the upper punch 8 is lowered to press the ceramic laminate 5 as in the first embodiment.

In the press apparatus 21 of the second embodiment, since the pressure in the vacuum chamber is also reduced, the decompression operation requires a relatively long time as compared with the first embodiment. However, also in the press device 21 of the second embodiment, the depression 3a of the jig main body 3 of the press jig 2 is independently depressurized, so that the inside of the ceramic laminate 5 is the same as in the first embodiment. Air can be reliably removed. Further, since the pressure around the press jig 2 is also reduced, the air in the ceramic laminate 5 can be removed more reliably than in the first embodiment.

In the pressing device 21 according to the second embodiment, a plurality of pressing devices according to the first embodiment may be arranged in one vacuum chamber, whereby the vacuum pressing of the ceramic laminate 5 is performed. Can be performed more efficiently.

In the above-described press apparatus 1 of the first embodiment, a plurality of press apparatuses 1 may be provided between the top plate 1b and the bottom surface 1a. Further, in the press jig of the first embodiment, the substantially cylindrical jig body 3 is used. However, as shown in FIG. 6, a rectangular cylindrical jig body 31 is used. You may. That is, the planar shape of the jig body of the press jig in the present invention is not particularly limited,
Other shapes such as a polygon may be used.

Most preferably, as shown in the first embodiment, a substantially cylindrical jig body 3 is used. In this case, since there is no corner portion where a straight line intersects on the inner wall of the concave portion 3a, air can be more smoothly removed from the ceramic laminate 5.

In the first and second embodiments, the vacuum pressing method for manufacturing a multilayer capacitor as a multilayer ceramic electronic component has been described. However, the present invention is applicable not only to ceramic electronic components but also to multilayer ceramic components. It should be pointed out that it is applicable to general manufacturing.

[0035]

According to the present invention, there is provided a press jig for producing a ceramic component, comprising the above jig body and a lid member which is hermetically attached to the recess of the jig body, and from the inner surface to the outer surface of the recess of the jig body. Is formed, the ceramic laminate is vacuum-pressed by pressing while vacuum-suctioning through the suction holes. Therefore, it is only necessary to depressurize the inside of the concave portion of the press jig for housing the ceramic laminate, so that the depressurizing operation at the time of vacuum pressing can be performed in a short time, and vacuum suction is performed near the ceramic laminate. Therefore, air in the ceramic laminate can be reliably removed. Therefore, by vacuum-pressing the laminate using the press jig according to the present invention,
The occurrence of defects such as delamination in the finally obtained ceramic sintered body can be reliably suppressed.

The press apparatus according to the present invention includes the press jig according to the present invention and pressure applying means for bringing the jig body of the press jig and the lid member close to each other. By bringing the jig body and the lid member close to each other by the pressure applying means while sucking, the ceramic laminate can be reliably vacuum-pressed.

When a vacuum chamber for accommodating the press jig and the pressure applying means is further provided, the pressure around the press jig is also reduced, so that the air in the ceramic laminate is more reliably removed. can do.

In the method for manufacturing a multilayer ceramic component according to the present invention, the ceramic laminate is housed in the jig body of the press jig according to the present invention, and after the concave portion is hermetically sealed by the lid material, the jig body is formed. Since the substrate and the jig main body are brought close to each other while the vacuum is sucked from the suction hole, and the ceramic laminate is pressed, the air in the ceramic laminate can be reliably removed. In addition, since only the inside of the recess needs to be depressurized, the time required for vacuum suction can be reduced.

[Brief description of the drawings]

FIG. 1 is a sectional view for explaining a press device and a press jig according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a press jig used in the embodiment shown in FIG.

FIG. 3 is a perspective view showing a ceramic laminate prepared in the first embodiment.

FIG. 4 is a longitudinal sectional view showing a multilayer capacitor manufactured from the multilayer body obtained by using the press device of the first embodiment.

FIG. 5 is a sectional view showing a press device according to a second embodiment of the present invention.

FIG. 6 is a perspective view showing a modification of the press jig.

FIG. 7 is a sectional view for explaining a conventional vacuum press device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Press apparatus 2 ... Press jig 3 ... Jig main body 3a ... Recess 3b ... Suction hole 4 ... Lid 5 ... Ceramic laminated body 6 ... Sealing member 7 ... Lower punch 8 ... Upper punch 11 ... Ceramic sintered body 12, DESCRIPTION OF SYMBOLS 13 ... External electrode 14 ... Multilayer capacitor (multilayer ceramic part) 21 ... Pressing device 22 ... Cylindrical wall 22a ... Suction hole 23 ... Cylindrical wall 24 ... Seal member 31 ... Jig body

Claims (4)

[Claims] 1. A press jig for vacuum-pressing an unfired ceramic laminate when manufacturing a multilayer ceramic component, the press jig having a recess for accommodating the ceramic laminate, and an outer surface of the recess from an inner surface of the recess. A stack comprising: a jig body having a suction hole penetrating a surface thereof; and a lid member hermetically attached to the recess so as to close the recess of the jig body. Press jig for manufacturing ceramic parts. 2. A press jig according to claim 1, further comprising: a pressure applying means for bringing said jig body and said lid member close to each other for pressing said ceramic laminate. A press device. 3. The press apparatus according to claim 2, further comprising a vacuum chamber for housing said press jig and pressure applying means. 4. A step of preparing an unfired ceramic laminate, a step of housing the ceramic laminate in a jig body of the press jig according to claim 1, and hermetically sealing a concave portion with a lid member. Manufacturing a multilayer ceramic component, comprising the steps of: pressing the lid and the jig body in close proximity to each other while performing vacuum suction from the suction hole of the jig body to press the ceramic laminate. Method.