JP2001088309A - Method of manufacturing for ink jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately form an introduction hole for supplying ink to an ejection channel by closing the opening end of a dummy channel at the side of a manifold. SOLUTION: A dry film resist 85 is bonded to the rear end face 47b of an actuator substrate 47 by covering an ejection channel 43 and a dummy channel 45. A mask is superposed on the dry film resist 85. A pattern 88 of chrome or the like is provided on the mask 87 at a portion corresponding to the ejection channel 43. When ultraviolet rays 90 are emitted thereon, only a portion radiated with the ultraviolet rays 90 is cured. A portion not exposed therewith is removed by developing, and an introduction hole 53 connected to the ejection channel 43 is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing an ink jet head.

[0002]

2. Description of the Related Art Conventionally, there has been an ink jet recording apparatus as an apparatus for recording image data output from a personal computer, a facsimile apparatus, or the like. This method is excellent in terms of quietness and recording on paper of various materials.

FIG. 1 is an exploded perspective view showing the structure of a head of an ink jet type recording apparatus called a shear mode type (herein, called an ink jet head). The inkjet head 41 shown in the figure includes an actuator substrate 47 having a plurality of ejection channels 43 and dummy channels 45 formed on both sides thereof, a cover plate 49 covering the upper surface of each groove, and a manifold 51 receiving ink supply. A stopper plate 55 having an introduction hole 53 formed therein which is aligned with the position of the ejection channel 43 when fixed to the actuator substrate 47, and a nozzle plate having a nozzle hole 57 for ejecting ink in the ejection channel 43. 59. The actual actuator substrate 47 has a larger number of ejection channels 43 and dummy channels 45 than those shown in the figure. However, for convenience of illustration, the ejection channels 43 are only three rows, and the dummy channels 45 are three rows. Only those corresponding to the injection channel 43 are shown.

FIG. 2A shows how ink is supplied.
The ink supplied to the manifold 51 enters the ejection channel 43 through the introduction hole 53 of the sealing plate 55, and is ejected from the nozzle hole 57. Since the introduction hole 53 is not formed at a location corresponding to the dummy channel 45, ink cannot enter the dummy channel 45.

FIG. 2 shows a mechanism for ejecting ink.
This will be described with reference to FIG. This figure is a view of the actuator substrate 47, the cover plate 49, and the like viewed from the sealing plate 55 side. The partition wall 61 separating the ejection channel 43 and the dummy channel 45 is formed of two piezoelectric materials (for example, piezoelectric ceramic materials such as lead zirconate titanate (PZT) and lead titanate (PT)) laminated in the height direction. Is formed. The two piezoelectric materials are polarized in opposite directions in the height direction. A first electrode 65 is formed on the partition wall 61 in the ejection channel 43, and a second electrode 67 is formed on the partition wall 61 in the dummy channel 45. The second electrode 67 is divided into two parts in the left-right direction in the figure by a groove 68 on the bottom surface in the dummy channel 45, and is independent for each opposing electrode 61.

When a voltage is applied to the second electrodes 67B, 67B on both sides of the ejection channel 43B from which ink is to be ejected, and the first electrode 65 of the ejection channel 43B is grounded, the first and second electrodes 65B are ejected. , 67B, an electric field E perpendicular to the polarization direction P of the piezoelectric material is generated,
The upper and lower portions of the piezoelectric material are sheared in the opposite directions, that is, deformed into a rhombus shape, thereby increasing the volume of the injection channel 43B. When the application of the voltage is stopped, the partition 61
Is restored, pressure is applied to the ink in the ejection channel 43B, and the ink is ejected from the nozzle holes 33.

[0007]

However, according to the above-mentioned prior art, when the sealing plate 55 is bonded, the precision on the order of microns is adjusted so that the position of the introduction hole of the sealing plate 55 and the position of the injection channel 43 are aligned. Must be accurately positioned. In FIG. 1, the pitch of the sealing plate 55 and the injection channel 43 is shown large for ease of illustration. However, the width is actually very narrow, so that high accuracy is required for positioning the sealing plate 55. You.

The present invention has been made in view of the above problems, and the present invention according to claims 1 and 4 closes a dummy channel with respect to a manifold and accurately and easily forms an introduction hole with respect to an injection channel. It is intended to be formed in. Another object of the present invention is to form a stopper plate and an introduction hole more easily in an actuator member.

Still another object of the present invention is to make it easier to form a sealing plate on an actuator member. The present invention described in claim 5 aims at facilitating formation of an actuator member and formation of a sealing plate for the actuator member in addition to the above objects.

Another object of the present invention is to facilitate formation of a wiring pattern connected to an energy generating portion for ejecting ink, and to facilitate electrical insulation of the wiring pattern against ink. I have. A seventh aspect of the present invention is to further facilitate the formation of a wiring pattern, in addition to the object of the sixth aspect.

[0011]

According to a first aspect of the present invention, there is provided a method of manufacturing an ink jet head, comprising: a plurality of ejection channels for ejecting ink to an actuator member; A dummy channel that is provided on both sides of the ejection channel and does not eject ink, separates the ejection channel and the dummy channel, and a partition made of a piezoelectric material that is at least partially deformed by application of a voltage; Electrodes provided on both side surfaces of the two channels, and a manifold for supplying ink to the plurality of ejection channels is connected to one end surface of the actuator member. The injection channel and the dummy channel are attached to a member, and one end of the A resist material covering one end of the ejection channel and the dummy channel is formed in a planar shape on one end surface of the actuator member, and corresponds to one end of the ejection channel. The introduction hole is formed by removing the resist material at the position,
The manifold is mounted on a surface of the one end of the actuator member.

Here, the member in which the introduction hole is formed corresponds to the above-mentioned sealing plate. That is, in the method for manufacturing the ink jet head, the guide plate is formed on the actuator member to cover the dummy channel with respect to the manifold, and the guide hole is formed in the guide plate. There is no need to position and attach the stop plate to the spray channel with micron-order accuracy.

Therefore, according to the first aspect of the present invention, a troublesome bonding step involving positioning of the sealing plate is not required. In addition, the manufacturing cost can be reduced, and the cost of the inkjet head can be reduced. Note that any of a film material and a liquid material can be used for forming the sealing plate. The manufacturing method according to claim 4 uses a liquid material.

That is, according to a fourth aspect of the present invention, a liquid resin material is coated on the one end surface so as to cover one end of the ejection channel and the dummy channel, and the liquid resin material is cured. An introduction hole is formed in the resin material at a position corresponding to one end of the injection channel, and the manifold is mounted on a surface of the one end of the actuator member.

Also in this case, since it is not necessary to bond the film serving as the sealing plate to the actuator, the bonding step is not required, and the manufacturing cost can be reduced.
In the first and fourth aspects, laser processing or lithography can be used as a method for forming the introduction hole. According to a second aspect of the present invention, the introduction hole is formed by using a lithography technique.

That is, according to the present invention, a plurality of ejection channels for ejecting ink, a dummy channel provided on both sides of the ejection channel and not ejecting ink, and the ejection channel and the dummy channel are provided on the actuator member. Separating the channel, a partition made of a piezoelectric material at least a part of which is deformed by application of a voltage, and electrodes provided on both side surfaces of the partition in the two channels,
A method for manufacturing an ink jet head in which a manifold for supplying ink to the plurality of ejection channels is connected to one end surface of the actuator member, wherein the ejection member and the dummy channel are connected to the actuator member, and one end of the actuator member is connected to the actuator member. The actuator member is formed to be open at one end surface, and at one end surface of the actuator member,
A resist material covering one end of the ejection channel and the dummy channel is formed in a planar shape, and a mask having a pattern corresponding to the position of one end of the ejection channel is overlaid on the resist material, and the resist material is exposed. An introduction hole is formed by developing and removing a resist material corresponding to a position of one end of the ejection channel, and the manifold is mounted on a surface of the one end of the actuator member.

According to this, since the formation of the sealing plate and the formation of the introduction hole can be simultaneously performed for a plurality of ink jet heads, a further cost reduction can be realized as compared with the first aspect. The present invention described in claim 3 is:
3. The method for manufacturing an ink jet head according to claim 1, wherein the resist material is a film-like material, and the resist material is formed by attaching the film-like resist material to the actuator member. It is characterized by.

According to this manufacturing method, since the resist material is not in a liquid state, its handling and management become very easy. According to a fifth aspect of the present invention, in the method for manufacturing an ink jet head according to any one of the first to fourth aspects, the actuator member includes a substrate on which the plurality of ejection channels and dummy channels are formed, A cover fixed on the substrate covering an open surface along the longitudinal direction, and after fixing the cover plate on the substrate, the introduction hole is formed on the surface of the substrate and the one end of the cover plate. It is characterized in that the material of the member to be formed is formed.

According to such a method of manufacturing an ink jet head, a plurality of ejection channels and dummy channels are formed in a substrate, and the longitudinal surface thereof is covered with a cover plate. Thereafter, the substrate and one end of the cover plate are covered. Since the introduction hole is formed in the covering member, the formation of the actuator member can be facilitated. Also, the formation of the sealing plate over the substrate and the cover plate allows the dummy channel to be surely covered and the formation of the sealing plate to be easy. Can be.

According to a sixth aspect of the present invention, in the method of manufacturing an ink jet head according to any one of the first to fifth aspects, a material of a member in which the introduction hole formed in one end surface of the actuator member is formed. Prior to the application, a conductive resist material is applied to one end surface of the actuator member so as to be connected to each electrode on both side surfaces of the partition wall and extend along the one end surface. Then, a wiring pattern for supplying electric power to each of the electrodes is formed by curing the conductive resist material.

In this manner, a complicated wiring pattern corresponding to the electrodes of the ejection channel and the dummy channel can be formed on one end surface from the beginning. In addition, since the wiring pattern is covered by the electrically insulating material filling plate with respect to the ink supplied from the manifold,
Electrical insulation can be easily maintained.

According to a seventh aspect of the present invention, in the method for manufacturing an ink jet head according to the sixth aspect, a silk screen formed in the shape of the wiring pattern is superimposed on a surface of the one end of the actuator member. It is characterized in that a conductive resist material is applied.

If a wiring pattern having a desired shape is previously formed on the silk screen, the conductive resist can be applied steadily. As another mode, a wiring pattern may be formed by applying a relief printing or offset printing technique.

[0024]

Embodiments of the present invention will be described below with reference to the drawings. Note that the outline of the ink jet head and the mechanism of ink ejection described below are the same as those of the ink jet head 41 shown in FIG. The same reference numerals are given to the components having the same name.

First, after bonding two piezoelectric materials to be the actuator substrate 47, the injection channels 43 and the dummy channels 45 are formed by opening the front and rear end surfaces of the actuator substrate 47 by cutting such as a diamond blade. Then, a conductive layer is applied to the entire surface of the actuator substrate 47 by electroless plating, vapor deposition, or the like.
By removing the conductive layers a and 47b by planar polishing or the like, the conductive layers in each of the ejection channels 43 and the dummy channels 45 become independent, and become the first electrode 65 and the second electrode 67. The upper surface 47c, front and rear end surfaces 47a, 4
It can also be formed by masking in advance so that a conductive layer is not formed on 7b and the lower surface 47d. Then, the conductive layer on the bottom surface of the dummy channel 45 is removed in a groove shape by a laser (the groove 68 is processed), whereby the second electrode 67 in the dummy channel 45 is divided for each partition.

The front and rear end surfaces 4 of the actuator substrate
The removal of the conductive layers 7a and 47b by planar polishing is as follows.
After removing the conductive layer on the upper surface 47c of the actuator substrate, it is desirable to perform the process after bonding the cover plate 49 to the upper surface. That is, the front and rear end surfaces of the cover plate are also polished at the same time as the front and rear end surfaces 47a and 47b of the actuator substrate are polished. This is because a gap due to a step cannot be formed when forming 55.

The wiring patterns connected to the first electrode 65 and the second electrode 67 are formed on the rear end surfaces 47b and 49b of the actuator substrate and the cover plate after the connection of the actuator substrate 47 and the cover plate 49. As shown in FIG. 4, on the rear end face 49 b of the cover plate, the grounding wiring pattern 81 extends in parallel with the row formed by the plurality of ejection channels 43 and branches toward each ejection channel 43. The branched end extends around the opening end of each ejection channel 43 on the rear end surface 47b of the actuator substrate and is connected to the first electrode 65. One end of the ground wiring pattern 81 is connected to a ground connection terminal 83 formed on the lower surface 47d of the actuator substrate. The wiring pattern 77 for voltage application is connected to the second electrode 67 in the dummy channel 45 at the side edge of the dummy channel 45 and extends toward the lower surface 47d. 2 adjacent to each other across the injection channel 43
The two voltage application wiring patterns 77 are connected to each other and connected to the voltage application connection terminals 79 formed on the lower surface 47d.

FIG. 3 shows a method of forming the wiring patterns 77 and 81. Rear end surfaces 47b, 49 of a unit 69 in which a cover plate 49 is overlapped on the upper surface of the actuator substrate 47
Overlay the silk screen 71 on b. On the silk screen 71, transmission patterns 73 and 81 for forming each wiring pattern 77 and a transmission pattern 75 for forming a wiring pattern are formed. In this figure, the transmission pattern 73 is a normal hatching, the transmission pattern 7
5 is indicated by double hatching, but both of them are silk-screened.

Then, a paste-like conductive resist is placed on the silk screen 71 and is extruded through the transmission patterns 73 and 75 with a squeegee.
b, 49b and cured. Note that the bottom side of the transmission pattern 73 is located exactly at the ridgeline between the rear end surface 47b and the lower surface 47d. One end of each of the wiring patterns 77 and 81 thus formed is the first.
And the second electrode 65, 67 has the other end connected to the connection terminal 79,
83.

The connection terminals 79 and 83 may be formed by applying a conductive material to the lower surface 47d through a silk screen having a predetermined transmission pattern in the same manner as described above. The attached conductive layer can also be formed by laser processing or the like. When a silk screen is used, the connection terminals 79 and 83 may be formed after the wiring patterns 77 and 81 are formed.

Thereafter, a nozzle plate 59 is fixed with an adhesive to the front end surface of the unit 69 in which the cover plate 49 is fixed to the upper surface of the actuator substrate 47. Also, the rear end surface 47
b, 49b, the sealing plate 55 is formed as follows, and further covers the manifold 51
Is fixed by an adhesive. Wiring pattern 7 on rear end face
The sealing plate 55 fixed to cover the first and second members 71 and 81 is made of an electrically insulating material.
Wiring patterns 77 and 8 for ink supplied from
1 is maintained.

For forming the filling plate 55, a film-like resist material is used. Such a resist material includes a dry film resist HR13 manufactured by Tokyo Ohka Kogyo Co., Ltd.
0 can be exemplified. This situation is shown in FIG. FIG.
FIG. 3A is a cross-sectional view of the actuator substrate 47 cut along the direction in which the ejection channels 43 are arranged.

First, dry film resist 85 (thickness 3
0 μm) with the injection channel 43 and the dummy channel 4
5 and is adhered to the rear end face while applying pressure and heat. For example, the temperature of the surface to be bonded is set to 50 to 80 ° C., and the pressure is set to 2 to 5 kg / cm ² while the speed is set to 1 to 3 m.
/ Min. As shown in FIG. 5B, a mask 87 is overlaid on the dry film resist 85 (in this figure, the mask 87 is floating above the dry film resist 85, but is actually overlaid). The mask 87 has a pattern 88 made of chrome or the like at a position corresponding to the ejection channel 43. When the mask 87 is irradiated with the ultraviolet light 90, only the portion irradiated with the ultraviolet light 90 is cured.
After exposure, development is performed. This development is performed, for example, with Na ₂ CO ₃
The liquid is heated at a temperature of 26 to 31 ° C and a spray pressure of 1-2 kg / cm
Spray with ² and do. As a result, the unexposed portion is removed, and an introduction hole 53 as shown in FIG. 5B is formed. After that, the temperature is 15-25 ° C, the spray pressure is 1-2k
Spray water at g / cm ² and wash with water. Then, the dry film resist 85 becomes the sealing plate 55.

According to the method of manufacturing the ink jet head, since the introduction hole 53 is formed after the dry film resist 85 serving as the sealing plate 55 is formed, it takes time for positioning when the sealing plate 55 is bonded. Absent.
Further, since the lithography technique is applied to the formation of the introduction holes 53, the formation of the plurality of introduction holes 53 can be performed at once.

Further, since the resist material is a film-like dry film resist 85, its handling and management are very easy. After the completion of the ink jet head, a lead extending from a control and power supply circuit is connected to the connection terminals 79 and 83. As mentioned above, although one Embodiment of this invention was described, this invention is not limited to such Embodiment at all, and can be implemented in various aspects.

For example, in the above example, a negative type dry film resist 85 is used. However, a portion corresponding to the introduction hole 53 is exposed using a positive type dry film resist, and the exposed portion is removed by development. You can also. As still another manufacturing method, a liquid resist material is used for the sealing plate. As in the known spin coating method,
The unit 69 is placed on a turntable, and a liquid resist material is dropped on the rear end surface of the unit 69 while rotating about an axis perpendicular to the rear end surface of the unit 69 to form a film having a uniform thickness. . After curing, an introduction hole 53 is formed by lithography in the same manner as described above.

Further, a resin material can be used in place of the resist material. In this case, a film-shaped resin material may be bonded to the rear end surface of the unit 69, or a liquid resin material may be formed in a film shape by the spin coating method as described above. After that, a beam of excimer laser light is applied to a position corresponding to the introduction hole 53 and ablation is performed.
The resin material in the introduction hole 53 is removed to form an introduction hole.

The ink jet head 41 has a cover plate 49
The actuator board 47 is arranged only on one side of the actuator board 4.
7 may be applied. The silk screen 7 is used for forming the wiring patterns 77A to 77C and 81.
Instead of using 1, the technology of letterpress or offset printing may be applied.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of an inkjet head 41.

FIG. 2 is an explanatory diagram showing a state in which ink is supplied to an ejection channel 43 and a mechanism of ejection.

FIG. 3 is an explanatory diagram illustrating a method of forming a wiring pattern on the inkjet head 41.

FIG. 4 is an explanatory diagram showing wiring patterns 77 and 81 and connection terminals 79 and 83 formed on the inkjet head 41.

FIG. 5 is a cross-sectional view illustrating the method of manufacturing the inkjet head according to the embodiment of the present invention.

[Explanation of symbols]

 41 ... Inkjet head 43, 43B ... Injection channel 45 ... Dummy channel 47 ... Actuator substrate 47b ... Rear end face 49 ... Cover plate 51 ... Manifold 53 ... Introducing hole 55 ... Seal plate 57 ... Nozzle hole 59 ... Nozzle plate 61 ... Partition wall 65 ... first electrode 67 ... second electrode 71 ... silk screen 77, 81 ... wiring pattern 85 ... dry film resist 87 ... mask 88 ... patterning

Claims (7)

[Claims] 1. An actuator member, comprising: a plurality of ejection channels for ejecting ink; and dummy channels provided on both sides of the ejection channels and not ejecting ink;
The actuator member includes a partition made of a piezoelectric material, at least a part of which is deformed by application of a voltage, separating the injection channel and the dummy channel, and electrodes provided on both side surfaces of the partition in the two channels. A method for manufacturing an ink jet head, wherein a manifold for supplying ink to the plurality of ejection channels is connected to one end surface of the actuator member, wherein the ejection channel and the dummy channel are connected to the actuator member. A resist material covering one end of the ejection channel and the dummy channel is formed in a planar shape on one end surface of the actuator member, and a resist material at a position corresponding to one end of the ejection channel is removed. To form an introduction hole, the one end of the actuator member The method of manufacturing an ink jet head, characterized by mounting the manifold. 2. An actuator member, comprising: a plurality of ejection channels for ejecting ink; and dummy channels provided on both sides of the ejection channels and not ejecting ink;
Separating the ejection channel and the dummy channel, at least a part of the partition is made of a piezoelectric material that is deformed by application of a voltage, and includes electrodes provided on both side surfaces of the partition in the two channels, What is claimed is: 1. A method for manufacturing an ink jet head, comprising: a manifold for supplying ink to a plurality of ejection channels connected to a surface of one end; A resist material covering the ejection channel and one end of the dummy channel is formed in a planar shape on one end surface of the actuator member, and the resist material corresponds to the position of one end of the ejection channel. Expose the mask on which the pattern is formed, and develop the resist material. Wherein by removing the resist material corresponding to the position of the end of the injection channel to form a penetrating hole, a manufacturing method of an ink jet head, characterized by mounting the manifold to the surface of said one end of said actuator member. 3. The method for manufacturing an ink jet head according to claim 1, wherein the resist material is a film, and the resist material is formed by attaching the film resist material to the actuator member. A method for manufacturing an ink jet head, comprising: 4. An actuator member, comprising: a plurality of ejection channels for ejecting ink; a dummy channel provided on both sides of the ejection channel and not ejecting ink;
Separating the ejection channel and the dummy channel, at least a part of the partition is made of a piezoelectric material that is deformed by application of a voltage, and includes electrodes provided on both side surfaces of the partition in the two channels, What is claimed is: 1. A method for manufacturing an ink jet head, comprising: a manifold for supplying ink to a plurality of ejection channels connected to a surface of one end; A liquid resin material is applied in a planar shape on one end surface of the actuator member, covering one end of the ejection channel and the dummy channel, and is cured. Forming an introduction hole at a position corresponding to one end of the injection channel; A method of manufacturing an ink jet head, characterized by mounting the manifold to the plane of the end. 5. The method for manufacturing an ink jet head according to claim 1, wherein the actuator member is provided along a substrate on which the plurality of ejection channels and the dummy channels are formed, and along a longitudinal direction of the two channels. A cover that covers the open surface and is fixed on the substrate, and after the cover plate is fixed on the substrate, the surface of the substrate and the one end of the cover plate has the introduction hole formed therein. A method for manufacturing an ink jet head, comprising forming a material. 6. The method for manufacturing an ink jet head according to claim 1, wherein the material of the member in which the introduction hole formed in the one end surface of the actuator member is formed is an electrically insulating material. Prior to formation, a conductive resist material is applied to one end surface of the actuator member so as to be connected to each electrode on both side surfaces of the partition wall and extend along the one end surface. A method for manufacturing an ink jet head, comprising forming a wiring pattern for supplying electric power to each of the electrodes by curing. 7. The method for manufacturing an ink jet head according to claim 6, wherein a silk screen formed in the shape of the wiring pattern is overlapped on the one end surface of the actuator member, and the conductive resist material is applied. A method for manufacturing an ink jet head, comprising: