JP2001074468A - Support structure for vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a support structure of for a vibrator where vibration of the vibrator is made hard to leak and with less characteristics degradation. SOLUTION: At a part corresponding to two node points for curvature vibration of a vibrator 10, support members 28 and 30 are fitted to electrodes 18a and 18b as well as to electrodes 20a and 20b, with the support member 28 connected to an electrode 22, while the support member 30 is connected to an electrode 24. At a part corresponding to the node point of the vibrator 10, support members 32 and 34 are fitted to a full-surface electrode 26. the support members 28 and 30 are insert-molded in a first support stage 36, while support members 32 and 34 are insert-molded in a second support stage 38. The two support stages 36 and 38 are stacked and bonded.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support structure for a vibrator, and more particularly to a support structure for a vibrator used in a vibrating gyroscope or the like.

[0002]

2. Description of the Related Art As a conventional structure for supporting a vibrator, there is a structure applied by the present applicant as Japanese Patent Application No. 11-19822. FIG. 3 is a perspective view showing the conventional vibrator support structure, and FIG. 4 is a side elevational view thereof. The vibrator 1
For example, it is formed by bonding two columnar piezoelectric substrates 2a and 2b polarized in opposite thickness directions. Divided electrodes are formed on one piezoelectric substrate 2a, and a support member 4 is attached to an electrode 3 formed at a portion corresponding to two node points of the vibrator 1. These support members 4 are respectively connected to electrodes 5a and 5b formed separately at the center of the vibrator 1. The entire surface electrode 6 is formed on the other piezoelectric substrate 2b. Then, at portions corresponding to the two node points of the vibrator 1, the support member 4 is attached to the entire surface electrode 6.

The ends of these support members 4 are supported by a support base 7. Metal pins 8 are embedded in the support 7,
The support member 4 is fixed to the exposed portion of the metal pin 8 by soldering, a conductive adhesive, or the like. Such a vibrator 1 is used, for example, as a vibrating gyroscope. By inputting a signal between the electrodes 5 a and 5 b and the entire surface electrode 6 via the support member 4, the vibrator 1 bends and vibrates in a direction perpendicular to the surface on which the entire surface electrode 6 is formed. Then, when the vibrator 1 rotates about the axis thereof, the vibrator 1 is driven by Coriolis force.
Changes its vibration direction. Signals corresponding to such changes in the vibration direction are output from the electrodes 5a and 5b. Therefore, by measuring the output signals of the electrodes 5a and 5b,
The rotational angular velocity applied to the vibrator 1 can be detected.

[0004]

In the vibrator support structure shown in FIG. 3, the metal pin and the support member are joined at eight positions. However, the amount of solder at these connection portions varies, Due to the deformation of the support member and the support base due to thermal stress at the time of soldering and mechanical stress at the time of processing, a variation occurs in the fixed state of the joint. Such a variation in the fixed state causes vibration leakage from the support member to the support base. Therefore, the vibration of the vibrator becomes unstable, and the characteristics are deteriorated.

[0005] Therefore, a main object of the present invention is to provide a vibrator support structure in which vibration of the vibrator is hardly leaked and characteristic deterioration is small.

[0006]

According to the present invention, there is provided a columnar vibrator, a support member for supporting a portion corresponding to a node point of the vibrator, and a distance from the vibrator for supporting the support member. And a support member provided on the support member, wherein the support member is insert-molded on the support member. In such a vibrator support structure, the support member is attached to the opposing surface of the vibrator so as to sandwich the vibrator, and has a structure in which two support bases that support each of the support members that sandwich the vibrator are stacked. Can be.

[0007] The support member supporting the portion corresponding to the node point of the vibrator is insert-molded on the support table, so that stress at the time of joining the support member and the support table is small, and the support member and the support table are fixed. Variations in the state are unlikely to occur. Therefore, the vibration of the vibrator hardly leaks, and characteristic deterioration hardly occurs. The vibrator is supported by support members on both surfaces, and the support members attached to both surfaces of the vibrator are insert-molded on another support table. By laminating and integrating these supports, the support points are strengthened and vibration leakage can be reduced.

The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.

[0009]

FIG. 1 is a perspective view showing a structure for supporting a vibrator according to the present invention, and FIG. 2 is a sectional view thereof. The vibrator 10 supported by the support structure includes a columnar vibrator 12. The vibrating body 12 has two piezoelectric substrates 14, 1
6 is formed by joining the two. Piezoelectric substrate 1
4 and 16 are polarized in the thickness direction so as to be opposite to each other, as shown by arrows in FIG.

On one piezoelectric substrate 14, electrodes divided into ten are formed. These electrodes are formed by forming an entire surface electrode on the piezoelectric substrate 14 and dividing the entire surface electrode by dicing or the like. Between the electrodes 18a, 18b and the electrodes 20a, 20b formed at positions corresponding to the two node points of the bending vibration of the vibrating body 12, the electrodes 22, 2 divided in the width direction of the vibrating body 12 are provided.
4 are formed. Electrodes 18a, 18b and electrode 20 formed at portions corresponding to node points of vibrating body 12
The electrodes 2 are also formed by dicing cuts on the outside of a and 20b.
Although the electrodes 5 are formed, these electrodes 25 are not used and need not be formed. Further, an entire surface electrode 26 is formed on the other piezoelectric substrate 16.

At portions corresponding to the node points of the vibrating body 12, support members 28 and 30 are attached to the electrodes 18a and 18b and the electrodes 20a and 20b, respectively. The support members 28 and 30 are formed of, for example, a metal wire or the like,
Connection portions 28a and 30a are formed at the center. The connecting portions 28a and 30a are connected to the electrodes 18a and 18b and the electrodes 20a and 20b by soldering or the like. Further, the connecting portion 28a of the support member 28 is
The connection portion 28a and the electrode 22 are electrically connected to each other so as to extend toward the electrode 22 formed at the center of the second portion. Similarly, the connecting portion 30a of the support member 30 is formed so as to extend toward the electrode 24 formed at the center of the vibrating body 12, and the connecting portion 30a and the electrode 24 are electrically connected. Further, at portions corresponding to the node points of the vibrating body 12, the supporting members 32 and 34 are attached to the entire surface electrode 26 by soldering or the like.

The support members 28, 3 connected to the electrodes 18a, 18b and the electrodes 20a, 20b on the piezoelectric substrate 14
0 is insert-molded on the first support base 36.
The support members 32 and 34 connected to the entire surface electrodes 26 on the piezoelectric substrate 16 are insert-molded on the second support base 38. That is, the support members 28 and 30 and the first support table 36 are integrally formed by insert molding, and the support members 32 and 34 and the second support table 38 are integrally formed by insert mold. Each of the first support base 36 and the second support base 38 is formed in a rectangular frame shape. Then, the first support base 36 and the second
Are bonded and integrated. A through-hole 40 is formed in a portion where the first support base 36 and the second support base 38 are bonded to each other, and an end of the vibrator 10 is inserted into the through-hole 40.

Between the vibrator 10 and the support bases 36, 38, bent portions are formed in the support members 28, 30, 32, 34. These support members 28, 30, 32,
34 is bent near the vibrator 10 in a plane parallel to the electrode forming surface of the vibrator 10. Further, the support members 28, 30, 32, 34 are bent in the vicinity of the support bases 36, 38 in a plane orthogonal to the electrode forming surface of the vibrator 10. Thus, the support members 28, 30, 3
By forming the bent portions on the support members 28, 30, 32, and 34, when the vibrator 10 bends and vibrates, the vibrations of the vibrator 10 are transmitted to the support members 28, 30, 32, and 34. , 38 are hardly leaked.

The vibrator 10 is used, for example, as a vibrating gyroscope. In this case, the support members 28, 3
0, 32, 34 and the electrodes 22, 24 and the entire surface electrode 2
6, a drive signal is provided. At this time, since the two piezoelectric substrates 14 and 16 are polarized in directions opposite to each other, when one piezoelectric substrate 14 is expanded by the drive signal, the other piezoelectric substrate 16 contracts. Conversely, when one piezoelectric substrate 14 contracts, the other piezoelectric substrate 16 expands. Therefore, the vibrating body 12 bends and vibrates in a direction perpendicular to the electrode forming surface.

At this time, since the vibration state of the vibrating body 12 is the same at the divided portions where the electrodes 22 and 24 are formed,
The same signal is output from the electrodes 22 and 24. Therefore, if the difference between these signals is obtained, the output becomes 0.
In such a state, when the vibrating body 12 rotates around the axis, the vibration direction of the vibrating body 12 changes due to the Coriolis force. For this reason, a difference occurs in the vibration state of the vibrating body 12 at the portions where the electrodes 22 and 24 are formed, and the signals output from the electrodes 22 and 24 also change. At this time, since the signals output from the electrodes 22 and 24 increase and decrease in accordance with the amount of change in the vibration direction of the vibrating body 12, a large output signal corresponding to the Coriolis force is obtained by taking the difference between these signals. be able to. Therefore, by measuring the difference between the output signals of the electrodes 22 and 24, the rotational angular velocity applied to the vibrator 10 can be detected.

In order to obtain such a support structure, first, the first and second support members 28 and 30 are insert-molded.
A second support table 38 prepared by insert-molding the support table 36 and the support members 32 and 34 is prepared. The support member 2 insert-molded on the first support base 36
8 is soldered to the electrodes 18a, 18b, 22 of the vibrator 10, and the support member 30 is connected to the electrodes 20a, 20
b, 24 are soldered. Then, the support members 28, 3
The first support base 36 and the second support base 38 are bonded together by sandwiching the vibrator 10 between the first support base 32 and the support members 32 and 34. Further, the support members 32 and 34 are provided on the entire surface electrode 26 of the vibrator 10.
The vibrator 10 is supported by soldering.

If such a support structure of the vibrator 10 is employed, the support members 28, 30, 32, and 34 are supported by the support base 36,
38, the supporting member 2
There is no solder, adhesive or the like between 8, 30, 32, 34 and the support bases 36, 38, and there is little variation in the fixed state between them. Further, the support members 28, 30, 32, 34
Since the thermal stress and the mechanical stress are not applied when fixing the support members 36, 38, the support members 28, 3
0, 32, 34 and the support bases 36, 38 are unlikely to be deformed. For these reasons, the vibration of the vibrator 10 is transmitted through the support members 28, 30, 32, and 34 to the support bases 36, 38.
Can be prevented from leaking. Therefore, the vibrator 1
The vibration of 0 can be stabilized, and good characteristics can be obtained.

Further, since bent portions are formed in the supporting members 28, 30, 32, and 34 that support the vibrator 10, leakage of vibration of the vibrator 10 is absorbed by the bent portions, and vibration is reduced. The structure is not easily transmitted to the support bases 36 and 38. With such a structure, the vibrator 10
Can be prevented from leaking, and the characteristics can be stabilized.

Further, in the supporting structure of the vibrator 10, the vibrator 10 is composed of the supporting members 28 and 30 and the supporting member 3
2 and 34, and the first support base 36 and the second support base 38 in which these support members are insert-molded are laminated and bonded, so that the support points become strong,
Further, vibration leakage can be prevented. Thereby, stable vibration can be obtained, and good characteristics can be obtained.

In FIG. 1, the first support base 36 and the second
A through-hole 40 is formed in the laminated body with the support base 38, and the end of the vibrator 10 is inserted into the through-hole 40.
Such a through hole is not always necessary, and the vibrator 10 is provided on the inner side of the support stack where the through hole is not formed.
May be arranged.

[0021]

According to the present invention, since the support member is insert-molded on the support base, the variation in the fixed state between them is reduced, the vibration leakage of the vibrator is reduced, and stable vibration is obtained. be able to. Also, since no soldering or the like is performed between the support member and the support base, there is no thermal stress or mechanical stress in these fixed portions,
Deformation during processing and variation in support are reduced, and vibration leakage can be prevented. Therefore, the vibration of the vibrator can be stabilized. Furthermore, by laminating and adhering the two support bases, the support points can be strengthened and stable vibration can be obtained.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a vibrator support structure of the present invention.

FIG. 2 is a cross-sectional view of the vibrator support structure shown in FIG.

FIG. 3 is a perspective view showing an example of a conventional vibrator support structure.

4 is a schematic side view of the conventional vibrator support structure shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Vibrator 12 Vibrator 14, 16 Piezoelectric substrate 18a, 18b Electrode 20a, 20b Electrode 22, 24 electrode 26 Full-surface electrode 28, 30, 32, 34 Support member 36 First support 38 Second support 40 Penetration Hole

Claims (2)

[Claims] 1. A columnar vibrator, a support member for supporting a portion corresponding to a node point of the vibrator, and a support table provided at a distance from the vibrator for supporting the support member The support structure of the vibrator, wherein the support member is insert-molded on the support base. 2. The device according to claim 1, wherein the support member is attached to an opposing surface of the vibrator so as to sandwich the vibrator, and two support bases each supporting the support member sandwiching the vibrator are stacked. 2. The support structure of the vibrator according to 1.