JP2001052577A - Vacuum valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum valve securing a creeping distance between electrodes on the air side to allow miniaturization. SOLUTION: This vacuum valve has a structure support material 2 made of an epoxy resin; a vacuum valve body 15 and an insulation material 3 made of the same epoxy resin as the structure support material 2 (or various kinds of insulative thermosetting resins, a highly electrically insulative thermoplastic resin, an insulative elastomer or the like) filled in a gap between the structure support material 2 and the vacuum valve body 1 over the whole side face of the vacuum valve body 1 (or only a portion of the side face). Thereby, a creeping distance between electrodes on the air side can be secured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum valve, and more particularly to a vacuum valve in which a main body of a vacuum valve is electrically insulated from a peripheral portion by a structural supporting member.

[0002]

2. Description of the Related Art A vacuum valve housed in a switchgear of a closed switchboard or the like is a switch that electrically insulates opposing oxygen-free copper electrodes with ring-shaped ceramics and turns on and off electricity.

The inside of the electrode and the ceramic is hermetically sealed by welding, and 10 ^-3 (10 minus the third power) Torr
The vacuum is lower than r. In this vacuum region, since the current cutoff characteristics are excellent, it is possible to cut off large power with a small size. At present, low voltages are applied from 3,000V to high voltages, up to 70,000V. In recent years, the diameter of the electrode has been reduced due to the improvement of the cutoff characteristics of the electrode, and the diameter of the vacuum valve ceramic has also been reduced accordingly.

On the other hand, even if the insulation characteristics inside the vacuum valve at the time of interruption are good, since the outside is air pressure, if the length of the ceramics is to be shortened, the insulation breakdown at the surface of the outside ceramics occurs when the current is interrupted. Then, there is a danger of conduction. Therefore, it is necessary to strengthen the electric insulation on the air side as the size of the vacuum valve is reduced.

A conventional structural support material (for example, an insulator made of epoxy resin or the like) is arranged around the vacuum valve, and usually has three phases, so that three vacuum valves are mutually electrically insulated. There are mutual vacuum valves in the space to take. However, as described above, it is desired to contribute to insulation reinforcement along the ceramic surface.

[0006]

Even if the electrode shutoff characteristics of the vacuum valve are improved and the diameter is reduced, the insulating characteristics inside the vacuum valve are sufficiently ensured. On the other hand, the conventional length cannot be reduced on the air side because the creepage distance of the ceramic is determined by the breakdown voltage of the air.

Therefore, the diameter becomes small but cannot be shortened.
It cannot be downsized as a whole.

As a measure for increasing the creepage distance of the ceramics, a ceramic with folds is used, but the manufacturing cost is increased.

In addition, a vacuum valve is embedded in a resin,
In other words, when forming the structural support material with resin, a method of embedding and casting a vacuum valve in a mold and making it a part of the structural support material (hereinafter referred to as integral casting) has been devised and partially adopted. ing.

The ceramic of the vacuum valve is different from the insulating material (generally, resin) used for casting by one digit in linear expansion coefficient (the coefficient of linear expansion of ceramic is low). Internal residual stress is generated, which may cause cracks. For this reason, when performing an integral casting, a resin suitable for the casting and an advanced manufacturing technique are required.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and has as its object to provide a vacuum valve capable of ensuring a creeping distance between electrodes on the air side and enabling downsizing.

[0012]

In order to achieve this object, a vacuum valve according to the present invention according to claim 1 comprises a vacuum valve body and a structural supporting member disposed around the vacuum valve body. Characterized in that a gap is filled with an insulating material.

As described above, by filling the gap between the vacuum valve and the structural support material with the insulating material, the creepage distance between the electrodes on the air side is increased, and the creepage distance between the electrodes on the air side is reduced even in a miniaturized vacuum valve. The distance can be secured.

According to a second aspect of the present invention, in the vacuum valve according to the first aspect, the insulating material to be filled is made of the same material as the structural support material.

According to a third aspect of the present invention, in the vacuum valve of the first aspect, the insulating material to be filled is, for example, polyethylene, fluorine resin, vinyl chloride resin, polystyrene, ABS (acrylonitrile-butadiene-styrene). A mixture of a polymer, a copolymer, and a graft) resin, an acrylic resin, polypropylene, polyamide, or the like;

As described above, when the insulating material is an insulating thermoplastic resin, the thermoplastic resin has a fluidity when heated and has a property to be hardened when cooled, so that there is an advantage that the productivity is good.

According to a fourth aspect of the present invention, in the vacuum valve of the first aspect, the insulating material to be filled is made of, for example, an insulating resin such as an epoxy resin, a phenol resin, an unsaturated polyester resin, a urethane resin, or a silicone resin. It is characterized in that it is a thermosetting resin.

As described above, when the insulating material is an insulating thermosetting resin, the thermosetting resin has a property that when heated, the cross-linking reaction proceeds with self-heating, and has a property of hardening, and is generally more heat-resistant than a thermoplastic resin. There is an advantage that the property is high.

According to a fifth aspect of the present invention, there is provided the vacuum valve according to the first aspect, wherein the insulating thermosetting resin includes, for example, a toughness such as a flexibility imparting agent, a fine particle rubber particle, and a silicone gel. Characterized by adding an additive for improving the

By adding an additive which improves the toughness to the thermosetting resin as described above, the internal residual stress caused by the difference in the coefficient of linear expansion between the ceramics and the insulating material is alleviated, and the occurrence of cracks is prevented. Can be.

According to a sixth aspect of the present invention, in the vacuum valve of the first aspect, the insulating material to be filled is made of, for example, an insulating resin such as an epoxy resin, a phenol resin, an unsaturated polyester resin, a urethane resin, or a silicone resin. In addition to a thermosetting resin, a stress buffer layer made of a predetermined insulating material such as a glass tape or a glass mat is provided between the vacuum valve body and the structural support material.

As described above, cracks can be prevented by providing a stress buffer layer by inserting, for example, a glass tape or a glass mat in the gap between the vacuum valve and the structural support member.

According to a seventh aspect of the present invention, in the vacuum valve according to the first aspect, the insulating material to be filled is such that a linear expansion coefficient of a portion of the vacuum valve body in contact with the ceramic has a value close to a linear expansion coefficient of the ceramic. And a material having a slope in the coefficient of linear expansion so that the coefficient of linear expansion of the portion in contact with the structural support material is close to the coefficient of linear expansion of the structural support material.

As described above, by filling a material having a gradient of linear expansion coefficient, the internal residual stress can be reduced, and the occurrence of a crack can be prevented.

According to the present invention, in the vacuum valve according to the present invention, the insulating material to be filled is made of, for example, an insulating material such as synthetic rubber such as ethylene propylene rubber, silicone rubber, butadiene rubber or natural rubber. It is characterized in that it is a conductive elastomer.

As described above, when the insulating material is an elastomer, the probability of crack generation due to internal residual stress is small since the elastomer is in a rubber state.

According to a ninth aspect of the present invention, there is provided a vacuum valve comprising: a vacuum valve main body; and a structural support member disposed around the vacuum valve main body, and the vacuum valve main body provided on the structural support member. The vacuum valve body is fixed to the structural support by passing the fixed electrode rod through a hole larger than the fixed electrode rod and tightening a nut on a screw provided on the fixed electrode rod.

With such a configuration, the vacuum valve body can be easily fixed to the structural support.

According to a tenth aspect of the present invention, there is provided a vacuum valve, comprising: a vacuum valve body; and a structural support member disposed around the vacuum valve body. A screw is formed in the flange portion on the side, and a screw to which the screw is fitted is formed in the structural support material.

With such a configuration, the vacuum valve main body can be easily fixed to the structural support.

[0031] A vacuum valve according to the present invention includes a vacuum valve main body and a structural support member disposed around the vacuum valve main body, and the fixed electrode side or the movable electrode of the vacuum valve main body. A fitting means of a predetermined shape is provided on the flange portion on the side, and a fitting means for fitting the fitting means is formed on the structural support material.

With such a structure, the vacuum valve main body can be easily fixed to the structural support.

According to a twelfth aspect of the present invention, in the vacuum valve according to any one of the ninth to eleventh aspects,
A gap between the vacuum valve body and the structural support is filled with an insulating material.

By filling the gap between the vacuum valve body fixed by a predetermined means and the structural support with an insulating material, the creepage distance between the fixed electrode and the movable electrode on the air side of the vacuum valve can be extended. Can be.

According to a thirteenth aspect of the present invention, in the vacuum valve according to any one of the first to eighth aspects or the twelfth aspect, an insulating material is filled in a gap between the vacuum valve body and the structural support member. The portion to be formed is the entire side surface of the vacuum valve main body.

According to a fourteenth aspect of the present invention, in the vacuum valve according to any one of the first to eighth aspects or the twelfth aspect, the gap between the vacuum valve body and the structural support is filled with an insulating material. The part to be formed is only a part of the side surface of the vacuum valve main body.

According to a fifteenth aspect of the present invention, there is provided a vacuum valve, comprising: a vacuum valve main body; and a structural support member disposed around the vacuum valve main body. In the high electric field portion near the electrode on the side, a part of the structural support material is adhered to the vacuum valve body.

According to this structure, when manufacturing the structural support material, the resin can be adhered to the ceramic surface of the portion required to support the impact force applied to the vacuum valve body, and the air-side electrode Creepage distance can be secured.

[0039]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the following drawings, the same symbols indicate the same or corresponding parts.

(First Embodiment) First, a vacuum valve according to a first embodiment of the present invention will be described.

FIG. 1 is a front view showing a cross section of a part of the vacuum valve according to the first embodiment, and FIG. 2 is a bottom view of the vacuum valve shown in FIG. In the figure, 1 is a vacuum valve body, 2 is a structural support material, 3 is an insulating material, 4 is a fixed electrode, 5 is a movable electrode, and 6 and 7 are lids of the electrodes respectively.

Since the diameter of the vacuum valve electrode can be reduced by improving the performance of the vacuum valve electrode, the diameter of the vacuum valve is reduced, but the creepage distance between the fixed electrode and the movable electrode on the air side cannot be reduced. Therefore, the length does not become shorter. Therefore, it is necessary to increase the creepage distance between the air-side electrodes.

For this reason, in this embodiment, the creepage distance between the air-side electrodes is increased by filling the gap between the vacuum valve body and the structural support with an insulating material.

That is, as shown in FIGS. 1 and 2, the central axis of the vacuum valve main body 1 is aligned on the concentric axis of the cylindrical structural support material 2, and the structural support material 2 made of epoxy resin and the vacuum valve main body 1 The insulating material 3 made of epoxy resin of the same quality as the structural support material 2 was injected into the gap of the vacuum valve body 1 and hardened over the entire side surface.

When an electrical test was performed, characteristics satisfying the electrical test specifications were obtained.

In the above case, the insulating material 3 filled in the gap between the structural support member 2 made of epoxy resin and the vacuum valve body 1 is made of epoxy resin. However, the insulating material 3 is not limited to epoxy resin. A high electrical insulating thermosetting resin material such as a phenol resin, an unsaturated polyester resin, a urethane resin, and a silicone resin may be used. A thermosetting resin has a property of being cured by self-heating when heated and has a property of curing, and generally has higher heat resistance than a thermoplastic resin.

Further, a material obtained by dispersing and adding a flexibility-imparting agent, rubber particles having a fine particle diameter, and silicone gel to these high electric insulating thermosetting resins may be used. By adding an additive that improves the toughness to the thermosetting resin in this way, internal residual stress caused by a difference in the coefficient of linear expansion between the ceramic and the insulating material is reduced, and the occurrence of cracks is prevented.

The insulating material 3 filling the gap between the structural support material 2 and the vacuum valve body 1 is made of polyethylene, fluororesin, vinyl chloride resin, polystyrene, ABS (acrylonitrile-butadiene-styrene polymer or copolymer, Highly electrically insulating thermoplastic resin material such as resin, acrylic resin, polypropylene and polyamide can be used. Thermoplastic resin has fluidity when heated, and has the property of hardening when cooled,
Good manufacturability.

Further, the insulating material 3 to be filled in the gap of the vacuum valve main body 1 is a synthetic rubber such as ethylene propylene rubber, silicone rubber or butadiene rubber, or a highly electrically insulating elastomer having a remarkable elasticity at room temperature, such as natural rubber. You can also. Since the elastomer is in a rubber state, the probability of crack generation due to internal residual stress is small.

Further, the insulating material 3 filling the gap of the vacuum valve body 1 has a coefficient of linear expansion of the portion of the vacuum valve body 1 in contact with the ceramics set to a value close to the linear expansion coefficient of the ceramics, and a portion in contact with the structural support 2. A material having an inclination to the coefficient of linear expansion that makes the coefficient of linear expansion of the material close to the coefficient of linear expansion of the structural support material (made of epoxy resin or the above-mentioned highly electrically insulating thermosetting resin material, and ).

That is, as the insulating material 3, the portion of the vacuum valve body 1 which is in contact with the ceramic is made of a large amount of an inorganic filler to reduce the coefficient of linear expansion, and the structural support portion has a smaller amount of the inorganic filler than the ceramic portion. By filling a material having a linear expansion coefficient which is a component having the same coefficient of linear expansion as that of the structural support material, thermal stress can be reduced and cracks can be prevented.

(Second Embodiment) Next, a vacuum valve according to a second embodiment of the present invention will be described.

FIG. 3 is a front view showing a cross section of a part of the vacuum valve according to the second embodiment, and FIG. 4 is a bottom view of the vacuum valve shown in FIG.

As shown in FIGS. 3 and 4, after the glass tape 8 is wound around the ceramics of the vacuum valve body 1,
The central axis of the vacuum valve body 1 is aligned with the concentric axis of the cylindrical structural support member 2, and the structural support member 2 and the vacuum valve main body 1 are aligned.
The linear expansion coefficient 3.5 × 10 different from the structural support material 2
^The insulating material 3 made of epoxy resin of ^{No. -5} was injected and cured. Here, the linear expansion coefficient of the ceramic of the vacuum valve body 1 is 2 × 10 ⁻⁶ , and the linear expansion coefficient of the structural support material 2 is 2 × 10 ^−5.
It is.

Although the materials had different linear expansion coefficients, the glass tape 8 was wound around to form a stress buffer layer, so that no crack was generated due to thermal stress, and the electrical test satisfied the electrical test specifications. Characteristics were obtained.

The material for forming the stress buffer layer is not limited to a glass tape, but may be an electrically insulating material such as a glass mat.

(Third Embodiment) Next, a vacuum valve according to a third embodiment of the present invention will be described.

FIG. 5 is a front view showing a cross section of a part of the vacuum valve according to the third embodiment, and FIG. 6 is a bottom view of the vacuum valve shown in FIG.

As shown in FIGS. 5 and 6, the central axis of the vacuum valve main body 1 is aligned with the concentric axis of the cylindrical structural support member 2, and the center of the gap between the structural support member 2 and the vacuum valve main body 20 is 20 mm. Then, an insulating material 3 made of the same epoxy resin as the structural support material 2 was injected and cured.

When an electrical test was performed, characteristics satisfying the electrical test specifications were obtained.

The insulating material 3 is not limited to the epoxy resin, but may be any of the various types of high electrical insulating thermosetting resin materials, high electrical insulating thermoplastic resin materials, and the like described in the first embodiment.
It is also possible to use a highly electrically insulating elastomer or a material having a gradient in linear expansion coefficient.

(Fourth Embodiment) Next, a vacuum valve according to a fourth embodiment of the present invention will be described.

FIG. 7 is a front view showing a cross section of a part of a vacuum valve according to the fourth embodiment, and FIG. 8 is a bottom view of the vacuum valve shown in FIG.

As shown in FIGS. 7 and 8, the central axis of the vacuum valve main body 1 is aligned with the concentric axis of the cylindrical structural support member 2, and the high electric field portion in the gap between the structural support member 2 and the vacuum valve main body 1 is formed. An insulating material 3 made of an epoxy resin having fine rubber particles added to 30 mm was injected and cured.

When an electrical test was performed, characteristics satisfying the electrical test specifications were obtained.

At present, structural supports for switchboards using vacuum valves are often made of epoxy resin. In the epoxy resin used for structural support and the ceramics of the vacuum valve body,
In most cases, the coefficient of linear expansion differs. In this case, depending on the mechanical strength of the epoxy resin used, if the same material as the material having low mechanical strength is used, a crack may be generated due to internal residual stress. Therefore, in order to reduce or alleviate the internal residual stress, a flexibility imparting agent is added to the insulating material,
By dispersing and adding additives that improve toughness such as rubber particles and silicone gel with small particle size, the internal residual stress caused by the difference in linear expansion coefficient between ceramics and insulating material is reduced, and cracks are prevented from occurring. Can be.

FIG. 7 shows a case where the insulating material 3 is injected into the high electric field portion on the fixed electrode 4 side. However, the insulating material 3 is injected into the high electric field portion on the movable electrode 5 side and cured. Is also good.

The insulating material 3 to be injected into the high electric field portion is not limited to an epoxy resin to which rubber particles having a small particle diameter are added, but may be a high-density resin such as an epoxy resin, a phenol resin, an unsaturated polyester resin, a urethane resin, and a silicone resin. Flexibility imparting agent, fine particle size rubber particles,
A material in which silicone gel is dispersed and added may be used.

(Fifth Embodiment) Next, a vacuum valve according to a fifth embodiment of the present invention will be described.

FIG. 9 is a front view showing a cross section of a part of a vacuum valve according to the fifth embodiment. In the figure,
9 is a nut for fixing the vacuum valve, 10 is an electrode screw thread, 2
0 is an annular projection.

As shown in FIG. 9, a cylindrical structural support 2
The rod of the fixed electrode 4 of the vacuum valve body 1 is passed through a hole provided so as to be located at the center of the annular projection 20 inside the nut, and a nut 9 is fastened to an electrode screw thread 10 provided on the rod. After fixing the main body 1 to the structural support 2, an insulating material 3 made of silicone gel was injected into the gap between the structural support 2 and the vacuum valve main body 1 and cured.

When an electrical test was performed, characteristics satisfying the electrical test specifications were obtained.

The insulating material 3 is not limited to the silicone gel, but may be any of the various types of high electrical insulating thermosetting resin materials, high electrical insulating thermoplastic resin materials, and high electrical insulating materials described in the first embodiment. It is also possible to use an insulating elastomer or a material having a linear expansion coefficient with a gradient.

By fixing the vacuum valve main body to the structural support material in the configuration as in this embodiment, it can be more easily fixed. By filling the gap with resin, the air-side fixed electrode and the movable electrode can be fixed. Creepage distance is secured.

(Sixth Embodiment) Next, a vacuum valve according to a sixth embodiment of the present invention will be described.

FIG. 10 is a front view showing a cross section of a part of a vacuum valve according to a fifth embodiment, and FIG.
It is sectional drawing which expands and shows a part. In the figure, 21 is a flange screw portion, and 22 is a metal insert.

As shown in FIGS. 10 and 11, a cylindrical shape in which a flange screw portion 21 is formed on the flange of the vacuum valve body 1 and a metal insert 22 formed with a screw to be fitted to the flange screw portion 21 is provided. Structural support 2
Then, the vacuum valve main body 1 was screwed in and fixed, and then an insulating material 3 made of silicone gel was injected into the gap between the structural support material 2 and the vacuum valve main body 1 and cured.

When an electrical test was performed, characteristics satisfying the electrical test specifications were obtained.

The insulating material 3 is not limited to silicone gel, but may be any of the various types of high electrical insulating thermosetting resin materials, high electrical insulating thermoplastic resin materials, and high electrical insulating materials described in the first embodiment. It is also possible to use an insulating elastomer or a material having a linear expansion coefficient with a gradient.

By fixing the vacuum valve main body to the structural support material in the configuration as in this embodiment, it can be more easily fixed. By filling the gap with resin, the air-side fixed electrode and movable electrode can be fixed. Creepage distance is secured.

(Seventh Embodiment) Next, a vacuum valve according to a seventh embodiment of the present invention will be described.

In this embodiment, the flange screw portion 21 is formed by forming screws of various shapes on the flange of the vacuum valve main body 1, and the screw fitted to the screw of the flange screw portion 21 is connected to the structural support material 2. The vacuum valve body 1 is fixed to the structural support material 2 by forming the vacuum valve body 1 on the side.

FIG. 12 shows an example of a vacuum valve in which the flange screw portions 21 of these various shapes are formed.
(A) and (b) are cross-sectional views of main parts, and (c) and (d)
Is a perspective view of a main part.

In FIG. 12A, a C-shaped screw is formed in the flange screw portion 21 of the electrode portion of the vacuum valve main body 1. (B) shows the vacuum valve body 1
An inverted C-shaped screw is formed in the flange screw portion 21 of the electrode portion. As shown in (c), a screw is formed in the flange screw portion 21 of the electrode portion of the vacuum valve body 1 so as to rotate while pressing about 10 °. Further, the screw shown in (d) is formed into a screw which is once pushed into the flange screw part 21 of the electrode part of the vacuum valve body 1 and is rotated and fixed.

The above-described screws having various shapes are formed on the flange screw portion 21 of the electrode portion of the vacuum valve main body 1, and a cylindrical insert having a metal insert 22 for forming a screw to be fitted with the screw having these various shapes is provided. The vacuum valve body 1 was screwed into the structural support 2 and fixed, and then silicone gel was injected into the gap between the structural support 2 and the vacuum valve main body 1.

As a result of the electrical test, characteristics satisfying the electrical test specifications were obtained.

The insulating material 3 is not limited to the silicone gel, but may be any of the various types of high electric insulating thermosetting resin materials, high electric insulating thermoplastic resin materials, and high electric insulating materials described in the first embodiment. It is also possible to use an insulating elastomer or a material having a linear expansion coefficient with a gradient.

By fixing the vacuum valve main body to the structural support material in the structure as in this embodiment, it is possible to more easily fix the main body, and by filling the gap with resin, the space between the fixed electrode on the air side and the movable electrode can be improved. Creepage distance is secured.

(Eighth Embodiment) Next, a vacuum valve according to an eighth embodiment of the present invention will be described.

FIG. 13 is a front view showing a cross section of a part of a vacuum valve according to the eighth embodiment.

As shown in FIG. 13, a part of the structural support member 2 made of epoxy resin is vacuumed so as to cover a part of the electrode lid 6 on the fixed electrode 4 side of the vacuum valve body 1 and a high electric field part. It was adhered to the valve body 1.

As a result of the electric test, characteristics satisfying the electric test specifications were obtained.

The vacuum valve body 1 receives an impact force when shutting off and turning on electricity. Therefore, only an area or a volume having a strength enough to withstand the impact may be bonded by casting. That is, the vacuum valve main body 1 is set in a casting mold, and a resin is adhered to a minimum required ceramic surface to support the impact force applied to the vacuum valve main body 1 by casting. Creepage distance can be secured.

Note that, instead of the fixed electrode 4 side, the movable electrode 5
So as to cover a part of the lid 7 of the side electrode and the high electric field part,
A part of the structural support member 2 made of epoxy resin may be adhered to the vacuum valve body 1. (Ninth embodiment)
Next, a three-phase vacuum valve according to a ninth embodiment of the present invention will be described.

FIG. 14 is a front view showing a schematic configuration of a three-phase vacuum valve according to the ninth embodiment, and FIG.
FIG. 5 is a bottom view of the three-phase vacuum valve shown in FIG.

As shown in FIG. 14, a three-phase vacuum valve having a structure in which the vacuum valve main body 1 and the structural support member 2 manufactured in the seventh embodiment were attached in parallel for three phases was prepared. In addition, at the time of casting, the connecting portions connecting the respective structural support members 2 were also formed integrally with the structural support members 2 for three phases.

As a result of the electric test, characteristics satisfying the electric test specifications were obtained.

[0098]

As described above, according to the present invention,
By filling the gap between the vacuum valve body and the structural support with an insulating material, a vacuum valve that does not cause surface breakdown between the fixed electrode and the movable electrode on the air side even if the vacuum valve is downsized. be able to.

[Brief description of the drawings]

FIG. 1 is a front view of a vacuum valve according to a first embodiment of the present invention.

FIG. 2 is a bottom view of the vacuum valve shown in FIG.

FIG. 3 is a front view of a vacuum valve according to a second embodiment of the present invention.

FIG. 4 is a bottom view of the vacuum valve shown in FIG. 3;

FIG. 5 is a front view of a vacuum valve according to a third embodiment of the present invention.

FIG. 6 is a bottom view of the vacuum valve shown in FIG. 5;

FIG. 7 is a front view of a vacuum valve according to a fourth embodiment of the present invention.

FIG. 8 is a bottom view of the vacuum valve shown in FIG. 7;

FIG. 9 is a front view of a vacuum valve according to a fifth embodiment of the present invention.

FIG. 10 is a front view of a vacuum valve according to a sixth embodiment of the present invention.

11 is an enlarged view of a portion A in FIG.

FIG. 12 is a main part sectional view showing an example of a vacuum valve according to a seventh embodiment of the present invention.

FIG. 13 is a front view of a vacuum valve according to an eighth embodiment of the present invention.

FIG. 14 is a front view of a three-phase vacuum valve according to a ninth embodiment of the present invention.

FIG. 15 is a bottom view of the three-phase vacuum valve shown in FIG. 14;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Vacuum valve main body 2 ... Structural support material 3 ... Insulating material 4 ... Fixed electrode 5 ... Movable electrode 6, 7 ... Electrode lid 8 ... Glass tape (or glass mat) 9 ... Nut for fixing a vacuum valve 10 ... Electrode screw Mountain 20: Annular protrusion 21 ... Flange thread 22: Metal insert

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Yoshihiro Ito 1 Toshiba-cho, Fuchu-shi, Tokyo Inside the Toshiba Fuchu Plant, Inc. (72) Inventor Satoshi Makishima 1-Toshiba-cho, Fuchu-shi, Tokyo Inside the Fuchu Plant, Toshiba ( 72) Inventor Junichi Sato 1 Toshiba-cho, Fuchu-shi, Tokyo Inside the Fuchu Plant, Toshiba Corporation (72) Inventor Tetsuo Yoshida 1-Toshiba-cho, Fuchu-shi, Tokyo Inside the Fuchu Plant, Toshiba F-term (reference) 5G026 RA02 RA03 RA03 RB04

Claims (15)

[Claims] 1. A vacuum valve, wherein a gap between a vacuum valve main body and a structural support member disposed around the vacuum valve main body is filled with an insulating material. 2. The vacuum valve according to claim 1, wherein said insulating material is made of the same material as said structural support material. 3. The vacuum valve according to claim 1, wherein the insulating material is an insulating thermoplastic resin. 4. The vacuum valve according to claim 1, wherein said insulating material is an insulating thermosetting resin. 5. The method according to claim 4, wherein an additive for improving toughness is added to said insulating thermosetting resin.
A vacuum valve according to claim 1. 6. An insulating thermosetting resin, and a stress buffer layer made of a predetermined insulating material is provided between the vacuum valve body and the structural support. Item 7. A vacuum valve according to Item 1. 7. A method according to claim 7, wherein a linear expansion coefficient of a portion of said insulating material in contact with said ceramics of said vacuum valve body is close to a linear expansion coefficient of said ceramics, and a linear expansion coefficient of a portion of said vacuum valve body in contact with said structural support material is structural support. 2. The vacuum valve according to claim 1, wherein the material is provided with a slope in the coefficient of linear expansion so as to have a value close to the coefficient of linear expansion of the material. 8. The vacuum valve according to claim 1, wherein said insulating material is an insulating elastomer. 9. A vacuum valve main body, and a structural support member disposed around the vacuum valve main body, wherein the hole provided in the structural support member is larger than a fixed electrode rod of the vacuum valve main body. A vacuum valve, wherein the vacuum valve body is fixed to the structural support member by passing a fixed electrode rod and tightening a nut on a screw provided on the fixed electrode rod. 10. A vacuum valve body, comprising: a structural support member disposed around the vacuum valve body; forming a screw on a flange portion of the vacuum valve body on a fixed electrode side or a movable electrode side; A vacuum valve, wherein a screw in which the screw fits is formed in the structural support member. 11. A vacuum valve main body, and a structural support member disposed around the vacuum valve main body, wherein a fitting means of a predetermined shape is fitted to a fixed electrode side or a movable electrode side flange portion of the vacuum valve main body. And a fitting means with which the fitting means is fitted is formed on the structural support material. 12. The vacuum valve according to claim 9, wherein an insulating material is filled in a gap between the vacuum valve main body and the structural support member. 13. The vacuum valve according to claim 1, wherein a portion for filling the gap between the vacuum valve main body and the structural support material with the insulating material is the same as the above. A vacuum valve characterized by being the entire side surface of a vacuum valve body. 14. The vacuum valve according to claim 1, wherein a portion for filling the gap between the vacuum valve main body and the structural support material with the insulating material is the same as the above. A vacuum valve characterized in that it is only a part of a side surface of a vacuum valve body. 15. A vacuum valve main body, and a structural support member disposed around the vacuum valve main body, wherein a high electric field portion near an electrode on a fixed electrode side or a movable electrode side of the vacuum valve main body includes: A vacuum valve, wherein a part of a structural support material is adhered to the vacuum valve body.