JP2000311814A - Manufacture of replace coupling film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To generate a replaced anisotropic magnetic field in an interface by making the lattice constant of an antiferromagnetic layer larger than that of a ferromagnetic layer, and then heat-treating, so that a crystal structure of the antiferromagnetic layer is transformed to a regular phase. SOLUTION: A 111 surface of a fixed magnetic layer 3 is preferentially oriented in a direction parallel to a film surface. In the case where an antiferromagnetic layer 4 is formed out of X-Mn alloy (where X is one or two kinds of elements out of Pt, Pd, Ir, Rh, Rn and Os), and further it is formed on the fixed magnetic layer 3, when the composition ratio of the element X of the X-Mn alloy is formed in a range of 47-57 at%, difference between the lattice constant before thermal expansion and that of the fixed magnetic layer 3 is made large. Consequently, an interface structure between the fixed magnetic layer 3 and the antiferromagnetic layer 4 is kept in a non-conforming state before thermal treatment. When a thermal treatment is performed in this state, a crystal structure of the antiferromagnetic layer 4 is transformed from a face- centered cubic lattice of disordered lattice to a regular lattice of LI0 type face- centered cubic lattice, and a replaced anisotropic magnetic field of 400 Oe (oersted) or more is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an antiferromagnetic layer and a ferromagnetic layer, wherein the ferromagnetic layer is formed by an exchange anisotropic magnetic field generated at an interface between the antiferromagnetic layer and the ferromagnetic layer. More particularly, when the antiferromagnetic layer is formed of an antiferromagnetic material containing elements X (Pt, Pd, etc.) and Mn, the magnetization direction of which is fixed in a fixed direction. The present invention relates to a method for manufacturing an exchange coupling film capable of obtaining an exchange anisotropic magnetic field.

[0002]

2. Description of the Related Art A spin valve type thin film element is a kind of a giant magnetoresistive (GMR) element utilizing a giant magnetoresistive effect, and detects a recording magnetic field from a recording medium such as a hard disk.

The spin-valve thin-film element has several advantages, such as a relatively simple structure among GMR elements and a change in resistance with a weak magnetic field.

The spin-valve thin-film element has the simplest structure and comprises an antiferromagnetic layer, a pinned magnetic layer, a non-magnetic conductive layer and a free magnetic layer.

The antiferromagnetic layer and the pinned magnetic layer are formed in contact with each other, and the magnetization direction of the pinned magnetic layer is changed by an exchange anisotropic magnetic field generated at the interface between the antiferromagnetic layer and the pinned magnetic layer. A single magnetic domain is formed in a certain direction and fixed.

[0006] The magnetization of the free magnetic layer is aligned in a direction crossing the magnetization direction of the fixed magnetic layer by the bias layers formed on both sides thereof.

The antiferromagnetic layer is made of an Fe-Mn (iron-manganese) alloy film or a Ni-Mn (nickel-manganese) alloy film, and the pinned magnetic layer and the free magnetic layer are made of Ni-F.
e (nickel-iron) alloy film, non-magnetic conductive layer Cu
(Copper) film and Co-Pt (cobalt-
A (platinum) alloy film or the like is generally used.

In this spin-valve thin film element, when the magnetization direction of the free magnetic layer changes due to a leakage magnetic field from a recording medium such as a hard disk, the electric resistance changes in relation to the fixed magnetization direction of the fixed magnetic layer. The leakage magnetic field from the recording medium is detected by the voltage change based on the change in the electric resistance value.

As described above, an Fe—Mn alloy film or a Ni—Mn alloy film is used for the antiferromagnetic layer. However, the Fe—Mn alloy film has low corrosion resistance and has an exchange anisotropic magnetic field. And the blocking temperature is as low as about 150 ° C. With a low blocking temperature,
A problem arises that the exchange anisotropic magnetic field disappears due to an increase in the element temperature during the head manufacturing process or during the operation of the head.

On the other hand, the Ni—Mn alloy film is made of Fe—
Compared with the Mn alloy film, the exchange anisotropic magnetic field is relatively large,
Moreover, the blocking temperature is as high as about 300 ° C. Therefore, it is more preferable to use a Ni—Mn alloy film than an Fe—Mn alloy film for the antiferromagnetic layer.

Further, B.I. Y. Wong, C.I. Mitsu
mata, S.M. Prakash, D .; E. FIG. Laughl
in, and T.S. Kobayashi: Journa
lof Applied Physics, vol.
79, No. 10, p. 7896-p. 7904 (199
6) reports on the interface structure between the antiferromagnetic layer and the pinned magnetic layer (NiFe alloy film) when a Ni—Mn alloy film is used as the antiferromagnetic layer.

This paper states that “NiFe and NiMn should be made so that the {111} planes are parallel to the film surface.
/ NiMn while maintaining the crystal matching state at the interface. Matching strain at the interface is mitigated by introducing a large number of twins having a plane parallel to the film plane as a twin plane. However, due to the remaining interface strain, Ni near the interface
The ordering of Mn is suppressed to a low level, and the degree of ordering is high at locations away from the interface. It is described.

The term “matching” refers to a state in which the atoms of the antiferromagnetic layer and the pinned magnetic layer at the interface correspond one-to-one with each other. This refers to a state in which atoms with the fixed magnetic layer are not in a paired positional relationship.

When an antiferromagnetic layer is formed of a NiMn alloy, a heat treatment causes an exchange anisotropic magnetic field to be generated at the interface between the NiMn alloy and the pinned magnetic layer. This causes the transformation of the NiMn alloy from the disordered lattice to the ordered lattice.

Before the heat treatment, the crystal structure of the NiMn alloy is a face-centered cubic lattice in which the arrangement order of Ni and Mn atoms is irregular (hereinafter referred to as an irregular lattice). Then, the crystal structure is transformed from a face-centered cubic lattice to a face-centered square lattice, and the atomic positions are ordered (hereinafter, referred to as a ordered lattice). Note that the ratio c / a of the lattice constants a and c of the Ni—Mn alloy film when the crystal structure completely becomes a regular lattice is 0.942.

As described above, Ni having a completely regular lattice is obtained.
Since the lattice constant ratio c / a of the Mn alloy film is relatively close to 1, the lattice distortion generated at the interface when transforming from an irregular lattice to a regular lattice is relatively small. Even if the interface structure between the film and the pinned magnetic layer is in a matched state, the heat treatment causes the NiMn alloy to transform from an irregular lattice to a regular lattice, and generate an exchange anisotropic magnetic field.

As described in the above-mentioned paper, the lattice strain at the interface is somewhat relaxed by twinning.

[0018]

SUMMARY OF THE INVENTION As described above, Ni
The Mn alloy has a relatively large exchange anisotropic magnetic field and a high blocking temperature of about 300 ° C.
Although it has excellent characteristics as compared with the eMn alloy, it cannot be said that the corrosion resistance is sufficient as in the case of the FeMn alloy.

Therefore, recently, it is excellent in corrosion resistance and N
An X-Mn alloy (X = Pt, Pd, Ir, R) using a platinum group element as an antiferromagnetic material that generates an exchange anisotropic magnetic field larger than an iMn alloy and has a high blocking temperature
h, Ru, Os) are drawing attention.

When an X-Mn alloy containing a platinum group element is used as the antiferromagnetic layer, the reproduction output can be improved as compared with the conventional one, and the exchange anisotropic anisotropy can be increased due to an increase in the element temperature during the head driving operation. The disadvantage that the directional magnetic field disappears and the reproduction characteristics are reduced is less likely to occur.

By the way, X-containing platinum group elements
When a Mn alloy is used as an antiferromagnetic layer, heat treatment after film formation must be performed in order to generate an exchange anisotropic magnetic field, as in the case where a NiMn alloy is used as an antiferromagnetic layer.

However, when an antiferromagnetic layer made of an X-Mn alloy (X is a platinum group element) is used, the crystal structure of the antiferromagnetic layer changes when the crystal structure changes from an irregular lattice to a regular lattice. Since the strain is larger than that of the NiMn alloy conventionally used as the antiferromagnetic layer,
When the interface between the antiferromagnetic layer and the ferromagnetic layer is in a matched state, as in the case of the n alloy, the crystal structure of the antiferromagnetic layer cannot be appropriately transformed from the disordered lattice to the ordered lattice, and the exchange It was found that almost no anisotropic magnetic field was generated.

The present invention has been made to solve the above-mentioned conventional problems, and when an antiferromagnetic material containing an element X (X is a platinum group element) and Mn is used as an antiferromagnetic layer, the present invention is large. The present invention relates to a method for producing an exchange coupling film capable of generating an exchange anisotropic magnetic field.

[0024]

According to the present invention, at least an element X (where X is Pt, Pd, Ir, Rh, Ru, O, O
s), a method of manufacturing an exchange-coupling film in which an antiferromagnetic layer containing Mn and an antiferromagnetic layer containing Mn is bonded to the antiferromagnetic layer. When the ferromagnetic layer is joined to the antiferromagnetic layer, the lattice constant of the antiferromagnetic layer is made larger than the lattice constant of the ferromagnetic layer, and heat treatment is performed. It is characterized in that an ordered phase is transformed into an ordered phase, and an exchange anisotropic magnetic field can be generated at an interface between both layers.

As described above, according to the present invention, when the antiferromagnetic layer is formed of the antiferromagnetic material having the platinum group element X, the lattice constant of the antiferromagnetic layer is more than that of the ferromagnetic layer. As a result, the crystal structure of the antiferromagnetic layer is easily transformed from an irregular lattice to a regular lattice, and a larger exchange anisotropic magnetic field can be obtained.

[0026] In the present invention, by the heat treatment, at least a part of the crystal structure of the antiferromagnetic layer, it is preferable that the L1 ₀ type face-centered tetragonal ordered lattice. This makes it possible to obtain a larger exchange anisotropic magnetic field.

In the present invention, the antiferromagnetic layer is preferably made of XM
Preferably, the element X is formed of an n alloy and the element X is Pt. In this case, after the heat treatment, the ratio c / a of the lattice constants a and c of the antiferromagnetic layer is set to 0.93 to 0.99. It is preferable to be within the range. Within this range, the crystal structure of the antiferromagnetic layer is likely to be transformed from an irregular lattice to a regular lattice, and a larger exchange anisotropic magnetic field can be obtained.

Further, in the present invention, the antiferromagnetic layer is
-Mn-X 'alloy (where X is Pt, Pd, Ir, R
h, Ru, or Os, which is one or more elements, and the element X ′ is Ne, Ar, Kr, Xe,
Be, B, C, N, Mg, Al, Si, P, Ti, V,
Cr, Fe, Co, Ni, Cu, Zn, Ga, Ge, Z
r, Nb, Mo, Ag, Cd, Sn, Hf, Ta, W,
One or two of Re, Au, Pb, and rare earth elements
The X-Mn-X 'alloy is an interstitial solid solution in which the element X' penetrates into the space of the spatial lattice formed by the elements X and Mn, or It is preferable that a part of the lattice points of the crystal lattice composed of X and Mn is a substitutional solid solution substituted with the element X ′.

By adding an interstitial or substitutional element X 'to the X-Mn alloy, the lattice constant of the antiferromagnetic layer is further increased, and the lattice constant of the antiferromagnetic layer and the ferromagnetic layer is increased. Since the difference can be widened, it is possible to generate a larger exchange anisotropic magnetic field. The element X of the X—Mn—X ′ alloy used as the antiferromagnetic layer
Is preferably Pt.

In the present invention, the element X 'is Ne,
Preferably, it is one or more of Ar, Kr, and Xe.

In the present invention, the composition ratio of the element X 'is at%, preferably in the range of 0.2 to 10, more preferably in the range of 0.5 to 5.

Further, in the present invention, the composition ratio X: Mn of the element X and Mn is preferably in the range of 4: 6 to 6: 4.

It has been confirmed by experiments described later that a larger exchange anisotropic magnetic field can be obtained by appropriately adjusting the composition ratio of the element X 'as described above.

Also, in the present invention, the antiferromagnetic layer is
Mn alloy (X is Pt, Pd, Ir, Rh, R
u, Os) is formed on the ferromagnetic layer by using X-M
It is preferable that the composition ratio of X of the n alloy be in the range of 47 to 57 in at%.

Further, in the present invention, the antiferromagnetic layer is
Mn-X 'alloy (where X is Pt, Pd, Ir, R
h ', Ru, Os, any one or more elements, and X' is Ne, Ar, Kr, Xe, Be,
B, C, N, Mg, Al, Si, P, Ti, V, Cr,
Fe, Co, Ni, Cu, Zn, Ga, Ge, Zr, N
b, Mo, Ag, Cd, Sn, Hf, Ta, W, Re,
Au, Pb, and one or more of the rare earth elements) on the ferromagnetic layer. At this time, the composition ratio of X + X 'in the X-Mn-X' alloy is at %
Therefore, it is preferable to be in the range of 47 to 57.

The composition ratio of X in the X-Mn alloy or the composition ratio of X + X 'in the X-Mn-X' alloy is at%.
It is more preferable to be in the range of 50 to 56.

Further, in the present invention, the antiferromagnetic layer is
Mn alloy (X is Pt, Pd, Ir, Rh, R
u, Os) is formed under the ferromagnetic layer using X-M
It is preferable that the composition ratio of X in the n-alloy be in the range of 44 to 57 at%.

Further, in the present invention, the antiferromagnetic layer is
Mn-X 'alloy (where X' is Ne, Ar, Kr, X
e, Be, B, C, N, Mg, Al, Si, P, Ti,
V, Cr, Fe, Co, Ni, Cu, Zn, Ga, G
e, Zr, Nb, Mo, Ag, Cd, Sn, Hf, T
a, W, Re, Au, Pb, and one or more of the rare earth elements), and is formed under the ferromagnetic layer. At this time, X + X of the X—Mn—X ′ alloy is used. It is preferable that the composition ratio of ′ is at% in the range of 44 to 57.

The composition ratio of X in the X-Mn alloy or the composition ratio of X + X 'in the X-Mn-X' alloy is at%.
It is more preferable to be in the range of 46 to 55.

In the present invention, the X-Mn-X 'alloy used as the antiferromagnetic layer is preferably formed by a sputtering method.

[0041]

FIG. 1 is a cross-sectional view of the structure of a single spin-valve thin film element according to a first embodiment of the present invention, as viewed from the ABS side. In FIG. 1, only the central portion of the element extending in the X direction is shown broken.

This single spin-valve type thin film element is
It is provided at the trailing side end of a floating slider provided in a hard disk device and detects a recording magnetic field of a hard disk or the like. The moving direction of the magnetic recording medium such as a hard disk is the Z direction, and the direction of the leakage magnetic field from the magnetic recording medium is the Y direction.

The bottom of FIG. 1 is formed of Ta.
The underlayer 6 is made of a nonmagnetic material such as (tantalum). On the underlayer 6, a free magnetic layer 1, a nonmagnetic conductive layer 2, a fixed magnetic layer 3, and an antiferromagnetic layer 4 are laminated. Then, a protective layer 7 such as Ta (tantalum) is formed on the antiferromagnetic layer 4.

As shown in FIG. 1, hard bias layers 5 and 5 are formed on both sides of the six layers from the underlayer 6 to the protective layer 7, and a conductive layer is formed on the hard bias layers 5 and 5. 8, 8 are stacked.

In the present invention, the free magnetic layer 1 and the pinned magnetic layer 3 are made of a NiFe alloy, a CoFe alloy, a Co alloy,
It is formed of Co, CoNiFe alloy or the like.

Although the free magnetic layer 1 is formed as a single layer as shown in FIG. 1, it may be formed in a multilayer structure. That is, the free magnetic layer 1 is made of, for example, NiFe.
It may have a structure in which an alloy and a CoFe alloy are laminated, or may have a structure in which a NiFe alloy and Co are laminated.

The nonmagnetic conductive layer 2 interposed between the free magnetic layer 1 and the pinned magnetic layer 3 is made of Cu.
Further, the hard bias layers 5 and 5 are made of, for example, Co-Pt.
(Cobalt-Platinum) alloy, Co-Cr-Pt (Cobalt-Chromium-Platinum) alloy, etc., and the conductive layers 8, 8 are made of Cu (copper), W (tungsten), Cr (chromium), or the like. Is formed.

In the present invention, the antiferromagnetic layer 4 formed on the pinned magnetic layer 3 has at least the element X (X
Is one or more of Pt, Pd, Ir, Rh, Ru, and Os) and Mn.

In the present invention, the interface structure between the pinned magnetic layer 3 and the antiferromagnetic layer 4 shown in FIG.
The crystalline structure of at least part of the at the interface antiferromagnetic layer 4 has a L1 ₀ type of face-centered tetragonal lattice (hereinafter referred to as ordered lattice).

[0050] Here, the L1 ₀ type face-centered tetragonal lattice, of the six sides of the unit cell, around the X atoms four faces of sides (X =
Pt, Pd, Ir, Rh, Ru, Os) and Mn atoms occupy the corners of the unit cell and the centers of the upper and lower surfaces.

According to the present invention, the difference in crystal orientation between the fixed magnetic layer 3 and the antiferromagnetic layer 4 is that the fixed magnetic layer 3
The structure of the interface between the antiferromagnetic layer 4 and the antiferromagnetic layer 4 is preferable because it is likely to be in a mismatched state.

In the single-valve thin-film element shown in FIG. 1, since the Ta underlayer 6 is laid, the free magnetic layer 1, the nonmagnetic conductive layer 2, and the fixed magnetic layer formed on the underlayer 6 are formed. No. 3 {111} plane is preferentially oriented in a direction parallel to the film surface.

On the other hand, the {111} plane of the antiferromagnetic layer 4 formed on the fixed magnetic layer 3 is smaller than the degree of orientation of the {111} plane of the fixed magnetic layer 3, or It is non-oriented. That is, the pinned magnetic layer 3 shown in FIG.
The crystal orientation near the interface between the layer and the antiferromagnetic layer 4 is different, so that the structure at the interface tends to be in a mismatched state.

In the present invention, the interface structure between the pinned magnetic layer 3 and the antiferromagnetic layer 4 is set in a non-matching state from the stage before the heat treatment. This is because the structure is transformed from an irregular lattice (face-centered cubic lattice) to the above-described regular lattice so that an appropriate exchange anisotropic magnetic field can be obtained.

In other words, when the interface structure is in a matched state, the crystal structure of the antiferromagnetic layer 4 is unlikely to be transformed from an irregular lattice to a regular lattice even when heat treatment is performed, and therefore, the exchange anisotropic magnetic field is reduced. Is not obtained.

In the present invention, the antiferromagnetic layer 4 is made of XM
n alloy (where X is Pt, Pd, Ir, Rh, Ru,
Os is one or more of these elements)
It is formed with. In particular, in the present invention, the antiferromagnetic layer 4
Is preferably formed of a PtMn alloy.

X—Mn alloys, particularly PtMn alloys, are FeMn alloys conventionally used as antiferromagnetic layers,
It has better corrosion resistance than iMn alloy, etc., higher blocking temperature, and exchange anisotropic magnetic field (Hex)
And has excellent properties as an antiferromagnetic material.

In the present invention, the antiferromagnetic layer 4 is made of PtMn.
In the case where the antiferromagnetic layer 4 is formed of an alloy, the ratio c / a of the lattice constants a and c of the antiferromagnetic layer 4 in which at least a part of the crystal structure becomes a regular lattice after heat treatment is 0.93 to 0.93.
It is preferred that it be in the range of 0.99.

When the ratio c / a of the lattice constants a and c becomes 0.93 or less, almost all of the crystal structure of the antiferromagnetic layer 4 becomes a regular lattice. The adhesion between the layer 3 and the antiferromagnetic layer 4 is reduced, and peeling of the film occurs, which is not preferable.

When the ratio c / a of the lattice constants a and c is 0.99 or more, almost all of the crystal structure of the antiferromagnetic layer 4 becomes an irregular lattice and is fixed to the antiferromagnetic layer 4. The exchange anisotropic magnetic field generated at the interface with the magnetic layer 3 is undesirably reduced.

The antiferromagnetic layer 4 is made of an X-Mn alloy (where X is Pt, Pd, Ir, Rh, Ru, Os
Of the fixed magnetic layer 3 before the heat treatment.
According to the present invention, the composition ratio of the X-Mn alloy is set within the following numerical values in order to make the interface structure between the magnetic layer and the antiferromagnetic layer 4 in a non-matching state.

The antiferromagnetic layer 4 is formed of an X—Mn alloy (where X is one or more of Pt, Pd, Ir, Rh, Ru, and Os),
Moreover, when the antiferromagnetic layer 4 is formed on the pinned magnetic layer 3 as shown in FIG. 1, the composition ratio of the element X of the X-Mn alloy is at% and is in the range of 47 to 57. Is preferred. More preferably, the composition ratio of the element X in the X-Mn alloy is a
In t%, it is in the range of 50 to 56.

When the antiferromagnetic layer 4 is formed within the above composition ratio, the lattice constant of the antiferromagnetic layer 4 before the heat treatment, that is, at the stage when the crystal structure is an irregular lattice, and the fixed magnetic layer 3 The difference from the lattice constant can be increased, so that the interface structure between the fixed magnetic layer 3 and the antiferromagnetic layer 4 can be kept in a non-matching state before the heat treatment.

When heat treatment is performed in this state, a change in the crystal structure of the antiferromagnetic layer 4 generates an exchange anisotropic magnetic field, and as described above, the composition ratio of the element X of the X-Mn alloy. Is at% and within the range of 47 to 57, 400
It is possible to obtain an exchange anisotropic magnetic field of (Oe: Oersted) or more. When the composition ratio of the element X in the X-Mn alloy is at% and is in the range of 50 to 56, 600 (O
e) It is possible to obtain the above exchange anisotropic magnetic field.

As described above, according to the present invention, when the X-Mn alloy is used as the antiferromagnetic layer 4, by forming the composition ratio of the element X within the above range, the antiferromagnetic layer 4 before the heat treatment is formed. It is possible to maintain the interface structure between the magnetic layer and the pinned magnetic layer 3 in a non-matching state.

In the present invention, the antiferromagnetic layer 4 is formed by adding the element X 'as the third element to the X-Mn alloy.
Can be increased, and the interface structure between the antiferromagnetic layer 4 and the pinned magnetic layer 3 before the heat treatment can be brought into a non-matching state.

X-Mn obtained by adding an element X 'to an X-Mn alloy
—X ′ alloy is an interstitial solid solution in which element X ′ has penetrated into the space of a spatial lattice composed of elements X and Mn, or one of the lattice points of the crystal lattice composed of elements X and Mn. Part is a substitution type solid solution substituted by the element X ′. Here, a solid solution refers to a solid in which components are uniformly mixed over a wide composition range. In the present invention, the element X is preferably Pt.

In the present invention, the X-Mn-X 'alloy is formed by sputtering. By sputtering, the X—Mn—X ′ alloy is deposited in a non-equilibrium state,
The deposited X—Mn—X ′ alloy has an element X ′ in the film,
Penetrate into the space of the spatial lattice composed of the elements X and Mn,
Alternatively, part of the lattice points of the crystal lattice composed of the elements X and Mn is replaced with the element X ′. As described above, the element X ′ forms a solid solution in the lattice of the X—Mn alloy in an interstitial or substitutional manner, so that the lattice is expanded and the lattice constant of the antiferromagnetic layer 4 is reduced by the element X ′. It becomes larger than the case without addition.

In the present invention, various elements can be used as the element X '. However, when highly reactive halogen or O (oxygen) is used, these elements are selectively chemically bonded only to Mn. It is considered that the crystal structure of face-centered cubic cannot be maintained, which is not preferable. Specific elements X 'in the present invention are Ne, Ar, Kr, Xe, Be,
B, C, N, Mg, Al, Si, P, Ti, V, Cr,
Fe, Co, Ni, Cu, Zn, Ga, Ge, Zr, N
b, Mo, Ag, Cd, Ir, Sn, Hf, Ta, W,
Re, Au, Pb, and rare earth elements (Sc, Y and lanthanoids (La, Ce, Pr, Nd, Pm, Sm, Eu,
Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu))
Is one or more elements.

The lattice constant of the antiferromagnetic layer 4 can be increased by sputtering using any of the various elements X 'described above. If the composition ratio of the element X ′ is too large, the antiferromagnetic property is reduced, and the exchange coupling magnetic field generated at the interface with the fixed magnetic layer 3 is reduced.

In particular, in the present invention, it is preferable to use a rare gas element (one or more of Ne, Ar, Kr and Xe) of an inert gas which forms a solid solution in an interstitial form as the element X '. I have. Since the rare gas element is an inert gas, even if the rare gas element is contained in the film, it does not greatly affect the antiferromagnetic characteristics. Further, Ar or the like is conventionally used as a sputtering gas in a sputtering apparatus. It is a gas to be introduced, and Ar can easily penetrate into the film simply by appropriately adjusting the gas pressure and the energy of the sputtered particles.

When a gas-based element is used as the element X ', it is difficult to contain a large amount of the element X' in the film. Just by exchanging the exchange coupling magnetic field generated by the heat treatment,
Experiments have shown that the size can be dramatically increased.

In the present invention, the range of the composition ratio of the element X 'is set, and the preferable composition range of the element X' is:
at% is from 0.2 to 10, more preferably at%
%, From 0.5 to 5. At this time, the elements X and M
The composition ratio X: Mn with n is preferably in the range of 4: 6 to 6: 4. The composition ratio of element X 'and element X
By adjusting the composition ratio X: Mn within the above range, the lattice constant of the antiferromagnetic layer 4 at the film formation stage (before heat treatment) can be increased, and the antiferromagnetic layer can be formed by heat treatment. The exchange coupling magnetic field generated at the interface between the layer 4 and the pinned magnetic layer 3 can be increased as compared with the case where the element X 'is not contained.

Further, in the present invention, an X-Mn-X 'alloy (where X is one or more of Pt, Pd, Ir, Rh, Ru and Os, and X'
Is Ne, Ar, Kr, Xe, Be, B, C, N, M
g, Al, Si, P, Ti, V, Cr, Fe, Co, N
i, Cu, Zn, Ga, Ge, Zr, Nb, Mo, A
g, Cd, Ir, Sn, Hf, Ta, W, Re, Au,
Pb and at least one of the rare earth elements), the antiferromagnetic layer 4 is formed on the fixed magnetic layer 3 as shown in FIG. -Mn
The composition ratio of X + X 'in the -X' alloy is at%, and is 47 to 57%.
And more preferably X-
The composition ratio of X + X 'in the Mn-X' alloy is at%,
56.

By performing the heat treatment, the exchange coupling magnetic field generated at the interface between the antiferromagnetic layer 4 and the pinned magnetic layer 3 causes
The magnetization of the fixed magnetic layer 3 is fixed as a single magnetic domain in the Y direction shown in FIG. When the element X 'of the X-Mn-X' alloy used as the antiferromagnetic layer 4 is, for example, a gas element, the element X 'escapes from the film by heat treatment. The element X 'at the stage of film formation
The composition ratio of the element X 'after the heat treatment may be smaller than the composition ratio of X, or the X' may completely escape from the film, resulting in a composition of X-Mn.
If the interface structure between the pinned magnetic layer 3 and the antiferromagnetic layer 4 in the film formation stage (before the heat treatment) is in a non-matching state, the crystal structure of the antiferromagnetic layer 4 becomes It is possible to appropriately transform from a regular lattice (face-centered cubic lattice) to a regular lattice and obtain a large exchange anisotropic magnetic field.

The free magnetic layer 1 is aligned in the X direction in the figure by the hard bias layers 5 and 5 formed on both sides thereof.

In the single spin-valve thin film element shown in FIG. 1, the conductive layer 8 is replaced by the free magnetic layer 1 and the non-magnetic conductive layer 2.
When a stationary current (sense current) is applied to the fixed magnetic layer 3 and a magnetic field is applied in the Y direction from the recording medium,
The magnetization direction of the free magnetic layer 1 changes from the X direction to the Y direction. At this time, conduction electrons are scattered at the interface between the nonmagnetic conductive layer 2 and the pinned magnetic layer 3 or at the interface between the nonmagnetic conductive layer 2 and the free magnetic layer 1, and the electric resistance changes.
Therefore, the voltage changes, and a detection output can be obtained.

FIG. 2 is a sectional view showing the structure of a single spin-valve thin film element according to a second embodiment of the present invention.

As shown in FIG. 2, an underlayer 6, an antiferromagnetic layer 4, a pinned magnetic layer 3, a nonmagnetic conductive layer 2, and a free magnetic layer 1 are sequentially stacked from below.

The antiferromagnetic layer 4 shown in FIG. 2 is made of an X-Mn alloy (X
Is one or more of Pt, Pd, Ir, Rh, Ru, and Os), preferably Pt
Mn alloy or X-Mn-X 'alloy (where X' is
Ne, Ar, Kr, Xe, Be, B, C, N, Mg, A
1, Si, P, Ti, V, Cr, Fe, Co, Ni, C
u, Zn, Ga, Ge, Zr, Nb, Mo, Ag, C
d, Ir, Sn, Hf, Ta, W, Re, Au, Pb,
And one or more of rare earth elements).

The pinned magnetic layer 3, the non-magnetic conductive layer 2, and the free magnetic layer 1 are made of the material described with reference to FIG.

Also in this embodiment, the interface structure between the fixed magnetic layer 3 and the antiferromagnetic layer 4 is in a non-matching state.
The crystalline structure of at least part of the at the interface antiferromagnetic layer 4 has a L1 ₀ type of face-centered tetragonal lattice (hereinafter referred to as ordered lattice).

The {111} plane of the antiferromagnetic layer 4 formed on the Ta underlayer 6 is preferentially oriented in a direction parallel to the interface, but as shown in FIG. When the pinned magnetic layer 3 is formed on the layer 4, the degree of orientation of the pinned magnetic layer 3 with respect to the {111} plane interface direction is smaller than the degree of orientation of the antiferromagnetic layer 4 or non-oriented. Tends to be As described above, in FIG. 2, the crystal orientation of the antiferromagnetic layer 4 and the pinned magnetic layer 3 at the interface are different from each other, and therefore, the interface structure can be made more mismatched.

The antiferromagnetic layer 4 is formed of an X—Mn alloy (where X is one or more of Pt, Pd, Ir, Rh, Ru, and Os), As shown in FIG. 2, the antiferromagnetic layer 4 is
, The X-M constituting the antiferromagnetic layer 4
The composition ratio of the element X in the n-alloy is preferably at%, and is preferably in the range of 44 to 57. Within this range, 400
It is possible to obtain an exchange anisotropic magnetic field of (Oe) or more. More preferably, the composition ratio of the element X in the X-Mn alloy is a
At t%, it is in the range of 46 to 55. Within this range, an exchange anisotropic magnetic field of 600 (Oe) or more can be obtained.

As described above, the exchange anisotropic magnetic field can be increased when the composition is within the above-mentioned composition range because the lattice constant (irregular lattice) of the antiferromagnetic layer 4 before the heat treatment and the fixed magnetic layer 3 The difference with the lattice constant of
This is because the interface structure before the heat treatment can be brought into a mismatched state.

Therefore, by performing the heat treatment, the crystal structure of at least a part of the antiferromagnetic layer 4 at the interface is changed to
It is possible to transform the disordered lattice into a regular lattice required to exhibit an exchange anisotropic magnetic field.

The antiferromagnetic layer 4 is made of X--Mn--X '
Alloys (where X 'is Ne, Ar, Kr, Xe, Be,
B, C, N, Mg, Al, Si, P, Ti, V, Cr,
Fe, Co, Ni, Cu, Zn, Ga, Ge, Zr, N
b, Mo, Ag, Cd, Ir, Sn, Hf, Ta, W,
One or two of Re, Au, Pb, and rare earth elements
X-Mn
The -X 'alloy is formed by a sputtering method and becomes an interstitial solid solution in which the element X' penetrates into the space of a spatial lattice composed of the elements X and Mn, or a crystal lattice composed of the elements X and Mn. Is a substitution type solid solution in which a part of lattice points is replaced by the element X ′.

The lattice constant of the antiferromagnetic layer 4 containing the element X ′ in the film becomes larger than the lattice constant of the antiferromagnetic layer 4 not containing the element X ′, and the film formation step (before the heat treatment) In this case, the interface structure between the antiferromagnetic layer 4 and the pinned magnetic layer 3 can be kept in a non-matching state.

In the present invention, the composition ratio of the element X 'in the film is set in the range of 0.2 to 10 at at%, and the more preferable composition range is 0.5 to 5 in at%. And inside. The element X 'is formed within the above composition range, and the composition ratio X: Mn of the element X to Mn is changed to 4: 6.
If it is within the range of ６6: 4, it is possible to obtain a larger exchange coupling magnetic field.

In the present invention, as shown in FIG.
When the antiferromagnetic layer 4 formed of the Mn-X 'alloy is formed below the fixed magnetic layer 3, X + of the X-Mn-X' alloy
The composition ratio of X 'is preferably in the range of 44 to 57 in at%. More preferably, the composition ratio of X + X 'in the X-Mn-X' alloy is at% and is in the range of 46 to 55.

The magnetization of the pinned magnetic layer 3 shown in FIG.
Due to the exchange anisotropic magnetic field generated at the interface with the antiferromagnetic layer 4, the magnetic field is fixed in a single magnetic domain in the Y direction in the drawing.

As shown in FIG. 2, an exchange bias layer 9 (antiferromagnetic layer) is formed on the free magnetic layer 1 at an interval of the track width Tw.

The exchange bias layer 9
X-Mn alloy (where X is Pt, Pd, Ir, Rh,
Ru, Os, one or more of these elements), preferably a PtMn alloy, or X-Mn-
X 'alloy (where X' is Ne, Ar, Kr, Xe, B
e, B, C, N, Mg, Al, Si, P, Ti, V, C
r, Fe, Co, Ni, Cu, Zn, Ga, Ge, Z
r, Nb, Mo, Ag, Cd, Ir, Sn, Hf, T
a, W, Re, Au, Pb, and one or more of the rare earth elements).

The composition ratio of the element X in the X-Mn alloy is at%
In the range of 47 to 57. More preferably, the composition ratio of the element X of the X-Mn alloy is 50 to 56 at%.
Is within the range. This composition range is the same as the composition range of the antiferromagnetic layer 4 described with reference to FIG. X-Mn-
In the case of the X 'alloy, the composition ratio of the element X' is at%,
And a more preferred composition range is at%.
And is in the range of 0.5 to 5. Further, the composition ratio X: Mn of the element X and Mn is preferably in the range of 4: 6 to 6: 4. Further, X + of the X—Mn—X ′ alloy
The composition ratio of X 'is at%, preferably in the range of 47 to 57, and more preferably the composition ratio of X + X' in the X-Mn-X 'alloy is at% and in the range of 50 to 56. Is within.

When the composition is within the above range, the interface structure between the free magnetic layer 1 and the exchange bias layer 9 is in a non-matching state, and an exchange anisotropic magnetic field of 400 (Oe) or more can be obtained at least at the interface. However, as shown in FIG. 2, since the exchange bias layers 9 and 9 are not formed in the track width Tw portion, both end portions of the free magnetic layer 1 are strongly affected by the exchange anisotropic magnetic field. A single magnetic domain is formed in the X direction as shown in FIG.
The magnetization of the w region is appropriately aligned in the X direction in the figure to such an extent that it reacts to an external magnetic field.

In the single spin-valve type thin film element thus formed, the external magnetic field in the Y direction
The magnetization in the track width Tw region of the free magnetic layer 1 changes from the illustrated X direction to the illustrated Y direction. The electric resistance changes depending on the relationship between the change in the direction of magnetization in the free magnetic layer 1 and the fixed magnetization direction (Y direction in the drawing) of the fixed magnetic layer 3, and a voltage change based on the change in the electric resistance value causes A leakage magnetic field from the recording medium is detected.

FIG. 3 is a sectional view showing the structure of a dual spin-valve thin film element according to a third embodiment of the present invention.

As shown in the figure, an underlayer 6, an antiferromagnetic layer 4, a fixed magnetic layer 3, a nonmagnetic conductive layer 2, and a free magnetic layer 1 are sequentially stacked from below. Further, on the free magnetic layer 1, a nonmagnetic conductive layer 2, a fixed magnetic layer 3, an antiferromagnetic layer 4, and a protective layer 7 are successively laminated.

Hard bias layers 5, 5 and conductive layers 8, 8 are laminated on both sides of the multilayer film from the underlayer 6 to the protective layer 7.

Each layer is formed of the same material as that described with reference to FIGS. As shown in FIG. 3, the antiferromagnetic layer 4 formed below the free magnetic layer 1
Is formed under the pinned magnetic layer 3, the composition ratio of the element X of the X—Mn alloy constituting the antiferromagnetic layer 4 is at In percentage, 44-5
7, and more preferably X-
The composition ratio of the element X in the Mn alloy is at% and is in the range of 46 to 55.

Since the antiferromagnetic layer 4 formed above the free magnetic layer 1 is formed on the fixed magnetic layer 3, it is similar to the antiferromagnetic layer 4 shown in FIG. The composition ratio of the element X of the X-Mn alloy constituting the antiferromagnetic layer 4 is preferably at% and in the range of 47 to 57, more preferably the composition ratio of the element X of the X-Mn alloy. Is a
In t%, it is in the range of 50 to 56.

If the composition is within this range, the difference between the lattice constant of the pinned magnetic layer 3 and the lattice constant of the antiferromagnetic layer 4 before the heat treatment can be increased. Therefore, by performing the heat treatment, the crystal structure of a part of the antiferromagnetic layer 4 at the interface is transformed from the disordered lattice to the ordered lattice required for exhibiting the exchange anisotropic magnetic field. It is possible. When the antiferromagnetic layer 4 is formed of a PtMn alloy, the ratio c / a of the lattice constants a and c of the antiferromagnetic layer 4 after the heat treatment is in the range of 0.93 to 0.99. Is preferred.

Further, since the crystal orientations of the antiferromagnetic layer 4 and the pinned magnetic layer 3 are different, it is possible to make the interface structure more mismatched.

Within the composition range described above, at least 4
Although it is possible to obtain an exchange anisotropic magnetic field of 00 (Oe) or more, forming the antiferromagnetic layer 4 below the fixed magnetic layer 3 is more effective than forming it on the fixed magnetic layer 3. It is possible to slightly widen the range of the composition ratio of the element X in the X-Mn alloy.

When the antiferromagnetic layer 4 is formed of an X—Mn—X ′ alloy, the composition ratio of the element X ′ is at%,
It is in the range of 0.2 to 10, and a more preferred composition range is at%, and in the range of 0.5 to 5. Elements X and M
The composition ratio X: Mn with n is preferably in the range of 4: 6 to 6: 4.

Further, in the case of the antiferromagnetic layer 4 formed below the free magnetic layer 1, the composition ratio of X + X 'of the X—Mn—X ′ alloy constituting the antiferromagnetic layer 4 is at%.
It is preferable that the composition ratio of X + X ′ in the X—Mn—X ′ alloy is at
%, In the range of 46-55.

In the case of the antiferromagnetic layer 4 formed above the free magnetic layer 1, the composition ratio of X + X 'of the X-Mn-X' alloy constituting the antiferromagnetic layer 4 is at%.
It is preferable that the composition ratio of X + X ′ in the X—Mn—X ′ alloy be at least at 47 to 57.
% In the range of 50-56.

Within the above composition range, the difference between the lattice constant of the fixed magnetic layer 3 and the lattice constant of the antiferromagnetic layer 4 before the heat treatment can be increased, and the interface structure before the heat treatment is brought into a non-matching state. Therefore, by performing heat treatment, the crystal structure of a part of the antiferromagnetic layer 4 at the interface is transformed from the disordered lattice to the ordered lattice required for exhibiting the exchange anisotropic magnetic field. Is possible.

In this dual spin-valve thin-film element, as in the single spin-valve thin-film element shown in FIG.
The magnetization of the free magnetic layer 1 is affected by the hard bias layers 5 and 5 and is fixed in a single magnetic domain.
It is aligned in the direction.

When a steady current is applied from the conductive layer 8 to the free magnetic layer 1, the nonmagnetic conductive layer 2, and the fixed magnetic layer 3 and a magnetic field is applied from the recording medium in the Y direction, the magnetization of the free magnetic layer 1 is Fluctuates from the X direction to the Y direction. At this time, spin-dependent scattering of conduction electrons occurs at the interface between the nonmagnetic conductive layer 2 and the free magnetic layer 1 and at the interface between the nonmagnetic conductive layer 2 and the fixed magnetic layer 3. As a result, the electric resistance changes, and the leakage magnetic field from the recording medium is detected.

In the single spin-valve type thin film element shown in FIGS. 1 and 2, the spin-dependent electron scattering occurs at the interface between the nonmagnetic conductive layer 2 and the free magnetic layer 1 and at the nonmagnetic conductive layer. In the dual spin-valve thin-film element shown in FIG. 3, the scattering of conduction electrons occurs between the non-magnetic conductive layer 2 and the free magnetic layer 1 in contrast to the two places at the interface between the layer 2 and the pinned magnetic layer 3. And two interfaces between the nonmagnetic conductive layer 2 and the pinned magnetic layer 3, so that the dual spin-valve thin-film element is compared with the single spin-valve thin-film element. It is possible to obtain a large resistance change rate.

FIG. 4 is a sectional view showing the structure of an AMR type thin film element according to a fourth embodiment of the present invention.

As shown in the figure, the soft magnetic layer (SAL
A layer 10, a nonmagnetic layer (SHUNT layer) 11, and a magnetoresistive layer (MR layer) 12 are sequentially stacked.

For example, the soft magnetic layer 10 is made of Fe—Ni—
Nb alloy, nonmagnetic layer 11 is a Ta film, magnetoresistive layer 12
Is formed of a NiFe alloy.

On the magnetoresistive layer 12, exchange bias layers (antiferromagnetic layers) 9, 9 are formed on both sides of the magnetoresistive layer 12 in the X direction with an increased track width Tw, and further, the exchange bias layers 9, 9 are formed. The conductive layers 13, 13 formed of a Cr film or the like are formed thereon.

The exchange bias layer 9 shown in FIG.
9 is made of an X-Mn alloy, preferably a PtMn alloy, similarly to the exchange bias layers 9 and 9 shown in FIG. 2, and the composition ratio of the element X of the X-Mn alloy is at%.
It is in the range of 47-57. More preferably X-
The composition ratio of the element X in the Mn alloy is at% and is in the range of 50 to 56.

The exchange bias layers 9, 9
Is an X-Mn-X 'alloy (where X' is Ne, Ar,
Kr, Xe, Be, B, C, N, Mg, Al, Si,
P, Ti, V, Cr, Fe, Co, Ni, Cu, Zn,
Ga, Ge, Zr, Nb, Mo, Ag, Cd, Ir, S
n, Hf, Ta, W, Re, Au, Pb, and at least one of the rare earth elements), and the composition ratio of the element X 'is at. 2-10
And the more preferable composition range is at%,
It is in the range of 0.5 to 5. Further, the composition ratio X: Mn of the element X and Mn is preferably in the range of 4: 6 to 6: 4. The exchange bias layers 9 and 9 shown in FIG.
Similarly to No. 9, the composition ratio of X + X 'in the X-Mn-X' alloy is at% and is in the range of 47 to 57. More preferably, the composition ratio of X + X 'in the X-Mn-X' alloy is at%.
And is in the range of 50 to 56.

The X-Mn alloy or X-Mn-X '
If the composition ratio of the alloy is formed within the above range, the interface structure between the exchange bias layers 9 and 9 and the magnetoresistive layer 12 will be in a non-matching state, and by performing heat treatment,
When the thickness of the magnetoresistive layer 12 of the iFe alloy is 200 to 300 Å, about 40 to 110 at the interface.
(Oe) exchange anisotropic magnetic field is obtained.
When the thickness of the magnetoresistive layer of the e-alloy is about 200 angstroms, an exchange anisotropic magnetic field of about 60 to 110 (Oe) is obtained, and the region B of the magnetoresistive layer 12 shown in FIG. A single magnetic domain is formed in the X direction. This induces the magnetization of the region A of the magnetoresistive layer 12 to be aligned in the X direction in the drawing. Further, a current magnetic field generated when the detection current flows through the magnetoresistive layer 12 is applied to the soft magnetic layer 10 in the Y direction,
A transverse bias magnetic field is applied to the region A of the magnetoresistive layer 12 in the Y direction by the magnetostatic coupling energy provided by the soft magnetic layer 10. By applying the lateral bias layer to the region A of the magnetoresistive layer 12 which is divided into single magnetic domains in the X direction, a change in resistance to a magnetic field change in the region A of the magnetoresistive layer 12 (magnetoresistance effect characteristics: HR effect characteristics) ) Are set to have linearity.

The moving direction of the recording medium is the Z direction. When a leakage magnetic field is applied in the Y direction in the figure, the A
The resistance value of the region changes, and this is detected as a voltage change.

As described in detail above, in the present invention, the antiferromagnetic layer 4 (or the exchange bias layer 9) is
Mn alloy (X is Pt, Pd, Ir, Rh, R
u or Os), preferably a PtMn alloy, by appropriately adjusting the composition ratio of the antiferromagnetic layer 4 to form the antiferromagnetic layer 4. The interface structure between the layer 4 and the pinned magnetic layer 3 (or the free magnetic layer 1 or the magnetoresistive layer 12) formed in contact with the antiferromagnetic layer 4 can be brought into a non-matching state,
Therefore, a larger exchange anisotropic magnetic field can be obtained, and the reproduction characteristics can be improved as compared with the related art. Alternatively, the antiferromagnetic layer 4 (or the exchange bias layer 9)
In addition to the elements X and Mn, an element X 'as the third element (where X' is Ne, Ar, Kr, Xe, Be, B, C,
N, Mg, Al, Si, P, Ti, V, Cr, Fe, C
o, Ni, Cu, Zn, Ga, Ge, Zr, Nb, M
o, Ag, Cd, Ir, Sn, Hf, Ta, W, Re,
Au, Pb, and one or more of the rare earth elements) can increase the lattice constant of the antiferromagnetic layer 4 as compared with the case where the element X 'is not added. Therefore, the interface structure between the antiferromagnetic layer 4 and the fixed magnetic layer 3 (or the free magnetic layer 1 or the magnetoresistive layer 12) formed in contact with the antiferromagnetic layer 4 is set in a non-matching state. Therefore, a larger exchange anisotropic magnetic field can be obtained, and the reproduction characteristics can be improved as compared with the related art.

It is preferable that the crystal orientations of the antiferromagnetic layer 4 and the pinned magnetic layer 3 be different from each other because the interface structure can be more easily brought into a non-matching state.

The exchange anisotropic magnetic field can be obtained by keeping the interface structure in a non-matching state because the heat treatment is performed to change the crystal structure of the antiferromagnetic layer 4 from an irregular lattice to a regular lattice. This is because transformation can be performed, but if all the crystal structures are transformed into a regular lattice, a problem occurs in adhesion and the like. Therefore, it is preferable that only a part of the crystal structure is transformed into a regular lattice. For example, when the antiferromagnetic layer 4 is formed of a PtMn alloy, the ratio c / a of the lattice constants a and c of the antiferromagnetic layer 4 after the heat treatment is set to 0.1.
It is preferably in the range of 93 to 0.99 (by the way, when all the crystal structures are transformed into a regular lattice, the ratio c / a of the lattice constants a and c is 0.918).

In the present invention, the structure of the magnetoresistance effect element layer is not limited to the structure shown in FIGS.
For example, in the case of the single spin-valve thin film element shown in FIG. 1, the exchange bias layer may be formed below the free magnetic layer 1 with an interval of the track width Tw without forming the hard bias layers 5 and 5. In the case of the single spin-valve thin film element shown in FIG. 2, the exchange bias layers 9 and 9 are not formed, and the underlayer 6 and the protective layer 7 are removed.
Up to 6 layers, or at least the free magnetic layer 1
Hard bias layers may be formed on both sides of the substrate.

FIG. 5 is a cross-sectional view of the structure of the read head on which the magnetoresistive element layers shown in FIGS. 1 to 4 are formed, as viewed from the side facing the recording medium.

Reference numeral 20 denotes a lower shield layer made of, for example, a NiFe alloy.
0, a lower gap layer 21 is formed. 1 to 4 is formed on the lower gap layer 21, and an upper gap layer 23 is formed on the magnetoresistive element layer 22. On the upper gap layer 23, an upper shield layer 24 made of a NiFe alloy or the like is formed.

The lower gap layer 21 and the upper gap
The layer 23 is made of, for example, SiO_TwoAnd Al_TwoO _Three(Alumina) etc.
Formed of an insulating material. As shown in FIG.
The lower gap layer 21 to the upper gap layer 23
The length is the gap length Gl, and this gap length Gl is small.
It has become possible to cope with higher recording density.

[0127]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, first, a multilayer film having the following film configuration is formed, and the relationship between the Pt amount of one element constituting the antiferromagnetic layer and the lattice constant of the antiferromagnetic layer is examined. Was.

As the film constitution, from the bottom, a Si substrate / alumina / underlayer: Ta (100) / pinned magnetic layer: NiFe (300) / antiferromagnetic layer: PtMn (3
00) / Ta (100). The numerical values in the parentheses indicate the film thickness, and the unit is angstrom.

In the experiment, the relationship between the amount of Pt and the lattice constant of the antiferromagnetic layer was determined from the diffraction pattern peak position by the θ / 2θ method of X-ray diffraction at the stage where no heat treatment was performed.

As shown in FIG. 6, it can be seen that the lattice constant of the antiferromagnetic layer (PtMn) increases as the amount of Pt increases. In addition, NiF constituting the pinned magnetic layer
The lattice constant of the e alloy, the CoFe alloy, or Co ranges from about 3.5 to 3.6 as shown in the figure.

Next, two multilayer films having an antiferromagnetic layer formed below or above the pinned magnetic layer are formed by DC magnetron sputtering, and the Pt after heat treatment is performed.
The relationship between the quantity (one element constituting the antiferromagnetic layer) and the exchange anisotropic magnetic field was examined. FIG. 7 shows the experimental results.

The film configuration in which the antiferromagnetic layer is formed below the fixed magnetic layer is as follows: Si substrate / alumina / underlayer: Ta (50) / antiferromagnetic layer: PtMn (300) / fixed Magnetic layer: Co ₉₀ Fe
₁₀ (30) / protective layer: laminated in the order of Ta (100), and the antiferromagnetic layer is formed on the pinned magnetic layer as a film configuration from below: Si substrate / alumina / Ta (50) ) / Fixed magnetic layer: Co
₉₀ Fe ₁₀ (30) / antiferromagnetic layer (300) / protective layer: T
a (100). The numerical values in the parentheses indicate the film thickness, and the unit is angstrom.

The conditions in the heat treatment step were as follows: first, the temperature was raised for 3 hours, the temperature at 240 ° C. was maintained for 3 hours, and the temperature was lowered for 3 hours. Note that the heat treatment vacuum degree was set to 5 × 10 ⁻⁶ Torr or less.

As shown in FIG. 7, the antiferromagnetic layer (PtMn)
Alloy) is below and above the fixed magnetic layer, the exchange anisotropic magnetic field increases as the Pt amount increases to about 50 at%, and the Pt amount increases to about 50 at%. From the above, it can be seen that the exchange anisotropic magnetic field gradually decreases.

In order to obtain an exchange anisotropic magnetic field of 400 (Oe) or more, when the antiferromagnetic layer (PtMn) is formed below the fixed magnetic layer, the Pt content is set within the range of 44 to 57 at%.
When the antiferromagnetic layer (PtMn) is formed on the upper side of the pinned magnetic layer, it can be seen that the Pt amount may be appropriately adjusted within the range of 47 to 57 at%.

In order to obtain an exchange anisotropic magnetic field of 600 (Oe) or more, when the antiferromagnetic layer (PtMn) is formed below the fixed magnetic layer, the Pt content is set within the range of 46 to 55 at%. When the antiferromagnetic layer (PtMn) is formed on the upper side of the pinned magnetic layer, it can be seen that the Pt amount may be appropriately adjusted within the range of 50 to 56 at%.

From the above experimental results, the antiferromagnetic layer (PtM
Four types of multilayer films were formed as an example in which the composition ratio of n) was appropriately adjusted, and one type of multilayer film was formed as a comparative example.
The orientation of each film, the exchange anisotropic magnetic field, and the like were examined. Table 1 shows the experimental results.

[0138]

[Table 1]

The multilayer films of Examples 1 to 3 are single spin-valve thin film devices, and the multilayer films of the embodiments are dual spin-valve thin film devices. Further, the multilayer film of the comparative example has the same film configuration as the multilayer film of the example, but differs only in the composition ratio of the antiferromagnetic layer (PtMn).

In the multilayer film of this embodiment, Co—Fe and Ni—Fe are laminated on Cu (non-magnetic conductive layer), and these two layers constitute a free magnetic layer. Similarly, in the multilayer film of the embodiment, Ni—Fe and Co—Fe are stacked under Cu (nonmagnetic conductive layer), and these two layers constitute a free magnetic layer. In the multilayer film of the embodiment, C is provided between two Cu (non-magnetic conductive layers).
Although o-Fe, Ni-Fe, and Co-Fe are stacked, the three layers constitute a free magnetic layer.

As shown in Table 1, the lattice matching at the interface between PtMn (antiferromagnetic layer) and CoFe (fixed magnetic layer) was "none" in the multilayer films of Examples 1 to 3. On the other hand, in the multilayer film of the comparative example, the lattice matching at the interface is “present”.

Looking at the column of “degree of ordering of PtMn after heat treatment at 240 ° C.”, the multilayer films of Examples 1 to 3 show “○”.
On the other hand, in the multilayer film of the comparative example, it is "x".

Further, looking at the columns of “exchange anisotropic magnetic field” and “resistance change rate”, the multilayer films of Examples 1 to 3 have a large exchange anisotropic magnetic field and a large resistance change rate. On the other hand, it can be seen that the exchange anisotropic magnetic field and the rate of change in resistance of the multilayer film of the comparative example are much smaller than those of the multilayer films of Examples 1 to 3.

The above experimental results relate to the composition ratio of the PtMn alloy. As shown in Table 1, the Pt amount of PtMn in the comparative example is 44 at%, whereas the Pt amount of PtMn in Examples 1 to 4 is 49 to 51 at%.

For this reason, referring to FIG. 6 (before heat treatment), the lattice constant of PtMn in the comparative example is smaller than the lattice constant of PtMn in Examples 1 to 3, and the comparative example has a smaller lattice constant in Examples 1 to 3. In comparison, it can be seen that the difference between the lattice constant of PtMn (antiferromagnetic layer) and the lattice constant of Co—Fe (fixed magnetic layer) is small.

That is, at the stage before the heat treatment, in the multilayer film of the comparative example, the interface structure between PtMn and CoFe tends to be in a matching state. Are likely to be in an inconsistent state.

Before the heat treatment, the crystal structures of PtMn of the examples to the comparative examples have an irregular lattice (face-centered cubic lattice), but the heat treatment is performed in the comparative example in which the interface structure is in a matched state. However, the crystal structure of PtMn cannot be transformed from an irregular lattice to a regular lattice, and the ordering does not proceed at all.

[0148] In contrast, the interface structure in the multilayer films of Examples - that is misaligned, by heat treatment, the crystal structure of PtMn is partially ordered lattice (Ll ₀ type from disordered lattice (A face-centered square lattice), and the ordering has sufficiently progressed.

FIG. 8 shows the Pt of the embodiment after the heat treatment.
3 is a high-resolution TEM photograph showing an interface structure between Mn and CoFe.

As shown in FIG. 8, at the interface between PtMn and CoFe, the arrangement direction of the atoms of PtMn and the arrangement direction of the atoms of CoFe do not coincide with each other, and thus it is found that they are in a non-matching state.

On the other hand, FIG. 9 shows a high-resolution TE showing the interface structure between PtMn and CoFe of the comparative example after the heat treatment.
It is an M photograph.

As shown in FIG. 9, at the interface between PtMn and CoFe, the arrangement direction of the atoms of PtMn and the arrangement direction of the atoms of CoFe are in agreement, indicating that they are in a matched state.

FIG. 10 shows the results of an experiment after heat treatment in which the degree of ordering of PtMn in the multilayer film of the example was measured, and FIG. 11 was the degree of ordering of PtMn in the multilayer film of the comparative example.

In the experiment, the angle between two equivalent {111} planes in PtMn was measured, and the degree of ordering was determined from the angle. The horizontal axis indicates the distance from the interface between PtMn and CoFe to the PtMn side.

As shown in FIG. 10, the measured values of the angles formed by the {111} planes are scattered in the range of about 65 ° to about 72 °, and the crystal structure of PtMn has an irregular lattice before heat treatment. It can be seen that a part has changed to form a regular lattice.

On the other hand, in FIG. 11, the measured value of the angle formed by the {111} plane falls within the range of about 70 to about 71, and the crystal structure of PtMn is It can be seen that the state of the irregular lattice is maintained.

As described above, in the multilayer films of Examples 1 to 5, by setting the Pt content of PtMn to 49 to 51 at%, the interface structure can be brought into an inconsistent state, so that the ordering can be appropriately advanced. As can be seen from FIG. 7, the exchange anisotropic magnetic field generated at the interface between PtMn and CoFe has a very large value.

On the other hand, in the multilayer film of the comparative example, since the Pt content of PtMn was as low as 44 at%, the interface structure was in a matching state, and thus the ordering did not proceed properly. As can be seen from FIG. Exchange anisotropic magnetic field generated at the interface between Co and CoFe has a very small value.

In order to make the interface structure between PtMn and CoFe inconsistent, the crystal orientation of PtMn and CoFe
It is preferable that the crystal orientation is different.

The "strong", "medium" and "weak" of the degree of orientation of the {111} plane shown in Table 1 represent the preferential degree of orientation with respect to the film plane direction.

As shown in Table 1, the degree of orientation of the {111} plane of PtMn of the comparative example, and CoFe (fixed magnetic layer)
Of the {111} plane are both "strong".

This can be explained by referring to the film configuration of the embodiment.
NiFe, CoFe (free magnetic layer), Cu (non-magnetic conductive layer) and CoFe (fixed magnetic layer) formed on Ta are strongly affected by Ta as an underlayer, and
Since the degree of orientation of the 11 ° plane becomes strong and the difference between the lattice constant of CoFe (fixed magnetic layer) and the lattice constant of PtMn (antiferromagnetic layer) before the heat treatment is small as seen with reference to FIG. The {111} plane of PtMn is
The film is strongly influenced by the degree of orientation of the 1 強 く plane, and is preferentially oriented in the film surface direction.

On the other hand, in the embodiment, NiFe, CoFe (free magnetic layer), Cu (nonmagnetic conductive layer) and CoFe (fixed magnetic layer) formed on Ta are affected by Ta as the underlayer. Although it is strongly received, the degree of orientation of the {111} plane increases, but as can be seen with reference to FIG. 6, the lattice constant of CoFe (fixed magnetic layer) and Pt before heat treatment are increased.
Since the difference from the lattice constant of Mn (antiferromagnetic layer) is large,
The {111} plane of PtMn is not significantly affected by the crystal orientation of CoFe, and the degree of orientation in the film plane direction is weak.

In the embodiment in which CoFe (fixed magnetic layer) is laminated on PtMn,
Is formed on PtMn, CoFe {111}
The degree of plane orientation is weakened, so that the crystal orientations of PtMn and CoFe are automatically oriented in different directions.

Next, in the present invention, the antiferromagnetic layer is formed of Pt—Mn.
-X '(X' = Ar) alloy, the amount of element X 'and P
The relationship with the lattice constant of the t-Mn-X 'alloy was examined. The film configuration used in the experiment was as follows: Si substrate / alumina / Ta (50) / Co ₉₀ Fe ₁₀ (30) / Pt—Mn
-X '(300) / Ta (100). The numerical value in parentheses indicates the film thickness, and the unit is angstrom.

The formation of the antiferromagnetic layer is performed in a sputtering apparatus.
Three types of targets in which the ratio of Pt to Mn is 6: 4, 5: 5, and 4: 6 are prepared, and by using each of the targets, the introduction gas pressure of Ar as the element X ′ is changed. A Pt—Mn—X ′ (X ′ = Ar) alloy film was formed by DC magnetron sputtering and ion beam sputtering. The amount of X ′ (X ′ = Ar) occupying in the Pt—Mn—X ′ (X ′ = Ar) alloy film and the amount of Pt—Mn—
The relationship between X ′ (X ′ = Ar) and the lattice constant was measured. FIG. 12 shows the experimental results.

As shown in FIG. 12, even when the composition ratio of Pt and Mn is any of 6: 4, 5: 5, and 4: 6, the element X '(X' = Ar) It can be seen that the lattice constant of Pt—Mn—X ′ (X ′ = Ar) increases as the amount increases. The lattice constant of the NiFe alloy, CoFe alloy, or Co that forms the pinned magnetic layer is in the range of about 3.5 to 3.6, as shown in FIG. In this experiment, the amount of the element X '(X' = Ar) was set to about 4 at%, and no experiment was conducted for a case where the content was larger than that. However, Ar which is the element X 'is a gas element. For this reason, even if the gas pressure is increased, it is difficult to contain Ar in the film.

Next, the Pt—Mn—
The X ′ (X ′ = Ar) alloy film was subjected to the following heat treatment step. As conditions in the heat treatment step, first, the temperature was raised for 3 hours, then the temperature of 240 ° C. was maintained for 3 hours, and further, the temperature was lowered for 3 hours. Note that the heat treatment vacuum degree was set to 5 × 10 ⁻⁶ Torr or less.

FIG. 13 shows that Pt--Mn--X '(X' = A
r) A graph showing the relationship between the amount of element X '(X' = Ar) in the alloy film and the magnitude of the exchange coupling magnetic field generated at the interface between the antiferromagnetic layer and the pinned magnetic layer by the heat treatment.

As shown in FIG. 13, the element X '(X' = A
It can be seen that as the amount of r) increases, the exchange coupling magnetic field increases. That is, when the element X ′ (X ′ = Ar) is added to PtMn, a larger exchange coupling magnetic field can be obtained as compared with the case where the element X ′ (X ′ = Ar) is not added.

Next, in the present invention, using another element X ',
The antiferromagnetic layer is formed of a Pt—Mn—X ′ (X ′ = Mo) alloy, and the amount of element X ′ (X ′ = Mo) and Pt—Mn—X ′
The relation with the lattice constant of the (X ′ = Mo) alloy film was examined. The film configuration used in the experiment was as follows: Si substrate / alumina / Ta (50) / Co ₉₀ Fe ₁₀ (30) / Pt—Mn
-X '(300) / Ta (100). The numerical value in parentheses indicates the film thickness, and the unit is angstrom.

For the formation of the antiferromagnetic layer, a composite target in which a chip of the element X '(X' = Mo) is bonded to a PtMn target is prepared, and the area ratio of the chip to the target is changed. , The element X 'in the film
(X ′ = Mo), the amount of the element X ′ (X ′ = Mo) was changed.
The relationship between the amount of Mo) and the lattice constant of the Pt—Mn—X ′ (X ′ = Mo) alloy was measured. FIG. 14 shows the experimental results.
Shown in

As shown in FIG. 14, even when the composition ratio of Pt to Mn is 6: 4, 1: 1, or 4: 6, the element X '(X' = It can be seen that as the concentration of Mo) increases, the lattice constant of Pt—Mn—X ′ (X ′ = Mo) increases. Note that the lattice constant of the NiFe alloy, CoFe alloy, or Co constituting the pinned magnetic layer is in the range of about 3.5 to 3.6, as shown in FIG.

Next, the Pt—Mn—
The X ′ (X ′ = Mo) alloy film was subjected to the following heat treatment step. As conditions in the heat treatment step, first, the temperature was raised for 3 hours, then the temperature of 240 ° C. was maintained for 3 hours, and further, the temperature was lowered for 3 hours. Note that the heat treatment vacuum degree was set to 5 × 10 ⁻⁶ Torr or less.

FIG. 15 shows that Pt--Mn--X '(X' = M
o) A graph showing the relationship between the concentration of the element X ′ (X ′ = Mo) in the alloy film and the magnitude of the exchange coupling magnetic field generated at the interface between the antiferromagnetic layer and the pinned magnetic layer due to the heat treatment.

As shown in FIG. 15, regardless of the composition ratio of Pt to Mn, that is, 6: 4, 1: 1, or 4: 6, the element X '(X' = Mo) about 3at
%, The exchange coupling magnetic field gradually decreases. In particular, when the amount of element X '(X' = Mo) in the film is about 10 at% or more, the exchange coupling magnetic field is extremely small even if the composition ratio of Pt and Mn is 1: 1. This is not preferred.

By the way, the content of the element X ′ (X ′ = Mo) is appropriate, but at least the element X ′ (X ′ = Mo)
Mo) is not contained, that is, the element X '(X' =
Mo) It is preferable that the exchange coupling magnetic field be larger than when the amount is 0 at%.

When the composition ratio of Pt: Mn is 6: 4, if the amount of element X '(X' = Mo) is about 1 at% or less, the amount of element X '(X' = Mo) Is 0 at%, the exchange coupling magnetic field becomes larger.

When the composition ratio of Pt: Mn is 1:
In the case of 1, the amount of the element X ′ (X ′ = Mo) is about 7 at%.
If it is less than or equal to, the exchange coupling magnetic field becomes larger than when the amount of the element X ′ (X ′ = Mo) is 0 at%.

Further, the ratio of the composition ratio of Pt: Mn is
In the case of 4: 6, the amount of element X '(X' = Mo) is about 10
At% or less, the element X '(X' = Mo) content is 0a.
The exchange coupling magnetic field is larger than at t%.

Next, the lower limit of the suitable content of the element X ′ (X ′ = Mo) is as follows.
In the case of 6: 4, the amount of the element X ′ (X ′ = Mo) is about 0.5
When it is at%, the exchange coupling magnetic field becomes the largest,
Therefore, in the present invention, the amount of the element X ′ (X ′ = Mo) is set to 0.
0.2 at% smaller than 5 at% was set as the lower limit.

From the above experimental results, the present invention shows that the element X '
The preferred range of the composition ratio was 0.2 to 10 at%. A more preferable range is 0.5 to 5 in at%.

The preferred composition range of the element X 'is the case where Pt (= element X) and Mn are set within the range of 4: 6 to 6: 4.

[0184]

According to the present invention described in detail above, in the method of manufacturing an exchange-coupling film comprising an antiferromagnetic layer and a ferromagnetic layer, the antiferromagnetic layer is made of X--Mn (where X is Pt, P
d, Ir, Rh, Ru, or Os), the lattice constant of the antiferromagnetic layer should be larger than the lattice constant of the ferromagnetic layer. Thereby, the crystal structure of the antiferromagnetic layer is easily transformed from an irregular lattice to a regular lattice, and a larger exchange anisotropic magnetic field can be obtained.

Alternatively, in the present invention, the element X '(where X' is Ne, Ar, Kr, Xe, Be, B, C, N,
Mg, Al, Si, P, Ti, V, Cr, Fe, Co,
Ni, Cu, Zn, Ga, Ge, Zr, Nb, Mo, A
g, Cd, Sn, Hf, Ta, W, Re, Au, Pb,
And one or more of the rare earth elements) in the X-Mn alloy film by interstitial or substitutional solid solution, thereby increasing the lattice constant of the antiferromagnetic layer. Therefore, a larger exchange anisotropic magnetic field can be obtained.

[0186] Further, in the step of heat-treated, the anti least part of the crystal structure of the ferromagnetic layer, L1 ₀ type of face-centered tetragonal lattice (ordered lattice) and, moreover lattice constants a of the antiferromagnetic layer , C is between 0.93 and 0.99.
Is preferable in that a larger exchange anisotropic magnetic field can be obtained.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a structure of a single spin-valve thin film element according to a first embodiment of the present invention, viewed from the ABS side;

FIG. 2 is a cross-sectional view of the structure of a single spin-valve thin film element according to a second embodiment of the present invention, viewed from the ABS side;

FIG. 3 is a sectional view of the structure of a dual spin-valve thin film element according to a third embodiment of the present invention, as viewed from the ABS side;

FIG. 4 is a cross-sectional view of the structure of an AMR type thin film element according to a fourth embodiment of the present invention as viewed from the ABS side.

FIG. 5 is a cross-sectional view of the thin-film magnetic head according to the present invention as viewed from a surface facing a recording medium;

FIG. 6 is a graph showing the relationship between the amount of Pt before heat treatment and the lattice constant of the antiferromagnetic layer when the antiferromagnetic layer is formed of PtMn.

FIG. 7 is a graph showing the relationship between the amount of Pt and the exchange anisotropic magnetic field when the antiferromagnetic layer is formed of PtMn.

FIG. 8 is a high-resolution TEM of the multilayer film of the embodiment shown in Table 1.
Photo,

FIG. 9 is a high-resolution TEM of a multilayer film of a comparative example shown in Table 1.
Photo,

FIG. 10 shows PtM in the multilayer film of the example shown in Table 1.
a graph showing the degree of ordering of n (antiferromagnetic layer),

FIG. 11 shows PtM in the multilayer film of the example shown in Table 1.
a graph showing the degree of ordering of n (antiferromagnetic layer),

FIG. 12 shows that the antiferromagnetic layer is formed of Pt—Mn—X ′ (X ′ = A
r) a graph showing the relationship between the amount of element X '(X' = Ar) and the lattice constant of the antiferromagnetic layer when formed in r);

FIG. 13 shows that the antiferromagnetic layer is formed of Pt—Mn—X ′ (X ′ = A
a graph showing the relationship between the amount of element X ′ (X ′ = Ar) and the exchange coupling magnetic field when formed in r);

FIG. 14 shows that the antiferromagnetic layer is formed of Pt—Mn—X ′ (X ′ = M
a graph showing the relationship between the amount of element X ′ (X ′ = Mo) and the lattice constant of the antiferromagnetic layer when formed in o),

FIG. 15 shows that the antiferromagnetic layer is formed of Pt—Mn—X ′ (X ′ = M
a graph showing the relationship between the amount of the element X ′ (X ′ = Mo) and the exchange coupling magnetic field when formed in o);

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 free magnetic layer 2 nonmagnetic conductive layer 3 fixed magnetic layer 4 antiferromagnetic layer 5 hard bias layer 6 underlayer 7 protective layer 8 conductive layer 9 exchange bias layer 10 soft magnetic layer (SAL layer) 11 nonmagnetic layer (SHUNT layer) 12) magnetoresistive layer (MR layer) 20 lower shield layer 21 lower gap layer 22 magnetoresistive element layer 23 upper gap layer 24 upper shield layer

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yutaka Yamamoto 1-7 Yukiya Otsukacho, Ota-ku, Tokyo Inside Alps Electric Co., Ltd. (72) Inventor Kazuya Ominato 1-7 Yukitani-Otsukacho, Ota-ku, Tokyo Inside Alps Electric Co., Ltd. (72) Inventor Akihiro Makino Inside Alps Electric Co., Ltd. 1-7 Otsuka-cho, Yukitani, Ota-ku, Tokyo

Claims (11)

[Claims] 1. At least an element X (where X is Pt,
Pd, Ir, Rh, Ru, or Os). An anti-ferromagnetic layer containing Mn and an antiferromagnetic layer, and a method of manufacturing an exchange coupling film in which the ferromagnetic layer is joined. When the antiferromagnetic layer and the ferromagnetic layer are joined to each other, the lattice constant of the antiferromagnetic layer is made larger than the lattice constant of the ferromagnetic layer, and the heat treatment is performed. A method for producing an exchange-coupling film, characterized by transforming an irregular phase of a crystal structure of a ferromagnetic layer into an ordered phase, thereby enabling generation of an exchange anisotropic magnetic field at an interface between the two layers. The method according to claim 2, wherein the heat treatment, at least a part of the crystal structure of the antiferromagnetic layer, L1 ₀ type method for producing an exchange coupling film according to claim 1, in which the face-centered tetragonal ordered lattice. 3. The method according to claim 1, wherein the antiferromagnetic layer is formed of an X—Mn alloy, and the element X is Pt. 4. The antiferromagnetic layer is formed of a PtMn alloy, and after the heat treatment, lattice constants a and c of the antiferromagnetic layer are set.
The method for producing an exchange-coupled membrane according to claim 3, wherein the ratio c / a is within a range of 0.93 to 0.99. 5. The method according to claim 1, wherein the antiferromagnetic layer is made of an X—Mn—X ′ alloy (where X is one or more of Pt, Pd, Ir, Rh, Ru, and Os; The element X ′ is Ne, Ar, Kr, Xe, Be, B, C,
N, Mg, Al, Si, P, Ti, V, Cr, Fe, C
o, Ni, Cu, Zn, Ga, Ge, Zr, Nb, M
o, Ag, Cd, Sn, Hf, Ta, W, Re, Au,
Pb and one or more of the rare earth elements), and the X—Mn—X ′ alloy is composed of the element X
Is an interstitial solid solution in which the element X 'penetrates into the space of the spatial lattice composed of X and Mn, or a part of the lattice points of the crystal lattice composed of the elements X and Mn is substituted with the element X' 3. The method for producing an exchange-coupled membrane according to claim 1, wherein the substitution-type solid solution is prepared. 6. XM used as said antiferromagnetic layer
6. The method according to claim 5, wherein the element X of the nX 'alloy is Pt. 7. The element X ′ is Ne, Ar, Kr, X
7. The method for producing an exchange-coupling film according to claim 5, wherein the element is one or more of e. 8. The composition ratio of said element X 'is at%,
The method for producing an exchange-coupling membrane according to any one of claims 5 to 7, which is within a range of 2 to 10. 9. The composition ratio of the element X ′ is at%, and
The method for producing an exchange-coupled membrane according to claim 8, wherein the value is in the range of 5 to 5. 10. A composition ratio X: M of an element X and Mn.
n is in the range of 4: 6 to 6: 4.
The method for producing an exchange-coupled membrane according to any one of the above. 11. X- used as the antiferromagnetic layer
The Mn-X 'alloy is formed by a sputtering method.
11. The method for producing an exchange-coupling membrane according to any one of items 10 to 10.