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電子銃、照射系レンズ、結像系レンズ、光軸調整用電磁偏向器、非点補正用電磁補正器、等から構成される電子顕微鏡において、電磁偏向器および／または、電磁非点補正器に閉巻き線式ショートコイルを１つ以上装備したことを特徴とする電子顕微鏡。In an electron microscope comprising an electron gun, an irradiation system lens, an imaging system lens, an optical axis adjustment electromagnetic deflector, an astigmatism correction electromagnetic corrector, etc., the electromagnetic deflector and / or electromagnetic astigmatism corrector An electron microscope equipped with one or more closed winding short coils.
CATHODE SPRAY TUBE WITH A DEFLECTION UNIT CONTAINING PERMANENT MAGNETS WHICH GENERATES A STATIC MULTIPOLO FIELD FOR SIMULATING A MODULATION OF THE DYNAMIC DEFLECTION FIELD.