JP2000321320A - Semiconductor testing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor testing device having a light source device of high accuracy in the test of electric characteristic of a semiconductor photoelectric converting element. SOLUTION: A liquid crystal panel device 2 is mounted on or closely contacted with a semiconductor photoelectric converting element 1 with the proper distance and position. The liquid crystal panel device 2 is electrically connected to a semiconductor testing device 3 with the semiconductor photoelectric element 1. The semiconductor testing device 3 controls the liquid crystal panel device 2, determines the necessary quantity of light and wavelength, and tests the electric characteristic of the semiconductor photoelectric converting element 1 every time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor inspection device.

[0002]

2. Description of the Related Art Conventionally, in testing electrical characteristics of a semiconductor photoelectric conversion element such as a CCD or a CIS, a light source device using a combination of an incandescent lamp and an interference filter or a red / green / blue light emitting diode is used. By using light emitting devices, light having a required light quantity and wavelength is produced and irradiated to a semiconductor photoelectric conversion element to be inspected, thereby realizing an environment required for electric characteristic inspection.

[0003]

However, one of the above-mentioned methods, a light source device in which an incandescent lamp is combined with an interference filter has a problem in high-speed switching of light quantity and wavelength, and uses red, green and blue light emitting diodes. In the case of a conventional light source device, it is difficult to obtain light of a desired wavelength, and further, in any of the above-described methods, the individual photoelectric conversion elements constituting the semiconductor photoelectric conversion element are reliably and individually irradiated with a desired light amount and wavelength. It is impossible to do. Therefore, the conditions of an ideal light source device as an environment for inspecting electrical characteristics of a semiconductor photoelectric conversion element cannot be satisfied, which hinders productivity, product warranty, and improvement in added value to a product.

[0004]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention arranges, for example, a liquid crystal panel device at an appropriate distance and position or makes close contact with a semiconductor photoelectric conversion element to be subjected to an electrical characteristic test. And a light source device.

[0005]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention provides a high-speed switching of light quantity and wavelength required for an ideal light source device by using, for example, a liquid crystal panel device as a light source device in an electrical characteristic test of a semiconductor photoelectric conversion element. By using, for example, a TFT panel device capable of displaying fine dots as a liquid crystal panel device, it is ideal to reliably and individually irradiate light of a desired light quantity and wavelength to individual photoelectric conversion elements constituting a semiconductor photoelectric conversion element. To solve the above-mentioned problems,
It is possible to improve the productivity and product guarantee in the electrical characteristic inspection of the semiconductor photoelectric conversion element, and to improve the added value to the product.

An embodiment of the present invention will be described below with reference to the drawings. Liquid crystal panel device 2 to semiconductor photoelectric conversion element 1
Are placed or adhered at an appropriate distance and position. The liquid crystal panel device 2 is electrically connected to the semiconductor inspection device 3 together with the semiconductor photoelectric conversion element 1. The semiconductor inspection device 3 controls the liquid crystal panel device 2, sets the required light amount and wavelength, and performs an electrical characteristic inspection on the semiconductor photoelectric change element 1 each time.

In the above description, a liquid crystal panel device is taken as an example of a light source device. However, it is apparent that an EL panel device, a plasma display device, and a CRT device can be used in the same manner.

[0008]

According to the present invention, as described above, the liquid crystal panel device is arranged at an appropriate distance and position with respect to the semiconductor photoelectric conversion element, and is configured as a light source device which can be controlled by the semiconductor inspection device. Can realize an ideal electrical characteristics inspection environment, and can improve productivity and product assurance and increase added value to products.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a semiconductor inspection device of the present invention.

[Explanation of symbols]

 Reference Signs List 1 semiconductor photoelectric conversion element 2 liquid crystal panel device 3 semiconductor inspection device

Claims (4)

[Claims] 1. A semiconductor inspection device, wherein a liquid crystal panel device is used as a light source device in an electrical characteristic inspection of a semiconductor photoelectric conversion element. 2. A semiconductor inspection device, wherein an EL panel device is used as a light source device in an electrical characteristic inspection of a semiconductor photoelectric conversion element. 3. A semiconductor inspection device, wherein a plasma display device is used as a light source device in an electrical characteristic inspection of a semiconductor photoelectric conversion element. 4. A semiconductor inspection device, wherein a CRT device is used as a light source device in an electrical characteristic inspection of a semiconductor photoelectric conversion element.