JP2001070854A - Coating method and coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely apply a coating liquid thin on the back surface of a long- sized base material by lowering a liquid vessel to a position of the coating height in a state that a nozzle is projected to be in contact with the back surface of the base material and traveling the base material to a coating finishing position while applying the coating liquid on the back surface of the base material. SOLUTION: The liquid vessel 66 is supported at the upper part of a supporting board of a supporting plate and a slit 84 extending in the left and right directions is formed on the center part of the upper end part. The nozzle 82 is incorporated inside the liquid vessel 66 and a pair of right and left nozzle supporting shafts 78, 80 are fixed respectively to the right end part and the left end part of the nozzle. The cover of the slit 84 of the liquid vessel 66 is opened in the state that the nozzle 82 is sunk into the inside of the liquid vessel 66 filled with the coating liquid, the liquid vessel 66 is elevated up to the lower side of the base material 28 and is traveled up to the coating finishing position as the coating liquid is applied on the back surface of the base material 28.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for coating a substrate with a coating liquid and a coating apparatus therefor.

[0002]

2. Description of the Related Art Recently, liquid crystal display devices and the like have become widespread, and it has become necessary to apply a coating liquid used for a protective film or the like to a glass plate of the liquid crystal display device.

As a method of applying a coating liquid to such a substrate such as a glass substrate, a coating apparatus utilizing a capillary phenomenon has been proposed (JP-A-8-224528, JP-A-6-224528).
-343908).

In this coating apparatus, a nozzle having a capillary gap is submerged in a liquid layer filled with a coating liquid, and when coating is performed, the nozzle is raised to bring the nozzle close to the lower surface of the substrate. The coating liquid is applied to the lower surface of the substrate by contacting the coating liquid through the capillary gap.

[0005]

When a coating liquid is applied to a glass substrate of a liquid crystal display device or the like, the coating thickness must be considerably reduced. Therefore, even when the above-described coating apparatus is used, the coating method is considerably difficult, and the apparatus has not been practically used for coating a glass substrate or the like. .

[0006] In view of the above problems, the present invention provides a coating method capable of reliably applying a thin coating liquid to the lower surface of a long base material using the coating apparatus as described above. A method and a coating device are provided.

[0007]

The invention according to claim 1 comprises a liquid tank containing a coating liquid, a liquid tank sinking into the coating liquid contained in the liquid tank, and a left-right direction provided with a capillary gap. And a backup roll for transporting the substrate in the front-rear direction above the nozzle, and applying a coating liquid to the lower surface of the substrate traveling in the front-rear direction from the capillary gap of the nozzle. A coating method of a coating apparatus, wherein a coating liquid is applied to the base material based on the following steps.

A step of raising the liquid tank to a position below the substrate with the nozzle submerged.

A step in which only the nozzle protrudes from the liquid tank;

A step of raising the liquid tank with the nozzle protruding, and bringing the coating liquid flowing out of the capillary gap of the nozzle into contact with a coating start position on the lower surface of the substrate.

A step of lowering the liquid tank to a coating height position in a state where the nozzle projects and comes into contact with the lower surface of the substrate.

[0012] While applying a coating liquid on the lower surface of the substrate,
A step of running the base material to a coating end position.

A step of lowering the nozzle and the liquid tank from a coating height position.

According to a second aspect of the present invention, there is provided a liquid tank containing a coating liquid, a nozzle submerged in the coating liquid contained in the liquid tank, and having a capillary gap and extending in the left-right direction. Having a backup roll for transporting the substrate in the front-rear direction above the nozzle, raising the liquid tank to near the lower surface of the substrate traveling in the front-rear direction, and further protruding the nozzle from the liquid tank. Applying a coating liquid from the capillary gap,
A coating device for lowering the liquid tank and the nozzle after the coating, wherein the means for moving the liquid tank up and down is arranged movably in the left-right direction on a base plate, and has a sloped upper surface. A first driving member for moving the movable cotter in the left-right direction, a support plate disposed above the movable cotter and supporting the liquid tank, and protruding from a lower surface of the support plate, on a slope of the movable cotter. And a means for moving the nozzle up and down from the liquid tank is connected to the support plate via a first connection member movable horizontally. A left and right moving plate, and a vertically moving plate that is connected to the left and right moving plate via a second connecting member that can move obliquely, and that is restricted from moving in the left and right directions;
A coating apparatus, comprising: a support shaft provided on the vertically moving plate and supporting the nozzle; and a second driving member for moving the left and right moving plate to the left and right.

A third aspect of the present invention provides a liquid tank containing a coating liquid, a nozzle submerged in the coating liquid contained in the liquid tank, and having a capillary gap and extending in the left-right direction. A coating apparatus for applying a coating liquid from the capillary gap of the nozzle to the lower surface of a long base material, wherein a backup roll for transporting the base material in the front-rear direction is provided above the nozzle. It is a coating device characterized by being arranged.

According to the coating method of the first aspect, the nozzle can be submerged in the liquid layer immediately before the start of coating.
After the coating liquid is brought into contact with the lower surface of the base material, the liquid layer is lowered together with the nozzle to the position of the coating height, so that the coating thickness can be made accurate.

According to the coating apparatus of the second aspect, when the liquid layer is moved up and down, the movable cotter is moved left and right by the first driving member, and the supporting plate is moved up and down accordingly. Therefore, the liquid layer can be accurately moved in the vertical direction.

Further, when the nozzle is moved in the vertical direction, the left and right moving plate is moved left and right by the second driving member, whereby the nozzle is moved in the left and right direction. It is preferable to make it orthogonal to the running direction. The restricted vertical moving plate moves up and down, and the nozzle can be moved up and down accurately.

According to the coating apparatus of the third aspect, the coating liquid can be applied from the nozzle to the lower surface of the substrate conveyed by the backup roll by utilizing the capillary phenomenon.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment A coating apparatus 10 according to a first embodiment of the present invention will be described below with reference to FIGS.

The coating apparatus 10 is an apparatus for applying a thin coating liquid to a glass substrate such as a liquid crystal display.

FIG. 1 is a left side view of the coating apparatus 10, and FIG. 2 is a front view.

1. As shown in FIGS. 1 and 2, the coating device 10 is mounted on a base frame 12 installed on a horizontal floor or the like in a front-rear direction via linear ways 14, 14. , Movable frames 16, 16 are mounted.

A suction table (hereinafter simply referred to as a table) 2 is provided between the pair of left and right moving frames 16 and 16.
4 is rotatably supported by a rotating shaft 26. The left and right moving frames 16, 16 are integrated by a welding structure.

The substrate 28 made of a glass plate is adsorbed on the adsorbing surface 27 of the table 24 to perform coating.
The configuration of the table 24 will be described later in detail.

2. Structure of Coating System 30 A coating system 30 for applying a coating liquid is provided inside the base frame 12. Hereinafter, the coating system 30 will be described.

FIG. 3 is a perspective view of the coating system 30, FIG. 4 is a front view, and FIG. 5 is a sectional view taken along line XX in FIG.

The coating system 30 includes the base frame 12
Are formed on the base plate 32 arranged in the left-right direction.

A pair of left and right movable cotters 34 and 36 are provided on the upper surface of the base plate 32.

The moving cotter 36 located on the right side is
Is movable along a linear way 38 disposed on the upper surface of the base plate 32 in the left-right direction. The upper surface of the movable cotter 36 is a slope 40, and the left side is lower than the right side. A linear way 42 is also provided on the slope 40.

Similarly, the movable cotter 34 has a base plate 3
2 is movable in the left-right direction by a linear way 44, and a linear way 48 is provided on the slope 46.

A connecting shaft 50 is provided on the pair of left and right moving cotters 34 and 36, and a servo motor 52 is disposed at the right end of the connecting shaft 50. A male screw portion is provided at the position of the moving cotters 34 and 36 of the connecting shaft 50, and a female screw portion is provided inside the moving cotters 34 and 36. By rotating the servo motor 52, the connecting shaft 50 is rotated, and the movable cotters 34 and 36 are rotated.
Move left and right along the linear ways 38 and 44.

A support plate 54 is provided above the pair of movable cotters 34, 36. This support plate 5
4 includes a support plate 56 extending in the left-right direction and a substrate 58 extending in the front-rear direction from the lower end of the support plate 56.

On the lower surface of the substrate 58, a pair of left and right support legs 60 and 62 are provided. The lower surfaces of the support legs 60 and 62 are slopes, and can move along the linear ways 42 and 48 formed on the slopes of the moving cotters 34 and 36.

A vertically moving guide shaft 64 projects from the base plate 32 to the center of the substrate 58 of the support plate 54. The support plate 54 can move up and down along the guide shaft 64, and is restricted from moving in the left-right direction.

At the upper end of the support plate 54, a liquid tank 66 for storing a coating liquid is provided. The liquid tank 66 will be described later.

The support plate 56 of the support plate 54 is provided with a left and right moving plate 70 via a pair of left and right linear ways 68. This linear way 68 is movable in the left-right direction. The left / right moving plate 70 can be moved in the left / right direction by an air cylinder 71.

An up / down moving plate 74 is provided on the front surface of the left / right moving plate 70 via a linear way 72. The linear way 72 is movable in an oblique direction. Further, the vertically moving plate 74 is vertically movable along a pair of left and right guide shafts 76 protruding from the substrate 58 of the support plate 54, and is restricted from moving in the left and right directions.

A nozzle support shaft 78 protrudes from the vicinity of the left end and the vicinity of the right end of the vertically moving plate 74.
Is supported. The nozzle 82 will be described later.

3. Structure of Liquid Tank 66 and Nozzle 82 Next, the structure of the liquid tank 66 and the nozzle 82 will be described with reference to FIGS.

The liquid tank 66 supported above the support plate 56 of the support plate 54 extends in the left-right direction, and has a trapezoidal side surface as shown in FIG. A slit 84 extending in the left-right direction is formed in the center of the upper end of the liquid tank 66 (at the top of the slope). This slit 8
4 can be closed by a lid 86 provided outside the liquid tank 66.

A nozzle 82 is built in the liquid tank 66. The nozzle 82 includes a pair of front and rear nozzle members 90 and a rear nozzle member 92 via a capillary gap 88 extending in the left-right direction. These front nozzle members 9
0 and the rear nozzle member 92 are symmetrical in the front-rear direction, have a sharp cross-sectional shape like a beak as it goes upward, and a capillary gap 88 is provided between them. The upper end of the capillary gap 88 opens in the left-right direction, and the lower surface also opens in the left-right direction.

The above-mentioned pair of left and right nozzle support shafts 78 and 80 are fixed to the left end and the right end of the nozzle 82, respectively. Then, a pair of left and right nozzle support shafts 78,
Reference numeral 80 denotes a pair of left and right holes 94, 9 opened on the bottom of the liquid tank 66.
6 slides. In order to prevent the coating liquid from leaking out of the holes 94 and 96, bellows-like closing members 98 and 10 extend from the bottom of the nozzle 82 to the bottom of the liquid tank 66.
0 is provided. Thereby, the support shaft 78,
Even if the 80 moves up and down, the bellows-like closing members 98 and 100 extend and contract in the vertical direction so that the coating liquid does not leak from the holes 94 and 96 (see FIGS. 6 and 7).

As shown in FIG. 8, a coating liquid is pumped out of a tank 102 storing the coating liquid by a pump 104,
The coating liquid is supplied to the supply port 108 of the coating liquid which is opened on the left side of the liquid tank 66 through the filter 106. A circulation port 110 is opened at the bottom of the liquid tank 66.
The coating liquid circulates from the tank 102 to the tank 102. Note that the filter 106 removes foreign matter when it is present, in order to circulate the coating liquid.

Further, a hole 111 is opened in the upper part of the left side surface of the liquid tank 66, and an L-shaped height adjusting tube 112 protrudes from the hole 111. The upper end of the height adjustment tube 112 is open,
Further, a detection sensor 114 for detecting the height of the coating liquid is provided on the outer side surface of the adjusting tube 112. That is, when the liquid tank 66 is filled with the coating liquid, the height adjusting pipe 112 is filled with the coating liquid to the same height.
Then, the detection sensor 114 detects the coating liquid according to the filled amount, and detects the height of the coating liquid. The data of the detected height is sent to the control unit 115 composed of a microcomputer, and the control unit 115 drives the motor 105 of the pump 104 according to the height data to set the height to the set height. Supply the coating liquid up to.

4. Next, a structure for moving the table 24 to the position of the nozzle 82 will be described.

As shown in FIGS. 1 and 2, the moving frames 16, 16 are rotated in the longitudinal direction by rotating a screw rod 18 provided on the left side surface of the base frame 12 by a motor 20. , 14 can be moved.

That is, the pair of moving frames 16, 16
A moving portion 22 having a female screw portion screwed with the screw rod 18 projects from the moving frame 16 on the left side, and the moving portion 22 is turned by the rotation of the screw rod 18.
Along a pair of left and right moving frames 16, 16
Moves in the front-back direction.

5. Next, a structure for adsorbing the base material 28 to the table 24 will be described.

The table 24 provided between the pair of left and right moving frames 16, 16
It can be turned by 80 °. And this table 2
A plurality of suction holes 116 are opened in the suction surface 27 of No. 4. The suction hole 116 is open over the front surface of the table 24, and its internal structure is as shown in FIGS. That is, the suction space 118 divided into a plurality of sections is provided inside the table 24.

More specifically, the first section is composed of four suction spaces 118 provided at the center of the upper part of the table 24 in FIG. 10, and the suction spaces 118 are connected by a narrow air path 120. . Each of the four suction spaces 118 has four suction holes 116. As shown in FIG. 9, suction pipes 12 for sucking air are provided in the four suction spaces 118 of the first section.
2, the suction pipe 122 is connected to the manual valve 12
4 and is inserted into the rotation shaft 26. Then, the inserted suction pipe 122 is taken out from the left side of the moving frame 16 and connected to the vacuum pump 126.

The second section of the table 24 is a state in which the above-mentioned first section is surrounded in a U-shape, and is composed of six suction spaces 118, which are also connected by the air path 120. Have been.

Hereinafter, the third section and the fourth section are similarly configured.

Here, the case where the table 24 sucks the substrate 28 will be described.

The substrate 28 is placed at the center of the table 24. In this case, the manual valve 124 is opened from the first section to the n-th section according to the size of the base material 28, and the base material 28 is sucked from the suction hole 116 by the vacuum pump 126. That is, the first section at the center is always in the suction state, and the subsequent sections are in the suction state according to the size of the base material 28. In addition, a section that is not necessary for suction is a manual valve 12.
Close 4 to prevent suction.

A motor 128 for rotating the rotary shaft 26 of the table 24 and a speed reducer are built in the moving frame 16.

The first section is not opened in a rectangular shape, but four suction spaces 118 are provided.
The connection by 20 is because the strength of the table 24 is considered.

6. Coating Step A case in which a coating liquid is applied to the base material 28 using the coating apparatus 10 having the above configuration will be described.

(First Step) In FIG. 1, the table 24 is located at the base material position A. In this case, the suction surface 27 faces upward. Then, the substrate 28 is placed on the suction surface 27 with the surface to be coated facing upward. Then, the vacuum pump 126 is operated to move the substrate 2 from the suction hole 116.
The base material 28 is fixed to the table 24 by sucking 8.

(Second Step) The table 24 is rotated by approximately 180 °, and the suction surface 27 and the
That is, the base member 28 is positioned below.

A motor 128 for rotating the rotating shaft 26 and a speed reducer are built in the moving frame 16.

(Third Step) The inverted table 24 is moved by the motor 20 so that the moving frames 16, 16 are moved.
To the coating start position.

(Fourth Step) The liquid tank 66 is filled with a coating liquid up to a predetermined height. In this case, the current height of the coating liquid is adjusted by the detection sensor 114 provided on the outer side surface of the height adjusting pipe 112, and when the height of the coating liquid is increased to a predetermined height, the control unit 115 is used. Operates the pump 104 to supply the coating liquid.

The nozzle 82 is kept submerged in the liquid tank 66 filled with the coating liquid. Then, with the nozzle 82 submerged in the coating liquid, the lid 86 of the slit 84 of the liquid tank 66 is opened, and the liquid tank 66 is raised below the substrate 28. In this method of raising, as shown in FIG. 4, the servomotor 52 is rotated to move the pair of left and right moving cotters 34, 36. Then, the support plate 54 whose movement is restricted in the left-right direction is moved to the movement cotter 34,
36, the linear ways 42 provided on the slopes 40, 46,
It moves only upward along 48. When the support plate 54 moves upward, the liquid tank 66 and the nozzle 82 simultaneously move upward.

When the liquid bath 66 is raised below the base material 28, the lifting is temporarily stopped.

(Fifth Step) The liquid tank 6 raised as described above
6 and only the nozzle 82 is projected.

For this purpose, the left and right moving plate 70 is moved by the air cylinder 71. In this case, since the vertical movement plate 74 is restricted from moving in the left-right direction,
When the left / right moving plate 70 moves in the left / right direction, the vertical moving plate 74 moves only upward because the linear way 72 is provided diagonally. When the vertically moving plate 74 moves upward, the nozzle support shafts 78 and 80 also move upward at the same time, and the nozzle 82 rises. When the nozzle 82 rises from the coating liquid in the liquid tank 66, the gap between the capillary gaps 88 is filled with the coating liquid.
Rises with the coating liquid filled to the tip. Then, the ascent is stopped.

(Sixth Step) With the nozzle 82 protruding as described above, the liquid tank 66 is raised again to come into contact with the lower surface of the substrate 28. That is, the coating liquid filled in the capillary gap 88 of the nozzle 82 is brought into contact with the lower surface of the substrate 28.

At the time of this rise, the speed and distance of the rise of the liquid tank 66 need to be adjusted very finely. However, when the servo motor 52 is rotated as described above, the movable cotter 3 is moved.
Since the support plate 54 moves up and down along the slopes 4 and 36, this fine adjustment can be easily performed.
In addition, since the liquid tank 66 can be lifted in a horizontal state in the left-right direction, the coating thickness of the substrate 28 does not change in the left-right direction.

(Seventh Step) The liquid tank 66 is lowered together with the nozzle 82 in a state where it is in contact with the liquid to the position of the coating height in a state where the liquid is in contact as described above. That is, the distance between the position of the tip of the nozzle 82 and the substrate 28 is the coating thickness. This fine adjustment can be easily performed using the servo motor 52 as described above.

(Eighth Step) After the nozzle 82 is lowered to the coating height position as described above, the base material 28 is placed on the table 2.
4 moves the coating at a constant speed to the coating end position. Then. The coating liquid can be applied in a flat state by moving the substrate 28 in the front-rear direction while the coating liquid is applied in the left-right direction by the nozzle 82. That is, it becomes possible to apply the coating liquid to the flat surface on the base material 28 at a predetermined coating thickness. In this case, the posture of the base material 28 in the front-back direction and the posture in the left-right direction are both kept horizontal.

(Ninth Step) The base material 28 is temporarily stopped at the coating end position, and the nozzle 82 and the liquid tank 66 are respectively lowered from the coating height position and separated from the base material 28.

(Tenth Step) After the nozzle 82 has moved away from the lower surface of the base material 28, the table 24 is moved backward as shown in FIG.

(Eleventh Step) The table 24 having been moved to the substrate position C is again rotated by 180 ° and turned to the state of the substrate position D. As a result, the substrate 28 is
Is located on the upper surface.

(Twelfth Step) The suction force of the suction surface 27 is released, and the substrate 28 is removed from the table 24. Thus, a series of coating operations is completed.

As described above, according to the coating apparatus 10 of this embodiment, by performing the above-described coating process, the base material 28 made of a glass substrate is coated with a predetermined coating thickness and a flat surface. Can be applied all at once. In addition, moving cotter 3
Since the support plate 54 moves up and down on the slopes 4 and 36, the upper and lower positions of the liquid tank 66 and the nozzle 82 can be moved accurately and even in the middle.

Further, the nozzle 82 is connected to the left and right moving plate 7.
0 is moved by the air cylinder 71 to move the up-down moving plate 74 in the up-down direction, so that it can be moved up and down accurately and reliably.

Second Embodiment FIG. 11 shows a coating apparatus 200 according to a second embodiment.

The coating apparatus 200 is different from the coating apparatus 10 of the first embodiment in that it does not apply a coating liquid to the plate-like base material 28, but uses a long base material 202 (for example, (A film or a nonwoven fabric) with a coating liquid.

As shown in FIG. 11, below the backup roll 204, the coating system 30 described above is arranged.

The substrate 202 is conveyed along the backup roll 204, and is coated by the nozzle 82 at the lowest point of the backup roll 204. This coating method is the same as described above.

According to this method, coating can be performed not only on the plate-shaped substrate 28 but also on the long substrate 202.

Third Embodiment In the above embodiment, the base material 28 is conveyed horizontally, but the conveying posture is not limited to this.

That is, the nozzle 82 is shaped as shown in FIG. 12, specifically, the capillary gap 88 is tilted, and the tip of the nozzle 82 is also tilted so that the rear is lowered. And
The base material 28 is conveyed while being inclined so as to go upward as it advances.

According to this method, even if the coating liquid has a low viscosity and flows along the lower surface of the base material 28, the coating liquid flows to a portion to be coated from now on, so that the coating thickness is maintained uniformly. be able to. Note that, in this case, it is preferable that the capillary gap 82 and the traveling direction of the base material 28 be perpendicular to each other.

Fourth Embodiment In the third embodiment, the base material 28 is conveyed while being inclined so as to go upward as it advances, but in this embodiment, it moves downward as it advances in the opposite direction. It is to be inclined.

That is, the nozzle 82 is shaped as shown in FIG. 13, specifically, the capillary gap 88 is inclined, and the tip of the nozzle 82 is also inclined such that the front is lowered. Then, the base material 28 is conveyed while being inclined so as to go downward as it advances.

According to this method, if the coating liquid has a high viscosity, it does not flow along the lower surface of the substrate 28, and even with such a coating method, the coating thickness can be uniform. Can be held. In this case, the capillary gap 8
It is preferable that the direction of travel of the base material 2 be orthogonal to that of the base material 28.

Modification In the first embodiment, as shown in FIG. 6, the overall shape of the nozzle 82 is such that the front and rear symmetrical beaks protrude from the trapezoidal base. The shape of
Not limited to this, various shapes are possible as shown in FIGS. 14 (a) to (i).

The shape of the tip of the nozzle 82 is also shown in FIG.
As shown in (a) to (j), various shapes are possible.

The nozzle 82 includes a front nozzle portion 150 and a rear nozzle portion 152, and has a capillary gap 82 between them. The cross-sectional shapes of the nozzles 82 are specifically as follows.

9A, the upper surface of the front nozzle portion 150 is flat, and the upper surface of the rear nozzle portion 152 is flat.

[0093] In (b), the upper surface of the front nozzle portion 150 has an arc shape and the upper surface of the rear nozzle portion 152 has a planar shape.

(C), the upper surface of the front nozzle portion 150 is an inclined surface, and the upper surface of the rear nozzle portion 152 is planar.

(D), the upper surface of the front nozzle portion 150 is a stepwise inclined surface, the angle θ forms an obtuse angle, and the rear nozzle portion 15
The upper surface of 2 is a stepwise planar shape.

(E), the upper surface of the rear nozzle 152 is flat, the upper surface of the front nozzle 150 is arc-shaped, and the cross-section of the front nozzle 150 is plate-shaped instead of triangular. .

In (f), the upper surface of the front nozzle 150 is inclined from the plane, and the upper surface of the rear nozzle 152 is inclined from the plane.

(G), the upper surface of the front nozzle portion 150 has an arc shape and the upper surface of the rear nozzle portion 152 has an arc shape.

(H), the upper surface of the rear nozzle 152 is flat, the upper surface of the front nozzle 150 is arc-shaped, and the upper surface of the rear nozzle 152 is higher than the upper surface of the front nozzle 150.

(I), the upper surface of the front nozzle portion 150 is flat and the upper surface of the rear nozzle portion 152 is flat. The capillary gap 82 forms an inclined surface and narrows at the upper part.

(J), the upper surface of the front nozzle portion 150 is flat, and the upper surface of the rear nozzle portion 152 is flat. The capillary gap 82 forms an inclined surface and narrows at the upper part.

[0102]

As described above, according to the coating method of the first aspect of the present invention, the lower surface of the substrate moved by the backup roll can be coated with a predetermined coating thickness and in a flat state. it can.

According to the coating apparatus of the second aspect, the liquid tank and the nozzle can be accurately moved up and down to a predetermined height.

According to the coating apparatus of the third aspect, the coating liquid can be surely applied to the lower surface of the base material moved by the backup roll.

[Brief description of the drawings]

FIG. 1 is a left side view of a coating apparatus according to a first embodiment of the present invention.

FIG. 2 is a front view of the same.

FIG. 3 is a perspective view of a coating system.

FIG. 4 is a front view of the coating system.

FIG. 5 is an X-ray sectional view in FIG.

FIG. 6 is a longitudinal sectional view of a liquid tank and a nozzle, which are in a state before coating.

FIG. 7 is also a state during coating.

FIG. 8 is a longitudinal sectional view showing a relationship among a liquid tank, a nozzle, a tank, a pump, and a filter.

FIG. 9 is a longitudinal sectional view of a table.

FIG. 10 is a cross-sectional view of a partly mounted table with a part omitted.

FIG. 11 is a side view of a coating apparatus according to a second embodiment.

FIG. 12 is a longitudinal sectional view of a main part of a coating apparatus according to a third embodiment.

FIG. 13 is a longitudinal sectional view of a main part of a coating apparatus according to a fourth embodiment.

14 (a) to (i) are longitudinal sectional views of a modified example of a nozzle.

15 (a) to (j) are longitudinal sectional views of a modified example of the tip of the nozzle.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Coating apparatus 24 Table 28 Base material 30 Coating system 34 Moving cotter 36 Moving cotter 52 Servo motor 54 Support plate 60 Support leg 62 Support leg 66 Liquid tank 70 Left-right movement plate 71 Air cylinder 74 Vertical movement plate 78 Nozzle support shaft 80 Nozzle support shaft 82 Nozzle 84 Slit 88 Capillary gap

Continued on front page F-term (reference) 4D075 AC02 AC09 AC73 AC86 AC88 AC92 AC93 CA47 DA06 DC22 EA05 4F040 AA12 AC01 CA02 CA05 CA07 CA15 CA20 DA02 DA12 4F041 AA06 AB01 BA07 BA10 BA12 BA21 BA36 BA38 BA56 CA02 CA12 CA18 CA22 CA07 4F04 A2 4G059 AA01 AA08 AB19

Claims (3)

[Claims] A liquid tank containing a coating liquid, a nozzle submerged in the coating liquid contained in the liquid tank, and having a capillary gap and extending in the left-right direction; A backup roll for transporting the substrate in the front-rear direction; and a coating method of a coating apparatus for applying a coating liquid from a capillary gap of the nozzle to a lower surface of the substrate traveling in the front-rear direction. Then, a coating liquid is applied to the substrate based on the following steps.
A step of raising the liquid tank to a position below the base in a state where the nozzle is sunk. A step in which only the nozzle protrudes from the liquid tank; A step of raising the liquid tank with the nozzle protruding, and bringing the coating liquid flowing out of the capillary gap of the nozzle into contact with a coating start position on the lower surface of the substrate. A step of lowering the liquid tank to a coating height position in a state where the nozzle projects and comes into contact with the lower surface of the base material. A step of running the substrate to a coating end position while applying a coating liquid to the lower surface of the substrate. A step of lowering the nozzle and the liquid tank from a position at a coating height. 2. A liquid tank containing a coating liquid, a nozzle submerged in the coating liquid contained in the liquid tank, and provided with a capillary gap and extending in the left-right direction. A backup roll for transporting the substrate in the front-rear direction; and raising the liquid tank to near the lower surface of the substrate traveling in the front-rear direction, and further protruding the nozzle from the liquid tank, thereby forming the capillary. A coating apparatus for applying a coating liquid from a gap and lowering the liquid tank and the nozzle after the coating, wherein the means for moving the liquid tank up and down is arranged movably in a left-right direction on a base plate, A movable cotter having an inclined upper surface, a first driving member for moving the movable cotter in the left-right direction, a support plate disposed above the movable cotter and supporting the liquid tank, and a lower surface of the support plate From the A support leg having a lower surface formed on a slope so as to be movable on a slope of the cotter; and a means for moving the nozzle up and down from the liquid tank, the first connecting member movable horizontally with the support plate. A left and right moving plate connected through a second connecting member that is obliquely movable with the left and right moving plate, and a left and right moving plate that is restricted from moving in the left and right direction; A coating device, comprising: a support shaft provided to support the nozzle; and a second driving member configured to move the left and right moving plate to the left and right. 3. A liquid tank containing a coating liquid, and a nozzle submerged in the coating liquid contained in the liquid tank and having a capillary gap and extending in the left-right direction. A coating apparatus for applying a coating liquid from a capillary gap of the nozzle to a lower surface of a scale-shaped substrate, wherein a backup roll for transporting the substrate in the front-rear direction is disposed above the nozzle. And coating equipment.