JP2001084538A - Thin-film magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make the gap interface of an inductive element able to be flattened by forming two lead conductors having slanting surfaces at the end parts, a magnetoresistance effect element, and the inductive element on a substrate and forming the magnetoresistance effect element on the slanting surfaces of the two lead conductors and between the end parts of the two lead conductors. SOLUTION: On the substrate 20, a shield film 21, an insulating film 22, and two lead conductors 23 are formed and the end parts of the lead conductors 23 are etched to form the end part slanting surfaces 24. The magnetoresistance effect element 26 is formed on the insulating film 22, the end slanting surface 24 of the lead conductor 23, and a flat part 25 and formed of a center flat part 27, a slanting part 28, and both flat parts 29. On the magnetoresistance effect element 26, an insulating film 30 and a 1st magnetic film 31 are formed and the 1st magnetic film 31 is flattened to form a gap interface 32. Then the inductive element 38 is formed of the 1st magnetic film 31, a gap film 33, and a 2nd magnetic film 36.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film magnetic head having a magnetoresistive element and an inductive element.

[0002]

2. Description of the Related Art It is important to increase the recording density in order to reduce the size and increase the capacity of a magnetic disk drive. It is necessary to increase the track density, which is the number of recording tracks per unit length in the radial direction. In order to increase the track density, that is, to reduce the track pitch, it is essential to reduce the track width.

[0003] When the track width is reduced, the influence of a slight track position shift becomes large during reproduction, which causes problems such as deterioration of the S / N ratio due to an increase in crosstalk and a decrease in output.

To solve this problem, there is a magnetic head described in, for example, JP-A-61-276110.

In this magnetic head, as shown in FIGS. 10 and 11, a first shield film 2 and a second shield film 12 are arranged on a substrate 1, and insulating films 3, 6 are formed between the first and second shield films. The resistance effect element 5 and the lead conductor 4 are formed. On the second shield film 12, a first magnetic film 7, a gap film 8, a coil 14, an insulating film 15, and a second magnetic film 9 are sequentially laminated via an insulating film 13. Inductive element is disposed. On the inductive element, a protective film 10 covering the inductive element is formed.
On both sides of the magnetoresistive element 5, lead conductors 4 are arranged to substantially reduce the reproduction track width R.

On the other hand, the first magnetic film 7 and the second
By making the track width of the magnetic film 9 substantially the same as the track width of the magnetoresistive effect element 5, the recording track width is made larger than the substantial reproduction track width R, and position control errors during reproduction, thermal expansion, etc. This is intended to reduce the effect of track deviation due to the above.

However, in this thin-film magnetic head, the gap interface 16 of the inductive element is not flat due to the step formed by the lead conductor 4 connected to the magnetoresistive effect element 5, and the substantial recording track width W is substantially reduced. This is almost the same size as the typical reproduction track width R, and it is impossible to substantially prevent the deterioration of the S / N ratio and the decrease in the reproduction output due to the increase in crosstalk and the like.

In the thin-film magnetic head described in Japanese Patent Application Laid-Open No. 63-127408, as shown in FIG. 12, the substrate 1a is formed of an insulating magnetic material, and the first shield film is omitted. The gap interface 16a is planarized by embedding the lead conductor 4a in the substrate 1a.

[0009]

However, in such a conventional thin film magnetic head, the magnetoresistive element 5
However, since it is in contact with the substrate 1a, which is a magnetic material, a magnetic flux does not pass much through the magnetoresistive effect element 5 at the time of reproduction, which causes a new problem that the reproduction output is reduced.

In order to solve this problem, a non-magnetic insulating film may be provided between the substrate 1a and the magnetoresistive element 5 and the lead conductor 4a. Is formed, and a step is formed at the gap interface 16a of the inductive element.

Further, even if the substrate 1a is formed of an insulating non-magnetic material, a shield film for the magnetoresistive effect element 5 is required.
A step is formed in the pattern.

As described above, when the lead conductor 4a is embedded in the substrate 1a in order to make the substantial recording track width larger than the substantial reproduction track width, the reproduction output decreases, and this configuration is maintained. If the reproduction output is to be prevented from decreasing, a step is formed at the gap interface 16a, so that the substantial recording track width cannot be increased, and the deterioration of the S / N ratio at the time of reproduction cannot be prevented. There is a point.

The present invention has been made in view of such a conventional problem, and a thin film capable of flattening a gap interface of an inductive element without particular restriction on formation of a magnetoresistance effect element. It is intended to provide a magnetic head.

[0014]

According to a thin film magnetic head for achieving the above object, an element having a magnetoresistive effect and an inductive element are laminated on a substrate in this order.
The ends face each other at an interval, and as the one end is approached, two inclined surfaces are formed at each of the ends, the inclined surface on which the surface opposite to the substrate gradually approaches the substrate. An element having a lead conductor and having the magnetoresistive effect is formed on the inclined surface of the two lead conductors, and between the ends of the two lead conductors,
It is characterized by the following.

Here, the track width of the two magnetic films constituting a part of the inductive element on the surface facing the recording medium may be larger than the width of the flat portion in the track width direction of the element having the magnetoresistive effect. preferable.

Further, it is preferable that respective track widths of the two magnetic films on the recording medium facing surface are substantially equal.

[0017]

When the gap interface flattening film is provided, the gap interface of the inductive element is formed flat. Further, even when the inductive element is provided on a flat substrate before the element having the magnetoresistive effect, the gap interface of the inductive element is formed flat. The element having the magnetoresistive effect has a substantial reproduction track width by at least making the width of the flat portion in the track width direction smaller than the track width of the magnetic film constituting the inductive element on the recording medium facing surface. It is possible to make the width smaller than the substantial recording track width, and it is possible to prevent the S / N ratio from deteriorating due to an increase in crosstalk and the like, and to reduce the reproduction output.

The effect will be described in detail. At the time of recording, since the gap interface is flattened, the magnetization pattern on the magnetic medium has almost the entire track width (substantial recording track width) of the magnetic film of the inductive element. Is formed in a linear shape with a width corresponding to

On the other hand, at the time of reproduction, a recorded signal is read at a flat portion (substantial reproduction track width) of the element having the magnetoresistance effect. The flat portion of the element having the magnetoresistive effect, that is, the width for reading a signal, is narrower than the width of the linear magnetization pattern because the gap interface of the inductive element is flattened.

Therefore, even if a track shift occurs due to an error in position control and thermal expansion during reproduction,
It is possible to prevent the output from lowering and prevent the S / N ratio from deteriorating.

Further, in the configuration according to the present invention, as in the prior art, the substrate is formed of an insulating magnetic material, the shield film is omitted, and the magnetoresistive element is directly formed thereon. Since there is no special restriction on the formation of the element having, the non-magnetic material can be formed adjacent to the magnetoresistive element, and at the time of reproduction, the magnetic flux does not pass much through the magnetoresistive element, There is no problem that the reproduction output is reduced.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Various embodiments according to the present invention will be described below with reference to FIGS. In describing various embodiments, the same portions will be denoted by the same reference symbols, without redundant description.

First, a first embodiment will be described with reference to FIGS.

As shown in FIGS. 1 to 3, on a substrate 20,
A shield film 21 is formed and etched into a predetermined shape (Step 101).

Next, an insulating film 22 is formed (Step 10).
2) forming lead conductors 23 thereon,
Etching is performed so that the end is inclined with respect to the insulating film 22 (step 103).

A magnetoresistive film and a bias film for forming the magnetoresistive element 26 are formed on the insulating film 22 and the conductors 23 for leads (steps 104 and 10).
5) The magnetoresistive effect element 26 is formed only on the insulating film 22 and only a part of the inclined surfaces 24, 24 of the end conductors 23, 23 and the flat surfaces 25, 25 of the lead conductors 23, 23. (Step 106).

The magnetoresistive element 26 includes an insulating film 22 and
Since it is formed on the end inclined surfaces 24, 24 and the flat surfaces 25, 25 of the lead conductors 23, 23, the central flat portion 27 in contact with the insulating film 22 and the end inclined surface of the lead conductor 23 are provided. An inclined portion 28 in contact with 24 and flat portions 29 on both sides in contact with the flat surface 25 of the lead conductor 23 are formed. The width of the central flat portion 27 in the track width direction is formed to be 6 μm.

Since the end of the lead conductor 24 which comes into contact with the magnetoresistive element 26 is formed with the end inclined surface 24, the electrical connection is improved as compared with the case where the end is sharply cut. Can be higher.

Here, the thickness of the magnetoresistive element 26 is about 0.02 to 0.1 μm, but the thickness of the lead conductor 23 is considerably smaller than that of the magnetoresistive element 26 in order to reduce the electric resistance. Required thickness. Therefore, when the lead conductor 23 is temporarily formed on the magnetoresistive element 26, the magnetoresistive element 26 is likely to be damaged when the thick lead conductor 23 is etched. In particular, in dry etching such as reactive sputter etching in which the accuracy of the track width is easily increased, it is easy to handle the magnetoresistive element 26. In the present embodiment, since the lead conductor 23 is formed in advance, the possibility that the magnetoresistive element 26 is damaged can be extremely reduced.

An insulating film 30 is formed on the magnetoresistive element 26 (Step 107).

On the insulating film 30, a first magnetic film 31 for forming one magnetic pole at the time of recording and forming a magnetic shield for the magnetoresistive element 26 is formed (step 108).

Since the first magnetic film 31 is formed on the magnetoresistive element 26,
A step is formed along the central flat portion 27, the inclined portion 28, and both side flat portions 29. In order to eliminate this step, the first magnetic film 31 is subjected to a flattening process (step 109). The flattening process is performed by applying a novolak resin or the like on the first magnetic film 31 having a step, and after this is cured, is etched back until the novolak resin or the like disappears. In order to make the flattening more complete, it is necessary to consider the heat treatment conditions of the novolak resin and the etching rate of the resin. If a concave portion is locally formed after the etch back, a photoresist may be buried in the concave portion and the etch back may be performed again.

The flat surface of the first magnetic film 31 forms a gap interface 32.

The flattened first magnetic film 31 is etched such that its track width becomes substantially the same as the track width of the magnetoresistive element 26 (step 11).
0).

As shown in FIG. 2, on the gap interface 32 of the first magnetic film 31, a gap film 33, a coil 34, an insulating film 35, a second magnetic film 36, and a protective film 37 are sequentially laminated. (Steps 115, 116, 117, 118).
The track width of the second magnetic film 36 is formed to be 10 μm. In the present embodiment, the first magnetic film 31, the gap film 33, the coil 34, the insulating film 35, and the second magnetic film 36
Thus, the inductive element 38 is formed.

On the substrate 20, a plurality of magnetoresistive elements 26, inductive elements 38, and the like are thus formed. Then, the substrate 20 is cut, and as shown in FIG.
The magnetic head slider 40 on which the magnetoresistive effect element 26, the inductive element 38 and the like are formed is cut out. The end face of the cut magnetic head slider 40 is machined to complete the magnetic head 41.

The magnetic head 41 is provided in a magnetic disk device on which a plurality of magnetic disks 42, 42,... As shown in FIG.

The plurality of magnetic disks 42, 42,... Are fixed to a spindle 45. The spindle 45 is connected to a motor 46 for rotating the spindle 45.

The magnetic disk drive is provided with a linear carriage 43 for moving the magnetic head 41 in the radial direction of the magnetic disk 42. In the carriage 43,
A plurality of arms 44, 4 extending in the direction of the magnetic disk 42;
The magnetic head 41 is provided at one end of the arm 44.

Next, the operation during recording and reproduction will be described.

At the time of recording, a desired signal current is passed through the coil 34 so that the first magnetic film 31 and the second magnetic film 3
6, a recording magnetic field is generated, the magnetic disk 42 is magnetized, and a desired signal is recorded. At this time, since the gap interface 32 of the inductive element 38 is formed flat, the substantial recording track width of the magnetic head 41 is:
Of the first magnetic film 31 and the second magnetic film 36, the total track width of the second magnetic film 36 having a shorter track width (= 10 μm)
m). A second magnetic film 36 is provided on the magnetic disk 42.
, Ie, the actual recording track width W
(= 10 μm), the magnetization pattern is recorded linearly.

At the time of reproduction, the width (= 6 μm) of the central flat portion 27 of the magnetoresistive element 26 in the track width direction becomes the substantial reproduction track width R, and the signal recorded on the magnetic disk 42 is read. Can be The substantial reproduction track width is limited only to the central flat portion 27 of the magnetoresistive element 26 because the inclined portions 28 are formed on both sides of the magnetoresistive element 26 so that the magnetic pattern on which signals are recorded on the magnetic disk 42 is recorded. Direction (direction perpendicular to the longitudinal direction of the track)
On the other hand, the direction in which the signal is read by the inclined portion 28 (the direction oblique to the longitudinal direction of the track) is different.

Therefore, the substantial reproduction track width R can be made smaller than the substantial recording track width W, so that the S / N ratio deteriorates due to an increase in crosstalk, etc.
In addition, it is possible to prevent the reproduction output from lowering.

In this embodiment, after the insulating film 30 is flattened, the first magnetic film 31 may be simply formed. However, as in this embodiment, the first magnetic film 31 is formed. In the case where 31 has both a function as one magnetic pole at the time of recording and a function as a magnetic shield of the magnetoresistive effect element 26, the insulating film 30 is simply formed by the lead conductor 23 and the magnetoresistive effect element 26. And the magnetic flux passing through the magnetoresistive element 26
In order to form a part of the magnetic path when returning to the magnetic medium through the magnetic film 31, the thickness of the insulating film 30 needs to be constant. It cannot be applied to 30.

Next, the central flat portion 27 of the magnetoresistive element 26
The track width of the magnetic films 31 and 36 and the track width of the magnetic films 31 and 36 were changed, and a test was performed on the change in output characteristics at that time. This will be described with reference to FIG. In the figure, the vertical axis represents the output, and the horizontal axis represents the track pitch width of the magnetic disk.

The reproduction output of the magnetic head according to the present invention has a track pitch width of 1 as shown by a reproduction output characteristic curve A.
Even if it becomes 0 μm or less, it does not decrease sharply, but the reproduction output of the conventional magnetic head sharply decreases when the track pitch width becomes 10 μm or less as shown in the reproduction output characteristic curve A ₀ .

Further, as shown by the crosstalk output characteristic curve B, the output due to the crosstalk of the magnetic head according to the present invention can be obtained even when the track pitch width becomes 10 μm or less.
Although the output does not increase sharply, the output due to the crosstalk of the conventional magnetic head, when the track pitch width becomes 10 μm or less, as shown in the crosstalk output characteristic curve B ₀ ,
Increase rapidly.

In the magnetic head according to the present invention, the substantial recording track width is surely larger than the substantial reproducing track width. This is because it becomes smaller.

In order to prevent the output of the conventional magnetic head from lowering, a recording track width close to the track pitch width may be adopted, but in this case, the crosstalk is further increased. In the magnetic head according to the present invention, since crosstalk can be reduced, the recording track width can be increased to near the track pitch width, and the reproduction output can be further increased.

The center flat portion 27 of the magnetoresistive element 26 corresponding to the track pitch width of 10 μm of the magnetic disk.
And the track widths of the magnetic films 31 and 36 are about 6 μm and about 10 μm, respectively. When the track width is smaller than these dimensions, the above-mentioned effects according to the present invention are remarkably exhibited.

Therefore, the magnetic head according to the present invention
Even if the track pitch width is small, the influence of the track deviation can be reduced, the S / N ratio can be prevented from deteriorating, and a relatively large reproduction output can be ensured. Can be realized.

Next, a modification of the first embodiment will be described with reference to FIG.

In this modification, the track widths of the first magnetic film 31a, the gap film 33a, and the second magnetic film 36a on the recording medium facing surface are all substantially equal to each other, and these widths are substantially equal to the recording track width. The other configuration is exactly the same as that of the first embodiment.

In this modification, since the track widths of the first magnetic film 31a and the second magnetic film 36a serving as the magnetic poles on the recording medium facing surface are substantially the same, it is possible to reduce the bleeding of the recording magnetic field. And the S / N ratio can be improved.

In this modification and the first embodiment, further improvement in the S / N ratio can be realized by removing the flat portions 29 on both sides of the magnetoresistive element 26.

In the first embodiment and the present modification, the first magnetic films 31 and 31a have both a function as a magnetic pole and a function as a magnetic shield.
The first magnetic film has only a function as a magnetic pole,
Next, a thin film magnetic head to which the present invention is applied will be described as a second embodiment with reference to FIGS. 3 and 8, which is realized by a shield film separately provided with a function as a magnetic shield. .

This embodiment is similar to the first embodiment,
After forming the insulating film 30 on the magnetoresistive element 26 (Step 107), the shield film 40 having the function of a magnetic shield of the magnetoresistive element 26 is formed (Step 111).

The insulating film 41 is formed on the shield film 40 (Step 112), and is flattened by the same method as the above-described flattening process (Step 113).

After the formation of the first magnetic film 42 (step 114), the gap film 33, the coil and the insulating film (not shown), and the second
The magnetic film 36 and the protective film 37 are sequentially laminated (steps 115, 116, 117 and 118).

Also in this embodiment, the planarization of the insulating film 41 makes the gap interface of the inductive element 43 flat, and the substantial reproduction track width R can be made smaller than the substantial recording track width W. Therefore, it is possible to prevent the S / N ratio from deteriorating due to the increase in crosstalk and the like, and prevent the reproduction output from lowering.

Next, a third embodiment of the thin-film magnetic head will be described with reference to FIG.

In this embodiment, the first magnetic film 42, the gap film 33, the coil and the insulating film (not shown),
The inductive element 43 made of the magnetic film 36 is formed on the substrate 20 before the magnetoresistive effect element 26 is provided.

After forming the inductive element 43, an insulating film 44 is formed. As described above, the magnetoresistive effect element 26 is extremely thin. If the surface on which the magnetoresistive effect element 26 is formed has irregularities, the magnetoresistive effect element 26 is deformed and the reproduction sensitivity is reduced.
Therefore, it is necessary to perform a flattening process on the film between the inductive element 43 and the magnetoresistive element 26. Therefore, in the present embodiment, the inductive element 43
A flattening process is performed on the insulating film 44 formed thereon.

Also in the present embodiment, since the inductive element 43 is formed directly on the flat substrate 20, the gap interface of the inductive element 43 is formed flat, and the substantial reproduction track width R is reduced to the substantial recording track width. W can be made smaller than W, and deterioration of the S / N ratio due to an increase in crosstalk or the like can be prevented. Further, in the present embodiment, the magnetoresistive element 26 which is easily affected by heat is used.
Can be formed later, so that the thermal effect of the magnetoresistive effect element 26 during manufacturing can be reduced,
The characteristics of the magnetoresistive element 26 can be kept good.

The thin-film magnetic heads of the various embodiments described above may be used not only in the above-described magnetic disk device but also in any other device such as a magnetic tape device that performs recording and reproduction using a magnetic head. Good.

[0066]

According to the present invention, the gap interface of the inductive element can be made flat without any particular restrictions on the formation of the magnetoresistive element.

[Brief description of the drawings]

FIG. 1 is a front view of a main part of a thin-film magnetic head according to a first embodiment of the present invention, viewed from a recording medium side.

FIG. 2 is a sectional view taken along line II-II in FIG.

FIG. 3 is a manufacturing process diagram of the thin-film magnetic head according to the first embodiment of the present invention.

FIG. 4 is an overall perspective view of the thin-film magnetic head according to the first embodiment of the present invention.

FIG. 5 is an overall sectional view of a magnetic disk drive according to the first embodiment of the present invention.

FIG. 6 is a graph showing a reproduction output characteristic and a crosstalk output characteristic of the thin-film magnetic head according to the first embodiment of the present invention.

FIG. 7 is a front view of a main part of the thin-film magnetic head viewed from the recording medium side, which is a modification of the first embodiment of the present invention.

FIG. 8 is a front view of a main part of a thin-film magnetic head according to a second embodiment of the present invention, as viewed from a recording medium side.

FIG. 9 is a front view of a main part of a thin-film magnetic head according to a third embodiment of the invention, as viewed from a recording medium side.

FIG. 10 is a front view of a main part of a conventional thin-film magnetic head viewed from a recording medium side.

11 is a sectional view taken along line XI-XI in FIG.

FIG. 12 is a front view of a main part of another conventional thin-film magnetic head as viewed from the recording medium side.

[Explanation of symbols]

20: substrate, 21, 40: shield film, 22, 30, 4
1, 44: insulating film, 23: conductor for lead, 26: magnetoresistive element, 31, 31a, 42: first magnetic film, 32
... gap interface, 33, 33a ... gap film, 36, 3
6a: second magnetic film, 38, 43: inductive element, 41: thin-film magnetic head, 42: magnetic disk.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shunichiro Kuezuka 2880 Kozu, Kozuhara, Odawara City, Kanagawa Prefecture Inside the Hitachi, Ltd.Odawara Plant (72) Inventor Hiroshi Ikeda 2880 Kozu, Kozuhara, Odawara, Kanagawa Prefecture Hitachi, Ltd.Odawara, Ltd. Inside the factory (72) Inventor Saburo Suzuki 2880 Kozu, Odawara City, Kanagawa Prefecture Inside the Hitachi, Ltd.Odawara Factory

Claims (1)

[Claims] An element having a magnetoresistive effect and an inductive element are laminated on a substrate in this order, with the ends facing each other with an interval therebetween and approaching one end, the substrate is disposed on the substrate. The inclined surface whose surface on the opposite side gradually approaches the substrate has two lead conductors formed at the respective end portions, and the element having the magnetoresistive effect is formed of two of the lead conductors. The thin-film magnetic head is formed on the inclined surface and between the ends of the two lead conductors.