JP2000334294A - Method for decomposing alternate fluorocarbon by plasma arc and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suck in alternate fluorocarbon of flow rate sufficient for reaction and to prevent the length of an arc for the decomposition of the alternate fluorocarbon from being insufficient by arranging an anode nozzle having a through hole of such length that the arcing point of the plasma arc is formed. SOLUTION: An anode nozzle 14 having the length of a part in which the arcing point P of a plasma arc 3a is formed is arranged. Between an electrode 12 and a plasma constraint nozzle 13, plasma gas 1 is fed to generate the plasma arc 3a between the electrode 12 and the arcing point P of the anode nozzle 14. And from above the outer periphery of the plasma constraint nozzle 13, gas 4 forming a plasma jet 3j having arc voltage higher than that of gaseous argon is fed and from below the anode nozzle 14, alternate fluorocarbon 31 is fed to subject the alternate fluorocarbon 31 to decomposition reaction by the plasma jet 3j. Carbon monoxide CO or a carbon atom C which has been generated by the decomposition reaction and has not yet been turned into gaseous CO2 is subjected to oxidizing reaction with gas 33 containing oxygen fed at the middle of a reaction nozzle 32 to turn it into the gaseous CO2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for decomposing a chlorofluorocarbon alternative that destroys the ozone layer to render it harmless.

[0002]

2. Description of the Related Art The production of chlorofluorocarbon causing the destruction of the stratospheric ozone layer of the earth, the ozone hole of the Antarctic, and the like is stopped, and chlorofluorocarbon (HCF) having a small stratospheric ozone depleting ability is stopped.
C) The development of alternative substances such as chlorine-free alternative chlorofluorocarbon (HFC) has been an important issue in recent years.

[0003] When chlorofluorocarbon CFC, alternative chlorofluorocarbon (HFC) and the like, which destroy the ozone layer, flow into the atmosphere, they gradually reach the stratosphere at an altitude of about 30 km from the troposphere, generating chlorine atoms decomposed by ultraviolet rays. Chlorine atoms destroy ozone O3. When the ozone layer is destroyed, the ability of the ozone layer to absorb short-wave UV-A, which is harmful to living organisms, decreases. Short-wave ultraviolet light has a small amount of energy reaching the ground, but cataracts, a decrease in the immune function of the skin,
It is known that human health is impaired, such as an increase in skin cancer.

[0004] Compared to the total amount of chlorofluorocarbon and alternative fluorocarbons that have flowed into the atmosphere (hereinafter referred to as alternative fluorocarbons), the total amount of fluorocarbon alternatives photodecomposed in the stratosphere per unit time is very small. Stagnation returns are decades to hundreds of years long, and chlorine atoms generated by photolysis continue to destroy the ozone layer. Therefore, the development of a recovery technology for recovering used alternative CFCs has been continued.

[0005] The alternative CFC used in the cooler as a refrigerant leaks out of the equipment and flows out to the atmosphere, and from the waste liquid containing the alternative CFC used in the semiconductor etching, the alternative CFC is not sealed unless it is sealed. Spilled into the atmosphere,
The collected CFCs are also likely to drip during storage and easily flow out to the atmosphere, so the collected CFCs must be rendered harmless as soon as possible.

[0006] Further, even during the transportation of the collected alternative CFCs to a detoxifying apparatus, the collected alternative CFCs leak and leak to the atmosphere. Therefore, it is desirable to install a large number of small-sized devices in a distributed manner rather than intensively installing large-sized devices.

[0007] However, when a large number of small devices are distributed and installed, the total equipment cost and running cost of the number of equipment are not more expensive than the equipment cost and running cost of a large device that is intensively installed. I have to do it. In addition, simplification of operation and easiness of maintenance are also issues so that a large number of people can handle them. It is also important to develop a technology for disassembling alternative fluorocarbons or the like that meets such demands.

[0008] Therefore, it is an important issue not only to stop the production of CFCs and develop alternative substances that do not destroy the ozone layer, but also to recover and detoxify the produced alternative fluorocarbons so as not to flow into the atmosphere. is there.

(Prior art 1) Prior art 1 (Japanese Patent Laid-Open No. 60-15 / 1985)
No. 4200) is a technique using air arc plasma for thermally decomposing harmful substances by applying a high voltage to air supplied to a decomposition furnace and introducing harmful substances into high-temperature plasma. However, as described in FIG. 1 of the Official Gazette and the section of the detailed description of the invention, the prior art 1 states that “the plasma arc in the plasma burner 12 is
Stabilized or aligned by annular electric field coils 36, 38 that spin the arc. And "The organic liquid is supplied to the plasma burner." Therefore, in the prior art 1, the annular electric field coils 36 and 38 for spinning the arc are indispensable in order to bring the plasma into sufficient contact with the organic liquid, and the device becomes large. Further, the prior art 1 has a structure in which the organic liquid is in direct contact with the electrodes 26 and 28 of the plasma burner, so that the consumption of the electrodes is extremely large.

(Prior art 2) Prior art 2 (Japanese Patent Laid-Open No. 5-843)
24) Inject a mixed gas of argon and hydrogen into the decomposition furnace, apply high voltage between the electrodes to make the mixed gas into a plasma state, and generate plasma by rotating and oscillating the plasma with an AC magnetic field generator When the area is expanded and a harmful substance is introduced into the furnace, the harmful substance dissociates into atoms and easily mixes with the plasma. This technique uses arc plasma for efficiently and stably treating the harmful substance. In the prior art 2, since a mixed gas of argon and hydrogen is used, the temperature is very high, and the reaction can be simplified by decomposition in a strong reducing atmosphere. The effect is that the volume of the decomposition furnace can be reduced as compared with the used apparatus.

(Prior art 3) Prior art 3 (Japanese Patent Laid-Open No. 7-240)
81) maintains the pressure in the plasma torch and the chamber (reactor) at a reduced pressure below the atmospheric pressure, so that the plasma can be stably maintained, and the mixed gas of water vapor and the organic halogen compound is injected into the plasma torch. Since it is directly introduced, the organic halogen compound can be efficiently decomposed. Furthermore, this is a technique using a high-frequency induction plasma capable of suppressing generation of dioxins by rapidly cooling an organic halogen compound exhaust gas decomposed by plasma with an alkaline aqueous solution.

(Prior art 4) Prior art 4 is based on “Plasma C
hemistry and Plasma Processing Vol.13, No.3, 199
This is a technique using hot argon plasma to decompose the specific fluorocarbon described in 3). In the experimental apparatus used in the prior art 4, the argon plasma injection is caused by the discharge between the anode of the copper nozzle and the tungsten rod under the atmospheric pressure, and the reaction gas (Freon) is supplied to the entrance of the reaction part (plasma arc). It is injected from below the generator.

(Invention of Prior Application) The invention of the prior application is a technique of a plasma arc reaction method and an apparatus for chlorofluorocarbon, filed on March 17, 1997 by the present applicant. FIG. 2 shows a “plasma torch 10A” of a “plasma arc decomposition apparatus 10” that carries out the CFC plasma arc decomposition method of the prior application and a “plasma power supply 20” that supplies power to the plasma torch 10A. It is explanatory drawing of the shown plasma decomposition method.

Referring to FIG.
Has a through-hole arranged on the outer periphery of the electrode support 11 to allow the plasma gas 1 containing oxygen to flow out and pass the arc plasma 3a, and is connected to the start current supply plus terminal 23t of the plasma arc power supply device 20. You.

The reaction nozzle (positive electrode) 14 is arranged on the outer periphery of the plasma confining nozzle 13 and has a diameter that allows passage of Freon 5 at a flow rate to be reacted and a length of a linear portion where the plasma arc 3a contacts and reacts with Freon. It has a through hole 14h having a length of a straight portion and an inclined portion, and is connected to the arc current supply plus terminal 24t of the plasma arc power supply device 20. The cooling bracket 16 detachably supports the anode nozzle 14 and the reaction nozzle 15 and cools the same.

The CFC plasma arc reaction method of the prior application starts after supplying the oxygen-containing plasma gas 1 between the electrode 12 and the plasma restraining nozzle 13 after the above-described reactor is connected. A current Is is supplied to generate a pilot arc (not shown), and the anode nozzle 1
An arc current Ip is supplied from the electrode 4 to the electrode 12 to generate a plasma arc 3a. After the plasma arc 3a is stabilized, a flow rate of Freon 5 for reacting between the anode nozzle 14 and the reaction nozzle 15 is supplied to supply plasma. After passing through the arc, the oxygen of the plasma jet forming gas (compressed air for forming the plasma jet) and Freon 5 are decomposed and reacted to separate them into carbon dioxide, chlorine and fluorine.

[0017]

The prior arts 1 to 3 all use an AC magnetic field or a high-frequency coil in order to expand the plasma generation area. This necessitates an increase in the size of the reaction apparatus between the plasma and the halogen compound, which increases the equipment cost. Further, in the prior art 4, since the argon plasma injection is used, the arc voltage is low, the heat input is small, the processing flow rate of the reaction gas is small, and the expensive argon gas is used for the plasma injection. , Running costs rise.

The problem to be solved by the present invention is the following [[1] Problems to be solved by the prior application invention] and the problems to be solved specific to alternative CFCs different from those of the prior application invention. Exists. The problem is as described in “[2] Problems to be solved by the present invention” below. [1] Common problems to be solved by the invention of the prior application and the present invention (1) During transportation of the collected alternative CFCs to a detoxifying device, the collected alternative CFCs leak to the atmosphere. Provided is a method and an apparatus for decomposing a plasma arc such as CFC, which can disperse and install a large number of small-sized devices, rather than intensively installing large-sized devices in order to prevent such problems.

(2) Even if a large number of small devices are dispersed and installed, the total equipment cost and running cost of the number of equipment are
Provided is a method and an apparatus for decomposing a plasma arc, such as an alternative chlorofluorocarbon, which is less expensive than a large-scale apparatus which is intensively installed.

(3) To provide a method and an apparatus for disassembling a plasma arc, such as a CFC alternative, which can simplify the operation and facilitate maintenance so that it can be handled by a large number of people.

(4) A method for decomposing a plasma arc, such as a CFC substitute, which can reduce the running cost by solving the above problems and further reducing the corrosion consumption of the plasma confining nozzle and the reaction nozzle and reducing the replacement time. Providing equipment.

[2] Specific problems to be solved by the present invention CFCs of the prior application, for example, “CFC12” (CCl2F)
When 2) is supplied, the oxygen O2 of the compressed air 4 supplied between the plasma confining nozzle 13 and the anode nozzle 14 and "Freon 12" undergo the following reaction A1 due to the high temperature of the plasma jet 3j, thereby causing carbonation. Decomposition gas of gas CO2, fluorine F2 and chlorine Cl2 is generated. Reaction A1 CCl2 F2 + O2 → CO2 + F2 + Cl2 When decomposing the fluorocarbon of the prior application, as shown in the above reaction A1, since the carbon atom C of CCl2F2 is one unit, it is combined with one unit of oxygen O2 to form one unit. Unit of carbon dioxide CO2
Should have been generated.

On the other hand, when decomposing the alternative CFC used in the present invention, for example, “CFC 134a” (C 2 H 2 F 4), as shown in Reactions 1 to 3 described below,
Since C2H2F4 has two carbon atoms C, it combines with two units of oxygen O2 to generate two units of carbon dioxide CO2. Therefore, when decomposing the chlorofluorocarbon alternative used in the present invention, the decomposed chlorofluorocarbon of the prior invention is decomposed by two times.
Oxygen O2 is required twice, and if this oxygen O2 is supplied from compressed air, compressed air capable of supplying this oxygen O2 is required.

When the compressed air capable of supplying the above-mentioned oxygen O2 is supplied by the method and the apparatus of the prior application, the following problems occur, and the chlorofluorocarbon alternative cannot be rendered harmless. The amount of compressed air becomes excessively large compared to the amount of alternative Freon, and the alternative Freon cannot be sucked. The amount of compressed air becomes large, and the arc length for decomposing the CFC substitute becomes insufficient.

[0025]

SUMMARY OF THE INVENTION The present invention relates to a method and an apparatus for decomposing and detoxifying an alternative fluorocarbon which destroys the ozone layer, in which the alternative fluorocarbon is decomposed and reacted by a plasma arc 3a. The plasma arc decomposition apparatus 3 described later with reference to FIGS.
0 and a second invention implemented using a plasma arc decomposition apparatus 50 which is a further improvement of the first invention and will be described later with reference to FIGS. Hereinafter, the structure of the first invention and the second invention will be described for each claim at the time of filing, with the reference numerals shown in FIGS. 3 to 7 and FIGS.

As shown in FIG. 3, in the method for decomposing CFCs according to the present invention, a plasma restraining nozzle 13 having a through-hole having a diameter through which the plasma arc 3a passes is disposed on the outer periphery of the electrode 12. An anode nozzle 14 having a through-hole having a diameter that allows the gas 4 forming the plasma jet 3j to pass from the outer periphery of the plasma confining nozzle 13 to the lower side and a length that forms a pole P of the plasma arc 3a is disposed. And plasma confining nozzle 13
To generate a plasma arc 3a between the electrode 12 and the pole P of the anode nozzle 14, and a plasma jet 3j having a higher arc voltage than the argon gas from above the outer periphery of the plasma confining nozzle 13 Is supplied from the lower part of the anode nozzle 14, and the alternative chlorofluorocarbon is supplied to the plasma jet 3j.
The carbon monoxide CO or carbon atom C which has not been converted into carbon dioxide gas CO2 by the decomposition reaction is converted into the reaction nozzle 32 by the gas heated at a high temperature of the plasma jet 3j (in the claims, " This is a plasma arc decomposition method of CFC alternative which is caused by an oxidation reaction with a gas containing oxygen (hereinafter referred to as carbon dioxide gas) 33 supplied from the middle of the first reaction nozzle to produce carbon dioxide gas CO2.

The method for plasma arc decomposition of CFC substitute of claim 2 at the time of filing is as described in the method of claim 1 at the time of filing.
This is a method of supplying an alternative CFC 31 from below the anode nozzle 14 to above the reaction nozzle 32, wherein
A plasma confining nozzle 13 having a through-hole having a diameter that allows the plasma arc 3a to pass therethrough is disposed on the outer periphery of the
An anode nozzle 14 having a through-hole having a diameter that allows the gas 4 that forms the gas to pass therethrough and a length that is long enough to form the pole P of the plasma arc 3a is provided. The gas 4 that forms the plasma jet 3j below the anode nozzle 14 and Alternative Freon 31
A reaction nozzle 32 having a through-hole having a diameter and a length through which a gas passes through is provided, and a plasma gas 1 is supplied between the electrode 12 and the plasma restraining nozzle 13 so that the electrode 12 and the anode nozzle 1
A plasma arc 3a is generated between the plasma confinement nozzle 13 and the plasma arc 3a, and a gas 4 for forming a plasma jet 3j having an arc voltage higher than the argon gas is supplied from above the outer periphery of the plasma confining nozzle 13 and a reaction is performed from below the anode nozzle 14. Nozzle 3
2 to supply carbon monoxide CO or carbon atoms C generated by the decomposition reaction and not yet converted into carbon dioxide gas CO2. Plasma jet 3
This is a plasma arc decomposition method of chlorofluorocarbon alternative which is oxidized by the gas heated at a high temperature of j with the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 to produce carbon dioxide gas CO2.

The disassembly method of claim 3 at the time of filing is the same as the method of claim 1 at the time of filing, except that the plasma jet 3j having an arc voltage higher than that of argon gas is provided below the anode nozzle 14.
A method is provided in which a reaction nozzle 32 having a through-hole having a diameter and a length through which the gas 4 and the alternative CFC 31 are formed is disposed, and the alternative CFC 31 is supplied from an input hole penetrating in the center direction above the reaction nozzle 32 A plasma confining nozzle 13 having a through-hole having a diameter for allowing the plasma arc 3a to pass therethrough is arranged on the outer periphery of the electrode 12, and the gas 4 forming the plasma jet 3j passes from the outer periphery of the plasma confining nozzle 13 to the lower side. And plasma arc 3a
The anode nozzle 14 having a through-hole having a length corresponding to the portion where the pole P is formed is disposed, and a through-hole having a diameter and a length through which the gas 4 forming the plasma jet 3j and the alternative fluorocarbon 31 pass below the anode nozzle 14 Reaction nozzle 32 having
Is disposed, and the plasma gas 1 is supplied between the electrode 12 and the plasma confining nozzle 13 to generate a plasma arc 3 a between the electrode 12 and the pole P of the anode nozzle 14. Gas 4 forming plasma jet 3j having a higher arc voltage than argon gas
Is supplied, and the alternative Freon 31 is supplied from a charging hole penetrated in the center direction above the reaction nozzle 32, and the alternative Freon is decomposed and reacted by the plasma jet 3j. The decomposition reaction generates carbon dioxide gas CO2. The unreacted carbon monoxide CO or carbon atom C is oxidized by the gas heated at a high temperature of the plasma jet 3j with the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 to produce a carbon dioxide alternative CO 2 plasma. This is an arc decomposition method.

The disassembling method of claim 4 at the time of filing is a method of supplying water or steam 6 together with the alternative chlorofluorocarbon 31 in the method of claim 1 at the time of filing, by passing the plasma arc 3a around the outer periphery of the electrode 12. A plasma confining nozzle 13 having a through hole having a diameter to be
An anode nozzle 14 having a through hole having a diameter that allows the gas 4 forming the plasma jet 3j to pass therethrough and a length that forms a pole P of the plasma arc 3a from the outer periphery to the lower part of the plasma nozzle 3 is disposed. 13 to supply the plasma gas 1 to the electrode 12 and the anode nozzle 1
A plasma arc 3a is generated between the pole P of the plasma nozzle 4 and a gas 4 forming a plasma jet 3j having a higher arc voltage than the argon gas is supplied from above the outer periphery of the plasma confining nozzle 13 and replaced from below the anode nozzle 14. Freon 3
1 and water or steam 6 are supplied to cause a decomposition reaction of the alternative chlorofluorocarbon with the plasma jet 3j, and carbon monoxide CO or carbon atoms C which have not been converted into carbon dioxide gas CO2 by the decomposition reaction are converted into the plasma jet 3j. The gas heated at a high temperature causes an oxidation reaction with the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 to produce carbon dioxide CO.
This is a plasma arc decomposition method for CFC alternative 2.

The decomposition method of claim 5 at the time of filing is a method of supplying water or steam 6 together with the alternative fluorocarbon 31 in the method of claim 2 at the time of filing, wherein the plasma arc 3 a is passed around the outer periphery of the electrode 12. A plasma restraining nozzle 13 having a through hole having a diameter to be
An anode nozzle 14 having a diameter through which the gas 4 forming the plasma jet 3j passes and a length of a portion forming the pole P of the plasma arc 3a is disposed from the outer periphery of the anode nozzle 3 to the lower side. A reaction nozzle 32 having a through-hole having a diameter and a length through which the gas 4 forming the plasma jet 3j and the alternative fluorocarbon 31 pass is disposed, and the plasma gas 1 is supplied between the electrode 12 and the plasma restraining nozzle 13 to supply the electrode. 12 and the pole P of the anode nozzle 14
A plasma arc 3a is generated between the plasma nozzle 3a and a gas 4 forming a plasma jet 3j having an arc voltage higher than the argon gas is supplied from above the outer periphery of the plasma confining nozzle 13 and from above the anode nozzle 14 to above the reaction nozzle 32. And water or steam 6 is supplied together with the alternative Freon 31 to cause the alternative Freon to decompose and react with the plasma jet 3j.
Carbon monoxide CO or carbon atoms C that have not been converted into carbon dioxide gas CO2 by the decomposition reaction are combined with the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 by the gas heated at a high temperature of the plasma jet 3j. This is a plasma arc decomposition method of chlorofluorocarbon alternative which is oxidized to carbon dioxide gas CO2.

The decomposition method of claim 6 at the time of filing is a method of supplying water or water vapor 6 together with the alternative chlorofluorocarbon 31 in the method of claim 3 at the time of filing by passing the plasma arc 3a around the outer periphery of the electrode 12. A plasma restraining nozzle 13 having a through hole having a diameter to be
An anode nozzle 14 having a diameter through which the gas 4 forming the plasma jet 3j passes and a length of a portion forming the pole P of the plasma arc 3a is disposed from the outer periphery of the anode nozzle 3 to the lower side. A reaction nozzle 32 having a through-hole having a diameter and a length through which the gas 4 forming the plasma jet 3j and the alternative fluorocarbon 31 pass is disposed, and the plasma gas 1 is supplied between the electrode 12 and the plasma restraining nozzle 13 to supply the electrode. 12 and the pole P of the anode nozzle 14
And a gas 4 forming a plasma jet 3j having an arc voltage higher than that of argon gas is supplied from above the outer periphery of the plasma confining nozzle 13 to penetrate the reaction nozzle 32 toward the center. The water or steam 6 is supplied together with the alternative Freon 31 from the input hole, and the alternative Freon is decomposed by the plasma jet 3j, and carbon monoxide CO or carbon atom C which has not been converted into carbon dioxide gas CO2 by the decomposition reaction yet. Is a plasma arc decomposition method of chlorofluorocarbon as an alternative to carbon dioxide by causing an oxidation reaction with carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 by a gas heated at a high temperature of the plasma jet 3j.

In the second invention, as shown in FIG. 8, a plasma arc decomposition method of alternative Freon according to claim 7 of the application filed with a plasma having a through hole having a diameter through which the plasma arc 3a passes through the outer periphery of the electrode 12. An anode nozzle 14 in which a constraining nozzle 13 is disposed and has a through hole having a diameter that allows the gas 4 forming the plasma jet 3j to pass therethrough from the outer periphery of the plasma constraining nozzle 13 and a length that forms a pole P of the plasma arc 3a Is disposed, and the plasma gas 1 is supplied between the electrode 12 and the plasma confining nozzle 13 to generate a plasma arc 3 a between the electrode 12 and the pole P of the anode nozzle 14. A gas 4 for forming a plasma jet 3j having a higher arc voltage than an argon gas is supplied, and the anode nozzle 1
4, water or steam 6 is supplied together with the alternative Freon 31 to cause the alternative Freon to undergo a decomposition reaction by the plasma jet 3j, and the carbon dioxide CO2 still generated by the decomposition reaction
The carbon monoxide CO or carbon atom C which does not reach the lower portion of the reaction nozzle 15 (referred to as a “second reaction nozzle” in the claims), lowers the temperature, and reduces the temperature of the carbon monoxide. This is a plasma arc decomposition method of chlorofluorocarbon alternative, in which CO is oxidized with carbon monoxide oxidizing gas 8 containing oxygen supplied from below reaction nozzle 15 to produce carbon dioxide gas CO2.

[0033] The plasma arc decomposition method for CFC substitute according to claim 8 at the time of filing is the second aspect of the present invention.
4 is a method of supplying the substitute CFC 31 from below the upper part of the reaction nozzle 15 to the upper part of the reaction nozzle 15. Restraint nozzle 13
The diameter at which the gas 4 forming the plasma jet 3j passes from the outer periphery to the lower part of the plasma arc 3a, and the pole P of the plasma arc 3a
Nozzle 1 having a through-hole of the length of the part for forming
4, a reaction nozzle 15 having a through-hole having a diameter and a length through which the gas 4 forming the plasma jet 3 j and the alternative fluorocarbon 31 pass below the anode nozzle 14. Between the electrode 12 and the anode nozzle 14
A plasma arc 3a is generated between them, and a gas 4 for forming a plasma jet 3j having an arc voltage higher than that of argon gas is supplied from above the outer periphery of the plasma confining nozzle 13 and from above the anode nozzle 14 to above the reaction nozzle 15. And water or steam 6 is supplied together with the alternative Freon 31 to cause the alternative Freon to undergo a decomposition reaction with the plasma jet 3j,
The carbon monoxide CO or carbon atom C, which has not yet been converted into carbon dioxide gas CO2 generated by the decomposition reaction, reaches a position below the reaction nozzle 15 and its temperature decreases. This is a plasma arc decomposition method of CFC alternative which is oxidized with carbon monoxide oxidizing gas 8 containing oxygen supplied from below to make carbon dioxide gas CO2.

According to the decomposition method of the ninth aspect of the present invention, in the second aspect, the diameter for passing the gas 4 forming the plasma jet 3 j having a higher arc voltage than the argon gas below the anode nozzle 14 and the alternative CFC 31 in the second invention. And a reaction nozzle 15 having a through-hole of length
CFC 3 from the input hole penetrated in the center direction above the
A plasma forming nozzle 13 having a through-hole having a diameter to allow the plasma arc 3a to pass through the outer periphery of the electrode 12 and forming a plasma jet 3j from the outer periphery of the plasma confining nozzle 13 to a lower portion. 4
Nozzle 14 having a through-hole having a diameter that allows passage of the plasma jet 3a and a length that forms a pole P of the plasma arc 3a, and a plasma jet 3j below the anode nozzle 14
A reaction nozzle 15 having a through-hole having a diameter and a length through which the gas 4 forming the gas and the alternative fluorocarbon 31 pass is provided, and the plasma gas 1 is supplied between the electrode 12 and the plasma restraining nozzle 13 to supply the electrode 12 and the anode. A plasma arc 3a is generated between the pole P of the nozzle 14 and a gas 4 for forming a plasma jet 3j having an arc voltage higher than the argon gas is supplied from above the outer periphery of the plasma confining nozzle 13 to a position above the reaction nozzle 15. Water or steam 6 is supplied together with the alternative CFC 31 from the input hole penetrated in the center direction to cause a decomposition reaction of the alternative CFC by the plasma jet 3j, and the carbon monoxide CO which has not yet been converted into carbon dioxide gas CO2 generated by this decomposition reaction. Alternatively, the carbon atoms C reach below the reaction nozzle 15 and the temperature decreases, and the carbon monoxide CO having the lowered temperature is converted into a reaction gas. This is a plasma arc decomposition method of chlorofluorocarbon alternative, which is oxidized with carbon monoxide oxidizing gas 8 supplied from below the nozzle 15 to produce carbon dioxide gas CO2.

[0035] The decomposition method of claim 10 at the time of filing is the method according to any one of claims 1 to 9 at the time of filing, wherein the plasma jet 3j having a higher arc voltage than argon gas is used. This is a plasma arc decomposition method of alternative Freon, in which the gas 4 to be formed and the plasma gas 1 supplied between the electrode 12 and the plasma confining nozzle 13 are gases containing oxygen.

The disassembling method of claim 11 at the time of filing applies the plasma jet 3j having a higher arc voltage than argon gas to the method of any one of claims 1 to 9 at the time of filing. The gas 4 to be formed is a plasma arc decomposition method of alternative Freon in which compressed air is used.

The disassembling method of claim 12 at the time of filing is the same as the method of any one of claims 1 to 9 at the time of filing, wherein the supply is performed between the electrode 12 and the plasma restraining nozzle 13. This is a plasma arc decomposition method of alternative CFCs in which the generated plasma gas 1 is compressed air.

The disassembling method of claim 13 at the time of filing is the same as the method of any one of claims 1 to 9 at the time of filing, wherein the supply method is provided between the electrode 12 and the plasma restraining nozzle 13. Is a plasma arc decomposition method of alternative Freon in which the plasma gas 1 is argon gas.

The disassembling method of claim 14 at the time of filing is the same as the method of any one of claims 1 to 9 at the time of filing, wherein This is a plasma arc decomposition method of alternative Freon in which the plasma gas 1 is nitrogen gas.

The disassembling method according to claim 15 at the time of filing is the method according to any one of claims 1 to 9 at the time of filing, wherein the material of the anode nozzle 14 is a highly conductive material. This is a plasma arc decomposition method of alternative Freon in which the material of the reaction nozzle 15 or 32 is a corrosion-resistant substance.

The disassembling method of claim 16 at the time of filing is the same as the method of any one of claim 1 to claim 9 at the time of filing, wherein the disassembling method penetrates from above the reaction nozzle 15 or 32 toward the center. Alternative Freon 31 to be charged from the charged hole
This is a plasma arc decomposition method of the alternative Freon, which is introduced into the plasma jet 3j while swirling the alternative Freon 31 and water or steam 6 alone.

The decomposition method of claim 17 at the time of filing is the same as the method of claim 7 at the time of filing, claim 8 at the time of filing, or claim 9 at the time of filing, but the method of carbon monoxide supplied from below the reaction nozzle 15 A part of the oxidizing gas 8 is supplied to the gas supply flange 51.
Of alternative CFCs that supply from between the gas supply flange 51 and the combustion cylinder 40 to prevent the flow of corrosive gases such as carbon monoxide, fluorine, and chlorine flowing backward through the gap between the gas supply flange 51 and the combustion cylinder 40. This is an arc decomposition method.

The disassembling apparatus according to claim 18 at the time of filing is an apparatus for implementing the method according to claim 3 or 6 at the time of filing, and has a through hole having a diameter through which the plasma arc 3a passes, and And a through-hole having a diameter for passing the gas 4 forming the plasma jet 3j and a length for forming the pole P of the plasma arc 3a, from the outer periphery of the plasma-constraint nozzle 13 Nozzle 14 and plasma jet 3
a reaction nozzle 32 having a through hole having a diameter and a length through which the gas 4 forming the j and the alternative fluorocarbon 31 pass, and disposed below the anode nozzle 14, between the electrode 12 and the plasma restraining nozzle 13. To generate a plasma arc 3a between the electrode 12 and the pole P of the anode nozzle 14 to form a plasma jet 3j having a higher arc voltage than the argon gas from above the outer periphery of the plasma confining nozzle 13. The gas 4 is supplied, and only the substitute Freon 31 or the substitute Freon 31 and water or water vapor 6 are supplied from the input hole penetrated in the center direction above the reaction nozzle 32 to cause the substitute Freon to undergo a decomposition reaction with the plasma jet 3j,
Carbon monoxide CO or carbon atoms C that have not been converted into carbon dioxide gas CO2 by the decomposition reaction are combined with the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 by the gas heated at a high temperature of the plasma jet 3j. This is a plasma arc decomposition device for chlorofluorocarbon as an alternative to carbon dioxide CO2 through an oxidation reaction.

The disassembling device of claim 19 at the time of filing is a device in which a mechanism for simultaneously attaching and detaching the anode nozzle 14 and the reaction nozzle 32 by the torch attaching / detaching handle 25 is added to the device of claim 18 at the time of filing. A plasma confining nozzle 13 having a through hole having a diameter to allow the plasma arc 3a to pass therethrough and disposed on the outer periphery of the electrode 12, a diameter and a plasma arc 3a for passing the gas 4 forming the plasma jet 3j
And an anode nozzle 14 having a through-hole having a length corresponding to the length of the pole P, which is disposed from the outer periphery of the plasma confining nozzle 13 to the lower side, and a diameter and a diameter through which the gas 4 forming the plasma jet 3j and the alternative Freon 31 pass. Reaction nozzle 32 having a through hole of a length and disposed below anode nozzle 14
The plasma torch 10A provided with the above is attached to the cooling bracket 16 for cooling the reaction nozzle 32 by the plasma torch support 17, and the torch attachment / detachment handle 25 is attached to the plasma torch support 17; The electrode 12 and the plasma confining nozzle 1
3 to generate a plasma arc 3 a between the electrode 12 and the pole P of the anode nozzle 14, and a plasma jet having a higher arc voltage than the argon gas from above the outer periphery of the plasma confining nozzle 13. A gas 4 forming 3j is supplied, and only the substitute Freon 31 or the substitute Freon 31 and water or water vapor 6 are supplied from a charging hole penetrating in the center direction above the reaction nozzle 32, and the substitute Freon is supplied by the plasma jet 3j. Decomposition reaction, carbon monoxide CO or carbon atom C generated by the decomposition reaction and not yet converted to carbon dioxide gas CO2 is applied to the plasma jet 3j
This is a plasma arc decomposition apparatus for chlorofluorocarbon as an alternative to carbon dioxide gas CO2 by oxidizing the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 with the gas heated at a high temperature.

The disassembling apparatus of claim 20 at the time of filing is an apparatus for carrying out the method of claim 9 at the time of filing, and has a through hole having a diameter through which the plasma arc 3a passes, and is disposed on the outer periphery of the electrode 12. And a through-hole having a diameter for passing the gas 4 forming the plasma jet 3j and a length for forming the pole P of the plasma arc 3a, and is disposed from the outer periphery of the plasma-constraint nozzle 13 to below. And a reaction nozzle 15 having a through-hole having a diameter and a length through which the gas 4 forming the plasma jet 3j and the alternative chlorofluorocarbon 31 pass. The reaction nozzle 15 is disposed below the anode nozzle 14. And the plasma confining nozzle 13 to supply the plasma gas 1 to generate a plasma arc 3 a between the electrode 12 and the pole P of the anode nozzle 14. Arc voltage than the argon gas from the outer periphery above the constraint nozzle 13 is higher plasma jet 3j
Is supplied, and only the alternative CFC 31 or only the alternative CFC 31 and water or steam 6 are supplied from the charging hole penetrating the reaction nozzle 15 in the center direction to decompose the CFC alternative with the plasma jet 3j. The carbon monoxide CO or carbon atom C which has not yet been converted into carbon dioxide gas CO2 generated by this decomposition reaction is supplied to the reaction nozzle 15.
, The temperature decreases, and the carbon monoxide CO having the lowered temperature is oxidized with the carbon monoxide oxidizing gas 8 supplied from below the reaction nozzle 15 to convert the carbon monoxide CO into carbon dioxide CO2. It is a decomposition device.

The disassembling apparatus of claim 21 at the time of filing is a device in which a mechanism for simultaneously attaching and detaching the anode nozzle 14 and the reaction nozzle 15 by the torch attaching / detaching handle 25 is added to the apparatus of claim 20 at the time of filing. A plasma confining nozzle 13 having a through hole having a diameter to allow the plasma arc 3a to pass therethrough and disposed on the outer periphery of the electrode 12;
And an anode nozzle 14 having a through-hole having a length corresponding to the length of the pole P, which is disposed from the outer periphery of the plasma confining nozzle 13 to the lower side, and a diameter and a diameter through which the gas 4 forming the plasma jet 3j and the alternative Freon 31 pass. Reaction nozzle 15 having a through hole of a length and disposed below anode nozzle 14
Is attached to a cooling bracket 16 for cooling the reaction nozzle 15 by a plasma torch support 17, and a torch attachment / detachment handle 25 is attached to the plasma torch support 17; 14 and the reaction nozzle 15 are attached and detached, and the electrode 12 and the plasma restraining nozzle 1
3 to generate a plasma arc 3 a between the electrode 12 and the pole P of the anode nozzle 14, and a plasma jet having a higher arc voltage than the argon gas from above the outer periphery of the plasma confining nozzle 13. The gas 4 forming 3j is supplied, and only the substitute Freon 31 or the substitute Freon 31 and water or water vapor 6 are supplied from the input hole penetrated in the center direction above the reaction nozzle 15 to replace the substitute Freon with the plasma jet 3j. The decomposition reaction is carried out, and the carbon monoxide CO or carbon atom C which has not yet been converted into carbon dioxide CO2 generated by the decomposition reaction reaches the lower part of the reaction nozzle 15 and its temperature is lowered, and the carbon monoxide CO whose temperature is lowered Is oxidized and reacted with carbon monoxide oxidizing gas 8 supplied from below the reaction nozzle 15 to form carbon dioxide CO2. A click cracking unit.

The disassembling device of claim 22 at the time of filing is the device of claim 18 at the time of filing, claim 19 at the time of filing, claim 20 at the time of filing, or claim 21 at the time of filing. This is a plasma arc decomposition device for CFC alternatives that uses corrosion-resistant materials such as stainless steel, inconel-based metals, and Hastelloy.

The disassembly device of claim 23 at the time of filing is the same as the device of claim 18 at the time of filing, claim 19 at the time of filing, claim 20 at the time of filing, or claim 21 at the time of filing. Inconel metal, Hastelloy,
This is an alternative CFC plasma arc decomposition apparatus that uses a corrosion resistant material coated with gold or platinum on the inner surface.

The decomposition apparatus according to claim 24 at the time of filing is the method according to claim 7 at the time of filing, claim 8 at the time of filing, or claim 9 at the time of filing, the carbon monoxide supplied from below the reaction nozzle 15. A part of the oxidizing gas 8 is supplied to a gas supply flange 51.
Of alternative CFCs that supply from between the gas supply flange 51 and the combustion cylinder 40 to prevent the flow of corrosive gases such as carbon monoxide, fluorine, and chlorine flowing backward through the gap between the gas supply flange 51 and the combustion cylinder 40. It is an arc decomposition device.

[0050]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the detoxification of alternative CFCs and the like which decompose and detoxify CFC alternatives to be applied to the prior application and the "plasma arc decomposition method of CFC alternatives" of the present invention. It is a principle diagram of a method.

The present invention comprises a first invention which is carried out using a plasma arc decomposition apparatus 30 which will be described later with reference to FIGS. There is a second invention implemented using the arc decomposition device 50.

First, an embodiment of the first invention will be described. In FIG. 1, a plasma arc 3a is generated by supplying electric energy from a plasma arc power supply device 20 shown in FIG. 3, which will be described later. When Freon is decomposed, a decomposition gas is generated by Reaction 1 described below. When oxygen O2 and water or water vapor 6 are supplied to the decomposition gas, reaction 2 causes hydrogen fluoride H
A mixture of F and carbon C, carbon monoxide CO, and carbon dioxide CO2 is generated.

Subsequently, when oxygen O 2 is supplied, carbon C or carbon monoxide CO which has not yet been converted into carbon dioxide gas CO 2 by reaction 3 is converted into a plasma jet 3 which will be described later with reference to FIG.
The gas heated at a high temperature of j causes the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 to undergo an oxidation reaction to carbon dioxide gas CO2.

Further, when calcium hydroxide is supplied,
Reaction 4 generates neutralized and detoxified solid fluorite (calcium fluoride CaF2) and water. This fluorite can be reused as a flux or other solvent for submerged arc welding.

Next, an embodiment of the second invention will be described. In FIG. 1, a plasma arc 3a is generated by supplying electric energy from a plasma arc power supply device 20 shown in FIG. 8, which will be described later. When CFC is decomposed, by reaction 1 described below,
Decomposition gas is generated. When water or steam 6 is supplied to the decomposition gas, reaction 2A generates hydrogen fluoride HF and a mixture of carbon C, carbon monoxide CO, and carbon dioxide CO2.

Subsequently, the carbon C or carbon monoxide CO, which has not yet been converted into carbon dioxide gas CO 2, reaches below the reaction nozzle 15 and its temperature decreases. The oxygen O2 of the carbon monoxide oxidizing gas 8 is supplied from below the reaction nozzle 15 to the carbon monoxide CO whose temperature has dropped, and is oxidized to cause a carbon dioxide gas C.
O2. Hereinafter, Reaction 4 is the same as that in the first embodiment of the present invention, and a description thereof will be omitted.

[0057]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The principle or operation of the alternative chlorofluorocarbon decomposition method shown in FIG. 1 applied to the "method and apparatus for decomposing chlorofluorocarbon alternatives" of the present invention will be described. (1) The plasma decomposition apparatus 30 used in the alternative CFC of the first invention is a plasma arc power supply 2 shown in FIG.
Electric energy is supplied from 0 to generate a plasma arc 3a. (2) A plasma jet forming gas for forming a plasma jet 3j having a higher arc voltage than the argon gas, for example, compressed air 4 for forming a plasma jet, is supplied from above the outer periphery of the plasma confining nozzle 13 to the plasma jet 3
j is generated. (3) When an alternative Freon 31, for example, “Freon 134a” (C2H2F4) is supplied from below the anode nozzle 14,
Due to the high temperature of the plasma jet 3j, it is decomposed into carbon C, hydrogen H2 and fluorine F2, and subsequently a decomposition gas of carbon C, hydrogen fluoride HF and fluorine F2 is generated.

(4) Water or water vapor (H 2 O) 6 alone or water or water vapor (H 2 O) 6 and a carbon atom oxidizing gas (for example, , Compressed air for carbon atom oxidation)
When oxygen O2 of 7 is supplied, the following reaction 2 gives
Hydrogen fluoride HF and carbon C, carbon monoxide CO, carbon dioxide C
A mixture of O2 is formed. (5) CO2 generated by the above reaction 2 and still CO2
The carbon monoxide CO or carbon atom C that has not been converted to a carbon dioxide gas containing oxygen supplied from the middle of the reaction nozzle 32 as shown in the following reaction 3 by a gas heated at a high temperature of the plasma jet 3j. Oxidation reaction with 33 to produce carbon dioxide gas CO2. (6) Further, when calcium hydroxide Ca (OH) 2 is supplied, as shown in the following reaction 4, neutralized and harmless solid fluorite, calcium fluoride CaF2, and water are generated.

Reaction 1 C2H2F4 → 2C + H2 + 2F2 → 2C + 2HF + F2 Reaction 2 2C + 2HF + F2 + 1 / 2O2 + H2O → 2CO + 4HF Reaction 3 2CO + 4HF + O2 → 2CO2 + 4HF Reaction 4 2Ca (OH) 2 + 4HF → 2C

The principle or operation of the alternative chlorofluorocarbon decomposition method shown in FIG. 1 to be applied to the "method and apparatus for decomposing chlorofluorocarbon alternatives" of the second invention will be described. (1) A plasma decomposition apparatus 50 used in the alternative CFC of the second invention is a plasma arc power supply 2 shown in FIG.
When the electric energy and the alternative CFC 31 are supplied from 0, carbon C, hydrogen H2, and fluorine F2 are supplied as in the first embodiment.
Followed by carbon C, hydrogen fluoride HF and fluorine F
Decomposition gas with 2 is generated.

(2) Water or steam (H
When 2O) 6 is supplied, a mixture of hydrogen fluoride HF, hydrogen H2, carbon C, carbon monoxide CO, and carbon dioxide CO2 is generated by the following reaction 2A. (3) Carbon dioxide CO still generated by the above reaction 2A
The carbon monoxide CO or carbon atom C which has not become 2 reaches below the reaction nozzle 15 and the temperature decreases, and the carbon monoxide CO whose temperature has decreased is converted into a reaction nozzle Oxidation reaction with the carbon monoxide oxidizing gas 8 containing oxygen supplied from below is made into carbon dioxide gas CO2. Hereinafter, Reaction 4 is the same as the principle or operation of the first invention, and thus the description is omitted.

Reaction 1 C2H2F4 → 2C + H2 + 2F2 → 2C + 2HF + F2 Reaction 2A 2C + 2HF + F2 + 2H2O → 2CO + 4HF + H2 Reaction 3A 2CO + 4HF + H2 + 3 / 2O2 → H2O + 2CO2 + 4HF2 + 2C4H2 + 2C4H2O2 + 2C4H2F

Referring to FIGS. 3 to 7, the configuration of the embodiment of the first invention will be described. FIG. 3 shows the “plasma torch 10” of the “plasma arc decomposition apparatus 30” that carries out the plasma arc decomposition method of the alternative fluorocarbon of the first invention.
FIG. 4A is an explanatory diagram of a plasma decomposition method showing “A” and “plasma power supply device 20” that supplies power to plasma torch 10A. As shown in FIG. 5 described later, the plasma arc decomposition apparatus 30 includes a plasma torch 10A, an anode nozzle 14, a reaction nozzle 32, a cooling bracket 16, and a corrosion-resistant flange (hereinafter, referred to as a reaction nozzle support) for supporting the reaction nozzle. (Referred to as a flange) 34, the torch handle rotating body 26, the plasma torch support 17, the torch detachable handle 25, and the like. Further, as shown in FIG. 3, the plasma torch 10A is formed by an electrode 12 supported on an electrode support 11, a plasma restraining nozzle 13 arranged on the outer periphery of the plasma electrode support 11, and the like.

The anode nozzle (positive electrode) 14 has a diameter 14 d from the outer periphery of the plasma confining nozzle 13 to a position below the anode nozzle 14 for passing the plasma jet forming gas 4 for forming the plasma jet 3 j having a higher arc voltage than the argon gas. (See FIG. 6) and plasma arc 3a
Nozzle through hole 1 having a length corresponding to the pole P
4h. The anode nozzle 14 is connected to the arc current supply plus terminal 24 t of the plasma arc power supply 20.
Connected to.

The electrode (minus electrode) 12 is the electrode support 1
1, the electrode support 11 is connected to the arc current supply minus terminal 20t of the plasma arc power supply device 20. The plasma arc power supply device 20 includes a plasma arc current output circuit 21 that outputs a plasma arc current,
It comprises a start current limiting element 22 for outputting a pilot arc current, a start current supply switch element 23 for energizing and stopping the pilot arc current, and a plasma arc current supply switch element 24 for energizing and stopping the plasma arc current.

The plasma restraining nozzle 13 is connected to the electrode support 11.
And a through hole 13h of a plasma confining nozzle having a diameter that allows the plasma gas 1 to flow out to generate a pilot arc (not shown), and then pass the plasma arc 3a generated by the pilot arc.
It is connected to the positive terminal 23t for supplying the start current of the plasma arc power supply device 20. The generated plasma arc 3a forms a plasma jet 3j together with the plasma jet forming gas 4.

FIG. 4 is a perspective view and a sectional view taken along the line "E" of the swirl inlet 15h of the reaction nozzle 32 shown in FIG. FIG. 3A shows the swirl input hole 15h of the reaction nozzle 32 shown in FIG.
FIG. 3B is a perspective view of a portion, and FIG. 3B is a sectional view taken along the line “E” of the swirl input hole 15 h of the reaction nozzle 32 in FIG. In the figure, 15h is a CFC alternative 3 for the reaction nozzle.
Reference numeral 1 denotes a swirl injection hole for a reaction nozzle of water or water vapor 6 and a carbon atom oxidizing gas 7. The turning horizontal angle.

FIG. 5 is a diagram showing an embodiment of the configuration of a plasma decomposition apparatus 30 for performing the method for decomposing CFCs of the alternative fluorocarbon of the first invention. FIG. The plasma torch 10A is mounted on a plasma torch support 17. An anode nozzle 14 is attached to the plasma torch support 17 and the anode nozzle 14
The reaction nozzle 32 is attached to the tip of the. A torch handle rotating body 26 and a torch detachable handle 25 are attached to the plasma torch support 17. The torch handle rotating body 26 is attached to the upper part of the cooling bracket 16 by screws. When the torch attaching / detaching handle 25 is rotated and lifted upward, the plasma torch 10A, the plasma torch support 17, the torch handle rotating body 26, the anode nozzle 14, and the reaction nozzle 32 can be integrally pulled out of the cooling bracket 16, and the plasma torch can be pulled out. Inspection and replacement of the 10A, the anode nozzle 14 and the reaction nozzle 32 can be facilitated.

Cooling water is supplied to the cooling bracket 16 from the cooling bracket cooling water inlet fitting 16a, and the anode nozzle 14
And the reaction nozzle 32 are cooled and discharged from the cooling bracket cooling water outlet fitting 16b. The plasma jet forming gas (compressed air for forming a plasma jet) 4 having a higher arc voltage than the argon gas is supplied from the plasma jet forming gas supply port 18a. The alternative Freon 31 and water or steam 6 are supplied from the alternative Freon and water or steam supply port 18b. A carbon atom oxidizing gas (compressed air for carbon atom oxidation) 7 is supplied from a carbon atom oxidizing gas (compressed air for carbon atom oxidation) supply port 18c. A carbon dioxide gas (compressed air for carbon dioxide) 33 is supplied from a carbon dioxide gas (compressed air for carbon dioxide) supply port 38d.

FIG. 6 is a partial cross-sectional view of the connection configuration of the plasma torch 10A, the anode nozzle 14, and the reaction nozzle 32 in the configuration of the plasma decomposition apparatus 30 of FIG. Referring to FIG. The reaction nozzle 32 is connected to a lower part of the anode nozzle 14. The reaction nozzle 32 has a flow rate to be reacted, "diameter 15d for swirling the alternative Freon 31".
Of the reaction nozzle 15h
It has a through-hole 15j of “15 g in diameter for passing through the alternative Freon 31” and “15k in length of a portion where the plasma jet 3j contacts and decomposes and reacts with the alternative Freon 31”.

At the lower part of the reaction nozzle 32, there is provided a "reaction nozzle compressed air swirl injection hole 32h" of "reaction nozzle compressed air swirl injection hole 32d" for swirling the carbon dioxide gas 33. The carbon dioxide gas 33 is passed to cause an oxidation reaction to produce carbon dioxide gas CO2 “diameter 32 g of a portion where carbon atoms in the substitute Freon of the through hole of the reaction nozzle oxidize” and “length of the portion of the through hole 32 j of the reaction nozzle”. 32k ".

The alternative chlorofluorocarbon 31 is supplied from the above-described swirl introduction hole 15h of the reaction nozzle, and the alternative fluorocarbon is decomposed and reacted by the plasma jet 3j. The CO or carbon atom C is oxidized by the gas heated at a high temperature of the plasma jet 3j with the carbon monoxide oxidizing gas 8 supplied from the middle of the reaction nozzle 32 to produce carbon dioxide gas CO2.

FIG. 7 is a partial cross-sectional view showing a state in which maintenance and inspection are facilitated in the structure in which the plasma decomposition device 30 and the combustion tube 40 of FIG. 5 are connected by a hinge structure. Cooling bracket 1 of plasma decomposition apparatus 30 of FIG.
6 and the combustion tube 40 are rotatably connected by an opening / closing hinge 35 so that the maintenance and inspection shown in FIG. In addition to replacing the reaction nozzle support (corrosion resistant) flange 34 which needs to be replaced, the carbide attached to the combustion tube 40 is cleaned and removed.

The plasma arc decomposition method of the alternative CFC of the first invention is as follows. After supplying the compressed air 4 for forming a plasma jet between the plasma confining nozzle 13 and the anode nozzle 14, supplying the start gas Is after supplying the plasma gas 1 between the electrode 12 and the plasma confining nozzle 13. Then, a pilot arc (not shown) is generated, and a plasma arc current Ip is applied from the plasma confining nozzle 13 to the anode nozzle 14 to generate a plasma arc 3a. After the plasma arc 3a is stabilized, the flow rate to be reacted Is supplied to the swirl injection hole 15h of the reaction nozzle and the alternative Freon 31 is passed through the plasma jet 3j.
Due to the high temperature of j, it is decomposed into carbon C, hydrogen H2 and fluorine F2, and subsequently a decomposition gas of carbon C, hydrogen fluoride HF and fluorine F2 is generated.

Referring to FIGS. 3 and 6, an embodiment of the "method of decomposing and detoxifying chlorofluorocarbon alternative" in FIG. 1 for application to the "method of plasma arc decomposition of fluorocarbon alternative" of the present invention will be described. explain. (1) The negative electrode 20t for supplying an arc current of the plasma arc power supply 20 is connected to the electrode support 11 supporting the electrode (hafnium electrode) 12. (2) The plasma arc power supply device 2 has a through hole 13h having a diameter of 13d through which the plasma arc 3a passes, and
The 0 start current supply plus terminal 23t is connected. (3) The plasma confining nozzle 13 has a through hole 14h having a diameter 14d for passing the plasma jet 3j and a portion 14k for forming the pole P of the plasma arc 3a.
Anode nozzle (plus electrode) 14 arranged on the outer periphery of
The arc current supply plus terminal 24t of the plasma arc power supply 20 is connected.

(4) The plasma jet forming gas 4 (4 [kg
/ Cm2] and 23 [l / min] of compressed air.
2 and the plasma confining nozzle 13
(4 [kg / cm2], 35 [l / min] of compressed air), and then a start current Is is supplied to generate a pilot arc (not shown).

(5) By applying a voltage of 240 [V] between the electrode 12 and the anode nozzle 14, the plasma confined nozzle 1
3 to the anode nozzle 14, the plasma arc current Ip = 6
A current of 0 [A] is applied to generate a plasma arc 3a.

(6) After the plasma arc 3a is stabilized, "Freon 134"
a "(C2H2F4) and flow rate for decomposition reaction 3
5 [l / min] alternative chlorofluorocarbon 31 and plasma jet 3j
When the gas is passed through the plasma jet 3j, a reaction shown by C2H2F4 → 2C + H2 + 2F2 → 2C + 2HF + F2 (reaction 1) is caused by the high temperature of the plasma jet 3j to be decomposed into carbon C, hydrogen H2 and fluorine F2, and subsequently carbon C and fluorine. A decomposition gas of hydrogen fluoride HF and fluorine F2 is generated.

(7) The decomposition gas and the oxygen O of the carbon atom oxidizing gas 7 supplied from the swirl injection hole 15h of the reaction nozzle.
2 and water or steam 6 react as shown in 2C + 2HF + F2 + 1 / 2O2 + H2O → 2CO + 4HF (reaction 2) to generate a mixture of hydrogen fluoride HF, carbon C, carbon monoxide CO, and carbon dioxide CO2. .

(8) The carbon monoxide CO or carbon atom C generated by the reaction 2 and not yet converted into carbon dioxide CO 2 and the carbon dioxide gas 33 containing oxygen supplied from the middle of the reaction nozzle 32 are 2CO + 4HF + O2 → 2CO2 + 4HF (Reaction 3) An oxidation reaction is performed to produce carbon dioxide gas CO2.

(9) Calcium hydroxide C
When supplied in the form of bubbling into the solution of a (OH) 2 swirling, calcium hydroxide Ca (OH) 2 and hydrogen fluoride HF are converted into 2Ca (OH) 2 + 4HF → 2CaF2 + 4H2O (reaction 4). The neutralized detoxified water and the solid fluorite CaF2 are generated by the reaction shown in (1).

The dimensions and disassembly conditions of the components in the embodiment of FIG. 3 are selected as follows. Plasma restrained nozzle 1
The diameter 13d of the third through hole 13h is 1.6 [mm].
Plasma jet 3j in through hole 14h of anode nozzle 14
The diameter 14d of the portion through which passes is 6 [mm], and the through-hole length 14k of the portion where the pole P of the anode nozzle 14 is formed is 25 [mm]. The diameter 15d of the swirl injection hole 15h of the reaction nozzle for swirling the alternative CFC 31 of the reaction nozzle 32 into the plasma jet 3j is set to 2 [mm], and the plasma jet 3j of the reaction nozzle 32, the alternative CFC 31 and the carbon atom oxidizing gas 7 15g of the diameter of the part where
3 mm, the length 15 k of the portion of the through-hole 15 j of the reaction nozzle 32 where the plasma jet 3 j of the through-hole 15 i of the reaction nozzle 32 comes into contact with the alternative fluorocarbon 31 to decompose and react is 70 [mm], The length 32k of the 32 through-hole 32j is 60 [mm].

The respective diameters and lengths selected in the above embodiment were measured using the hafnium electrode 11 and supplying 23 [l / min] of compressed air 4 for forming a plasma jet, and the plasma arc current Ip = 60 [A ], And “Freon 134
a "(C2H2F4) and flow rate for decomposition reaction 3
When only 5 [l / min] of the alternative chlorofluorocarbon 31 is supplied, the plasma arc 3a is stabilized, and the type of the decomposition reaction and the flow rate of the alternative chlorofluorocarbon 31 can be almost completely reacted.

Therefore, the type of the electrode 12, the type and the flow rate of the plasma gas 1, the plasma arc current Ip,
Since the appropriate value varies depending on the type of the alternative CFC 31 to be reacted and the usage conditions such as the flow rate thereof, the plasma confining nozzle 13 capable of passing the plasma gas 1 and the plasma arc 3a in accordance with these usage conditions.
The diameter 13d of the through hole 13h is selected, and (2) the through hole 14 of the anode nozzle 14 through which the plasma jet 3j passes
h is selected, and the pole P of the plasma arc 3a is selected.
Is selected as the length 14k of the anode nozzle 14 at the portion where the nozzle is formed. When compressed air is used as the plasma jet forming gas 4, 20 to 25 [l / min] of compressed air for forming a plasma jet is supplied.

(3) Further, alternative CFC 31 to be reacted
Diameter of the swirl injection hole 15h of the reaction nozzle
5d and a swirl horizontal angle 15θ and a swivel vertical angle 15 ° (FIG. 6) shown in FIG. 4 are selected, and (4) an alternative CFC 31 and a carbon atom oxidizing gas 7 at a flow rate to be reacted are passed and the plasma jet 3j is contacted. The diameter 15g (FIG. 6) of the through-hole 15j capable of causing the decomposition reaction is selected, and the plasma jet 3j is brought into contact with the through-hole 15j of the reaction nozzle 32 which can substantially completely react with the alternative Freon 31. A length of 15 k (FIG. 6) may be selected and finally selected so that the plasma arc 3a is stable and the type and flow rate of the alternative fluorocarbon 31 to be decomposed can be almost completely decomposed. Carbon atom oxidizing gas 7
When compressed air is used, 50 to 40 [l / mi
n] compressed air for oxidation of carbon atoms.

(5) Plasma jet forming gas 4, substitute chlorofluorocarbon 31, carbon atom oxidizing gas 7, and carbon dioxide gas 3
32g of the through-hole 32j through which 3 can pass
And carbon dioxide gas still generated by the decomposition reaction
The carbon monoxide CO or carbon atom C which is not 2 can be oxidized by the gas heated by the plasma jet 3j with the carbon dioxide gas 33 supplied from the middle of the reaction nozzle 32 to carbon dioxide CO2. By selecting the length 32k of the portion of the through-hole 32j of the reaction nozzle 32, finally, an alternative CFC 31 of the type and the flow rate of the decomposition reaction is performed.
May be selected so that carbon atoms C contained in the carbon dioxide can be converted into carbon dioxide gas CO2. When compressed air is used as the carbon dioxide gas 33 selected as described above, about 200
[L / min] of carbon dioxide gasified compressed air is supplied.

The disassembly method of the second invention described in the following embodiments of FIGS. 8 to 11 is a modification of the disassembly method of the first invention described in the embodiments of FIGS. 3 to 6 as follows. It is the invention which was completed. The supply amount of water or water vapor 6 is theoretically doubled without supplying the carbon atom oxidizing gas 7 from the carbon atom oxidizing gas supply port 18c shown in FIG. Instead of the gasified gas supply port 38d, a carbon monoxide oxidizing gas supply port 18d supplied from below the reaction nozzle is provided as shown in FIG.

Due to the partial modification of the structure, the following effects of the decomposition method of the second invention are different from those of the decomposition method of the first invention. In the decomposition method of the first invention, the alternative chlorofluorocarbon 31 is supplied to decompose the alternative chlorofluorocarbon at a high temperature of the plasma jet 3j. A mixture forms. Subsequently, when oxygen O2 is supplied, the reaction 3 causes carbon C or carbon monoxide CO which has not yet been converted into carbon dioxide gas CO2.
Is oxidized by the gas heated at a high temperature of the plasma jet 3j with the carbonized gas 33 supplied from the middle of the reaction nozzle 32 to produce carbon dioxide CO2.

The decomposition method according to the first aspect of the present invention has the following improvements. (A) Since the carbon atom oxidizing gas 7 is supplied from the carbon atom oxidizing gas supply port 18c and the carbon dioxide gas 33 is supplied from the middle of the reaction nozzle 32, the plasma jet 3j is heated at a high temperature. Since the temperature of the gas has not dropped to a temperature suitable for the oxidation reaction, carbon C is easily generated, and the carbon C is easily deposited on the reaction nozzle 32 and clogged. (B) At a position in the middle of the reaction nozzle 32 for supplying the carbon dioxide gas 33, the gas passing through the reaction nozzle 32 has a high temperature, so that the O-ring attached to the reaction nozzle 32 is easily burned. Therefore, the labor for maintenance work for replacement becomes large, and the operation rate of the device is reduced.

(C) Since the carbonized gas 33 is supplied from the middle of the reaction nozzle 32, the structure of the reaction nozzle 32 becomes complicated, and the cost of the reaction nozzle 32 as a consumable product is particularly high. (D) The carbon dioxide gas 33 is not supplied from the middle of the reaction nozzle 32. The reaction nozzle 15 and the carbon dioxide gas 33 of the “fluorocarbon decomposition method” of the prior application shown in FIG. It is necessary to prepare two types of consumables as the reaction nozzle 32 with the reaction nozzle 32 of the alternative chlorofluorocarbon decomposition method of the first invention shown in FIG.

Therefore, the decomposition method of the second aspect of the present invention relates to a method of “carbon C which has not yet been converted into carbon dioxide CO 2 heated at a high temperature.
Alternatively, when the temperature of carbon monoxide CO is lowered to a temperature suitable for the oxidation reaction, the carbon monoxide gas 33 (in the second invention, the carbon monoxide oxidizing gas 8) oxidizes and becomes carbon dioxide gas CO2 more easily. " By changing a part of the configuration of the decomposition method of the first invention, the following improvements are further improved over the decomposition method of the first invention.

FIG. 8 shows a "plasma torch 10A" in a "plasma arc decomposition apparatus 50" for carrying out the plasma arc decomposition method of alternative chlorofluorocarbon of the second invention and a "plasma power supply" for supplying power to the plasma torch 10A. Device 2
It is explanatory drawing of the plasma decomposition method which shows "0." Less than,
Only the structure in which the "plasma arc decomposition apparatus 30" that performs the decomposition method of the first invention and the "plasma arc decomposition apparatus 50" that performs the decomposition method of the second invention are different will be described. In FIG. 8, a "plasma arc decomposing apparatus 50" for implementing the decomposition method of the second invention uses a reaction nozzle 15 of the second invention instead of the reaction nozzle 32 of the first invention. While the reaction nozzle 32 of the first invention is provided with a swirl injection hole 32h of compressed air of the reaction nozzle for supplying the carbonized gas 33 from the middle of the reaction nozzle, the reaction nozzle 15 of the second invention is Without providing a swirl hole for compressed air in the middle of the reaction nozzle, the reaction nozzle 15
A gas supply flange 51 is disposed below the gas supply flange 51, and a carbon monoxide oxidizing gas (for example,
(Compressed air for carbon monoxide oxidation) 8 is supplied. Further, a large amount of the carbon monoxide oxidizing gas 8 is supplied through the carbon monoxide oxidizing gas supply passage 51c, and a part of the carbon monoxide oxidizing gas 8 is supplied as a purge gas through the purge gas passage 51p to prevent the backflow of the combustion gas. To prevent corrosion of the reaction nozzle 15.

FIG. 9 shows the swirl inlet 1 of the reaction nozzle of FIG.
It is the perspective view of 5h part, and "E" sectional drawing. 8A is a perspective view of the swirl input hole 15h of the reaction nozzle 15 of FIG. 8, and FIG. 8B is a view of the reaction nozzle 1 of FIG.
5 is an “E” cross-sectional view of a portion 15h of a turning input hole.
In the figure, reference numeral 15h designates an alternative Freon 31 for the reaction nozzle and a swirl injection hole of the reaction nozzle for water or steam 6.
5θ is the swirl horizontal angle of the swirl inlet for swirling and injecting the alternative Freon 31 and water or steam 6 into the reaction nozzle.

FIG. 10 is a partial cross-sectional view showing the connection of the plasma torch 10A, the anode nozzle 14, and the reaction nozzle 15 in the configuration of the plasma decomposition apparatus 50 of FIG. FIG.
Will be described. The reaction nozzle 15 is an anode nozzle 14
Is connected to the lower part. The reaction nozzle 15 is provided with a flow rate of “replacement diameter of 15 for swirling and inputting the alternative CFC 31”.
d), the through-hole 15j having a diameter 15g through which the alternative CFC 31 is passed and the plasma jet 3j in contact with the plasma nozzle 3j and having a length of 15k to be decomposed with the alternative CFC 31 have. At the lower part of the reaction nozzle 15, the carbon monoxide oxidizing gas 8 is injected.
n ", a gas supply flange 51 having a" gas supply flange input hole 51m ".

The alternative chlorofluorocarbon 31 is supplied from the above-described swirl charging hole 15h of the reaction nozzle, and the alternative fluorocarbon is decomposed and reacted by the plasma jet 3j. Alternatively, the carbon atom C reaches below the reaction nozzle 15 and the temperature decreases, and the carbon monoxide CO
Is oxidized with carbon monoxide oxidizing gas 8 supplied from below the reaction nozzle 15 to produce carbon dioxide gas CO2.

FIG. 11 is a view showing an embodiment of the configuration of a plasma decomposition apparatus 50 for implementing the method for decomposing CFCs of alternative CFCs according to the second invention. FIG.
The plasma torch 10A is mounted on a plasma torch support 17. An anode nozzle 14 is attached to the plasma torch support 17 and the anode nozzle 1
A reaction nozzle 15 is attached to the tip of the nozzle 4. A torch handle rotating body 26 and a torch detachable handle 25 are attached to the plasma torch support 17. The torch handle rotating body 26 is attached to the upper part of the cooling bracket 16 by screws. When the torch attaching / detaching handle 25 is rotated and lifted upward, the plasma torch 10A, the plasma torch support 17, the torch handle rotating body 26, the anode nozzle 14, and the reaction nozzle 15 can be integrally pulled out from the cooling bracket 16, and the plasma torch can be removed. Inspection, replacement, etc. of 10A, anode nozzle 14 and reaction nozzle 15 can be facilitated.

Cooling water is supplied from the cooling bracket cooling water inlet fitting 16a to the cooling bracket 16, and the anode nozzle 14
And the reaction nozzle 15 are cooled and discharged from the cooling bracket cooling water outlet fitting 16b. The plasma jet forming gas (compressed air for forming a plasma jet) 4 having a higher arc voltage than the argon gas is supplied from the plasma jet forming gas supply port 18a. The alternative Freon 31 and water or steam 6 are supplied from the alternative Freon and water or steam supply port 18b. A carbon monoxide oxidizing gas (for example, compressed air for carbon monoxide oxidation) is supplied from a supply port 18d.
(Compressed air for carbon monoxide oxidation) 8 is supplied.

FIG. 12 shows the plasma decomposition apparatus 50 of FIG.
FIG. 10 is a partial cross-sectional view showing a state in which maintenance and inspection are facilitated in a structure in which the fuel cell and the combustion cylinder 40 are connected by a hinge structure. The lower part of the cooling bracket 16 of the plasma decomposition apparatus 50 of FIG.
12 in a state where the maintenance and inspection shown in FIG. 12 are facilitated, and the gas supply flange 51 which must be frequently replaced due to corrosion by carbon monoxide CO or the like is replaced. Then, the carbide attached to the combustion tube 40 is cleaned and removed.

The embodiment shown in FIGS. 3 to 7 or FIGS. 8 to 12 can be modified as follows. (1) Compressed air is used as the plasma gas 1, but argon, nitrogen, or high-purity nitrogen gas subjected to membrane separation from compressed air is used as the plasma gas 1 to reduce electrode consumption. (2) The through-hole 15 of the alternative CFC decomposition reaction part of the reaction nozzle 15 or 32 of the plasma arc decomposition apparatus 30 or 50
j, a diameter 15d and a swivel horizontal angle 15 for sufficiently bringing the plasma jet 3j into contact with the alternative Freon 31.
θ, swirl input hole 15 of reaction nozzle with swivel vertical angle 15 °
h, the plasma jet 3j and the alternative Freon 31 are almost completely contact-decomposed to the entire peripheral surface of the through hole 15j of the decomposition reaction part of the reaction nozzle 15 or 32, so that the alternative Freon 31 After a short distance, it can be almost completely reacted with the alternative CFC 31.

(3) Plasma arc decomposition apparatus 30 or 5
The corrosion of the reaction nozzle 15 or 32 due to fluorine can be reduced by using stainless steel, an Inconel-based metal or Hastelloy, which is a material less corroded by fluorine, for the reaction nozzle 15 or 32 of zero. (4) The cooling bracket 16 of the plasma arc decomposition apparatus 30 or 50 is made of stainless steel, Inconel metal or Hastelloy, which is less corroded by fluorine,
Corrosion of the cooling bracket 16 by fluorine can be reduced.

(5) When the plasma gas 1 containing oxygen is used, yttrium oxide of an iridium-based metal such as hafnium Hf or ruthenium or a compound thereof is used as the material of the electrode 12 to obtain a high melting point oxide. Is formed to improve the wear resistance of the electrode. (6) When the plasma gas 1 containing oxygen is used, a membrane separation process is performed from compressed air using a nitrogen generator, high-purity nitrogen gas is taken out and used as the plasma gas 1, so that the electrode The wear resistance can be improved.

(7) A portion of the reaction nozzle 15h for swirling and charging the alternative Freon 31 having a flow rate to be reacted, a diameter 15g for passing the alternative Freon 31 and the plasma jet 3j are in contact with the alternative Freon 31 for decomposition reaction. A first portion of the reaction nozzle 32 having a through hole 15j having a length of 15k, and an oxidation reaction of carbon monoxide CO or carbon atom C which has been generated by a decomposition reaction and has not yet been converted into carbon dioxide gas CO2 with a gas containing oxygen. The second portion of the reaction nozzle 32 having a through hole 32j having a length of 32k to be converted into carbon dioxide gas CO2 may be separately formed of the same material or different materials suitable for each.

[0103]

Claims 1 to 6 at the time of filing
Alternatively, the plasma arc decomposition method and apparatus of the alternative chlorofluorocarbon (eg, chlorofluorocarbon 134a, C2H2F4) of claim 18 at the time of filing and claim 19 at the time of filing are twice as large as when decomposing the chlorofluorocarbon of the prior application. Oxygen O2 is required,
Since a large amount of carbon atom oxidizing gas (for example, compressed air for carbon atom oxidation) 7 is required to supply the oxygen O2, the length 15k of the through hole 15j of the reaction nozzle is required.
By additionally extending the length 32k of the portion of the through hole 32j of the reaction nozzle and supplying the carbon dioxide gas (for example, compressed air for carbon dioxide gas) 33, in addition to the effects of the following prior invention, This has the effect of the first aspect of the present invention in which the flow rate of the alternative Freon to be reacted can be sucked, and the arc length for decomposing the alternative Freon can be prevented from becoming insufficient.

The decomposition method according to claim 1 at the time of filing the invention has the same advantages as the first invention, except that the plasma arc 3 is formed in a plasma jet forming gas having an arc voltage higher than that of argon gas.
a, the arc voltage is increased, the pole point of the anode nozzle 14 can be shifted downward, the heat input can be increased, and the alternative CFC 31 is supplied from below the anode nozzle 14 to decompose the CFC alternative with the plasma jet 3j. Because we are reacting
The consumption of the anode nozzle 14 can be extremely reduced.

The decomposition method according to claim 2 at the time of filing applies the same effect as that of claim 1 at the time of filing, in addition to the reaction of decomposing the anode nozzle 14 for forming the pole of the plasma arc 3a and the alternative chlorofluorocarbon 31 with the plasma jet 3j. Since the nozzle 32 and the nozzle 32 are separated from each other, they can be replaced separately according to the degree of wear of both nozzles.

The disassembling method according to claim 3 at the time of filing applies the same effects as claim 1 at the time of filing, but also includes the pole P of the plasma arc 3a.
Is separated from the reaction nozzle 32 for decomposing and reacting the alternative chlorofluorocarbon 31 with the plasma jet 3j, so that the two can be replaced separately according to the degree of wear of both nozzles. Since the alternative Freon 31 is supplied from the anode, the decomposed carbon does not adhere to the anode nozzle 14 and does not corrode with fluorine, and a material having good conductivity, for example, copper, must be used. The consumption of the nozzle 14 can be further reduced.

The decomposition method according to claim 4 at the time of filing is the same as the effect of claim 1 at the time of filing. By combining fluorine having a high intensity with hydrogen fluoride, corrosion below the anode nozzle 14 can be reduced.

The decomposition method according to claim 5 at the time of filing is the same as the effect of claim 2 at the time of filing. In addition, by supplying water or steam 6 together with the alternative CFC 31, the compound generated by the decomposition of the alternative CFC is generated. By combining fluorine having a high intensity with hydrogen fluoride, corrosion below the anode nozzle 14 can be reduced.

The decomposition method according to claim 6 at the time of filing provides the effect of claim 3 at the time of filing. By combining fluorine having a high intensity with hydrogen fluoride, corrosion below the anode nozzle 14 can be reduced.

The decomposition method according to claim 7 at the time of filing has the same effects as the following second invention. (A) By lowering the temperature of the gas heated at a high temperature of the plasma jet 3j to a temperature suitable for the oxidation reaction, the generation of carbon C can be reduced, and the carbon C deposited on the reaction nozzle 15 can be reduced. . (B) Reaction nozzle 15 for supplying carbon monoxide oxidizing gas 8
By lowering the temperature of the gas passing therethrough, the O-ring attached to the reaction nozzle 15 reduces burnout, so that the labor for replacement maintenance work is reduced and the operation rate of the apparatus is improved. (C) Carbon monoxide oxidizing gas 8 from below reaction nozzle 15
Is supplied, the structure of the reaction nozzle 15 is simplified, and in particular, the cost of the reaction nozzle 15 as a consumable is reduced. (D) Unlike the method for decomposing CFCs of the first invention, there is no need to prepare reaction nozzles as two types of consumables, one for CFCs and the other for CFCs.

The decomposition method according to claim 8 at the time of filing is the same as the effect of claim 7 at the time of filing, except that the anode nozzle 14 for forming the pole of the plasma arc 3a and the alternative CFC 31 are decomposed by the plasma jet 3j. Since the nozzle 15 and the nozzle 15 are separated, they can be replaced separately according to the degree of wear of both nozzles.

The disassembly method according to claim 9 at the time of filing applies the effect of the pole P of the plasma arc 3a in addition to the effect of claim 7 at the time of filing.
Is separated from the reaction nozzle 15 for decomposing and reacting the alternative chlorofluorocarbon 31 with the plasma jet 3j, so that the two can be replaced separately according to the degree of wear of both nozzles. Since the alternative Freon 31 is supplied from the anode, the decomposed carbon does not adhere to the anode nozzle 14 and does not corrode with fluorine, and a material having good conductivity, for example, copper, must be used. The consumption of the nozzle 14 can be further reduced.

The disassembling method of claim 10 at the time of filing is based on claim 1 at the time of filing, claim 2 at the time of filing, or claim 3 at the time of filing.
Or claim 4 at the time of filing, claim 5 at the time of filing, claim 6 at the time of filing, claim 7 at the time of filing, or claim 8 at the time of filing
Alternatively, in addition to the effects of claim 9 at the time of filing, when a gas containing oxygen is used for the plasma gas 1 and the plasma jet forming gas 4 required for generating the plasma arc 3a, a large amount of the decomposition reaction of the alternative chlorofluorocarbon is performed. Since it can be shared with the required oxygen, the number of gas cylinders can be reduced by one.

The disassembling method of claim 11 at the time of filing is based on claim 1 at the time of filing, claim 2 at the time of filing, or claim 3 at the time of filing.
Or claim 4 at the time of filing, claim 5 at the time of filing, claim 6 at the time of filing, claim 7 at the time of filing, or claim 8 at the time of filing
Alternatively, in addition to the effects of claim 9 at the time of filing, the running cost can be reduced because the plasma jet forming gas 4 is supplied by compressed air containing oxygen necessary for the decomposition reaction of the alternative chlorofluorocarbon.

The disassembly method of claim 12 at the time of filing is based on claim 1 at the time of filing, claim 2 at the time of filing, or claim 3 at the time of filing.
Or claim 4 at the time of filing, claim 5 at the time of filing, claim 6 at the time of filing, claim 7 at the time of filing, or claim 8 at the time of filing
Alternatively, in addition to the effects of claim 9 at the time of filing, the plasma gas 1 required for generating the plasma arc 3a is supplied by compressed air, so that one type of gas cylinder can be reduced, and the running cost can be further reduced. Can be.

The disassembling method of claim 13 at the time of filing is based on claim 1 at the time of filing, claim 2 at the time of filing, or claim 3 at the time of filing.
Or claim 4 at the time of filing, claim 5 at the time of filing, claim 6 at the time of filing, claim 7 at the time of filing, or claim 8 at the time of filing
Or, in addition to the respective effects of claim 9 at the time of filing, it is possible to further reduce the consumption of the electrode 12 and the plasma confining nozzle 13 that are more difficult to replace than the reaction nozzle 15 or 32.

The disassembling method of claim 14 at the time of filing is based on claim 1 at the time of filing, claim 2 at the time of filing, or claim 3 at the time of filing.
Or claim 4 at the time of filing, claim 5 at the time of filing, claim 6 at the time of filing, claim 7 at the time of filing, or claim 8 at the time of filing
Or, in addition to the respective effects of claim 9 at the time of filing, it is possible to reduce the consumption of the electrode 12 and the plasma restraining nozzle 13, which are more difficult to replace than the reaction nozzle 15 or 32,
Further, the running cost can be lower than that of argon gas.

The disassembling method of claim 15 at the time of filing is based on claim 2 at the time of filing, claim 3 at the time of filing, or claim 5 at the time of filing.
Alternatively, in addition to the effects of claim 6 at the time of filing, claim 8 at the time of filing, or claim 9 at the time of filing, a highly conductive material is used for the anode nozzle 14 where the pole P of the plasma arc 3a is generated. Corrosion-resistant substances can be used for the reaction nozzles 15 or 32 where the chlorofluorocarbons are decomposed and corrosive gas is generated, so that the consumption of both nozzles can be reduced.

The disassembling method of claim 16 at the time of filing is based on claim 2 at the time of filing, claim 3 at the time of filing, or claim 5 at the time of filing.
Alternatively, in addition to the effects of claim 6 at the time of filing, claim 8 at the time of filing, or claim 9 at the time of filing, the reaction nozzle 15
Or only the alternative CFC 31 or a mixture of the alternative CFC 31 and water or water vapor 6 to be injected from the injection hole penetrated from above into the center from the upper part of the nozzle 32 sufficiently contacts the plasma jet 3j to promote the decomposition reaction. Can be.

The decomposition method of claim 17 at the time of filing applies the effect of any one of claims 7 to 9 at the time of filing, in addition to the effect of monoxide supplied from below the reaction nozzle 15. A part of carbon oxidizing gas 8 is supplied to gas supply flange 51.
To prevent the inflow of corrosive gas such as carbon monoxide, fluorine, chlorine and the like flowing backward through the gap between the gas supply flange 51 and the combustion tube 40, thereby preventing the reaction nozzle 15 from flowing. In addition, corrosion below the gas supply flange 51 can be prevented.

The disassembling apparatus of claim 18 at the time of filing is an apparatus for implementing the plasma arc decomposition method of claim 3 at the time of filing or claim 6 at the time of filing. It has the same effect as item 6.

The disassembling apparatus of claim 19 at the time of filing has the same effect as the apparatus for carrying out claim 18 at the time of filing. Therefore, both the anode nozzle 14 and the reaction nozzle 32 can be easily exchanged.

The disassembling apparatus of claim 20 at the time of filing is an apparatus for performing the plasma arc decomposition method of claim 9 at the time of filing, and has the same effect as claim 9 at the time of filing.

The disassembling apparatus according to claim 21 at the time of filing has the same effect as the apparatus for implementing claim 20 at the time of filing. Therefore, both the anode nozzle 14 and the reaction nozzle 15 can be easily exchanged.

The disassembly apparatus according to claim 22 at the time of filing reduces maintenance work by using a corrosion-resistant material such as stainless steel for the cooling bracket 16 that is not easily detached and replaced from the plasma arc disassembly apparatus 30 or 50. be able to.

The decomposition apparatus according to claim 23 at the time of filing of the application provides maintenance by using, for the reaction nozzle 15 or 32, an inconel-based metal, hastelloy-inconel-based metal, hastelloy, or a corrosion-resistant material whose inner surface is coated with gold or platinum. Work can be reduced.

The disassembling apparatus according to claim 24 at the time of filing provides the effect of claim 20 at the time of filing or claim 21 at the time of filing.
A portion of the carbon monoxide oxidizing gas 8 supplied from below the reaction nozzle 15 is supplied from between the gas supply flange 51 and the combustion tube 40 and flows back through the gap between the gas supply flange 51 and the combustion tube 40. Corrosive gas such as carbon monoxide, fluorine, and chlorine can be prevented from flowing in, and corrosion below the reaction nozzle 15 and the gas supply flange 51 can be prevented.

[Brief description of the drawings]

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a principle diagram of an alternative chlorofluorocarbon decomposition and detoxification method for decomposing and harming alternative fluorocarbons to be applied to the “plasma arc decomposition method of alternative fluorocarbons” of the present invention.

FIG. 2 is a diagram showing a “plasma torch 10A” and a plasma torch 10 in a “plasma arc decomposition apparatus 10” for performing the plasma arc decomposition method for chlorofluorocarbon of the prior application.
FIG. 3 is an explanatory diagram of a plasma decomposition method showing “plasma power supply device 20” that supplies power to A.

FIG. 3 is a diagram showing a “plasma arc decomposition apparatus 3” that implements the method for decomposing CFCs according to the first invention.
“0”, “plasma torch 10A” and “plasma power supply device 20” for supplying power to the plasma torch 10A
FIG. 4 is an explanatory view of a plasma decomposition method showing

FIG. 4 is a swirl introduction hole 15h of the reaction nozzle of FIG. 3;
It is a perspective view of a part, and an "E" sectional view.

FIG. 5 is a diagram showing an embodiment of a configuration of a plasma decomposition apparatus 30 for performing the method for decomposing CFCs according to the first invention.

FIG. 6 is a partial cross-sectional view of a connection configuration of a plasma torch 10A, an anode nozzle 14, and a reaction nozzle 32 in the configuration of the plasma decomposition apparatus 30 of FIG.

7 is a partial cross-sectional view showing a state in which maintenance and inspection are facilitated in a structure in which the plasma decomposition device 30 and the combustion tube 40 of FIG. 5 are connected by a hinge structure.

FIG. 8 is a diagram showing a “plasma arc decomposition apparatus 5” for carrying out the method for decomposing CFCs according to the second invention.
“0”, “plasma torch 10A” and “plasma power supply device 20” for supplying power to the plasma torch 10A
FIG. 4 is an explanatory view of a plasma decomposition method showing

FIG. 9 is a swirl input hole 15h of the reaction nozzle of FIG. 8;
It is a perspective view of a part, and an "E" sectional view.

FIG. 10 is a partial cross-sectional view of a connection configuration of a plasma torch 10A, an anode nozzle 14, and a reaction nozzle 15 in the configuration of the plasma decomposition apparatus 50 of FIG.

FIG. 11 is a diagram showing an embodiment of a configuration of a plasma decomposition apparatus 50 for performing the method for decomposing CFCs according to the second invention.

12 is a partial cross-sectional view showing a state in which maintenance and inspection are facilitated in a structure in which the plasma decomposition device 50 and the combustion tube 40 of FIG. 11 are connected by a hinge structure.

[Explanation of symbols]

1 Plasma gas 3a Plasma arc 3j Plasma jet 4 Plasma jet forming gas (compressed air for forming plasma jet) 5 Freon (used in the prior invention) 6 water or steam 7 oxidizing gas of carbon atoms (for example, compressed air for oxidizing carbon atoms) 8 oxidizing gas of carbon monoxide (for example, compressed air for oxidizing carbon monoxide) 10 ... (for chlorofluorocarbon of the prior application) Plasma arc decomposition apparatus 10A Plasma torch 11 Electrode support 12 Electrode (negative electrode) 13 Plasma restricted nozzle 13h Plasma restricted nozzle 13h Hole 13d: Diameter of through hole of plasma confining nozzle 14: Anode nozzle (positive electrode) 14d: Portion of through hole of anode nozzle through which plasma jet passes Diameter 14h A through-hole of the anode nozzle 14k A length of a portion of the through-hole of the anode nozzle at which a pole of a plasma arc is formed 15 ... A reaction nozzle 15d of the prior art and the second invention 15d ... Alternative) Diameter of the swirl input hole of Freon and water or steam 15e ... Diameter of through hole above (alternate) swirl charging part of reaction nozzle 15f ... Length 15g Diameter of the part where the plasma jet in the through-hole of the reaction nozzle decomposes and reacts with (replacement) Freon 15h ... Recirculation (replacement) Freon of the reaction nozzle and water or steam swirl input hole 15j ... Through-hole 15k at the portion where plasma jet and (substitute) Freon decompose and react 15k... Decomposition reaction between plasma jet and (substitute) Freon through-hole of reaction nozzle Length of the part to be rotated 15θ: Horizontal angle of rotation of the swirl injection hole to swirl into the reaction nozzle 15 °: Vertical angle of swirl of (replacement) Freon of the reaction nozzle and water or steam 16: Cooling bracket 16a Cooling bracket cooling water inlet fitting 16b Cooling bracket cooling water outlet fitting 17 Plasma torch support 18a Plasma jet forming gas (compressed air for forming plasma jet) supply port 18b Replacement Freon and water or Water vapor supply port 18c: Carbon atom oxidizing gas (compressed air for carbon atom oxidation) supply port 18d: Carbon monoxide oxidizing gas (compressed air for carbon monoxide oxidation) supply port 20: Plasma arc power supply device 20t Arc current supply minus terminal 21 Plasma arc current output circuit 22 Start current limiting element 23 ... Start current supply switch element 23t... Start current supply plus terminal 24t... Arc current supply plus terminal 24... Plasma arc current supply switch element 25... Torch detachable handle 26. 30 plasma arc decomposition apparatus (for alternative CFC of the first invention) 31 alternative CFC (for use in the invention) 32 reaction nozzle 32d of the first invention 32d of compressed air of the reaction nozzle Diameter of swirl injection hole 32g ... Diameter of part where carbon atoms in substitute CFC in through-hole of reaction nozzle are oxidized 32h ... Swirl injection hole of compressed air of reaction nozzle 32j ... Carbon atom in alternative CFC of reaction nozzle The length of the through hole 32j of the reaction nozzle 33k is a portion of the reaction nozzle where the oxygen is oxidized. (Compressed air) 34 Reaction nozzle support flange 35 Hinge for opening / closing 38d Carbon dioxide gas (compressed air for carbon dioxide gas) supply port 40 Combustion cylinder 50 (second invention) Plasma Frequencies Decomposition Device 51... Gas Supply Flange 51 c Carbon Oxide Oxidation Gas Supply Passage 51 p Purging Gas Passage 51 m Gas Supply Flange Input Hole 51 n Gas Supply Flange Input hole diameter

 ──────────────────────────────────────────────────続 き Continuing on the front page (71) Applicant 599076147 Kazuomi Kusumoto 1-385-4 Umeda-cho, Kiryu-shi, Gunma (72) Inventor Shinichi Kuroda 2--14 Hirai-cho, Kiryu-shi, Gunma (72) Inventor Kusumoto 1-385-4 Umeda-cho, Kiryu-shi, Gunma (72) Inventor Yasuo Doi 3-43, Shirite, Tsurumi-ku, Yokohama-shi Inside Shin-Meiwa Auto Engineering Co., Ltd. (72) Kohei Yoneda Shirite, Tsurumi-ku, Yokohama-shi 3-Chome 2-43 Shin Meiwa Auto Engineering Co., Ltd. (72) Inventor Jun Okubo 2-1-1-11 Tagawa, Yodogawa-ku, Osaka-shi Daihen Corporation (72) Inventor Fumihiko Nakatani 2-chome, Tagawa, Yodogawa-ku, Osaka-shi No. 1-11 F-term in Daihen Corporation (reference) 2E191 BA12 BD11 BD18 4G075 AA03 BA05 CA47 DA01 EB21 EB41 EC01

Claims (24)

[Claims] In a method for decomposing and replacing CFCs by a plasma arc, a plasma confining nozzle having a through-hole having a diameter through which a plasma arc passes is disposed on an outer periphery of an electrode, and a plasma confining nozzle is provided on an outer periphery of the plasma confining nozzle. An anode nozzle having a through hole having a diameter that allows the gas forming the plasma jet to pass therethrough and a length that forms the pole of the plasma arc is provided, and the plasma gas is supplied between the electrode and the plasma confining nozzle. A plasma arc is generated between the electrode and the pole of the anode nozzle, and a gas that forms a plasma jet having an arc voltage higher than that of argon gas is supplied from above the outer periphery of the plasma confining nozzle, and alternative Freon is supplied from below the anode nozzle. Supply and substitute CFCs to decompose using a plasma jet. Therefore, carbon monoxide or carbon atoms generated and not yet converted into carbon dioxide gas are oxidized by the gas heated at a high temperature of the plasma jet with the carbon dioxide gas supplied from the middle of the first reaction nozzle to generate carbon dioxide gas. Arc decomposition method of CFC alternative. 2. A method for decomposing a CFC substitute using a plasma arc, wherein a plasma confinement nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on an outer periphery of the electrode. An anode nozzle having a through hole with a diameter that allows the gas that forms the plasma jet to pass from the bottom and a length that forms the pole of the plasma arc is arranged, and the gas and alternative Freon that form the plasma jet below the anode nozzle A first reaction nozzle having a through-hole having a diameter and a length through which a gas flows is supplied, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the extreme point of the anode nozzle. And a plasma having an arc voltage higher than that of argon gas from above the outer periphery of the plasma restraining nozzle. Supplying gas to form a jet,
An alternative chlorofluorocarbon is supplied from below the anode nozzle to above the first reaction nozzle to cause a decomposition reaction of the substitution chlorofluorocarbon by a plasma jet, and carbon monoxide or carbon dioxide which has not been converted into carbon dioxide gas by the decomposition reaction. A plasma arc decomposition method of CFC alternative, in which carbon atoms are oxidized by a gas heated at a high temperature of a plasma jet with a carbonized gas supplied from the middle of a first reaction nozzle to form carbon dioxide gas. 3. A method for decomposing a CFC substitute using a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on an outer periphery of the electrode. An anode nozzle having a through hole with a diameter that allows the gas that forms the plasma jet to pass from the bottom and a length that forms the pole of the plasma arc is arranged, and the gas and alternative Freon that form the plasma jet below the anode nozzle A first reaction nozzle having a through-hole having a diameter and a length through which a gas flows is supplied, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the extreme point of the anode nozzle. And a plasma having an arc voltage higher than that of argon gas from above the outer periphery of the plasma restraining nozzle. Supplying gas to form a jet,
An alternative Freon is supplied from an input hole penetrated in the center direction above the first reaction nozzle, and the alternative Freon is decomposed by a plasma jet, and carbon monoxide which has not yet been formed into carbon dioxide gas by the decomposition reaction is supplied. Alternatively, there is provided a plasma arc decomposition method of CFC alternative, in which carbon atoms are oxidized by a gas heated at a high temperature of a plasma jet with a carbonized gas supplied from the middle of a first reaction nozzle to form carbon dioxide gas. 4. A method for decomposing a CFC substitute by a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on an outer periphery of the electrode. An anode nozzle having a through hole having a diameter that allows the gas forming the plasma jet to pass therethrough and a length that forms the pole of the plasma arc is provided, and the plasma gas is supplied between the electrode and the plasma confining nozzle. A plasma arc is generated between the electrode and the pole of the anode nozzle, and a gas that forms a plasma jet having a higher arc voltage than the argon gas is supplied from above the outer periphery of the plasma confining nozzle, and from the bottom of the anode nozzle together with alternative Freon. Water or steam is supplied to decompose the alternative CFCs using a plasma jet. The carbon monoxide or carbon atoms generated by the decomposition reaction and not yet converted into carbon dioxide gas are oxidized with the carbon dioxide gas supplied from the middle of the first reaction nozzle by the gas heated at a high temperature of the plasma jet. A plasma arc decomposition method of alternative chlorofluorocarbon which is reacted to produce carbon dioxide gas. 5. A method for decomposing a CFC substitute by a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on an outer periphery of the electrode. An anode nozzle having a through hole with a diameter that allows the gas that forms the plasma jet to pass from the bottom and a length that forms the pole of the plasma arc is arranged, and the gas and alternative Freon that form the plasma jet below the anode nozzle A first reaction nozzle having a through-hole having a diameter and a length through which a gas flows is supplied, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the extreme point of the anode nozzle. And a plasma having an arc voltage higher than that of argon gas from above the outer periphery of the plasma restraining nozzle. Supplying gas to form a jet,
Water or steam is supplied together with the alternative Freon from the lower part of the anode nozzle to the upper part of the first reaction nozzle to cause the alternative Freon to undergo a decomposition reaction by a plasma jet, and has not yet been formed into carbon dioxide by the decomposition reaction. A plasma arc decomposition method of CFC alternative, in which carbon monoxide or carbon atoms are oxidized by a gas heated at a high temperature of a plasma jet with a carbon dioxide gas supplied from the middle of a first reaction nozzle to produce carbon dioxide gas. 6. A method for decomposing a CFC substitute using a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on an outer periphery of the electrode. An anode nozzle having a through hole with a diameter that allows the gas that forms the plasma jet to pass from the bottom and a length that forms the pole of the plasma arc is arranged, and the gas and alternative Freon that form the plasma jet below the anode nozzle A first reaction nozzle having a through-hole having a diameter and a length through which a gas flows is supplied, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the extreme point of the anode nozzle. And a plasma having an arc voltage higher than that of argon gas from above the outer periphery of the plasma restraining nozzle. Supplying gas to form a jet,
Water or water vapor is supplied together with the alternative fluorocarbon from an input hole penetrated in the center direction above the first reaction nozzle to cause a decomposition reaction of the alternative fluorocarbon by a plasma jet, and is generated as a result of this decomposition reaction and is still carbon dioxide. A plasma arc decomposition method of CFC alternative, in which carbon monoxide or carbon atoms are converted to carbon dioxide by oxidizing carbon monoxide or carbon atoms with a carbon dioxide gas supplied from the middle of a first reaction nozzle by a gas heated at a high temperature of a plasma jet. 7. A method for decomposing a CFC substitute using a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on an outer periphery of the electrode, and a perimeter of the plasma confining nozzle is provided. An anode nozzle having a through hole having a diameter that allows the gas forming the plasma jet to pass therethrough and a length that forms the pole of the plasma arc is provided, and the plasma gas is supplied between the electrode and the plasma confining nozzle. A plasma arc is generated between the electrode and the pole of the anode nozzle, and a gas that forms a plasma jet having a higher arc voltage than the argon gas is supplied from above the outer periphery of the plasma confining nozzle, and from the bottom of the anode nozzle together with alternative Freon. Decomposes alternative Freon by plasma jet by supplying water or steam The carbon monoxide or carbon atoms that have not yet been converted into carbon dioxide gas generated by the decomposition reaction reach the lower part of the second reaction nozzle and the temperature decreases. A plasma arc decomposition method of CFC alternative which is oxidized with carbon monoxide oxidizing gas containing oxygen supplied from below the reaction nozzle to form carbon dioxide gas. 8. A method for decomposing a CFC substitute by a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc is passed is provided on the outer periphery of the electrode, and the outer periphery of the plasma confining nozzle is provided. An anode nozzle having a through hole with a diameter that allows the gas that forms the plasma jet to pass from the bottom and a length that forms the pole of the plasma arc is arranged, and the gas and alternative Freon that form the plasma jet below the anode nozzle A second reaction nozzle having a through-hole having a diameter and a length through which a gas passes is provided, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the extreme point of the anode nozzle. And a plasma having an arc voltage higher than that of argon gas from above the outer periphery of the plasma restraining nozzle. Supplying gas to form a jet,
Water or steam is supplied together with the alternative chlorofluorocarbon between the lower part of the anode nozzle and the upper part of the second reaction nozzle to cause a decomposition reaction of the alternative chlorofluorocarbon by a plasma jet. The carbon oxide or carbon atoms reach below the second reaction nozzle and the temperature is lowered, and the carbon monoxide having this lowered temperature is converted into a carbon monoxide oxidizing gas containing oxygen supplied from below the second reaction nozzle. Arc decomposition method of alternative chlorofluorocarbon which is oxidized to carbon dioxide by oxidation reaction. 9. A method for decomposing a CFC substitute using a plasma arc, wherein a plasma confining nozzle having a through-hole having a diameter through which the plasma arc is passed is provided on the outer periphery of the electrode, and the outer periphery of the plasma confining nozzle is provided. An anode nozzle having a through hole with a diameter that allows the gas that forms the plasma jet to pass from the bottom and a length that forms the pole of the plasma arc is arranged, and the gas and alternative Freon that form the plasma jet below the anode nozzle A second reaction nozzle having a through-hole having a diameter and a length through which a gas passes is provided, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the extreme point of the anode nozzle. And a plasma having an arc voltage higher than that of argon gas from above the outer periphery of the plasma restraining nozzle. Supplying gas to form a jet,
Water or water vapor is supplied together with the alternative chlorofluorocarbon through an input hole penetrated in the center direction above the second reaction nozzle to cause the alternative fluorocarbon to undergo a decomposition reaction with a razma jet, and has not yet been converted into carbon dioxide gas generated by the decomposition reaction. The carbon monoxide or carbon atoms reach below the second reaction nozzle and decrease in temperature, and the lowered carbon monoxide is oxidized with carbon monoxide oxidizing gas supplied from below the second reaction nozzle. A plasma arc decomposition method of alternative chlorofluorocarbon which is reacted to produce carbon dioxide gas. 10. A gas for forming a plasma jet having an arc voltage higher than that of argon gas and a plasma gas supplied between an electrode and the plasma confining nozzle are gases containing oxygen. The method of claim 3 or claim 4 or claim 5 or claim 5 or claim 6 or claim 7 or claim 8 or claim 9. 11. A gas forming a plasma jet having a higher arc voltage than an argon gas is compressed air, wherein the gas is compressed air. The method of claim 7 or claim 8 or claim 9 for decomposing a CFC by a plasma arc. 12. The plasma gas supplied between the electrode and the plasma confining nozzle is compressed air, and the compressed gas is compressed air. The method of claim 7 or claim 8 or claim 9 for decomposing a CFC by a plasma arc. 13. The plasma gas supplied between the electrode and the plasma confining nozzle is an argon gas.
10. The method for plasma arc decomposition of alternative CFCs according to claim 6, claim 7, claim 8, claim 8, or claim 9. 14. The plasma gas supplied between the electrode and the plasma confining nozzle is a nitrogen gas, a nitrogen gas, or a nitrogen gas. The method of claim 7 or claim 8 or claim 9 for decomposing a CFC by a plasma arc. 15. The material of the anode nozzle is a highly conductive material, and the material of the reaction nozzle is a corrosion-resistant material. 3. A method for decomposing a CFC using a plasma arc as described in 1. 16. The method according to claim 2, wherein only the alternative Freon or a mixture of the alternative Freon and water or steam is injected into the plasma jet while being swirled through an injection hole penetrated from above the reaction nozzle in the center direction. The method of claim 3, claim 5, claim 6, claim 8, or claim 9, wherein the method is a plasma arc decomposition method of alternative CFCs. 17. A part of the carbon monoxide oxidizing gas supplied from below the second reaction nozzle is supplied from between the gas supply flange and the combustion cylinder, and is supplied from a gap between the gas supply flange and the combustion cylinder. 9. The method according to claim 7, wherein a corrosive gas such as carbon monoxide, fluorine and chlorine flowing backward is prevented from flowing.
Alternatively, the method for decomposing a CFC alternative plasma arc according to claim 9. 18. A plasma arc decomposition apparatus for a CFC substitute, in which a CFC substitute is decomposed by a plasma arc, comprising: a plasma confining nozzle having a through-hole having a diameter through which a plasma arc passes and disposed on an outer periphery of an electrode; An anode nozzle having a through-hole having a diameter that allows the gas to be formed to pass and a length that forms a pole of the plasma arc and disposed from the outer periphery of the plasma confining nozzle to the bottom, and a gas and alternative Freon that form a plasma jet. A first reaction nozzle having a through-hole having a diameter and a length to be passed and disposed below the anode nozzle, and supplying a plasma gas between the electrode and the plasma restraining nozzle to supply the plasma between the electrode and the anode nozzle. A plasma arc is generated between the poles, and the arc voltage is higher than the argon gas from above the outer periphery of the plasma restraining nozzle. Is supplied by supplying a gas that forms a high plasma jet, and supplying only the alternative Freon or the alternative Freon and water or water vapor from an input hole penetrated in the center direction above the first reaction nozzle to supply the alternative Freon with a plasma jet. Carbon dioxide gas or carbon atoms generated by the decomposition reaction and not yet converted into carbon dioxide gas are supplied from the middle of the first reaction nozzle by a gas heated at a high temperature of a plasma jet. Arc decomposer for chlorofluorocarbon instead of oxidizing and carbon dioxide. 19. A plasma arc decomposition apparatus for alternative CFCs, which decomposes and substitutes CFCs using a plasma arc, comprising: a plasma restraining nozzle having a through-hole having a diameter through which a plasma arc passes and disposed on the outer periphery of an electrode; An anode nozzle having a through-hole having a diameter that allows the gas to be formed to pass and a length that forms the pole of the plasma arc and disposed from the outer periphery of the plasma confining nozzle to the bottom, and a gas and alternative Freon that form the plasma jet. A plasma torch having a first reaction nozzle having a through hole having a diameter and a length to be passed and disposed below the anode nozzle, to a cooling bracket for cooling the first reaction nozzle by a plasma torch support. Attach, attach the torch detachable handle to the plasma torch support,
A structure in which the anode nozzle and the first reaction nozzle are attached and detached by the torch attachment / detachment handle, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the pole of the anode nozzle And supplying a gas forming a plasma jet having a higher arc voltage than the argon gas from above the outer periphery of the plasma confining nozzle,
Only the alternative Freon or the alternative Freon and water or steam are supplied from the input hole penetrated in the center direction above the reaction nozzle to cause the alternative Freon to decompose and react with the plasma jet,
The carbon monoxide or carbon atoms, which have not been converted into carbon dioxide gas by the decomposition reaction, are oxidized by the gas heated at a high temperature of the plasma jet with the carbon dioxide gas supplied from the middle of the first reaction nozzle. Plasma arc decomposition equipment for carbon dioxide instead of carbon dioxide. 20. A plasma arc decomposition apparatus for a CFC substitute, wherein the CFC substitute is decomposed by a plasma arc. The plasma confinement nozzle having a through-hole having a diameter through which the plasma arc passes is disposed on the outer periphery of the electrode. An anode nozzle having a through-hole having a diameter that allows the gas to be formed to pass and a length that forms the pole of the plasma arc and disposed from the outer periphery of the plasma confining nozzle to the bottom, and a gas and alternative Freon that form the plasma jet. A second reaction nozzle having a through-hole having a diameter and a length to be passed and disposed below the anode nozzle, and supplying a plasma gas between the electrode and the plasma restraining nozzle to supply the plasma between the electrode and the anode nozzle. A plasma arc is generated between the poles, and the arc voltage is higher than the argon gas from above the outer periphery of the plasma restraining nozzle. Is supplied by supplying a gas forming a high plasma jet, and supplying only the alternative fluorocarbon or the alternative fluorocarbon and water or water vapor from an input hole penetrated in the center direction above the second reaction nozzle to convert the fluorocarbon alternative with the plasma jet. A carbon monoxide or carbon atom which has not yet been converted into carbon dioxide gas generated by the decomposition reaction
The temperature of the carbon monoxide which has reached the lower part of the reaction nozzle of Example 2 is lowered, and the reduced carbon monoxide is oxidized with the carbon monoxide oxidizing gas supplied from below the second reaction nozzle to produce carbon dioxide gas. Plasma arc decomposition equipment. 21. A plasma arc decomposition apparatus for alternative CFCs, which decomposes and substitutes CFCs using a plasma arc, comprising: a plasma restraining nozzle having a through-hole having a diameter through which a plasma arc passes and disposed around the electrode; An anode nozzle having a through-hole having a diameter that allows the gas to be formed to pass and a length that forms the pole of the plasma arc and disposed from the outer periphery of the plasma confining nozzle to the bottom, and a gas and alternative Freon that form the plasma jet. A plasma torch having a through-hole having a diameter and a length to be passed and having a second reaction nozzle disposed below the anode nozzle, by a plasma torch support to a cooling bracket for cooling the second reaction nozzle. Attach, attach the torch detachable handle to the plasma torch support,
A structure in which the anode nozzle and the second reaction nozzle are attached and detached by the torch attachment / detachment handle, and a plasma gas is supplied between the electrode and the plasma restraining nozzle to generate a plasma arc between the electrode and the pole of the anode nozzle And supplying a gas that forms a plasma jet having a higher arc voltage than the argon gas from above the outer periphery of the plasma confining nozzle,
Only the alternative Freon or the alternative Freon and water or steam are supplied from the input hole penetrated in the center direction above the reaction nozzle to cause the alternative Freon to decompose and react with the plasma jet,
The carbon monoxide or carbon atoms that have not yet been converted into carbon dioxide gas generated by this decomposition reaction reach the lower part of the second reaction nozzle and the temperature is reduced, and the carbon monoxide whose temperature has been reduced is subjected to the second reaction. This is a plasma arc decomposition device for CFC alternative, which is oxidized with carbon monoxide oxidizing gas supplied from below the nozzle to produce carbon dioxide gas. 22. A cooling bracket made of a corrosion-resistant material such as stainless steel, Inconel metal, Hastelloy, or the like.
3. An apparatus for decomposing a plasma arc of chlorofluorocarbons. 23. The reaction nozzle according to claim 18, 19, or 20, wherein an inconel-based metal, Hastelloy, or a corrosion-resistant material coated with gold or platinum on the inner surface is used.
22. The apparatus for decomposing a CFC alternative according to claim 21. 24. A part of the carbon monoxide oxidizing gas supplied from below the second reaction nozzle is supplied from between the gas supply flange and the combustion cylinder, and is supplied from the gap between the gas supply flange and the combustion cylinder. 9. The method according to claim 7, wherein a corrosive gas such as carbon monoxide, fluorine and chlorine flowing backward is prevented from flowing.
Or a plasma arc decomposition device for CFC substitute according to claim 9.