JP2001068049A - Holder device and specimen stage where the holder device is installed - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a holder device causing a plurality of specimen holders installed in a holder support member on a specimen stage to rotate round the respective axes of specimen holders. SOLUTION: A holder device is equipped with a holder support member 2, having a part to be mounted 3 to be removably mounted in a holder device mounting part 33 provided on a specimen stage 31 having an X-Y table 32 and a transport rod coupling part 4a to be coupled with a holder device transport rod, a plurality of specimen holders 11-1 thru 11-4 supported rotatably by the holder supporting member 2, a holder rotation drive device to rotate the holders 11-1 thru 11-4, a holder side connector 24 to be connected with or separated from a stage side connector 34, when the part mounted 3 is mounted in the holder device mounting part 33, and a connection member 24a for supplying power for rotation from the holder side connector 24 to the holder rotation drive device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a holder device for supporting a plurality of sample holders and a sample stage on which the holder devices are mounted, and more particularly, to a holder device for rotatably supporting the plurality of sample holders and the holder device. The present invention relates to a sample stage on which a holder device is mounted.

[0002]

2. Description of the Related Art FIG. 9 is an explanatory view of a conventional example of a sample holder used in a scanning electron microscope or the like. In FIG. 9, a sample holder H is detachably mounted on a sample stage 01. The sample stage 01 is composed of an XY table and a rotary table (not shown). The sample holder H has a sample mounting portion H1, and a sample holding member 02 holding a sample S is removably mounted on the sample mounting portion H1 and fixed with screws 03. Sample S
The sample S is rotated around the optical axis of the electron beam B while irradiating the sample with the electron beam B to perform observation, microanalysis, and the like.

In the conventional sample holder shown in FIG. 9, only one sample S can be mounted. Therefore, when observing another sample, the sample must be replaced every time, and it takes time, so that the workability is low. There is a problem that it is bad.

[0004]

In order to solve the above-mentioned problem, it is conceivable to use a sample holder on which a plurality of samples can be mounted. FIG. 10 is an explanatory view of a conventional sample holder having a plurality of sample mounting portions. FIG. 10A is a plan view of the sample holder, and FIG. 10B is a cross-sectional view taken along the line XB-XB of FIG. 10A. In FIG. 10, the sample holder H is a sample stage 01
Removably mounted on top. The sample stage 0
Reference numeral 1 denotes an XY table and a rotary table (not shown). The sample holder H has a plurality of sample mounting portions H1, and a sample holding member 02 (see FIG. 10B) holding a sample S is detachably mounted on each of the sample mounting portions H1, and is fixed by screws 03. You.

While irradiating one of the plurality of samples S with the electron beam B, the sample S is rotated around the optical axis of the electron beam B (hereinafter referred to as “around the beam axis”) and observed. In some cases, microanalysis work or the like is performed. In this case, in the conventional sample holder shown in FIG. 10, since the rotation centers of the plurality of samples S and the rotation table (not shown) of the sample stage 01 are different, the sample S
When the is rotated about the beam axis, the sample position moves. For this reason, when observing the sample S while rotating it around the beam axis, the position of the sample must be adjusted by moving the XY table (not shown) of the sample stage 01, and the operability is extremely poor. There is a problem. When the sample S is rotated around the beam axis for observation, the farther the beam irradiation position of the sample S is from the center of rotation of the sample stage 01, the more the observation position of the sample S moves when the sample stage 01 rotates. It takes a considerable amount of time to find the observation position. In addition, there are cases where it cannot be found.

The present invention has been made in view of the circumstances described above, and has as its object the following contents. (O01) Rotating the plurality of sample holders mounted on the holder support member on the sample stage around the center line of each sample holder.

[0007]

Means for Solving the Problems Next, the present invention which has solved the above-mentioned problems will be described. Reference numerals of corresponding components of the embodiment described later. The reason why the present invention is described in correspondence with the reference numerals of the components of the embodiments described later is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(1st invention) In order to solve the aforementioned problem,
The holder device according to the first invention has the following requirements (A01) to (A05): (A01) a holder device mounting portion provided on a sample stage (31) having an XY table (32). (A02) The holder support member (2) having a mounting portion (3) detachably mounted on the holder device 33) and a transport rod connecting portion (4a) connected to the holder device transport rod. 2) a plurality of sample holders (11-1 to 11-4, 11, 45, 4) rotatably supported by
7), (A03) each of the plurality of sample holders (11-1 to 11-4, 1-4) supported by the holder support member (2);
(D1 + M1), (A04) the mounting portion (3) of the holder supporting member (2) conveyed along the upper surface of the sample stage (31). When detachably mounted on the holder device mounting portion (33) of the sample stage (31), it is connected to the stage side connector (34) of the sample stage (31), and the holder device mounting portion (33) When the mounted part (3) is detached, the stage-side connector (3
4) Holder side connector (24) detached from (4), (A05)
A power supply connection member (24a) capable of supplying power for rotational drive from the holder-side connector (24) to the holder rotational drive device (D1 + M1);

(Operation of the First Invention)
In the holder device of the invention, the holder supporting member (2) has the transport rod connecting portion (4a), and is transported to the sample stage (31) by the holder device transport rod connected to the transport rod connecting portion (4a). The mounting portion (3) of the holder support member (2) conveyed along the upper surface of the sample stage (31) is detachably mounted on the holder device mounting portion (33) of the sample stage (31). The holder-side connector (24) of the holder supporting member (2) is connected to the holder (3) of the sample stage (31) when the mounted portion (3) of the holder supporting member (2) is mounted. The holder is connected to a stage-side connector (34) of the sample stage (31), and is detached from the stage-side connector (34) when the attached part (3) is detached from the holder device attaching part (33). Power for rotation driving is supplied from the holder-side connector (24) connected to the stage-side connector (34) to the holder rotation drive device (D1 + M1) via the power supply connection member (24a). The holder rotation driving device (D1 + M1) rotationally drives a plurality of sample holders (11-1 to 11-4, 11, 45, and 47) rotatably supported by the holder support member (2). Therefore, the sample holder (11-1)
To the sample holders (11-1 to 11-4, 11, 4) while holding the sample (S) on the sample holders (11-1 to 11, 4, 45, 47).
5, 47), the sample holders (11-1 to 11-1) are rotated.
11-4, 11, 45, 47), the position of the sample (S) located on the rotation center line does not move, and the sample holder (1) does not move.
The positions of the sample (S) portions adjacent to the rotation center lines of 1-1 to 11-4, 11, 45, and 47) have small movement amounts. For this reason, the sample holders (11-1 to 11-4, 11, 4)
5, 47), when the charged particle beam (B) is irradiated on the sample (S) located on the rotation center line and an adjacent position thereof for observation, the sample holder (11-1 to 11-4, 11, 4) is used.
5, 47) does not lose sight of the observation position of the sample (S). In addition, a plurality of sample holders (11-1 to 11-1)
11-4, 11, 45, 47) The sample (S) portion at the rotation center can be sequentially moved to the irradiation position of the charged particle beam (B) by the XY table (32). Therefore, a plurality of sample holders (11-1 to 11-1)
-4, 11, 45, and 47) can be sequentially and continuously observed.

(Second Invention) A sample stage according to a second invention comprises:
It is characterized by having the following requirements (B01) to (B05). (B01) A plurality of sample holders (11-1 to 11-4, 1
1, 45, 47), a holder device mounting portion (33) to which a mounted portion (3) provided on a holder supporting member (2) rotatably supporting and a holder side connector (24) are removably mounted. And a movable XY table (32) in the XY plane provided with the stage-side connector (34) on the upper surface, and (B02) the XY table (32) on which the holder support member (2) is mounted is positioned in the XY plane. And the charged particle beam emitted from the beam irradiation device (B)
At a beam irradiation position where the sample (S) is irradiated,
The plurality of sample holders (11-1 to 11-4, 11,.
45, 47) of the predetermined sample holders (11-1 to 11-1).
XY table driving device (DX + DY) for moving the sample (S) held by any one of -4, 11, 45, and 47)
+ MX + MY), (B03) the plurality of sample holders (1
Identification information output means (C) for outputting the holder identification information set for 1-1 to 11-4, 11, 45, and 47);
1), (B04) The sample (S) held in the sample holder (any of 11-1 to 11-4, 11, 45, and 47) corresponding to the holder identification information was moved to the beam irradiation position. Target XY coordinate position output means (C2) for outputting the target XY coordinate position, which is the XY coordinate position of the XY table (32) at that time, according to the holder identification information, (B05)
The XY table driving device (DX + DY) moves the XY table (32) to the target XY coordinate position.
XY table control means (C3) for controlling the operation of (+ MX + MY).

(Operation of the Second Invention) The second invention having the above configuration
The sample stage of the invention has an XY table, and the XY table
Holder device mounting part (33) provided on the upper surface of the table
The stage-side connector (34) has a mounting portion (3) of the holder support member (2) and the holder-side connector (2).
4) is detachably mounted. Identification information output means (C
1) The plurality of sample holders (11-1 to 11-
4, 11, 45, 47) is output. Note that the output of the holder identification information is performed by the plurality of sample holders (11-1 to 11-4, 11, 4).
5, 47), or in response to an input on a user interface (a portion where input keys and the like for a user to perform input operations are arranged) (UI). Target XY coordinate position output means (C2)
Is a sample holder (11-) corresponding to the holder identification information.
1 to 11-4, 11, 45, and 47), the target XY being the XY coordinate position of the XY table (32) when the sample (S) held at the beam irradiation position is moved.
The coordinate position is output according to the holder identification information. X
The Y table control means (C3) controls the XY table (32) to move the XY table (32) to the target XY coordinate position.
The operation of the Y table driving device (DX + DY + MX + MY) is controlled. The sample stage (31) on which the holder support member (2) is mounted moves in the XY plane, and the plurality of sample holders (11-1 to 11-4, 11, 45,
47), when the predetermined sample holder (any one of 11-1 to 11-4) moves to a beam irradiation position that is a predetermined XY coordinate position at which beam irradiation is possible,
The predetermined sample holder (11-1 to 11-4, 11, 4)
5, 47) is irradiated with the charged particle beam (B). Therefore, the plurality of sample holders (1) rotatably supported by the holder support member (2).
Observation or analysis of each sample (S) held in 1-1 to 11-4, 11, 45, and 47) can be sequentially and continuously performed. Observation of the sample (S);
When performing analysis or the like, it is possible to rotate each of the samples (S).

[0012]

(Embodiment 1) Embodiment 1 of the present invention is directed to the second aspect of the present invention, in which the following requirements (B06) and
(B07). (B06) A plurality of sample holders (11-1 to 11-4, 1
1, 45, 47), one sample holder (11-1 to 11-1)
11-4, 11, 45, and 47), a user interface (UI) having a plurality of input members for a user input operation including a holder designation signal input member for designating a holder designation signal input member.
(B07) A sample holder (11-1) determined by a holder designation signal input from the user interface (UI)
(11-4, 11, 45, 47), the identification information output means (C1) for outputting the holder identification information set.

(Operation of the First Embodiment) In the first embodiment of the sample stage according to the second invention having the above-described configuration, the user (operator) is provided with a user interface having a plurality of input members for input operation by the user. By inputting the holder designation signal input member of (UI), one sample holder (a sample holder to be inspected / observed) among a plurality of sample holders (11-1 to 11-4, 11, 45, and 47) is input. ) (11-
1-11-4, 11, 45, or 47). The identification information output means (C1) is a sample holder (11-1 to 11-4, 11, 4) determined by holder identification information input from the user interface (UI).
5, 47) is output. The sample holder (one of 11-1 to 11-4) corresponding to the holder identification information moves to a beam irradiation position which is a predetermined XY coordinate position at which beam irradiation is possible.

[0014]

Next, examples (embodiments) of embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments. To facilitate understanding of the following description, in the drawings, the front-rear direction is the X-axis direction, the right-left direction is the Y-axis direction, and the up-down direction is the Z-axis direction. The directions indicated by Z, -Z or the sides indicated are forward, rearward, rightward, leftward, upward, downward,
Or, the front side, the rear side, the right side, the left side, the upper side, and the lower side.
Also, in the figure, those with “•” in “○” mean arrows pointing from the back of the paper to the front, and those with “x” in “○” indicate the arrow on the paper. From the back to the back.

(Embodiment 1) FIG. 1 is an overall explanatory view of a holder device according to Embodiment 1 of the present invention, FIG. 1A is a plan view of the holder device of Embodiment 1, and FIG. 1B is IB-IB of FIG. 1A. It is a line sectional view. FIG. 2 is an explanatory view of the holder device shown in FIG. 1, and FIG. 2A is a view seen from an arrow IIA in FIG.
FIG. 1B is a diagram viewed from the arrow IIB in FIG. 1A. FIG. 3 is a view showing a state before the holder device according to the first embodiment of the present invention is mounted on the sample stage 31. FIG. 3A is a plan view of FIG. 1A rotated 90 ° counterclockwise, and FIG. Is the aforementioned FIG.
FIG. 3A is a sectional view taken along line IIIB-IIIB of FIG. FIG. 4 is a view showing a state in which the holder device according to the first embodiment of the present invention is mounted on the sample stage 31. FIG. 4A is a diagram in which the holder device shown in FIG. FIG. 4B is a plan view showing a state where
It is a VB-IVB line sectional view.

1 and 2, the holder device 1 of the first embodiment has a holder supporting member 2. The holder support member 2 has a mounted portion 3 having a dovetail groove 3a formed on the lower surface, and a holder support plate 4 provided at an upper end of the mounted portion 3. The mounting portion 3 protrudes downward from the center of the holder support plate 4 in the left-right direction (Y-axis direction), and the dovetail groove 3a is formed to extend forward and backward (X-axis direction). In FIG. 2A, a transport rod connecting portion 4a formed by a female screw is provided at a front end (X end) of the holder support plate 4. The transport rod connecting portion 4a is a portion to which a male screw at the tip of the transport rod (not shown) is coupled, and the holder device 1 is transported by the transport rod (not shown).

In FIG. 1B, four holder support holes 4b are formed in the holder support plate 4 and three screw holes 4c (only one is shown in FIG. 3) are formed.
A motor mounting bracket 6 is fixed to the rear end (−X end) of the holder support plate 4 with four screws 7 (see FIG. 3). The motor 8 is attached to the motor mounting bracket 6.
The worm 9 is connected to the output shaft of the motor 8.

In FIG. 1B, the sample holders (11-1 to 1-1)
1-4) has a downwardly projecting shaft 11a rotatably mounted in the holder support hole 4b of the holder support plate 4, and a cylindrical portion 11b provided on the upper portion thereof. A gear 11c is integrally formed at the lower end of the outer peripheral surface of the cylindrical portion 11b, and a step portion 11d is formed at the outer peripheral surface of the cylindrical portion, and an upper portion of the step portion 11d is formed to have a smaller diameter than a lower portion. . A cylindrical sample mounting hole 11e is formed inside the cylindrical portion 11b, and a screw hole 11f for fixing a sample holding member H (see FIG. 1B) mounted in the sample mounting hole 11e is formed in the cylindrical portion 11b. Are formed. The gear 1 of each sample holder (11-1 to 11-4) rotatably supported by each of the four holder support holes 4b of the holder support plate 4.
1c are in mesh with each other, and when the rotational force is transmitted to the gear 11c of any one of the sample holders (any of 11-1 to 11-4), all the sample holders (11-1 to 1-1) are rotated.
1-4) rotates.

Three spacers 12 arranged corresponding to the three screw holes 4c on the upper surface of the holder support plate 4.
The retaining plate 13 supported at the upper end of the cylindrical portion 11b is formed with a through hole through which the upper portion of the cylindrical portion 11b penetrates, thereby preventing the large-diameter cylindrical portion 11b below the step portion 11d from coming out upward. . The retaining plate 13 is fixed by fixing screws 14 screwed into the screw holes 4c.

In FIGS. 1B and 2B, a plate-shaped transmission gear support member 16 is fixed to the lower surface of the right end of the holder support plate 4 by screws 17. The lower end of the shaft 18 is fixed to the transmission gear support member 16. On the shaft 18, a large-diameter gear 21 and a small-diameter gear 22, which are integrally connected by two screws 19, 19, are rotatably supported. The large-diameter gear 21 meshes with the worm 9, and the small-diameter gear 22 meshes with one of the four gears 11c. Therefore, when the motor 8 rotates, the other gear 11c rotates via the worm 9, the large-diameter gear 21, the small-diameter gear 22, and the gear 11c meshing with the small-diameter gear 22, so that all of the four sample holders ( 11-1 to 11-4) rotate.

A holder-side connector 24 is connected to the rear end (-X end) of the bracket 6, and the holder-side connector 24 has a plurality of rearwardly projecting terminals (power supply connection members).
24a. The holder device 1 is constituted by the elements indicated by the reference numerals 2 to 24. The sample stage 31 on which the holder device 1 is detachably mounted has an X
It has an XY table 32 movable in the Y plane, a holder device mounting portion 33 provided on the upper surface of the XY table 32, and a stage-side connector. Holder device mounting section 33
Has a shape in which the dovetail groove 3a is detachably fitted when the holder device 1 moves rearward (-X direction) along the upper surface of the XY table 32. The stage-side connector 34 (see FIG. 3B) has a plurality of terminal connection holes 34a into which the plurality of terminals 24a fit. The terminal connection hole 34a (see FIG. 4B) is positioned rearward (-X direction) in a state where the dovetail groove 3a is fitted to the holder device mounting portion 33.
Is automatically connected to the terminal 24a when the terminal 24a is moved.

FIG. 5 is a block diagram of the control unit according to the first embodiment of the present invention. In FIG. 5, the controller C stores an I / O (input / output interface) for inputting / outputting an external signal and adjusting an input / output signal level, and programs and data for performing necessary processing. ROM (read only memory), RAM for temporarily storing necessary data
(Random access memory), a CPU (Central Processing Unit) that performs processing according to the program stored in the ROM, and a computer having a clock oscillator and the like, and executes the program stored in the ROM. Thus, various functions can be realized.

(Signal Input Element Connected to Controller C) The controller C receives a signal from the next element of the user interface UI as a signal input element. UIa: Holder designation start key The holder designation start key UIa is a key that is input at the start of an operation for designating a sample holder (one of 11-1 to 11-4) to be moved to the beam irradiation position. UIb: Holder rotation angle input start key The holder rotation angle input start key UIb is used to input the rotation angle of the sample holder (one of 11-1 to 11-4) moving to the beam irradiation position at the start of the input operation. Is the key. UIc: input end key The input end key UIc is connected to the sample holder (11-1 to 11-).
4) or the sample holder (11-1 to 1-1)
1-4) are input when the input of the rotation angle is completed. UId: Numeric keypad The numeric keypad UId is used to specify a sample holder (any of 11-1 to 11-4) and to specify a sample holder (11-1 to 11-).
4) is a key for inputting the rotation angle. UIe: Display The display UIe is a screen for displaying information to a user (operator).

(Controlled Elements Connected to the Controller C) In FIG. 5, the following controlled elements are connected to the controller C. DX: X table drive circuit X table drive circuit DX is an X table drive motor MX.
To move the XY table 32 in the X-axis direction. DY: Y table drive circuit Y table drive circuit DY is a Y table drive motor MY
To move the XY table 32 in the Y-axis direction.
X table drive circuit DX, Y table drive circuit D
An XY table driving device (DX + DY + M) is driven by a Y, X table driving motor MX and a Y table driving motor MY.
X + MY). The XY table drive (DX + DY + MX + MY) and the XY table 32
Constitutes the sample stage 31. D1: Holder rotation drive circuit The holder rotation drive circuit D1 is a holder rotation drive motor M1.
To rotate the sample holders 11-1 to 11-4. The holder drive circuit (D1 + M1) is configured by the holder drive circuit D1 and the holder rotation drive motor M1. D2: Beam irradiation drive circuit Beam irradiation drive circuit D2 is a beam irradiation device (electron gun)
Drive.

(Functions of the Controller C) The controller C has the following control elements C1 to C6.
Each of the control elements C1 to C6 has a function of executing a process according to a signal input from the signal output element and outputting a control signal to each of the controlled elements. C1: Identification information output means The identification information output means C1 is provided with the holder designation start key UI.
When the holder designation signal input from the numeric keypad UId is 1 to 4 after the input of a, 2-bit identification information "00", "01", "10", "11" is output corresponding to 1 to 4. I do. C2: Target XY coordinate position output means The target XY coordinate position output means C2
It has a Y coordinate position storage means C2a and has a target XY coordinate position (a sample holder (11-1 to 11-4) corresponding to the identification information) of the XY table 32 determined according to the identification information.
Is moved to the beam irradiation position), the XY coordinate position of the XY table is output. C2a: Target XY coordinate position storage means corresponding to identification information In the target information XY coordinate position storage means C2a, the sample holder (one of 11-1 to 11-4) corresponding to the identification information is moved to the beam irradiation position. The XY coordinate position of the XY table 32 at that time is stored.

C3: XY table control means The XY table control means C3 stores the XY table 32 in the target XY coordinate position output from the target XY coordinate position output means C2.
To move. C4: Holder Drive Motor Rotation Control Means Holder drive motor rotation control means C4 has holder drive motor rotation direction determination means C4a and motor rotation angle determination means C4b, and the rotation direction output by the holder drive motor rotation direction determination means C4a. Motor rotation angle determination means C4b
Rotate by the angle output in. C4a: Holder drive motor rotation direction determination means Holder drive motor rotation direction determination means C4a has identification information correspondence rotation direction storage means C4a1, and the rotation direction (forward or reverse) of the holder drive motor determined according to the identification information. Output). For example, when the sample holders 11-1, 11-3, and 11-4 shown in FIG. 1 are moving to the beam irradiation position, the rotation is normal, and when the sample holder 11-2 is moving to the beam irradiation position, the rotation is reverse. Decide to rotate. Thereby, each sample holder 11-1 to 11-4 rotates in the same direction. C4a1: Rotation direction storage means corresponding to identification information The rotation direction storage means C4a1 stores the rotation direction of the holder drive motor M1 corresponding to the identification information. C4b: Motor rotation angle determination means The motor rotation angle determination means C4b outputs the rotation angle of the holder drive motor M1 calculated from the angle input with the holder rotation angle input start key UIb. C5: Beam irradiation control unit The beam irradiation control unit C5 is a beam irradiation device (electron gun) for the sample S when the sample holder (one of 11-1 to 11-4) corresponding to the identification information moves to the beam irradiation position. Is irradiated.

(Operation of the First Embodiment) In the first embodiment having the above configuration, the sample is conveyed to the sample stage 31 by the holder device conveying rod connected to the conveying rod connecting portion 4a. The mounting portion 3 of the holder supporting member 2 conveyed along the upper surface of the sample stage 31 is detachably mounted on the holder device mounting portion 33 of the sample stage 31. The holder-side connector 24 of the holder supporting member 2 is connected to the stage-side connector 3 of the sample stage 31 when the mounting portion 3 of the holder supporting member 2 is mounted on the holder device mounting portion 33 of the sample stage 31.
4 and is detached from the stage-side connector 34 when the attached part 3 is detached from the holder device attaching part 33. When the holder device 1 is mounted on the sample stage 31 and the holder-side connector 24 is connected to the stage-side connector 34, the holder rotation driving device (D1 + M1) is connected to the holder-side connector 24 via the terminal 24a.
Can be supplied with electric power for rotational driving. The holder rotation drive device (D1 + M1) includes a plurality of sample holders (11-1 to 11-1) rotatably supported by the holder support member 2.
1-4) can be rotationally driven. A sample holder (11-1 to 11-) holding a sample S to be inspected / observed by a user (operator) from a user interface UI.
4), the XY table moves,
The selected sample holder moves to a beam irradiation position at which beam irradiation is possible. When moved, the sample S is irradiated with the electron beam B. In addition, the sample holder (1
If you want to inspect and observe by rotating 1-1 to 11-4),
The user inputs the rotation angle of the sample holder from the user interface UI. Sample holder at beam irradiation position (1
The holder drive motor M1 is rotated by a rotation direction determined according to the identification information of any of 1-1 to 11-4) and a rotation angle calculated from the input rotation angle, and the sample holder (11-
1 to 11-4) are rotated at the beam irradiation position. When the sample holder (11-1 to 11-4) is rotated while the sample S is held in the sample holder (any of 11-1 to 11-4), the sample holder (11-1 to 11-4) is rotated. 4), the position of the sample S portion on the rotation center line does not move, and the position of the sample S portion adjacent to the rotation center line of the sample holder (any of 11-1 to 11-4). Has a small amount of movement. For this reason, the sample holders (11-1 to 11-
4) when the electron beam B is applied to the sample S located on the rotation center line and at a position adjacent to the rotation center line for observation,
Even if the sample holders (11-1 to 11-4) are rotated, the observation position of the sample S is not lost. Also, the sample S located at the center of rotation of each of the plurality of sample holders (11-1 to 11-4).
The portion can be sequentially moved to the irradiation position of the electron beam B by the XY table 32. Therefore, the observation of the samples S of the plurality of sample holders (11-1 to 11-4) can be performed sequentially and continuously.

(Explanation of Flowchart) FIG. 6 is a flowchart of the XY table movement control of the first embodiment.
The flowchart of FIG. 6 is performed by a program stored in the ROM of the controller C. In FIG. 6, when the XY table movement control flowchart is started, in ST1, it is determined whether or not the holder designation start key UIa is turned on. If no (N), ST1 is repeatedly executed, and if yes (Y), the process moves to ST2. In ST2, it is determined whether or not a holder designation signal has been input. If no (N), proceed to ST4, if yes (Y), S
Move to T3. In ST3, the input holder designation signal (keys 1 to 4 of ten keys UId) is stored. ST4
In, it is determined whether or not the input end key has been turned on. If no (N), the process returns to ST2, and if yes (Y), the process moves to ST5. In ST5, it is determined whether or not there is a holder designation signal stored in ST3. If yes (Y), proceed to ST7, if no (N) (ST
If No (N) at 2 and Yes (Y) at ST4), the process moves to ST6. In ST6, "no input value" is displayed on the display UIe, and the process returns to ST1. In ST7, the identification information "0" of the sample holder (11-1 to 11-4) corresponding to the holder designation signal (1 to 4) stored in ST3.
"0", "01", "10", and "11" are output. ST
In step 8, the target XY coordinate position of the XY table 32 (the position stored in the identification information corresponding target XY coordinate position storage means C2a) is output according to the sample holder identification information.
In ST9, the XY table 32 is moved to the output target XY coordinate position.

FIG. 7 is a flowchart of the sample holder rotation control of the first embodiment. 7 is performed by a program stored in the ROM of the controller C. In FIG. 7, when the flowchart of the sample holder rotation control is started, in ST11, it is determined whether or not the holder rotation angle input start key UIb is turned on. If no (N), ST11 is repeatedly executed, and if yes (Y), the process moves to ST12. In ST12, it is determined whether or not a holder rotation angle signal has been input. If no (N), the process moves on to ST14, and if yes (Y), the process moves on to ST13. In ST13, the input holder rotation angle signal is stored. In ST14, it is determined whether or not the input end key has been turned on. If no (N), the process returns to ST12, and if yes (Y), the process moves to ST15. In ST15, it is determined whether or not there is a holder rotation angle signal stored in ST13. If yes (Y), the process moves to ST17, and if no (N) (no (N) in ST12 and yes (Y) in ST14), the process goes to ST17.
Move to 16. In ST16, "no input value" is displayed on the display UIe, and the process returns to ST11. In ST17, the sample holder (11-1 to 11-4) is set at the beam irradiation position.
) Is determined. If no (N), the process returns to ST11, and if yes (Y), the process moves to ST18. In ST18, it is determined whether or not the sample holder (any of 11-1 to 11-4) at the beam irradiation position is 11-2. If yes (Y), the operation moves on to ST19, and if no (N), the operation moves on to ST20. In ST19, the motor 8 is rotated in reverse by the motor rotation angle in accordance with the input value stored in ST13, and the process returns to ST11. In ST20, the motor 8 is rotated forward by the motor rotation angle according to the input value stored in ST13, and the process returns to ST11.

(Embodiment 2) FIG. 8 is an explanatory view of a holder device according to Embodiment 2 of the present invention and corresponds to FIG. 1B of Embodiment 1 described above. In the description of the second embodiment, components corresponding to the components of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. In the holder device 1 of the second embodiment, the sample holder (1
1,45,47) and gears (11c, 41,41)
42, 43, 44) are rotatably supported. The gear 11c of the sample holder (11, 45, 47) meshes with the gear 44, and the gear (11c, 41 to 44)
Are configured to rotate at the same time that torque is transmitted to any of the gears. Although a configuration for transmitting the rotational force to any of the gears is omitted, a configuration similar to that of the first embodiment can be employed.

A sample holder 45 is mounted on the gear 42 with a screw 4.
6, the sample holder 45 has a large-area sample holder 45a. A sample holder 47 for sample end face observation is integrally connected to the gear 44 by screws 48, and the sample holder 47 has a sample holding part 47a for end face observation. The gears 11c, 41 to 44
At the same time, the sample holders 11, 45, 47 also rotate simultaneously. Although not shown, the holder device 1 of the second embodiment is transported by a transport rod and mounted on the sample stage 31 similarly to the first embodiment, and when mounted, the stage-side connector 34 and the holder-side connector 24 are connected. It is configured to be. Therefore, in the second embodiment, similarly to the first embodiment, observation or analysis of each sample S held by a plurality of sample holders (11, 45, 47) rotatably supported by the holder support member 2 is performed. It can be performed sequentially and continuously. Further, observation on the sample S,
When performing analysis or the like, it is possible to rotate each of the samples S.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below. (H01) In the first embodiment, observation images of a plurality of samples can be automatically and continuously taken, and in this case, the plurality of sample holders are automatically and sequentially moved to the target XY coordinate positions. It is possible. (H02) In the first embodiment, an electron beam is used. However, a charged particle beam other than the electron beam can be used.

[0033]

The sample holder of the present invention described above has the following effects. (E01) The plurality of sample holders mounted on the holder support member on the sample stage can be rotated around the center line of each sample holder. Therefore, even if the sample holder is rotated while observing the sample surface on the center line of the sample holder, the observation position on the sample surface does not escape, so that the sample can be observed while rotating.

[Brief description of the drawings]

FIG. 1 is an overall explanatory view of a holder device according to a first embodiment of the present invention; FIG. 1A is a plan view of the holder device according to the first embodiment;
FIG. 1B is a sectional view taken along the line IB-IB of FIG. 1A.

FIG. 2 is an explanatory view of the holder device shown in FIG. 1; FIG. 2A is a view seen from an arrow IIA in FIG. 1A;
B is a view as seen from the arrow IIB in FIG. 1A.

FIG. 3 is a diagram showing a state before the holder device according to the first embodiment of the present invention is mounted on a sample stage, and FIG. 3A is a plan view of FIG. 1A rotated counterclockwise by 90 °. ,
FIG. 3B is a sectional view taken along the line IIIB-IIIB of FIG. 3A.

FIG. 4 is a view showing a state in which the holder device according to the first embodiment of the present invention is mounted on a sample stage. FIG. 4A is a diagram in which the holder device of FIG. FIG. 4B is a cross-sectional view taken along the line IVB-IVB in FIG. 4A.

FIG. 5 is a block diagram of a control unit according to the first embodiment of the present invention.

FIG. 6 is a flowchart of XY table movement control according to the first embodiment.

FIG. 7 is a flowchart of sample holder rotation control according to the first embodiment.

FIG. 8 is an explanatory view of a holder device according to a second embodiment of the present invention, and corresponds to FIG. 1B of the first embodiment.

FIG. 9 is an explanatory view of a conventional example of a sample holder used in a scanning electron microscope or the like.

10 is an explanatory view of a conventional sample holder having a plurality of sample mounting portions, FIG. 10A is a plan view of the sample holder, and FIG. 10B is a cross-sectional view taken along the line XB-XB of FIG. 10A.

[Explanation of symbols]

2 ... Holder support member, 3 ... Mounted part, 4a ... Conveying rod connecting part, 24 ... Holder side connector, 24a ... Power supply connecting member (terminal), 31 ... Sample stage, 32 ... XY table,
33: Holder device mounting part, 34: Stage side connector,
(11-1 to 11-4, 11, 45, 47): sample holder, B: charged particle beam, C1: identification information output means, C
2 ... Target XY coordinate position output means, C3 ... XY table control means, S ... Sample, UI ... User interface, (D
1 + M1) ... Holder rotation driving device, (DX + DY + MX)
+ MY) XY table drive.

Claims (2)

[Claims] 1. A holder device having the following requirements (A01) to (A05): (A01) a holder detachably mounted on a holder device mounting portion provided on a sample stage having an XY table. (A02) a holder support member having a mounting portion and a transport rod connecting portion connected to the holder device transport rod;
A plurality of sample holders rotatably supported by the holder support member; (A03) a holder rotation driving device supported by the holder support member to rotationally drive each of the plurality of sample holders; When the mounted portion of the holder support member conveyed along the upper surface is detachably mounted on the holder device mounting portion of the sample stage, the holder support member is connected to the stage-side connector of the sample stage, and from the holder device mounting portion. A holder-side connector that is detached from the stage-side connector when the mounted part is detached, (A0
5) A power supply connecting member capable of supplying power for rotational driving from the holder-side connector to the rotational driving device. 2. A sample stage having the following requirements (B01) to (B05): (B01) a mounting portion provided on a holder support member rotatably supporting a plurality of sample holders; (B02) A movable XY table in an XY plane provided with a holder device mounting portion to which the holder side connector is detachably mounted and a stage side connector provided on the upper surface, and (B02) the XY table mounted with the holder support member. The specimen held in a predetermined specimen holder among the plurality of specimen holders is moved to a beam irradiation position where the charged particle beam emitted from the beam irradiation apparatus irradiates the specimen by moving the specimen in the XY plane. (B03) identification information output means for outputting holder identification information set for each of the plurality of sample holders,
(B04) Outputting a target XY coordinate position, which is an XY coordinate position of an XY table when the sample held in the sample holder corresponding to the holder identification information is moved to the beam irradiation position, according to the holder identification information. (B05) the target XY coordinate position output means,
XY table control means for controlling the operation of the XY table driving device so as to move the Y table.