JP2000323548A - Vacuum processing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vacuum processing system which can realize reduction of facility cost of a transportation section for transferring an object to be processed and reduction in its footprint. SOLUTION: A vacuum processing system 10 includes vacuum processing chambers 112a and 112b for applying a prescribed processing to an LCD glass substrate (hereinafter referred to as the substrate 130, a transfer chamber 116 connected to the vacuum processing chambers via gate valves GB and having a transfer arm 114 for feeding the substrate into the vacuum chambers of feeding out it therefrom, a preliminary evacuation chamber 118 connected to the transfer chamber via the gate valves, and a transfer section 120 for sequentially transferring a plurality of substrates. In this case, the transfer section has a hoisting and lowering mechanism 124, which moves the substrate in the vertical direction at its prescribed position to feed it into a vacuum processing chamber or feed out it therefrom. In this system, substrate supply and reception can be realized, without the need for providing an atmospheric robot between the transfer section and vacuum processing chamber 110.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a vacuum processing system.

[0002]

2. Description of the Related Art In a processing system for an object to be processed such as an LCD glass substrate, a transfer system for the object to be processed is arranged in a line, and a plurality of processing apparatuses such as a coating / developing apparatus and an etching apparatus are provided for the transfer system. There is something to juxtapose. As one form of a transport system in such a processing object processing system, an AGV (automatic guided) that walks between a cassette containing a plurality of processing objects and a processing apparatus.
vehicle (automated guided vehicle).

[0003]

By the way, the transfer of an object to be processed by the AGV involves problems such as difficulty in processing a plurality of objects to be processed and dust generation. Therefore, as a means for solving the problem, a transfer system provided with a transfer means of the object to be processed such as a conveyor and an atmospheric robot for transferring the object to be processed between the conveyor and the processing apparatus is used. However, in such a transfer system, it is necessary to provide an atmospheric robot in addition to the conveyor, which causes another problem that it is not preferable in terms of equipment cost and footprint.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems and other problems of a conventional vacuum processing apparatus, and an object of the present invention is to reduce equipment costs of a transfer system for transferring an object to be processed. Another object of the present invention is to provide a new and improved vacuum processing system capable of reducing a footprint.

[0005]

According to a first aspect of the present invention, at least one vacuum processing chamber for performing a predetermined process on an object to be processed and a gate valve are connected to the vacuum processing chamber via a gate valve. A transfer chamber connected to the vacuum processing chamber, the transfer chamber having a transfer arm for loading / unloading the object to and from the vacuum processing chamber; a vacuum preparatory chamber connected to the transfer chamber via a gate valve;
In a vacuum processing system comprising a transfer system for sequentially transferring a plurality of workpieces, the transport system moves the workpieces vertically and / or horizontally at a predetermined position, and Provided with a moving mechanism for carrying in / out of the vacuum processing system.

According to such a vacuum processing system, since the transfer system is provided with a moving mechanism for the object to be processed, the means for transferring the object to be processed, for example, an atmospheric robot, is provided between the transport system and the apparatus for processing the object to be processed. At least, it is possible to exchange a workpiece between the transport system of the workpiece and the processing apparatus. Further, as will be described later, since this moving means can be manufactured structurally at a lower cost than an atmospheric robot, it has an excellent effect of reducing equipment costs.

[0007] As an example of the structure of the moving mechanism, the moving mechanism may be provided in a conveying path of a conveying system. According to such a configuration, a space for disposing the moving means is not required, so that an excellent effect of reducing the footprint can be obtained.

As another example of the structure of the moving mechanism,
As described in the third aspect, it may be provided at a retreat position with respect to the transport path of the transport system. According to this configuration, the processing of the object to be processed can be performed at a position evacuated with respect to the transport path. Therefore, even if one object is being processed, the transport of another object to be processed along the transport path is possible. This has the effect of not hindering.

The moving mechanism may constitute a part of the pre-vacuum chamber when evacuating the pre-vacuum chamber. According to such a vacuum processing system, the system configuration can be simplified,
It is also effective in shortening the processing time.

The object to be processed is transported while being mounted on the mounting table, and is loaded / unloaded into the vacuum preparatory chamber while being mounted on the mounting table. You may do so. According to such a configuration, it is possible to carry out the transfer of the object to be processed and the carry-in / out of the vacuum preliminary chamber in a stable state. Further, in this case, if the mounting table constitutes a part of the vacuum preparatory chamber when the vacuum preparatory chamber is evacuated, the system configuration can be simplified and the processing time can be reduced. It is preferable because it exhibits excellent effects.

Further, the moving mechanism may have a support pin which penetrates the mounting table and supports the object to be processed. According to this configuration, the object to be processed mounted on the mounting table can be easily removed from the mounting table, and an excellent effect of reducing the processing time can be obtained.

Further, the mounting table may include an information tag for identifying information on the mounted object to be processed. According to such a vacuum processing system, the control of the transport system can be easily performed using the information tag, and the efficiency of the processing can be improved.

[0013]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
Preferred embodiments of the vacuum processing system according to the present invention will be described in detail. In this specification and the drawings, components having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted.

(First Embodiment) The overall configuration of a vacuum processing system 100 according to the present embodiment will be described with reference to FIG. The vacuum processing system 100 is a system that performs processing on an LCD glass substrate as an example of an object to be processed. As shown in FIG.
And a transport system 120 for sequentially transporting the CD glass substrates.

As shown in FIG. 1, the vacuum processing apparatus 110 includes two vacuum processing chambers 112a and 112b for performing predetermined processing on an LCD glass substrate, and two vacuum processing chambers 112a and 112b.
2b via the gate valve GB, and the LCD glass substrate 130 is loaded into the vacuum processing chambers 112a and 112b.
It mainly comprises a transfer chamber 116 having a transfer arm 114 for unloading, and a vacuum preparatory chamber 118 connected to the transfer chamber 116 via a gate valve GB. The number of vacuum processing chambers is not limited to two, and can be appropriately designed according to the type of processing, system scale, and the like. In addition, the support supporting the vacuum processing apparatus 110 includes:
Although a board ID reading unit 119 is provided,
This will be described later.

A transport system 120 for sequentially transporting a plurality of LCD glass substrates includes a rail 122 as an example of a transport means capable of transporting the LCD glass substrate 130 in a horizontal direction, and a rail 1.
It mainly comprises an elevating mechanism 124 as an example of a moving means for moving the LCD glass substrate 130 conveyed by 22 at a predetermined position in the vertical direction. The LCD glass substrate 130 is conveyed while being mounted on a tray (mounting table) 126 provided with wheels 127 for moving on the rail 122.

As described above, the LCD glass substrate 130
Is transported while being placed on a tray 126 provided with wheels 127 for moving on rails 122. The tray 126 constitutes a part of the vacuum preliminary chamber 118 by being sandwiched by the elevating mechanism 124 when the vacuum preliminary chamber 118 is evacuated as described later. As described above, the tray 126 is provided with the vacuum preliminary chamber 118 and the elevating mechanism 12.
4 so as to form a vacuum state in a state sandwiched between them.

The LCD glass substrate 130 placed on the tray 126 is pressed upward by pressing the LCD glass substrate 130 upward.
A through-hole 135 is formed through which a lifter pin P for facilitating the detachment is easily inserted. LCD glass substrate 1
The loading of the LCD glass substrate 13 on the tray 126 is performed.
Any method may be used as long as the transfer of 0 can be performed in a stable state. For example, on the surface of the tray 126, L
It has substantially the same shape as the CD glass substrate 130,
A storage surface formed one step lower than the upper surface of the tray 126 may be provided, and the LCD glass substrate 130 may be placed so as to fit into the storage surface.

The tray 126 is provided with the mounted LC.
An information tag for identifying information on the D glass substrate 130 is provided. There are various information tags, for example,
A substrate ID determined for each LCD glass substrate can be assigned. Then, a support for supporting the vacuum processing apparatus 110 has a substrate ID for reading the substrate ID.
A reading unit 119 is provided. The board ID reading unit 119 is provided on the tray 122 on which the LCD glass substrate 130 conveyed on the rail 122 is placed.
Is recognized until it reaches immediately below the pre-vacuum chamber 118.

(Elevation Mechanism 124) Immediately below the vacuum preparatory chamber 119, the elevation mechanism 124 disposed below the rail 122 is configured to move the transported LCD glass substrate 130 up and down. Above the elevating mechanism 124, a lower lid 124a that forms a part of the pre-vacuum chamber 118 during processing is provided. On the upper surface of the lower cover 124a, a lifter pin P for pressing the LCD glass substrate 130 placed through the tray 126 upward to facilitate the removal of the LCD glass substrate 130, and one of the vacuum spare chambers 118 A seal member (O-ring) O is provided for improving airtightness when forming the part.

Normally, in a vacuum processing system using a rail or a conveyor as the object transfer system, means for exchanging the object between the object transfer system and the vacuum processing apparatus, for example, an atmospheric robot However, the vacuum processing system 100 according to the present embodiment differs from the conventional system in that such an atmospheric robot is not required. The elevating mechanism 124 provided in place of the atmospheric robot can be constituted by, for example, a cylinder, and can be manufactured structurally at a lower cost than the atmospheric robot, so that it has an excellent effect of reducing equipment costs.

Next, the operation of the vacuum processing system 100 having the above configuration will be described with reference to FIGS.
The board ID reading unit 119 reads the board ID given to the tray 126 in which the LCD glass substrate 130 conveyed on the rail 122 is stored. Then, the board ID reading unit 119
When recognizing the substrate ID of the LCD glass substrate 130 for which a processing request has been made, the control unit (not shown) sends the LCD
The presence of the glass substrate 130 is transmitted.

By the board ID reading unit 119,
When the existence of the LCD glass substrate 130 to be processed is recognized, the operation of loading the LCD glass substrate 130 into the vacuum processing apparatus 110 by the elevating mechanism 124 is started according to the following steps. The operation of loading / unloading the LCD glass substrate 130 into / from the vacuum processing apparatus 110 by the lifting mechanism 124 will be described below with reference to FIG.

(1) LCD glass substrate 130 for processing
Is transported to just above the elevating mechanism 124 of the vacuum processing apparatus 110, the tray 12 is controlled by a control unit (not shown).
The sixth wheel 127 stops driving, and the tray 126 stops immediately below the vacuum processing chamber 118 and immediately above the elevating mechanism 124. (2) Next, the tray 126 on which the LCD glass substrate 130 to be processed is placed is pressed upward by the lifting mechanism 124. As a result, the tray 126 rises toward the pre-vacuum chamber 118 with the LCD glass substrate 130 placed thereon. (3) Further, the tray 130 continues to rise, and the elevating mechanism 12
(4) The tray 126 is sandwiched between the lower lid 124a of the upper part and the vacuum preparatory chamber 118 so as to be airtightly integrated. (4) When the LCD glass substrate 130 is carried into the pre-vacuum chamber 118, the inside of the pre-vacuum chamber 118 is evacuated to a vacuum. (5) The LCD glass substrate 130 is pressed upward by the lifter pins P. The transfer arm 11 is positioned between the LCD glass substrate 130 pressed upward and the upper surface of the tray 126.
The LCD glass substrate 130 is removed from the tray 126 by inserting the mounting portion 114 a of No. 4. (6) Next, the LCD glass substrate 130 is transferred from the pre-vacuum chamber 118 to the transfer chamber 116 by the transfer arm 114. (7) When the gate valve GV connecting the vacuum preparatory chamber 118 and the transfer chamber 116 is closed, the LCD glass substrate 130 is subjected to a predetermined vacuum processing in the vacuum processing chambers 112a and 112b. You. (8) The LCD glass substrate 130 that has completed the predetermined processing is
It is placed on the tray 126 that has been kept in the vacuum preliminary chamber 118 by the transfer arm 114. Next, the pre-vacuum chamber 118 is opened to the atmospheric pressure. At this time, the lifting mechanism 124
Supports the tray 126 upward to prevent the lower lid 124a from falling from the pre-vacuum chamber 118. (9) Next, the elevating mechanism 124 lowers the tray 126 on which the processed LCD glass substrate 130 is placed. Thus, the tray 126 is placed on the rail 122. Then, under the control of a control unit (not shown), the wheels 127 of the tray 126 resume driving, and the rails 122
Conveyed above.

As described above, according to the present embodiment, since the LCD glass substrate 130 is loaded / unloaded into / from the vacuum preparatory chamber 118 of the vacuum processing apparatus 110 by the lifting / lowering mechanism 124, an atmospheric robot is provided. The LCD glass substrate 130 can be exchanged between the vacuum processing apparatus 110 and the transfer system 120 without the need. The lifting mechanism 124 can be manufactured at a lower cost than an atmospheric robot in terms of structure, and can be disposed below the rail 122, so that the equipment cost is reduced and the footprint is reduced. To play.

Further, when the lifting / lowering mechanism 124 carries the LCD glass substrate 130 into the vacuum preparatory chamber 118, the bottom of the vacuum preparatory chamber 118 is formed integrally with the vacuum preparatory chamber 118, so that the system configuration is simplified. It is also effective in shortening the processing time.

Further, the LCD glass substrate 130 is
The vacuum processing apparatus 110 is provided with a substrate ID reading device 119 so that the substrate is loaded on a tray 126 provided with a substrate ID for recognizing the type. Can be easily controlled, and processing efficiency can be improved.

(Second Embodiment) The overall configuration of a vacuum processing system 200 according to the present embodiment will be described with reference to FIG. The vacuum processing system 200 is a system for processing an LCD glass substrate as an example of the object to be processed, and as shown in FIG.
And a transport system 220 for sequentially transporting the CD glass substrates.

As shown in FIG. 3, the vacuum processing apparatus 210 includes two vacuum processing chambers 212a and 212b for performing predetermined processing on the LCD glass substrate, and two vacuum processing chambers 212a and 212b.
2b via a gate valve GB, and the LCD glass substrate 230 is loaded into the vacuum processing chambers 212a and 212b.
It mainly comprises a transfer chamber 216 having a transfer arm 214 for unloading, and a vacuum preparatory chamber 218 connected to the transfer chamber 216 via a gate valve GB. A support for supporting the vacuum processing device 210 is provided with a substrate ID reading unit 219. These vacuum processing devices 2
10 are substantially the same as the components of the vacuum processing apparatus 110 according to the first embodiment, and a detailed description thereof will be omitted.

The transport system 220 for transporting the plurality of LCD glass substrates 230 includes a rail 222 as an example of a transport means capable of transporting the LCD glass substrate 230 in the horizontal direction, and a predetermined position of the LCD glass substrate 230 transported by the rail 222. Horizontal movement mechanism 225 for moving in the horizontal direction at
And L moved horizontally by the horizontal movement mechanism 225.
It mainly comprises a lifting mechanism 224 for moving the CD glass substrate 230 in the vertical direction. The LCD glass substrate 230 has wheels 227 for moving on rails 222.
Are placed and transported on a tray (mounting table) 226 provided with.

The transfer chamber 216 and the pre-vacuum chamber 218 of the vacuum processing apparatus 210 are arranged in parallel with the rail 222, and the LCD glass substrate 230 to be processed is moved to a position retracted from the rail 222 by the horizontal moving mechanism 225. It is moved directly below the vacuum preparatory chamber 218 provided. That is,
In the present embodiment, the tray 226 on which the LCD glass substrate 230 to be processed is placed is mounted on the horizontal moving mechanism 22.
5 is moved in the horizontal direction, and is carried into the pre-vacuum chamber 218 at the retracted position with respect to the rail 222.

As described above, the LCD glass substrate 230
Is mounted on a tray 226 provided with wheels 227 for moving on rails 222 and transported. Tray 2
As will be described later, when the LCD glass substrate 230 is carried into the pre-vacuum chamber 218, it becomes a part of the pre-vacuum chamber 218 and is airtightly connected. Note that the configuration of the tray 226 is substantially the same as the tray 126 according to the first embodiment, and thus a detailed description thereof will be omitted.

The tray 226 has the L
An information tag for identifying information on the CD glass substrate 230 is provided. As an example of the information tag, a substrate ID determined for each LCD glass substrate is given as in the first embodiment. And the vacuum processing device 21
The column supporting the “0” is provided with a board ID reading unit 219 for reading the board ID.
The board ID reading unit 219 functions so that the tray 226 on which the LCD glass substrate 230 conveyed on the rail 222 is placed before reaching the horizontal position of the horizontal moving mechanism 225.

(Horizontal Moving Mechanism 225) Horizontal Moving Mechanism 22
Reference numeral 5 is configured to move the transported LCD glass substrate 230 in the horizontal direction, that is, in the direction of the vacuum preparatory chamber 218. The horizontal moving mechanism 225 is a rail 2
The tray 226 on the rail 22 is moved in the horizontal direction along with a part of the rail 222.

Further, the horizontal moving mechanism 225 is
2 is provided with a spare rail 222 'for supplementing the part after it has moved to the retreat position. After a part of the rail 222 moves in the horizontal direction, the spare rail 2
22 ′ is incorporated into the portion to form one LC
While the D glass substrate is being processed, other LCD glass substrates can move on the rails. Further, according to such a configuration, the horizontal movement mechanism 225 can be used as a buffer for temporarily storing the LCD glass substrate, and the variation in processing time between the LCD glass substrates can be reduced.

(Elevating mechanism 224) Immediately below the pre-vacuum chamber 218, the elevating mechanism 224 disposed below the rail 222 moves the LCD glass substrate 230 conveyed to the retreat position by the horizontal moving mechanism 225 up and down. Is configured. The configuration of the lifting mechanism 224 is substantially the same as that of the lifting mechanism 124 according to the first embodiment, and a detailed description thereof will be omitted.

As described above, the vacuum processing system 200 according to the present embodiment having the above-described configuration does not require an atmospheric robot required in a normal vacuum processing system. This is common to the vacuum processing system 100. Further, the vacuum processing system 200 according to the present embodiment is characterized in that a tray can be transported to a retreat position in addition to a normal transport path using the rails 222.

Next, the operation of the vacuum processing system 200 having the above configuration will be described with reference to FIG. The board ID reading unit 219 reads the board ID assigned to the tray 226 in which the LCD glass substrate 230 conveyed on the rail 222 is stored. Then, when recognizing the substrate ID of the LCD glass substrate 230 for which a processing request has been made, the presence thereof is transmitted to a control unit (not shown).

By the board ID reading unit 219,
When the presence of the LCD glass substrate 230 to be processed is recognized, the LC
The operation of loading the D glass substrate 230 into the vacuum processing device 210 is started. In the following, LC by the horizontal movement mechanism 225
The operation of loading the D glass substrate 230 into the vacuum processing device 210 will be described.

(1) LCD glass substrate 230 for processing
Is transported to the side of the horizontal moving unit 224, the wheels 227 of the tray 226 stop driving under the control of a control unit (not shown), and the tray 226 stops just beside the vertical moving unit 224. (2) Next, the tray 226 on which the LCD glass substrate 230 to be processed is placed is moved in the horizontal direction by the horizontal moving mechanism 225. As a result, the tray 226 becomes L
Vacuum spare chamber 118 with CD glass substrate 230 mounted
Move in the direction of. (3) Further, the tray 230 continues to move, and is conveyed directly below the pre-vacuum chamber 218 as shown in FIG. At this time, a spare rail 222 'is connected to a part of the rail which is lost by the horizontal moving mechanism 225, so that another LCD glass substrate can continue to be transported as usual. (4) Tray 22 conveyed immediately below vacuum preparatory chamber 218
6 is pressed upward by the lifting mechanism 215. As a result, the tray 226 rises toward the pre-vacuum chamber 218 with the LCD glass substrate placed thereon. (5) The loading of the tray 226 into the pre-vacuum chamber 218, the predetermined processing in the vacuum processing device 210, and the unloading of the tray 226 from the vacuum processing device 210 are substantially the same as those in the first embodiment. The same is true.

As described above, according to the present embodiment, the horizontal movement mechanism 225 and the lifting mechanism 224
Since the D glass substrate 230 is configured to be carried in / out of the vacuum preparatory chamber 218 of the vacuum processing apparatus 210, the vacuum processing apparatus 210 and the transfer system 220 can be installed without an atmospheric robot.
The LCD glass substrate 230 can be exchanged between the two. The horizontal movement mechanism 225 and the lifting mechanism 2
The structure 24 can be manufactured at a lower cost than an atmospheric robot, and therefore has an excellent effect of reducing equipment costs.

Further, since the processing of the LCD glass substrate 230 can be performed at a position retracted with respect to the rail 222, the transfer of another LCD glass substrate on the rail 222 can be performed even during the processing of one LCD glass substrate. This has the effect of not hindering.

Further, when the elevating mechanism 224 carries the LCD glass substrate 230 into the vacuum preparatory chamber 218, the bottom surface of the vacuum preparatory chamber 218 is formed integrally with the vacuum preparatory chamber 218, so that the system configuration is simplified. It is also effective in shortening the processing time.

Further, the LCD glass substrate 230 is
The vacuum processing apparatus 210 is provided with a substrate ID reading device 219 while being placed on a tray 226 to which a substrate ID for recognizing the type is attached. Can be easily controlled, and processing efficiency can be improved.

Although the preferred embodiment of the vacuum processing system according to the present invention has been described with reference to the accompanying drawings, the present invention is not limited to such an example. It is clear that a person skilled in the art can conceive various changes or modifications within the scope of the technical idea described in the claims, and those modifications naturally fall within the technical scope of the present invention. It is understood to belong.

For example, in the above-described embodiment, an example has been described in which a rail is used as a means for transporting an object to be processed, but the present invention is not limited to this. For example,
A plurality of rotating rollers may be juxtaposed at a predetermined interval, and a conveyor configured to support the object to be processed from below and convey the object in the horizontal direction by the rotation of the rotating rollers may be used as the conveying means.

Further, in the above embodiment, an example was described in which a substrate ID for recognizing the type of the object to be processed is given to the tray, but the present invention is not limited to this. For example, it is possible to perform predetermined processing for type recognition on the object to be processed itself.

Further, in the above embodiment,
Although an example has been described where the tray serving as the mounting table for the object to be processed forms a part of the bottom surface of the vacuum preparatory chamber, the present invention is not limited to this. For example, the present invention is similarly applicable to a case where the tray forms a part of the side surface of the vacuum processing chamber or a case where the tray forms a part of the side surface and the bottom surface.

[0049]

As described above, according to the present invention,
Since the object to be processed is carried in and out of the pre-vacuum chamber of the processing apparatus by the moving means, the transfer between the means for transferring the object to be processed and the processing apparatus can be performed without disposing a means for transferring the object such as an atmospheric robot. It is possible to exchange the object to be processed during the transfer.
Further, since this moving means can be manufactured at a low cost structurally and can be disposed integrally with the transport means,
It is effective in reducing equipment costs and footprint.

[Brief description of the drawings]

FIG. 1 is an explanatory view schematically showing a vacuum processing system according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram for explaining an operation of the vacuum processing system of FIG. 1;

FIG. 3 is an explanatory view schematically showing a vacuum processing system according to a second embodiment of the present invention.

[Explanation of symbols]

 100, 200 Vacuum processing system 110, 210 Vacuum processing device 112, 212 Vacuum processing chamber 114, 214 Transfer arm 116, 216 Transfer chamber 118, 218 Vacuum preparatory chamber 119, 219 Substrate ID reading unit 120, 220 Transfer system 122, 222 Rail 124,224 Elevating mechanism 124a Lower lid 126,226 Tray 127,227 Wheel 130,230 LCD glass substrate 225 Horizontal moving mechanism

Claims (8)

[Claims] At least one vacuum processing chamber for performing a predetermined process on an object to be processed; a vacuum processing chamber connected to the vacuum processing chamber via a gate valve;
In a vacuum processing system comprising: a transfer chamber having a transfer arm for unloading; a vacuum preparatory chamber connected to the transfer chamber via a gate valve; and a transfer system for sequentially transferring a plurality of workpieces: The vacuum processing system is characterized in that the system includes a moving mechanism that moves the object to be processed in a vertical direction and / or a horizontal direction at a predetermined position and carries the object into and out of the vacuum preliminary chamber. 2. The vacuum processing system according to claim 1, wherein the moving mechanism is provided in a transfer path of the transfer system. 3. The transfer mechanism according to claim 1, wherein the transfer mechanism is provided at a retract position with respect to a transfer path of the transfer system.
The vacuum processing system according to claim 1. 4. The apparatus according to claim 1, wherein the moving mechanism forms a part of the pre-vacuum chamber when evacuating the pre-vacuum chamber. Vacuum processing system. 5. The object to be processed is transported while being mounted on a mounting table, and is loaded / unloaded into and from the vacuum preparatory chamber while being mounted on the mounting table. The vacuum processing system according to claim 1, 2, 3, or 4. 6. The vacuum processing system according to claim 5, wherein the mounting table forms a part of the pre-vacuum chamber when evacuating the pre-vacuum chamber. 7. The vacuum processing system according to claim 5, wherein the moving mechanism includes a support pin that penetrates the mounting table and supports the workpiece. 8. The vacuum processing apparatus according to claim 5, wherein the mounting table is provided with an information tag for identifying information on a mounted processing object. system.