JP2001039734A - Low melting point glass for formation of transparent insulating coating film - Google Patents

Low melting point glass for formation of transparent insulating coating film

Info

Publication number
JP2001039734A
JP2001039734A JP20916199A JP20916199A JP2001039734A JP 2001039734 A JP2001039734 A JP 2001039734A JP 20916199 A JP20916199 A JP 20916199A JP 20916199 A JP20916199 A JP 20916199A JP 2001039734 A JP2001039734 A JP 2001039734A
Authority
JP
Japan
Prior art keywords
glass
substrate
transparent
low
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20916199A
Other languages
Japanese (ja)
Inventor
Naoya Hayakawa
直也 早川
Kazuhiro Nishikawa
和浩 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP20916199A priority Critical patent/JP2001039734A/en
Publication of JP2001039734A publication Critical patent/JP2001039734A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/062Glass compositions containing silica with less than 40% silica by weight
    • C03C3/07Glass compositions containing silica with less than 40% silica by weight containing lead
    • C03C3/072Glass compositions containing silica with less than 40% silica by weight containing lead containing boron
    • C03C3/074Glass compositions containing silica with less than 40% silica by weight containing lead containing boron containing zinc
    • C03C3/0745Glass compositions containing silica with less than 40% silica by weight containing lead containing boron containing zinc containing more than 50% lead oxide, by weight
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • C03C17/04Surface treatment of glass, not in the form of fibres or filaments, by coating with glass by fritting glass powder
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/10Frit compositions, i.e. in a powdered or comminuted form containing lead
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2211/00Plasma display panels with alternate current induction of the discharge, e.g. AC-PDPs
    • H01J2211/20Constructional details
    • H01J2211/34Vessels, containers or parts thereof, e.g. substrates
    • H01J2211/38Dielectric or insulating layers

Abstract

PROBLEM TO BE SOLVED: To produce a low melting point glass such that not only a glass having high strain point but a soda lime silica glass having about 510 to 530 strain point can be used for a display panel substrate, that the low melting point glass does not cause devitirification or residual fine bubbles when the glass is baked or formed into a film near the strain point, and that the glass can be formed into a film without causing peeling of the film from the substrate or deformation of the substrate. SOLUTION: The low melting point glass is used to form a transparent insulating coating film on the pattern of transparent electrode lines and bus electrode lines arranged on the transparent substrate for a display panel. The components of the composition are, by wt.%, 1 to 10 of SiO2, 0 to 4 of Al2O3, 8 to 23 of B2O3, 3 to 10 of ZnO, 65 to 76 PbO, and 0 to 1 of oxides of the metals which form the bus electrodes. The glass has 400 to 450 deg.C softening point and 75-95×10-7/ deg.C coefficient of thermal expansion from normal temperature to 300 deg.C.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、軟化温度が低いい
わゆる低融点ガラスであって、各種表示パネル、特にプ
ラズマディスプレイパネル(PDP)における透明基板
に配した酸化インジウム−錫系(ITO系)や酸化錫系
(SnO2系)等の透明電極線パターン、および金属銅また
は金属銀等のバス電極線パターンを、透明・透視性に富
むガラス被膜で被覆するうえで好適な透明絶縁性被膜形
成用低融点ガラスに関する。
TECHNICAL FIELD The present invention relates to a so-called low-melting glass having a low softening temperature, such as an indium-tin oxide (ITO) or an indium-tin oxide (ITO) disposed on a transparent substrate of various display panels, particularly a plasma display panel (PDP). For forming a transparent insulating film suitable for coating a transparent electrode wire pattern such as tin oxide (SnO 2 ) and a bus electrode wire pattern such as metallic copper or metallic silver with a transparent and transparent glass coating. Related to low melting point glass.

【0002】[0002]

【従来技術】特開昭49−110709号公報、特開平8−1196
65号公報等には、SiO2−B2O3 −Al2O3−ZnO −PbO 系成
分からなり、表示パネルにおいて厚膜を形成するうえで
適するガラス組成物が開示されている。
2. Description of the Related Art JP-A-49-110709 and JP-A-8-1196
No. 65 discloses a glass composition comprising a SiO 2 —B 2 O 3 —Al 2 O 3 —ZnO—PbO-based component and suitable for forming a thick film in a display panel.

【0003】前者はガラスの軟化点等の熱物性について
詳しい開示はない。後者は本発明とは成分組成範囲を異
にし、PDP基板としてソーダ石灰シリカ系ガラスより
低熱膨張係数のガラスを狙ったものであり、特にPDP
背面基板を被覆するための低融点ガラス組成物である。
[0003] The former does not disclose in detail the thermophysical properties such as the softening point of glass. The latter has a different component composition range from the present invention, and aims at a glass having a lower coefficient of thermal expansion than soda-lime-silica glass as a PDP substrate.
It is a low-melting glass composition for coating a back substrate.

【0004】[0004]

【発明が解決しようとする課題】従来、PDP基板にお
ける絶縁性被膜は、低融点ガラス粉からなるペーストを
基板に塗布後、600℃付近で焼付けて膜形成を行ってい
た。前記600℃付近での焼付けにおいては、基板の歪点
(粘度1014.5ポイズに相当する温度))が600℃付近で
あることが必要であり、歪点がそれより40ないし50℃以
上低温度であると、基板の変形(膨張、収縮)が大きく
なりパネル貼り合わせ時にパターンズレが生じるという
弊害がある。
Conventionally, an insulating film on a PDP substrate has been formed by applying a paste made of glass powder having a low melting point to the substrate and then baking it around 600 ° C. In the baking at around 600 ° C., the strain point (temperature corresponding to a viscosity of 10 14.5 poise) of the substrate needs to be around 600 ° C., and the strain point is lower by 40 to 50 ° C. or more than that. If there is, there is a problem that the deformation (expansion and shrinkage) of the substrate becomes large and a pattern shift occurs at the time of panel bonding.

【0005】前記弊害を排除するうえで、通常ガラス基
板の歪点が600℃付近、またはそれ以上のガラスを用い
るものであるが、それは低コストで大量生産されるソー
ダ石灰シリカ系ガラス(歪点が510〜530℃程度)とは成
分組成を異にし、製品自体の製造コストを高騰するとい
う問題がある。
In order to eliminate the above-mentioned adverse effects, a glass substrate having a strain point of about 600 ° C. or higher is usually used. However, it is a soda-lime-silica glass (strain point) which is mass-produced at low cost. (Approximately 510 to 530 ° C.) has a problem that the component composition is different and the production cost of the product itself rises.

【0006】本発明は前記歪点が高いガラスは勿論、歪
点が510〜530℃程度のソーダ石灰シリカ系ガラスを基板
として採用することができ、その歪点付近での焼付け、
膜形成を可能とするものである。なお、焼付け、膜形成
に際しては、微細泡の残留がなく、熱膨張係数が基板と
近似していて、膜の基板からの剥離や、基板に反り、う
ねりを生じさせないことが必要であることはいうまでも
ない。
According to the present invention, not only glass having a high strain point but also soda-lime-silica glass having a strain point of about 510 to 530 ° C. can be used as a substrate.
This enables film formation. During baking and film formation, it is necessary that there be no fine bubbles remaining, the coefficient of thermal expansion is close to that of the substrate, and no peeling of the film from the substrate, warping of the substrate, and undulation occurring. Needless to say.

【0007】また、基板にパターン形成した電極線、特
に銅、銀等のバス電極線(殊に銅)は、その上に透明絶
縁性被膜を形成する際、熱軟化したガラスによる前記バ
ス電極線形成金属への侵食(金属のガラスへの拡散)、
それに基づくバス電極線抵抗値の顕著な増大が認められ
るが、本発明によればそれを可及的に抑制することがで
きる。
[0007] Further, an electrode wire patterned on a substrate, particularly a bus electrode wire (especially copper) of copper, silver or the like, is formed of thermally softened glass when a transparent insulating film is formed thereon. Erosion of formed metal (diffusion of metal into glass),
Although a remarkable increase in the bus electrode wire resistance based on this is observed, according to the present invention, it can be suppressed as much as possible.

【0008】[0008]

【課題を解決するための手段】本発明は、表示パネル用
透明基板に配した電極線パターン上に、透明な絶縁性被
膜を形成するための低融点ガラスであって、その成分組
成がwt%で、SiO2 1〜10、Al2O3 0〜4、B2O3
〜23、ZnO 3〜10、PbO 65〜76、バス電極形成金属の
酸化物0〜1の範囲で含み、ガラス軟化点が400〜450
℃、常温〜300℃までの熱膨張係数が75〜95×10-7/℃
である透明絶縁性被膜形成用低融点ガラスである。
SUMMARY OF THE INVENTION The present invention relates to a low-melting glass for forming a transparent insulating film on an electrode line pattern disposed on a transparent substrate for a display panel, wherein the composition of the glass is wt%. And SiO 2 1-10, Al 2 O 3 0-4, B 2 O 3 8
~ 23, ZnO 3 ~ 10, PbO 65 ~ 76, oxide of metal forming bus electrode 0 ~ 1, containing glass softening point 400 ~ 450
℃, the coefficient of thermal expansion from room temperature to 300 ℃ is 75-95 × 10 -7 / ℃
Is a low melting glass for forming a transparent insulating film.

【0009】前記において、透明基板として歪点510〜5
30℃程度のソーダ石灰シリカ系ガラス、または該ソーダ
石灰シリカ系ガラスより歪点の高いガラスを採用したも
のである。
In the above, a strain point of 510 to 5
A soda-lime-silica glass of about 30 ° C. or a glass having a higher strain point than the soda-lime-silica glass is used.

【0010】更に、透明基板への焼付けのためのガラス
温度が500〜550℃とするものである。
Further, the glass temperature for baking on a transparent substrate is set at 500 to 550 ° C.

【0011】[0011]

【発明の実施の形態】基板に各電極線パターンを形成
し、絶縁性被膜形成用低融点ガラスで被覆するケース
は、液晶表示パネル、エレクトロルミネッセンスパネ
ル、蛍光表示パネル、エレクトロクロミック表示パネ
ル、発光ダイオード表示パネル、PDP等があるがいず
れの表示パネルも本発明の対象に含まれる。以下にPD
Pにおける前面基板の例を示し、本発明を説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Cases in which each electrode line pattern is formed on a substrate and covered with a low-melting glass for forming an insulating film include liquid crystal display panels, electroluminescent panels, fluorescent display panels, electrochromic display panels, and light emitting diodes. Although there are a display panel and a PDP, any of the display panels is included in the present invention. PD below
The present invention will be described by showing an example of a front substrate at P.

【0012】〔PDPにおける前面基板〕本発明におけ
る透明な前面基板は、先述の歪点の高いガラスのみなら
ず、歪点510〜530℃程度のソーダ石灰シリカ系ガラスが
採用できる。
[Front Substrate in PDP] As the transparent front substrate in the present invention, not only the above-mentioned glass having a high strain point but also a soda-lime-silica glass having a strain point of about 510 to 530 ° C. can be used.

【0013】前面基板ガラスの片面(パネル内側)には
透明電極線、通常は酸化インジウム−錫 (ITO)系、
または酸化錫(SnO2)系の電極線がパターン形成され
る。更に前記透明電極線のみでは抵抗値が高く、また放
電性能も良好ではないために、該透明電極線上に金属材
料よりなるバス電極線が配される。バス電極線は不透明
であるが、その線幅は透明電極線より細く、外部からは
視認し難い。
A transparent electrode wire, usually indium-tin oxide (ITO), is provided on one side (inside of the panel) of the front substrate glass.
Alternatively, a tin oxide (SnO 2 ) -based electrode wire is patterned. Further, since the transparent electrode wire alone has a high resistance value and the discharge performance is not good, a bus electrode wire made of a metal material is arranged on the transparent electrode wire. Although the bus electrode lines are opaque, the line width is thinner than the transparent electrode lines and is hardly visible from the outside.

【0014】バス電極線は、導電性に優れるが融点が低
く、それを覆う絶縁性被膜の焼付けに際して、その成分
が浸出し易い銅や銀、特に銅と、それより融点が高く絶
縁性被膜とも反応し難い例えばクロムを上下に配し、ク
ロム/銅(銀)/クロムのごとく積層形成するのが適当
とされる。導電性金属としては、上記以外にも金、金−
銀合金等が採用できる。なお、透明電極線、バス電極線
は、物理的蒸着手段(例えばスパッタリング法)や、化
学的蒸着手段(例えば常圧CVD法)等、適宜の手段に
より膜付けし、エッチングによりパターン形成すること
ができる。
The bus electrode wire is excellent in conductivity but has a low melting point, and when baking an insulating coating covering the same, copper and silver, particularly copper, whose components are easy to leach out, and copper and silver having a higher melting point than the insulating coating. For example, chromium which is difficult to react, for example, is arranged on the upper and lower sides, and it is appropriate to form a laminate like chromium / copper (silver) / chromium. Other conductive metals include gold and gold-
Silver alloy or the like can be adopted. The transparent electrode wire and the bus electrode wire may be formed into a film by an appropriate means such as a physical vapor deposition means (for example, a sputtering method) or a chemical vapor deposition means (for example, a normal pressure CVD method), and may be patterned by etching. it can.

【0015】前記透明電極線、バス電極線を覆い、基板
ガラスの片面全面に低融点ガラスよりなる透明絶縁性被
膜を形成する。これは低融点ガラス粉含有ペーストを前
面基板、透明電極線、およびバス電極線上にわたり塗布
し、焼付けて膜形成するもので、詳細については後段に
述べる。
A transparent insulating film made of low-melting glass is formed on the entire surface of one side of the substrate glass so as to cover the transparent electrode lines and the bus electrode lines. In this method, a paste containing glass powder having a low melting point is applied over the front substrate, the transparent electrode wires, and the bus electrode wires, and baked to form a film. The details will be described later.

【0016】PDPの前面基板においては、前記透明絶
縁性被膜の上にマグネシア層を覆設するが、これは放電
に際してマグネシア層が透明絶縁性被膜を保護するため
のもので周知の技術手段である。
On the front substrate of the PDP, a magnesia layer is provided on the transparent insulating film, which is a well-known technique for protecting the transparent insulating film during discharge by the magnesia layer. .

【0017】なお、前面基板ガラスに対向配置した背面
基板(ガラス)にはアドレス電極、およびアドレス電極
を覆う背面側絶縁性被膜(低融点ガラス被膜)、更に蛍
光体が配され、また各画素を区画するセラミック質の隔
壁が形成され、前面基板ガラスと背面基板ガラスの周縁
部は封着層により封止し、両基板ガラス間の空間には希
ガスが封入され、PDPの製作が完成する。
An address electrode, a back side insulating film (a low-melting glass film) covering the address electrode, and a fluorescent material are disposed on a rear substrate (glass) opposed to the front substrate glass. A partition wall of a ceramic material for partitioning is formed, the peripheral portions of the front substrate glass and the rear substrate glass are sealed with a sealing layer, and a rare gas is sealed in a space between the two substrate glasses, thereby completing the manufacture of the PDP.

【0018】前記前面基板の製造加工は、基板ガラスに
スパッタリング法等により透明電極線パターン(例えば
ITO)、更にバス電極線パターン(例えばクロム/銅
/クロム)を形成し、次いで透明絶縁性被膜をスクリー
ン印刷等で形成、焼付けし、更に透明電極線、バス電極
線における駆動回路配線部分直上部の被覆絶縁性被膜を
酸(例えば希硝酸)で溶解除去し、該駆動回路配線部分
を露呈させ配線できるようにすることにより完了する。
In the manufacturing process of the front substrate, a transparent electrode line pattern (for example, ITO) and a bus electrode line pattern (for example, chromium / copper / chrome) are formed on the substrate glass by sputtering or the like, and then a transparent insulating film is formed. Forming and baking by screen printing etc., and further dissolving and removing the covering insulating film just above the drive circuit wiring portion of the transparent electrode wire and bus electrode wire with acid (for example, dilute nitric acid), exposing the drive circuit wiring portion and wiring. Complete by being able to.

【0019】〔透明絶縁性被膜形成用低融点ガラス〕低
融点ガラスの被膜形成に際して、基板に焼付けるための
好適なガラスの粘度は102.5ポイズ程度ないし103ポイズ
オーダーであり、前記範囲未満では低融点ガラスの流動
性が増大し、透明電極線、バス電極線からの成分浸出が
顕著となり、それらの導電性能が損なわれ易く、被膜に
も前記成分浸出による着色が目立つ部分(色むら)が生
ずる。また、前記範囲を越えるとガラスの泡抜けが不充
分となり易く、それによる濁りが生ずる。
[0019] In the film formation of [transparent insulating film-forming low-melting glass] low-melting glass, the viscosity of suitable glass for burning the substrate is 10 2.5 poise of about to 10 3 poise order less than the above range, The fluidity of the low-melting glass increases, and the leaching of components from the transparent electrode wire and the bus electrode wire becomes remarkable, and their conductive performance is easily impaired. Occurs. On the other hand, if the ratio exceeds the above range, the bubbles of the glass are apt to be insufficient, resulting in turbidity.

【0020】歪点、すなわちガラス粘度が1014.5ポイズ
に相当する温度(基板ガラスの場合、この粘度・温度で
数10分保持しても変形し難い. 歪点より高温・低粘度と
する程軟化傾向が生ずる)が低い(510〜530℃程度)ソ
ーダ石灰シリカ系ガラス基板に低融点ガラスによる被膜
を形成する場合、前記歪点前後(より好ましくは歪点以
下)での焼付けが必要であり、前記範囲のガラス粘度に
対応する温度が500〜550℃であることが好ましい。550
℃を越えると基板ガラスの歪点を著しく越えるため、基
板ガラスに変形を生じパターンズレが生じ易い。500℃
未満では低融点ガラスをPbO過多とする必要があり、そ
の場合、被膜の耐久性、安定性、例えば放電に対する長
期安定性を損ない易い。勿論、前記ソーダ石灰シリカ系
ガラスより高歪点のガラスを基板として用いる場合であ
っても、前記温度、500〜550℃で焼付ければよく、すな
わち、ソーダ石灰シリカ系ガラスへの焼付けが可能であ
れば、より高歪点のガラスへの焼付けにおいては全く問
題は生じない。
The strain point, that is, the temperature at which the glass viscosity is equal to 10 14.5 poise (in the case of a substrate glass, it is difficult to be deformed even if held at this viscosity / temperature for several tens of minutes. When a coating with a low melting point glass is formed on a soda-lime-silica glass substrate having a low tendency (causing a tendency), it is necessary to bake around the above-mentioned strain point (more preferably below the strain point), The temperature corresponding to the glass viscosity in the above range is preferably from 500 to 550 ° C. 550
If the temperature exceeds ℃, the strain point of the substrate glass is remarkably exceeded, so that the substrate glass is deformed and a pattern shift easily occurs. 500 ℃
If it is less than 10, it is necessary to make the low-melting glass excessive in PbO, in which case the durability and stability of the coating, for example, the long-term stability to electric discharge, are likely to be impaired. Of course, even when using a glass having a higher strain point than the soda-lime-silica-based glass as the substrate, the baking may be performed at the temperature, 500 to 550 ° C., that is, baking to soda-lime-silica-based glass is possible. If so, there is no problem in baking to a glass having a higher strain point.

【0021】また、前記粘度、温度範囲で焼付けできる
ようにするには、低融点ガラスの軟化点 (粘度が107.6
ポイズとなる温度) は400〜450℃とするもので、前記軟
化点の範囲であれば、102.5ポイズ〜103ポイズオーダー
に相当する温度を500〜550℃とすることができる。軟化
点は歪点等とともに特定点と称され、測定が容易で、前
記焼付け時温度−粘度を規定するうえで指標となる点
(温度)である。
Further, in order to enable baking in the above viscosity and temperature range, the softening point of the low melting point glass (viscosity of 10 7.6
Temperature at which poise) intended to be 400 to 450 ° C., if the range of the softening point, the temperature corresponding to 10 2.5 poise to 10 3 poise order can be 500-550 ° C.. The softening point is called a specific point together with the strain point and the like, and is a point (temperature) that is easy to measure and serves as an index in defining the temperature-viscosity at the time of baking.

【0022】前面基板におけるソーダ石灰シリカ系ガラ
スをはじめとするガラスは熱膨張係数 (常温〜 300℃)
がおおよそ70オーダー〜90オーダー(×10-7/℃)であ
り、従って本発明の低融点ガラスにおいても同様な熱膨
張係数、すなわち75〜95×10 -7/℃とするもので、その
範囲未満あるいはその範囲を越えると、焼付け〜冷却に
際して基板ガラスに反りや割れを与えたり、低融点ガラ
ス被膜自体亀裂が生じたりする。
Soda-lime-silica based glass on front substrate
And other glasses have thermal expansion coefficients (room temperature to 300 ° C)
Is approximately 70 to 90 orders (× 10-7/ ° C)
Therefore, the same thermal expansion is obtained in the low melting point glass of the present invention.
Tension coefficient, i.e. 75-95 × 10 -7/ ° C.
If it is less than or beyond the range, baking to cooling
Warping or cracking the substrate glass,
The coating itself cracks.

【0023】低融点ガラスの成分組成は以下の範囲とす
る。SiO2はガラス中1〜10wt%の範囲で含有させるもの
で、1wt%未満ではガラス形成が不安定となり、失透を
生じ易い。10wt%を越えると流動性が悪化し、膜塗布後
の焼付けに際して泡抜けが困難となる。好ましくは2〜
5wt%の範囲とする。
The component composition of the low-melting glass is in the following range. SiO 2 is intended to be contained within a range in 110 wt.% Glass, glass-forming becomes unstable in less than 1 wt%, prone to devitrification. If it exceeds 10% by weight, the fluidity deteriorates, and it becomes difficult to remove bubbles during baking after coating the film. Preferably 2
The range is 5% by weight.

【0024】B2O3はSiO2同様のガラス形成成分であっ
て、熱膨張係数の上昇を抑え、またガラスに適度の流動
性を与えるもので、ガラス中に8〜23wt%の範囲で含有
させる。8wt%未満ではガラス形成が不安定であり、23
wt%を越えると流動性が悪化し、膜塗布後の焼付けに際
して泡抜けが困難となる。好ましくは9〜21wt%の範囲
とする。
B 2 O 3 is a glass-forming component similar to SiO 2 and suppresses an increase in the coefficient of thermal expansion and imparts a suitable fluidity to the glass, and is contained in the glass in the range of 8 to 23 wt%. Let it. If less than 8 wt%, glass formation is unstable, and 23
If the amount exceeds wt%, the fluidity deteriorates and it becomes difficult to remove bubbles during baking after coating the film. Preferably, it is in the range of 9 to 21% by weight.

【0025】Al2O3 はガラスを安定化させ、熱膨張係数
を調整するうえで適宜含有させる。但し4wt%を越える
とガラスの粘度を上昇させ、泡抜けが困難となるととも
に耐酸性が大きくなり、希硝酸での溶解・除去が困難と
なる。
Al 2 O 3 is appropriately contained for stabilizing the glass and adjusting the thermal expansion coefficient. However, if it exceeds 4% by weight, the viscosity of the glass increases, making it difficult to remove bubbles and increasing the acid resistance, making it difficult to dissolve and remove with dilute nitric acid.

【0026】ZnO はガラスに流動性を与え、また熱膨張
係数を調整するうえで含有させるもので、その範囲は3
〜10wt%とする。3wt%未満ではその作用を発揮し得
ず、10wt%を越えるとガラスが不安定となり、結晶化し
易くなる。
ZnO is used for imparting fluidity to the glass and for controlling the coefficient of thermal expansion.
To 10 wt%. If the content is less than 3 wt%, the effect cannot be exerted. If the content exceeds 10 wt%, the glass becomes unstable and tends to crystallize.

【0027】PbO はガラスを低融点、すなわち軟化温度
を下げ、流動性を与えるうえで必要な成分であり、65〜
76wt%の範囲で含有させる。65wt%未満ではその作用が
十分発揮できず、また焼成に際する泡抜けが不充分とな
る。76wt%を越えると熱膨張係数が過大となり、またガ
ラスの耐久安定性を損なう。
PbO is a component necessary for lowering the melting point of glass, that is, lowering the softening temperature and imparting fluidity.
It is contained in the range of 76 wt%. If the content is less than 65 wt%, the effect cannot be sufficiently exhibited, and the bubble removal at the time of firing becomes insufficient. If it exceeds 76 wt%, the thermal expansion coefficient becomes excessive and the durability stability of the glass is impaired.

【0028】MgO、CaO、SrO、BaO等の他の2価金属成分
の酸化物の1種または複数種は、粘度調整、熱膨張係数
調整を目的として3wt%以下の範囲で含有させることが
できる。ただし3wt%を越えるとガラス形成の安定性を
損ない、失透が生じ易くなる。
One or more oxides of other divalent metal components such as MgO, CaO, SrO, and BaO can be contained in an amount of 3 wt% or less for the purpose of adjusting viscosity and adjusting thermal expansion coefficient. . However, if it exceeds 3 wt%, the stability of glass formation is impaired, and devitrification tends to occur.

【0029】Na2O、K2O等のアルカリ金属成分の酸化物
は、不純物として1wt%までの混入は容認できるが、1
wt%を越えると、PDP稼働時、放電に際して希ガス空
間中に前記成分揮散することによるパネル寿命の短縮を
来す恐れがある。
Oxides of alkali metal components such as Na 2 O and K 2 O can be mixed up to 1 wt% as impurities,
If the amount exceeds wt%, the above-mentioned components may be volatilized into a rare gas space during discharge during operation of the PDP, thereby shortening the panel life.

【0030】更に以下のバス電極形成用金属酸化物を含
有させることが望ましい。すなわち、低融点ガラスの焼
付けに際しては、Cu、Ag等の高導電性成分よりなるバス
電極線の成分(特にCu)の低融点ガラス中への浸出、拡
散、それによる電極線の導電性能の低下を来す恐れがあ
る。勿論、先述したように高融点、非反応性金属(例:
Cr)を上下に配し、Cr/Cu(Ag)/Crのごとく積層形成
し、電極線を保護する技術は公知であるが、500℃以上
の熱に曝され、流動化したガラスと接触することによる
侵食、導電性能の低下を防ぐことはできない。この場
合、バス電極線形成用金属酸化物(例えばCuO、Ag2O)
を予めガラス中に含有させておくことにより、前記成分
のガラス中への浸出、拡散、それによる電極線の導電性
能の低下を可及的に抑制することができる。含有量は1
wt%以下、好適には0.1〜1wt%の範囲とするのが望ま
しく、0.1wt%未満では前記作用が十分発揮できず、1w
t%を越えるとガラスへの着色が顕著となる。
It is desirable to further include the following metal oxide for forming a bus electrode. That is, when baking low-melting glass, the components (especially Cu) of the bus electrode wire composed of highly conductive components such as Cu and Ag are leached and diffused into the low-melting glass, thereby lowering the conductivity of the electrode wire. May come. Of course, as described above, a high melting point, non-reactive metal (eg,
A technique for protecting electrode wires is known, in which Cr) is arranged vertically and laminated as Cr / Cu (Ag) / Cr, but is exposed to heat of 500 ° C or more and comes into contact with fluidized glass. Therefore, it is impossible to prevent erosion and deterioration of the conductive performance. In this case, a metal oxide for forming a bus electrode line (eg, CuO, Ag 2 O)
Is contained in the glass in advance, so that the leaching and diffusion of the above-mentioned components into the glass, and thereby a decrease in the conductive performance of the electrode wire can be suppressed as much as possible. Content is 1
wt% or less, preferably in the range of 0.1 to 1 wt%.
If it exceeds t%, coloring of the glass becomes remarkable.

【0031】また、例えばCu0の場合、前記範囲内であ
ってもCu++イオンによりガラスに僅かに青色着色を与え
るが、PDPにおいて発光効率の低い青色発光の透視が
容易となるので都合がよい。
In the case of Cu0, for example, even if the content is within the above range, the glass is slightly colored blue by Cu ++ ions, but it is convenient because it becomes easy to see through blue light emission with low luminous efficiency in PDP. .

【0032】なお、低融点ガラスの焼付けに際して透明
電極線の成分(ITOまたはSnO2等)の低融点ガラス中
への浸出、拡散、それによる電極線の導電性能の低下を
抑制するうえで、予め低融点ガラス中に透明電極線成分
酸化物(例えばIn2O3 、SnO2)を含有させておくことは
公知であるが、550℃以下の焼付けにおいては導電性能
の低下は著しいものではなく、あえて含有させるとして
も2wt%以下程度であれば充分である。
In order to suppress the leaching and diffusion of the components (ITO or SnO 2, etc.) of the transparent electrode wire into the low melting glass at the time of baking the low melting glass, a reduction in the conductive performance of the electrode wire is required in advance. It is known that a transparent electrode wire component oxide (for example, In 2 O 3 , SnO 2 ) is contained in the low-melting glass. However, in baking at 550 ° C. or lower, the decrease in the conductive performance is not significant, Even if it is intentionally contained, a content of about 2 wt% or less is sufficient.

【0033】前記低融点ガラスよりなる透明絶縁性被膜
は、予め製造、整粒した低融点ガラス粉とペーストオイ
ルからなる混合物を、スクリーン印刷等により前記前面
基板、透明電極線、およびバス電極線上にわたり塗布
し、500 〜550℃程度で焼付けて、厚み30μm 程度の厚
膜を形成する。前記30μm 程度の厚みはガス放電による
表示性能、耐電圧の長期安定性を発揮させるうえで必要
かつ充分な厚みとされる。
The transparent insulating film made of the low-melting-point glass is prepared by applying a mixture of a low-melting-point glass powder and paste oil, which have been manufactured and sized in advance, onto the front substrate, the transparent electrode lines, and the bus electrode lines by screen printing or the like. It is applied and baked at about 500 to 550 ° C to form a thick film with a thickness of about 30 µm. The thickness of about 30 μm is necessary and sufficient for exhibiting display performance by gas discharge and long-term stability of withstand voltage.

【0034】また、透明絶縁性被膜は、従来2層形成
し、基板に接する側に比較的軟化点が高く、低融点ガラ
スの焼付けに際して、ガラスの粘度が稍高いために電極
線成分がガラス中に浸出し難い低融点ガラスを、その上
により軟化点が低く、焼付けに際して、ガラスの粘度が
低いために泡抜けし易く膜形成が容易な低融点ガラスを
配するものであるが、本発明においては特に2層形成す
る必要はなく、その分膜付処理操作の手間が省ける。
Conventionally, a transparent insulating film is formed in two layers, and has a relatively high softening point on the side in contact with the substrate. When the low-melting glass is baked, the viscosity of the glass is slightly high. The low melting point glass which is difficult to leach into, has a lower softening point thereon, and when baked, a low melting point glass which is easy to remove bubbles due to low viscosity of the glass and easily forms a film is arranged. It is not necessary to particularly form two layers, and the labor of the film-forming treatment can be saved by that much.

【0035】[0035]

【実施例】以下具体的実施例を例示して本発明を説明す
る。
The present invention will be described below by way of specific examples.

【0036】〔低融点ガラス混合ペーストの作製〕SiO2
源として微粉珪砂を、B2O3源としてほう酸を、Al2O3
として水酸化アルミニウムを、ZnO 源として亜鉛華を、
PbO 源として酸化鉛を、バス電極線Cuに対するCuO 源と
して酸化第二銅を使用し、これらを所望の低融点ガラス
組成となるべく調合したうえで、白金ルツボに投入し、
電気加熱炉内で1000〜1100℃、1〜2時間で加熱溶融し
て、表1の実施例、比較例ガラスを得た。ガラスの一部
は型に流し込み、ブロック状にして熱物性 (熱膨張係
数、軟化点) 測定用に供した。残余のガラスは急冷双ロ
ール成形機にてフレーク状とし、粉砕装置で平均粒径2
〜4μm 、最大粒径15μm 未満の粉末状に整粒した。
[Preparation of low melting glass mixed paste] SiO 2
Fine silica sand as a source, boric acid as a B 2 O 3 source, aluminum hydroxide as an Al 2 O 3 source, zinc white as a ZnO source,
Lead oxide is used as a PbO source, cupric oxide is used as a CuO source for the bus electrode wire Cu, and these are mixed as much as possible to have a desired low melting glass composition, and then put into a platinum crucible,
The glass was heated and melted at 1,000 to 1,100 ° C. for 1 to 2 hours in an electric heating furnace to obtain Examples and Comparative Examples shown in Table 1. A part of the glass was poured into a mold, made into a block, and used for measuring thermophysical properties (thermal expansion coefficient, softening point). The remaining glass is flaked by a quenching twin roll forming machine, and has an average particle size of 2 by a crusher.
44 μm, and the maximum particle size was less than 15 μm.

【0037】次いでαテルピネオールとブチルカルビト
ールアセテートからなるペーストオイルにバインダーと
してのエチルセルロースと上記ガラス粉を混合し、粘度
300±50ポイズ程度のスクリーン印刷に適するペースト
を調製した。
Next, ethyl cellulose as a binder and the above-mentioned glass powder were mixed with a paste oil consisting of α-terpineol and butyl carbitol acetate, and the viscosity was adjusted.
A paste suitable for screen printing of about 300 ± 50 poise was prepared.

【0038】〔透明絶縁性被膜の形成〕厚み2〜3mm、
サイズ 150mm□のソーダ石灰系基板ガラス(歪点520
℃、熱膨張係数90×10-7/℃)に、焼付け後の膜厚が約
30μm となるべく勘案して目の開き#250のスクリーンを
用いて前記ペーストをスクリーン印刷により塗布した。
次いで140 ℃で15分間乾燥した後、530℃で40分間焼付
けてクリアーな厚膜を形成した。得られた試料について
以下の試験に供した。
[Formation of transparent insulating film]
Soda-lime based substrate glass of size 150mm □ (strain point 520
℃, thermal expansion coefficient 90 × 10 -7 / ℃)
The paste was applied by screen printing using a # 250 aperture screen with consideration given to a thickness of 30 μm.
Then, after drying at 140 ° C. for 15 minutes, baking was performed at 530 ° C. for 40 minutes to form a clear thick film. The obtained sample was subjected to the following tests.

【0039】〔熱膨張係数の測定〕前記熱物性測定用ガ
ラスブロックを所定寸法に切断、研磨して熱膨張係数測
定試料を作製し、これを熱膨張計にセットして5℃/分
の速度で昇温して伸び量を測定、記録し、常温(室温)
〜300℃の平均熱膨張係数を算出した。
[Measurement of Coefficient of Thermal Expansion] The glass block for measuring thermophysical properties was cut and polished to a predetermined size to prepare a sample for measuring the coefficient of thermal expansion, which was set in a thermodilatometer and set at a rate of 5 ° C./min. Measure the elongation by raising the temperature at, record the temperature, and normal temperature (room temperature)
The average coefficient of thermal expansion at 300300 ° C. was calculated.

【0040】〔軟化点の測定〕常法により、ガラスブロ
ックからのガラスを加熱して所定太さ、寸法のガラスビ
ームを作製し、リトルトン粘度計にセットして昇温し、
粘度係数η=107.6 に達したときの温度、すなわち軟化
点を測定した。
[Measurement of Softening Point] A glass from a glass block is heated by a conventional method to produce a glass beam having a predetermined thickness and dimensions, set in a Littleton viscometer, and heated.
The temperature at which the viscosity coefficient η reached 107.6 , that is, the softening point, was measured.

【0041】〔失透の有無、残留泡の有無〕透明絶縁性
被膜について拡大鏡下で失透の有無、残留泡の有無(泡
抜けの良否)を観察し、失透のないものを無、失透の生
じているものを有として、また微細泡のないものを無、
微細泡の認められるものを有として評価した。
[Presence or absence of devitrification, presence or absence of residual bubbles] The transparent insulating film was observed under a magnifying glass for the presence or absence of devitrification and the presence or absence of residual bubbles (good or bad bubble removal). If there is devitrification, and if there are no fine bubbles,
Those with fine bubbles were evaluated as having.

【0042】〔参考:透明電極線の侵食程度の測定〕ガ
ラス基板にスパッタリング法によりITO 薄膜を膜付け
し、さらに前記した方法、手順で透明絶縁性被膜を形成
した。次いで7%硝酸液中で透明絶縁性被膜を溶解・除
去した後、4探針法にてITO 薄膜の電気抵抗値を測定し
た。なお、電気抵抗値の上昇が透明絶縁性被膜形成前の
値の3倍以下のものを可、3倍を越えるものを不可とし
て評価した。
[Reference: Measurement of Degree of Erosion of Transparent Electrode Wire] An ITO thin film was formed on a glass substrate by a sputtering method, and a transparent insulating film was formed by the above-described method and procedure. Next, after dissolving and removing the transparent insulating film in a 7% nitric acid solution, the electric resistance value of the ITO thin film was measured by the four probe method. In addition, the case where the increase in the electric resistance value was 3 times or less the value before the formation of the transparent insulating film was evaluated as acceptable, and the case where the increase exceeded 3 times was evaluated as unacceptable.

【0043】〔参考:バス電極線の侵食程度の測定〕ガ
ラス基板にスパッタリング法により(厚さ1μmの金属
銅膜をストライプ状に膜付けし、さらに前記した方法、
手順で透明絶縁性被膜を形成した後、テスターで金属膜
の電気抵抗値を測定した。なお、電気抵抗値の上昇が銅
膜形成前の値の2倍以下のものを可、2倍を越えるもの
を不可として評価した。
[Reference: Measurement of Degree of Erosion of Bus Electrode Wire] A metal copper film having a thickness of 1 μm was formed in a stripe shape on a glass substrate by a sputtering method.
After forming the transparent insulating film by the procedure, the electric resistance value of the metal film was measured with a tester. In addition, the case where the increase in the electric resistance value was twice or less the value before the formation of the copper film was evaluated as acceptable.

【0044】〔結果〕透明絶縁性被膜形成用低融点ガラ
ス組成、および各種試験結果を表1に示す。表から明ら
かなように、実施例1〜5においては、組成、諸特性に
おいて本発明の範囲にある。なお、実施例5において
は、バス電極線にかかるCuO成分を含まないために、バ
ス電極線の侵食が認められるが、本発明の趣旨とする歪
点が510〜530℃程度と低いソーダ石灰シリカ系ガラスを
基板として採用することを可能とし、本発明の範疇であ
る。いずれの実施例においても特にPDPパネル基板の
絶縁性被膜用の低融点ガラスとして好適である。
[Results] Table 1 shows the composition of the low-melting glass for forming a transparent insulating film and the results of various tests. As is clear from the table, in Examples 1 to 5, the composition and various characteristics are within the scope of the present invention. In Example 5, erosion of the bus electrode wire was observed because the CuO component involved in the bus electrode wire was not included, but the soda lime silica having a low strain point of about 510 to 530 ° C., which is the purpose of the present invention, was used. It is possible to adopt a system glass as a substrate, which is within the scope of the present invention. In any of the embodiments, it is particularly suitable as a low-melting glass for an insulating film of a PDP panel substrate.

【0045】他方比較例2、4においてはPbO成分が過
多であり、熱膨張係数が高く、またガラスの耐久安定性
において不充分と推考される。比較例1、3においては
PbO成分が過少であり、熱膨張係数が低く、軟化温度が
高過ぎるもので、泡抜けが不充分である。 なお表示し
ないが、比較例2、3は低融点ガラス−基板ガラスの熱
膨張係数の著しい相違があり、比較例2においては目視
でも基板の変形が認められ、比較例3は焼結(融着)不
充分なこともあって被膜の部分亀裂や基板との剥離が認
められ、またCuO成分が過多で着色が著しい。
On the other hand, in Comparative Examples 2 and 4, the PbO component was excessive, the coefficient of thermal expansion was high, and the durability stability of the glass was considered to be insufficient. In Comparative Examples 1 and 3,
The PbO component is too small, the coefficient of thermal expansion is low, and the softening temperature is too high, and the bubble removal is insufficient. Although not shown, in Comparative Examples 2 and 3, there is a remarkable difference in the thermal expansion coefficient between the low-melting glass and the substrate glass. In Comparative Example 2, deformation of the substrate was visually observed, and Comparative Example 3 was sintered (fused). ) Due to insufficiency, partial cracking of the coating and peeling from the substrate were observed, and the coloring was remarkable due to excessive CuO component.

【0046】[0046]

【表1】 [Table 1]

【0047】[0047]

【発明の効果】本発明によれば、歪点が高いガラスは勿
論、歪点が510〜530℃程度のソーダ石灰シリカ系ガラス
を基板として採用することができ、その歪点付近での焼
付け、膜形成に際しては、失透や微細泡の残留がなく、
また膜の基板からの剥離や、基板に変形を生じさせるこ
とがなく、膜形成を可能とする。
According to the present invention, not only glass having a high strain point but also soda-lime-silica glass having a strain point of about 510 to 530 ° C. can be used as a substrate. During film formation, there is no devitrification or residual fine bubbles,
Further, the film can be formed without peeling the film from the substrate or causing deformation of the substrate.

フロントページの続き Fターム(参考) 4G062 AA08 AA09 AA15 BB04 DA03 DB01 DB02 DB03 DC03 DC04 DD01 DE03 DF06 DF07 EA01 EA10 EB01 EC01 ED01 EE01 EF01 EG01 FA01 FA10 FB01 FC01 FD01 FE01 FF01 FG01 FH01 FJ01 FK01 FL01 GA01 GA10 GB01 GC01 GD01 GE01 HH01 HH03 HH04 HH05 HH07 HH09 HH11 HH13 HH15 HH17 HH20 JJ01 JJ03 JJ05 JJ07 JJ10 KK01 KK03 KK05 KK07 KK10 MM07 NN26 NN30 NN32 PP13 PP14 PP16 5C040 FA01 GA09 GD07 GD09 KA04 KA08 KA10 KB03 KB11 KB19 KB28 Continued on the front page F-term (reference) 4G062 AA08 AA09 AA15 BB04 DA03 DB01 DB02 DB03 DC03 DC04 DD01 DE03 DF06 DF07 EA01 EA10 EB01 EC01 ED01 EE01 EF01 EG01 FA01 FA10 FB01 FC01 FD01 FE01 FF01 GC01 F0101 HH01 HH03 HH04 HH05 HH07 HH09 HH11 HH13 HH15 HH17 HH20 JJ01 JJ03 JJ05 JJ07 JJ10 KK01 KK03 KK05 KK07 KK10 MM07 NN26 NN30 NN32 PP13 PP14 PP16 5C040 FA01 GA09 GD07 KB10 KB04 KB04 KB04

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】表示パネル用透明基板に配した透明電極
線、バス電極線のパターン上に、透明な絶縁性被膜を形
成するための低融点ガラスであって、その成分組成がwt
%で、SiO2 1〜10、Al2O3 0〜4、B2O3 8〜23、Z
nO 3〜10、PbO 65〜76、バス電極形成金属の酸化物
0〜1の範囲で含み、ガラス軟化点が400〜450℃、常温
〜300℃までの熱膨張係数が75〜95×10-7/℃であるこ
とを特徴とする透明絶縁性被膜形成用低融点ガラス。
1. A low-melting glass for forming a transparent insulating film on a pattern of a transparent electrode line and a bus electrode line arranged on a transparent substrate for a display panel, wherein the composition of the glass is wt.
% In, SiO 2 1~10, Al 2 O 3 0~4, B 2 O 3 8~23, Z
nO 3 to 10, PbO 65 to 76, includes a range of oxide 0-1 of bus electrodes formed of metal, glass softening point of 400 to 450 ° C., the thermal expansion coefficient of up to normal temperature to 300 ° C. is 75 to 95 × 10 - A low-melting glass for forming a transparent insulating film having a temperature of 7 / ° C.
【請求項2】透明基板として歪点510〜530℃程度のソー
ダ石灰シリカ系ガラス、または該ソーダ石灰シリカ系ガ
ラスより歪点の高いガラスを採用したことを特徴とする
請求項1記載の透明絶縁性被膜形成用低融点ガラス。
2. The transparent insulation according to claim 1, wherein soda-lime-silica glass having a strain point of about 510 to 530 ° C. or glass having a higher strain point than said soda-lime-silica glass is used as the transparent substrate. Low-melting glass for forming a functional film.
【請求項3】透明基板への焼付けのためのガラス温度が
500〜550℃であることを特徴とする請求項1または2記
載の透明絶縁性被膜形成用低融点ガラス。
3. The glass temperature for baking on a transparent substrate is
The low melting glass for forming a transparent insulating film according to claim 1, wherein the temperature is 500 to 550 ° C. 4.
JP20916199A 1999-07-23 1999-07-23 Low melting point glass for formation of transparent insulating coating film Pending JP2001039734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20916199A JP2001039734A (en) 1999-07-23 1999-07-23 Low melting point glass for formation of transparent insulating coating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20916199A JP2001039734A (en) 1999-07-23 1999-07-23 Low melting point glass for formation of transparent insulating coating film

Publications (1)

Publication Number Publication Date
JP2001039734A true JP2001039734A (en) 2001-02-13

Family

ID=16568342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20916199A Pending JP2001039734A (en) 1999-07-23 1999-07-23 Low melting point glass for formation of transparent insulating coating film

Country Status (1)

Country Link
JP (1) JP2001039734A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013189372A (en) * 2013-04-23 2013-09-26 Central Glass Co Ltd Conductive paste material
CN104926109A (en) * 2015-05-27 2015-09-23 广州市儒兴科技开发有限公司 Glass powder applied to sliver-covered slurry of crystalline silicon solar cell
CN109721242A (en) * 2019-03-07 2019-05-07 武汉理工大学 A kind of low-melting glass and its preparation, application method for solidifying volatile nucleic Tc/Re

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013189372A (en) * 2013-04-23 2013-09-26 Central Glass Co Ltd Conductive paste material
CN104926109A (en) * 2015-05-27 2015-09-23 广州市儒兴科技开发有限公司 Glass powder applied to sliver-covered slurry of crystalline silicon solar cell
CN109721242A (en) * 2019-03-07 2019-05-07 武汉理工大学 A kind of low-melting glass and its preparation, application method for solidifying volatile nucleic Tc/Re
CN109721242B (en) * 2019-03-07 2022-06-03 武汉理工大学 Low-melting-point glass for curing volatile nuclide Tc/Re and preparation and use methods thereof

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