JP2000310666A - Test burn-in device and control method in the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide both a test burn-in device to transfer skew correction data to skew correction data register parallelly at high speed and a control method in a test burn-in device. SOLUTION: A test burn-in device 100 is constituted by newly comprising a skew correction data storage circuit 21 and a skew correction data transferring circuit 31 to read skew correction data from the skew correction data storage circuit 21 and to write it in a skew correction data register 13 in the DRV/CMP board 1 of each slot to which the skew correction data register 13 is mounted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test burn-in apparatus for correcting skew data by a skew adjustment circuit provided in each slot in which a burn-in board is mounted, and a control method in the test burn-in apparatus.

[0002]

2. Description of the Related Art Conventionally, when evaluating the reliability of a prototyped semiconductor device, or when previously removing, from a mass-produced semiconductor device, a device which may become an initial failure before shipment, the semiconductor device is required. In a device inspection process, a test burn-in device for applying a temperature stress and an electric stress is used.

[0003] This test burn-in device generally comprises
It comprises a burn-in board as a board (DUT board) on which a large number of semiconductor devices to be tested are mounted, a thermostatic bath for supplying a temperature stress, a test burn-in device main circuit for supplying an electric stress, and the like. The burn-in board is detachably provided in the constant temperature bath, and is connected to a test burn-in device main body circuit via a connector attached to a rear side wall surface of the constant temperature bath. Also,
The thermostat is provided with a temperature sensor for detecting the temperature of gas circulating in the thermostat for temperature control.

[0004] The test burn-in apparatus mounts a plurality of burn-in boards on which a plurality of devices to be measured are mounted in a constant-temperature bath and applies a device test (burn-in test) while applying a temperature stress, or a device under an arbitrary temperature condition. The operation test is performed by mass batch processing.

[0005] Since the measurement is simultaneously performed in parallel in all the slots where the burn-in board is mounted, each slot corresponds to a test head in an IC tester.
The skew will be defined between the pins in the slot. For this reason, the DRV installed for each slot
A skew adjustment circuit is provided for each driver pin and I / O pin of the / CMP board, and these skew adjustment circuits perform skew adjustment for each slot.

Hereinafter, a conventional test burn-in device 400 will be described with reference to FIG.

In the prior art, as shown in FIG. 5, a skew correction data register 43 of a driver skew adjustment circuit 41 and a comparator skew adjustment circuit 42 provided at each of a driver pin and an I / O pin is provided.
It is connected to a controller CPU 45 that performs test management and test control via a tester bus 44 and controls the entire apparatus.

The controller CPU 45 stores the skew correction data for each slot as a skew file for each slot, and sequentially transfers the skew correction data to the skew correction data register 43 for each slot when the power of the test burn-in device 400 is turned on. When it becomes necessary to change the skew correction data, the skew correction data is sequentially transferred to the skew correction data register 43 for each slot in accordance with a command output from the controller CPU 45. Therefore, as the number of tester pins in each slot or the number of slots increases,
The transfer time of the skew correction data increases.

[0009]

However, the conventional test burn-in apparatus has the following problems.
In recent years, the number of tester pins and the number of slots in test burn-in apparatuses have rapidly increased with the increase in the required number of device processes for the purpose of mass batch processing. As a result, the transfer time of the skew correction data has also increased, and has started to have a bad influence on the efficient use of the apparatus.

It is an object of the present invention to provide a test burn-in apparatus for transferring skew correction data to a skew correction data register at high speed and in parallel, and a control method in the test burn-in apparatus.

[0011]

According to a first aspect of the present invention, there is provided a test burn-in apparatus in which a plurality of devices to be measured are mounted in a thermostat for each burn-in board, and the devices to be measured are tested under an arbitrary temperature condition. In the test burn-in apparatus, skew correction data for correcting a skew corresponding to a driver pin and an I / O pin connected for measurement of the device to be measured, provided for each slot in which the burn-in board is mounted, is provided. Correction data storage means (for example, skew correction data storage circuit 2)
1) a correction data transfer means (for example, a skew correction data transfer circuit 31) for transferring the skew correction data stored in the correction data storage means to the data correction means;
Data correction means (for example, a driver skew adjustment circuit 11) for correcting skew based on the skew correction data transferred by the correction data transfer means.

According to the test burn-in apparatus of the present invention, the correction data storage means is provided for each slot in which the burn-in board is mounted. Skew correction data for correcting the skew corresponding to the pins and the I / O pins, the correction data transfer means transfers the skew correction data stored in the correction data storage means to the data correction means, and the data correction means The skew is corrected based on the skew correction data transferred by the correction data transfer unit.

According to a fourth aspect of the present invention, there is provided a control method for a test burn-in apparatus, wherein a plurality of devices to be measured are mounted in a thermostat for each burn-in board, and the devices to be measured are tested under an arbitrary temperature condition. In a control method for controlling a test processing procedure in a test burn-in apparatus, a driver pin and an I / O pin which are provided for each slot in which the burn-in board is mounted and are connected for measuring the device under test are connected. A correction data storage step of storing skew correction data for correcting skew (for example, a skew correction data storage circuit 2
1) a correction data transfer step of transferring the skew correction data stored in the correction data storage step (for example,
The skew correction data transfer circuit 31) includes a data correction step of correcting skew based on the skew correction data transferred in the correction data transfer step (for example, the driver skew adjustment circuit 11).

According to the control method of the test burn-in apparatus of the present invention, in the correction data storing step, the connection is made for measuring the device under test provided for each slot in which the burn-in board is mounted. Skew correction data for correcting the skew corresponding to the driver pin and the I / O pin, and transferring the skew correction data stored in the correction data storage means to the data correction means in the correction data transfer step. In the step, the skew is corrected based on the skew correction data transferred by the correction data transfer unit.

Therefore, the transfer processing of the skew correction data can be executed at high speed by hardware, and the transfer time of the correction data can be greatly reduced.

The test burn-in apparatus according to the second aspect of the present invention is the test burn-in apparatus according to the first aspect, wherein the correction data storage means (for example, the skew correction data storage circuit 2)
1) The correction data transfer means (for example, the skew correction data transfer circuit 31) and the data correction means (for example, the driver skew adjustment circuit 11) are provided in the same corresponding slot.

According to the test burn-in device of the invention, the correction data storage means, the correction data transfer means, and the data correction means are provided in the same corresponding slot.

Therefore, in addition to the effect of the first aspect of the present invention, it is possible to transfer the skew correction data based on the type of the burn-in board, and it is possible to transfer the skew correction data under an optimum condition suitable for the characteristics of the mounted burn-in board. A burn-in test can be performed.

According to a third aspect of the present invention, in the test burn-in apparatus according to the first or second aspect, the correction data storage means (for example, the skew correction data storage circuit 21) stores a plurality of skew correction data. The data is stored in units of blocks, and the correction data transfer means (for example, the skew correction data transfer circuit 31) transfers the plurality of skew correction data for each block.

According to the test burn-in apparatus of the present invention, the correction data storage means stores a plurality of skew correction data in block units, and the correction data transfer means stores the plurality of skew correction data in each block. Transfer every time.

According to a fifth aspect of the present invention, in the control method of the test burn-in apparatus according to the fourth aspect, the correction data storage step (for example, the skew correction data storage circuit 21) includes a plurality of skew correction data. Are stored in units of blocks, and the correction data transfer step (for example, the skew correction data transfer circuit 31) transfers the plurality of skew correction data for each block.

According to the control method of the test burn-in apparatus of the present invention, in the correction data storing step, a plurality of skew correction data are stored in block units, and in the correction data transfer step, the plurality of skew correction data are stored. Is transferred for each block.

Therefore, in addition to the effects of the first or second or fourth aspect of the present invention, the data stored in the correction data storage means is divided into a plurality of blocks, and each block has a skew correction data corresponding to the type of burn-in board. Can be stored and a test can be executed, and skew correction can be performed in block units.

[0024]

Embodiments of the present invention will be described below in detail with reference to the drawings.

First, the configuration of the test burn-in apparatus 100 will be described with reference to FIG. The test burn-in apparatus 100 according to the present invention reads the skew correction data storage circuit 21 and the skew correction data from the skew correction data storage circuit 21 in the DRV / CMP board 1 of each slot in which the skew correction data register 13 is mounted. , A skew correction data transfer circuit 31 that writes data to the skew correction data register 13.

That is, the test burn-in device 100
The driver skew adjustment circuit 11, the comparator skew adjustment circuit 12, the skew correction data register 1
3. The controller CPU 15 for controlling the entire apparatus, the hardware registers in the test burn-in apparatus 100, and the controller CPU 15 connected to all memories.
It has a tester bus 14 for transmitting instructions output from the tester.

On the other hand, the test burn-in device 10
0 is connected to a skew correction data storage circuit 21 for storing skew correction data and a tester bus 14 in addition to the components of the above-described test burn-in device 400, and performs read / write control of the skew correction data storage circuit 21. And a skew correction data transfer circuit 31 for controlling the transfer of the skew correction data to the skew correction data register 13.

Next, the operation of the test burn-in apparatus 100 according to the present invention will be described with reference to FIGS.

First, the transfer operation of the skew correction data will be described with reference to FIG. When receiving the skew correction data transfer command from the controller CPU 15, the skew correction data transfer circuit 31 sets the tester bus 14 in the DRV / CMP board to the skew correction data transfer circuit 3.
1 switches to the bus supplied by itself. Next, read control is performed on the skew correction data storage circuit 21 to read the skew correction data of all pins via a dedicated data bus and temporarily store the skew correction data in the skew correction data transfer circuit 31.

Then, the skew correction data transfer circuit 31
Writes the skew correction data sequentially to the skew correction data register 13 of each pin from the bus supplied by the skew correction data transfer circuit 31 itself via the tester bus 14. At this time, the correspondence between each skew correction data and the skew correction data register 13 of each pin is determined according to the address order of the skew correction data stored in the skew correction data storage circuit 21 in advance.

After the skew correction data transfer processing is completed, the skew correction data transfer circuit 31
15, the transfer end flag is set, and the bus supplied by the skew correction data transfer circuit 31 itself is disconnected.
The tester bus 14 in the RV / CMP board is released to the controller CPU 15. And the controller CPU1
5 recognizes the transfer end of the skew correction data of all slots by reading the transfer end flag set for each slot.

Next, the correction data storage circuit 21 and the skew correction data transfer circuit 31 according to the present embodiment will be described in more detail with reference to FIG.

An EEPROM (Electrical Erasable Prog)
rammable ROM) circuit 22 includes a controller CP in advance.
The skew correction data created based on the instruction of U15 is stored in a micro CPU circuit 32 and an EEPROM
The data is written through the control circuit 35 and stored in the order shown in FIG.

First, upon receiving the skew correction data transfer command from the controller CPU 15, the micro CPU circuit 32 causes the bus switching circuit 36 to switch the bus to the micro CPU circuit 32 via the micro CPU bus 37. Send a bus switching command. The bus switching circuit 36 disconnects the tester bus 14 connected to the controller CPU 15 from the tester bus 14 connected to the skew correction data register 13 by receiving the bus switching command, and converts the micro CPU converted by the bus conversion circuit 34. The bus 37 is connected.

Next, the micro CPU circuit 32 reads the skew correction data stored in the EEPROM circuit 22 via the micro CPU bus 37 in order from the data corresponding to the address “0000”, and reads the data in the micro CPU circuit 32. Is temporarily stored in the RAM 33. After the storage in the RAM 33 is completed, the micro CPU circuit 3
2 sequentially transfers the skew correction data stored in the RAM 33 to the skew correction data register 13 of each pin via the micro CPU bus 37, the bus conversion circuit 34, the bus switching circuit 36, and the tester bus 14. I do.

After the transfer of the skew correction data is completed, the micro CPU circuit 32 sends the controller CPU 1 to the bus switching circuit 36 via the micro CPU bus 37.
The bus switching command for switching the bus is transmitted to the tester bus 14 connected to 5. Upon receiving the bus switching command, the bus switching circuit 36 disconnects the micro CPU bus 37 converted by the bus conversion circuit 34, and is connected to the tester bus 14 connected to the skew correction data register 13 and the controller CPU 15. Connected tester bus 14.

The micro CPU circuit 32 sets a skew correction data transfer end flag for the controller CPU 15. And the controller CPU 15
Reads the skew correction data transfer end flag from the DRV / CMP board of each slot and detects the skew correction data transfer end flag for all slots to recognize the completion of the skew correction data transfer.

By the above-described operation, the test burn-in apparatus 100 does not transfer the skew correction data to the skew correction data register 13 via the tester bus 14, but the skew correction data stored in the skew correction data storage circuit 21 provided in each slot. Correction data is sent to the controller CPU 15
According to the transfer instruction output from the skew correction data register 13, the transfer can be performed at high speed and in parallel. As a result, the skew correction data transfer time is reduced, and the user can use the device efficiently.

The present invention is not limited to the description in the present embodiment, but can be appropriately changed without departing from the spirit of the present invention.

For example, in the above embodiment, the skew correction data transfer circuit 31 transfers the skew correction data stored in the EEPROM circuit 22 to the skew correction data register 13 in data units. 3), as shown in FIG. 4, a plurality of skew correction data stored in address order may be divided into a plurality of blocks, and data may be transferred in block units by assigning block numbers.

Thus, it is possible to store the optimum skew correction data corresponding to the type of the burn-in board for each block, and it is possible to perform the burn-in test under the optimum condition suitable for the characteristics of the burn-in board.

[0042]

According to the first and fourth aspects of the present invention, the skew correction data transfer process can be performed at high speed by hardware, and the transfer time of the correction data can be greatly reduced.

According to the second aspect of the invention, in addition to the effect of the first aspect, the skew correction data is transferred after designating the corresponding block number based on the type of the burn-in board. This makes it possible to execute a burn-in test under optimal conditions that match the characteristics of the mounted burn-in board.

According to the third and fifth aspects of the present invention, in addition to the effects of the first or second or fourth aspect of the present invention, the data stored in the correction data storage means is divided into a plurality of blocks, DUT for each burn-in board type
The test can be executed by storing the skew correction data corresponding to the position, and the skew correction can be performed in block units.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a main configuration of a test burn-in device 100 according to the present invention.

FIG. 2 is a block diagram showing a skew correction data transfer operation of the test burn-in device 100 according to the present invention.

FIG. 3 is a diagram showing an example of skew correction data storage at the time of data transfer of the EEPROM circuit 22 according to the present invention.

FIG. 4 is a diagram showing an example of skew correction data storage at the time of block transfer of the EEPROM circuit 22 according to the present invention.

FIG. 5 is a block diagram showing a configuration of a main part of a conventional test burn-in device 400.

[Explanation of symbols]

 1, 4 DRV / CMP board 11, 41 Driver skew adjustment circuit 12, 42 Comparator skew adjustment circuit 13, 43 Skew correction data register 14, 44 Tester bus 15, 45 Controller CPU 21 Skew correction data storage circuit 22 EEPROM circuit 31 Skew correction data Transfer circuit 32 Micro CPU circuit 33 RAM 34 Bus conversion circuit 35 EEPROM control circuit 36 Bus switching circuit 37 Micro CPU bus 100, 400 Test burn-in device

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G01R 31/28 Y

Claims (5)

[Claims] 1. A test burn-in apparatus for mounting a plurality of devices to be measured in a thermostat for each burn-in board and testing the device to be measured under arbitrary temperature conditions, wherein each slot in which the burn-in board is mounted is provided. Correction data storage means for storing skew correction data for correcting skew corresponding to a driver pin and an I / O pin connected for measurement of the device to be measured, provided in the correction data storage means. A test data transfer means for transferring the skew correction data to the data correction means, and a data correction means for correcting the skew based on the skew correction data transferred by the correction data transfer means. Burn-in device. 2. The test burn-in apparatus according to claim 1, wherein said correction data storage means, correction data transfer means, and data correction means are provided in the same corresponding slot. 3. The correction data storage means stores a plurality of skew correction data in block units, and the correction data transfer means transfers the plurality of skew correction data for each block. Item 3. The test burn-in device according to item 1 or 2. 4. A control method for mounting a plurality of devices under test in a thermostat for each burn-in board and controlling a test processing procedure in a test burn-in apparatus for testing the devices under test under an arbitrary temperature condition. A correction data storage step of storing skew correction data for correcting skew corresponding to a driver pin and an I / O pin connected for measurement of the device under test provided for each slot in which a burn-in board is mounted; A correction data transfer step of transferring the skew correction data stored in the correction data storage step; and a data correction step of correcting skew based on the skew correction data transferred in the correction data transfer step. A control method in a test burn-in device. 5. The correction data storing step stores a plurality of skew correction data in block units, and the correction data transfer step transfers the plurality of skew correction data block by block. Item 5. A control method in the test burn-in device according to Item 4.