JP2000302549A - Piezoelectric porcelain composition - Google Patents

Piezoelectric porcelain composition

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Publication number
JP2000302549A
JP2000302549A JP11103599A JP10359999A JP2000302549A JP 2000302549 A JP2000302549 A JP 2000302549A JP 11103599 A JP11103599 A JP 11103599A JP 10359999 A JP10359999 A JP 10359999A JP 2000302549 A JP2000302549 A JP 2000302549A
Authority
JP
Japan
Prior art keywords
lead
piezoelectric ceramic
ceramic composition
niobate
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11103599A
Other languages
Japanese (ja)
Inventor
Junji Kawachi
純二 河内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11103599A priority Critical patent/JP2000302549A/en
Publication of JP2000302549A publication Critical patent/JP2000302549A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric porcelain composition which is a Pb- piezoelectric porcelain composition containing lead iron-niobate and which is capable of being sintered at low temp. and is excellent in piezoelectric characteristics. SOLUTION: At least one element selected from the group of zinc, nickel, lithium and lead is added in the form of oxide or other compounds in a specified amount in order to sinter a Pb-piezoelectric porcelain composition containing lead iron-niobate at low temp and to improve piezoelectric characteristics. Further, at least one element of chromium and cobalt is added in the form of oxide or other compounds in the specified amount in order to sinter the Pb-piezoelectric porcelain composition containing lead ironniobate at low temp and to improve high temp. durability.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は圧電磁器組成物に関
するものである。
TECHNICAL FIELD The present invention relates to a piezoelectric ceramic composition.

【0002】[0002]

【従来の技術】鉄ニオブ酸、チタン酸、ジルコン酸鉛系
組成からなる圧電磁器組成物は、電気機械結合係数が大
きいことは知られており、その最適焼結温度は1200
℃以上の温度を必要としていた。
2. Description of the Related Art It is known that a piezoelectric ceramic composition comprising a composition of iron niobate, titanate and lead zirconate has a large electromechanical coupling coefficient, and its optimum sintering temperature is 1200.
A temperature of at least ℃ was required.

【0003】[0003]

【発明が解決しようとする課題】鉄ニオブ酸、チタン
酸、ジルコン酸鉛系圧電磁器組成物は、1200℃以上
の温度で焼成すると主成分の酸化鉛の蒸発が激しく、こ
れを防止するためには密閉度の高い高品質のサヤ内で鉛
雰囲気を制御しながら焼成する必要がある。このため製
造工程が複雑になると共に、焼成に用いるサヤの寿命が
短く製造コストがアップするという問題点があった。
又、焼結体内に内部電極が形成された積層タイプ圧電磁
器材を前記組成物で作成する場合、その焼結温度が高い
ため、内部電極材料に高融点の貴金属を用いる必要もあ
った。
When the piezoelectric ceramic composition based on iron niobate, titanic acid and lead zirconate is fired at a temperature of 1200 ° C. or more, the lead oxide as a main component evaporates violently. Needs to be fired in a high-quality sheath with a high degree of sealing while controlling the lead atmosphere. For this reason, the manufacturing process becomes complicated, and there is a problem that the life of the sheath used for firing is short and the manufacturing cost is increased.
Further, when a laminated piezoelectric ceramic material having an internal electrode formed in a sintered body is made of the above composition, the sintering temperature is high, so that it was necessary to use a high melting point noble metal as the internal electrode material.

【0004】本発明は比較的低い温度での焼成において
も十分に焼結反応が行われ、緻密で、圧電特性の優れた
鉄ニオブ酸、チタン酸、ジルコン酸鉛系の圧電磁器組成
物を提供することを目的とするものである。
The present invention provides a piezoelectric ceramic composition based on iron niobate, titanic acid, and lead zirconate, which is dense and has excellent piezoelectric properties, in which the sintering reaction is sufficiently performed even when firing at a relatively low temperature. It is intended to do so.

【0005】[0005]

【課題を解決するための手段】前記課題を解決するため
に本発明は、鉄ニオブ酸鉛を含む圧電磁器組成物に、亜
鉛、ニッケル、リチウム、鉛からなる群から選ばれた少
なくとも一つの元素を添加することにより、従来の焼成
温度より低い温度で焼成を行っても緻密で、優れた圧電
特性を有する焼結体が得られ、所期の目的を達成するこ
とができるものである。
According to the present invention, there is provided a piezoelectric ceramic composition containing lead iron niobate comprising at least one element selected from the group consisting of zinc, nickel, lithium and lead. By adding sintering, a dense sintered body having excellent piezoelectric properties can be obtained even when firing is performed at a temperature lower than the conventional firing temperature, and the intended purpose can be achieved.

【0006】[0006]

【発明の実施の形態】本発明の請求項1に記載の発明
は、鉄ニオブ酸鉛を含む鉛系圧電磁器組成物に、亜鉛、
ニッケル、リチウム、鉛の群から選ばれた少なくとも一
つの元素を酸化物又はその他の化合物の状態で添加した
圧電磁器組成物であり、圧電磁器の焼結助材として効果
の大きい亜鉛、ニッケル、リチウム、鉛を添加すること
により、鉄ニオブ酸鉛を含む鉛系圧電磁器組成物の焼結
温度を大幅に低下することができるという作用を有する
ものである。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention provides a lead-based piezoelectric ceramic composition containing lead iron niobate, which comprises zinc,
Nickel, lithium, a piezoelectric ceramic composition in which at least one element selected from the group of lead is added in the form of an oxide or other compound, zinc, nickel, lithium, which is highly effective as a sintering aid for the piezoelectric ceramic By adding lead, the sintering temperature of a lead-based piezoelectric ceramic composition containing lead iron niobate can be significantly reduced.

【0007】本発明の請求項2に記載の発明は、鉄ニオ
ブ酸鉛の含有量を0.01〜0.10モルの範囲とした
請求項1に記載の圧電磁器組成物であり、鉛系圧電磁器
において大きな電気機械結合係数が得られる鉄ニオブ酸
鉛の適量範囲を規定したものである。
According to a second aspect of the present invention, there is provided the piezoelectric ceramic composition according to the first aspect, wherein the content of lead iron niobate is in the range of 0.01 to 0.10 mol. It defines an appropriate amount range of lead iron niobate from which a large electromechanical coupling coefficient can be obtained in a piezoelectric ceramic.

【0008】本発明の請求項3に記載の発明は、亜鉛及
びニッケルをそれぞれZnO、NiOに換算して0.1
〜2重量%の、リチウムをLi2CO3に換算して0.1
〜1.5重量%の重量範囲で少なくとも一つを添加した
請求項1に記載の圧電磁器組成物であり、鉄ニオブ酸鉛
を含む鉛系圧電磁器組成物に効果的に作用し焼結温度を
低下させる亜鉛、ニッケル、リチウムの最適添加量を規
定したものである。
According to a third aspect of the present invention, zinc and nickel are converted to ZnO and NiO respectively by 0.1%.
22% by weight of lithium converted to Li 2 CO 3 of 0.1
2. The piezoelectric ceramic composition according to claim 1, wherein at least one is added in a weight range of 1.5 to 1.5% by weight, which effectively acts on a lead-based piezoelectric ceramic composition containing lead iron niobate and has a sintering temperature. The optimum amounts of zinc, nickel, and lithium that reduce the amount of zinc are specified.

【0009】本発明の請求項4に記載の発明は、鉛をP
bOに換算して化学量論に規定した量より更に0.5〜
5重量%過剰に添加した請求項1または請求項2に記載
の圧電磁器組成物であり、鉄ニオブ酸鉛を含む鉛系圧電
磁器組成物において効果的に作用し焼結温度を低下させ
る過剰鉛の最適添加量を規定したものである。
According to the invention of claim 4 of the present invention, lead is converted to P
0.5 to more than the amount specified in stoichiometry in terms of bO
3. The piezoelectric ceramic composition according to claim 1 or 2, further comprising 5% by weight of excess lead, which works effectively in a lead-based piezoelectric ceramic composition containing lead iron niobate to lower the sintering temperature. Is specified.

【0010】本発明の請求項5に記載の発明は、クロム
またはコバルトの少なくとも一つを添加した請求項1か
ら請求項4のいずれか一つに記載の圧電磁器組成物であ
り、クロム、コバルトを添加することにより比較的温度
の高い環境下での使用にも耐えられる特性の高温劣化性
能を改善することができるという作用を有するものであ
る。
According to a fifth aspect of the present invention, there is provided the piezoelectric ceramic composition according to any one of the first to fourth aspects, wherein at least one of chromium and cobalt is added. Has the effect of improving the high-temperature deterioration performance of the characteristics that can withstand use in a relatively high temperature environment.

【0011】本発明の請求項6に記載の発明は、クロム
またはコバルトをそれぞれCr23、Co34に換算し
て0.002〜0.5重量%の重量範囲で少なくとも一
つを添加した請求項5に記載の圧電磁器組成物であり、
鉄ニオブ酸鉛を含む鉛系圧電磁器組成物に効果的に作用
し高温での電気特性の劣化を防止することのできる最適
添加量を規定したものである。
The invention according to claim 6 of the present invention is characterized in that at least one of chromium and cobalt is contained in a weight range of 0.002 to 0.5% by weight in terms of Cr 2 O 3 and Co 3 O 4 respectively. The piezoelectric ceramic composition according to claim 5, which has been added,
It defines the optimum amount of addition that can effectively act on a lead-based piezoelectric ceramic composition containing lead iron niobate and prevent deterioration of electrical characteristics at high temperatures.

【0012】以下、本発明の一実施の形態について説明
する。
An embodiment of the present invention will be described below.

【0013】出発原料として、高純度のPbO、TiO
2、ZrO2、MgO、Nb25、NiO、ZnO、Fe
23、Cr23、Co34及びLi2CO3を用い(表
1)及び(表2)に示す組成となるように、それぞれを
秤量、混合した後、混合粉末を900℃の温度で2時間
仮焼を行った。
As starting materials, high-purity PbO, TiO
2 , ZrO 2 , MgO, Nb 2 O 5 , NiO, ZnO, Fe
After weighing and mixing 2 O 3 , Cr 2 O 3 , Co 3 O 4 and Li 2 CO 3 so as to have the compositions shown in (Table 1) and (Table 2), the mixed powder was heated at 900 ° C. For 2 hours.

【0014】[0014]

【表1】 [Table 1]

【0015】[0015]

【表2】 [Table 2]

【0016】次に仮焼した材料を、ボールミルで湿式粉
砕後、乾燥を行い、この圧電磁器材料粉末にバインダー
として5%溶液のポリビニールアルコールを7%加え造
粒を行う。
Next, the calcined material is wet-pulverized by a ball mill and then dried, and 7% of a 5% solution of polyvinyl alcohol is added as a binder to the piezoelectric ceramic material powder to perform granulation.

【0017】次いで、造粒粉末を1000kg/cm2の形
成圧力で直径20mm、厚さ1.6mmの円板を成形した
後、900〜1300℃の範囲の各温度で焼成を行っ
た。それぞれの組成において、焼結密度が最大となった
焼成温度及びその密度及び焼結密度が最大になった各焼
成温度の試料を厚さ1mmに研磨を行い、その両面に電極
を付与した後、30℃のシリコンオイル中で3kV/mmの
電圧を印加し分極を行い、得られた圧電磁器材の比誘電
率、電気機械結合係数を測定しその結果を併せて(表
1)に示した。更に、高温耐久性の評価として各試料を
110℃の恒温槽中に30分間放置した後、室温に冷却
し再び電気機械結合係数の測定を行い、その低下率
(%)を算出し(表2)に示した。尚、(表1)、(表
2)中のPTはチタン酸鉛(PbTiO3)、PZはジ
ルコン酸鉛(PbZrO3)、PFNは鉄、ニオブ酸鉛
(Pb(Fe1/3 Nb2/3)O3)、PNNはニッケル、
ニオブ酸鉛(Pb(Ni1/3 Nb2/3)O3)、PZNは
亜鉛、ニオブ酸鉛(Pb(Zn1/3 Nb 2/3)O3)、P
MNはマグネシュウム、ニオブ酸鉛(Pb(Mg1/3
2/3)O3)を省略記号で示したものである。
Next, the granulated powder is weighed at 1000 kg / cm.TwoForm of
A disk having a diameter of 20 mm and a thickness of 1.6 mm was formed by forming pressure.
After that, firing is performed at each temperature in the range of 900 to 1300 ° C.
Was. The maximum sintering density was obtained for each composition
Each firing at which the firing temperature and its density and sintered density are maximized
The sample at the growth temperature is polished to a thickness of 1 mm, and electrodes are
After applying 3kV / mm in 30 ° C silicone oil
Polarization is performed by applying voltage, and the relative dielectric constant of the obtained piezoelectric ceramic material
Rate and electromechanical coupling coefficient are measured and the results are combined (see Table
This is shown in 1). In addition, each sample was evaluated for high-temperature durability.
After leaving in a thermostat at 110 ° C for 30 minutes, cool to room temperature
Measurement of the electromechanical coupling coefficient
(%) Was calculated and shown in (Table 2). In addition, (Table 1), (Table
PT in 2) is lead titanate (PbTiO)Three), PZ
Lead ruconate (PbZrOThree), PFN is iron, lead niobate
(Pb (Fe1/3Nb2/3) OThree), PNN is nickel,
Lead niobate (Pb (Ni1/3Nb2/3) OThree), PZN
Zinc, lead niobate (Pb (Zn1/3Nb 2/3) OThree), P
MN is magnesium, lead niobate (Pb (Mg1/3N
b2/3) OThree) Are indicated by abbreviations.

【0018】(表1)、(表2)に示すように、鉄、ニ
オブ酸鉛が0.01〜0.10モルの範囲で、本発明の
添加物を含まない組成の圧電磁器組成物No.1、1
2、14、16、18及び20は高い焼結密度、電気機
械結合係数を得るためには何れも1200℃以上の焼成
が必要であるのに対し、本発明の添加物を規定量添加し
た圧電磁器組成物No.2〜11、13、15、17、
19、21、24、25、27、28、30、31、3
3、34、36〜39、41〜43及び45は1075
〜1175℃の比較的低い温度での焼結が可能となり、
しかも比誘電率、電気機械結合係数共優れたものとな
る。
As shown in (Table 1) and (Table 2), when the content of iron and lead niobate is in the range of 0.01 to 0.10 mol, the piezoelectric ceramic composition No. .1, 1
2, 14, 16, 18, and 20 all require firing at 1200 ° C. or higher in order to obtain a high sintered density and an electromechanical coupling coefficient. Porcelain composition Nos. 2 to 11, 13, 15, 17,
19, 21, 24, 25, 27, 28, 30, 31, 3,
3, 34, 36 to 39, 41 to 43 and 45 are 1075
Sintering at a relatively low temperature of ~ 1175 ° C is possible,
Moreover, both the relative permittivity and the electromechanical coupling coefficient are excellent.

【0019】しかしながら鉄、ニオブ酸鉛が0.01〜
0.10モルの範囲においては焼結温度を大幅に低下さ
せることができるものの、本発明の添加物を規定量より
多く加えたNo.26、29は焼結体粒子が異常成長し
磁器の抗折強度は極端に低下し、No.32、35は焼
結性が悪く電気機械結合係数が急激に低下する。一方、
鉄、ニオブ酸鉛が0.01重量%より少ないNo.4
6、47は焼結温度が低く比誘電率、電気機械結合係数
も優れたものであるが、耐熱性が悪いと言う欠点があ
る。また鉄、ニオブ酸鉛が0.10重量%より多いN
o.22は1200℃以上の焼結温度を必要とし、No.
23の場合は焼結密度が低く実用に値しない。
However, the content of iron and lead niobate is 0.01 to
In the range of 0.10 mol, although the sintering temperature can be greatly lowered, Nos. 26 and 29 in which the additive of the present invention is added in a larger amount than the specified amount show that the sintered particles grow abnormally and the resistance of the porcelain increases. The bending strength is extremely reduced, and Nos. 32 and 35 have poor sinterability and the electromechanical coupling coefficient is sharply reduced. on the other hand,
No. 4 containing less than 0.01% by weight of iron and lead niobate
Nos. 6 and 47 have low sintering temperatures and excellent relative dielectric constants and electromechanical coupling coefficients, but have the disadvantage of poor heat resistance. In addition, iron and lead niobate contain more than 0.10% by weight of N.
No. 22 requires a sintering temperature of 1200 ° C. or more.
In the case of No. 23, the sintered density is low and is not practical.

【0020】従って、低温焼結が可能で、しかも実用に
値する優れた圧電磁器材を得るためには、鉄、ニオブ酸
鉛を含む鉛系圧電磁器組成物においては鉄、ニオブ酸鉛
の含有量を0.01〜0.10モルの範囲とし、更に亜
鉛:0.1〜2重量%、ニッケル:0.1〜2重量%、
リチウム:0.1〜1.5重量%、鉛:0.5〜5重量
%範囲の添加物を少なくとも一つ以上を基本圧電磁器組
成物に添加することが、また、クロムあるいはコバルト
の規定量の添加は耐熱性を向上させるが、両者とも0.
5重量%より多いNo.40、44は電気機械結合係数
が急激に低下するため添加量を0.002〜0.5重量
%の範囲に限定する必要があることが明らかとなる。
Therefore, in order to obtain an excellent piezoelectric ceramic material which can be sintered at a low temperature and is practically useful, the lead-based piezoelectric ceramic composition containing iron and lead niobate requires a high content of iron and lead niobate. In the range of 0.01 to 0.10 mol, zinc: 0.1 to 2% by weight, nickel: 0.1 to 2% by weight,
Lithium: 0.1 to 1.5% by weight, Lead: 0.5 to 5% by weight, at least one additive is added to the basic piezoelectric ceramic composition, and the specified amount of chromium or cobalt is added. Although the addition of N improves heat resistance, both of them add 0.1%.
Nos. 40 and 44 with more than 5% by weight have a sharp decrease in the electromechanical coupling coefficient, so it is clear that the amount of addition must be limited to the range of 0.002 to 0.5% by weight.

【0021】[0021]

【発明の効果】以上本発明の鉄ニオブ酸鉛を含む鉛系の
圧電磁器組成物においては鉄、ニオブ酸鉛の含有量を
0.01〜0.10モルの範囲とし、更に亜鉛を酸化物
に換算し0.1〜2重量%、ニッケルを酸化物に換算し
0.1〜2重量%、リチウムを炭酸化物に換算し0.1
〜1.5重量%、鉛を酸化物に換算し0.5〜5重量%
範囲の添加物を少なくとも一つ以上を加えることにより
低温焼結が可能となり、酸化鉛の蒸発によるサヤ寿命の
低下を防止し、製造工程の簡素化が可能となると共に、
電極と一体焼結を行う積層体の電極成分の卑金属化も達
成でき、しかも比誘電率、電気機械結合係数の優れた圧
電磁器組成物を得ることが可能となる。皿にはクロムを
酸化物に換算し0.02〜0.5重量%、コバルトを酸
化物に換算し0.02〜0.5重量%の少なくとも一方
を加えることにより耐熱性の優れた圧電磁器組成物を提
供することが可能となる。
As described above, in the lead-based piezoelectric ceramic composition containing lead iron niobate according to the present invention, the content of iron and lead niobate is in the range of 0.01 to 0.10 mol, and zinc is added to the oxide. 0.1 to 2% by weight in terms of nickel, 0.1 to 2% by weight in terms of nickel, and 0.1 to 2% by weight in terms of lithium.
0.5 to 5% by weight, converted from lead to oxide
By adding at least one additive in the range, low-temperature sintering becomes possible, preventing a reduction in sheath life due to evaporation of lead oxide, and simplifying the manufacturing process,
It is also possible to achieve the base metalization of the electrode component of the laminate that is integrally sintered with the electrode, and to obtain a piezoelectric ceramic composition having an excellent relative dielectric constant and an excellent electromechanical coupling coefficient. Piezoelectric ceramics with excellent heat resistance by adding at least one of 0.02 to 0.5% by weight of chrome converted to oxide and 0.02 to 0.5% by weight of cobalt converted to oxide. It is possible to provide a composition.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 鉄ニオブ酸鉛を含む鉛系圧電磁器組成物
に、亜鉛、ニッケル、リチウム、鉛の群から選ばれた少
なくとも一つの元素を酸化物又はその他の化合物の状態
で添加した圧電磁器組成物。
1. A piezoelectric ceramic comprising at least one element selected from the group consisting of zinc, nickel, lithium and lead added to a lead-based piezoelectric ceramic composition containing lead iron niobate in the form of an oxide or another compound. Composition.
【請求項2】 鉄ニオブ酸鉛の含有量を0.01〜0.
10モルの範囲とした請求項1に記載の圧電磁器組成
物。
2. The content of lead iron niobate in the range of 0.01 to 0.1.
The piezoelectric ceramic composition according to claim 1, wherein the composition is in a range of 10 mol.
【請求項3】 亜鉛及びニッケルをそれぞれZnO、N
iOに換算して0.1〜2重量%の、リチウムをLi2
CO3に換算して0.1〜1.5重量%の重量範囲で少
なくとも一つを添加した請求項1に記載の圧電磁器組成
物。
3. Zinc and nickel are respectively ZnO, N
0.1 to 2 % by weight of lithium in terms of iO is converted to Li 2
The piezoelectric ceramic composition according to claim 1 prepared by adding at least one weight range of 0.1 to 1.5 wt% in terms of CO 3.
【請求項4】 鉛をPbOに換算して化学量論で規定さ
れる量より更に0.5〜5重量%過剰に添加した請求項
1または請求項2に記載の圧電磁器組成物。
4. The piezoelectric ceramic composition according to claim 1, wherein lead is added in an amount of 0.5 to 5% by weight in excess of the amount specified in stoichiometry in terms of PbO.
【請求項5】 クロムまたはコバルトの少なくとも一つ
を添加した請求項1から請求項4のいずれか1つに記載
の圧電磁器組成物。
5. The piezoelectric ceramic composition according to claim 1, wherein at least one of chromium and cobalt is added.
【請求項6】 クロムまたはコバルトをそれぞれCr2
3、Co34に換算して0.002〜0.5重量%の
重量範囲で少なくとも一つを添加した請求項5に記載の
圧電磁器組成物。
6. Chromium or cobalt is Cr 2
O 3, Co 3 O 4 piezoelectric ceramic composition according to claim 5 by adding at least one weight range of 0.002 to 0.5 wt% in terms of.
JP11103599A 1999-04-12 1999-04-12 Piezoelectric porcelain composition Pending JP2000302549A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006112096A1 (en) * 2005-04-06 2006-10-26 Murata Manufacturing Co., Ltd Conductive paste and laminated ceramic electronic component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006112096A1 (en) * 2005-04-06 2006-10-26 Murata Manufacturing Co., Ltd Conductive paste and laminated ceramic electronic component

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