JP2000304501A - Flatness measuring method and device of sliding surface of thrust rotary plate - Google Patents

Flatness measuring method and device of sliding surface of thrust rotary plate

Info

Publication number
JP2000304501A
JP2000304501A JP11113244A JP11324499A JP2000304501A JP 2000304501 A JP2000304501 A JP 2000304501A JP 11113244 A JP11113244 A JP 11113244A JP 11324499 A JP11324499 A JP 11324499A JP 2000304501 A JP2000304501 A JP 2000304501A
Authority
JP
Japan
Prior art keywords
thrust
rotary plate
flatness
sliding surface
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11113244A
Other languages
Japanese (ja)
Inventor
Yoji Ikeuchi
洋治 池内
Osamu Iwai
修 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11113244A priority Critical patent/JP2000304501A/en
Publication of JP2000304501A publication Critical patent/JP2000304501A/en
Pending legal-status Critical Current

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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a flatness measuring method excellent in precision, reproducibility and workability regarding a thrust rotary plate of a large-sized rotary machine. SOLUTION: A plurality of measuring points N (N0-Nn) are marked on a measuring straight line 3 arranged at a proper position on the sliding surface 2 of a thrust rotary plate 1. An electric level 4 is so put on the sliding surface 2 that its contacts 5 come to positions on the adjacent measuring points, and reads the gradient G (G1-Gn) at the time. Difference of height between the respective measuring points is obtained from the gradient G and the distance P between the measuring points. The above difference of height of obtained all over the measuring straight line 3, thereby obtaining the magnitude of undulation of a sectional shape of the sliding surface at the straight line part and its distributed state (flatness). The plurality of measuring straight lines 3 are arranged on the whole sliding surface, and the same measurements are performed, thereby recognizing flatnesses of the whole sliding surface.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、大型回転機械等の
回転子のスラスト回転板すべり面の平坦度測定方法およ
び装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring the flatness of a sliding surface of a thrust rotary plate of a rotor of a large rotary machine or the like.

【0002】[0002]

【従来の技術】例えば、水車発電機に代表されるような
大きなスラスト荷重の作用する大型回転機械において
は、そのスラスト軸受け内の固定子と回転子との接触面
(すべり面)にスラスト荷重方向に大きな面圧が作用す
る。正常な状態においては、両すべり面の間には潤滑油
膜が存在するため、両すべり面どうしが直接接触するこ
とはないが、時として、この油膜が生成されず、両すべ
り面が直接接触し損傷を受けることがある。このような
事態がおこる原因の一つとしてすべり面の形状の問題が
ある。
2. Description of the Related Art For example, in a large rotating machine on which a large thrust load acts as represented by a water turbine generator, a contact surface (slip surface) between a stator and a rotor in a thrust bearing has a thrust load direction. Large surface pressure acts on Under normal conditions, there is no lubricating oil film between the two sliding surfaces, so the two sliding surfaces do not directly contact each other, but sometimes this oil film is not generated and the two sliding surfaces come into direct contact. May be damaged. One of the causes of such a situation is the problem of the shape of the slip surface.

【0003】このような理由により、回転子側のすべり
面を構成するスラスト回転板は、その製造時や定期点検
時などに、すべり面の平坦度をμmの精度で管理するこ
とが必要となる。このような精密な測定を行うには、ス
ラスト回転板を加工機械や据え置き型の3次元測定器な
どに載せ、専用の測定子を用いて行うのが理想的であ
る。しかし、そのような機器が無い場合やスラスト回転
板が回転子シャフトに取り付けられた状態、さらに、そ
の回転子が固定子に挿入された状態においては、そのよ
うな測定は困難である。
[0003] For the above reasons, it is necessary to control the flatness of the thrust rotating plate constituting the sliding surface on the rotor side with a precision of μm at the time of manufacturing or periodic inspection. . In order to perform such a precise measurement, it is ideal that the thrust rotating plate is mounted on a processing machine or a stationary type three-dimensional measuring device or the like, and is ideally measured using a dedicated measuring element. However, such measurement is difficult when there is no such device, when the thrust rotary plate is attached to the rotor shaft, and when the rotor is inserted into the stator.

【0004】現在用いられているスラスト回転板すべり
面平坦度測定方法を図6を参照して説明する。図6
(a)はスラスト回転板1のすべり面2が上向きの場合
の平坦度の測定方法の説明図である。この測定方法は、
スラスト回転板1のすべり面2上の測定直線3の適切な
位置に、高さが等しくなるように加工されたブロックゲ
ージ17を2つ載せ、その上に較正されたストレートエ
ッジ18を渡し、ストレートエッジ18とスラスト回転
板1のすべり面2との間隔Dを、測定者がシリンダーゲ
ージ19を用いて機械的に測定するものである。
A currently used method for measuring the flatness of the sliding surface of the thrust rotary plate will be described with reference to FIG. FIG.
(A) is an explanatory view of a method of measuring flatness when the sliding surface 2 of the thrust rotary plate 1 is upward. This measurement method is
At an appropriate position of the measuring straight line 3 on the sliding surface 2 of the thrust rotary plate 1, two block gauges 17 machined so as to be equal in height are placed, and a calibrated straight edge 18 is passed over the two, and a straight The distance D between the edge 18 and the sliding surface 2 of the thrust rotary plate 1 is mechanically measured by a measurer using a cylinder gauge 19.

【0005】図6(b)はスラスト回転板1のすべり面
2が下向きの場合の測定方法の説明図である。この場合
には、ブロックゲージ17の代わりに高さが等しくなる
ように加工されたマグネットブロック20をストレート
エッジ18とスラスト回転板1のすべり面2の間に挟
み、その磁力でストレートエッジ18を支えて間隔Dを
測定する。
FIG. 6B is an explanatory view of a measuring method when the sliding surface 2 of the thrust rotary plate 1 faces downward. In this case, instead of the block gauge 17, a magnet block 20 machined so as to have the same height is sandwiched between the straight edge 18 and the sliding surface 2 of the thrust rotary plate 1, and the magnetic force supports the straight edge 18. And measure the interval D.

【0006】図6(a)、図6(b)のいずれの場合に
おいても、測定値Dの測定直線3に沿っての変化量か
ら、その測定直線部における平坦度が求められる。そし
て、図6(c)に示すように、このような測定直線3を
スラスト回転板すべり面全体に数本定め、その各々につ
いて同様の測定をすることにより、スラスト回転板1の
すべり面2全体の平坦度を求めていた。
In both cases of FIGS. 6 (a) and 6 (b), the flatness in the measured straight line portion is obtained from the amount of change of the measured value D along the measured straight line 3. Then, as shown in FIG. 6 (c), several such measurement straight lines 3 are determined on the entire sliding surface of the thrust rotating plate, and the same measurement is performed for each of them, thereby obtaining the entire sliding surface 2 of the thrust rotating plate 1. Had to be determined.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、上記の
ストレートエッジ18やシリンダーゲージ19を用いた
測定では、測定者の測定誤差やストレートエッジ18の
変形量等の影響により、加工機械や3次元測定器などに
より測定した場合に比べ、測定結果の精度や再現性が悪
いという課題があった。
However, in the measurement using the straight edge 18 and the cylinder gauge 19 described above, a processing machine or a three-dimensional measuring device may be used due to a measurement error of a measurer or an influence of a deformation amount of the straight edge 18. There is a problem that the accuracy and reproducibility of the measurement result are poor compared to the case where the measurement is performed by the above method.

【0008】また、スラスト回転板1のすべり面2の半
径寸法が大きくなる程、それに合わせて長大・大重量の
ストレートエッジ18を使用しなければならず、回転子
が固定子に挿入された状態のような測定のための十分な
空間が確保できない場合には測定の作業性が悪くなり、
測定作業者への負担が大きかった。また、スラスト回転
板1のすべり面2が下向きになっている場合には、スト
レートエッジ18の落下の危険性もあり、安全面での問
題もあった。
In addition, as the radial dimension of the sliding surface 2 of the thrust rotary plate 1 increases, the length and weight of the straight edge 18 must be used in accordance with the radius, and the state in which the rotor is inserted into the stator is required. If sufficient space for measurement cannot be secured as in the case of, the workability of measurement will deteriorate,
The burden on measurement workers was great. Further, when the sliding surface 2 of the thrust rotary plate 1 faces downward, there is a danger of the straight edge 18 falling and there is a problem in safety.

【0009】そこで、本発明は、加工機械や3次元測定
器を使わずに、スラスト回転板が回転子シャフトに取り
付けられた状態、さらに回転子が固定子に挿入された状
態においても、精度が良く再現性や測定作業性の良い平
坦度測定方法及び装置を提供することを目的とする。
Therefore, the present invention provides high accuracy even when the thrust rotary plate is mounted on the rotor shaft and the rotor is inserted into the stator without using a processing machine or a three-dimensional measuring device. It is an object of the present invention to provide a method and an apparatus for measuring flatness with good reproducibility and measurement workability.

【0010】[0010]

【課題を解決するための手段】請求項1の発明に係わる
スラスト回転板すべり面の平坦度測定方法は、回転子の
スラスト回転板すべり面上に測定直線を定め、その測定
直線上の複数の測定点において電気水準器によりその水
平面からの傾き量を測定し、前記傾き量に基づいて前記
スラスト回転板すべり面の前記測定直線部分での断面形
状における平坦度を求めることを特徴とする。
According to a first aspect of the present invention, there is provided a method for measuring the flatness of a slip surface of a thrust rotating plate, wherein a measurement straight line is defined on the slip surface of the thrust rotating plate of the rotor, and a plurality of straight lines on the measurement straight line are determined. At a measurement point, an inclination level from a horizontal plane is measured by an electric level, and flatness in a cross-sectional shape at the measurement straight line portion of the sliding surface of the thrust rotary plate is determined based on the inclination amount.

【0011】請求項1の発明に係わるスラスト回転板す
べり面の平坦度測定方法では、回転子のスラスト回転板
すべり面上の複数の測定点において、電気水準器により
その水平面からの傾き量を測定する。そして、その傾き
量に基づいてスラスト回転板すべり面の断面形状におけ
る平坦度を求める。
According to the flatness measuring method of the thrust rotating plate slip surface according to the first aspect of the present invention, at a plurality of measurement points on the thrust rotating plate slip surface of the rotor, the inclination amount from the horizontal plane is measured by an electric level. I do. Then, the flatness in the cross-sectional shape of the sliding surface of the thrust rotary plate is obtained based on the inclination amount.

【0012】請求項2の発明に係わるスラスト回転板す
べり面の平坦度測定方法は、請求項1の発明において、
前記スラスト回転板すべり面上に複数本の前記測定直線
を設定し、前記スラスト回転板すべり面全体の平坦度を
求めることを特徴とする。
According to a second aspect of the present invention, there is provided a method for measuring the flatness of a sliding surface of a thrust rotary plate according to the first aspect of the present invention.
A plurality of the measurement straight lines are set on the sliding surface of the thrust rotating plate, and the flatness of the entire sliding surface of the thrust rotating plate is obtained.

【0013】請求項2の発明に係わるスラスト回転板す
べり面の平坦度測定方法では、請求項1の発明の作用に
加え、スラスト回転板すべり面上の複数本の測定直線に
沿って電気水準器を適用し、スラスト回転板すべり面全
体の平坦度を求める。
According to a second aspect of the present invention, there is provided a method for measuring the flatness of a sliding surface of a thrust rotary plate, wherein the electric level is measured along a plurality of measurement straight lines on the slip surface of the thrust rotary plate. Is applied to determine the flatness of the entire sliding surface of the thrust rotary plate.

【0014】請求項3の発明に係わるスラスト回転板す
べり面の平坦度測定方法は、請求項1の発明において、
前記平坦度は、前記電気水準器で測定した前記傾き量お
よび各測定点間の距離に基づいて算出することを特徴と
する。
According to a third aspect of the present invention, there is provided a method for measuring the flatness of a sliding surface of a thrust rotary plate according to the first aspect of the present invention.
The flatness is calculated based on the amount of inclination measured by the electric level and a distance between each measurement point.

【0015】請求項3の発明に係わるスラスト回転板す
べり面の平坦度測定方法では、請求項1の発明の作用に
加え、電気水準器で測定した傾き量および各測定点間の
距離に基づいて平坦度を算出する。
According to a third aspect of the present invention, in the method for measuring the flatness of the sliding surface of the thrust rotary plate, in addition to the operation of the first aspect, based on the amount of inclination measured by the electric level and the distance between each measuring point. Calculate the flatness.

【0016】請求項4の発明に係わるスラスト回転板す
べり面の平坦度測定方法は、請求項1の発明において、
前記電気水準器による傾き量の測定にあっては、その接
触子が前記スラスト回転板すべり面に接触するように吸
着具で前記電気水準器を前記スラスト回転板すべり面に
吸着させることを特徴とする。
According to a fourth aspect of the present invention, there is provided a method for measuring the flatness of a sliding surface of a thrust rotary plate according to the first aspect of the present invention.
In the measurement of the inclination amount by the electric level, the electric level is adsorbed to the thrust rotary plate slip surface by a suction tool so that the contactor contacts the thrust rotary plate slip surface. I do.

【0017】請求項4の発明に係わるスラスト回転板す
べり面の平坦度測定方法では、請求項1の発明の作用に
加え、下向きのスラスト回転板すべり面に対しては、電
気水準器の接触子がそのスラスト回転板すべり面に接触
するように、吸着具で電気水準器をスラスト回転板すべ
り面に吸着させ、すべり面の傾き量を測定する。
According to a fourth aspect of the present invention, in the method for measuring flatness of a sliding surface of a thrust rotary plate, in addition to the operation of the first aspect, a contact of an electric level is provided for the downwardly sliding surface of the thrust rotary plate. Then, the electric level is suctioned to the sliding surface of the thrust rotating plate with a suction tool so that the sliding surface comes into contact with the sliding surface of the thrust rotating plate, and the amount of inclination of the sliding surface is measured.

【0018】請求項5の発明に係わるスラスト回転板す
べり面の平坦度測定方法は、請求項1の発明において、
前記電気水準器による傾き量の測定にあっては、前記ス
ラスト回転板すべり面に吸着する吸着具を備えた測定治
具に前記電気水準器を収納し、前記測定治具を前記スラ
スト回転板すべり面に吸着させることを特徴とする。
According to a fifth aspect of the present invention, there is provided a method for measuring the flatness of a sliding surface of a thrust rotary plate according to the first aspect of the invention.
In the measurement of the inclination amount by the electric level, the electric level is housed in a measuring jig provided with an adsorbing device that adsorbs to the sliding surface of the thrust rotary plate, and the measuring jig is moved by the thrust rotary plate sliding. It is characterized in that it is adsorbed on a surface.

【0019】請求項5の発明に係わるスラスト回転板す
べり面の平坦度測定方法では、請求項1の発明の作用に
加え、下向きのスラスト回転板すべり面に対しては、ス
ラスト回転板すべり面に吸着する吸着具を備えた測定治
具に電気水準器を収納し、その測定治具をスラスト回転
板すべり面に吸着させて、収納された電気水準器ですべ
り面の傾き量を測定する。
According to a fifth aspect of the present invention, there is provided a method for measuring the flatness of a thrust rotary plate slip surface, wherein the downward thrust rotary plate slip surface has a thrust rotary plate slip surface. The electric level is housed in a measuring jig provided with an adsorbing device for adsorbing, the measuring jig is adsorbed to the sliding surface of the thrust rotary plate, and the inclination of the sliding surface is measured by the stored electric level.

【0020】請求項6の発明に係わるスラスト回転板す
べり面の平坦度測定装置は、回転子のスラスト回転板す
べり面上の複数の測定点における水平面からの傾き量を
測定する電気水準器と、前記電気水準器で測定した前記
傾き量に基づいて前記スラスト回転板すべり面の平坦度
を求める計算機と、前記計算機で求めた平坦度を出力す
る出力装置とを備えたことを特徴とする。
A flatness measuring device for a sliding surface of a thrust rotating plate according to a sixth aspect of the present invention comprises: an electric level for measuring an inclination amount from a horizontal plane at a plurality of measurement points on the sliding surface of the thrust rotating plate; A computer for obtaining the flatness of the sliding surface of the thrust rotary plate based on the inclination amount measured by the electric level; and an output device for outputting the flatness obtained by the computer.

【0021】請求項6の発明に係わるスラスト回転板す
べり面の平坦度測定装置では、回転子のスラスト回転板
すべり面上の複数の測定点における水平面からの傾き量
を電気水準器で測定し、電気水準器で測定した傾き量に
基づいて計算機でスラスト回転板すべり面の平坦度を求
める。そして、計算機で求めた平坦度を出力装置に出力
する。
In the flatness measuring device for a sliding surface of a thrust rotating plate according to a sixth aspect of the present invention, an inclination is measured from a horizontal plane at a plurality of measurement points on the sliding surface of the thrust rotating plate by an electric level. The flatness of the sliding surface of the thrust rotary plate is determined by a computer based on the amount of tilt measured by the electric level. Then, the flatness calculated by the computer is output to the output device.

【0022】請求項7の発明に係わるスラスト回転板す
べり面の平坦度測定装置は、請求項6の発明において、
前記スラスト回転板すべり面の測定点に、前記電気水準
器を自動で移動させる移動装置を備えたことを特徴とす
る。
According to the seventh aspect of the present invention, there is provided an apparatus for measuring flatness of a sliding surface of a thrust rotary plate according to the sixth aspect of the present invention.
A moving device for automatically moving the electric level is provided at a measurement point on the sliding surface of the thrust rotary plate.

【0023】請求項7の発明に係わるスラスト回転板す
べり面の平坦度測定装置では、請求項6の発明の作用に
加え、移動装置により、スラスト回転板すべり面の測定
点に、電気水準器を自動で移動させる。これにより自動
測定を可能にする。
In the flatness measuring device for a sliding surface of a thrust rotary plate according to a seventh aspect of the present invention, in addition to the operation of the sixth aspect, an electric level is set at a measuring point of the sliding surface of the thrust rotary plate by a moving device. Move automatically. This enables automatic measurement.

【0024】請求項8の発明に係わるスラスト回転板す
べり面の平坦度測定装置は、請求項6または請求項7の
発明において、前記電気水準器は、その接触子が前記ス
ラスト回転板すべり面に接触するように前記スラスト回
転板すべり面に吸着する吸着具を備えたことを特徴とす
る。
According to the eighth aspect of the present invention, in the flatness measuring device for a sliding surface of a thrust rotating plate, in the invention of the sixth or seventh aspect, the electric level is such that a contact is provided on the sliding surface of the thrust rotating plate. It is characterized in that it is provided with a suction tool that sucks the sliding surface of the thrust rotary plate so as to make contact.

【0025】請求項8の発明に係わるスラスト回転板す
べり面の平坦度測定装置では、請求項6または請求項7
の発明の作用に加え、電気水準器は、吸着具よりスラス
ト回転板すべり面に吸着され、その接触子がスラスト回
転板すべり面に接触する。
The thrust rotary plate slip surface flatness measuring apparatus according to the eighth aspect of the present invention is the sixth or seventh aspect.
In addition to the operation of the invention, the electric level is adsorbed on the sliding surface of the thrust rotating plate by the suction tool, and the contact thereof comes into contact with the sliding surface of the thrust rotating plate.

【0026】請求項9の発明に係わるスラスト回転板す
べり面の平坦度測定装置は、請求項6乃至請求項8のい
ずれか1項の発明において、前記電気水準器は、前記ス
ラスト回転板すべり面に吸着する吸着具を備えた測定治
具に収納されたことを特徴とする。
According to a ninth aspect of the present invention, in the thrust rotary plate slip surface flatness measuring apparatus according to any one of the sixth to eighth aspects, the electric level is provided with the thrust rotary plate slip surface. Characterized in that it is housed in a measuring jig provided with an adsorbing device for adsorbing.

【0027】請求項9の発明に係わるスラスト回転板す
べり面の平坦度測定装置では、請求項6乃至請求項8の
いずれか1項の発明の作用に加え、電気水準器を収納し
た測定治具は、吸着具よりスラスト回転板すべり面に吸
着され、電気水準器は測定治具内でスラスト回転板すべ
り面の傾き量を測定する。
According to a ninth aspect of the present invention, in the flatness measuring device for a sliding surface of a thrust rotary plate, in addition to the operation of the sixth aspect, a measuring jig accommodating an electric level is provided. Is adsorbed on the sliding surface of the thrust rotating plate by the suction device, and the electric level measures the amount of inclination of the sliding surface of the thrust rotating plate in the measuring jig.

【0028】[0028]

【発明の実施の形態】以下、本発明の実施の形態を説明
する。図1は、本発明の第1の実施の形態に係わるスラ
スト回転板すべり面の平坦度測定方法の説明図である。
図1(a)は本発明の第1の実施の形態での測定手順の
説明図、図1(b)は電気水準器より得られた傾き量か
ら被測定面の平坦度を算出する算出方法の説明図であ
る。
Embodiments of the present invention will be described below. FIG. 1 is an explanatory view of a method for measuring the flatness of a sliding surface of a thrust rotary plate according to the first embodiment of the present invention.
FIG. 1A is an explanatory diagram of a measurement procedure according to the first embodiment of the present invention, and FIG. 1B is a calculation method for calculating flatness of a surface to be measured from an amount of tilt obtained from an electric level. FIG.

【0029】図1(a)に示すように、スラスト回転板
1のすべり面2上の適切な位置に測定直線3を設定し、
この測定直線3上にすべり面2の端点から順に等間隔P
で測定点N0、N1〜Nnをマーキングする。そして、測定
点N0、N1の位置に電気水準器4の接触子5が来るよう
に電気水準器4を置き、その時の電気水準器4の指示値
である傾き量G1を読み取る。次に、測定点N1、N2
おいても同様の測定を行い、これを電気水準器4が測定
点Nnに達するまで繰り返す。
As shown in FIG. 1A, a measurement straight line 3 is set at an appropriate position on the slip surface 2 of the thrust rotary plate 1,
Equal intervals P on the measurement straight line 3 from the end point of the slip surface 2 in order.
Marks the measurement points N 0 , N 1 to N n . Then, the electric level 4 is placed so that the contact 5 of the electric level 4 comes at the positions of the measurement points N 0 and N 1 , and the inclination amount G 1 , which is the indicated value of the electric level 4 at that time, is read. Next, the same measurement is performed at the measurement points N 1 and N 2 , and this is repeated until the electric level 4 reaches the measurement point Nn.

【0030】次に、電気水準器4の指示値である傾き量
kと測定点間隔Pとから各測定点間の標高差dHを求
める。測定点N0と測定点N1に電気水準器4をおいた時
の傾き量をG1、標高差をdH1として表すと、傾き量G
1が角度として得られるときには、下記の(1)式が成
立する。
Next, determine the altitude difference dH between the measuring points from the inclination amount G k is an instruction value of the electric level gauge 4 and the measurement point interval P. When the inclination level when the electric level 4 is placed between the measurement points N 0 and N 1 is represented by G 1 and the altitude difference is represented by dH 1 , the inclination amount G
When 1 is obtained as an angle, the following equation (1) holds.

【0031】dH1=P・tanG1 …(1)DH 1 = P · tanG 1 (1)

【0032】すなわち、隣り合う任意の測定点Nk-1
測定点Nkとの標高差dHkは、(2)式で示される。
That is, an altitude difference dH k between an arbitrary measuring point N k−1 and a measuring point N k adjacent to each other is expressed by the following equation (2).

【0033】dHk=P・tanGk …(2)DH k = P · tanG k (2)

【0034】そして、これら標高差dHkをすべり面2
の端から順に重ねあわせることにより、すべり面2の端
点の測定点N0と各測定点Nkとの標高差HSkが求ま
り、(3)式で表わされる。
Then, the elevation difference dH k is calculated as the slip surface 2
By the end superimposing in sequence, Motomari is altitude difference HS k of the measurement point N 0 end point of the sliding surface 2 and the measurement points N k, represented by equation (3).

【0035】[0035]

【数1】 (Equation 1)

【0036】スラスト回転板1のすべり面2の一方端点
0と他方端点Nnとの間の標高差HSnもこの(3)式
により求まるが、この標高差HSnはスラスト回転板1
のすべり面2の両端点を通る直線L2の水平面L1からの
傾きを意味するものとなる。すべり面2の平坦度は直線
2を基準とした時の各測定点の変位量として求めねば
ならないため、すべり面2の各測定点Nkにおける平坦
度HRkはこのHSn分を補正した以下の(4)式で現さ
れる。
[0036] Although also altitude difference HS n between one end point N 0 and the other end point N n of the sliding surface 2 of the thrust rotating plate 1 obtained by the equation (3), the altitude difference HS n is thrust rotating plate 1
It becomes to mean the inclination from the horizontal plane L 1 of the straight line L 2 passing through the end points of the sliding surface 2. Since the flatness of the sliding surfaces 2 must seek as a displacement amount of each measurement point of time relative to the straight line L 2, flatness HR k at each measurement point N k of the sliding surface 2 has corrected this HS n min This is expressed by the following equation (4).

【0037】 HRk=HSk−(kp/np)・HSn …(4)HR k = HS k − (kp / np) · HS n (4)

【0038】複数本の測定直線3をスラスト回転板1の
すべり面2上に設定し、上記のような測定した実測値の
処理を行うことにより、スラスト回転板1全体の平坦度
が求められる。
By setting a plurality of measurement straight lines 3 on the slip surface 2 of the thrust rotary plate 1 and processing the measured values as described above, the flatness of the entire thrust rotary plate 1 is obtained.

【0039】図2は、本発明の第1の実施の形態におけ
る電気水準器4の説明図である。図2(a)は電気水準
器4の接触子5そのものを吸着具10で構成している。
電気水準器4による傾き量Gの測定にあっては、その接
触子5が下向きのスラスト回転板すべり面2に接触する
ように、吸着具10で電気水準器4をスラスト回転板す
べり面2に吸着させる。
FIG. 2 is an explanatory diagram of the electric level 4 according to the first embodiment of the present invention. In FIG. 2A, the contact 5 itself of the electric level 4 is constituted by a suction tool 10.
In the measurement of the amount of inclination G by the electric level 4, the electric level 4 is attached to the thrust rotary plate slip surface 2 by the suction tool 10 so that the contact 5 contacts the downward thrust rotary plate slip surface 2. Adsorb.

【0040】図2(b)は吸着具10を備えた測定治具
9に電気水準器4を収納して構成している。電気水準器
4による傾き量Gの測定にあっては、測定治具9をスラ
スト回転板すべり面2に吸着させ、この場合の電気水準
器4の傾き量Gを計測する。
FIG. 2B shows a configuration in which the electric level 4 is housed in a measuring jig 9 provided with a suction tool 10. In measuring the amount of inclination G by the electric level 4, the measuring jig 9 is attracted to the sliding surface 2 of the thrust rotary plate, and the amount of inclination G of the electric level 4 in this case is measured.

【0041】このように、電気水準器4をスラスト回転
板すべり面2にマグネット等の吸着具10を用いて吸着
させるので、横向きや下向きの状態のスラスト回転板す
べり面2であってもその傾き量Gを測定できる。
As described above, since the electric level 4 is attracted to the thrust rotating plate sliding surface 2 by using the attracting tool 10 such as a magnet, even if the thrust rotating plate sliding surface 2 is in the horizontal or downward state, the inclination thereof can be reduced. The quantity G can be measured.

【0042】以上述べたように、第1の実施の形態によ
れば、ストレートエッジ18に比べ小型軽量である電気
水準器4のみの使用により平坦度の測定が可能になるた
め、測定者の省人化及び負担軽減が可能となる。また測
定作業は電気水準器4を測定点にセットするのみで、測
定値は電気水準器4の表示部に自動的に表示されるの
で、測定者の技量や癖に関わらず、安定した再現性のあ
る測定が可能になる。
As described above, according to the first embodiment, the flatness can be measured by using only the electric level 4 which is smaller and lighter than the straight edge 18, so that the measurer can be saved. Humanization and burden reduction are possible. In addition, the measurement work is performed only by setting the electric level 4 to the measuring point, and the measured value is automatically displayed on the display section of the electric level 4, so that the reproducibility is stable regardless of the skill and habit of the measurer. Measurement with a certain point becomes possible.

【0043】また、電気水準器4は狭い場所に挿入でき
るので、回転子が固定子に組み込まれた状態で測定のた
めの十分な空間が確保できない場合であっても、スラス
ト回転板1のすべり面2全体に対する測定も可能とな
る。また、電気水準器4をスラスト回転板すべり面2に
吸着具10を用いて吸着させる場合には、横向きや下向
きの状態のスラスト回転板すべり面2であってもその傾
き量Gを測定できる。
Further, since the electric level 4 can be inserted into a narrow place, even if a sufficient space for measurement cannot be secured with the rotor incorporated in the stator, the sliding of the thrust rotary plate 1 can be performed. Measurement on the entire surface 2 is also possible. Further, when the electric level 4 is sucked to the thrust rotating plate slip surface 2 by using the suction tool 10, the inclination G of the thrust rotating plate slip surface 2 in the horizontal or downward state can be measured.

【0044】スラスト回転板1のすべり面2の平坦度の
演算方法は、電気水準器4の直接の出力値である傾き量
Gと各測定点間の距離Pとから、すべり面2内のその測
定直線3の部分の断面形状における平坦度を求めるの
で、その断面形状におけるうねりの大きさやその分布状
態が把握でき、精度良く平坦度を求めることができる。
The method of calculating the flatness of the slip surface 2 of the thrust rotary plate 1 is based on the inclination amount G, which is the direct output value of the electric level 4, and the distance P between the measurement points. Since the flatness in the cross-sectional shape of the portion of the measurement straight line 3 is obtained, the magnitude of the undulation in the cross-sectional shape and the distribution thereof can be grasped, and the flatness can be obtained with high accuracy.

【0045】次に、本発明の第2の実施の形態を説明す
る。図3は本発明の第2の実施の形態に係わるスラスト
回転板すべり面の平坦度測定装置の構成図である。
Next, a second embodiment of the present invention will be described. FIG. 3 is a configuration diagram of a flatness measuring apparatus for a slip surface of a thrust rotary plate according to a second embodiment of the present invention.

【0046】スラスト回転板すべり面2上の複数の測定
点における傾き量Gは、電気水準器4で測定されケーブ
ル6を介して計算機7に入力される。この場合、赤外線
や電波等の信号に変換してワイヤレスで計算機7に入力
するようにしても良い。計算機7では、リアルタイムで
入力された傾き量Gに基づいて、スラスト回転板すべり
面2の平坦度を、(1)式〜(4)式により求める。計
算機7で求めた平坦度は出力装置8に出力され、操作員
にリアルタイムで報知する。出力装置としては表示装置
や印字装置を用いる。
The inclination amounts G at a plurality of measurement points on the sliding surface 2 of the thrust rotary plate are measured by the electric level 4 and input to the computer 7 via the cable 6. In this case, the signal may be converted into a signal such as an infrared ray or a radio wave and input to the computer 7 wirelessly. The computer 7 calculates the flatness of the sliding surface 2 of the thrust rotary plate according to the equations (1) to (4) based on the inclination G input in real time. The flatness obtained by the computer 7 is output to the output device 8 and is notified to the operator in real time. A display device or a printing device is used as the output device.

【0047】図4は、計算機7でリアルタイムにスラス
ト回転板すべり面2の平坦度を求める場合に使用される
電気水準器9の移動装置の説明図である。図4では、ス
ラスト回転板すべり面2が下向きである場合を示してい
るが、スラスト回転板すべり面2が横向きや上向きの場
合にも応用可能である。
FIG. 4 is an explanatory diagram of a moving device of the electric level 9 used when the flatness of the sliding surface 2 of the thrust rotary plate is determined in real time by the computer 7. FIG. 4 shows a case in which the thrust rotating plate sliding surface 2 faces downward. However, the present invention is also applicable to a case where the thrust rotating plate sliding surface 2 faces sideways or upward.

【0048】自走式の移動装置の台車11にはテーブル
12が設けられており、このテーブル12上に、電気水
準器4を収納した測定治具9、または吸着具10を備え
た電気水準器4を搭載する。図4では電気水準器4を収
納した測定治具9を搭載したものを示している。そし
て、すべり面2上の測定直線3に沿って、電気水準器4
の移動が可能なように台車11をセットする。
A table 12 is provided on a cart 11 of the self-propelled moving device. On this table 12, a measuring jig 9 accommodating the electric level 4 or an electric level provided with a suction tool 10 is provided. 4 is mounted. FIG. 4 shows a case where a measuring jig 9 containing the electric level 4 is mounted. Then, along the measurement straight line 3 on the slip surface 2, the electric level 4
The trolley 11 is set so that it can be moved.

【0049】次に、台車11を走行装置13により自走
させ、初めの測定点の直下に電気水準器4または測定治
具9が来るまで移動させる。電気水準器4または測定治
具9が測定点の直下に位置すると、テーブル昇降装置1
4を作動させ吸着具10がすべり面2上に接するまでテ
ーブル12を上昇させる。ここで、吸着具10を作動さ
せ測定を実施する。
Next, the carriage 11 is caused to travel by the traveling device 13 and is moved until the electric level 4 or the measuring jig 9 comes directly below the first measuring point. When the electric level 4 or the measuring jig 9 is located immediately below the measuring point, the table elevating device 1
4 is operated to raise the table 12 until the suction tool 10 comes into contact with the sliding surface 2. Here, the suction device 10 is operated to perform the measurement.

【0050】測定値は計算機7により自動で読み取り、
その測定点での測定が終了したら吸着具10を解除し、
テーブル12を下降させる。そして、走行装置13によ
り次の測定点まで台車11を移動させ、同様の動作およ
び測定を行う。これを最後の測定点まで繰り返し実施す
る。
The measured values are automatically read by the computer 7,
When the measurement at the measurement point is completed, the suction device 10 is released,
The table 12 is lowered. Then, the carriage 11 is moved by the traveling device 13 to the next measurement point, and the same operation and measurement are performed. This is repeated until the last measurement point.

【0051】この場合の測定値は、計算機7による自動
でなく人間が読み取るようにしても良い。つまり、電気
水準器4を計算機7に接続しない移動装置を使用するよ
うにしても良い。
The measured value in this case may be read by a person instead of automatically by the computer 7. That is, a moving device that does not connect the electric level 4 to the computer 7 may be used.

【0052】以上述べたように、第2の実施の形態によ
れば、計算機7に電気水準器4を接続した場合には、測
定者は電気水準器4の表示値の読み取り、記録用紙への
書き込み及び表示値から平坦度を算出する演算作業をす
る必要がなくなるため、その過程で生じうるヒューマン
エラーを排除することができる。また測定作業の効率を
上げることが可能である。
As described above, according to the second embodiment, when the electric level 4 is connected to the computer 7, the measurer reads the display value of the electric level 4 and writes it on the recording paper. Since it is not necessary to perform an operation for calculating the flatness from the written and displayed values, it is possible to eliminate a human error that may occur in the process. In addition, it is possible to increase the efficiency of the measurement operation.

【0053】また、自走式の移動装置を用いるので、全
測定作業の自動化および遠隔操作が可能となり、人間系
での測定が困難な狭い場所または危険な場所での測定も
可能となる。更に、このような自走式の移動装置を回転
子スラスト軸受け装置内に設置することにより、スラス
ト軸受組み立て状態においても測定が可能になり、測定
のためのスラスト軸受け分解作業等を不要にすることが
できる。
Further, since the self-propelled moving device is used, all the measuring operations can be automated and remote-controlled, and the measurement can be performed in a narrow place or a dangerous place where it is difficult to perform the measurement in the human system. Furthermore, by installing such a self-propelled moving device in the rotor thrust bearing device, measurement can be performed even in the assembled state of the thrust bearing, and the thrust bearing disassembly work for the measurement is not required. Can be.

【0054】図5は、本発明のスラスト回転板すべり面
の平坦度測定方法を、スラスト回転板の回転子シャフト
への締め付け作業時に適用する場合の説明図である。ス
ラスト回転板1は回転子シャフト15に締め付けボルト
16によって固定されるが、その締め付け力が適正でな
いと、すべり面2の正しい形状2aが得られない。すな
わち、締め付け力が不足である場合、すべり面は図5中
の2bのような形状になり、締め付け力が過大であると
図5中の2cのような形状となる。
FIG. 5 is an explanatory view of a case where the method for measuring the flatness of the sliding surface of the thrust rotary plate according to the present invention is applied to the operation of fastening the thrust rotary plate to the rotor shaft. The thrust rotary plate 1 is fixed to the rotor shaft 15 by tightening bolts 16. However, if the tightening force is not appropriate, the correct shape 2a of the sliding surface 2 cannot be obtained. That is, when the tightening force is insufficient, the slip surface has a shape like 2b in FIG. 5, and when the tightening force is excessive, it has a shape like 2c in FIG.

【0055】この締め付けボルト締め付け作業時におい
て、本発明の平坦度測定方法を適用し測定する。これに
より、すべり面2の形状が正しい形状2aであるか否か
が分かり、ボルト締め付け力が適正か、不足であるか過
大であるかを判定することができる。従って、締め付け
作業者側に適切な締め付け力の大きさを指示することが
できるため、スラスト回転板1の締め付け作業の正確な
施工が可能となり、また本発明の平坦度測定方法を締め
付け力管理の手段として使うこともできる。
During the tightening operation of the tightening bolts, the flatness measuring method of the present invention is applied to measure. Thereby, it is possible to know whether or not the shape of the slip surface 2 is the correct shape 2a, and it is possible to determine whether the bolt tightening force is appropriate, insufficient, or excessive. Therefore, since an appropriate magnitude of the tightening force can be instructed to the tightening operator side, it is possible to accurately perform the tightening operation of the thrust rotary plate 1, and the flatness measuring method of the present invention is used for controlling the tightening force. It can be used as a means.

【0056】[0056]

【発明の効果】以上述べたように、本発明によれば、大
型回転機械のスラスト回転板すべり面の平坦度の測定に
あたり、ストレートエッジに比べ小型軽量である電気水
準器を使用するので、測定者の省人化や負担削減が可能
となり、作業の安全性向上が可能となる。また、測定作
業が簡単であるため、測定者の技量や癖に測定結果が影
響を受け難く、精度や再現性が従来法に比べ改善され
る。
As described above, according to the present invention, the flatness of the sliding surface of the thrust rotary plate of a large rotary machine is measured using an electric level which is smaller and lighter than a straight edge. This makes it possible to save labor and reduce the burden on workers, and to improve work safety. Further, since the measurement operation is simple, the measurement result is hardly affected by the skill and habit of the measurer, and the accuracy and reproducibility are improved as compared with the conventional method.

【0057】更に、適切な治具や補助具を用いることに
より、スラスト回転板が如何なる姿勢をとっていても測
定が可能になる。
Further, by using an appropriate jig or auxiliary tool, measurement can be performed regardless of the posture of the thrust rotary plate.

【0058】電気水準器の測定値は直接電気信号の形で
出力されるので、測定の自動化も容易であり、電気水準
器の移動装置と組み合わせて遠隔操作により遠隔測定も
可能となる。従って、人間による測定が困難な狭い場所
または危険な場所での測定もできる。更に、締め付けボ
ルト締め付け作業時に平坦度測定を行うことにより、ボ
ルト締め付け力が適正かどうかを判定することでき、締
め付け力の管理が可能となる。
Since the measured value of the electric level is directly output in the form of an electric signal, the measurement can be easily automated, and the remote measurement can be performed by remote control in combination with the moving device of the electric level. Therefore, measurement can be performed in a narrow place or a dangerous place where it is difficult for a human to measure. Further, by performing the flatness measurement during the tightening operation of the tightening bolt, it is possible to determine whether the bolt tightening force is appropriate, and it is possible to manage the tightening force.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態に係わるスラスト回
転板すべり面の平坦度測定方法の説明図。
FIG. 1 is an explanatory diagram of a method for measuring the flatness of a sliding surface of a thrust rotating plate according to a first embodiment of the present invention.

【図2】本発明の第1の実施の形態における電気水準器
の説明図。
FIG. 2 is an explanatory diagram of an electric level according to the first embodiment of the present invention.

【図3】本発明の第2の実施の形態に係わるスラスト回
転板すべり面の平坦度測定装置の構成図。
FIG. 3 is a configuration diagram of a flatness measuring device for a sliding surface of a thrust rotary plate according to a second embodiment of the present invention.

【図4】本発明の第2の実施の形態における計算機でリ
アルタイムにスラスト回転板すべり面の平坦度を求める
場合に使用される電気水準器の移動装置の説明図。
FIG. 4 is an explanatory diagram of a moving device of an electric level used when a flatness of a sliding surface of a thrust rotary plate is determined in real time by a computer according to a second embodiment of the present invention.

【図5】本発明のスラスト回転板すべり面の平坦度測定
方法をスラスト回転板の回転子シャフトへの締め付け作
業時に適用する場合の説明図。
FIG. 5 is an explanatory diagram of a case where the method for measuring the flatness of a slip surface of a thrust rotary plate according to the present invention is applied to a work of fastening the thrust rotary plate to a rotor shaft.

【図6】従来のスラスト回転板すべり面の平坦度測定方
法の説明図。
FIG. 6 is an explanatory diagram of a conventional method for measuring the flatness of a slip surface of a thrust rotary plate.

【符号の説明】[Explanation of symbols]

1 スラスト回転板 2 すべり面 3 測定直線 4 電気水準器 5 接触子 6 信号ケーブル 7 計算機 8 出力装置 9 測定治具 10 吸着具 11 測定台車 12 測定テーブル 13 台車移動装置 14 テーブル昇降装置 15 回転子シャフト 16 締め付けボルト 17 ブロックゲージ 18 ストレートエッジ 19 シリンダーゲージ 20 マグネットブロック DESCRIPTION OF SYMBOLS 1 Thrust rotating plate 2 Sliding surface 3 Measurement straight line 4 Electric level 5 Contactor 6 Signal cable 7 Calculator 8 Output device 9 Measurement jig 10 Suction tool 11 Measurement trolley 12 Measurement table 13 Dolly moving device 14 Table elevating device 15 Rotor shaft 16 Tightening bolt 17 Block gauge 18 Straight edge 19 Cylinder gauge 20 Magnet block

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F062 AA41 AA55 AA71 BB14 BC31 CC22 CC23 CC30 GG24 GG25 GG31 LL07 LL12 2F063 AA14 AA31 AA45 BA21 BB05 BC05 BD11 CA11 CA13 JA05 MA04 MA06  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F062 AA41 AA55 AA71 BB14 BC31 CC22 CC23 CC30 GG24 GG25 GG31 LL07 LL12 2F063 AA14 AA31 AA45 BA21 BB05 BC05 BD11 CA11 CA13 JA05 MA04 MA06

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 回転子のスラスト回転板すべり面上に測
定直線を定め、その測定直線上の複数の測定点において
電気水準器によりその水平面からの傾き量を測定し、前
記傾き量に基づいて前記スラスト回転板すべり面の前記
測定直線部分での断面形状における平坦度を求めること
を特徴とするスラスト回転板すべり面の平坦度測定方
法。
1. A measurement straight line is defined on a sliding surface of a thrust rotating plate of a rotor, and at a plurality of measurement points on the measurement straight line, an inclination level from a horizontal plane is measured by an electric level, and based on the inclination amount, A flatness measurement method for a slip surface of a thrust rotary plate, wherein flatness in a cross-sectional shape of the slip surface of the thrust rotary plate at the measurement straight line portion is obtained.
【請求項2】 前記スラスト回転板すべり面上に複数本
の前記測定直線を設定し、前記スラスト回転板すべり面
全体の平坦度を求めることを特徴とする請求項1に記載
のスラスト回転板すべり面の平坦度測定方法。
2. The thrust rotary plate slip according to claim 1, wherein a plurality of the measurement straight lines are set on the thrust rotary plate slip surface, and the flatness of the entire thrust rotary plate slip surface is determined. Surface flatness measurement method.
【請求項3】 前記平坦度は、前記電気水準器で測定し
た前記傾き量および各測定点間の距離に基づいて算出す
ることを特徴とする請求項1に記載のスラスト回転板す
べり面の平坦度測定方法。
3. The flatness of the sliding surface of the thrust rotary plate according to claim 1, wherein the flatness is calculated based on the amount of inclination measured by the electric level and a distance between each measurement point. Degree measurement method.
【請求項4】 前記電気水準器による傾き量の測定にあ
っては、その接触子が前記スラスト回転板すべり面に接
触するように吸着具で前記電気水準器を前記スラスト回
転板すべり面に吸着させることを特徴とする請求項1に
記載のスラスト回転板すべり面の平坦度測定方法。
4. A method for measuring the amount of tilt by the electric level, wherein the electric level is sucked to the sliding surface of the thrust rotating plate by a suction tool such that a contact thereof comes into contact with the sliding surface of the thrust rotating plate. 2. The method for measuring flatness of a sliding surface of a thrust rotary plate according to claim 1, wherein:
【請求項5】 前記電気水準器による傾き量の測定にあ
っては、前記スラスト回転板すべり面に吸着する吸着具
を備えた測定治具に前記電気水準器を収納し、前記測定
治具を前記スラスト回転板すべり面に吸着させることを
特徴とする請求項1に記載のスラスト回転板すべり面の
平坦度測定方法。
5. In the measurement of the amount of inclination by the electric level, the electric level is housed in a measuring jig provided with an adsorbing device for adsorbing to the sliding surface of the thrust rotary plate, and the measuring jig is mounted. The method for measuring flatness of a slip surface of a thrust rotating plate according to claim 1, wherein the flat surface is suctioned to the slip surface of the thrust rotating plate.
【請求項6】 回転子のスラスト回転板すべり面上の複
数の測定点における水平面からの傾き量を測定する電気
水準器と、前記電気水準器で測定した前記傾き量に基づ
いて前記スラスト回転板すべり面の平坦度を求める計算
機と、前記計算機で求めた平坦度を出力する出力装置と
を備えたことを特徴とするスラスト回転板すべり面の平
坦度測定装置。
6. An electric level for measuring inclination amounts from a horizontal plane at a plurality of measurement points on a sliding surface of a thrust rotating plate of a rotor, and the thrust rotating plate based on the inclination amounts measured by the electric level. A flatness measuring apparatus for a slip surface of a thrust rotary plate, comprising: a calculator for determining the flatness of a slip surface; and an output device for outputting the flatness determined by the computer.
【請求項7】 前記スラスト回転板すべり面の測定点
に、前記電気水準器を自動で移動させる移動装置を備え
たことを特徴とする請求項6に記載のスラスト回転板す
べり面の平坦度測定装置。
7. The flatness measurement of the thrust rotary plate slip surface according to claim 6, further comprising a moving device for automatically moving the electric level at a measurement point of the thrust rotary plate slip surface. apparatus.
【請求項8】 前記電気水準器は、その接触子が前記ス
ラスト回転板すべり面に接触するように前記スラスト回
転板すべり面に吸着する吸着具を備えたことを特徴とす
る請求項6または請求項7に記載のスラスト回転板すべ
り面の平坦度測定装置。
8. The electric level according to claim 6, wherein the electric level includes an adsorbing device for adsorbing the thrust rotary plate slip surface so that a contact thereof contacts the thrust rotary plate slip surface. Item 7. A flatness measuring device for a sliding surface of a thrust rotary plate according to item 7.
【請求項9】 前記電気水準器は、前記スラスト回転板
すべり面に吸着する吸着具を備えた測定治具に収納され
たことを特徴とする請求項6乃至請求項8のいずれか1
項に記載のスラスト回転板すべり面の平坦度測定装置。
9. The measuring device according to claim 6, wherein the electric level is housed in a measuring jig provided with an adsorbing device for adsorbing the sliding surface of the thrust rotary plate.
Item 3. The flatness measuring device for a sliding surface of a thrust rotary plate according to the above item.
JP11113244A 1999-04-21 1999-04-21 Flatness measuring method and device of sliding surface of thrust rotary plate Pending JP2000304501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11113244A JP2000304501A (en) 1999-04-21 1999-04-21 Flatness measuring method and device of sliding surface of thrust rotary plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11113244A JP2000304501A (en) 1999-04-21 1999-04-21 Flatness measuring method and device of sliding surface of thrust rotary plate

Publications (1)

Publication Number Publication Date
JP2000304501A true JP2000304501A (en) 2000-11-02

Family

ID=14607234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11113244A Pending JP2000304501A (en) 1999-04-21 1999-04-21 Flatness measuring method and device of sliding surface of thrust rotary plate

Country Status (1)

Country Link
JP (1) JP2000304501A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113295077A (en) * 2017-03-26 2021-08-24 株式会社阿迪泰克工程 Flatness measuring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113295077A (en) * 2017-03-26 2021-08-24 株式会社阿迪泰克工程 Flatness measuring method
CN113295077B (en) * 2017-03-26 2023-09-12 株式会社阿迪泰克工程 Flatness measuring method

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