JP2001013212A - Auto handler, its control method, and storage medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an auto handler, its control device, and storage medium capable of reducing burden in the operation of correcting misalignment in a transferring mechanism for devices and preventing errors in transferring devices due to misalignment. SOLUTION: In the automatic correction processing of a transferring mechanism 40 for devices to be executed every predetermined timing, the CPU 11 of a control device 10 obtains an overrun distance B1 from the number of pulses inputted from the encoder 2A of a drive motor 2, divides the overrun distance B1 by the initial value B0 of an overrun distance stored in RAM 16 to obtain a belt expansion ratio D, and updates and stores the expansion ratio D of a timing belt as a correction coefficient in the RAM 16. In moving a suction unit 5, a set target amount of movement C0 is multiplied by the correction coefficient to obtain a target amount of movement C1, and the drive motor 2 is driven by the target amount of movement C1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an auto-handler having a function of correcting a positional deviation caused when a device is conveyed from a supply tray to a carrier or from a carrier to a storage tray by driving a timing belt, and a control thereof. A method and a storage medium.

[0002]

2. Description of the Related Art In an IC test system for measuring electric characteristics of a semiconductor device such as an IC (Integrated Circuit), an auto handler for transporting a device to be measured is used.

FIG. 5A is a diagram showing an auto-handler having two systems of device transport mechanisms in a supply unit and a storage unit, and FIG. 5B is a diagram illustrating a carrier 300A in the supply unit and a carrier in the storage unit. It is a figure showing 300B. The transfer mechanism 100 of the device of the auto-handler includes a supply hand 20 as a device transfer unit on the supply side and a storage hand 30 as a device transfer unit on the storage side. Supply the device under test from the supply tray set in the loader to the supply carrier 3
The device to be measured is transported by the supply hand 20 to 00A, and the device to be measured is transported from the storage carrier 300B to the storage tray by the storage hand 30. Since the carrier circulates in the auto handler, the supply carrier 300A and the storage carrier 300B are the same except for the difference in the existing position. As shown in FIG. 5 (A), each of the device transport mechanisms 100 of the supply unit and the storage unit has an X-axis driving motor and a Y-axis driving motor when the vertical direction in the drawing is the Y-axis direction and the horizontal direction is the X-axis direction. 2. Timing belt 3, pulley 4, suction unit 5 for sucking devices, limit sensor group 6A for detecting XY-direction escape movement (overrun) of suction unit 5.
6D, arm 7, shaft 8 and CPU in the control device
(Central Processing Unit) drive control processing X
The motor 2 for driving the axis or the motor 2 for driving the Y axis is controlled.

When each motor 2 is driven, each pulley 4 connected via each coupling 9 connected to its rotary shaft is rotated, and each timing belt 3 wound around each pulley 4 is rotated. Drive. Each pulley 4 on the other end side of each timing belt 3 is driven, and each shaft 8 serving as a rotation axis of each driven pulley 4 is rotated in conjunction with the driven pulley 4. That is, when the first motor is driven, the suction unit 5 moves in the X-axis direction together with the arm 7, and when the second motor is driven, the suction unit 5 is moved in the longitudinal direction of the arm 7, that is, in the Y-axis direction. The moving range of the suction unit 5 in the X direction is limit sensors 6C and 6D.
And the moving range in the Y direction is limited by the limit sensor 6.
A, 6B. When the suction unit 5 exceeds each limit position of each movement range, each of the limit sensors 6A to 6A
D outputs the position detection signal to the CPU of the control device,
The drive of each motor 2 in U is stopped to prevent runaway.

[0005] The storage device in the control device is provided with a device transfer position in which each target movement amount from the device position on the supply tray to the supply carrier 300A or from the storage carrier 300B to each device storage position on the storage tray is set in advance. I remember the map. In the device transfer position map,
For example, as shown in FIG.
The origin coordinates of the position where the devices A and 300B are placed and the target movement amount of the suction unit 5 until reaching the origin coordinates are set, and the CPU is preset in this device transfer position map. By driving the X-axis drive motor 2 and the Y-axis drive drive motor 2 by a movement amount corresponding to the target movement amount, each drive amount of the supply hand 20 and the accommodation hand 30 is controlled.

[0006] The conventional device transport mechanism 10 as described above.
0 indicates that the actual device transfer position may be shifted when each motor 2 is driven by a preset target movement amount at the beginning of assembly or the like. Conventionally, when the transfer position of the device is shifted, the position is corrected by an operator's positioning operation as described below. FIG. 6A is a diagram showing a jig 200 used for position correction of the conventional device transport mechanism 100.
(B) is a diagram showing a position correction screen 400 displayed when the position of the conventional device transport mechanism 100 is corrected.

That is, the conventional device transport mechanism 100
Position correction of the supply carrier 300A and the accommodation carrier 3
6A, a jig 200 for position correction as shown in FIG. 6A is set, and the suction unit 5 of the device transfer mechanism 100 is set in each position correction hole 200 provided in the jig 200.
In order to move to the position A, “→” “←” “↑” “↓” on the position correction screen 400 as shown in FIG.
By operating a cursor movement key such as the above, the position in the X and Y directions is adjusted so that the suction portion of the suction unit 5 enters the center of the position correction hole 200A of the jig 200, and this adjustment is performed from the reference point. The movement amount to the subsequent position is additionally stored as a corrected target movement amount in the parameter of the apparatus setting, and thereafter, the drive control of the device transport mechanism 100 is performed based on the additionally stored target movement amount.

[0008]

However, for example, when the timing belt 3 is stretched due to aging, even if the conventional so-called origin position correction is performed, errors accumulate at remote positions and the device is moved to the correct position. Cannot be transported

According to the present invention, an automatic handler capable of automatically correcting a transfer position shift in device transfer of an auto handler to reduce a load of a position correction operation and preventing a device transfer error due to a position shift, a control method thereof, And a storage medium.

[0010]

The present invention has the following features in order to achieve the above object. In the following description of the means, a configuration corresponding to the embodiment will be exemplified by parentheses as an example. In the case where the same words as those in the embodiment are used, only symbols are described.

The invention according to claim 1 is an auto-handler having a transfer means (for example, a device transfer mechanism 40 shown in FIG. 1) for transferring a device to a predetermined transfer position by driving a timing belt. Calculation means for calculating a correction coefficient corresponding to expansion and contraction (for example, FIG.
And a correction means (for example, CPU 11 shown in FIG. 1) for correcting a device transfer position shift by the transfer means based on the correction coefficient calculated by the calculation means. I have.

According to the first aspect of the present invention, there is provided an auto-handler having a transporting means for transporting a device to a predetermined transporting position by driving a timing belt, wherein the correction coefficient is calculated by the calculating means in accordance with expansion and contraction of the timing belt. Is calculated by the correction means, and the transfer position deviation of the device of the transfer means is corrected based on the calculated correction coefficient.

According to a fifth aspect of the present invention, there is provided a method for controlling an auto-handler including a transfer means (for example, a device transfer mechanism 40 shown in FIG. 1) for transferring a device to a predetermined transfer position by driving a timing belt. A calculation step (for example, CPU 11 shown in FIG. 1) for calculating a correction coefficient corresponding to the expansion and contraction of the timing belt, and a correction step (for example, for correcting a device transfer position deviation by the transfer means based on the calculated correction coefficient) CPU 1 shown in FIG.
1).

According to the fifth aspect of the present invention, there is provided a method of controlling an auto-handler having a transfer means for transferring a device to a predetermined transfer position by driving a timing belt, wherein a correction coefficient according to expansion and contraction of the timing belt is provided. And a correction step of correcting a transfer position deviation of the device of the transfer means based on the calculated correction coefficient.

According to a sixth aspect of the present invention, there is provided a storage medium storing a program for controlling an auto-handler having a transport means for transporting a device to a predetermined transport position by driving a timing belt, wherein the expansion and contraction of the timing belt is performed. And a program code for calculating a correction coefficient according to the correction coefficient, and a program code for correcting, based on the calculated correction coefficient, a transfer position shift of the device by the transfer unit. And

According to the sixth aspect of the present invention, there is provided a storage medium storing a program for controlling an auto-handler having a transfer means for transferring a device to a predetermined transfer position by driving a timing belt. A program is stored which includes a program code for calculating a correction coefficient corresponding to the expansion and contraction of the belt, and a program code for correcting a transfer position shift of the transfer unit based on the calculated correction coefficient. .

Therefore, it is possible to reduce the operator's work load required for correcting the device transfer position shift, and to facilitate the position shift correction.

Further, as in the second aspect of the present invention, in the auto handler according to the first aspect of the present invention, it is effective that the calculating means automatically calculates the correction coefficient at a predetermined timing.

According to the second aspect of the present invention, the calculating means automatically calculates a correction coefficient at a predetermined timing, and the correcting means calculates the correction coefficient based on the calculated correction coefficient. Since the device transfer position deviation is corrected by using this method, a device transfer error due to the device transfer position deviation can be prevented, and the operator does not need to be particularly aware of the timing for correcting the device transfer position deviation.

Further, as in the third aspect of the present invention, in the automatic handler according to the first aspect of the present invention, an initial value storage means (for example, an initial value storage means for storing an initial value (B ₀ ) of the escape movement distance of the transfer means). RAM 16 shown in FIG. 1) and measuring means (for example, encoder 2A and CPU 1 shown in FIG. 1) for measuring the escape movement distance (B ₁ ) of the transport means at the time of correction.
1), wherein the calculating means divides the escape movement distance measured by the measurement means by an initial value of the escape movement distance stored in the initial value storage means, thereby calculating the timing belt. It is effective to calculate the expansion and contraction ratio and use the expansion and contraction ratio of the belt as a correction coefficient.

According to the third aspect of the present invention, the initial value storage means stores the initial value of the escaping movement distance of the transport means, and the measuring means evacuates the transport means at the time of correction. The moving distance is measured, and the calculating means calculates the expansion / contraction ratio of the timing belt by dividing the measured escape moving distance by the initial value of the escape moving distance stored in the initial value storage means. The expansion / contraction rate of the timing belt is used as a correction coefficient.

Therefore, the measured escape movement distance,
Since the correction coefficient can be obtained by dividing by the initial value of the escape movement distance stored in advance, the correction coefficient can be easily calculated without requiring the operator to perform an operation such as position adjustment of the transporting means. Device transfer position deviation can be corrected.

Further, as in the fourth aspect of the present invention, in the automatic handler according to the first aspect of the present invention, a correction coefficient storage means (for example, the RAM 16 shown in FIG. 1) for storing the expansion / contraction ratio of the timing belt as a correction coefficient. Further comprising
The correction unit updates the storage content of the correction coefficient storage unit with the correction coefficient calculated by the calculation unit,
By multiplying the correction coefficient updated and stored in the correction coefficient storage means by a preset target movement amount (C ₀ ) of the transfer means, and correcting the target movement amount, the transfer position deviation of the device is corrected. It is effective.

According to the auto handler of the fourth aspect,
The expansion / contraction rate of the timing belt is stored as a correction coefficient by the correction coefficient storage unit, and the storage unit of the correction coefficient storage unit is updated by the correction unit with the correction coefficient calculated by the calculation unit. By multiplying the updated and stored correction coefficient by a preset target movement amount of the transfer means, and correcting the target movement amount, the transfer position deviation of the device is corrected.

Therefore, the correction coefficient is newly updated each time the position is corrected, and the corrected target movement amount is calculated by the correction coefficient. There is no need to perform operations such as setting, and the work load at the time of position correction is reduced.

[0026]

Embodiments of the present invention will be described below in detail with reference to the drawings. 1 to 4 are diagrams showing an embodiment of an auto handler to which the present invention is applied.

First, the configuration will be described. FIG. 1 is a block diagram showing a main configuration of a control system of a device transport mechanism 40 of the auto handler according to the present embodiment. Since the configuration of the device transport mechanism 40 is the same as the configuration of the device transport mechanism 100 shown in FIG. 5A, the description of the configuration and the operation will be omitted, and the device transport mechanism 100 shown in FIG. The same reference numerals are used for the same parts as. In FIG. 1, a control device 10 provided in a device transport mechanism 40 includes a CPU (Central Processing Unit).
11, drive control unit 12, input unit 13, display unit 14, RO
M (Read Only Memory) 15, RAM (Random Access)
Memory) 16, storage device 17, and I / F (InterFac)
e) The control unit 10 controls the motor 2 and the encoder 2 of the device transport mechanism 40.
A, The limit sensor group 6 is controlled.

The CPU 11 stores a system program stored in the ROM 15 or the storage device 17 and an application program designated from various application programs corresponding to the system into a RAM.
16 is expanded in a program storage area (not shown) in the RAM 16 and various instructions or data input from the input unit 13 are stored in the RAM.
16 to temporarily execute various processes in accordance with the application instructions stored in the ROM 15 or the storage device 17 in accordance with the input instruction and the input data, and store the processing results in the RAM 16.
It is displayed on the display unit 14. Then, the storage device 17 is instructed to input the processing result stored in the RAM 16 from the input unit 13.
Save to the save destination in.

The CPU 11 monitors the arrival of a predetermined timing, such as at the start of each lot or every elapse of a predetermined time, and when the predetermined timing comes, the automatic correction processing program stored in the ROM 15 or the storage device 17. (See FIG. 4)
And the position of the device transport mechanism 40 is corrected. In the automatic correction processing, the CPU 11
Overrun distance B ₁ is the distance to the overrun was measured from the reference point of 0, also reads the initial value B ₀ of the overrun distance stored in the RAM 16, the over-the overrun distance B ₁ By dividing by the initial value B ₀ of the run distance, a belt expansion / contraction ratio D which is an expansion / contraction ratio of the timing belt 3 is calculated. Then, the calculated value of the belt expansion / contraction rate D is used as a new correction coefficient, and RA
By updating and storing in the correction coefficient memory area of M16 and multiplying the predetermined target movement amount C ₀ by the current correction coefficient,
Calculates the target movement amount C ₁ corrected.

The drive control unit 12 generates a drive control signal for controlling the driving of each motor 2 in the transport mechanism 40 of the auto handler in accordance with various instruction signals input from the CPU 11, and controls the driving of each motor 2. I do.

The input unit 13 includes a keyboard and a mouse provided with a cursor movement key, a number input key, various function keys, and the like, and a touch panel. The input unit 13 outputs a pressed signal of a pressed key and a mouse position signal to the CPU 11.

The display unit 14 is a CRT (Cathode Ray Tub).
e), a liquid crystal display (LCD), or the like, and displays display data input from the CPU 11.

The ROM 15 previously stores a basic program corresponding to the control unit 10 of the auto handler, and various parameters corresponding to the auto handler such as a device transfer position map and a timing of position correction. The device transport position map, object movement amount C ₀ is the amount of movement to the transport position of each device on the tray or on the carrier from a reference point is set. The timing of the position correction is set in advance as, for example, every lot start or every elapse of a predetermined time, or it can be set by an operator.

The RAM 16 forms a program storage area for expanding various data when the CPU 11 executes the various application programs.
11 executes the above-described automatic correction processing, the initial value B ₀ of the device transfer position map, the correction coefficient, and the overrun distance.
For example, various memory areas for storing various parameters required for position correction are formed. The correction coefficient is determined by CPU1
When a new correction coefficient (belt expansion / contraction ratio D) is calculated in the automatic updating process executed by step 1, the calculated correction coefficient is updated and stored.

The storage device 17 stores programs, data, and the like in advance, and is made up of a magnetic or optical recording medium or a semiconductor memory. The storage device 17 is fixedly provided in the control device 10 or is detachably mounted. The storage device 17 stores the system program, various application programs, data processed by each processing program, and the like. Is stored.

The I / F 18 receives a limit position detection signal of the suction unit 5 of the auto handler from a limit sensor group 6 provided in each drive unit of the auto handler.
The number of pulses corresponding to the amount of motor rotation input from the encoder 2A provided to each motor 2 is transmitted to the CPU 11.

FIG. 2 shows the suction unit 5 of the auto handler.
FIG. 2 is a diagram schematically illustrating a partial configuration of a transport mechanism 50 of FIG. The transport mechanism 50 of the suction unit 5 is, for example, a supply hand or a storage hand, and is a unit that transports the device to supply or store the device at a predetermined position.
The transport mechanism 50 of the suction unit 5 is provided so as to transport the device in each of the X-axis direction and the Y-axis direction, and includes a motor 2, a timing belt 3, a pulley 4, and a suction pad 5.

The motor 2 is, for example, a drive motor for driving the transport mechanism 50 of the suction unit 5, and the drive of the motor 2 is controlled by the drive control unit 12 of the control device 10. The motor 2 includes an encoder 2A that generates the number of pulses from the rotation amount of the motor 2, and the generated number of pulses is input to the CPU 11 via the I / F unit 18,
The movement amount (distance) of the suction pad 5 in the transport mechanism 50 of the suction unit 5 is calculated.

The timing belt 3 is wound around a pulley 4A interlocked with the rotation of the motor 2 and a driven pulley 4B, and converts the rotational motion of the motor 2 into a linear motion to ensure reliable transmission without slip. In the timing belt 3,
An arm (not shown) or the suction unit 5 is directly connected, and the position of the suction unit 5 is moved by the transmission of the timing belt 3. FIG. 2 shows an example in which the suction unit 5 is directly connected to the timing belt 3.

The suction unit 5 is directly connected to the timing belt 3 as described above, or is disposed on an arm which is moved by the timing belt 3, and has a suction pad 5A for sucking a device at the tip. The suction unit 5 is moved to a position where the device is mounted, and the device is sucked by sucking air from the center of the suction pad 5A. When the suction is stopped, the device can be detached.

The limit sensor group 6 is various sensors fixedly provided at a predetermined position of the device transport mechanism 40 of the auto handler. For example, the limit sensor group 6 includes a supply hand that sucks a device from a supply tray and transports the device onto a supply carrier. A limit position detection sensor that detects each movement limit range, a limit position detection sensor that detects each movement limit range of the accommodation hand that sucks the device on the accommodation carrier and transports it to the accommodation tray, and a reference that is a reference position of the suction unit 5. It is a reference point sensor or the like that detects the position of a point. As the limit position detection sensor,
The front limit sensor 6A and the back limit sensor 6 in FIG.
B, left limit sensor 6C, right limit sensor 6D, and the like. Upon detecting that the suction unit 5 has reached each of the above sensors, a position detection signal is transmitted to the CP via the I / F unit 18.
Output to U11.

Next, the operation of the transport mechanism 50 of the suction unit 5 and the operation at the time of position correction will be described. FIG. 3 is a diagram schematically illustrating the position correction operation of the transport mechanism 50 of the suction unit 5, and FIG. 4 is a flowchart illustrating the flow of the automatic correction process. First, referring to FIG.
The operation of the transport mechanism 50 and the concept of position correction according to the present invention will be described.

First, during a normal device transfer operation, the CPU 11 of the control device 10 reads a device transfer position map stored in the ROM 15 or the storage device 17, and indicates a distance from a reference point to a predetermined device transfer position. In addition to reading out the target movement amount C ₀ , the RAM 1
6 reads out the correction coefficient stored in, by multiplying the correction coefficient with the intended moving amount C _0, calculates the object moving amount C ₁ corrected. Then, object CPU11 the purpose movement amount data for driving the transport mechanism 50 of the object moving amount C ₁ only adsorption unit 5 to the drive control unit 12, and outputs a drive control signal, the drive control unit 12 that has received The motor 2 is rotated by the number of rotations corresponding to the movement amount data. Pulley 4
The timing belt 3 stretched between A and 4B is a motor 2
Is moved by the target movement amount C ₁ in accordance with the rotation of, the position of the suction unit 5 coupled to the timing belt 3 also moves by the target movement amount C ₁ .

In the position correction operation of the transport mechanism 50 of the suction unit 5 performed at a predetermined timing, such as at the start of each lot or at the elapse of a predetermined time, first, the CPU 11 controls the drive control unit 12 to perform the position correction operation. A signal is output, and the drive control unit 12 drives the motor 2 to move the suction unit 5 from the reference point to an overrun position.
At each position of the overrun, front, back, left, and right limit sensors 6A, 6B, 6C, and 6D are provided.
When the suction unit 5 arrives, a position detection signal is output to the CPU 11 at that position. When the motor 2 is moved to the overrun position, the encoder 2A provided in the motor 2 converts the rotation amount of the motor 2 into a pulse number, and outputs the pulse number to the CPU 11 of the control device 10 via the I / F unit 18. I do. The CPU 11 of the control device 10 obtains the overrun distance B ₁ from the input number of pulses, divides the overrun distance B ₁ by the initial value B ₀ of the overrun distance stored in the RAM 16, and calculates the belt expansion / contraction ratio. Calculate D.

In FIG. 3, A ₀ is the distance from the pulley to the reference point (initial value) B ₀ is the distance from the reference point to the overrun (initial value of the overrun distance) C ₀ is an arbitrary value from the reference point of the distance to the device transfer position a ₁ (initial value of the objective movement amount), the distance from the pulley to the reference point (after the belt stretching) B ₁ is the distance from the reference point to the overrun (overrun after the belt stretching Distance) C ₁ is the distance from the reference point to an arbitrary device transfer position (corrected target movement amount) X ₀ is the coordinate of the reference point X ₁ is the coordinate of the arbitrary device transfer position.

The belt expansion / contraction ratio D is obtained by the following equation (1). D = B ₁ / B ₀ (1) The belt expansion / contraction ratio D takes a value smaller than 1 when the timing belt 3 expands, and takes a value larger than 1 when the timing belt 3 contracts. .

The coordinates X _{0 of the} reference point can be obtained by the following _equation : X ₀ = A ₀ × D (2), and the coordinates X ₁ of an arbitrary device transfer position can be obtained as follows: X ₁ = X ₀ + C ₀ × D (3)

Further, if the coordinate X _{0 of the} reference point is sufficiently small, it can be considered that X ₀ ≒ 0 (4). Therefore, the equation (3) is expressed as follows: X ₁ = C ₀ × D (5)

That is, the coordinate X ₁ of an arbitrary device transfer position is a value obtained by multiplying the required movement amount (the initial value B ₀ of the target movement amount) by the belt expansion / contraction ratio D as a correction coefficient.

Next, referring to the flowchart of FIG.
The flow of the position correction operation of the device transport mechanism 40 executed by the CPU 11 will be described. First, the control unit 10 of the auto-handler reads out the automatic correction processing program from the ROM 15 or the storage device 17 at the time of activation, and
Various memory areas for automatic correction processing are formed in the AM 16. The RAM 16 stores an initial value B _{0 of} the overrun distance and a correction coefficient (belt expansion / contraction rate D) as various data necessary for setting the timing for performing position correction and performing the correction processing.

When the set position correction timing arrives, or when the position correction instruction input from the input unit 13 of the control device 10 is input (step S1; Yes), the CPU 11 first sets the motor. Drive 2
The suction unit 5 is moved from the reference point to the overrun position, and receives the number of pulses generated by the encoder 2A and corresponding to the number of rotations of the motor 2 for this amount of movement. The CPU 11 calculates the overrun distance B ₁ from the number of pulses.
Is obtained (step S2). Then, the overrun distance B ₁ obtained, divided by the initial value B ₀ of the overrun distance stored in the RAM 16 (step S3), and a value obtained by dividing the belt stretch ratio D. And
The belt expansion / contraction ratio D is updated and stored as the current correction coefficient instead of the correction coefficient stored in the RAM 16 (step S4).

Thereafter, when the suction unit 5 is moved by the target movement amount C _{0 to} each device transfer position set in the device transfer position map, the CPU 11 sets the target movement amount C _{0 to the} preset target movement amount C ₀ . always multiplied by the current correction coefficient, it calculates the object moving amount C ₁ corrected to drive the motor 2 so as to move the suction unit 5 by this object moving amount C ₁ (step S5).

If it is determined in step S1 that the timing for performing position correction has not arrived (step S1;
No), without performing the position correction operation, is multiplied by the correction coefficient stored currently RAM16 the purpose moving amount C _0, obtains the desired movement amount C ₁ corrected, the object movement amount C ₁ by the motor 2 The suction unit 5 is driven to move.

As described above, according to the auto-handler according to the present invention, when the predetermined timing comes, the CPU 11 of the control device 10 executes the automatic correction process to correct the position of the device transport mechanism 40. I do. That is, in the automatic correction processing, CPU 11 is measured based overrun distance B ₁ is the distance from the reference point to overrun the number of pulses inputted from the encoder 2A provided in the motor 2, the overrun distance B ₁ is divided by the initial value B ₀ of the overrun distance stored in the RAM 16, obtains the belt stretch ratio D. Then, as the correction coefficient of the belt stretch ratio D, and updated and stored in the RAM 16, when moving the position of the suction unit 5 purposes only moving amount C ₀ is a coefficient correction for this purpose the moving amount C ₀ (belt stretch ratio D) multiplied by, calculates the target movement amount C ₁ in the corrected driving the objective movement amount C ₁ by the motor 2.

Therefore, since the position correction is automatically performed, the work load required for the position correction can be reduced, and the correction of the position shift can be easily performed. Further, since the position shift of the device transfer mechanism 40 is automatically corrected at a predetermined timing such as each time of a lot start or every predetermined time, it is possible to prevent a device transfer error due to the position shift, and further, the operator can correct the position shift. There is no need to be particularly aware of when to do it.

In the automatic correction process according to the present embodiment, even when the position is not corrected, similarly to the case where the position is corrected,
At the time of driving the device conveying mechanism 40, by multiplying the correction coefficient (belt scaling factor D) with the purpose moving amount C _0, a description has been given of an example of a conveyance operation of the device for calculating a target amount of movement C ₁ that reflects the correction factor not limited to this example, upon the position correction, and calculates the target movement amount C ₁ which is multiplied by the correction factor to each object moving amount C _0, the device transfer position map which sets a new objective moving amount C ₁ It was updated and stored in the RAM16 and the like, then during device conveying operation until the position correction, only object movement amount C ₁ which is set in this device the transport position map, may be driven device conveying mechanism 40.

[0057]

According to the first, fifth and sixth aspects of the present invention, it is possible to reduce the operator's work load required for correcting the device transfer position shift and to facilitate the position shift correction.

According to the second aspect of the present invention, it is possible to prevent a device transfer error due to a position shift of the device transfer mechanism, and it is necessary for the operator to pay special attention to the timing for correcting the position shift of the device transfer mechanism. There is no.

According to the third aspect of the present invention, the correction coefficient is obtained by dividing the measured escape movement (overrun) distance by the previously stored initial value of the escape movement (overrun) distance. Therefore, the correction coefficient can be easily calculated and the device transfer position deviation can be corrected without requiring an operation such as position adjustment of the transfer means by the operator.

According to the fourth aspect of the present invention, the correction coefficient is newly updated each time the position is corrected, and the corrected target movement amount is calculated by the correction coefficient. There is no need to perform operations such as input work and resetting of the target movement amount, and the work load at the time of correcting the device transfer position shift is reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a main configuration of a control system of a device transport mechanism 40 including an auto handler according to the present embodiment.

FIG. 2 is a diagram schematically illustrating a partial configuration of a transport mechanism 50 of the suction unit 5;

FIG. 3 is a view schematically showing a position correcting operation of a transport mechanism of the suction unit.

FIG. 4 is a flowchart illustrating a flow of an automatic correction process.

FIG. 5A is a diagram illustrating an auto-handler having two systems of device transport mechanisms in a supply unit and a storage unit, and FIG.
Is the carrier 300A on the supply unit side and the carrier 3 on the storage unit side
FIG.

FIG. 6A is a diagram showing a jig 200 used for position correction of the conventional device transport mechanism 100, and FIG.
FIG. 3 is a diagram showing a conventional position correction screen 400.

[Explanation of symbols]

 2 Motor 3 Timing belt 4 Pulley 5 Suction unit 6 Limit sensor group 7 Arm 8 Axis 9 Coupling 10 Control device 11 CPU 12 Drive control unit 13 Input unit 14 Display unit 15 ROM 16 RAM 17 Storage device 18 I / F unit 20 Supply Hand 30 Housing hand 40 Device transport mechanism

Claims (6)

[Claims] 1. An auto-handler having a transport unit for transporting a device to a predetermined transport position by driving a timing belt, comprising: a calculating unit that calculates a correction coefficient according to expansion and contraction of the timing belt; Based on the corrected correction factor,
An auto-handler, comprising: a correction unit configured to correct a device transfer position shift by the transfer unit. 2. The auto-handler according to claim 1, wherein said calculating means automatically calculates the correction coefficient at a predetermined timing. 3. The method according to claim 1, further comprising: an initial value storage unit configured to store an initial value of the escaping movement distance of the transport unit; and a measurement unit configured to measure an escaping movement distance of the transport unit at the time of correction. The means calculates the expansion / contraction ratio of the timing belt by dividing the escape movement distance measured by the measurement means by the initial value of the escape movement distance stored in the initial value storage means, 2. The auto-handler according to claim 1, wherein an expansion ratio is used as a correction coefficient. 4. A correction coefficient storage means for storing the expansion / contraction rate of the timing belt as a correction coefficient, wherein the correction means updates the storage contents of the correction coefficient storage means with the correction coefficient calculated by the calculation means. And
Multiplying a correction coefficient updated and stored in the correction coefficient storage means by a preset target movement amount of the conveyance means, and correcting the target movement amount to correct a transfer position deviation of the device. The auto handler according to claim 1, wherein 5. A method for controlling an auto-handler comprising a transport unit for transporting a device to a predetermined transport position by driving a timing belt, comprising: a calculating step of calculating a correction coefficient according to expansion and contraction of the timing belt. A correction step for correcting a device transfer position shift by the transfer means based on the correction coefficient. 6. A storage medium storing a program for controlling an auto-handler having a transfer means for transferring a device to a predetermined transfer position by driving a timing belt, wherein a correction coefficient according to expansion and contraction of the timing belt is stored. A storage medium storing a program including: a program code for calculating; and a program code for correcting a transfer position shift of a device by the transfer unit based on the calculated correction coefficient.