JP2001048501A - Heat radiating type reactional furnace for producing water - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a reduction in temperature of a reactional furnace for producing water and increase the ratio of water production without increasing the size of the reactional furnace. SOLUTION: This heat radiating type reactional furnace for producing water comprises a reactional furnace body 1 prepared by combining a furnace body member 2 on the inlet side with a furnace body member 3 on the outlet side and forming a spatial part 6 in the interior thereof, an inlet passage 7 for a raw material gas bored in the furnace body member 2 on the inlet side and capable of introducing the raw material gas into the spatial part 6, a joint 9 connected to the inlet passage 1 for the raw material gas and used for feeding the raw material gas, an outlet passage 10 for the gas of water capable of leading out the produced water from the spatial part 6 bored in the furnace body member 3 on the outlet side, a joint 12 connected to the outlet passage 10 for the gas of water and used for leading out the gas of water, a fin substrate 17 brought into close contact with the outer wall surfaces of the furnace body members 2 and 3 and many fins 18 stood on the fin substrate 17. The generated heat is forcedly radiated with the heat radiating fins 18 to reduce the temperature of the reactional furnace. The heat radiating fins 18 are subjected to an alumite processing to increase the thermal emissivity and remarkably increase the heat radiation efficiency.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reactor for generating water used mainly in semiconductor manufacturing equipment.
The present invention relates to a heat-dissipating water-reaction reactor capable of increasing the amount of water generated within a safe temperature range by forcibly radiating reaction heat generated by a water-forming reaction by heat-dissipating fins.

[0002]

2. Description of the Related Art Moisture generating reactors are used in fields requiring high-purity water. For example, with a silicon oxide film by a moisture oxidation method in a semiconductor manufacturing process,
In some cases, ultrapure water exceeding 1000 cc / min under standard conditions is required. The applicant has previously developed a reactor for generating water having a structure as shown in FIG. 6 and has been conducting various kinds of ultrapure water generation tests.

[0003] That is, the reactor body 1 of the moisture generating reactor shown in FIG. 6 has a welding portion 4 formed by joining an inlet-side furnace body member 2 having a recess 2a and an outlet-side furnace body member 3 having a recess 3a. It is assembled by being integrated via Recess 2a
On the inner wall surface of the space portion 6 formed by being surrounded by the recesses 3a, generation of water by a so-called catalytic reaction proceeds.

[0004] A raw material gas inlet passage 7 is formed in the center of the inlet side furnace body member 2, and an inlet side reflector 8 is provided inside thereof.
Further, a source gas supply joint 9 is provided outside thereof. At the same time, a moisture gas outlet passage 10 is formed in the center of the outlet side furnace main body member 3, an outlet side reflection diffuser 11 is provided inside thereof, and a moisture gas deriving joint 12 is provided outside thereof. . In addition, the entrance side reflection plate 8 and the exit side reflection diffuser 1
1 is fixed by mounting screws 5.

A barrier film 13a made of a nitride such as TiN is formed on the inner wall surface of the inlet-side furnace body member 2. Further, a platinum coating film 13 is formed on the inner wall surface of the outlet side furnace main body member 3. This platinum coating film 13 is a barrier film 13a made of a nitride such as TiN.
And a platinum film 13b formed by a vapor deposition method, an ion plating method, or the like is fixed thereon. The platinum coating film 13 has a catalytic action of generating a moisture gas from a source gas.

[0006]

The operation of the above-mentioned reactor for generating moisture will be described. The hydrogen gas and the oxygen gas, which are the source gases, are supplied from the source gas supply joint 9 via the inlet side reflector 8 to the space 6. To be introduced. The raw material gas is dispersed throughout the space 6 by the inlet-side reflecting plate 8 and the outlet-side reflecting diffuser 11, and the moisture generation reaction proceeds by the catalytic action of the platinum coating film 13. The product moisture gas, that is, water vapor and unreacted raw material gas, is sent out to the next stage device through the moisture gas deriving joint 12.

However, this water generating reaction furnace has a drawback that the entire reaction furnace and steam are excessively heated by the generated reaction heat because the water generation reaction is an exothermic reaction. For example, when steam is generated at a generation rate of 1000 cc / min, the steam temperature becomes 40
Reaches 0-450 ° C. If the amount of generated moisture is further increased, the water vapor temperature exceeds 450 ° C. and approaches the ignition temperature of hydrogen gas and oxygen gas of 560 ° C., which is a very dangerous state.

In order to avoid this danger, an upper limit of the amount of generated water has been set to 1000 in a water generating reactor of this type.
cc / min. As a measure to increase the amount of water generated, the size of the reactor was increased, but increasing the size not only increased the cost but also reduced the versatility and ease of use of the reactor. Was.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned drawbacks, and a heat radiation type water generating reactor according to the present invention has an inlet side furnace body member and an outlet side furnace body member. A reactor body having a space formed therein, a raw material gas inlet passage perforated in the inlet side furnace body member for introducing a raw material gas into the space, and a raw material gas supply passage connected to the raw material gas inlet passage. A joint, a moisture gas outlet passage perforated in the outlet side furnace main body member to guide generated water from a space portion, a moisture gas deriving joint connected to the moisture gas outlet passage, and an outer wall surface of the furnace main body member. It is characterized by comprising a fin substrate adhered thereto and a number of heat dissipating fins erected on the fin substrate.

[0010] Further, there is proposed a heat radiation type water generating reactor in which a heater and a heater press plate are interposed between the outlet side furnace main body member and the fin substrate, and the fin substrate is disposed in close contact with the heater press plate.

[0011] A heat-dissipating moisture-generating reactor in which the heat-dissipating fins are arranged substantially centrally symmetrically or substantially axially symmetrically around a joint for supplying a raw material gas or a joint for deriving a moisture gas is proposed.

Further, the present invention proposes a heat dissipating moisture generating reactor in which the surface of the heat dissipating fin is anodized to improve the heat emissivity.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION As a result of intensive studies to prevent excessive self-heating of a moisture generating reactor, the present inventors have set up a large number of radiating fins on the outer wall surface of the moisture generating reactor. As a result, it succeeded in suppressing an excessive rise in temperature. As a result, the amount of generated water can be increased from 1000 cc / min to 2000 without increasing the size of the reactor for generating water.
It was possible to increase to cc / min.

Further, it was confirmed that the heat emissivity of the heat radiation fin was successfully improved by anodizing the surface of the heat radiation fin, and that the amount of generated water could be increased to 2500 cc / min.

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of a reactor main body of a moisture generating reactor according to the present invention. The same parts as those in FIG.

The reactor body 1 includes an inlet-side furnace body member 2,
Recess 2a, outlet side furnace body member 3, recess 3a, weld 4,
Mounting screw, space 6, raw material gas inlet passage 7, inlet side reflector 8, raw material gas supply joint 9, moisture gas outlet passage 1
0, outlet-side reflective diffuser 11, moisture gas deriving joint 12,
It comprises a platinum coating film 13, a barrier film 13a, a platinum film 13b, a radiator 14, a heater 15, and a heater holding plate 16.

FIG. 2 is a plan view of the radiator 14, and FIG.
FIG. 2 is a sectional view taken along line II. The heat dissipating body 14 is formed by arranging a large number of heat dissipating fins 18 on the surface of a fin substrate 17 in a vertical line. A through hole 19 for a joint is formed in the center, and a cutout 20 is provided from the through hole 19 for a joint to one side.
Further, bolt mounting holes 21 for the furnace body members 2 and 3 are formed at four corners of the fin substrate 17.

Fin substrate 17 and heat dissipating fin 18
Are formed substantially symmetrically about the joint through hole 19. In FIG. 2, the notch 20 is formed to deviate from the complete central symmetry. However, the central symmetry allows the heat radiation body 14 to exhibit the central symmetry of the heat radiation characteristics.

Due to this central symmetry, it is designed that the temperatures at two points on the diameter which are equidistant from the center are almost equal. Inlet furnace body member 2 and outlet furnace body member 3
By centralizing the heat radiation characteristics, the temperature distribution in the space 6 can also be centrally symmetric, and the water generation reaction can be made centrally symmetrical and uniform, and the local high temperature inside the reactor main body 1 can be prevented. That is, local ignition of hydrogen gas and oxygen gas can be prevented, the safety of the reactor for generating moisture can be enhanced, and the life can be extended.

FIG. 4 is a side view in which the radiator 14 is fixed to the inlet side furnace body member 2, and FIG. 1 corresponds to a sectional view taken along line II-II of FIG.

In order to fix the radiator 14 to the inlet side furnace main body member 2, the raw gas supply joint 9 is inserted through the joint through hole 19, and the fin substrate 17 is adhered to the outer wall surface of the inlet side furnace main body member 2. Then, it is fastened with a bolt (not shown) through the bolt mounting hole 21.

In order to fix the heat radiator 14 to the outlet side furnace body member 3, the moisture gas deriving joint 12 is inserted into the joint through hole 19 through the heater 15 and the heater pressing plate 16. After that, the fin substrate 17 is brought into close contact with the heater holding plate 16 and fastened with bolts through the bolt mounting holes 21.

The present inventors have conducted various studies in order to increase the thermal emissivity of the radiator 14, and as a result, have found that the thermal emissivity can be increased by anodizing the surface of the heat dissipating fins 18. .

Generally, alumite processing is a processing method for forming a thin oxide film on the surface of aluminum or an aluminum alloy, and in recent years, colored alumite processing has also become possible. However, these general alumite processes are for enhancing corrosion resistance and wear resistance, and the effect of increasing the thermal emissivity has been found by the present inventors.

The larger the alumite processing area is, the more the radiator 1
Since the heat radiation characteristics of the heat radiation fin 4 are improved, it is desired that not only the surface of the heat radiation fin 18 but also the surface of the fin substrate 17 be anodized.

The present inventors examined the heat radiation effect of the heat radiation fins with alumite and the heat radiation fins without alumite.
An operation test of three types of water generating reaction furnaces without a heat radiating fin was performed.

FIG. 5 is an end view of the outlet-side furnace body member 3. Holes are formed in the outlet-side body at intervals of 1 cm from the center, and five thermocouples for temperature measurement P _{1 to} P are located at a position 1 mm from the inner wall surface.
₅ was arranged, and the temperature distribution in the radial direction of the space 6 on the downstream side was measured. In addition, a thermocouple P for measuring the temperature on the downstream side is arranged at a position 3 cm from the periphery, so that the degree of deviation from the set temperature of the heater 15 can be determined. Further, the inlet-side furnace main body member 2 facing the thermocouple P
The upstream temperature was also measured at the position.

The water generation condition was set to H ₂ / O ₂ = 10/6, and water was generated under oxygen-rich conditions. This is because the oxygen-rich one has a higher moisture generation rate and can keep the unreacted raw material gas low. The measurement results are shown in Table 1. Measured temperature of the thermocouple P ₁ has not been published.

[0029]

[Table 1]

As can be seen from Table 1, the downstream temperature almost coincides with the temperature set for the temperature control.
The temperature control setting of 5 works effectively. This temperature control setting is performed in order to send the generated moisture as steam to a subsequent device, and is set to 300 ° C. as an example. In addition, the fact that the upstream temperature is lower than the downstream temperature indicates that there is almost no moisture generation reaction in the space 6 on the upstream side, that is, on the inlet side.

In the space 6 on the outlet side, the moisture generation reaction proceeds by the platinum catalyst, so that the temperature of the space 6 is distributed vertically. Thermocouple P ₄ in the center position of 4cm is P ₂ ~
Shows the highest temperature in the P _5, water generation or heat at this position means that easily concentrated. This is because the greater the amount of generated water, the greater the amount of self-heating at that position. Here, the unit of the amount of generated water is SLM, that is, liter / minute.

Assuming that the upper limit temperature of the safe operation of the water generating reactor is 450 ° C., the amount of water generated when the thermocouple P ₄ becomes 450 ° C. or less can be defined as the amount of water generated in the safe operation region. Therefore, 1 SLM without fins, 2 SLM with fins without alumite, and 2.5 SLM with fins with hard alumite are the upper limit of water generation. In other words, it was found that the amount of generated water can be doubled by simply attaching the fins to the case without the fins, and the amount of generated water can be increased by 2.5 times with the fins with alumite.

Although the alumite is a hard alumite having a thickness of 20 μm, even in the case of a colored alumite (black) having a thickness of 20 μm or a hard alumite having a thickness of 5 to 50 μm, the indicated temperature of the thermocouples P _{2 to} P ₅ is The agreement was within a range of several degrees Celsius.

Table 2 shows the results of measuring the temperature of the moisture generation reaction furnace when the thickness of the alumite and the type of the alumite were changed with the amount of generated water being 2.5 SLM.

[0035]

[Table 2]

In summary, the heat radiation effect can be obtained by attaching the heat radiation fins, and the temperature distribution can be reduced. Conversely, the amount of generated water can be approximately doubled. Also, by applying alumite treatment to the heat dissipation fins,
The thermal emissivity (emissivity) is improved, and the temperature can be reduced to about 50 ° C. as compared to the case without alumite. The amount of generated water can be increased by about 2.5 times, and there is little dependence on the type and thickness of alumite.

The results in Table 1 are for the heat-radiating fins arranged centrally symmetrically as shown in the drawing, but similar heat-radiating effects can be obtained with the heat-radiating fins arranged substantially axially symmetrically. Here, the term “axially symmetric” refers to, for example, a case where the heat radiation fins are arranged concentrically. In the axially symmetric arrangement, the above-mentioned temperature distribution also has axial symmetry, and the uniformity of the moisture generation in the space 6 can be increased.

The present invention is not limited to the above examples and embodiments, but includes various modifications and design changes within the technical scope of the present invention without departing from the technical concept of the present invention. is there.

[0039]

According to the first aspect of the present invention, by forcibly radiating the heat of water generation through the radiating fins, it is possible to lower the temperature in the reaction furnace and to increase the amount of water generated. it can.

According to the second aspect of the present invention, the moisture generated by maintaining the inside of the reaction furnace at an appropriate temperature by the heater can be led out to the subsequent device as a stable steam flow.

According to the third aspect, since the heat dissipating fins are arranged substantially centrally symmetrically or substantially axially symmetrically, the temperature distribution in the reaction furnace can be made centrally symmetrical or axially symmetrical.
It is possible to prevent local high temperature and stably and smoothly generate water in the reactor.

According to the fourth aspect, the surface of the radiating fins is anodized to improve the thermal emissivity, so that the temperature inside the reaction furnace can be further reduced, and the amount of generated water can be further increased. Can be realized. The present invention has excellent practical effects as described above.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a reactor main body of a reactor for generating moisture according to the present invention.

FIG. 2 is a plan view of a radiator according to the present invention.

FIG. 3 is a sectional view taken along line II of FIG. 2;

FIG. 4 is a side view in which a radiator is fixed to an inlet-side furnace main body member.

FIG. 5 is an end view of an outlet-side furnace main body member.

FIG. 6 is a longitudinal sectional view of a conventional moisture generating reactor.

[Explanation of symbols]

1 is a reactor body, 2 is an inlet side furnace body member, 2a is a concave portion,
3 is an outlet side furnace body member, 3a is a concave portion, 4 is a welded portion, 5 is a mounting screw, 6 is a space portion, 7 is a raw material gas inlet passage, 8 is an inlet side reflector, and 9 is a raw material gas supply joint. 10 is a moisture gas outlet passage, 11 is an outlet side reflection diffuser, 12 is a moisture gas deriving joint, 13 is a platinum coating film, 13a is a barrier film, 13b is a platinum film, 14 is a radiator, 15 is a heater, 16 Is a heater holding plate, 17 is a fin substrate, 1
8 is a fin for heat dissipation, 19 is a through hole for a joint, 20 is a notch,
21 bolt mounting holes, P ₁ to P ₅ is a thermocouple for measuring the temperature distribution, P is a thermocouple for temperature control.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Koji Kawada, Inventor 2-3-2, Noribori, Nishi-ku, Osaka, Japan Fujikin Co., Ltd. (72) Inventor Yukio Minami 2-3-2, Noribori, Nishi-ku, Osaka, Osaka Fujikin Co., Ltd. (72) Inventor Akihiro Morimoto 2-3-2, Noribori, Nishi-ku, Osaka, Osaka Prefecture (72) Inventor Osamu Nakamura 2-3-2, Tachibori, Nishi-ku, Osaka, Osaka Fujikin Co., Ltd. (72) Inventor Katsunori Yoneka 2-3-2, Noribori, Nishi-ku, Osaka-shi, Osaka Fujikin Incorporated (72) Inventor Manoharral Shresta 2-3-2, Noribori, Nishi-ku, Osaka-shi, Osaka Fujikinnai (72) Inventor Shinichi Ikeda 2-3-2 Nobori, Nishi-ku, Osaka-shi, Osaka Fujikin Co., Ltd. (72) Invention Narusho Toshiro Osaka-shi, Osaka, Nishi-ku, Itachibori 2-chome No. 3 No. 2, Inc. in the Fujikin (72) inventor Hirao Keikokorozashi Osaka-shi, Osaka, Nishi-ku, Itachibori 2-chome No. 3 No. 2, Inc. in the Fujikin

Claims (4)

[Claims] 1. A reactor body 1 in which a space portion 6 is formed by combining an inlet side furnace body member 2 and an outlet side furnace body member 3, and a raw material is provided in the space portion 6 perforated in the inlet side furnace body member 2. A raw material gas inlet passage 7 for introducing a gas, a raw material gas supply joint 9 connected to the raw material gas inlet passage, and a moisture gas for extracting generated water from a space 6 formed in the outlet side furnace body member 3. The outlet passage 10, a moisture gas deriving joint 12 connected to the moisture gas outlet passage 10, a fin substrate 17 closely attached to the outer wall surfaces of the furnace body members 2, 3, and a fin substrate 17 erected on the fin substrate 17. And a plurality of heat dissipating fins 18. 2. The outlet furnace body member 3 and the fin substrate 1.
The heat radiation type water generating reactor according to claim 1, wherein the heater (15) and the heater press plate (16) are interposed between the heater press plates (7) and the fin substrate (17) is closely attached to the heater press plate (16). 3. The heat-dissipating water-generating reaction according to claim 1, wherein the heat-dissipating fins 18 are arranged substantially centrally symmetrically or substantially axially symmetrically around the raw material gas supply joint 9 or the moisture gas derivation joint 12. Furnace. 4. The heat radiation type water generating reactor according to claim 1, wherein the surface of the heat radiation fins 18 is anodized to improve the heat emissivity.