JP2000501832A5 - - Google Patents

Download PDF

Info

Publication number
JP2000501832A5
JP2000501832A5 JP1997521378A JP52137897A JP2000501832A5 JP 2000501832 A5 JP2000501832 A5 JP 2000501832A5 JP 1997521378 A JP1997521378 A JP 1997521378A JP 52137897 A JP52137897 A JP 52137897A JP 2000501832 A5 JP2000501832 A5 JP 2000501832A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997521378A
Other languages
English (en)
Other versions
JP4091979B2 (ja
JP2000501832A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US1996/019261 external-priority patent/WO1997021250A1/en
Publication of JP2000501832A publication Critical patent/JP2000501832A/ja
Publication of JP2000501832A5 publication Critical patent/JP2000501832A5/ja
Application granted granted Critical
Publication of JP4091979B2 publication Critical patent/JP4091979B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

Figure 2000501832
Figure 2000501832
Figure 2000501832
Figure 2000501832
Figure 2000501832
Figure 2000501832
Figure 2000501832
JP52137897A 1995-12-04 1996-12-04 マイクロブリッジ検出器 Expired - Lifetime JP4091979B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US790995P 1995-12-04 1995-12-04
US60/007,909 1995-12-04
PCT/US1996/019261 WO1997021250A1 (en) 1995-12-04 1996-12-04 Infrared radiation detector having a reduced active area

Publications (3)

Publication Number Publication Date
JP2000501832A JP2000501832A (ja) 2000-02-15
JP2000501832A5 true JP2000501832A5 (ja) 2004-11-04
JP4091979B2 JP4091979B2 (ja) 2008-05-28

Family

ID=21728755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52137897A Expired - Lifetime JP4091979B2 (ja) 1995-12-04 1996-12-04 マイクロブリッジ検出器

Country Status (7)

Country Link
US (1) US5760398A (ja)
EP (1) EP0865672B1 (ja)
JP (1) JP4091979B2 (ja)
AU (1) AU1408497A (ja)
DE (1) DE69610118T2 (ja)
IL (1) IL124691A (ja)
WO (1) WO1997021250A1 (ja)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7495220B2 (en) * 1995-10-24 2009-02-24 Bae Systems Information And Electronics Systems Integration Inc. Uncooled infrared sensor
US5811815A (en) * 1995-11-15 1998-09-22 Lockheed-Martin Ir Imaging Systems, Inc. Dual-band multi-level microbridge detector
US6515285B1 (en) * 1995-10-24 2003-02-04 Lockheed-Martin Ir Imaging Systems, Inc. Method and apparatus for compensating a radiation sensor for ambient temperature variations
US6271802B1 (en) * 1997-04-14 2001-08-07 Mems Optical, Inc. Three dimensional micromachined electromagnetic device and associated methods
US6459084B1 (en) 1997-05-30 2002-10-01 University Of Central Florida Area receiver with antenna-coupled infrared sensors
JP3529596B2 (ja) * 1997-08-06 2004-05-24 株式会社東芝 赤外線固体撮像装置及びその製造方法
US6144030A (en) * 1997-10-28 2000-11-07 Raytheon Company Advanced small pixel high fill factor uncooled focal plane array
GB2335077B (en) * 1998-03-04 2003-05-28 Marconi Gec Ltd Radiation detectors
WO2000012984A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer with a serpentine stress balancing member
WO2000012985A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including an absorber made of a material having a low deposition-temperature and a low heat-conductivity
WO2000012986A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including a reflective layer
FR2788129B1 (fr) * 1998-12-30 2001-02-16 Commissariat Energie Atomique Detecteur bolometrique a antenne
GB2353428A (en) * 1999-08-20 2001-02-21 Bayerische Motoren Werke Ag Monitoring system for a vehicle
JP2001264441A (ja) * 2000-01-14 2001-09-26 Seiko Instruments Inc カロリーメーターとその製造方法
AU2001262915A1 (en) * 2000-02-24 2001-09-03 University Of Virginia Patent Foundation High sensitivity infrared sensing apparatus and related method thereof
US6690014B1 (en) 2000-04-25 2004-02-10 Raytheon Company Microbolometer and method for forming
JP4795610B2 (ja) 2000-05-01 2011-10-19 ビーエイイー・システムズ・インフォメーション・アンド・エレクトロニック・システムズ・インテグレイション・インコーポレーテッド 放射センサの温度変動を補償するための方法および装置
JP4612932B2 (ja) * 2000-06-01 2011-01-12 ホーチキ株式会社 赤外線検出素子および赤外線2次元イメージセンサ
JP3415817B2 (ja) * 2000-08-28 2003-06-09 アーベル・システムズ株式会社 太陽電池
US6777681B1 (en) 2001-04-25 2004-08-17 Raytheon Company Infrared detector with amorphous silicon detector elements, and a method of making it
US6476392B1 (en) * 2001-05-11 2002-11-05 Irvine Sensors Corporation Method and apparatus for temperature compensation of an uncooled focal plane array
US7049597B2 (en) * 2001-12-21 2006-05-23 Andrew Bodkin Multi-mode optical imager
US8174694B2 (en) * 2001-12-21 2012-05-08 Bodkin Design And Engineering Llc Hyperspectral imaging systems
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems
US7796316B2 (en) 2001-12-21 2010-09-14 Bodkin Design And Engineering Llc Micro-optic shutter
US6815659B2 (en) * 2002-01-14 2004-11-09 Palantyr Research, Llc Optical system and method of making same
JP2004062938A (ja) * 2002-07-25 2004-02-26 Pioneer Electronic Corp 球面収差補正装置及び球面収差補正方法
US6689628B1 (en) 2002-08-15 2004-02-10 Bae Systems Information And Electronic Systems Integration Inc. Method for dense pixel fabrication
JP3944465B2 (ja) 2003-04-11 2007-07-11 三菱電機株式会社 熱型赤外線検出器及び赤外線フォーカルプレーンアレイ
US7013570B2 (en) * 2003-06-18 2006-03-21 Irwin-Industrial Tool Company Stud finder
US7030378B2 (en) * 2003-08-05 2006-04-18 Bae Systems Information And Electronic Systems Integration, Inc. Real-time radiation sensor calibration
US6974219B1 (en) 2004-07-09 2005-12-13 Bae Systems Information And Electronic Systems Integration Inc Zero reflectance design for tilted devices
FR2883417B1 (fr) * 2005-03-16 2007-05-11 Ulis Soc Par Actions Simplifie Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur et procede de fabrication de ce detecteur
FR2884608B1 (fr) * 2005-04-18 2007-05-25 Commissariat Energie Atomique Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur
DE102005018965B3 (de) * 2005-04-23 2006-10-12 HAWK Hochschule für angewandte Wissenschaft und Kunst Bildwandler mit einer beheizbaren Wandlerschicht
US7439513B2 (en) * 2005-08-16 2008-10-21 Institut National D'optique Fast microbolometer pixels with integrated micro-optical focusing elements
US7462831B2 (en) * 2006-01-26 2008-12-09 L-3 Communications Corporation Systems and methods for bonding
US7459686B2 (en) * 2006-01-26 2008-12-02 L-3 Communications Corporation Systems and methods for integrating focal plane arrays
US7655909B2 (en) * 2006-01-26 2010-02-02 L-3 Communications Corporation Infrared detector elements and methods of forming same
US7718965B1 (en) 2006-08-03 2010-05-18 L-3 Communications Corporation Microbolometer infrared detector elements and methods for forming same
US8153980B1 (en) 2006-11-30 2012-04-10 L-3 Communications Corp. Color correction for radiation detectors
DE102008005167A1 (de) 2008-01-19 2009-07-23 Testo Ag Wärmebildkamera
US8063370B2 (en) * 2009-01-16 2011-11-22 Hanvision Co., Ltd. Semiconductor device and method of manufacturing the same
DE102009032486A1 (de) * 2009-07-09 2011-01-13 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
US8546757B2 (en) * 2010-04-28 2013-10-01 L-3 Communications Corporation Pixel structure for microbolometer detector
US9568367B2 (en) * 2010-05-30 2017-02-14 Technion Research And Development Foundation Ltd. Sensing device having a thermal antenna and a method for sensing electromagnetic radiation
DE102010027679A1 (de) 2010-07-20 2012-01-26 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
JP5644257B2 (ja) * 2010-08-20 2014-12-24 Tdk株式会社 温度センサ
US8808888B2 (en) 2010-08-25 2014-08-19 Applied Materials, Inc. Flow battery systems
US8765514B1 (en) 2010-11-12 2014-07-01 L-3 Communications Corp. Transitioned film growth for conductive semiconductor materials
JP5706174B2 (ja) * 2011-01-26 2015-04-22 三菱電機株式会社 赤外線センサおよび赤外線センサアレイ
FR2977937B1 (fr) 2011-07-15 2013-08-16 Centre Nat Rech Scient Detecteur bolometrique a performances ameliorees
CN102931201A (zh) * 2011-08-11 2013-02-13 中国科学院微电子研究所 基于红外焦平面阵列的聚能微镜阵列及其制作方法
EP2581721B1 (en) 2011-10-10 2019-05-08 Samsung Electronics Co., Ltd Infrared thermal detector and method of manufacturing the same
KR101850520B1 (ko) * 2011-10-10 2018-04-19 삼성전자주식회사 적외선 열상 감지기 및 그 제조 방법
US10677656B2 (en) 2012-12-31 2020-06-09 Flir Systems, Inc. Devices and methods for infrared reference pixels
US9606016B2 (en) 2012-12-31 2017-03-28 Flir Systems, Inc. Devices and methods for determining vacuum pressure levels
JP2014235146A (ja) * 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
FR3016997B1 (fr) * 2014-01-30 2016-03-04 Commissariat Energie Atomique Detecteur de rayonnement photonique comportant un reseau d'antennes et un support resistif en spirale
KR101570445B1 (ko) * 2014-02-27 2015-11-20 한국과학기술원 적외선 검출기
US10218921B2 (en) * 2016-09-15 2019-02-26 Sensors Unlimited, Inc. Imaging systems and methods
WO2022141188A1 (zh) * 2020-12-30 2022-07-07 深圳市大疆创新科技有限公司 基于热辐射探测器的测温方法、装置及热辐射探测器

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130274A (ja) * 1983-12-19 1985-07-11 Toshiba Corp 固体撮像装置
JPH0682813B2 (ja) * 1984-07-13 1994-10-19 日本電気株式会社 赤外線検出固体撮像素子の製造方法
US4754139A (en) * 1986-04-10 1988-06-28 Aerojet-General Corporation Uncooled high resolution infrared imaging plane
US5300915A (en) * 1986-07-16 1994-04-05 Honeywell Inc. Thermal sensor
US5534111A (en) * 1988-02-29 1996-07-09 Honeywell Inc. Thermal isolation microstructure
US4922116A (en) * 1988-08-04 1990-05-01 Hughes Aircraft Company Flicker free infrared simulator with resistor bridges
US5010251A (en) * 1988-08-04 1991-04-23 Hughes Aircraft Company Radiation detector array using radiation sensitive bridges
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
US4961626A (en) * 1989-02-21 1990-10-09 United Techologies Corporation Direct incorporation of night vision in a helmet mounted display
US5113076A (en) * 1989-12-19 1992-05-12 Santa Barbara Research Center Two terminal multi-band infrared radiation detector
US5401968A (en) * 1989-12-29 1995-03-28 Honeywell Inc. Binary optical microlens detector array
WO1991016607A1 (en) * 1990-04-26 1991-10-31 Commonwealth Of Australia, The Secretary Department Of Defence Semiconductor film bolometer thermal infrared detector
GB2248964A (en) * 1990-10-17 1992-04-22 Philips Electronic Associated Plural-wavelength infrared detector devices
US5171733A (en) * 1990-12-04 1992-12-15 The Regents Of The University Of California Antenna-coupled high Tc superconducting microbolometer
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
WO1993009414A1 (en) * 1991-11-04 1993-05-13 Honeywell Inc. Thin film pyroelectric imaging array
WO1993026050A1 (en) * 1992-06-11 1993-12-23 Honeywell Inc. Two-level microbridge bolometer imaging array and method of making same
WO1994001743A1 (en) * 1992-07-08 1994-01-20 Honeywell Inc. Microstructure design for high ir sensitivity
US5399897A (en) * 1993-11-29 1995-03-21 Raytheon Company Microstructure and method of making such structure
US5446284A (en) * 1994-01-25 1995-08-29 Loral Infrared & Imaging Systems, Inc. Monolithic detector array apparatus
US5486698A (en) * 1994-04-19 1996-01-23 Texas Instruments Incorporated Thermal imaging system with integrated thermal chopper
US5512748A (en) * 1994-07-26 1996-04-30 Texas Instruments Incorporated Thermal imaging system with a monolithic focal plane array and method
US5603848A (en) * 1995-01-03 1997-02-18 Texas Instruments Incorporated Method for etching through a substrate to an attached coating
US5626773A (en) * 1995-01-03 1997-05-06 Texas Instruments Incorporated Structure and method including dry etching techniques for forming an array of thermal sensitive elements
US5572060A (en) * 1995-02-01 1996-11-05 Southern Methodist University Uncooled YBaCuO thin film infrared detector
US5627082A (en) * 1995-03-29 1997-05-06 Texas Instruments Incorporated High thermal resistance backfill material for hybrid UFPA's
JP3287173B2 (ja) * 1995-04-07 2002-05-27 三菱電機株式会社 赤外線検出素子
US5602393A (en) * 1995-06-07 1997-02-11 Hughes Aircraft Company Microbolometer detector element with enhanced sensitivity

Similar Documents

Publication Publication Date Title
JP2000500228A5 (ja)
JP2000500445A5 (ja)
JP2000500033A5 (ja)
JP2000500440A5 (ja)
JP2000500327A5 (ja)
JP2000500145A5 (ja)
JP2000500155A5 (ja)
JP2000500406A5 (ja)
JP2000500361A5 (ja)
JP2000501832A5 (ja)
JP2000500115A5 (ja)
JP2000500322A5 (ja)
JP2000500258A5 (ja)
JP2000500192A5 (ja)
JP2000500342A5 (ja)
JP2000500112A5 (ja)
JP2000500226A5 (ja)
JP2000500397A5 (ja)
JP2000500019A5 (ja)
JP2000500051A5 (ja)
JP2000500407A5 (ja)
JP2000500166A5 (ja)
JP2000500125A5 (ja)
JP2000500257A5 (ja)
JP2000500090A5 (ja)