JP2001015726A - X-ray planar detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent troubles such as warping of a glass support plate, growth of molds inside, or deteriorating the apparatus because of moisture penetrating in an X-ray planar detector. SOLUTION: A photoconductor 3, such as Se, is deposited on a glass support plate 1 having X-ray detecting elements formed thereon, an upper electrode 4 is provided on the photoconductor 3 and coated with a moisture-preventing member 5 to thereby block moisture tending to penetrate in an X-ray planar detector and avoid nonconformities of warping on the support plate 1 due to the moisture. This also prevents nonconformities of growing molds inside or deteriorating the apparatus.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray plane detecting apparatus suitable for use as an X-ray detecting means of an apparatus for taking an image using X-rays, such as an X-ray diagnostic apparatus.

[0002]

2. Description of the Related Art Conventionally, there has been known an X-ray diagnostic apparatus in which, for example, an X-ray generating unit and an X-ray detecting unit are arranged opposite to both ends of a C arm or an Ω arm. The X-ray detection unit includes an image intensifier (II) and an I.V. I. -TV
Although the system is widely known, in recent years, in order to reduce the weight of the apparatus, in recent years, a plurality of X-ray detection elements formed of semiconductor elements are arranged two-dimensionally to capture an X-ray image. Is performed by the X-ray flat panel detector. I. Being provided in place of optics; As the X-ray flat panel detector, a “direct conversion type” X-ray flat panel detector and an “indirect conversion type” X-ray flat panel detector are known.

A "direct conversion type" X-ray flat panel detector is shown in FIG.
As shown in (a), an X-ray detection system 101 and an X-ray made of amorphous selenium are formed on a glass support 100.
It is formed by laminating the line conversion systems 102. This "direct conversion type" X-ray flat panel detector directly forms charges corresponding to an X-ray dose with amorphous selenium, and the X-ray detection system 101 outputs the charges as image data. .

An “indirect conversion type” X-ray flat panel detector is shown in FIG.
As shown in (b), an X-ray detection system 101 and an X-ray conversion system 102 formed of, for example, a scintillator are laminated on a glass support 100. This "indirect conversion type" X-ray flat panel detector converts X-rays into light with a scintillator, forms an electric charge corresponding to the amount of light corresponding to the X-rays with an X-ray detection system 101, and converts this into an image. Output as data.

FIG. 8 shows an X-ray conversion system (amorphous type) of each of “direct conversion type” and “indirect conversion type” X-ray flat panel detectors.
FIG. 3 is a diagram schematically showing an X-ray detection system 101 located below a selenium 102 or a scintillator 103). As can be seen from FIG. 8, the X-ray detection system 1 of each X-ray flat panel detector
Reference numeral 01 denotes a two-dimensional array of a plurality of X-ray detection elements 110, a selection signal line 113 for reading out charges accumulated in each of the X-ray detection elements 110, and a readout signal from each of the X-ray detection elements 110. A signal line 114 for transferring the transferred charges and a readout circuit 115 for amplifying the charges transferred via the signal lines 114 with a predetermined gain and outputting the amplified charges as image data are connected. .

More specifically, an X-ray detection system 101 of an “indirect conversion type” X-ray flat panel detector will be described as an example.
FIG. 9 is a circuit diagram of the X-ray detection system 101,
As can be seen from this figure, a plurality of X-ray detection elements 110 constituting the X-ray detection system 101 are composed of thin film transistors (TF
T) 111, a charge storage capacitor 112, and a photodiode 113. The gate of the TFT 111 is connected to a gate pulse generator 120 via a selection signal line 114, the drain is connected to a readout circuit 121 via a readout signal line 115, and the source is connected to a charge storage capacitor 113. It is connected.

In such an “indirect conversion type” X-ray flat panel detector, the photodiode 113 forms a charge based on the light converted by the scintillator 103 and supplies the charge to the charge storage capacitor 112. . The gate pulse generator 120 applies a gate voltage to the TFT 111 of each X-ray detection element 110 via the selection signal line 114 to drive each TFT 111 on. Thus, the charges stored in the charge storage capacitor 112 are read onto the read signal line 115 and output as image data via the read circuit 121.

[0008]

However, such "direct conversion type" and "indirect conversion type" X-ray flat panel detectors are provided on an X-ray conversion system 102, 103 on a glass support 100.
Is formed by vapor deposition, and water generated at the time of vapor deposition causes the glass support 100 to be formed as shown in FIG.
There is a problem that causes warpage. Even if the glass support 100 does not warp during the manufacturing process, the glass support 100 and the X-ray conversion system 102,
There is a problem that the glass support 100 is warped due to the difference in expansion coefficient from that of the glass support 103.

The glass support 100 tends to be thinner year by year in order to reduce the size and weight of the X-ray flat panel detector. For example, while the thickness of amorphous selenium is about 1 mm, the thickness of the glass support 100 is 0.7 mm, which is smaller than the thickness of amorphous selenium to be deposited. Therefore, such a problem that the glass support table 100 is warped has become more prominent year by year.

Further, when moisture penetrates into the X-ray flat panel detector due to moisture or the like, there is a problem that mold is generated or the equipment is deteriorated.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has the disadvantage that the glass support is warped due to moisture or the like during and after manufacturing, and that moisture penetrates into the X-ray flat panel detector. It is an object of the present invention to provide an X-ray flat panel detection device capable of preventing the occurrence of mold and the inconvenience of deterioration of equipment.

[0012]

An X-ray flat panel detecting apparatus according to the present invention includes a substrate, an X-ray detecting element formed on the substrate, and an X-ray detector.
X-ray conversion means formed on the line detection element, for converting incident X-rays into a form detectable by the X-ray detection element,
And a moisture-proof means laminated on the X-ray conversion means.

[0013] Since such an X-ray flat panel detecting device is covered with the moisture-proof means from above the X-ray converting means, the inside of the apparatus can be protected from moisture and the like during and after manufacturing. For this reason, it is possible to prevent inconvenience that the substrate is warped. In addition, it is possible to prevent the infiltration of moisture into the X-ray flat panel detection device, the occurrence of mold, and the inconvenience of deterioration of equipment.

Next, the X-ray flat panel detecting apparatus according to the present invention comprises:
As means for solving the above-mentioned problems, a first substrate, a second substrate bonded to the first substrate,
An X-ray detection element formed on the first substrate;
X-ray converting means for converting incident X-rays formed on the line detecting element into a form detectable by the X-ray detecting element.

That is, in this X-ray flat panel detection apparatus, the substrate has a “laminated substrate structure” in which a first substrate and a second substrate are bonded to each other. Thereby, the durability of the substrate to moisture such as moisture can be increased, and the inconvenience of the substrate being warped by the moisture can be prevented. In addition, it is possible to prevent the infiltration of moisture into the X-ray flat panel detection device, the occurrence of mold, and the inconvenience of deterioration of equipment.

Next, the X-ray flat panel detecting apparatus according to the present invention comprises:
As means for solving the above-mentioned problems, a first substrate, a second substrate bonded to the first substrate,
An X-ray detection element formed on the first substrate;
X-ray conversion means formed on the line detection element, for converting incident X-rays into a form detectable by the X-ray detection element,
And a moisture-proof means laminated on the X-ray conversion means.

In such an X-ray flat panel detecting device, the substrate is:
The first substrate and the second substrate are bonded to each other in a “laminated substrate structure”, and since the X-ray conversion unit is covered with a moisture-proof unit, the substrate is more strongly prevented from warping. In addition to the occurrence of mold and deterioration of equipment,
It can be prevented more strongly.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] [Overall Configuration] An X-ray flat panel detecting apparatus according to the present invention is shown in FIG.
It can be applied to a direct conversion type X-ray flat panel detector as shown in FIG. FIG. 1 shows a cross section of a direct conversion type X-ray flat panel detector according to the first embodiment. As can be seen from FIG. 1, the direct conversion type X-ray flat detector according to the first embodiment is shown. X-ray flat panel detector on the glass support 1
A plurality of X-ray detection elements 2 having a thin film transistor (TFT), a capacitor for charge storage and the like are formed in a two-dimensional array, and a photoconductor 3 such as amorphous selenium is formed on each of the X-ray detection elements 2. At the same time as vapor deposition, an upper electrode 4 is formed on the photoconductor 3,
It is formed by performing a coating process with a moisture-proof member 5 from above.

The moisture-proof member 5 is made of a moisture-proof resin and is made of, for example, a potting agent (model number 123) manufactured by ThreeBond.
0) etc. can be used. The moisture-proof member 5 has a thickness that allows only 0.01% or less of moisture to pass through the lower layer, for example.

[Manufacturing process] The coating process using the moisture-proof member 5 is performed as follows. First,
A plurality of X-ray detection elements 2 are two-dimensionally arrayed and formed on a glass support 1, and an external device for extracting image data formed by each X-ray detection element 2 on the edge side of the glass support 1. The connection electrode 6 is formed.

Next, a photoconductor 3 is vapor-deposited on each X-ray detecting element 2, an upper electrode 4 is formed on the photoconductor 3, and the photoconductor 3 and the external connection electrode 6 are physically separated. A weir portion 7 (a weir portion) is provided.
Then, the glass support 1 is rotated in a state horizontal to the ground, and the dampproof member 5 is instilled at the center of the rotation.

As a result, a centrifugal force, which is a force from the center of the rotating glass support 1 toward the edge of the glass support 1, is generated, and the dampproof member 5 drip-dried on the glass support 1 is turned into glass by so-called spin coating. The coating is performed while being spread toward the outside of the support base 1.
The weir portion 7 is provided with a moisture-proof member 4 which is spread by the centrifugal force.
Is stopped immediately before the external connection electrode 6. The dam 7 is removed when the moisture-proof member 4 has solidified to some extent.

Accordingly, the moisture-proof member 4 can be applied to the photoconductor 3 with a uniform thickness, and the inconvenience that the moisture-proof member 4 flows to the external connection electrode 6 by the weir 7 can be prevented. it can.

[Effects of the First Embodiment] As is clear from the above description, the X-ray flat panel detector of the first embodiment is an X-ray detection element formed on the glass support 1. 2
And the photoconductor 3 is coated with a moisture-proof member 5. For this reason, it is possible to prevent inconvenience that moisture penetrates into lower layers such as the X-ray detection element 2 and the photoconductor 3 due to moisture and the like. Therefore, when the moisture penetrates into the lower layer, the glass support 1 warps due to a difference in expansion coefficient between the glass support 1 and the photoconductor 3, generates mold, deteriorates equipment, and the like. Can be prevented.

The coating treatment of the moisture-proof member 5 is as follows.
Since the coating is performed by spin coating, it is possible to apply the moisture-proof member 5 with a uniform thickness. The photoconductor 3 and the external connection electrode 6
By performing the spin coating process after providing the weir portion 7 that physically separates the moisture-proof member 5 from flowing into the region where the external connection electrode 6 is provided by the spin coating process, The X-ray flat panel detector can be manufactured.

[Modification of First Embodiment] The first embodiment described above is an example in which the X-ray flat panel detector according to the present invention is applied to a direct conversion type X-ray flat panel detector. However, the present invention may be applied to an indirect conversion type X-ray flat panel detector.

In this case, the indirect conversion type X-ray flat panel detector comprises an X-ray detecting element 2 composed of a thin film transistor 10 and a photodiode 11 on a glass support plate 1 and an X-ray detector such as a scintillator as shown in FIG. Line-to-light conversion member 1
After the X-ray-light conversion member 12 and the external connection electrode 6 are physically separated by the weir portion 7, the moisture-proof member 5 is coated by the spin coating.

Thus, it is possible to prevent moisture from penetrating into lower layers such as the X-ray detecting element 2 and the X-ray-to-light conversion member 12 due to moisture and the like. The same effects as those of the above-described first embodiment can be obtained, such as preventing the occurrence of mold and the inconvenience of deterioration of the device.

[Second Embodiment] Next, a second embodiment of the present invention will be described.
An embodiment will be described. In the above-described first embodiment, the moisture-permeable member 5 is coated to prevent moisture from penetrating into the lower layer. However, in the second embodiment, a cover is provided instead of the moisture-proof member 5. Glass is provided by being laminated on the photoconductor 3 or the X-ray-light conversion member 12. The second embodiment is different from the above-described first embodiment only in this point. Therefore, in the description of the second embodiment, only this difference will be described, and redundant description will be omitted.

That is, the X-ray flat panel detector according to the second embodiment includes a photoconductor 3 (or an X-ray-light conversion member 1) provided on a glass support plate 1 as shown in FIG.
2) An adhesive resin 15 is applied on top, and the adhesive resin 15
And the cover glass 16 is adhered to the photoconductor 3 via the.

The adhesive resin 15 may be applied to the photoconductor 3 with a brush or the like. However, as shown by a dotted line in FIG. And then applying the bonding resin 15 by spin coating. Thus, the adhesive resin 15 can be applied on the photoconductor 3 with a uniform thickness while preventing the adhesive resin 15 from flowing into the region of the external connection electrode 6.

Since the moisture permeability of the cover glass 16 is almost zero, a more cooperative moisture-proof effect can be obtained, and mold is generated by warpage of the glass support plate 1 and penetration of moisture into the lower layer. In addition to this, it is possible to prevent the inconvenience that the device is deteriorated more cooperatively, and it is possible to obtain the same effect as the above-described first embodiment.

[Third Embodiment] Next, a third embodiment of the present invention will be described.
An embodiment will be described. In the third embodiment, instead of the glass support plate 1, a glass support plate into which an X-ray shielding member is mixed is provided. Note that only this point is different between the above-described embodiments and the third embodiment. Therefore, in the description of the third embodiment, only this difference will be described, and redundant description will be omitted.

That is, in the X-ray flat panel detector according to the third embodiment, as shown in FIG. 4, instead of the glass support plate 1, for example, "lead (P)
B) ”is provided.

Lead has the function of shielding X-rays. Therefore, by using the glass support plate 18 into which the lead is mixed, it is possible to shield X-rays that pass through the back side of the glass support plate 18 (the direction opposite to the X-ray incident direction).
Originally, when manufacturing an X-ray flat panel detector, a lead plate of approximately the same size as the image receiving surface of the X-ray flat panel detector is required to shield X-rays transmitted through the back side of the X-ray flat panel detector. However, in the third embodiment, the lead plate can be omitted, and the configuration and the weight of the X-ray flat panel detector can be simplified.

FIG. 4 shows an example of a direct conversion type X-ray flat panel detector (FIG. 1). The technical concept of providing the glass support plate 18 containing lead is shown in FIG. Indirect conversion type X-ray flat panel detector (a modification of the first embodiment)
And X provided with a moisture-proof cover glass 16 shown in FIG.
Of course, the same effect as that of the third embodiment can be obtained even when applied to the line plane detector (the second embodiment).

[Fourth Embodiment] Next, a fourth embodiment of the present invention will be described.
An embodiment will be described. In each of the above-described embodiments, the provision of the moisture proof member 5 and the cover glass 16 prevents moisture from penetrating into the lower layer portion. However, in the fourth embodiment, the glass support plate 1 is prevented from warping. By performing the above processing, the glass support plate 1 is prevented from warping. It should be noted that each of the above embodiments is different from the fourth embodiment only in this point. Therefore, this fourth
In the description of the embodiment, only this difference will be described, and redundant description will be omitted.

That is, in the X-ray flat panel detector according to the fourth embodiment, as shown in FIG. 5, the glass support plate 1 and the second glass support plate 21 for preventing warpage are bonded with the adhesive 20. Thus, it has a so-called laminated glass structure having a total thickness of, for example, 1 mm.

The manufacturing process of the laminated glass is performed after forming the X-ray detecting element 2 on the glass support plate 1 and before depositing the photoconductor 3. For this reason, the vapor deposition of the photoconductor 3 is performed after the glass support plate 1 and the second glass support plate 21 are laminated. For example, when amorphous selenium is vapor-deposited as the photoconductor 3, 200 is deposited. A high temperature of ° C is applied to each glass support plate 1, 21. Therefore, the adhesive used for bonding the glass support plates 1 and 21 is 200 °
A material that can withstand the high temperature of C is required. In this embodiment, as the adhesive 20, for example, a silicon-based adhesive (model number 1220C) manufactured by Three Bond Co. is used.

Thus, the deposition process of the photoconductor 3 can be performed after the glass support plates 1 and 21 are bonded. In the vapor deposition process of the photoconductor 3, there is a possibility that moisture will be generated due to high temperature and the glass support plate 1 may be warped. However, by using such a laminated glass structure, it is generated by the vapor deposition process of the photoconductor 3. Glass support plate 1 and second glass support plate 2 with moisture
1 can be prevented from inconvenience.

The glass support plates 1 and 21 may be adhered to each other after the photoconductor 3 is deposited. However, in this case, the glass support plate 1 is warped by the photoconductor 3 deposition process, and There is a risk that non-defective products will be generated.
For this reason, by performing the laminated glass process before the vapor deposition process of the photoconductor 3, the warpage of the glass support plate due to the vapor deposition process of the photoconductor 3 can be almost surely prevented, and the production yield can be improved. it can.

After the laminated glass process, the photoconductor 3 may be subjected to a vapor deposition process to provide the upper electrode 4, and the moistureproof member 5 may be coated from above as shown by a dotted line in FIG. Thereby, during manufacture of the X-ray flat panel detector, it is possible to prevent the glass support plate from being disadvantageously warped by the laminated glass process, and after manufacturing the X-ray flat panel detector, the moisture-proof member 5 and the laminated glass The structure can prevent the disadvantage that the glass support plate warps.

The fourth embodiment is a direct conversion type X-ray flat panel detector shown in FIG. 1 (first embodiment).
In the laminated glass process, the indirect conversion type X-ray flat panel detector (a modification of the first embodiment) shown in FIG. 2 and the moisture-proof cover glass 16 shown in FIG. It is needless to say that the same effect as that of the fourth embodiment can be obtained even if it is performed in the X-ray flat panel detector provided with (2).

[Fifth Embodiment] Next, a fifth embodiment of the present invention will be described.
An embodiment will be described. In the fifth embodiment,
Instead of the second glass support plate 21, a glass support plate mixed with an X-ray shielding member is provided. It should be noted that each of the above-described embodiments is different from the fifth embodiment only in this point. Therefore, in the description of the fifth embodiment, only this difference will be described, and redundant description will be omitted.

That is, in the X-ray flat panel detector according to the fifth embodiment, as shown in FIG. 6, instead of the second glass support plate 21, for example, “lead ( PB) "is used as the laminated glass structure using the second glass support plate 25 mixed therein.

This makes it possible to strongly prevent the glass support plate from warping during and after the manufacture of the X-ray flat panel detector, and to shield X-rays transmitted to the back side of the X-ray flat panel detector. The lead plate provided for X-ray shielding on the back side of the X-ray flat panel detector can be omitted, so that the configuration of the X-ray flat panel detector can be simplified and reduced in weight.

FIG. 6 shows an example of a direct conversion type X-ray flat panel detector (FIG. 1). The glass support plate 25 mixed with lead is used to mount a glass support plate having a laminated glass structure. The technical idea to be formed is the indirect conversion type X shown in FIG.
Even when applied to the X-ray flat panel detector (modification of the first embodiment) and the X-ray flat panel detector provided with the moisture-proof cover glass 16 shown in FIG. Needless to say, the same effects as in the fifth embodiment can be obtained.

Further, each glass support plate to be a laminated glass may have a laminated glass structure as a glass support plate in which an element having an atomic number of 15 or more is mixed. Thereby, it is possible to more strongly shield X-rays transmitted to the back side of the X-ray flat panel detector.

[Other Examples of Application of the Present Invention] Finally, each of the above embodiments is an example of the present invention. For this reason, the present invention is not limited to the above-described embodiments, and various modifications may be made according to the design and the like other than the embodiments as long as the technical idea according to the present invention is not deviated. Of course, changes are possible.

[0050]

The X-ray flat panel detecting apparatus according to the present invention can prevent inconvenience that the substrate is warped due to moisture such as moisture during and after manufacturing.

In addition, it is possible to prevent the occurrence of mold due to the penetration of moisture into the X-ray flat panel detection device and the inconvenience of deterioration of the equipment.

[Brief description of the drawings]

FIG. 1 shows a first embodiment of an X-ray flat panel detection apparatus according to the present invention.
It is sectional drawing of the principal part of the X-ray flat panel detector of a direct conversion type which becomes embodiment of FIG.

FIG. 2 is a cross-sectional view of a main part of an indirect conversion type X-ray flat panel detector which is a modified example of the first embodiment to which the X-ray flat panel detection device according to the present invention is applied.

FIG. 3 shows a second embodiment to which the X-ray flat panel detection device according to the present invention is applied.
It is sectional drawing of the principal part of the X-ray flat panel detector which becomes embodiment of FIG.

FIG. 4 shows a third embodiment to which the X-ray flat panel detecting device according to the present invention is applied.
It is sectional drawing of the principal part of the X-ray flat panel detector which becomes embodiment of FIG.

FIG. 5 is a fourth diagram to which the X-ray flat panel detection device according to the present invention is applied;
It is sectional drawing of the principal part of the X-ray flat panel detector which becomes embodiment of FIG.

FIG. 6 shows a fifth embodiment to which the X-ray flat panel detection device according to the present invention is applied.
It is sectional drawing of the principal part of the X-ray flat panel detector which becomes embodiment of FIG.

FIG. 7 is a sectional view of a main part of a direct conversion type X-ray flat panel detector and an indirect conversion type X-ray flat panel detector.

FIG. 8 is a perspective view for explaining a structure of a main part of a conventional X-ray flat panel detector.

FIG. 9 is a circuit diagram of a main part of a conventional X-ray flat panel detector.

FIG. 10 is a diagram for explaining a problem that the glass support plate of the X-ray flat panel detector is warped by moisture.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Glass support plate, 2 ... X-ray detecting element, 3 ... Photo conductor, 4 ... Top electrode, 5 ... Moisture proof member, 6 ... External connection electrode, 7 ... Weir part (weir part), 10 ... Thin film transistor, 1
DESCRIPTION OF SYMBOLS 1 ... Photodiode, 12 ... X-ray-light conversion member, 15
... resin for bonding, 16 ... cover glass for moisture proof, 18 ... glass support plate mixed with lead, 20 ... adhesive, 21 ... second
Glass support plate, 25 ... second glass support plate mixed with lead

Continued on the front page (72) Inventor Akira Kanno 33 Shinisogocho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside the Toshiba Production Technology Center (72) Inventor Kohei Suzuki 33 Shinisogocho, Isogo-ku, Yokohama-shi, Kanagawa Toshiba Corporation 2G088 EE01 EE27 FF02 GG20 GG21 JJ05 JJ08 JJ10 JJ29 JJ30 JJ33 JJ37 4M118 AA08 AB01 BA05 CA02 CA32 CB06 CB11 CB14 FB03 FB09 FB13 FB16 FB30

Claims (9)

[Claims] A substrate, an X-ray detecting element formed on the substrate, and an incident X-ray formed on the X-ray detecting element converted into a form detectable by the X-ray detecting element. An X-ray flat panel detection device, comprising: an X-ray conversion unit that performs the above-mentioned operation; and a moisture-proof unit laminated on the X-ray conversion unit. 2. A first substrate, a second substrate bonded to the first substrate, an X-ray detection element formed on the first substrate, and formed on the X-ray detection element X-ray conversion means for converting incident X-rays into a form detectable by the X-ray detection element. 3. A first substrate, a second substrate bonded to the first substrate, an X-ray detection element formed on the first substrate, and formed on the X-ray detection element X-ray converting means for converting incident X-rays into a form detectable by the X-ray detecting element; and X-rays having moisture-proof means laminated on the X-ray converting means. Plane detector. 4. The step of laminating the first substrate and the second substrate includes forming an X-ray detection element on the first substrate, and then applying the X-ray conversion means on the X-ray detection element. 4. The X-ray flat panel detection device according to claim 2, wherein the X-ray detection is performed before the formation. 5. The method according to claim 1, wherein the moisture-proof means is a moisture-proof resin.
Item 8. The X-ray flat panel detection device according to item 1. 6. The moisture-proof resin, which is the moisture-proof means, is provided with a weir section that separates the X-ray detection element from an electrode for external connection formed on an edge of the substrate or the first substrate. The X-ray flat panel detecting device according to claim 5, wherein the coating process is performed by spin coating. 7. The X-ray flat panel detection apparatus according to claim 1, wherein the moisture proof means is a glass plate. 8. An X-ray shielding member that blocks X-rays is mixed in the substrate and / or the first substrate and / or the second substrate. The X-ray flat panel detection device according to claim 7. 9. The X-ray flat panel detection device according to claim 8, wherein the X-ray shielding member is an element having an atomic number of 15 or more.