JP2001068691A - Package for housing optical element - Google Patents
Package for housing optical elementInfo
- Publication number
- JP2001068691A JP2001068691A JP24263899A JP24263899A JP2001068691A JP 2001068691 A JP2001068691 A JP 2001068691A JP 24263899 A JP24263899 A JP 24263899A JP 24263899 A JP24263899 A JP 24263899A JP 2001068691 A JP2001068691 A JP 2001068691A
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- package
- light
- frame
- window member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は光素子を収容するた
めの光素子収納用パッケージに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical element housing package for housing an optical element.
【0002】[0002]
【従来の技術】従来、光半導体素子を収容するための光
半導体素子収納用パッケージは、一般に鉄−ニッケル−
コバルト合金や銅−タングステン合金などの金属から成
り、上面中央部に光半導体素子が載置される載置部を有
し、この載置部周辺に複数の外部リード端子がガラスな
どの絶縁部材を介し上面から下面に貫通するようにして
固定された金属基体と、光半導体素子載置部を囲繞する
ようにして金属基体上に銀ロウなどのロウ材を介して接
合され側部に貫通孔を有する金属枠体と、この金属枠体
の貫通孔を覆うようにして、融点が200 ℃〜400 ℃の金
−錫合金などの低融点ロウ材を介して取着される非晶質
ガラスなどから成る透光性窓部材と、金属枠体の上面に
取着され光半導体素子を気密に封止する蓋体とから構成
されており、金属基体の載置部に光半導体素子を載置固
定するとともに光半導体素子の各電極をボンディングワ
イヤを介して外部リード端子に電気的に接続し、この光
半導体素子が気密に収容されるように蓋体を金属枠体の
上面に接合させるとともに金属枠体の貫通孔に光ファイ
バをYAG溶接や炭酸ガスレーザ溶接などにより接合さ
せることによって製品としての光半導体装置となる。2. Description of the Related Art Conventionally, a package for housing an optical semiconductor element for housing an optical semiconductor element is generally made of iron-nickel-
It is made of a metal such as a cobalt alloy or a copper-tungsten alloy, and has a mounting portion on which the optical semiconductor element is mounted in the center of the upper surface.A plurality of external lead terminals are provided around the mounting portion with insulating members such as glass. A metal base fixed so as to penetrate from the upper surface to the lower surface, and a through hole formed on the side of the metal base so as to surround the optical semiconductor element mounting portion via a brazing material such as silver brazing. From a metal frame having a low melting point brazing material such as a gold-tin alloy having a melting point of 200 ° C. to 400 ° C. so as to cover the through holes of the metal frame. And a lid attached to the upper surface of the metal frame to hermetically seal the optical semiconductor element. The optical semiconductor element is mounted and fixed on the mounting portion of the metal base. At the same time, each electrode of the optical semiconductor element is externally connected via a bonding wire. The optical semiconductor device is electrically connected to the terminal, and the lid is joined to the upper surface of the metal frame so that the optical semiconductor element is airtightly accommodated, and the optical fiber is YAG-welded or carbon dioxide laser-welded to the through-hole of the metal frame. An optical semiconductor device as a product can be obtained by bonding.
【0003】このような光半導体装置は、外部電気回路
から供給される駆動信号によって光半導体素子を光励起
させ、この励起した光を透光性窓部材を通して光ファイ
バに授受させるとともに光ファイバ内を伝達させること
によって高速光通信などに使用される光半導体装置とし
て機能する。In such an optical semiconductor device, an optical semiconductor element is optically excited by a drive signal supplied from an external electric circuit, and the excited light is transmitted to and received from an optical fiber through a light transmitting window member, and is transmitted through the optical fiber. By doing so, it functions as an optical semiconductor device used for high-speed optical communication and the like.
【0004】また、この光半導体素子収納用パッケージ
と同様の構成で、光半導体素子に代えて、パッケージ内
に導入された光を高速で変調するような光素子を収容す
る光素子収納用パッケージも同様に高速光通信などに使
用される光半導体装置として利用されている。In addition, instead of the optical semiconductor element, an optical element storing package for accommodating an optical element that modulates light introduced into the package at a high speed has the same structure as the optical semiconductor element storing package. Similarly, it is used as an optical semiconductor device used for high-speed optical communication and the like.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、光半導
体素子とは異なる材料から成る光素子を収容する光素子
収納用パッケージの場合は、光素子として、熱膨張係数
が約16ppm/℃のニオブ酸リチウムから成る光導波路
チップを用いるので、光素子収納用パッケージの基体と
して、従来の光半導体素子収納用パッケージのように、
熱膨張係数が約10ppm/℃(室温〜800 ℃時)の鉄−
ニッケル−コバルト合金や熱膨張係数が約7ppm/℃
(室温〜800 ℃時)の銅−タングステン合金を用いる
と、基体と光素子との間で発生する熱膨張差による応力
によって、光素子が湾曲したり剥がれたりするなどの問
題が発生してしまい、光素子の光の高速変調特性に波長
スペクトラムの拡がりなどの劣化を生じてしまうという
問題点を有していた。However, in the case of an optical element housing package for housing an optical element made of a material different from that of the optical semiconductor element, the optical element is made of lithium niobate having a thermal expansion coefficient of about 16 ppm / ° C. Since an optical waveguide chip consisting of: is used, as a base of an optical element housing package, like a conventional optical semiconductor element housing package,
Iron with a coefficient of thermal expansion of about 10 ppm / ° C (at room temperature to 800 ° C)
Nickel-cobalt alloy and thermal expansion coefficient about 7ppm / ℃
When a copper-tungsten alloy (at room temperature to 800 ° C.) is used, problems such as bending or peeling of the optical element may occur due to stress caused by a difference in thermal expansion between the base and the optical element. In addition, there is a problem that the high-speed modulation characteristic of light of the optical element is deteriorated such as the spread of the wavelength spectrum.
【0006】これに対して、光素子の熱膨張係数に近似
したステンレスから成る基体の上面に熱膨張係数の異な
る鉄−ニッケル−コバルト合金から成る枠体を銀ロウな
どのロウ材で接合することが考えられる。しかしなが
ら、この場合でも、それらの熱膨張差により基体が湾曲
することから、基体上に光素子を接着固定した際に、光
素子が湾曲するなどの問題が発生し、やはり光素子の光
の高速変調特性に劣化を生じてしまうという問題点を有
していた。On the other hand, a frame made of an iron-nickel-cobalt alloy having a different coefficient of thermal expansion is joined to the upper surface of a base made of stainless steel having a coefficient of thermal expansion similar to that of an optical element with a brazing material such as silver brazing. Can be considered. However, even in this case, since the base is curved due to the difference in thermal expansion between them, when the optical element is adhered and fixed on the base, a problem such as the bending of the optical element occurs. There is a problem that the modulation characteristics are deteriorated.
【0007】また、基体および枠体をステンレスから成
るものとした場合には、光ファイバ内を伝達してきた光
が、透光性窓部材と枠体との熱膨張差によって発生する
応力によって非晶質ガラスなどから成る透光性窓部材で
複屈折を起こし、光素子と光との結合効率が劣化してし
まうという問題点を有していた。また、最終的には、こ
の応力によって非晶質ガラスにクラックが発生し、光素
子を気密に収容することが困難となってしまうという問
題点も有していた。Further, when the base and the frame are made of stainless steel, the light transmitted through the optical fiber becomes amorphous due to the stress generated by the difference in thermal expansion between the light transmitting window member and the frame. There has been a problem that birefringence occurs in a light-transmitting window member made of high-quality glass or the like, and the coupling efficiency between an optical element and light deteriorates. Further, finally, the stress causes cracks in the amorphous glass, which causes a problem that it is difficult to hermetically accommodate the optical element.
【0008】本発明は上記問題点に鑑み案出されたもの
で、その目的は、基体上に載置した光素子が湾曲したり
剥がれたりするのを有効に防止することによって、光素
子により光の高速変調を可能とすることができ、また光
ファイバから伝達される光が透光性窓部材で複屈折を起
こすのを有効に防止することによって、光素子と光との
結合効率を良好とすることができ、さらに光素子を気密
に収容することによって長期間にわたり光素子を正常か
つ安定に作動させることができる光素子収納用パッケー
ジを提供することにある。The present invention has been devised in view of the above problems, and has as its object to effectively prevent an optical element mounted on a substrate from being bent or peeled off, thereby enabling an optical element to emit light. High-speed modulation, and by effectively preventing light transmitted from the optical fiber from causing birefringence in the translucent window member, the coupling efficiency between the optical element and the light is improved. Another object of the present invention is to provide an optical element storage package that can operate the optical element normally and stably for a long period of time by hermetically storing the optical element.
【0009】[0009]
【課題を解決するための手段】本発明の光素子収納用パ
ッケージは、上面にニオブ酸リチウムから成る光素子が
載置される載置部を有する基体と、この基体上に前記光
素子を囲繞するように取着され側部に貫通孔を有する枠
体と、この枠体に取着され前記貫通孔を塞ぐ透光性窓部
材と、前記枠体の上面に取着され前記光素子を気密に封
止する蓋体とから成る光素子収納用パッケージであっ
て、前記基体および前記枠体は、熱膨張係数が14〜19p
pm/℃のオーステナイト系ステンレスから成り、かつ
前記透光性窓部材が17000 kg/mm2 以下のヤング率
を有する環状部材を介して前記枠体に取着されているこ
とを特徴とするものである。According to the present invention, there is provided an optical element storage package having a base having a mounting portion on which an optical element made of lithium niobate is mounted, and surrounding the optical element on the base. A frame having a through-hole on the side part attached to the frame, a translucent window member attached to the frame and closing the through-hole, and an air-tight element mounted on the top of the frame and sealing the optical element. A package for sealing an optical element, wherein the package and the frame have a coefficient of thermal expansion of 14 to 19 p.
pm / ° C., wherein the translucent window member is attached to the frame via an annular member having a Young's modulus of 17,000 kg / mm 2 or less. is there.
【0010】本発明の光素子収納用パッケージによれ
ば、ニオブ酸リチウムから成る光素子を収容するための
パッケージ構造として、基体および枠体を、熱膨張係数
が14〜19ppm/℃のオーステナイト系ステンレスから
成るものとしたことから、熱膨張係数が約16ppm/℃
のニオブ酸リチウムから成る光素子と基体との間、なら
びに基体と枠体との間で熱膨張差による応力がほとんど
発生しないので、基体や光素子が湾曲するなどの問題が
発生しない。その結果、光素子の光の高速変調特性の劣
化を有効に防止することができるとともに基体と枠体の
接合を強固となすことができる。According to the package for accommodating an optical element of the present invention, as a package structure for accommodating an optical element made of lithium niobate, an austenitic stainless steel having a coefficient of thermal expansion of 14 to 19 ppm / .degree. From about 16 ppm / ° C.
Almost no stress due to the difference in thermal expansion occurs between the optical element made of lithium niobate and the base and between the base and the frame, so that problems such as bending of the base and the optical element do not occur. As a result, it is possible to effectively prevent the deterioration of the high-speed modulation characteristic of light of the optical element, and it is possible to firmly join the base and the frame.
【0011】また、光ファイバから伝達される光を集光
するための熱膨張係数が約9ppm/℃の非晶質ガラス
などから成る透光性窓部材とステンレスから成る枠体と
の接合は、ヤング率が17000 kg/mm2 以下の環状部
材を透光性窓部材と枠体との間に介して銀ロウなどのロ
ウ材を用いて接合することにより、透光性窓部材と枠体
との間で発生した熱膨張差による応力を十分に緩和させ
ることができ、透光性窓部材に複屈折を起こさせたりク
ラックを発生させることがなく、光素子と光との結合効
率を良好なものと成すことができるとともに光素子を気
密に収容し長期間にわたり正常かつ安定に作動させるこ
とができる。In addition, a light transmitting window member made of amorphous glass or the like having a thermal expansion coefficient of about 9 ppm / ° C. for condensing light transmitted from the optical fiber and a frame made of stainless steel are joined together. By joining an annular member having a Young's modulus of 17000 kg / mm 2 or less between the translucent window member and the frame using a brazing material such as silver brazing, the translucent window member and the frame are joined together. The stress due to the difference in thermal expansion generated between them can be sufficiently relaxed, and does not cause birefringence or cracks in the translucent window member, thereby improving the coupling efficiency between the optical element and light. In addition, the optical element can be housed in an airtight manner and operated normally and stably for a long period of time.
【0012】[0012]
【発明の実施の形態】次に、本発明を添付図面に基づき
詳細に説明する。Next, the present invention will be described in detail with reference to the accompanying drawings.
【0013】図1は本発明の光素子収納用パッケージの
実施の形態の一例を示す断面図であり、図2はその要部
拡大断面図である。これらの図において、1は基体、2
は枠体、3は環状部材、4は透光性窓部材、5は蓋体、
6は光素子である。この基体1と枠体2と環状部材3と
透光性窓部材4と蓋体5とで内部に光素子6を収容する
ための容器が構成される。FIG. 1 is a cross-sectional view showing an example of an embodiment of an optical element storage package according to the present invention, and FIG. 2 is an enlarged cross-sectional view of a main part thereof. In these figures, 1 is a substrate, 2
Is a frame, 3 is an annular member, 4 is a translucent window member, 5 is a lid,
6 is an optical element. The base 1, the frame 2, the annular member 3, the translucent window member 4, and the lid 5 constitute a container for housing the optical element 6 therein.
【0014】この基体1は光素子6を支持するための支
持部材として機能し、その上面の略中央部に光素子6を
載置するための載置部1aを有しており、この載置部1
aに光素子が錫−鉛半田などの接着剤により接着固定さ
れる。The base 1 functions as a support member for supporting the optical element 6, and has a mounting portion 1a for mounting the optical element 6 at a substantially central portion of the upper surface thereof. Part 1
An optical element is bonded and fixed to a by an adhesive such as tin-lead solder.
【0015】この基体1は、例えば熱膨張係数が約16p
pm/℃のニオブ酸リチウムから成る光素子6が上面に
接着固定されることになるので、光素子6と基体1との
間で、熱膨張差による応力が発生し光素子6が湾曲した
り剥がれたりするなどの問題が発生しないように、光素
子6の熱膨張係数に近似している金属材料、すなわち、
熱膨張係数が14〜19ppm/℃(室温〜400 ℃時)のス
テンレスから成るものとすることが好ましい。また、こ
のステンレスのなかでもニッケルを含有することで、よ
り耐蝕性が優れるオーステナイト系のステンレスから成
るものであることが好ましい。このようなステンレスと
しては、例えば熱膨張係数が約15ppm/℃(室温〜40
0 ℃時)のクロム25wt%−ニッケル20wt%−カーボ
ン0.06wt%−鉄(SUS310 S)や、熱膨張係数が約
18ppm/℃(室温〜400 ℃時)のクロム18wt%−ニ
ッケル10wt%−鉄(SUS304 )、さらには、熱膨張
係数が約17ppm/℃(室温〜400 ℃時)のクロム18w
t%−ニッケル12wt%−モリブデン2.5 wt%−カー
ボン0.06wt%−鉄(SUS316 )などを好適に使用し
うる。このようなステンレスから成る基体1は、例えば
SUS304 のステンレスのインゴットに圧延加工法や打
ち抜き加工法などの従来周知の金属加工法を施すことに
よって製作される。The substrate 1 has, for example, a thermal expansion coefficient of about 16p.
Since the optical element 6 made of lithium niobate at pm / ° C. is adhered and fixed to the upper surface, stress due to a difference in thermal expansion occurs between the optical element 6 and the base 1, and the optical element 6 may be bent. In order not to cause a problem such as peeling or the like, a metal material that is close to the coefficient of thermal expansion of the optical element 6, that is,
It is preferably made of stainless steel having a coefficient of thermal expansion of 14 to 19 ppm / ° C (at room temperature to 400 ° C). Further, it is preferable that the stainless steel is made of austenitic stainless steel having more excellent corrosion resistance by containing nickel. Such a stainless steel has, for example, a thermal expansion coefficient of about 15 ppm / ° C. (room temperature to 40 ° C.).
(At 0 ° C) chromium 25 wt%-nickel 20 wt%-carbon 0.06 wt%-iron (SUS310S)
18 wt% chromium at 18 ppm / ° C. (at room temperature to 400 ° C.) — 10 wt% nickel—iron (SUS304), and 18 watts of chromium at a thermal expansion coefficient of about 17 ppm / ° C.
t% -nickel 12 wt% -molybdenum 2.5 wt% -carbon 0.06 wt% -iron (SUS316) can be suitably used. The base 1 made of stainless steel is manufactured by subjecting a stainless steel ingot of SUS304 to a conventionally known metal working method such as a rolling method or a punching method.
【0016】なお、この基体1はその外表面に耐蝕性に
優れ、かつロウ材に対して濡れ性が良い金属、具体的に
は厚さ2〜6μmのニッケル層と厚さ0.5 〜5μmの金
層を順次、メッキ法により被着させておくと、基体1が
酸化腐蝕するのを有効に防止することができるとともに
基体1上面に光素子6を強固に接着固定させることがで
きる。したがって、この基体1は酸化腐蝕を有効に防止
し、かつ光素子6を強固に接着固定させる場合には、そ
の外表面に厚さ2〜6μmのニッケル層と厚さ0.5 〜5
μmの金層を順次、メッキ法により被着させておくこと
が好ましい。The substrate 1 has a metal having excellent corrosion resistance on its outer surface and good wettability to a brazing material, specifically, a nickel layer having a thickness of 2 to 6 μm and a gold layer having a thickness of 0.5 to 5 μm. If the layers are sequentially applied by plating, the substrate 1 can be effectively prevented from being oxidized and corroded, and the optical element 6 can be firmly adhered and fixed to the upper surface of the substrate 1. Therefore, when the substrate 1 effectively prevents oxidative corrosion and firmly adheres and fixes the optical element 6, a nickel layer having a thickness of 2 to 6 μm and a thickness of 0.5 to 5 μm are formed on the outer surface thereof.
It is preferable that a gold layer of μm is sequentially applied by a plating method.
【0017】また、この基体1は光素子6が載置される
載置部1aの周辺に基体1を貫通する複数個の外部リー
ド端子7がガラスなどの絶縁部材8を介して固定されて
いる。The base 1 has a plurality of external lead terminals 7 penetrating the base 1 fixed around a mounting portion 1a on which the optical element 6 is mounted via an insulating member 8 such as glass. .
【0018】この外部リード端子7は光素子6の各電極
を外部の電気回路に電気的に接続する機能を有し、その
一端に光素子6の電極がボンディングワイヤ11を介して
接続され、また他端側は外部電気回路に半田などの低温
ロウ材を介して接続される。The external lead terminal 7 has a function of electrically connecting each electrode of the optical element 6 to an external electric circuit. One end of the external lead terminal 7 is connected to the electrode of the optical element 6 via a bonding wire 11. The other end is connected to an external electric circuit via a low-temperature brazing material such as solder.
【0019】この外部リード端子7は、例えば鉄−ニッ
ケル−コバルト合金や鉄−ニッケル合金などの金属材料
から成り、基体1への固定は、基体1に外部リード端子
7より若干大きな径の孔をあけておき、この孔にリング
状のガラスから成る絶縁部材8と外部リード端子7を挿
通させ、しかる後、このガラスから成る絶縁部材8を加
熱溶融させることによって行なわれる。The external lead terminal 7 is made of a metal material such as an iron-nickel-cobalt alloy or an iron-nickel alloy, and is fixed to the base 1 by forming a hole having a diameter slightly larger than that of the external lead terminal 7 in the base 1. In this case, the ring-shaped insulating member 8 made of glass and the external lead terminal 7 are inserted through the hole, and then the insulating member 8 made of glass is heated and melted.
【0020】なお、この外部リード端子7はその表面に
ニッケルメッキ層、金メッキ層などの耐蝕性に優れ、か
つロウ材と濡れ性の良いメッキ金属層を1.0 μm〜20μ
mの厚みに被着させておくと外部リード端子7の酸化腐
蝕が有効に防止されるとともに外部リード端子7とボン
ディングワイヤ11との接続を強固なものとなすことが
できる。したがって、外部リード端子7はその表面にニ
ッケルメッキ層、金メッキ層などの耐蝕性に優れ、かつ
ロウ材と濡れ性が良いメッキ金属層を1.0 μm〜20μm
の厚みに被着させておくことが好ましい。The external lead terminal 7 is provided with a plating metal layer having excellent corrosion resistance such as a nickel plating layer and a gold plating layer on its surface and having good wettability with a brazing material in a range of 1.0 μm to 20 μm.
If it is applied to a thickness of m, oxidation corrosion of the external lead terminal 7 can be effectively prevented and the connection between the external lead terminal 7 and the bonding wire 11 can be made strong. Therefore, the external lead terminal 7 is provided with a plating metal layer having excellent corrosion resistance such as a nickel plating layer and a gold plating layer on its surface and having good wettability with a brazing material in an amount of 1.0 μm to 20 μm.
It is preferable that the film is adhered to a thickness of 10 mm.
【0021】また、基体1の上面には光素子6が載置さ
れる載置部1aを囲繞するようにして枠体2が接合され
ており、この枠体2の内側に光素子6を収容するための
空所が形成されている。A frame 2 is joined to the upper surface of the base 1 so as to surround the mounting section 1a on which the optical element 6 is mounted. The optical element 6 is housed inside the frame 2. A space is formed to allow for
【0022】この枠体2は、基体1との熱膨張差による
応力を有効に防止して基体1に強固に接合することがで
き、かつ耐蝕性があるように、基体1と同様に熱膨張係
数が14〜19ppm/℃(室温〜400 ℃時)のオーステナ
イト系ステンレスから成るものであることが好ましい。
このようなステンレスから成る枠体2は、例えば基体1
と同一組成のステンレスのインゴットをプレス加工によ
り枠状とすることによって形成され、基体1への取着は
基体1上面と枠体2の下面とを銀ロウなどのロウ材を介
しロウ付けすることによって行なわれる。The frame 2 can be effectively bonded to the base 1 by effectively preventing stress due to a difference in thermal expansion from the base 1, and has a thermal expansion similar to that of the base 1 so as to have corrosion resistance. It is preferably made of austenitic stainless steel having a coefficient of 14 to 19 ppm / ° C (at room temperature to 400 ° C).
The frame 2 made of stainless steel is, for example, a base 1
It is formed by pressing a stainless steel ingot having the same composition as that of the above into a frame shape by press working. The attachment to the base 1 is performed by brazing the upper surface of the base 1 and the lower surface of the frame 2 through a brazing material such as silver brazing. Done by
【0023】また、枠体2の側部に貫通孔2aが形成さ
れている。この貫通孔2aは、外部で励起した光が光フ
ァイバ9を伝わり透光性窓部材4で集光された後に内部
に収容されている光素子6に伝達させるための伝達孔と
して機能し、枠体2の側部に従来周知のドリル孔あけ加
工を施すことなどによって所定形状に形成される。A through hole 2a is formed in the side of the frame 2. The through-hole 2a functions as a transmission hole for transmitting light excited outside to the optical element 9 housed therein after being transmitted through the optical fiber 9 and condensed by the translucent window member 4. The body 2 is formed into a predetermined shape by performing a conventionally known drilling process on the side portion.
【0024】さらに、この貫通孔2a周辺の内表面には
円形環状や方形環状などの環状部材3がロウ材により取
着され、さらに、この環状部材3に透光性窓部材4がロ
ウ材により取着されている。Further, an annular member 3 such as a circular ring or a square ring is attached to the inner surface around the through hole 2a with a brazing material, and the translucent window member 4 is further attached to the annular member 3 with a brazing material. Has been attached.
【0025】なお、この環状部材3は、図3に要部拡大
断面図で示すように、貫通孔2a周辺の外表面にロウ材
により取着されていても良い。この例の場合には、環状
部材3の枠体2への取着、および透光性窓部材4の環状
部材3への取着がパッケージ外部からの取着であるため
非常に容易であり、パッケージ内部を気密に収容するた
めのロウ付けが安定してできるものとなる。また、図3
に示すように枠体2の貫通孔2a周辺の外表面に凹部を
形成してその内部に、環状部材3を介して取着した透光
性窓部材4を収容するようにした場合には、枠体2の凹
部が透光性窓部材4を支持するので透光性窓部材4は極
端な位置ずれを起こすようなことはなく、光ファイバ9
から透光性窓部材4への光の良好な伝達を確保すること
ができる。The annular member 3 may be attached to the outer surface around the through hole 2a with a brazing material, as shown in an enlarged sectional view of a main part in FIG. In the case of this example, the attachment of the annular member 3 to the frame 2 and the attachment of the translucent window member 4 to the annular member 3 are very easy because they are attached from outside the package. The brazing for accommodating the inside of the package in an airtight manner can be stably performed. FIG.
When a recess is formed in the outer surface around the through hole 2a of the frame body 2 as shown in (1) and the translucent window member 4 attached via the annular member 3 is accommodated therein, Since the concave portion of the frame 2 supports the translucent window member 4, the translucent window member 4 does not cause extreme displacement, and the optical fiber 9
Good transmission of light from the light transmitting member to the translucent window member 4 can be secured.
【0026】また、透光性窓部材4はパッケージ外部に
突出することなく枠体2の凹部に完全に収容されるの
で、パッケージの小型化が可能なものとなる。Further, since the translucent window member 4 is completely accommodated in the concave portion of the frame 2 without protruding outside the package, the package can be reduced in size.
【0027】この環状部材3は、枠体2と透光性窓部材
4との間で熱膨張差によって発生する応力を緩和させる
とともに、パッケージ内部を気密にするために17000 k
g/mm2 以下のヤング率を有する金属材料、具体的に
は鉄−ニッケル−コバルト合金や鉄−ニッケル合金など
の金属材料から成り、例えばニッケル29wt%−コバル
ト17wt%−マンガン0.5 wt%以下−シリコン0.2 w
t%以下−カーボン0.06wt%−鉄合金や鉄50wt%−
ニッケル50wt%合金のインゴットをプレス加工により
円形環状や方形環状などに成形することによって形成さ
れる。The annular member 3 relieves the stress generated due to the difference in thermal expansion between the frame 2 and the light-transmitting window member 4 and, at the same time, prevents the inside of the package from leaking at 17,000 k.
g / mm 2 or less, specifically, a metal material such as an iron-nickel-cobalt alloy or an iron-nickel alloy, for example, nickel 29 wt% -cobalt 17 wt% -manganese 0.5 wt% or less- Silicon 0.2 w
t% or less-Carbon 0.06wt%-Iron alloy and iron 50wt%-
It is formed by forming an ingot of a nickel 50 wt% alloy into a circular ring or a rectangular ring by pressing.
【0028】なお、環状部材3のヤング率が13500 kg
/mm2 未満の金属材料の場合には、パッケージ内部を
気密にすることが困難になる傾向がある。具体的には、
熱膨張係数が大きくなりすぎて枠体2と透光性窓部材4
との良好な接合ができにくくなる傾向があり、また、極
端に変形が大きくなって高精度に透光性窓部材4を接合
しにくくなる傾向もある。他方、逆にヤング率が17000
kg/mm2 を超える金属材料の場合には、枠体2と透
光性窓部材4との熱膨張差による応力を十分に緩和でき
なくなる傾向がある。The Young's modulus of the annular member 3 is 13500 kg.
In the case of a metal material of less than / mm 2 , it tends to be difficult to make the inside of the package airtight. In particular,
The frame 2 and the translucent window member 4 have too large thermal expansion coefficients.
There is a tendency that it is difficult to form a good bond with the transparent window member 4, and it is difficult to bond the translucent window member 4 with high precision due to extremely large deformation. On the other hand, the Young's modulus
In the case of a metal material exceeding kg / mm 2 , there is a tendency that the stress due to the difference in thermal expansion between the frame 2 and the translucent window member 4 cannot be sufficiently reduced.
【0029】また、この環状部材3は透光性窓部材4を
枠体2に固定する際の下地固定部材として機能するとと
もに枠体2と透光性窓部材4との間で発生する熱膨張差
による応力を吸収し緩和させる作用をなし、その一主面
側は枠体2の貫通孔2a周辺の外表面もしくは内表面に
銀ロウなどのロウ材を介して取着され、また他主面側に
は透光性窓部材4の外周部に予め被着されている金属膜
10に金−錫合金などのロウ材を介して取着される。The annular member 3 functions as a base fixing member for fixing the translucent window member 4 to the frame 2 and also has a thermal expansion generated between the frame 2 and the translucent window member 4. One principal surface side is attached to the outer surface or inner surface around the through hole 2a of the frame 2 via a brazing material such as silver brazing, and the other principal surface is provided. On the side, a metal film previously attached to the outer peripheral portion of the translucent window member 4
10 is attached via a brazing material such as a gold-tin alloy.
【0030】透光性窓部材4は熱膨張係数が4〜12pp
m/℃(室温〜400 ℃時)のサファイアや非晶質ガラス
などから成り、外部で励起した光が光ファイバ9を伝わ
って容器の内部に伝達された際の集光用部材として作用
するとともにこの集光された光を光素子6に伝達する作
用をなす。例えば結晶軸の存在しない非晶質ガラスの場
合であれば、酸化珪素、酸化鉛を主成分とした鉛系およ
びホウ酸、ケイ砂を主成分としたホウケイ酸系のものを
用いる。The translucent window member 4 has a thermal expansion coefficient of 4 to 12 pp.
It is made of sapphire or amorphous glass at m / ° C. (at room temperature to 400 ° C.), and acts as a light condensing member when light excited outside is transmitted through the optical fiber 9 to the inside of the container. The collected light is transmitted to the optical element 6. For example, in the case of an amorphous glass having no crystal axis, a lead-based material containing silicon oxide and lead oxide as main components and a borosilicate-based material containing boric acid and silica sand as main components are used.
【0031】また、この透光性窓部材4は、その熱膨張
係数が枠体2のそれと異なっていても環状部材3が熱膨
張差による応力を吸収し緩和するので、結晶軸が応力の
ために、ある方向に揃うことによって光の屈折率の変化
を起こすようなことはない。Further, even if the translucent window member 4 has a different thermal expansion coefficient from that of the frame 2, the annular member 3 absorbs and relaxes the stress due to the difference in thermal expansion, so that the crystal axis has a stress due to the stress. In addition, it does not cause a change in the refractive index of light by aligning in a certain direction.
【0032】そのため、外部で励起し光ファイバ9を伝
わって透光性窓部材4で集光された光は複屈折を起こす
ことはなく光素子6に伝達されることとなり、光素子6
と光との結合効率を高いものとなすことができる。Therefore, the light that is excited outside and propagates through the optical fiber 9 and is condensed by the translucent window member 4 is transmitted to the optical element 6 without causing birefringence.
The coupling efficiency between light and light can be increased.
【0033】この透光性窓部材4の環状部材3への取着
は、図4に示すように、例えば透光性窓部材4の外周部
に予め金属膜10を被着させておき、この金属膜10と環状
部材3とを金−錫合金などのロウ材を介しロウ付けする
ことによって行なわれる。この場合、透光性窓部材4の
環状部材3への取着が金−錫合金などによるロウ付けに
より行なわれることから取着の信頼性が高いものとな
り、これによって環状部材3と透光性窓部材4との取着
部における光素子6を収容する容器の気密封止が完全な
ものとなり、容器内部に収容する光素子6を長期間にわ
たり正常かつ安定に作動させることができる。As shown in FIG. 4, the light transmitting window member 4 is attached to the annular member 3 by, for example, previously attaching a metal film 10 to the outer periphery of the light transmitting window member 4. This is performed by brazing the metal film 10 and the annular member 3 via a brazing material such as a gold-tin alloy. In this case, since the attachment of the translucent window member 4 to the annular member 3 is performed by brazing with a gold-tin alloy or the like, the attachment is highly reliable. Airtight sealing of the container accommodating the optical element 6 at the attachment portion with the window member 4 is completed, and the optical element 6 accommodated in the container can be normally and stably operated for a long period of time.
【0034】さらに、枠体2はその上面に、例えば鉄−
ニッケル−コバルト合金や鉄−ニッケル合金などの金属
材料から成る蓋体5が接合され、これによって基体1と
枠体2と環状部材3と透光性窓部材4と蓋体5とから成
る容器の内部に光素子6を気密に封止することができ
る。Further, the frame 2 is provided on its upper surface with, for example, iron-
A lid 5 made of a metal material such as a nickel-cobalt alloy or an iron-nickel alloy is joined, thereby forming a container comprising the base 1, the frame 2, the annular member 3, the light transmitting window member 4, and the lid 5. The optical element 6 can be hermetically sealed inside.
【0035】この蓋体5の枠体2上面への接合は、例え
ばシームウェルド法などの溶接によって行なわれる。The joining of the lid 5 to the upper surface of the frame 2 is performed by, for example, welding such as a seam welding method.
【0036】かくして本発明の光素子収納用パッケージ
によれば、基体1の光素子載置部1aにニオブ酸リチウ
ムから成る光素子6を載置固定するとともに光素子6の
各電極をボンディングワイヤ11を介して外部リード端
子7に電気的に接続し、次に側部外表面もしくは側部内
表面で、この側部に設けた貫通孔2aの周辺に環状部材
3の一主面側が銀ロウなどのロウ材を介して取着され他
主面側には透光性窓部材4の外周部に予め被着されてい
る金属膜10が金−錫合金などのロウ材を介して取着され
るような側部の構造を有する枠体2の上面に蓋体5を接
合させ、基体1と枠体2と環状部材3と透光性窓部材4
と蓋体5とから成る容器内部に光素子6を収容し、最後
に枠体2の側部に光ファイバ9を取着接続させることに
よって最終製品としての光素子装置となる。そして、外
部で励起した光は光ファイバ9を伝わって非晶質ガラス
などから成る透光性窓部材4で集光された後に光素子6
に伝達されることによって高速光通信などに使用され
る。Thus, according to the optical element housing package of the present invention, the optical element 6 made of lithium niobate is mounted and fixed on the optical element mounting section 1a of the base 1, and each electrode of the optical element 6 is bonded to the bonding wire 11 Is electrically connected to the external lead terminal 7 through the outer peripheral surface of the annular member 3 on the outer surface of the side portion or the inner surface of the side portion around the through hole 2a provided on the side portion. On the other main surface side, a metal film 10 attached to the outer peripheral portion of the translucent window member 4 in advance via a brazing material is attached via a brazing material such as a gold-tin alloy. The lid 5 is bonded to the upper surface of the frame 2 having a structure of a side portion, and the base 1, the frame 2, the annular member 3, and the light-transmitting window member 4
The optical element 6 is accommodated in a container composed of the lid 5 and the optical element 6, and finally, the optical fiber 9 is attached and connected to the side of the frame 2, thereby forming an optical element device as a final product. The light excited outside propagates through the optical fiber 9 and is condensed by the translucent window member 4 made of amorphous glass or the like.
It is used for high-speed optical communication etc. by being transmitted to.
【0037】[0037]
【発明の効果】本発明の光素子収納用パッケージによれ
ば、ニオブ酸リチウムから成る光素子を収容するための
パッケージ構造として、基体および枠体を、熱膨張係数
が14〜19ppm/℃のオーステナイト系ステンレスから
成るものとしたことから、熱膨張係数が約16ppm/℃
のニオブ酸リチウムから成る光素子と基体との間、なら
びに基体と枠体との間で熱膨張差による応力がほとんど
発生しないので、基体や光素子が湾曲するなどの問題が
発生しない。その結果、光素子の光の高速変調特性の劣
化を有効に防止することができるとともに基体と枠体の
接合を強固となすことができる。According to the optical device housing package of the present invention, as the package structure for housing the optical device made of lithium niobate, the base and the frame are made of austenite having a thermal expansion coefficient of 14 to 19 ppm / ° C. The thermal expansion coefficient is about 16ppm / ℃
Almost no stress due to the difference in thermal expansion occurs between the optical element made of lithium niobate and the base and between the base and the frame, so that problems such as bending of the base and the optical element do not occur. As a result, it is possible to effectively prevent deterioration of the high-speed modulation characteristic of light of the optical element, and it is possible to firmly join the base and the frame.
【0038】また、光ファイバから伝達される光を集光
するための熱膨張係数が約9ppm/℃の非晶質ガラス
などから成る透光性窓部材とステンレスから成る枠体と
の接合は、ヤング率が17000 kg/mm2 以下の環状部
材を透光性窓部材と枠体との間に介して銀ロウなどのロ
ウ材を用いて接合することにより、透光性窓部材と枠体
との間で発生した熱膨張差による応力を十分に緩和させ
ることができ、透光性窓部材に複屈折を起こさせたりク
ラックを発生させることがなく、光素子と光との結合効
率を良好なものと成すことができるとともに光素子を気
密に収容し長期間にわたり正常かつ安定に作動させるこ
とができる。In addition, a light transmitting window member made of amorphous glass or the like having a thermal expansion coefficient of about 9 ppm / ° C. for condensing light transmitted from an optical fiber and a frame made of stainless steel are joined together. By joining an annular member having a Young's modulus of 17000 kg / mm 2 or less between the translucent window member and the frame using a brazing material such as silver brazing, the translucent window member and the frame are joined together. The stress due to the difference in thermal expansion generated between them can be sufficiently relaxed, and does not cause birefringence or cracks in the translucent window member, thereby improving the coupling efficiency between the optical element and light. In addition, the optical element can be housed in an airtight manner and operated normally and stably for a long period of time.
【図1】本発明の光素子収納用パッケージの実施の形態
の一例を示す断面図である。FIG. 1 is a cross-sectional view illustrating an example of an embodiment of an optical element storage package according to the present invention.
【図2】図1に示す光素子収納用パッケージの要部拡大
断面図である。FIG. 2 is an enlarged sectional view of a main part of the optical element housing package shown in FIG.
【図3】図2に示した環状部材と透光性窓部材が枠体の
側部外表面に取着された例の要部拡大断面図である。FIG. 3 is an enlarged sectional view of a main part of an example in which the annular member and the translucent window member shown in FIG. 2 are attached to a side outer surface of a frame body.
【図4】透光性窓部材へ金属膜を被着させた一例を示す
要部拡大断面図である。FIG. 4 is an enlarged sectional view of a main part showing an example in which a metal film is applied to a light transmitting window member.
1・・・・基体 1a・・載置部 2・・・・枠体 2a・・貫通孔 3・・・・環状部材 4・・・・透光性窓部材 5・・・・蓋体 6・・・・光素子 DESCRIPTION OF SYMBOLS 1 ... Base 1a ... Placement part 2 ... Frame 2a ... Through-hole 3 ... Annular member 4 ... Translucent window member 5 ... Lid 6 ... ... Optical elements
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01L 23/06 H01L 23/06 B 31/0232 33/00 M 33/00 31/02 C ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification code FI Theme coat ゛ (Reference) H01L 23/06 H01L 23/06 B 31/0232 33/00 M 33/00 31/02 C
Claims (3)
が載置される載置部を有する基体と、該基体上に前記光
素子を囲繞するように取着され側部に貫通孔を有する枠
体と、該枠体に取着され前記貫通孔を塞ぐ透光性窓部材
と、前記枠体の上面に取着され前記光素子を気密に封止
する蓋体とから成る光素子収納用パッケージであって、
前記基体および前記枠体がステンレスから成り、かつ前
記透光性窓部材が17000kg/mm2 以下のヤング
率を有する環状部材を介して前記枠体に取着されている
ことを特徴とする光素子収納用パッケージ。1. A base having a mounting portion on which an optical element made of lithium niobate is mounted on a top surface, and a frame mounted on the base so as to surround the optical element and having a through hole on a side portion. An optical element housing package comprising a body, a translucent window member attached to the frame body to close the through hole, and a lid attached to the upper surface of the frame body to hermetically seal the optical element. And
The optical element, wherein the base and the frame are made of stainless steel, and the translucent window member is attached to the frame via an annular member having a Young's modulus of 17000 kg / mm 2 or less. Package for storage.
19ppm/℃のオーステナイト系ステンレスから成る
ことを特徴とする請求項1記載の光素子収納用パッケー
ジ。2. The stainless steel has a coefficient of thermal expansion of 14 to 14.
2. The package for housing an optical element according to claim 1, wherein the package is made of austenitic stainless steel at 19 ppm / .degree.
鉄−ニッケル−コバルト合金から成ることを特徴とする
請求項1記載の光素子収納用パッケージ。3. The package for housing an optical element according to claim 1, wherein the annular member is made of an iron-nickel alloy or an iron-nickel-cobalt alloy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24263899A JP2001068691A (en) | 1999-08-30 | 1999-08-30 | Package for housing optical element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24263899A JP2001068691A (en) | 1999-08-30 | 1999-08-30 | Package for housing optical element |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001068691A true JP2001068691A (en) | 2001-03-16 |
Family
ID=17092037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP24263899A Pending JP2001068691A (en) | 1999-08-30 | 1999-08-30 | Package for housing optical element |
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JP2006053189A (en) * | 2004-08-09 | 2006-02-23 | Sumitomo Osaka Cement Co Ltd | Optical modulation element module |
US7015558B2 (en) * | 2001-08-06 | 2006-03-21 | Yamaha Corporation | Optical device free from stress due to difference in thermal expansion coefficient between parts and process for fabrication thereof |
JP2010135615A (en) * | 2008-12-05 | 2010-06-17 | Nec Schott Components Corp | Airtight terminal for outdoor electronic apparatus, and method of manufacturing the same |
JP2014215455A (en) * | 2013-04-25 | 2014-11-17 | 京セラ株式会社 | Package for accommodating optical semiconductor element and mounting structure provided therewith |
JP2016173429A (en) * | 2015-03-17 | 2016-09-29 | 日本電信電話株式会社 | Wavelength conversion element |
WO2017122413A1 (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Optical device and method for manufacturing optical device |
CN110320613A (en) * | 2018-03-30 | 2019-10-11 | 住友大阪水泥股份有限公司 | Optical module |
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1999
- 1999-08-30 JP JP24263899A patent/JP2001068691A/en active Pending
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JP4563107B2 (en) * | 2004-08-09 | 2010-10-13 | 住友大阪セメント株式会社 | Light modulation element module |
JP2006053189A (en) * | 2004-08-09 | 2006-02-23 | Sumitomo Osaka Cement Co Ltd | Optical modulation element module |
JP2010135615A (en) * | 2008-12-05 | 2010-06-17 | Nec Schott Components Corp | Airtight terminal for outdoor electronic apparatus, and method of manufacturing the same |
JP2014215455A (en) * | 2013-04-25 | 2014-11-17 | 京セラ株式会社 | Package for accommodating optical semiconductor element and mounting structure provided therewith |
JP2016173429A (en) * | 2015-03-17 | 2016-09-29 | 日本電信電話株式会社 | Wavelength conversion element |
US10554012B2 (en) | 2015-04-24 | 2020-02-04 | Kyocera Corporation | Optical element mounting package, electronic device, and electronic module |
WO2017122413A1 (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Optical device and method for manufacturing optical device |
US10254537B2 (en) | 2016-01-14 | 2019-04-09 | Fujikura Ltd. | Optical device and method of producing same |
JP2017126673A (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Optical device and manufacturing method of optical device |
CN110320613A (en) * | 2018-03-30 | 2019-10-11 | 住友大阪水泥股份有限公司 | Optical module |
JP2019179067A (en) * | 2018-03-30 | 2019-10-17 | 住友大阪セメント株式会社 | Optical module |
JP7102860B2 (en) | 2018-03-30 | 2022-07-20 | 住友大阪セメント株式会社 | Optical module |
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