JP2000334593A - Working table of laser beam machine - Google Patents

Working table of laser beam machine

Info

Publication number
JP2000334593A
JP2000334593A JP11143974A JP14397499A JP2000334593A JP 2000334593 A JP2000334593 A JP 2000334593A JP 11143974 A JP11143974 A JP 11143974A JP 14397499 A JP14397499 A JP 14397499A JP 2000334593 A JP2000334593 A JP 2000334593A
Authority
JP
Japan
Prior art keywords
sections
pressure
work
air pressure
decompression
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11143974A
Other languages
Japanese (ja)
Other versions
JP3952245B2 (en
Inventor
Hironori Shimomoto
広憲 下元
Kaoru Matsumura
薫 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Priority to JP14397499A priority Critical patent/JP3952245B2/en
Publication of JP2000334593A publication Critical patent/JP2000334593A/en
Application granted granted Critical
Publication of JP3952245B2 publication Critical patent/JP3952245B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve working efficiency by surely fixing works of various scales. SOLUTION: Interior of a working table 20 is divided into mutually independent sections 22a-22c by L-shaped partition walls 21a and 21b. Then, on each of the sections, vacuum pressure sensors 10a-10b are arranged, and at the same time sections 22b and 22c are connected to a vacuum pressure supplying source 11 through electromagnetic valves 24b and 24c respectively. After a prescribed duration of time from the start of fixing of a work 25, output values of the vacuum pressure sensors 10a-10c are confirmed; in the case that pressures of the sections 22b and 22c are higher than the prescribed values, the electromagnetic valves 24b and 24c connected to the respective sections are operated to cut off connections between the sections and the vacuum pressure supplying source 11. In the case that the pressures of all the sections are higher than the prescribed values, an alarm is displayed and no working is started.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、負圧を利用してワ
ークを吸着固定する、レーザ加工機の加工テーブルに関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing table of a laser processing machine for sucking and fixing a work by utilizing a negative pressure.

【0002】[0002]

【従来の技術】図5は従来のレーザ加工機の加工テーブ
ルの平面図、図6は図5のA−A断面図である。加工テ
ーブル1は、上板2と、下板3および側板4により箱状
に構成され、内部に空間5が形成されている。そして、
加工テーブル1は、XYテーブル6に載置され、XY方
向に移動自在である。上板2には空間5と大気とを接続
する複数の吸着穴7が全面にわたり均一な密度で配置さ
れている。側板4には空間5と配管9とを接続する継手
8a〜8dが配置されている。配管9には圧力センサ1
0a、10bが配置され、真空ポンプあるいはエジェク
タ等の真空圧供給源11に接続されている。圧力センサ
10a、10bの出力信号線12a、12bは制御装置
13に接続されている。
2. Description of the Related Art FIG. 5 is a plan view of a processing table of a conventional laser beam machine, and FIG. 6 is a sectional view taken along line AA of FIG. The processing table 1 is formed in a box shape by an upper plate 2, a lower plate 3, and a side plate 4, and a space 5 is formed therein. And
The processing table 1 is placed on an XY table 6 and is movable in XY directions. A plurality of suction holes 7 connecting the space 5 and the atmosphere are arranged on the upper plate 2 at a uniform density over the entire surface. Joints 8 a to 8 d connecting the space 5 and the pipe 9 are arranged on the side plate 4. Pressure sensor 1 on pipe 9
0a and 10b are arranged and connected to a vacuum pressure source 11 such as a vacuum pump or an ejector. Output signal lines 12a and 12b of the pressure sensors 10a and 10b are connected to a control device 13.

【0003】次に、従来のレーザ加工機の動作を説明す
る。上板2の表面(以下、載置面Sという。)と縦横の
寸法が略同じワーク(図示せず)を該載置面Sに置き、
真空圧供給源11を動作させる。吸着穴7が前記ワーク
により塞がれているため、空間5は負圧になる。この結
果、前記ワークは載置面Sに吸着されて固定される。制
御装置13は、圧力センサ10a、10bからの出力信
号を参照し、配管9の内部すなわち空間5が所定の圧力
に低下すると(ワークの固定が完了すると)、穴明け加
工を開始させるようになっている。
Next, the operation of a conventional laser beam machine will be described. A work (not shown) having substantially the same vertical and horizontal dimensions as the surface of the upper plate 2 (hereinafter referred to as the mounting surface S) is placed on the mounting surface S,
The vacuum pressure supply source 11 is operated. Since the suction holes 7 are closed by the work, the space 5 has a negative pressure. As a result, the work is sucked and fixed to the mounting surface S. The controller 13 refers to the output signals from the pressure sensors 10a and 10b, and starts drilling when the inside of the pipe 9, that is, the space 5 is reduced to a predetermined pressure (when the work is completely fixed). ing.

【0004】[0004]

【発明が解決しようとする課題】しかし、外形が小さい
ワークの場合、ワークにより塞がれない吸着穴7が外部
と連通したままになり、空間5は一部が開放状態にな
る。空間5の一部が開放状態であると、吸着力が低下す
ることによりワークの固定が不十分になり、加工不良が
発生する。そこで、小さいワークを加工する場合は、ワ
ークに塞がれない吸着穴7をテープ等により作業者が手
作業で塞いでいた。このため、加工能率が低下した。
However, in the case of a work having a small external shape, the suction hole 7 not closed by the work remains in communication with the outside, and a part of the space 5 is opened. When a part of the space 5 is in an open state, the work force is insufficiently fixed due to a decrease in the attraction force, and processing failure occurs. Therefore, when processing a small work, the worker manually closes the suction hole 7 that is not closed by the work with a tape or the like. For this reason, the processing efficiency decreased.

【0005】本発明の目的は、上記従来技術における課
題を解決し、ワークの大きさが変わっても、確実にワー
クを固定でき、作業能率を向上させることができるレー
ザ加工機の加工テーブルを提供することにある。
An object of the present invention is to solve the above-mentioned problems in the prior art, and to provide a processing table of a laser processing machine capable of securely fixing a work even if the size of the work changes and improving work efficiency. Is to do.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
め、請求項1の発明は、内部に減圧空間が形成されたテ
ーブル本体と、該減圧空間を減圧自在な減圧手段と、を
有し、前記テーブル本体に、ワークを載置自在なワーク
載置部を形成し、該ワーク載置部に、前記減圧空間と前
記テーブル本体外部とを連通するワーク吸着穴を複数形
成した、レーザ加工機の加工テーブルにおいて、前記テ
ーブル本体内に仕切部材を設け、該仕切部材により前記
減圧空間を複数の区画に仕切り、前記減圧手段は前記複
数の区画それぞれと接続し、これら区画それぞれを独立
して減圧する、ことを特徴とする。
Means for Solving the Problems To achieve the above object, the invention of claim 1 comprises a table body having a decompression space formed therein, and decompression means capable of decompressing the decompression space. A laser processing machine, wherein a work mounting portion on which a work can be mounted is formed on the table main body, and a plurality of work suction holes for communicating the decompression space and the outside of the table main body are formed on the work mounting portion. In the working table, a partition member is provided in the table body, the decompression space is partitioned into a plurality of sections by the partition member, and the decompression means is connected to each of the plurality of sections, and each of the sections is independently decompressed. To be characterized.

【0007】また、請求項2の発明は、前記各区画に対
して、該区画内の気圧を検出する気圧検出手段を配設
し、前記減圧手段は、前記複数の区画にそれぞれ独立し
て接続された圧力伝達手段と、これら圧力伝達手段に接
続した減圧装置と、を有し、前記各圧力伝達手段に、該
圧力伝達手段内を開通・閉塞自在な開閉手段を設け、前
記各気圧検出手段からの検出結果に基づき、前記各区画
の気圧と所定の気圧とを比較する気圧比較部を設け、前
記気圧比較部の比較結果に基づいて前記各開閉手段を駆
動する開閉手段駆動制御部を設けた、ことを特徴とす
る。
According to a second aspect of the present invention, an air pressure detecting means for detecting an air pressure in each of the sections is provided for each of the sections, and the decompression means is independently connected to each of the plurality of sections. Pressure transmitting means, and a pressure reducing device connected to the pressure transmitting means, wherein each of the pressure transmitting means is provided with an opening / closing means capable of opening and closing the inside of the pressure transmitting means, and each of the pressure detecting means An air pressure comparing section for comparing the air pressure of each section with a predetermined air pressure based on the detection result from the controller; and an opening / closing means drive control section for driving each of the opening / closing means based on the comparison result of the air pressure comparing section. It is characterized by the following.

【0008】また、請求項3の発明は、前記複数の区画
は、1つの隅を共有して配置された略相似形の複数の長
方形の輪郭に沿って形成されている、ことを特徴とす
る。
According to a third aspect of the present invention, the plurality of sections are formed along a plurality of substantially similar rectangular contours arranged so as to share one corner. .

【0009】[0009]

【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。図1は本発明に係るレーザ加工機
の加工テーブルの一例を示した平面図、図2は図1のB
−B断面図である。なお、「従来の技術」で説明した図
5及び図6と同じものまたは同一機能のものは、同一符
号を付して説明を省略する。加工テーブル20は、上板
2、底板3および側板4により箱状に形成され、これら
板2、3、4で囲まれた空間5は、上板2と底板3とを
接続するL字形(図1参照)の隔壁21a、21bによ
り互いに独立した複数(図では3個)の区画22a、2
2b、22cに区分されている。加工テーブル20はX
Yテーブル6に載置され、XY方向に移動自在である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing an example of a processing table of a laser processing machine according to the present invention, and FIG.
It is -B sectional drawing. 5 and 6 described in "Prior Art" will be assigned the same reference numerals and description thereof will be omitted. The processing table 20 is formed in a box shape by the upper plate 2, the bottom plate 3, and the side plate 4, and a space 5 surrounded by the plates 2, 3, and 4 has an L-shape connecting the upper plate 2 and the bottom plate 3 (see FIG. 1) partition walls 21a, 21b, a plurality of (three in the figure) sections 22a, 2a
2b and 22c. Processing table 20 is X
It is placed on the Y table 6 and is movable in the XY directions.

【0010】区画22aの平面形状は、加工テーブル2
0の隅Pを頂点とする上板2と略相似形の長方形Cであ
り、該長方形Cの区画22aと平面形状がL字形の区画
22bを合わせた平面形状は、前記長方形Cと略相似形
の長方形Dである。区画22aは継手8a、配管23a
を介して真空圧供給源11に接続されている。また、区
画22bは継手8b、配管23bおよび常時閉の電磁弁
24bを介して真空圧供給源11に接続されている。さ
らに、区画22cは継手8c、配管23cおよび常時閉
の電磁弁24cを介して真空圧供給源11に接続されて
いる。配管23a、23b、23cには圧力センサ10
a、10b、10cがそれぞれ配置されている。圧力セ
ンサ10a、10b、10cの出力信号線12a、12
b、12cは制御装置25に接続されている。
[0010] The plane shape of the section 22a is
It is a rectangle C having a shape substantially similar to the upper plate 2 having the corner P of 0 as a vertex, and a plane shape obtained by combining a section 22a of the rectangle C and a section 22b having an L-shaped plane shape is substantially similar to the rectangle C. Is a rectangle D. Section 22a is joint 8a, pipe 23a
Is connected to the vacuum pressure supply source 11 via the. The section 22b is connected to the vacuum pressure supply source 11 via a joint 8b, a pipe 23b, and a normally closed solenoid valve 24b. Further, the section 22c is connected to the vacuum pressure supply source 11 via a joint 8c, a pipe 23c, and a normally closed solenoid valve 24c. A pressure sensor 10 is connected to the pipes 23a, 23b and 23c.
a, 10b and 10c are arranged respectively. Output signal lines 12a, 12 of pressure sensors 10a, 10b, 10c
b and 12c are connected to the control device 25.

【0011】次に、本実施の形態の動作を説明する。図
3は、本実施の形態の動作を示すフローチャートであ
る。図示を省略する起動ボタンがオンされると、制御装
置25は、真空圧供給源11をオンしてから(手順S1
00)、電磁弁24b、24cをオンする(開く)と共
に、図示を省略するタイマをオンする(手順S11
0)。電磁弁24b、24cがオンされると、区画22
b、22cは真空圧供給源11に接続される。そして、
電磁弁24b、24cをオンしてからの時間tが予め設
定された時間Tだけ経過するのを待つ(手順S12
0)。前記タイマにより時間Tの経過が通知されると、
制御装置25は各センサ10a、10b、10cからの
出力Pa、Pb、Pc(気圧)に基づいて次の処理を行
う。即ち、センサ10cの出力Pcが予め設定された圧
力Pk以下であるかどうかを比較判定し(手順S13
0)、センサ10cの出力Pcすなわち区画22cの内
部圧力Pcが予め設定された圧力Pk以下である場合は
手順S150の処理を行い、内部圧力Pcが予め設定さ
れた圧力Pkよりも大きい場合は、電磁弁24cをオフ
して(閉じて)から(手順S140)、手順S150の
処理を行う。手順S150では、センサ10bの出力P
bが予め設定された圧力Pk以下であるかどうかを比較
判定し、センサ10bの出力すなわち区画22bの内部
圧力Pbが予め設定された圧力Pk以下である場合は手
順S170の処理を行い、内部圧力Pbが予め設定され
た圧力Pkよりも大きい場合は、電磁弁24bをオフし
てから(手順S160)、手順S170の処理を行う。
手順S170では、センサ10aの出力Paが予め設定
された圧力Pk以下であるかどうかを比較判定し、セン
サ10aの出力Paすなわち区画22aの内部圧力Pa
が予め設定された圧力Pkよりも大きい場合は、アラー
ムを表示して(手順S180)加工を開始しない。ま
た、内部圧力Paが予め設定された圧力Pk以下である
場合は加工を開始する(手順S190)。
Next, the operation of this embodiment will be described. FIG. 3 is a flowchart showing the operation of the present embodiment. When a start button (not shown) is turned on, the control device 25 turns on the vacuum pressure supply source 11 (step S1).
00), the solenoid valves 24b and 24c are turned on (opened), and a timer (not shown) is turned on (step S11).
0). When the solenoid valves 24b and 24c are turned on, the section 22
b and 22c are connected to the vacuum pressure supply source 11. And
It waits for the time t from when the solenoid valves 24b and 24c are turned on to elapse by a preset time T (step S12).
0). When the timer notifies that the time T has elapsed,
The control device 25 performs the following processing based on the outputs Pa, Pb, and Pc (atmospheric pressure) from the sensors 10a, 10b, and 10c. That is, it is determined whether the output Pc of the sensor 10c is equal to or lower than the preset pressure Pk (step S13).
0), if the output Pc of the sensor 10c, that is, the internal pressure Pc of the section 22c is equal to or less than the preset pressure Pk, the process of step S150 is performed. If the internal pressure Pc is greater than the preset pressure Pk, After the electromagnetic valve 24c is turned off (closed) (step S140), the process of step S150 is performed. In step S150, the output P of the sensor 10b
It is determined whether or not b is equal to or less than a preset pressure Pk. If the output of the sensor 10b, that is, the internal pressure Pb of the section 22b is equal to or less than the preset pressure Pk, the process of step S170 is performed. If Pb is larger than the preset pressure Pk, the electromagnetic valve 24b is turned off (step S160), and the process of step S170 is performed.
In step S170, it is determined whether the output Pa of the sensor 10a is equal to or lower than a preset pressure Pk, and the output Pa of the sensor 10a, that is, the internal pressure Pa of the section 22a is determined.
Is larger than the preset pressure Pk, an alarm is displayed (step S180) and processing is not started. If the internal pressure Pa is equal to or lower than the preset pressure Pk, the processing is started (step S190).

【0012】例えば、長方形Dに略等しい形のワーク2
5について説明する。ワーク25の設置は図1に示すよ
うに隅Pに合わせて行う。これは他の形状(長方形Cや
上板2全体に等しい形状)のワークを設置する場合も同
様である。従って、ワーク25を設置すると、該ワーク
25により区画22a、22bが大気から閉塞され、区
画22cが大気と連通する。これにより、区画22cの
内部圧力Pcは圧力Pkよりも高くなるため電磁弁24
cはオフされ、区画22bの内部圧力Pbは圧力Pkよ
りも低いから電磁弁24bは引き続きオンのまま穴明け
加工が開始される。このように、大気と連通している区
画22cは他の区画22a、22bと連通されず、区画
22a、22bだけが真空圧供給源11と連通されるの
で、ワーク25の吸着は効果的に行われる。
For example, a work 2 having a shape substantially equal to a rectangle D
5 will be described. The work 25 is set at the corner P as shown in FIG. This is the same when a work of another shape (a rectangle C or a shape equal to the entire upper plate 2) is installed. Therefore, when the work 25 is installed, the sections 22a and 22b are closed from the atmosphere by the work 25, and the section 22c communicates with the atmosphere. As a result, the internal pressure Pc of the section 22c becomes higher than the pressure Pk,
Since c is turned off and the internal pressure Pb of the section 22b is lower than the pressure Pk, the boring is started while the solenoid valve 24b is kept on. As described above, the section 22c that is in communication with the atmosphere is not in communication with the other sections 22a and 22b, and only the sections 22a and 22b are in communication with the vacuum pressure source 11, so that the work 25 is effectively sucked. Will be

【0013】なお、区画22aの内部圧力Paが予め設
定された圧力Pkよりも大きい場合は、隅Pに合わせて
ワークが適正に設置されていない状態(或いは、ワーク
が全く設置されていない状態、また或いはこの加工テー
ブル20には合っていないワークが設置された状態)で
あるから、アラームを表示して加工は開始されない。こ
れにより、加工ミスなどが防止される。
When the internal pressure Pa of the section 22a is higher than the preset pressure Pk, the state where the work is not properly set to the corner P (or the state where the work is not set at all, Alternatively, since a work that does not match the processing table 20 is installed), an alarm is displayed and processing is not started. Thereby, processing errors and the like are prevented.

【0014】なお、上記では加工テーブル20を底板4
を備える箱状にしたが、XYテーブル6の表面が十分に
平坦な場合、図4に示すように、側板4および隔壁21
a、21bの底面にシール部材30を配置し、図示を省
略する手段により、加工テーブル20をXYテーブル6
の表面に押し付けるようにしてもよい。
In the above description, the processing table 20 is attached to the bottom plate 4
In the case where the surface of the XY table 6 is sufficiently flat, as shown in FIG.
a, a sealing member 30 is disposed on the bottom surface of the XY table 6 by means not shown.
May be pressed against the surface.

【0015】以上のように加工テーブル20によると、
ワークの大きさに応じて真空吸着範囲を自動的に設定で
きるから、ワークの大きさが小さい場合であっても、従
来のように吸着穴を手作業で塞ぐ必要がなく作業能率が
向上する。また、真空圧供給源も無駄なエネルギーを消
費せず、省エネルギーが可能で、経済的である。
As described above, according to the processing table 20,
Since the vacuum suction range can be automatically set in accordance with the size of the work, even when the size of the work is small, it is not necessary to close the suction hole by hand as in the related art, thereby improving work efficiency. Also, the vacuum pressure supply source does not consume wasteful energy, can save energy, and is economical.

【0016】[0016]

【発明の効果】以上説明したように、本発明によれば、
ワーク載置位置に対応した区画だけを独立して減圧する
ことにより、ワークの大きさが変わっても、確実にワー
クを吸着固定でき、作業能率を向上させることができ
る。
As described above, according to the present invention,
By independently depressurizing only the section corresponding to the work placement position, even if the size of the work changes, the work can be surely fixed by suction and the work efficiency can be improved.

【0017】また、気圧比較部により各区画の気圧を比
較し、該気圧が所定の気圧より大きい場合、従って該区
画の上にはワークが載置されていない場合には、該区画
に対応する開閉手段を駆動して該区画に対する減圧を停
止させるので、無駄なエネルギーを消費することがなく
好都合である。
Further, the air pressure of each section is compared by an air pressure comparing section, and if the air pressure is higher than a predetermined pressure, that is, if no work is placed on the section, the air pressure corresponding to the section is determined. Since the opening / closing means is driven to stop the decompression of the section, it is convenient that unnecessary energy is not consumed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係るレーザ加工機の加工テーブルの一
例を示した平面図である。
FIG. 1 is a plan view showing an example of a processing table of a laser processing machine according to the present invention.

【図2】図1のB−B断面図である。FIG. 2 is a sectional view taken along line BB of FIG.

【図3】本実施の形態の動作を示すフローチャートであ
る。
FIG. 3 is a flowchart showing the operation of the present embodiment.

【図4】本発明に係るレーザ加工機の加工テーブルの変
形例である。
FIG. 4 is a modified example of a processing table of the laser processing machine according to the present invention.

【図5】従来のレーザ加工機の加工テーブルの平面図で
ある。
FIG. 5 is a plan view of a processing table of a conventional laser processing machine.

【図6】図5のA−A断面図である。6 is a sectional view taken along line AA of FIG.

【符号の説明】[Explanation of symbols]

2 上板 3 底板 4 側板 10a、10b、10c 真空圧センサ 11 真空圧供給源 20 加工テーブル 21a、21b 隔壁 22a、22b、22c 区画 24b、24c 電磁弁 25 ワーク 2 Top plate 3 Bottom plate 4 Side plate 10a, 10b, 10c Vacuum pressure sensor 11 Vacuum pressure supply source 20 Processing table 21a, 21b Partition wall 22a, 22b, 22c Section 24b, 24c Solenoid valve 25 Work

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 内部に減圧空間が形成されたテーブル本
体と、該減圧空間を減圧自在な減圧手段と、を有し、前
記テーブル本体に、ワークを載置自在なワーク載置部を
形成し、該ワーク載置部に、前記減圧空間と前記テーブ
ル本体外部とを連通するワーク吸着穴を複数形成した、
レーザ加工機の加工テーブルにおいて、 前記テーブル本体内に仕切部材を設け、該仕切部材によ
り前記減圧空間を複数の区画に仕切り、 前記減圧手段は前記複数の区画それぞれと接続し、これ
ら区画それぞれを独立して減圧する、 ことを特徴とするレーザ加工機の加工テーブル。
1. A table body having a decompression space formed therein, and a decompression means capable of decompressing the decompression space, wherein a work mounting portion on which a work can be mounted is formed on the table main body. A plurality of work suction holes communicating with the decompression space and the outside of the table body are formed in the work mounting portion;
In the processing table of the laser beam machine, a partition member is provided in the table main body, the decompression space is partitioned into a plurality of sections by the partition member, and the decompression means is connected to each of the plurality of sections, and these sections are independently formed. A processing table for a laser processing machine.
【請求項2】 前記各区画に対して、該区画内の気圧を
検出する気圧検出手段を配設し、 前記減圧手段は、前記複数の区画にそれぞれ独立して接
続された圧力伝達手段と、これら圧力伝達手段に接続し
た減圧装置と、を有し、 前記各圧力伝達手段に、該圧力伝達手段内を開通・閉塞
自在な開閉手段を設け、 前記各気圧検出手段からの検出結果に基づき、前記各区
画の気圧と所定の気圧とを比較する気圧比較部を設け、 前記気圧比較部の比較結果に基づいて前記各開閉手段を
駆動する開閉手段駆動制御部を設けた、 ことを特徴とする請求項1記載の、レーザ加工機の加工
テーブル。
2. An air pressure detecting means for detecting an air pressure in each of the sections is provided for each of the sections, the pressure reducing means being a pressure transmitting means independently connected to each of the plurality of sections, A pressure reducing device connected to these pressure transmitting means, and each of the pressure transmitting means is provided with an opening / closing means capable of opening and closing the inside of the pressure transmitting means, based on a detection result from each of the atmospheric pressure detecting means, An air pressure comparison unit that compares the air pressure of each section with a predetermined air pressure is provided, and an opening / closing unit drive control unit that drives each of the opening / closing units based on a comparison result of the air pressure comparison unit is provided. The processing table of the laser processing machine according to claim 1.
【請求項3】 前記複数の区画は、1つの隅を共有して
配置された略相似形の複数の長方形の輪郭に沿って形成
されている、 ことを特徴とする請求項1に記載のレーザ加工機の加工
テーブル。
3. The laser according to claim 1, wherein the plurality of sections are formed along a plurality of substantially similar rectangular contours arranged so as to share one corner. Processing table of processing machine.
JP14397499A 1999-05-24 1999-05-24 Laser processing machine processing table Expired - Fee Related JP3952245B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14397499A JP3952245B2 (en) 1999-05-24 1999-05-24 Laser processing machine processing table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14397499A JP3952245B2 (en) 1999-05-24 1999-05-24 Laser processing machine processing table

Publications (2)

Publication Number Publication Date
JP2000334593A true JP2000334593A (en) 2000-12-05
JP3952245B2 JP3952245B2 (en) 2007-08-01

Family

ID=15351390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14397499A Expired - Fee Related JP3952245B2 (en) 1999-05-24 1999-05-24 Laser processing machine processing table

Country Status (1)

Country Link
JP (1) JP3952245B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006263747A (en) * 2005-03-22 2006-10-05 Toppan Forms Co Ltd Laser beam machining device
CN101396766A (en) * 2007-09-28 2009-04-01 日立比亚机械股份有限公司 Laser processing machine
KR101256953B1 (en) * 2010-06-15 2013-05-02 (주)엔에스 Roll-film suction device of roll-film cutting system
CN114535841A (en) * 2022-02-28 2022-05-27 中钞印制技术研究院有限公司 Bearing platform and processing equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006263747A (en) * 2005-03-22 2006-10-05 Toppan Forms Co Ltd Laser beam machining device
CN101396766A (en) * 2007-09-28 2009-04-01 日立比亚机械股份有限公司 Laser processing machine
KR101256953B1 (en) * 2010-06-15 2013-05-02 (주)엔에스 Roll-film suction device of roll-film cutting system
CN114535841A (en) * 2022-02-28 2022-05-27 中钞印制技术研究院有限公司 Bearing platform and processing equipment

Also Published As

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