JP2001092530A5 - - Google Patents

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Publication number
JP2001092530A5
JP2001092530A5 JP1999266691A JP26669199A JP2001092530A5 JP 2001092530 A5 JP2001092530 A5 JP 2001092530A5 JP 1999266691 A JP1999266691 A JP 1999266691A JP 26669199 A JP26669199 A JP 26669199A JP 2001092530 A5 JP2001092530 A5 JP 2001092530A5
Authority
JP
Japan
Prior art keywords
substrate
correction device
holding means
adjacent sides
quadrilateral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999266691A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001092530A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26669199A priority Critical patent/JP2001092530A/ja
Priority claimed from JP26669199A external-priority patent/JP2001092530A/ja
Publication of JP2001092530A publication Critical patent/JP2001092530A/ja
Publication of JP2001092530A5 publication Critical patent/JP2001092530A5/ja
Pending legal-status Critical Current

Links

JP26669199A 1999-09-21 1999-09-21 基板の位置補正装置 Pending JP2001092530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26669199A JP2001092530A (ja) 1999-09-21 1999-09-21 基板の位置補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26669199A JP2001092530A (ja) 1999-09-21 1999-09-21 基板の位置補正装置

Publications (2)

Publication Number Publication Date
JP2001092530A JP2001092530A (ja) 2001-04-06
JP2001092530A5 true JP2001092530A5 (no) 2006-11-02

Family

ID=17434359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26669199A Pending JP2001092530A (ja) 1999-09-21 1999-09-21 基板の位置補正装置

Country Status (1)

Country Link
JP (1) JP2001092530A (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7421340B2 (ja) 2020-01-06 2024-01-24 株式会社荏原製作所 基板処理装置、および基板処理方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6474275B2 (ja) * 2015-02-19 2019-02-27 株式会社ディスコ 加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7421340B2 (ja) 2020-01-06 2024-01-24 株式会社荏原製作所 基板処理装置、および基板処理方法

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