JP2000356588A - Microscopic spectrometric apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microscopic spectrometric apparatus reduced in cost and permitting efficient measurement without manually operating a shielding means and synthesizing an image. SOLUTION: In a microscopic spectrometric apparatus D, the sample S placed on a sample stand 5 is irradiated with the light from a light source 1 and the reflected or transmitted light from the sample S is spectrally measured. In this case, an imaging device 12 taking the image of the sample S, the shielding means 8, 9 positioned between the sample S and the imaging device 12 to restrict the measuring range of the sample S, a control device 11 for controlling the shielding means 8, 9 and an image processor 14 for displaying the image 15 of the sample S by the output from the imaging device 12 are provided. The shielding means 8, 9 are operated at the time of the measurment of the sample S by transmitting the measuring range 16 of the sample S set on the image 15 to the shielding means 8, 9 as a signal to automatically set the measuring range 16.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a microspectrophotometer.

[0002]

2. Description of the Related Art A microspectrophotometer is a spectrometer for obtaining an enlarged image of a measurement sample with a microscope and measuring a spectral spectrum of a specific portion of the enlarged image. In spectrophotometry using a microspectrophotometer, it is necessary to prevent mixing of spectral spectra of adjacent regions in order to obtain a spectral spectrum of only the target region. Light is blocked.

Conventionally, the measurement range is set by using an optical element such as a half mirror or a memory to store the image of the sample and the image of the shielding means provided in the optical path for limiting the measurement range. This was done by manually operating the shielding means while viewing the image. However, an optical element such as a half mirror is expensive, resulting in an increase in cost.

FIG. 3 shows a conventional microspectrophotometer which does not use an optical element such as the half mirror. S is a sample placed on the sample table 5, and is irradiated with light from a light source (not shown) via the condenser mirror 4. Then, the light transmitted through the sample S is
An image is formed at the image point 7 via the objective mirror 6.

At the image point 7, for example, shielding masks 8, 9 formed of rectangular slits, each side of which is formed as a knife edge and whose slit length can be changed arbitrarily, for shielding light from portions other than the measurement target site. The shielding masks 8 and 9 can be set so that only the light from the measurement target site in the sample S passes through the shielding masks 8 and 9.

The light that has passed through the image point 7 is
Is monitored as a combined image at the image point 7, and a signal from the television camera 25 is input to the image processing device 14 via the control device 11.

Reference numeral 26 denotes a pulse motor for operating the shielding masks 8 and 9. The correspondence between the opening degrees of the shielding masks 8 and 9 and the rotational position of the pulse motor 26 has been checked in advance. This correspondence is stored in a memory (not shown). Then, the shielding masks 8 and 9
The image corresponding to the opening degree is input to the image processing device 14,
Is displayed.

In the microspectrophotometer having the above configuration, to set the measurement range 16, first, an image of the entire sample S is displayed on the image processing device 14, and then the images of the shielding masks 8, 9 are displayed. Display them in layers. Then, the user manually operates the shielding masks 8 and 9 so that the images of the shielding masks 8 and 9 displayed on the screen form the desired measurement range 16. With this operation, the measurement range 16 is set, and measurement becomes possible.

[0009]

However, in the above configuration, fine adjustment of the shielding masks 8 and 9 is performed manually, which is troublesome and inefficient.

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-described circumstances, and has as its object to reduce costs and efficiently measure without manually operating shielding means and without synthesizing images. It is an object of the present invention to provide a microspectrophotometer capable of performing the measurement.

[0011]

In order to achieve the above object, a microspectrophotometer according to the present invention irradiates a sample placed on a sample stage with light from a light source, and reflects or transmits the sample from the sample. A microspectrophotometer for spectroscopically measuring light,
An imaging device for imaging the sample, a shielding unit positioned between the sample and the imaging device, for limiting a measurement range of the sample, and a control device for controlling the shielding unit,
An image processing device for displaying an image of the sample by an output from the imaging device, wherein the measurement range of the sample set on the image is transmitted to a shielding unit as a signal, thereby shielding the sample when measuring the sample. The means is operated and the measurement range is automatically set (claim 1).

Further, the measurement range of the sample set on the image is transmitted as a signal to the shielding means and the sample stage, so that the shielding means and the sample stage are operated when measuring the sample, and the measurement range is automatically adjusted. It may be set (claim 2).

With the above arrangement, it is possible to provide a microspectrophotometer capable of reducing costs and efficiently measuring without manually operating the shielding means and without synthesizing images. Become.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view schematically showing a configuration of a microspectrophotometer D according to a first embodiment of the present invention, and FIG. FIG. The measurement of the sample S by the microspectrophotometer D requires setting of the measurement range 16 of the sample S. In order to set the measurement range 16, the sample S is first observed.

1 is a light source, and visible light from the light source 1 is
The sample S placed on the sample stage 5 is irradiated via the mirrors 2 and 3 and the condenser mirror 4. The light transmitted through the sample S forms an image at the image point 7 via the objective mirror 6.

The image point 7 is a shield formed of a rectangular slit which can shield light from a portion other than the measurement target, for example, a rectangular slit having each side formed as a knife edge and a slit length which can be arbitrarily changed. The masks 8 and 9 are provided, and it can be set so that only light from the measurement target site in the sample S passes through the shielding masks 8 and 9. At the time of the sample observation, the light is not shielded by the shielding masks 8 and 9, so that the light from the entire sample S passes through the image point 7. Further, as a means for performing the above-mentioned shielding, for example, a circular pinhole may be used. Reference numeral 10 denotes a pulse motor for operating the shielding masks 8 and 9 and has a function of operating the shielding masks 8 and 9 in accordance with a command from a control device 11 described later.

The light passing through the image point 7 is converted into a combined image at the image point 7 by an image pickup device (for example, a CCD camera) 1.
2 monitored. Then, when a signal from the imaging device 12 is input to the image processing device 14 via the central processing device 13, an enlarged image of the sample S is displayed on the screen 15.

Reference numeral 15a shown in FIG. 2 denotes a screen displaying an image of the sample S. Then, in order to determine the measurement range 16 of the sample S, it is only necessary to specify the measurement range 16 on the screen 15 by using a pointing device (for example, a mouse or a touch display) 17 as shown in a screen 15b. The pointing device 17
Is specified, for example, by indicating a start point and an end point on the screen 15, and the measurement range 16 is displayed and determined as a rectangle having a straight line connecting the start point and the end point as one diagonal line.

Thus, the observation of the sample is completed, and then the measurement stage is started. When the microspectrophotometer D is switched to the measurement mode, first, the designation of the measurement range 16 by the pointing device 17 is transmitted to the control device 11 via the central processing unit 13, and the control device 11 controls the shielding mask 8. , 9 are operated to form the measuring range 16.

Next, the mirror 2 located in the optical path retreats outside the optical path, and the mirror 18 located outside the optical path is introduced into the optical path. In this state, the light source 1 'emits infrared light. The irradiated infrared light is passed through an interferometer 27 such as a two-beam interferometer as shown in FIG. 1, and energy intensity modulation is performed for each wavelength.
The sample S placed on the sample stage 5 is irradiated via the sample mirror 9, 20, 3 and the condenser mirror 4, and further passes through the image point 7 via the objective mirror 6. At this time, only light from the measurement range 16 of the sample S passes, and light from other parts is blocked by the shielding masks 8 and 9. Then, the light passing through the image point 7 reaches the detector 21 via the mirror 18,
Spectroscopic analysis is performed.

In the above embodiment, the transmission type microspectrometer has been described. However, when the reflection type measurement is performed, the sample S is irradiated with light via the mirrors 22, 23 and 24, and the reflection is performed. The measurement may be performed using light.

[0022] FIGS. 1 and 2, the configuration of the microscopic spectrometer D ₂ according to the second embodiment corresponding to claim 2 of the present invention is also a diagram schematically illustrating. The configuration of the microspectrophotometer D ₂ is almost the same as that of the first embodiment, except for the measurement range 1 by the pointing device 17.
The designation of 6 is transmitted to the control device 11 via the central processing unit 13, and the control device 11 operates not only the shielding masks 8 and 9 but also the sample table 5 to move in accordance with the measurement range 16. It is a point that is done.

With this configuration, for example, it is possible to move the sample stage 5 so that the center of the measurement range 16 is located at the center of the optical path, and determine the measurement range 16 with the shielding masks 8 and 9. Measurement can be performed well.

[0024]

As described above, the present invention is constructed, so that the cost can be reduced and the measurement can be efficiently performed without manually operating the shielding means and without synthesizing images. It is possible to provide a spectrometer.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of a microspectrophotometer according to a first embodiment and a second embodiment of the present invention.

FIG. 2 is a diagram schematically showing a main part of both embodiments.

FIG. 3 is a diagram schematically showing a configuration of a conventional microspectrophotometer.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Light source, 5 ... Sample stand, 8 and 9 ... Shielding means, 11 ... Control device, 12 ... Imaging device, 14 ... Image processing device, 15 ... Image, 16 ... Measurement range, D ... Microspectrophotometer, S ... sample.

Claims (2)

[Claims] 1. A microspectrophotometer for irradiating a sample placed on a sample table with light from a light source and spectrally measuring reflected or transmitted light from the sample, comprising: an imaging device for imaging the sample. A shielding unit positioned between the sample and the imaging device, for limiting a measurement range of the sample, a control device for controlling the shielding unit, and an image of the sample by an output from the imaging device. An image processing device for displaying, the measurement range of the sample set on the image,
A microspectrophotometer, wherein the signal is transmitted to the shielding means so that the shielding means is operated when the sample is measured, and the measurement range is automatically set. 2. The measurement range of the sample set on the image is transmitted as a signal to the shielding unit and the sample stage, so that the shielding unit and the sample stage are operated during measurement of the sample, and the measurement range is automatically set. The microspectrophotometer according to claim 1, which is set.