JP2000311906A - Profiling apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a profiling apparatus capable of highly accurate profiling. SOLUTION: Compressed air is jetted between a porous material 17, constituting a part of a ball receiver 15 and a ball 22 to generate a static pressure to float the ball up from the porous material 11, thus noncontactly holding the ball 22 with the porous material 11. In this constitution, the slide resistance hardly acts between the porous material 11 and the ball 22. Thus the top end face of a vacuum holder 25 attached to the ball 22 can be made parallel to the top surface of a semiconductor chip 61, and hence high accuracy profiling can be made.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copying apparatus used for a chip mounter for transferring a diced semiconductor chip onto a lead frame of a die bonding apparatus.

[0002]

2. Description of the Related Art Conventionally, as this type of copying apparatus,
A copying ball is rotatably supported by a ball receiver having a concave curved surface. The copying ball is provided with a suction member for sucking the diced semiconductor chip.
Then, when the tip end surface of the suction member comes into contact with the surface of the semiconductor chip, the copying ball is rotated according to the parallelism of the semiconductor chip. By this rotation, the tip surface of the suction member is tilted in accordance with the parallelism of the surface of the semiconductor chip. Due to this tilt, the tip surface of the suction member becomes parallel to the surface of the semiconductor chip.

[0003]

However, in the conventional copying apparatus, the ball receiver and the copying ball are always in mechanical contact with each other. For this reason, when the copying operation is performed, there is a problem that the sliding resistance of the copying ball against the ball receiver adversely affects the copying accuracy.

[0004] The present invention has been made in view of the above problems, and an object of the present invention is to provide a copying apparatus capable of performing high-accuracy copying.

[0005]

In order to solve the above-mentioned problems, according to the first aspect of the present invention, a second member having a convex curved surface is provided for a first member having a concave curved surface. Is provided so as to be relatively rotatable, and one of the two members is brought into contact with a specific surface of the object so that the contact surface is parallel to the specific surface of the object. In the copying apparatus configured as above, the gist is that the two members are brought into non-contact by ejecting a pressurized fluid between the two members.

According to a second aspect of the present invention, in the copying apparatus according to the first aspect, the first member is made of a porous material capable of ejecting pressurized air toward a surface of the second member. The gist of the present invention is that the concave curved surface is formed on the porous material.

According to a third aspect of the present invention, in the copying apparatus according to the first or second aspect, when the copying operation of one of the two members is completed, the two members are relatively rotated. The gist of the invention is that a fixing means for immobilization is provided.

[0008] In the invention described in claim 4, claims 1 to 3 are provided.
In the copying apparatus according to any one of the above, the gist is that the contact surface is provided with three protrusions that contact a specific surface of the object.

According to a fifth aspect of the invention, in the copying apparatus according to the fourth aspect, the gist is that each of the protrusions is formed in a tapered shape. According to a sixth aspect of the present invention, in the copying apparatus according to any one of the first to fifth aspects, the contact surface is configured to attract a specific surface of the object by a suction force of a fluid. The gist is that an opening is formed, and an elastic body is protruded from the contact surface around the suction portion.

Hereinafter, the "action" of the present invention will be described. According to the first aspect of the present invention, the first member and the second member
Since the pressurized fluid is ejected between the two members, the static pressure provided by the pressurized fluid acts on the interface between the two members, and the two members are not in contact with each other. Therefore, the sliding resistance hardly acts between the two members. Therefore, one of the contact surfaces of the two members can be made parallel to the specific surface of the target object, and high-accuracy copying can be performed.

According to the second aspect of the present invention, the pressurized air is jetted to the surface of the second member through the porous material provided on the first member. At the time of this ejection, pressurized air is ejected from the entire porous material with substantially uniform pressure.
Therefore, it is possible to stabilize the non-contact state with the first and second members.

According to the third aspect of the present invention, when the copying operation is completed, the first member and the second member are fixed by the fixing means so that they cannot rotate relative to each other. For this reason, it is possible to hold the first or second member in a state of being copied.

According to the fourth aspect of the present invention, when performing copying, even if the specific surface of the object is undulating, all the projections come into contact with the object. Therefore, when one of the contact surfaces of the two members is parallel to the specific surface of the object, for example, when the object is attracted to the contact surface by an air suction force, the object moves. There is no.

According to the fifth aspect of the present invention, since each projection is point-contacted with the object, the contact area between the projection and the specific surface of the object is further reduced. Therefore, all the protrusions can be reliably brought into contact with the object.

According to the sixth aspect of the present invention, the suction portion is closely attached to the specific surface via the elastic body. Therefore, when the fluid is sucked from the suction portion, the target object can be sucked without leaking the fluid from between the contact surface and the specific surface.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings.

As shown in FIGS. 1-4, the copying apparatus 11
Indicates a die (not shown) of the diced semiconductor chip.
It is provided in a transfer section of a chip mounter (not shown) for transferring to a bonding apparatus. The copying apparatus 11 includes a container 13 having a space 13a therein. The container 13 includes a casing 14 having an inverted concave cross section, and a ball receiver 15 as a first member attached to a lower portion thereof. And, by the concave spaces formed in the casing 14 and the ball receiver 15, respectively,
The space 13a is formed.

As shown in FIG. 1, a recess 15b is formed in the ball receiver 15, and the recess 15b is provided with a porous material 17 having a concave and hemispherical curved surface on the inner peripheral surface. This porous material 17 is attached to the ball receiver 15 using an adhesive. Both upper and lower end surfaces of the porous material 17 are opened, and the diameter of the upper opening is larger than the diameter of the lower opening. In this embodiment, the first member includes the ball receiver 15 and the porous material 17.

As a material for forming the porous material 17, for example, a metal material such as sintered aluminum, sintered copper, and sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, and the like, sintered carbon, sintered ceramics, and the like can be used.

A fluid supply port 19 is formed on the right side surface of the ball receiver 15, and this port 19 is connected to a pressure supply source (not shown). The fluid supply port 19 communicates with the annular groove 20 via a passage 19a. Accordingly, when pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown) through the fluid supply port 19 and the passage 19a, the pressurized air is supplied to the outer peripheral surface of the porous material 17 through the annular groove 20. To reach. And the pressurized air is the porous material 1
7 is ejected from a curved surface formed on the inner peripheral surface.

The air supply port 1 is provided on the right side of the casing 14.
The supply port 16 is connected to a pressure source (not shown). This air supply port 16 is
The space 13a communicates with the inside of the space 13a via a. And
As described above, the pressurized air ejected from the porous material 17 is discharged outside from the relief port of the pressure reducing valve (not shown) through the space 13 a, the passage 16 a, and the air supply port 16.

As shown in FIG. 1, a support member 21 is provided at the lower end of the ball receiver 15. Ball receiver 1
5 and an upper communication hole 23 and a lower communication hole 24 extending in the vertical direction are formed in the center of the support member 21.
The axes of both communication holes 23 and 24 are coincident with each other. The space 13 a of the housing 13 is provided with two communication holes 23 and 24.
Is communicated to the outside through

In the space 13a of the housing 13, a ball 22 having a convex curved surface on its outer peripheral surface is housed, and the lower half of the ball 22 can be supported by the porous material 17. I have. Then, as described above, the porous material 17 is used.
When the static pressure generated by the pressurized air ejected from the air acts on the interface, the ball 22 floats and comes out of contact with the porous material 17. At this time, between the curved surface (surface) of the ball 22 and the curved surface (inner peripheral surface) of the porous material 17,
A gap of about several μm is formed.

A long cylindrical suction holder 25 extending along the radial direction (vertical direction) of the ball 22 is provided in a protruding manner, and the inside thereof forms an air passage 25b for evacuation. The suction holder 25 is loosely inserted into the communication holes 23 and 24, and a lower portion thereof protrudes from a lower end surface of the support member 21 to the outside. A screw part 25 a is formed on the upper part of the suction holder 25, and the screw part 25 a is screwed into a female screw part formed inside the ball 22. An air passage hole 26 is formed in the upper extension line of the threaded portion along the radial direction of the ball 22. A check valve 27 is provided in the middle of the air passage hole 26. With this check valve 27,
The air sucked upward from the outer end of the air passage hole 26,
It does not flow backward (downward to the suction holder 25). In this embodiment, a second member is constituted by the ball 22 and the suction holder 25.

As shown in FIGS. 1 to 4, a detent member 30 is fitted to the outer end of the suction holder 25, and the detent member 30 is attached by a plurality of screws 31. A flange portion 30a is formed at an upper portion of the rotation preventing member 30, and a pair of through holes 32 are formed in the flange portion 30a.

The support member 21 comprises a case section 33 and a lid section 34 attached to a lower portion thereof. Two housing portions (only one is shown in FIG. 1) 35 that are open at the lower surface are formed in the case portion 33, and the lower openings of the housing portions 35 are closed by the lid portion 34. ing.

A detent mechanism A as detent means is accommodated in each of the accommodation portions 35. Next, the detent mechanism A will be described. A piston 36 is slidably housed in the housing 35 along the up-down direction. An annular mounting groove 37 is formed on the outer peripheral surface of the piston 36,
The mounting groove 37 is provided with a piston packing 37a. The outer peripheral surface of the piston packing 37a is
5 functions as a sliding surface that slides on the inner peripheral surface.

The inner space of each of the storage portions 35 is provided in the upper chamber 3 where the pressure of the pressurized air acts due to the presence of the piston 36.
8a and a lower chamber 38b to which pressure does not act. A fluid supply port 39 is formed at an upper portion on the right side of the case 33, and the fluid supply port 39 communicates with the inside of the upper chamber 38a through a passage 39a.
Then, a fluid supply port 3 is supplied from a pressure supply source (not shown).
9. Pressurized air is supplied into the upper chamber 38a through the passage 39a. Further, a fluid discharge port 40 is formed at a lower portion on the right side of the case portion 33. The fluid discharge port 40 is connected to the lower chamber 38 through a passage 40a.
b.

On the axis of each piston 35, there is provided a movable pin 41 extending vertically. The upper end of the movable pin 41 projects upward from the upper end surface of the piston 35, and the projecting portion is connected to the piston 35 by a connector 42. The lower end of the movable pin 41
It penetrates through the lid 34 and projects outside the support member 21.

When the piston 36 is at the upper stroke end, the small diameter portion 41 a formed at the lower end of the movable pin 41 is
It is loosely inserted. When the piston 36 is at the lower stroke end, the large diameter portion 41 b of the movable pin 41 is engaged with the through hole 32 of the rotation preventing member 30. This engagement prevents the ball 22 from rotating around the axis of the suction holder 25. Note that an extremely small gap is formed between the large diameter portion 42 and the through hole 32. Therefore, the detent mechanism A of this embodiment performs simple detent.

A guide cylinder 43 facing the piston 36 is accommodated in the accommodating portion 35, and the guide cylinder 43 is attached and fixed to the upper surface of the lid 34. The movable pin 41 is slidably penetrated through the guide cylinder 43, so that the up and down movement of the movable pin 41 is guided.

A compression coil spring 44 is externally inserted into the movable pin 41. The upper end of the compression coil spring 44 is fitted in the piston 36, and the lower end is fitted in the guide cylinder 43. The piston 36 is constantly urged upward by the compression coil spring 44.

As shown in FIG. 1, a piston 50 as a movable member is housed in the space 13a of the housing 13 so as to be slidable in the vertical direction. An annular mounting groove 53 is formed on the outer peripheral surface of the piston 50.
3 is provided with a piston packing 54. The outer peripheral surface of the piston packing 54 functions as a sliding surface that slides on the inner peripheral surface of the housing 13.

The space 13a of the housing 13 is divided into an upper chamber 51a in which the pressure of pressurized air acts due to the presence of the piston 50, and a lower chamber 51b in which no pressure acts. A fluid supply port 52 is formed on the right side surface of the casing 14, and the fluid supply port 52
The upper chamber 51a is communicated with the upper chamber 51a via a. Then, pressurized air is supplied into the upper chamber 51a from a pressure supply source (not shown) via the fluid supply port 52 and the passage 52a. The air supply port 16 is connected to the passage 1.
It communicates with the lower chamber 51b via 6a.

A mounting recess 55 is formed on the lower surface of the piston 50, and a pressing ring 56 is mounted inside the mounting recess 55. The lower portion of the pressing ring 56 projects downward from the lower surface of the piston 50. The lower end surface of the pressing ring 56 is formed in an arc shape according to the outer shape of the ball 22. Therefore, when the piston 50 moves to the lower stroke end, the lower end surface of the pressing ring 56
Is pressed against the porous material 17 side. In this pressed state, the rotation of the ball 22 is fixed to the porous material 17. In addition,
In this embodiment, a fixing means is constituted by the piston 50 and the pressing ring 56. The pressing ring 56
Is made of a rubber material. This is to reduce the impact when the pressing ring 56 is pressed by the ball 22,
This is to provide a function as a buffer member.

A compression coil spring 58 is housed in the housing 13 as an elastic member whose diameter decreases upward. The lower end of the compression coil spring 58 is supported by a step 15 a formed on the inner surface of the ball receiver 15, and the upper end is externally inserted into a protruding portion of the pressing ring 56. The piston 50 is constantly urged upward by the elastic force obtained from the compression coil spring 58.

On the upper surface of the piston 50, a piston rod 59 extending vertically is projected. The outer end of the piston rod 59 passes through the upper part of the casing 14. A seal member (not shown) is provided between the piston rod 59 and the casing 14 so that air in the pressure action chamber 51 does not leak to the outside.

At the center of the piston 50 and the piston rod 59, there is formed a vacuum passage 60 extending along the axial direction thereof. The inner end of the evacuation passage 60 is opened inside the pressing ring 56, and the outer end is connected to a suction pump (not shown). Then, when air is sucked from the evacuation passage 60 in a state where the pressing ring 56 is pressed by the ball 22b, the semiconductor chip 61, which is an object, is moved through the air passage hole 26 and the air passage 25b of the suction holder 25. It can be sucked.

The semiconductor chip 61 is transported using the copying apparatus 11 configured as described above in the following manner.
That is, before sucking the semiconductor chip 61, FIG.
As shown in (a), the piston 50 is arranged at the upper stroke end. Further, the piston 36 of the rotation preventing mechanism A is disposed at the upper stroke end. In this state, when the pressurized air is supplied from the fluid supply port 19, the pressurized air is ejected from the entire curved surface of the porous material 17 toward the ball 22. The ball 22 floats from the porous material 17 due to the pressure by the ejection of the pressurized air, and the porous material 17 and the ball 22 are not in contact with each other. Therefore,
The suction holder 25 swings around the center of the ball 22 as the swing center.

As shown in FIG. 5B, the copying apparatus 11 is lowered, and the tip surface of the suction holder 25 is
1 is in contact with the upper surface. Then, as shown in FIG. 6, when the upper surface (specific surface) of the semiconductor chip 61 is inclined with respect to a reference surface, the suction holder 25 is tilted to follow the inclination angle. Thereby, the suction holder 2
The tip surface (contact surface) of the suction holder 5 is parallel to the semiconductor chip 61, and the copying operation of the suction holder 25 is completed. FIG. 6 shows the semiconductor chip 61, the porous material 17 and the ball 2 for easy understanding of the copying operation of the suction holder 25.
The gap between the two is exaggerated from the actual one.

During the copying operation, a reaction force is generated from the semiconductor chip 61 to prevent the ball 22 from floating large.
Air is supplied into a. The pressure of the pressurized air supplied from the air supply port 16 is such that the floating ball 22 does not contact the porous material 17 or the piston 50
To the extent that it does not hinder the movement. In addition,
The pressure of each part during the copying operation is as follows. That is, the pressure of the compressed air ejected from the porous material 17 is 4 kg / cm 2. 4 kg / cm2 for the piston 50 and 0.5 to 1.0 kg for the space 13a.
/ Cm2 pressure is acting.

After the copying operation is completed, the supply of the pressurized air to the fluid supply port 19 is stopped, and the pressurized air is ejected from the curved surface of the porous material 17 as shown in FIG. Stopped. Then, since the ball 22 is not lifted, it is engaged and supported by the porous material 17. At the same time, pressurized air is supplied from the fluid supply port 52 to the pressure action chamber 51. Then, the piston 50 moves from the upper stroke end to the lower stroke end against the elastic force of the compression coil spring 58. This movement causes the pressing ring 56
Is pressed against the ball 22, and the ball 22 is pressed against the curved surface of the porous material 17. Therefore, since the ball 22 is fixed so as not to rotate, the suction holder 25 is held in a state of following.

As shown in FIG. 5C, pressurized air is supplied from the fluid supply port 39 into the pressure action chamber 38. Then, each piston 36 moves from the upper stroke end to the lower stroke end against the elastic force of the compression coil spring 44. At this time, the air in the casing 14 is discharged outside through the passage 40a and the fluid discharge port 40. Then, with the movement of the piston 36, each movable pin 41 is moved downward, and each large diameter portion 41b is engaged in the through hole 32 of the rotation preventing member 30. As a result, since the rotation of the rotation preventing member 30 is regulated, the suction holder 25 does not rotate around its axis.

As shown in FIG. 6D, the pressing ring 56
Is pressed against the ball 22, the evacuation passage 60, the air passage hole 26, and the air passage 25 of the suction holder 25.
b are communicated with each other. In this state, when the air is evacuated through the passages 60, 26, and 25b, the semiconductor chip 61 is sucked to the tip end surface of the suction holder 25.
At the time of the suction, the air evacuated by the function of the check valve 27 does not flow backward to the suction holder 25 side. For this reason, the semiconductor chip 61 is surely attracted. Then, the copying apparatus 11 is lifted and transported to the substrate 62 to which the semiconductor chip 61 is adhered.

Therefore, according to this embodiment, the following effects can be obtained. (1) Porous material 17 constituting a part of ball receiver 15
By ejecting pressurized air between the ball and the ball 22,
By generating a static pressure, the ball 22 is lifted from the porous material 17 so that the porous material 17 and the ball 22 can be brought into non-contact. For this reason, the porous material 17 and the ball 22
The sliding resistance hardly acts during the period. Therefore, the tip surface of the suction holder 25 attached to the ball 22 can be made parallel to the upper surface of the semiconductor chip 61,
High-precision copying can be performed.

(2) The ball receiver 15 is provided with a porous material 17 capable of ejecting pressurized air toward the surface of the ball 22. For this reason, when the pressurized air is jetted, the pressurized air is jetted from the entire porous material 17 with a substantially uniform pressure. Therefore, since the floating of the ball 22 can be stabilized, the copying can be performed with higher accuracy. At the same time, since the pressurized air is used, a drip-proof structure may not be adopted unlike the case where a liquid is used, so that the configuration of the copying apparatus 11 can be simplified.

(3) When the copying operation is completed, the piston 50 moves from the upper stroke end to the lower stroke end, so that the pressing ring 56
Is pressed against the porous material 17. For this reason, the ball 22 can be fixed to the porous material 17 so as not to rotate relatively, and the suction holder 25 can be held in a state of being moved.

(4) The piston 50 is placed in the housing 13.
Are provided to be able to move up and down. The piston 50 is movable between a lower stroke end (pressing position) for pressing the ball 22 against the porous material 17 and an upper stroke end (pressing release position) for releasing the pressing. Therefore, despite the simple structure of reciprocating the piston 50 up and down, the rotation of the ball 22 with respect to the porous material 17 is prevented, and the suction holder 2
5 can be reliably maintained.

(5) The support member 21 has a detent mechanism A
Is provided. Therefore, after the copying operation is completed, the large-diameter portion 41b of each movable pin 41 is engaged with the through-hole 32 of the rotation preventing member 30, so that the suction holder 2
5 can be more reliably prevented from rotating around its axis.

(Second Embodiment) Next, a second embodiment of the present invention will be described focusing on parts different from the first embodiment.

In the second embodiment, as shown in FIG. 7, the piston rod 59, the vacuum passage 60, and the check valve 27 are omitted. Instead, support member 2
1, a vacuum port 7 is provided on the right side of the case 33.
0 is provided, and the port 70 communicates with the upper communication hole 23 via the passage 70a. A vent hole 71 is formed on the outer surface of the suction holder 25 at a position substantially corresponding to the passage 70a.

According to this configuration, when air is evacuated from the evacuation port 70 through the passage 70 a, the vent hole 71, and the air passage 25 b, the semiconductor chip 61 is adsorbed on the tip end surface of the suction holder 25. Therefore, in the second embodiment, substantially the same effects as in the first embodiment can be exerted. In the second embodiment, the suction holder 25 is evacuated from the right side of the case 33 of the support member 21. Thereby, since the piston rod 59 shown in the first embodiment can be omitted, a member that protrudes from the upper surface of the housing 13 can be eliminated. Therefore, the vertical dimension of the copying apparatus 11 can be reduced.

(Third Embodiment) Next, a third embodiment of the present invention will be described below. As shown in FIG. 8A, the copying apparatus 11 of this embodiment includes a moving body 80 having an inverted T-shaped cross section, and a concave portion 80a is formed on a lower surface thereof. The concave portion 80a is provided with a porous material 81 having a concave and hemispherical curved surface on the lower surface. Although a curved surface is also formed on the upper surface of the porous material 81, the “curved surface of the porous material 81” described in the following description means a surface on the lower surface of the porous material 81. The porous material 81 is attached to the moving body 80 using an adhesive. In this embodiment, the first member includes the moving body 80 and the porous material 81.

At the center of the moving body 80 and the porous material 81, a vacuum passage 82 extending vertically is formed. This vacuum passage 82 is connected to a suction pump (not shown). Port 8 is on the right side of the moving body 80
The port 83 is connected to a pressure source and a suction pump (not shown). The port 83 communicates with an annular groove 84 formed on the inner surface of the concave portion 80a of the moving body 80 via an air passage 83a. Therefore, when pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown) through the port 83 and the air passage 83a, the pressurized air is ejected from the curved surface of the porous material 81 through the annular groove 84. You. Air is supplied from a suction pump (not shown) to the port 83,
When vacuum is drawn through the air passage 83a, the porous material 8
Air near the curved surface 1 is sucked.

An oscillating body 85 as a second member having a hemispherical shape is provided below the moving body 80. A convex curved surface is formed on the upper surface of the oscillating body 85, and the radius of curvature of this curved surface is the same as the radius of curvature of the curved surface of the porous material 81. Therefore, the curved surface of the oscillating body 85 can contact the curved surface of the porous material 81.

Further, a vacuum passage 86 having an inverted T-shaped cross section is formed in the oscillating body 85. This vacuum passage 8
Numeral 6 can communicate with the vacuum passage 82 of the moving body 80. Then, in a state where the two vacuum evacuation passages 82 and 86 are communicated with each other, a magnet (object) 87 used for the voice coil motor can be attracted by suction of air by suction air (not shown).

The magnet used for the voice coil motor is transported using the copying apparatus 11 in this embodiment as follows. That is, before the magnet 87 is attracted, as shown in FIG. 8A, the port 83 is connected to the curved surface of the porous material 81 while the curved surfaces of the oscillator 85 are in contact with each other.
The air is evacuated through the air passage 83a. As a result, the oscillator 85 is adsorbed by the porous material 81. When the moving body 80 descends and approaches the magnet 87 in this state,
The suction from the air passage 83a is stopped.

Thereafter, as shown in FIG. 8B, when pressurized air is supplied from the port 83 via the air passage 83a, air is ejected from the curved surface of the porous material 81 toward the oscillator 85. You. Then, the rocking body 85 separates from the porous material 81 and is pressed against the upper surface (specific surface) of the magnet 87. At this time, since the lower surface (contact surface) of the oscillator 85 is inclined along the upper surface of the magnet 87, the lower surface of the oscillator 85 and the upper surface of the magnet 87 are parallel to each other. Note that FIG. 8 is exaggerated from the actual one in order to easily explain the copying operation described above. Incidentally, the parallelism of the upper surface of the magnet 87 is 0 to 0.2 mm.

After the copying operation is completed, as shown in FIG. 9A, the supply of the pressurized air to the air passage 83a is stopped, and the ejection of the pressurized air from the curved surface of the porous material 81 is stopped. Is done. Then, air is evacuated from the port 83 via the air passage 83, and the oscillating body 85 is adsorbed on the porous material 81. At the same time, air is evacuated from the evacuation passages 82 and 86, and the magnet 87 is attracted to the lower surface of the oscillating body 85. Due to these suctions, the curved surface of the oscillator 85 is pressed against the curved surface of the porous material 81. Therefore, the rocking body 85 is fixed in a non-rotatable manner and is maintained in a state of following. In this state, the copying apparatus 11 is raised and transported to a predetermined position.

Then, as shown in FIG.
When the sheet 7 is transported to a predetermined position, the copying apparatus 11 is lowered. Due to this lowering, the positioning concave portion 87a formed on the lower surface of the magnet 87 is engaged with the bearing 88 of the voice coil motor. In this engagement, the positioning recess 87a of the magnet 87 is not inclined with respect to the bearing 88, so that the positioning recess 87a can be securely engaged with the bearing 88. The center of the radius of curvature R of the oscillator 85 is
, The conveying distance does not differ even if the angle of the contact surface is different.

Therefore, according to this embodiment, the following effects can be obtained. (1) By evacuating the air from the port 83,
The oscillating body 85 is maintained in an imitated state. For this reason, unlike the first embodiment, the piston 50 and the compression coil spring 58 which are necessary to hold the swinging body 85 in the imitated state can be omitted. Further, the suction holder 25 shown in the first embodiment is omitted, and the magnet 87 can be directly sucked to the swinging body 85 corresponding to the ball 22 of the first embodiment by vacuum evacuation. Therefore,
The mechanical configuration of the entire copying apparatus 11 can be simplified, and the size of the copying apparatus 11 can be reduced accordingly.

(2) The air passage 83a is used not only as a passage for sending pressurized air but also as a passage for evacuating the air. Therefore, since the number of air passages can be reduced, the structure of the moving body 80 can be simplified.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described focusing on parts different from the third embodiment.

In the fourth embodiment, FIG.
As shown in (a), the porous material 81 is formed smaller than the concave portion 80a of the moving body 80. Thus, between the outer peripheral surface of the concave portion 80 a of the moving body 80 and the outer peripheral surface of the porous material 81, the suction annular groove 90 as a suction portion is formed. A vacuum port 91 is provided on the left side of the moving body 80.
Is formed, and a suction pump (not shown) is connected to the evacuation port 91. The evacuation port 91 communicates with the suction annular groove 90 via an air passage 91a. Then, a vacuum port 9 is provided from the suction pump.
1. Air is sucked through the air passage 91a. Further, in this embodiment, a suction pump is not connected to the port 83, and only a pressure supply source is connected. That is, only the pressurized air is supplied from the port 83.

At the center of the oscillating body 85, a long suction holder 92 protruding from the lower surface thereof is provided.
An air passage 92a extending in the axial direction is formed in the suction holder 92. This air passage 92a
Are connected to the vacuum passages 82 and 86. Therefore, when air is sucked from the evacuation passages 82 and 86,
The attracting force allows the magnet 87 to be attracted to the tip of the attracting holder 92.

The magnet used for the voice coil motor is transported using the copying apparatus 11 in this embodiment as follows. Before attracting the magnet 87, FIG.
As shown in FIG.
And pressurized air is ejected from the curved surface of the porous material 81 toward the center of the oscillating body 85. As a result, the oscillating body 85 is separated from the porous material 81. At the same time, the air passage 91a is
The air is sucked through this, and the inside of the suction annular groove 90 becomes negative pressure. As a result, the porous material 8
The attraction force acts on the first side, and the rocking body 85 is drawn to the moving body 80. Therefore, the oscillating body 85 is separated from the porous material 81 by the force with which the oscillating body 85 is separated from the porous material 81 and the force with which the oscillating body 85 is attracted to the porous material 81 side.
Is swingably supported in a non-contact state with respect to.

Next, as shown in FIG. 10B, when the copying apparatus 11 descends and approaches the magnet 87, the attraction member 9
The tip surface of the second abuts against the magnet 87. Then, when the upper surface of the magnet 87 is inclined, the suction holder 92 is inclined so as to follow the inclination angle. Thereby, the tip surface of the suction holder 92 is copied so as to be parallel to the magnet 87. During the copying operation, the force separating the oscillator 85 from the porous material 81 and the force at which the oscillator 85 is attracted toward the porous material 81 are always balanced.

After the copying operation is completed, as shown in FIG. 11A, the supply of the pressurized air to the port 83 is stopped, and the ejection of the pressurized air from the curved surface of the porous material 81 is stopped. You. At the same time, air is evacuated from the port 83. At this time, the evacuation of air from the evacuation port 91 is continued. Therefore, the force for separating the oscillator 85 from the porous material 81 becomes zero, and only the force for attracting the oscillator 85 to the porous material 81 side acts. Thereby, the rocking body 85 is pressed toward the porous material 81 side. Therefore, since the swinging member 85 is fixed so as not to rotate, the suction holder 92 is held in a state of following.

Further, as shown in FIG.
5 is maintained in a state of being pressed against the suction holder 92, so that the evacuation passages 82 and 86 and the air passage 92a of the suction holder 92 communicate with each other. In this state, when the air is evacuated through the passages 82, 86, and 92a, the magnet 87 is attracted to the tip end surface of the suction holder 92.
Then, as shown in FIG. 11B, when the copying apparatus 11 is moved up and the magnet 87 is transported to a predetermined position, the copying apparatus 11 is moved down. The positioning recess 87a formed on the lower surface of the magnet 87 is engaged with the bearing 88 of the voice coil motor. Further, since the center of the radius of curvature R of the oscillating body 85 is on the lower surface (contact surface) of the suction holder 92, even if the angle of the contact surface is different, the transport distance is not different.

Therefore, in this embodiment, the movable body 80 is provided with the porous material 81 from which pressurized air is jetted toward the rocking body 85. In addition, a suction annular groove 90 for sucking air is formed in a peripheral portion of the porous material 81. Therefore, by injecting the pressurized air from the porous material 81 toward the oscillating body 85 and simultaneously suctioning the pressurized air from the suction annular groove 90, an opposing force is exerted on the oscillating body 85. be able to. Then, the force for separating the oscillator 85 from the porous material 81 and the force for attracting the oscillator 85 to the porous material 81 are balanced, so that the porous material 81 and the oscillator 85 are not in contact with each other. State can be maintained. As a result, the copying accuracy can be improved. Although not shown, the porous material 81
The porous material 81 and the oscillating body 85 can be maintained in a non-contact state regardless of the orientation of the oscillating body 85 and the oscillating body 85. The abrasion powder generated when the porous material 81 and the oscillating body 85 are pressed is discharged to the outside through the suction annular groove 90 and the port 83 by the suction force of the air. Therefore, since it has a function of discharging the abrasion powder to the outside of the copying apparatus 11, a clean working environment can be maintained.

(Fifth Embodiment) The copying apparatus 11 according to the third embodiment can be applied to an apparatus in which a plurality of bumps formed on an IC chip are made parallel by turning the copying apparatus 11 upside down. However, in the fifth embodiment, the evacuation passages 82 and 86 shown in the third embodiment are omitted. Here, the term “parallel to the bumps” refers to the IC chip 94 as shown in FIG.
Means that the upper surface of each bump 95 is parallel to the lower surface of the bump. That is, as shown in FIG.
In order to make the upper surfaces of the IC chips 9 parallel, the IC chip 9
4 and put the IC chip 94 into the press jig 97 in that state.
Press with. Thereby, the upper surface of each bump 95 is leveled. The upper surface of each bump 95 is parallel to the lower surface of the IC chip 94. By the way, bump 95
Is 1 μm. In addition, FIG.
13 (b) and the inclination angle of the tip end face of the press jig 97, the inclination angle of the upper surface of the IC chip 94, and the bump 95 shown in FIG. 13 are exaggerated from the actual ones in order to make the above description easy to understand. is there.

To make the upper surfaces of the bumps 95 parallel using the copying apparatus 11 in this embodiment, the following is performed. First, before pressurizing the IC chip 94 using the press jig 97, when pressurized air is supplied from the port 83 as shown in FIG. Air is spouted toward. In this state, the distal end surface of the press jig 97 contacts the upper surface of the rocking body 85. At this time, the upper surface (abutting surface) of the oscillating body 85 is inclined along the distal end surface of the press jig 97, so that the lower surface of the oscillating body 85 and the upper surface of the oscillating body 85 are parallel to each other. Then, the supply of the pressurized air is stopped, and the press jig 97 is further moved downward. As a result, the oscillating body 85 is pressed against the porous material 81. At the same time, air is evacuated from the port 83 and the oscillator 85 is adsorbed on the porous material 81.

While maintaining the state in which the rocking member 85 is imitated as described above, the press jig 97 is temporarily separated from the upper surface of the rocking member 85. In this state, the IC chip 94 is
And a press jig 97 as shown in FIG.
Is brought closer to the rocking body 85 again. Then, the IC chip 9
4 is pressed by a press jig 97, and each bump 95 is leveled. That is, the upper surfaces of the bumps 95 are aligned along the tip surface of the press jig 97. Therefore, in this embodiment, the IC chip 94 is interposed between the tip surfaces of the press jigs 97 parallel to each other and the upper surface of the oscillator 85.
Therefore, as shown by A in FIG. 12B, the lower surface of the IC chip 94 and the upper surface of each bump 95 can be made parallel.

Further, it is necessary to change the pressing force of the press jig 97 in proportion to the length L (mm) of one side of the square IC chip 94. This is because if the pressing force of the press jig 97 against the IC chip 94 is not set to an appropriate value, the bump 9
This is because the parallelism of No. 5 cannot be set to a desired value. The length L of one side of the IC chip 94 and the IC chip 94
Is shown in a graph G1 of FIG. In the graph G1, for example, when the length L of one side of the IC chip 94 is 5 mm, it indicates that the appropriate value of the load applied to the IC chip 94 is 15 kgf.

Further, when pressing each bump 95, the rocking body 85 is also pressed by the press jig 97. However, since the oscillating body 85 has a hemispherical shape, the oscillating body 85 is displaced when a load of a predetermined value or more is applied to the oscillating body 85. The relationship between the load position a of the oscillator 85 and the load applied to the oscillator 85 is shown as a graph G2 in FIG. In the graph G2, for example, when the load position a of the rocking body 85 is 10 mm, when a pressure of about 5 kgf or more is applied to the rocking body 85, the rocking body 85
Indicates that the position shifts.

Therefore, in order to prevent the oscillating body 85 from being displaced when the bumps 95 are leveled, FIG.
It is preferable that the graphs G1 and G2 shown in FIG. 4 do not overlap, and that the graph G2 is located on the right side of the graph G1. In this embodiment, the graph G1 is compared with the graph G1 by the following five parameters.
2 can be changed. That is, the five parameters are, as shown in FIG. 15, the radius of curvature R of the oscillator 85, the pressure receiving area S of the oscillator 85 with respect to the porous material 81,
The pressure P of the air evacuated from the port 83, the friction coefficient μ between the porous material 81 and the oscillator 85, and the load position a of the oscillator 85. And these parameters R, S,
According to P, μ, and a, a conditional expression for setting the position of the graph G2 to an appropriate position, that is, a conditional expression for preventing the oscillator 85 from being displaced when leveling each bump 95, is the following expression (1) or (2). become that way.

[0077]

(Equation 1)

[0078]

(Equation 2) Therefore, in this embodiment, each parameter R, S, P,
By adjusting μ, it is possible to prevent the oscillating body 85 from being displaced when the bumps 95 are leveled.

(Sixth Embodiment) In this embodiment, the third
The description will focus on the differences from the embodiment. FIG. 16, FIG.
As shown in FIG. 7, three conical protrusions 100a, 100b, and 100c are provided on the lower surface of the oscillating body 85.
Each of the protrusions 100a to 100c is formed integrally with the rocking body 85. Each of the protrusions 100a to 100c becomes thinner toward the distal end. Also, each of the protrusions 100a to 100
c is arranged at each vertex of the virtual equilateral triangle 101 indicated by a two-dot chain line in FIG. In other words,
The projections 100a to 100c are arranged at equal intervals on an imaginary circumference centered on the evacuation passage 86 as the suction unit.

At the outer end of the evacuation passage 86, a cylindrical elastic body 102 is provided. The distal end of the elastic body 102 protrudes along a direction orthogonal to the lower surface of the rocking body 85. The projecting length of the elastic body 102 from the lower surface of the rocking body 85 is slightly longer than the projecting lengths of the projections 100a to 100c. Specifically, the protrusion length of the elastic body 102 is 0.5 mm, and each protrusion 100a to 10
The protruding length of 0c is 0.4 mm. The elastic body 102 of the present embodiment is made of nitrile rubber and has a hardness of 6.
0 °. In addition, the elastic body 102 is
It may be changed to a type or U type packing. Semiconductor chip 1
If the flatness of the suction surface of No. 03 is about 1 to 10 μm, the protrusion length of the protrusions 100 a to 100 c is set to about 10 μm,
The elastic body 102 may be omitted.

The semiconductor chip 103 as an object is transported as follows using the copying apparatus 11 according to the sixth embodiment configured as described above. Note that FIG.
Are exaggerated than the actual semiconductor chip 103 in order to easily explain the above-described copying operation.

As shown in FIG. 18, the moving body 80 is lowered while the rocking body 85 is sucked by the porous material 81 by the suction force of the air evacuated from the port 83. When the moving body 80 approaches the semiconductor chip 103, the suction of air from the air passage 83a is stopped. As a result, the protrusions 100a to 100c abut on the semiconductor chip 103. At this time, even if there is a step (about 10 to 100 μm) on the upper surface (specific surface) of the semiconductor chip 103, all the protrusions 1
00a to 100c are in contact with the semiconductor chip 103.

Thereafter, as described in the third embodiment,
Pressurized air is ejected from the curved surface of the porous material 81 toward the oscillator 85, and the lower surface (contact surface) of the oscillator 85 is inclined along the upper surface of the semiconductor chip 103. Then, the oscillator 85 follows the semiconductor chip 103 so as to be parallel to the semiconductor chip 103.

After the copying operation is completed, the air passage 83a
When the supply of pressurized air to the port 83 is stopped,
The air is evacuated through the air passage 83. Thereby, the oscillating body 85 is adsorbed on the porous material 81. At the same time, air is evacuated from the evacuation passages 82 and 86, and the semiconductor chip 103 is sucked to the oscillator 85.
At this time, the tip surface of the elastic body 102 is
3 is in close contact with the upper surface. Therefore, no air enters the vacuum passage 82 from outside the elastic body 102. Therefore, the semiconductor chip 103 can be reliably sucked, and the upper surface of the semiconductor chip 103 is
It does not leave from 0a to 100c. In this state, the copying apparatus 11 is raised and transported to a predetermined position.

Therefore, according to this embodiment, the following effects can be obtained. (1) On the lower surface of the oscillating body 85, three protrusions 100a to 100c that are in contact with the upper surface of the semiconductor chip 103 are provided. Therefore, even if there is a step on the upper surface of the semiconductor chip 103, all the protrusions 100a to 100c can be brought into contact with the semiconductor chip 103. Therefore, when the semiconductor chip 103 is sucked, the semiconductor chip 103 does not move with respect to the oscillating body 85 to be displaced. As a result, high-precision copying can be performed, and the semiconductor chip 103 can be prevented from being damaged.

(2) Since the projections 100a to 100c are formed in a conical shape with a rounded tip, the semiconductor chip 103
The protrusions 100a to 100c can be brought into point contact with three points. Therefore, the contact area of the protrusions 100a to 100c with the semiconductor chip 103 can be minimized. Therefore, all the protrusions 100a to 100c
Can be reliably brought into contact with the semiconductor chip 103.

(3) The elastic body 102 is provided in the evacuation passage 86 formed in the oscillating body 85. For this reason, when the semiconductor chip 103 is attracted to the oscillating body 85, the distal end of the vacuum passage 86 comes into close contact with the upper surface of the semiconductor chip 103 via the elastic body 102. Accordingly, when air is sucked from the vacuum passage 86, air is sucked from between the oscillator 85 and the semiconductor chip 103.
Do not get inside. Therefore, the suction force can be increased, and the semiconductor chip 103 can be reliably prevented from dropping from the lower surface of the oscillator 85. In addition, since the semiconductor chip 103 can be suctioned even with a weak suction force, the suction efficiency of the semiconductor chip 103 can be improved.
Further, since the elastic body 102 is soft,
Contacts the semiconductor chip 103, the semiconductor chip 10
3 can be prevented from being damaged.

The embodiments of the present invention may be modified as follows. -As another example of the first embodiment, the ball 22 may be changed to, for example, a hemispherical shape instead of the spherical shape. As another example of the first to fifth embodiments, the ball 22 and the oscillating body 85 may be formed in a columnar shape to eliminate the spherical surface and regulate the copying direction.

As another example of the first embodiment, in addition to driving the piston 50 by the pressure of the pressurized air, the piston 50 may be driven in the vertical direction by the rotational force of the electric motor.

As another example of the first embodiment, a porous material 17 having a spherical hollow portion inside may be provided, and the ball 22 may be accommodated in the porous material 17. Then, pressurized air is blown from the inner surface of the porous material 17 toward the surface of the ball 22 to bring the porous material 17 and the ball 22 into a non-contact state. According to this configuration, the copying accuracy can be further improved.

As another example of the first embodiment, the compression coil spring 44 for returning the piston 36 to the upper stroke end may be omitted from the detent mechanism A. Alternatively, the piston 36 may be moved to the upper stroke end by supplying pressurized air from the fluid discharge port 40.

As another example of the fourth embodiment, the up-down direction of the copying apparatus 11 is reversed, and the suction holder 9 is attached to the moving body 80.
2 may be provided so that the target object 87 is sucked to the suction holder 92 by the suction force of air.

As another example of the fourth embodiment, the porous material 81 may be formed in the same size as the concave portion 80a of the moving body 80, and the porous material 81 may be fitted in the concave portion 80a. With this configuration, when air is sucked through the vacuum port 91, the air is sucked through the porous material 81. For this reason, the suction force of the air to the oscillating body 85 becomes uniform. Therefore, the force for moving the oscillator 85 away from the porous material 81 and the force for pulling the oscillator 85 to the porous material 81 are easily balanced, and the non-contact between the porous material 81 and the oscillator 85 is improved. Condition can be stabilized.

As another example of the fourth embodiment, when performing the copying operation (the state of FIG. 10B), the copying operation may be performed in a state where the pressurized air is blown from the suction holder 92. In this case, a porous material is generally provided at the opening of the tip of the suction holder 92, or the opening of the tip of the suction holder 92 is generally formed in a throttle shape. In this way, an air film (10 to 20 μm) can be formed between the suction holder 92 and the target object 87 by pressurized air, and the copying operation is performed without bringing the suction holder 92 into contact with the target object 87. be able to. Therefore, even if the surface of the object 87 has irregularities, the suction holder 92 can be reliably and smoothly slid along the surface of the object 87. Further, since the suction holder 92 does not contact the object 87, the object 87 can be prevented from being damaged.

As another example of the sixth embodiment, the protrusion 10
The shape of 0a to 100c may be formed in a quadrangular pyramid with a rounded tip. Further, the shape of the tip of each of the protrusions 100a to 100c may be spherical instead of being tapered. If the shape makes point contact with the object and moves smoothly with respect to the surface,
The protrusions 100a to 100c may be changed to an arbitrary shape.

As another example of the sixth embodiment, the protrusion 10
0a to 100c are not vertices of the virtual equilateral triangle 101,
For example, they may be arranged at the vertices of an isosceles triangle or another irregular triangle.

As another example of the sixth embodiment, if the attraction force of the semiconductor chip 103 can be sufficiently ensured, the elastic body 102 may be omitted. Further, as shown in FIG. 19, an O-ring 104 having elasticity may be used instead of the elastic body 102. In this way, a highly versatile member can be used, so that manufacturing costs can be reduced.

Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments are listed below together with their effects. (1) In claim 3, the fixing means is provided in the first position.
And a movable member movable between a pressing position for pressing the second member and a pressing release position for releasing the pressing between the first and second members. A copying apparatus, wherein one member is pressed against the other member when moved. According to this configuration, the movable member moves from the press release position to the press position after one of the first and second members is copied. Due to this movement, one member is pressed against the other member, and both members do not relatively rotate. Therefore, the first or second member can be held in a state of being imitated despite the simple configuration.

(2) In Claim 3, the fixing means sucks air through the porous material,
A copying apparatus, wherein one of the first and second members presses the other member. According to this configuration, after one of the first and second members is copied, air is sucked through the porous material. Then, one of the two members presses the other member, and the two members do not relatively rotate. Therefore, the two members can be held in a state of being copied in spite of a simple configuration.

(3) The copying apparatus according to the above (1), wherein the movable member has an air passage for adsorbing the object by evacuation. According to this configuration, since the air passage is formed using the movable member, the configuration of the copying apparatus can be simplified.

(4) In any one of claims 1 to 3, the second member includes a sphere and a long suction holder extending along a radial direction of the sphere. The copying apparatus, wherein the portion is engaged with a first member disposed below the portion. According to this configuration, the first
By blowing up pressurized air from the member toward the sphere, the sphere can be lifted. For this reason, for example, as in the case where the first member is arranged at the top of the sphere,
There is no need to simultaneously perform the ejection of the pressurized air and the suction of the air. As a result, the configuration of the copying apparatus can be simplified.

(5) The copying apparatus according to (4), wherein the suction holder is provided with a detent means for preventing the spherical body from rotating about its axis.

(6) In the above (5), the detent means is provided on the outer peripheral surface of the suction holder and has a flange (30a) having a through hole (32), and is arranged to face the through hole of the flange. Movable pin (4
1) A copying apparatus characterized by comprising:

(7) In claim 1, the first member has a porous material through which air passes, and the concave curved surface is formed in the porous material, and air is provided on a peripheral portion of the porous material. A copying apparatus provided with a suction portion (annular groove for suction 90) for sucking in. According to this configuration, the pressurized air is ejected toward the second member via the porous material,
The second member moves away from the first member. At the same time, the second member is drawn to the first member by the air being sucked at the peripheral portion of the porous material. As described above, a predetermined gap is formed between the first and second members by balancing the force for separating the second member with the force for pulling the second member with respect to the first member. . Therefore, the copying accuracy can be further improved.

(8) Claims 2 and 3, (1) to
(7) The copying apparatus according to (7), wherein the porous material is made of a synthetic resin. According to this configuration,
The weight of the porous material can be reduced, and the porous material can be easily manufactured at low cost.

(9) Claims 2, 3 and (1) to (1)
(7) The copying apparatus according to (7), wherein the porous material is made of a lightweight metal. According to this configuration,
The weight of the porous material can be reduced, and the porous material can be easily manufactured at low cost.

(10) Claims 1-3, (1)-
In (9), the second member is provided with a suction member (suction holders 25 and 92) for sucking an object, and the suction member is provided with an air passage. A copying apparatus that performs a copying operation while blowing pressurized air through an air passage. According to this configuration,
An air film by pressurized air can be formed between the suction member and the object, and the copying operation can be performed without bringing the suction member into contact with the object.

(11) In Claim 4, the second member has the contact surface in a part thereof, and each projection is formed integrally with the second member. Copying device. With this configuration, the number of manufacturing steps for assembling each protrusion to the second member can be omitted.

(12) The copying apparatus according to (4) or (11), wherein each protrusion is arranged at a vertex of a virtual equilateral triangle temporarily provided on the contact surface. (13) The copying method according to (6), wherein the elastic body is formed in a cylindrical shape, and a protrusion length of the elastic body with respect to the contact surface is the same as a protrusion length of each of the protrusions. apparatus. According to this configuration, the elastic body is not extremely deformed on the object, so that the object can be reliably prevented from being damaged.

[0110]

As described above in detail, according to the first aspect of the present invention, the first member and the second member are kept out of contact with each other, thereby substantially eliminating the sliding resistance between the two members. Therefore, highly accurate copying can be performed.

According to the second aspect of the present invention, the pressurized air can be blown out with a uniform pressure, so that a more accurate copying can be performed. According to the invention described in claim 3, since the first and second members can be fixed to each other after the copying operation is completed, and the relative rotation of the two members can be prevented, the first or second member can be prevented. Can be held in a state of being copied.

According to the fourth aspect of the present invention, it is possible to prevent the object from being displaced from the contact surface after the copying operation is completed. According to the fifth aspect of the invention, all the protrusions can be reliably brought into contact with the object.

According to the sixth aspect of the present invention, since the attraction force of the object can be improved, the object can be reliably prevented from separating from the contact surface.

[Brief description of the drawings]

FIG. 1 is a sectional view of a copying apparatus according to a first embodiment.

FIG. 2 is a right side view of the copying apparatus.

FIG. 3 is a left side view of the copying apparatus.

FIG. 4 is a bottom view of the copying apparatus.

FIG. 5 is an operation explanatory view schematically showing a copying apparatus.

FIG. 6 is an explanatory view showing a state in which the suction holder is copied.

FIG. 7 is a sectional view of a copying apparatus according to a second embodiment.

FIG. 8 is a diagram illustrating a copying operation of the copying apparatus according to the third embodiment.

FIG. 9 is a view showing the operation of the copying apparatus following FIG. 8;

FIG. 10 is a diagram showing a copying operation of the copying apparatus according to the fourth embodiment.

FIG. 11 is a view showing the operation of the copying apparatus following FIG. 10;

FIG. 12 is a view showing the operation of the copying apparatus according to the fifth embodiment.

FIG. 13 is an explanatory diagram of an IC chip.

FIG. 14 is a graph showing a pressing force when an IC chip is pressed by a press jig.

FIG. 15 is a diagram for explaining parameters of a mathematical expression.

FIG. 16 is a sectional view of a copying apparatus according to a sixth embodiment.

FIG. 17 is a top view showing the lower surface of the oscillator.

FIG. 18 is a diagram illustrating a copying operation of the copying apparatus.

FIG. 19 is a sectional view of a copying apparatus showing another example of the sixth embodiment.

[Explanation of symbols]

15: ball receiver (first member), 17: porous material (first member), 22: ball (second member), 25: suction holder (second member), 50: piston (fixing means) ),
56: press ring (fixing means), 61: semiconductor chip (object), 80: moving body (first member), 81: porous material (first member), 85: rocking body (second member) ), 1
00a to 100c: Projection, 86: Vacuum passage (adsorption part), 102: Elastic body.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tatsuro Shimoyama 3005, Hayasaki, Kitagaiyama, Komaki, Aichi Prefecture Inside (72) Inventor Seiji Nakamura 3005, Hayasaki, Kokugaiyama, Komaki, Aichi, Japan KK F-term (reference) 5F047 FA08 FA39 FA47

Claims (6)

[Claims] 1. A first member having a concave curved surface is provided with a second member having a convex curved surface so as to be rotatable relative to the first member having a concave curved surface, and one of the two members is provided on a specific surface of an object. In a copying apparatus in which abutment surfaces are brought into contact with each other so that the abutment surface is parallel to a specific surface of the object, a pressurized fluid is jetted between the two members. Wherein the two members are brought into non-contact with each other. 2. The method according to claim 1, wherein the first member includes a porous material capable of ejecting pressurized air toward a surface of the second member, and the concave surface is formed in the porous material. The copying apparatus according to claim 1, wherein: 3. A fixing means for fixing the two members so that they cannot rotate relative to each other when the copying operation of one of the two members is completed. Or the copying apparatus according to 2. 4. The copying apparatus according to claim 1, wherein the contact surface is provided with three protrusions that contact a specific surface of the object. . 5. The copying apparatus according to claim 4, wherein each of the protrusions is formed in a tapered shape. 6. An adsorbing portion for adsorbing a specific surface of the object by a suction force of a fluid is opened in the contact surface,
The copying apparatus according to any one of claims 1 to 5, wherein an elastic body is protruded from the contact surface around the suction portion.