JP2001049395A - Iron-nickel-cobalt alloy excellent in etching characteristic and low thermal expansion characteristic, and shadow mask excellent in smoothness of inside peripheral shape of etch pit - Google Patents
Iron-nickel-cobalt alloy excellent in etching characteristic and low thermal expansion characteristic, and shadow mask excellent in smoothness of inside peripheral shape of etch pitInfo
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- JP2001049395A JP2001049395A JP11227308A JP22730899A JP2001049395A JP 2001049395 A JP2001049395 A JP 2001049395A JP 11227308 A JP11227308 A JP 11227308A JP 22730899 A JP22730899 A JP 22730899A JP 2001049395 A JP2001049395 A JP 2001049395A
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- Prior art keywords
- thermal expansion
- low thermal
- shadow mask
- etching
- alloy
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、カラ−ブラウン管
内で使用されるシャドウマスク用Fe−Ni−Co系合
金で、特に低熱膨張特性に優れた材料に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe--Ni--Co alloy for a shadow mask used in a color cathode ray tube, and more particularly to a material excellent in low thermal expansion characteristics.
【0002】[0002]
【従来の技術】テレビやパソコンに用いられるブラウン
管の技術動向としては、最近、大型化・フラット化・高
精細化の方向へ進んでいる。これに伴って、シャドマス
ク材に要求される特性としては、現行の通常のFe−N
i系インバ−合金(Fe−36%Ni)で得られる熱膨
張特性よりも、さらに低熱膨張化が要求されている。2. Description of the Related Art The technical trend of cathode ray tubes used in televisions and personal computers has recently been increasing in size, flattening, and increasing definition. Along with this, the characteristics required for the shadow mask material include the current ordinary Fe-N
There is a demand for a lower thermal expansion than the thermal expansion characteristics obtained with an i-based invar alloy (Fe-36% Ni).
【0003】通常組成のFe−Ni系インバ−合金より
さらに低熱膨張化する手法として、下記の2通りの方法
が公表されている。1つは、主要成分がFe−36%N
iで、不純物を抑制することであり、あと1つは、Co
を添加してFe−Ni−Co系とすることである。これ
らの作用によって低熱膨張を図った公知例として、特開
昭61−76651、特開平7−3401、特開平8−
311622がある。また、Co量を最少限の添加量に
抑制したものとして、特開平8−209306、特開平
8−333638、特表平8−512363がある。The following two methods have been disclosed as methods for further reducing the thermal expansion of Fe--Ni-based invar alloys having a normal composition. One is that the main component is Fe-36% N
i is to suppress impurities, and the other is Co
To form a Fe—Ni—Co system. Known examples in which low thermal expansion is achieved by these effects are disclosed in JP-A-61-76651, JP-A-7-3401, and JP-A-8-801.
There is 311622. JP-A-8-209306, JP-A-8-33338, and JP-T-8-512363 are examples of those in which the amount of Co is suppressed to the minimum addition amount.
【0004】[0004]
【発明が解決しようとする課題】上記の手段は、優れた
低熱膨張特性を得る方法として有効である。しかし、こ
とシャドウマスク用材料となると、高精細な電子ビーム
通過孔を正確な形状にてエッチング形成できることが求
められることから、それに対応できるだけの優れたエッ
チング性も兼備させる必要がある。従来の方法の場合、
この見地からCo量の検討や微量元素の検討が十分とは
言えず、結果として例えば、低熱膨張特性を得るべくC
oの含有にてある程度のコスト向上を犠牲に払うもの
の、微量元素の調整をしないとエッチング性が悪いた
め、必ずしも割に合うものとは言えなかった。The above means is effective as a method for obtaining excellent low thermal expansion characteristics. However, in the case of a material for a shadow mask, it is required that a high-definition electron beam passage hole can be etched and formed in an accurate shape. With the traditional method,
From this viewpoint, the study of the amount of Co and the study of trace elements cannot be said to be sufficient. As a result, for example, in order to obtain low thermal expansion characteristics,
Although a certain cost improvement is sacrificed by the inclusion of o, the etching properties are poor unless the trace elements are adjusted.
【0005】[0005]
【課題を解決するための手段】本発明は、上記問題点を
解決し、実用化を図るために低熱膨張特性とエッチング
性の点からCo量と微量元素の成分範囲を仔細に調査し
たところ、下記の成分を有す材料が有効であることをつ
きとめた。すなわち、重量%で、Co:2.5%を超え
7%以下、(Ni+Co):35.5〜38%、Mn:
0.1%未満、B:0.0005〜0.004%を含有
し、残部実質的にFeからなるFe−Ni−Co系合金
である。In order to solve the above-mentioned problems and to put the invention into practical use, the present invention has conducted a detailed investigation on the amount of Co and the component range of trace elements from the viewpoint of low thermal expansion characteristics and etching properties. It has been found that a material having the following components is effective. That is, in terms of% by weight, Co: more than 2.5% and 7% or less, (Ni + Co): 35.5 to 38%, Mn:
Fe-Ni-Co-based alloy containing less than 0.1%, B: 0.0005 to 0.004%, and the balance substantially consisting of Fe.
【0006】そして、重量%で、Co:2.5%を超え
7%以下、(Ni+Co):35.5〜38%、Mn:
0.1%未満、Bを必須とした上でCaまたはMgのう
ちの1種または2種との総量(B+Ca+Mg)を0.
0005〜0.004%含有し、残部実質的にFeから
なるFe−Ni−Co系合金である。好ましくは、これ
ら本発明においてSを0.002%以下に抑制した、あ
るいはCを0.005%未満に抑制したFe−Ni−C
o系合金である。Then, in terms of% by weight, Co: more than 2.5% and 7% or less, (Ni + Co): 35.5-38%, Mn:
Less than 0.1%, B is indispensable, and the total amount (B + Ca + Mg) with one or two of Ca or Mg is 0.1%.
It is an Fe-Ni-Co-based alloy containing 0005 to 0.004% with the balance being substantially Fe. Preferably, in the present invention, Fe-Ni-C in which S is suppressed to 0.002% or less or C is suppressed to less than 0.005%.
It is an o-based alloy.
【0007】そして、これら本発明のFe−Ni−Co
系合金からなるシャドウマスクであって、優れた低熱膨
張特性に加え、エッチング孔内郭形状の円滑性にも優れ
たシャドウマスクである。The Fe—Ni—Co of the present invention
The shadow mask is made of a base alloy and has excellent low thermal expansion characteristics and excellent smoothness of the inner shape of the etching hole.
【0008】[0008]
【発明の実施の形態】本発明の最たる特徴は、優れたエ
ッチング性と低熱膨張特性を備えた合金を達成すべく、
そのインバー合金としてのCo量と微量元素の成分範囲
による各特性への影響、さらには、エッチングによって
形成されるエッチング孔の内郭形状に生じる現象をも詳
細に考慮した結果として、本発明の合金を見いだすに至
ったところにある。以下、本発明を構成する合金成分お
よびその限定理由について説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The most important feature of the present invention is to achieve an alloy having excellent etching properties and low thermal expansion properties.
As a result of taking into account in detail the effect of each of the Co content and the trace element range on the properties of the Invar alloy as well as the phenomenon occurring in the inner shape of the etching hole formed by etching, the alloy of the present invention It has been found. Hereinafter, the alloy components constituting the present invention and the reasons for the limitation will be described.
【0009】Co:Fe−Ni系インバ−合金において
熱膨張係数を下げる元素として知られている。本発明の
場合、後述するMn量の調整に加えて、その低Mn化に
よるエッチング性への支障をも解決することで、本発明
のCo含有量による効果を基本とする優れた低熱膨張特
性を達成でき、しかも優れたエッチング性をも達成でき
る手段を見いだしたのである。Co: It is known as an element for lowering the coefficient of thermal expansion in an Fe-Ni-based invar alloy. In the case of the present invention, in addition to the adjustment of the amount of Mn to be described later, by solving the problem of the etching property due to the low Mn, the excellent low thermal expansion characteristic based on the effect of the Co content of the present invention is achieved. We have found a means that can achieve this and also achieve excellent etching properties.
【0010】特に本発明の合金をシャドウマスクに適用
した場合、例えばブラウン管の色ずれの改善効果として
通常のインバー合金によるものの熱膨張係数に対し30
%以上低下させることで、その有位差が得られる。具体
的には2.5%を超えるCo量にて優れた低熱膨張特性
を達成するものである。なお、Coは原料コストが非常
に高いことに加え、7%を超える含有量にてその低熱膨
張特性の向上効果も飽和することから、本発明において
は含有量を2.5%を超え7%以下とした。[0010] In particular, when the alloy of the present invention is applied to a shadow mask, for example, the effect of improving the color shift of a cathode ray tube is 30% less than the thermal expansion coefficient of an ordinary Invar alloy.
%, The significant difference can be obtained. Specifically, excellent low thermal expansion characteristics are achieved with a Co content exceeding 2.5%. In addition, Co has a very high raw material cost and a content exceeding 7% saturates the effect of improving the low thermal expansion characteristic. Therefore, in the present invention, the content of Co exceeds 2.5% to 7%. It was as follows.
【0011】Mn:熱間加工性を改善する元素である
が、Fe−Ni系インバ−合金やFe−Ni−Co系イ
ンバ−合金の熱膨張係数を大きくする作用があり、本発
明のCo量とによる相互効果を十分に達成するために
も、本発明においてはその含有量を0.1%未満とし
た。Mn: an element that improves hot workability, but has an effect of increasing the thermal expansion coefficient of an Fe—Ni-based invar alloy or an Fe—Ni—Co-based invar alloy. In the present invention, the content is set to less than 0.1% in order to sufficiently achieve the mutual effect of the above.
【0012】B,Mg,Ca:Mn量を従来の0.25
%レベルから0.1%未満に制限したことによって、エ
ッチング孔の内孔輪郭がギザギザ状に変形するという新
たな問題(図2)が発生し、この場合、高精細を要求さ
れるシャドウマスク(特にパソコン用シャドウマスク)
への適用に問題を生じる恐れがある。そこで、種々微量
元素を調査したところ、これらの元素を適量含有せしめ
ることでこの問題が解消でき、正常なエッチング孔を形
成でき得ることを突きとめた。[0012] B, Mg, Ca: Mn amount is 0.25
By limiting the% level to less than 0.1%, a new problem (FIG. 2) arises in that the inner contour of the etching hole is jagged, and in this case, a shadow mask ( Especially shadow masks for personal computers)
May cause problems in application to Then, when various trace elements were investigated, it was found that by incorporating these elements in appropriate amounts, this problem could be solved and a normal etching hole could be formed.
【0013】つまり、上記エッチング孔の内孔輪郭がギ
ザギザに変形するという現象は、Mn量を減らすことに
よってマトリックス中のSが固定されなくなり、粒界に
存在するS量が増えるため、粒界腐食を受けやすくなっ
た結果として生じるものと考えられる。これを解消する
ために微量元素のB,Ca,Mgの適量含有が有効であ
り、本発明の場合、特にその効果を得るに有効であるB
を0.0005%以上とする。そして、Bに同様の効果
を期待できるCa,Mgについては、Bの含有を必須と
した上でその1種または2種との総量(B+Ca+M
g)を0.0005%以上とする。That is, the phenomenon that the inner hole contour of the etching hole is jagged is caused by the fact that S in the matrix is not fixed by reducing the amount of Mn, and the amount of S existing in the grain boundary increases. It is thought to be the result of increased susceptibility. In order to solve this problem, it is effective to contain a proper amount of trace elements B, Ca and Mg. In the case of the present invention, B is particularly effective for obtaining the effect.
Is set to 0.0005% or more. As for Ca and Mg which can be expected to have the same effect on B, the content of B is essential and the total amount of one or two of them (B + Ca + M
g) is 0.0005% or more.
【0014】しかし、それらの総量が0.004%を超
えるとエッチング速度・ピットの点から問題が発生す
る。つまり、Bの場合は、粒界の腐食抵抗が上がり、エ
ッチング速度を大幅に低下させる現象、CaやMgの場
合は、腐食されやすい介在物を形成して、大きなエッチ
ングピットを発生させる現象が生じる。従って、本発明
における適正な含有範囲はB:0.0005%〜0.0
04%であって、Ca,Mgの効果を期待する場合に
は、Bの含有を必須とした上でその1種または2種との
総量(B+Ca+Mg):0.0005%〜0.004
%である。さらに(Ca+Mg)の含有量が0.002
%以下になるように添加することが好ましい。加えて、
Sを0.002%以下に抑制することが好ましい。However, if their total amount exceeds 0.004%, problems arise in terms of etching rate and pits. In other words, in the case of B, the phenomenon that the corrosion resistance of the grain boundaries increases and the etching rate is greatly reduced, and in the case of Ca and Mg, a phenomenon occurs in which inclusions that are easily corroded are formed and large etching pits are generated. . Therefore, the appropriate content range in the present invention is B: 0.0005% to 0.005%.
In the case where the effect of Ca and Mg is expected, the content of B is indispensable and the total amount of one or two of them (B + Ca + Mg): 0.0005% to 0.004
%. Further, the content of (Ca + Mg) is 0.002
% Is preferably added. in addition,
It is preferable that S is suppressed to 0.002% or less.
【0015】C:優れた低熱膨張特性を達成する上で低
Mn化を図る本発明のFe−Ni−Co系合金におい
て、C含有量の調整はその低Mn化によるエッチング性
への支障を補うに有効である。本発明の合金は、その優
れた低熱膨特性を達成するにCoおよびMn量の調整が
不可欠であり、結果としてMnが0.1%未満という従
来の0.25%レベルに比して低いものである。すなわ
ち、本発明では、この低Mn化という従来からの改良に
よって新たに生じた上記エッチング性の劣化に対して、
それを十分に補うだけの手段を考慮する必要があり、種
々検討を行なった。その結果、このMn:0.1%未満
のFe−Ni−Co系合金に生じるエッチング性の劣化
は、C量の調整によって補える知見を得た。具体的には
C含有量を0.005%未満とすることであり、S含有
量を0.002%以下に調整することに合わせて有効で
ある。C: In the Fe—Ni—Co-based alloy of the present invention, which aims to reduce the Mn in order to achieve excellent low thermal expansion characteristics, the adjustment of the C content compensates for the hindrance to etching due to the low Mn. It is effective for In the alloy of the present invention, adjustment of the amounts of Co and Mn is indispensable to achieve the excellent low thermal expansion properties, and as a result, the Mn content is lower than the conventional 0.25% level of less than 0.1%. It is. That is, in the present invention, the above-mentioned deterioration of the etching property newly caused by the conventional improvement of Mn reduction is
It is necessary to consider a means sufficient to compensate for this, and various studies were made. As a result, it has been found that the deterioration of the etching property which occurs in the Fe-Ni-Co alloy having Mn of less than 0.1% can be compensated for by adjusting the C content. Specifically, it is effective to adjust the C content to less than 0.005%, and to adjust the S content to 0.002% or less.
【0016】そして、本発明では、Coの含有量に加え
て(Ni+Co)量をも最適に調整することが、優れた
低熱膨張特性の達成に重要である。具体的には(Ni+
Co)量を35.5〜38%に調整することでシャドウ
マスクへの適用に十分な低熱膨張特性を維持することが
できる。好ましくは、Fe−36%Ni材よりも30%
以上低い熱膨張係数を達成するに有効な組成範囲とし
て、Co:3.3%の場合(Ni+Co)が36.0〜
37.2%、Co:5%の場合、(Ni+Co)が3
5.7〜37.7%である。In the present invention, it is important to optimally adjust the (Ni + Co) amount in addition to the Co content in order to achieve excellent low thermal expansion characteristics. Specifically, (Ni +
By adjusting the Co) amount to 35.5 to 38%, it is possible to maintain low thermal expansion characteristics sufficient for application to a shadow mask. Preferably, 30% more than Fe-36% Ni material
As a composition range effective for achieving the above low thermal expansion coefficient, the case of Co: 3.3% (Ni + Co) is 36.0 to 36.0.
When 37.2% and Co: 5%, (Ni + Co) is 3
5.7-37.7%.
【0017】なお、本発明のFe−Ni−Co系合金の
場合、例えば溶製過程での脱酸剤として使用されるSi
の含有も可能であり、具体的には0.1%以下、好まし
くは0.05%以下のSiを含んでもよい。In the case of the Fe—Ni—Co alloy of the present invention, for example, Si used as a deoxidizing agent in the melting process is used.
Is also possible, and specifically, may contain 0.1% or less, preferably 0.05% or less of Si.
【0018】以上に述べた本発明のFe−Ni−Co系
合金であれば、例えばシャドウマスクへ適用した場合、
その優れた低熱膨張特性に加えて、正確な孔形状を有し
た電子ビーム通過孔も形成されるので、シャドウマスク
材として最適である。If the above-described Fe—Ni—Co alloy of the present invention is applied to, for example, a shadow mask,
In addition to its excellent low thermal expansion characteristics, an electron beam passage hole having an accurate hole shape is also formed, so that it is most suitable as a shadow mask material.
【0019】[0019]
【実施例】(実施例1)Fe−Ni−Co系合金を真空
誘導溶解炉で溶解−鋳造して、表1に記載の成分を有す
るインゴットを作製した。このインゴットを鍛造して、
厚さ10mmの板材とした。熱膨張係数の測定は、鍛造
後の板材から5mmφ×20mmLの試験片を作製した
後、800℃×30分、N2雰囲気の条件で焼鈍したも
のを供試材とした。なお、熱膨張係数の測定温度範囲
は、30〜100℃とした。結果を表1にまとめて示
す。EXAMPLES (Example 1) An Fe-Ni-Co alloy was melted and cast in a vacuum induction melting furnace to produce an ingot having the components shown in Table 1. Forging this ingot,
A plate material having a thickness of 10 mm was used. For the measurement of the coefficient of thermal expansion, a test piece of 5 mmφ × 20 mmL was prepared from the forged plate material, and then annealed at 800 ° C. for 30 minutes in a N 2 atmosphere condition. The measurement temperature range of the coefficient of thermal expansion was 30 to 100 ° C. The results are summarized in Table 1.
【0020】[0020]
【表1】 [Table 1]
【0021】表1の結果を、各Co量に応じた熱膨張係
数に及ぼす(Ni+Co)量の影響として図3に纏めて
示す。図3より、本発明のMn量を満たす合金であって
も、Coを含まないNi単独のFe−Ni系合金に比し
て、本発明のCo量を2.5%超〜7%かつ(Ni+C
o)量を35.5〜38%に調整した合金の方が熱膨張
係数が小さく、シャドウマスクとした場合の色ずれ改善
に有効な低熱膨張特性をも達成できる。そして、熱膨張
係数がFe−36%Ni材よりも30%以上低くなる組
成範囲として、Co:3.3%の場合(Ni+Co)が
36.0〜37.2%、Co:5%の場合、(Ni+C
o)が35.7〜37.7%であることが判る。The results in Table 1 are summarized in FIG. 3 as the effect of the (Ni + Co) amount on the thermal expansion coefficient corresponding to each Co amount. From FIG. 3, even if the alloy satisfies the Mn content of the present invention, the Co content of the present invention is more than 2.5% to 7% and ( Ni + C
o) An alloy whose amount is adjusted to 35.5 to 38% has a smaller coefficient of thermal expansion, and can also achieve low thermal expansion characteristics effective for improving color misregistration when used as a shadow mask. The composition range in which the thermal expansion coefficient is 30% or more lower than that of the Fe-36% Ni material is as follows: Co: 3.3% (Ni + Co): 36.0 to 37.2%; Co: 5% , (Ni + C
o) is 35.7 to 37.7%.
【0022】(実施例2)上記実施例1と同様の製法に
より、表2に記載の成分を有するインゴットを作製した
後、鍛造・熱間加工により、厚さ3mmの板材とした。
そして、冷間圧延と焼鈍を繰り返して厚さ0.12mm
の帯鋼とし、エッチング性評価用の薄板供試材とした。
エッチング性は、FeCl3溶液を用いて濃度:47B
e度、温度:50℃、スプレ−圧力:2Kg/cm2の
条件で、シャドウマスクの形状にエッチング孔を形成し
た後、エッチング孔内孔輪郭形状と速度とピットの発生
状態で判定を行った。(Example 2) An ingot having the components shown in Table 2 was produced by the same manufacturing method as in Example 1 described above, and a plate material having a thickness of 3 mm was formed by forging and hot working.
Then, cold rolling and annealing are repeated to obtain a thickness of 0.12 mm.
And a thin plate test material for etching property evaluation.
The etching property is determined by using a FeCl 3 solution at a concentration of 47B.
After forming an etching hole in the shape of a shadow mask under the conditions of e degree, temperature: 50 ° C., and spray pressure: 2 kg / cm 2 , judgment was made based on the contour shape of the inside of the etching hole, the speed, and the state of pit generation. .
【0023】なお判定においては、孔内輪郭形状につい
て滑らかものが○、多少のギザギザ状変形が認められる
もシャドウマスクとしての使用に差し支えのないものを
△、ギザギザ状変形が認められシャドウマスクとしての
使用に支障をきたす恐れのあるものを×とした。ピット
発生状態については発生が認められないものが○、多少
の発生が認められるもシャドウマスクとしての使用に差
し支えのないものを△、発生が認められシャドウマスク
としての使用に支障をきたす恐れのあるものを×とし
た。エッチング速度については通常のシャドウマスク製
造工程におけるエッチング速度に劣らないものを○、通
常のエッチング速度に多少劣るも製造上問題ないものを
△、エッチング速度が遅くその製造工程に支障をきたす
恐れのあるものを×とした。それら結果を表2に併せて
示す。In the judgment, the outline shape in the hole was ○ for a smooth one, a little jagged deformation was recognized, but it was acceptable for use as a shadow mask, and a jagged deformation was recognized for a shadow mask. Those that could hinder use were marked as x. Regarding the state of pit generation, ○ indicates that no occurrence was observed, も の indicates that some occurrence was recognized but did not interfere with use as a shadow mask, △ indicates occurrence of pits, which may hinder use as a shadow mask Those were marked as x. Regarding the etching rate, the one that is not inferior to the etching rate in the normal shadow mask manufacturing process is evaluated as ○, the one that is slightly inferior to the normal etching speed but has no problem in manufacturing is Δ, and the etching speed is slow and may interfere with the manufacturing process. Those were marked as x. The results are shown in Table 2.
【0024】[0024]
【表2】 [Table 2]
【0025】これから、Bを0.0005%以上含有す
ると、あるいはBを必須含有とした上でB,Ca,Mg
を総量にて0.0005%以上含有すると、エッチング
孔内面形状が改善されるが、それらが0.004%を超
えるとエッチング速度またはピットの点で問題が発生す
ることが判る。図2は表2のNo.1のエッチング孔
を、図1はNo.2のエッチング孔を300倍、100
0倍の電子顕微鏡にて観察したものである。本発明を満
たす図1のエッチング孔内面形状が滑らかな円形を呈し
ており、図2に比して改善されていることが判る。From now on, if B is contained by 0.0005% or more, or if B is essential, B, Ca, Mg
Is contained in a total amount of 0.0005% or more, the shape of the inner surface of the etching hole is improved. However, if the content exceeds 0.004%, a problem occurs in the etching rate or the pit. FIG. 1 is the etching hole of FIG. 2 times the etching hole 300 times, 100
Observed with a 0 × electron microscope. The inner shape of the etching hole shown in FIG. 1 that satisfies the present invention has a smooth circular shape, and is found to be improved as compared with FIG.
【0026】[0026]
【発明の効果】本発明によれば、従来のFe−Ni系イ
ンバ−合金より低熱膨張材が得られ、しかも、コスト・
エッチング性についても、シャドウマスクの要求コスト
・性能を満たした材料が得られるため、実用化が可能と
なり、ブラウン管の画質の向上が達成できる。According to the present invention, a material having a lower thermal expansion can be obtained than a conventional Fe-Ni-based invar alloy, and the cost and cost can be reduced.
As for the etching property, a material that satisfies the required cost and performance of the shadow mask can be obtained, so that it can be put to practical use and the image quality of the CRT can be improved.
【図1】本発明の効果の一例を示す電子顕微鏡写真であ
る。FIG. 1 is an electron micrograph showing an example of the effect of the present invention.
【図2】比較例を示す電子顕微鏡写真である。FIG. 2 is an electron micrograph showing a comparative example.
【図3】本発明の効果の一例を示す図である。FIG. 3 is a diagram showing an example of the effect of the present invention.
Claims (5)
下、(Ni+Co):35.5〜38%、Mn:0.1
%未満、B:0.0005〜0.004%を含有し、残
部実質的にFeからなることを特徴とするエッチング性
および低熱膨張特性に優れたFe−Ni−Co系合金。(1) In terms of weight%, Co: more than 2.5% and 7% or less, (Ni + Co): 35.5-38%, Mn: 0.1
%, B: 0.0005 to 0.004%, the balance being substantially Fe, Fe-Ni-Co-based alloy excellent in etching properties and low thermal expansion properties.
下、(Ni+Co):35.5〜38%、Mn:0.1
%未満、Bを必須とした上でCaまたはMgのうちの1
種または2種との総量(B+Ca+Mg)を0.000
5〜0.004%含有し、残部実質的にFeからなるこ
とを特徴とするエッチング性および低熱膨張特性に優れ
たFe−Ni−Co系合金。2. Co% by weight, more than 2.5% and 7% or less, (Ni + Co): 35.5-38%, Mn: 0.1
%, B is essential and one of Ca and Mg
0.000 for the total amount (B + Ca + Mg) of the species or two species
An Fe-Ni-Co-based alloy excellent in etching properties and low thermal expansion characteristics, characterized in that it contains 5 to 0.004% and the balance substantially consists of Fe.
特徴とする請求項1または2に記載のエッチング性およ
び低熱膨張特性に優れたFe−Ni−Co系合金。3. The Fe—Ni—Co alloy according to claim 1 or 2, wherein S is suppressed to 0.002% or less.
特徴とする請求項1ないし3のいずれかに記載のエッチ
ング性および低熱膨張特性に優れたFe−Ni−Co系
合金。4. The Fe—Ni—Co-based alloy according to claim 1, wherein C is suppressed to less than 0.005%.
e−Ni−Co系合金からなることを特徴とするエッチ
ング孔内郭形状の円滑性に優れたシャドウマスク。5. The F according to claim 1, wherein
A shadow mask excellent in smoothness of an inner shape of an etching hole, which is made of an e-Ni-Co alloy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11227308A JP2001049395A (en) | 1999-08-11 | 1999-08-11 | Iron-nickel-cobalt alloy excellent in etching characteristic and low thermal expansion characteristic, and shadow mask excellent in smoothness of inside peripheral shape of etch pit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11227308A JP2001049395A (en) | 1999-08-11 | 1999-08-11 | Iron-nickel-cobalt alloy excellent in etching characteristic and low thermal expansion characteristic, and shadow mask excellent in smoothness of inside peripheral shape of etch pit |
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Publication Number | Publication Date |
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JP2001049395A true JP2001049395A (en) | 2001-02-20 |
Family
ID=16858781
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JP11227308A Pending JP2001049395A (en) | 1999-08-11 | 1999-08-11 | Iron-nickel-cobalt alloy excellent in etching characteristic and low thermal expansion characteristic, and shadow mask excellent in smoothness of inside peripheral shape of etch pit |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003085148A1 (en) * | 2002-04-05 | 2003-10-16 | Jfe Steel Corporation | Low-thermal expansion alloy thin sheet and its manufacturing method |
WO2003106721A1 (en) * | 2002-06-18 | 2003-12-24 | Jfeスチール株式会社 | Low-thermal expansion alloy thin sheet and its manufacturing method |
WO2004053179A1 (en) * | 2002-12-12 | 2004-06-24 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy, method for the production and use thereof |
WO2007087786A1 (en) * | 2006-02-02 | 2007-08-09 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy |
-
1999
- 1999-08-11 JP JP11227308A patent/JP2001049395A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003085148A1 (en) * | 2002-04-05 | 2003-10-16 | Jfe Steel Corporation | Low-thermal expansion alloy thin sheet and its manufacturing method |
WO2003106721A1 (en) * | 2002-06-18 | 2003-12-24 | Jfeスチール株式会社 | Low-thermal expansion alloy thin sheet and its manufacturing method |
WO2004053179A1 (en) * | 2002-12-12 | 2004-06-24 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy, method for the production and use thereof |
JP2006509906A (en) * | 2002-12-12 | 2006-03-23 | ティッセンクルップ ファオ デー エム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Iron-nickel-cobalt alloy, method for producing the same and use thereof |
WO2007087786A1 (en) * | 2006-02-02 | 2007-08-09 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy |
GB2447856A (en) * | 2006-02-02 | 2008-10-01 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy |
ES2330186A1 (en) * | 2006-02-02 | 2009-12-04 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy |
GB2447856B (en) * | 2006-02-02 | 2011-09-07 | Thyssenkrupp Vdm Gmbh | Iron-nickel-cobalt alloy |
CN101379210B (en) * | 2006-02-02 | 2012-07-04 | 蒂森克鲁普德国联合金属制造有限公司 | Iron-nickel-cobalt alloy |
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