JP2000296442A - Production control system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To issue advance and real notices of the lapse of storage time in processes that need storage time monitoring by monitoring time automatically, and process particular lots preferentially in storage time setting processes by prioritizing the lots automatically. SOLUTION: A progress file, which is indicative of the progress state of a lot and is updated on the basis of reference information specifying the machining conditions of products, has an area in which information on storage time and prioritization is written. By monitoring the storage time of the progress file of each lot, an advance notice issuing part 211 and a real notice issuing part 212 respectively issue an advance notice and a real notice, upon which a lot progress stopping part 213 stops the progress of the lot. A priority changing part 210 allows prioritized lots to be processed preferentially in a setting process by retrieving the priority of the progress file of each lot.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production management system for controlling a production line of a semiconductor device, a liquid crystal device, and the like, and more particularly, to a method for controlling the progress of a product by the production management system.

[0002]

2. Description of the Related Art In recent years, automation of production lines for semiconductor devices, liquid crystal devices, and the like has been implemented, and the function of a production management device that controls a manufacturing process or a transport process has a great effect on production efficiency. Generally, as a means of progressing a product in a production line, a method of determining and controlling a product priority, or a FI
An FO (First-In-First-Out) method and the like have been adopted.

[0003]

However, it is necessary to set a time limit (hereinafter referred to as "storage period") for the purpose of maintaining quality between the completion of processing in a certain manufacturing process and the start of processing in the next process. There is. For example, in semiconductor manufacturing, from the first step of cleaning a semiconductor wafer,
A predetermined storage period T is required between the second step of diffusing impurities into the washed semiconductor wafer, and the storage period T elapses from the completion of the processing of the first step to the start of the processing of the second step. Then, the quality of the cleaned semiconductor wafer is deteriorated.

[0004] As described above, when it is desired to progress a product in a specific lot only in a specific processing step section by an express treatment, the conventional control system has no means for automatically processing the product, and the operator is required to carry out daily production conditions. In consideration of the above, the processing of the specific processing step section of the corresponding lot is intentionally performed by artificially increasing the priority.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems. In a process that requires monitoring of a storage period, time is automatically monitored, and a time-out warning is issued for a time limit with respect to a time limit. To provide a production management system that enables this notification, and automatically raises the priority of a corresponding lot during the storage period to execute a priority process.

[0006]

According to a first aspect of the present invention, a plurality of manufacturing apparatuses and a transfer apparatus arranged between the manufacturing apparatuses are generally controlled, and products are transferred in lot units by the transfer apparatus. In the production management system for processing, a storage period is set from the completion of processing of a specific process of a given lot to the start of processing of the next process, and when the storage period has elapsed, a book that notifies the end of the storage period of the lot The alarm processing is performed and the progress of the lot is stopped.

According to a second aspect of the present invention, there is provided reference information defining processing conditions for each product, and a progress file created for each lot and representing the progress of each lot, and stored in a table in the reference information and the progress file. By providing an area for writing information about the period, and searching for the information about the storage period written in the progress file for each lot, if the storage period has elapsed, this alert processing is performed and the progress of the lot is stopped. It is characterized by making it.

According to a third aspect of the present invention, a forecast issuance time is set within the storage period, and when the forecast issuance time has elapsed, a forecast issuance process is performed to notify the end of the forecast issuance time of the lot. Features.

According to a fourth aspect of the present invention, there is provided a production management system for integrally controlling a plurality of manufacturing apparatuses and a transfer apparatus disposed between the manufacturing apparatuses, transferring products in lot units by the transfer apparatus, and processing the products by the manufacturing apparatus. , A storage period is set between the completion of the processing of a specific process of a predetermined lot and the start of the processing of the next process, and the priority for making the lot progress with priority during the storage period is set, and the priority is set. Is characterized by preferentially processing lots having the same in the setting process.

According to a fifth aspect of the present invention, there is provided reference information defining processing conditions for each product, and a progress file created in lot units and indicating the progress of each lot by referring to the reference information. An area for writing information about the storage period and the priority is provided in a table in the progress file, and a lot having a priority setting is preferentially processed between setting steps.

According to a sixth aspect of the present invention, when the storage period has elapsed, the progress of the lot is automatically restarted again from the start step of the storage period.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Configuration and operation of the present invention. (Configuration of the Present Invention) FIG. 1 is a block diagram showing a hierarchical structure of a production management system of the present invention. This production management system includes a factory management host computer 1 that controls the entire system, a production management device 2 (2a, b,...) That controls the process of the manufacturing device and the transport of the transport device, and includes each process step and each process. The manufacturing apparatus 3 (3a, 3a,
b), and a transport device 4 (4a, b,...), and an alarm device 5 for issuing a forecast report and a main report according to the present invention. Data communication between the factory management host computer 1 and the production management device 2 is performed via a LAN (Local Area Network). The production management device 2 is connected to each of the manufacturing devices 3 and the transport device 4 by a serial interface or the like.
Each manufacturing device 3 and the transport device 4 are controlled by an arbitrary communication protocol.

FIG. 2 is a block diagram showing an example of a device configuration of the production management device. The production management device 2 includes a computer main body 101, a graphic display device 102, a magnetic tape device 103 on which a magnetic tape is mounted, a keyboard 1
04, mouse 105, CD-ROM with CD-ROM mounted
ROM device 106 and LAN interface 10
7 inclusive. The computer main body 101 includes a CPU 111 as a central processing unit, a ROM 112 as a storage unit,
An AM 113 and a hard disk 114, and a process control or transport control program supplied from a storage medium such as a magnetic tape or a CD-ROM
Tape drive 103 or CD-ROM drive 10
6 is temporarily stored in the hard disk 114. C
The PU 111 controls the process or transport by loading the process control or transport control program from the hard disk 114 into the RAM 113 as appropriate and executing it.
The control program may be supplied from another computer to the computer main body 101 via a communication line.

FIG. 3 is a block diagram showing a control configuration of the production management device of the present invention. The production management device 2 includes a manufacturing instruction receiving unit 200 that receives a manufacturing instruction from the factory management host computer 1, a lot forming unit 201 that forms manufacturing information (lot formation) of each product from the manufacturing instruction, and a lot forming unit. A progress file creating unit 202 that creates a progress file from the manufacturing information of each product created by 201 and stores it in the progress file storage unit 301; and a reference information storage unit 30
A reference information search unit 203 for searching the reference information stored in the reference information 0 and extracting control conditions of the processing steps;
The control unit 204 controls the transfer device 4 based on the control condition of the transfer process extracted by the control unit 03 and the control of the manufacturing device 3 based on the control condition of the process process extracted by the reference information search unit 203. Manufacturing equipment control unit 2
05 and QC (Qual
QC), and a progress file update unit 207 for updating the process name in the progress file to the next process.

FIG. 4 is a diagram showing the structure of the reference information of the present invention. The reference information 100 includes the product name 10 (10A, B,
..), A process name 20 (20A, B,...), And a control condition number 30 (30A, B,...), And the reference information of the product is defined for each product type 10. The process name 20 is set according to the processing order of each product. In the control condition number 30, a number corresponding to a control condition table described later is set.

FIG. 5 is a diagram showing an example of a control condition table.
Each control number 30A set in the reference information 100,
Control conditions corresponding to B, C,... Are defined. The control condition table includes, in correspondence with each control condition number 30, a name of a manufacturing apparatus that can be used in each process (hereinafter, referred to as an “available apparatus name”) 31 and a control condition given to the manufacturing apparatus. 32 and a determination condition 33 used when performing QC determination on report data from the manufacturing apparatus.

The reference information of FIG. 4 and the control condition table of FIG.
The engineer has a factory management host computer 1 in advance.
, And transferred to the production management device 2 via the LAN, and stored in the reference information storage unit 300.

(Control Operation of the Present Invention) FIG. 6 is a flowchart showing the control operation of the production management system of the present invention.
Hereinafter, the flow of product control in the system will be briefly described.

(1) When a product is put into a production management system, a required number of pieces of production instruction information are transmitted from the factory management host computer 1 to the production management apparatus 2 via the production instruction receiving unit 200 (S1). ). This manufacturing information includes a unique product number (hereinafter, referred to as a lot number) for each product and a type of the product.

(2) Lot forming section 20 of production control device 2
1 displays the received manufacturing instruction information on the graphic display device 102 (S2). This display screen is displayed in a predetermined format, and the process proceeds in an interactive manner with the operator. Hereinafter, this display screen is referred to as a lot formation screen.

(3) The operator prepares necessary materials in accordance with the production instruction information displayed on the lot forming screen.
Enter the necessary items on the lot formation screen, and
01 (hereinafter referred to as lot formation) (S
3). Hereinafter, the progress of the product is performed in the formed lot unit (lot number unit).

(4) The progress file creating unit 202 creates the progress file shown in FIG. 7 for each lot number by the above-described lot formation, and registers it as a product to be controlled (S
4). FIG. 7 shows an example of a progress file for each product. The progress file 80 includes a lot number, a product type, and a current progress. In this example, the lot number is 1234
5. The type is AA-A, and the current progress is the first step, step 11.

(5) The reference information search unit 203 extracts the product type “AA-A” and the current progress “process 11” of the product of the lot number 12345 with reference to the progress file 80, and stores it in the reference information storage unit 300. The stored reference information (see FIG. 4) is searched to detect that the control condition number is "control 11-A". Then, the reference information search unit 203 refers to the control condition table shown in FIG.
1. The control condition 32 and the judgment condition 33 are extracted (S
5).

(6) Next, the manufacturing device 3 to be used is selected from the available device names 31 extracted by the reference information search unit 203, and the transport control unit 204 transmits the data to the manufacturing device 3 via the transport device 4. The product of lot number "12345" is transported (S6).

(7) After receiving the transport report from the transport device 4 and again confirming the information of the progress file, the manufacturing device control unit 205 sends the control conditions extracted by the reference information search unit 203 to the manufacturing device 3. It is transmitted and instructed to perform predetermined processing (S7).

(8) After performing the processing under the transmitted control conditions, the manufacturing apparatus 3 transmits the completion of the processing and report data to the manufacturing apparatus control unit 205. After confirming the information of the progress file again, the QC determination unit 206 makes a QC determination based on the report data and the report data determination condition 33 extracted by the reference information search unit 203 (S8).

(9) When the QC determining unit 206 determines that there is no problem, the progress file updating unit 207 determines the current progress of the progress file in FIG. Thus, the process is updated to the next process “process 12” and stored in the progress file storage unit 301 (S9).

(10) Thereafter, the production management device 2 repeats the above operations (5) to (9) to process and process products.
Carry forward.

Embodiment 1 (Summary of First Embodiment) In the production management system of the first embodiment, for example, FA information is stored in reference information defining processing conditions and the like of a product and a progress file indicating the progress of each lot.
An item of a control table is provided, and a storage period defined from the completion of a specific process process to the start of the next process process is set in the table for reasons such as quality maintenance. Then, the production management system constantly monitors the storage period, and when the forecast notification time of the storage period has elapsed, performs a forecast notification to notify the worker in the sense of an alarm, and the main report time of the storage period. If the storage period has elapsed, a main notification process for notifying the worker that the storage period has ended and a process for stopping the progress of the lot are performed.

(Structure of Embodiment 1) The hierarchical structure of the production management system of this embodiment is as shown in FIG. 1, and an example of the structure of the production management device is as shown in FIG.

FIG. 8 is a block diagram showing a control configuration of the production management device according to the present embodiment. The production management device 2 according to this embodiment includes a production instruction receiving unit 20 shown in FIG.
0, lot forming unit 201, progress file creating unit 202,
The reference information search unit 203, the transport device control unit 204, the manufacturing device control unit 205, the QC determination unit 206, the progress file update unit 207, the reference information storage unit 300, and the progress file storage unit 301 are set in the present embodiment. The forecast report processing unit 211 that performs the process of the forecast report when the report report time of the storage period has exceeded, and the report that performs the process of the report report when the report report time of the storage period has exceeded. Processing unit 212
And a lot progress stop unit 213 for stopping the progress of the lot for which this notification has been made, and a priority for changing the priority of the lot by determining whether there is a priority setting or a priority completion setting in the storage period. A change processing unit 207 is provided.

FIG. 9 is a diagram showing the structure of the reference information according to the present embodiment. The reference information 100 of the present embodiment is defined for each product type 10 as described with reference to FIG. 4, and in addition to the product type 10, process name 20, and control condition number 30, the control of the present invention is also performed. Setting area 40 necessary for realization
~ 70. In the present invention, the setting area 40
Are referred to as FA control tables. The setting field 40 in the FA control table is an area for setting the start of the storage period. In the example of FIG.
The “Step 21” of Step 0 is the Step 2 after the completion of the processing in Step 12.
It indicates that the storage period has been set up to 1. The setting column 50 is a time setting area for issuing an alarm for the forecast of the storage period setting.
120 minutes after the completion of the above. The setting column 60 is a time setting area for issuing the main alarm of the storage period setting. In the above example, “240” indicates that the main alarm is issued 240 minutes after the completion of the step 12. Setting column 70
Is a setting area indicating that the priority progress is automatically performed in the storage period setting section, and S in the setting column 70 of “step 23” of the step name 20 in the example of FIG. E at the next stage indicates completion of the priority progress control.

The control condition table has the same structure as that of FIG. 5, and the control number table 3 set in the reference information 100 of FIG.
Control conditions (a usable device name 31, a control condition 32, and a judgment condition 33) corresponding to 0 are defined. The reference information of FIG. 9 and the control condition table of FIG. 5 are created in advance by an engineer using the factory
The data is transferred to the production management device 2 by the AN and stored in the reference information storage unit 300.

(Control Operation of First Embodiment) Next, the control operation of the first embodiment will be described based on the progress files of FIGS. 10 and 11 and the control flowchart of FIG.

FIGS. 10 and 11 show an example of the progress file according to the present embodiment. The progress file 90 according to the present embodiment is the same as the progress file 80 shown in FIG. In addition to the progress column, the progress control column,
Column of FA table data. In the example of FIG. 10, the lot number is 12345, the product type is AA-A, and the current progress is the first process, that is, the process 11. Also, in the example of FIG. 11, when the process of step 12 is completed, the progress file contents when the progress file is updated in S9 of FIG. 12 are shown. Since step 12 is completed, the current progress is The data in the FA control table in step 12 is written based on the reference information in FIG.

Hereinafter, the control operation from the point when the progress file is updated in S9 of FIG. 12 (the contents of the progress file 90 of FIG. 11) will be described with reference to the block diagram of FIG. 8 and the flowchart of FIG.

In step S9, after the progress file 90 is updated as shown in FIG.
Determines whether the priority setting completion is set in the progress file 90 (S18). Here, since the symbol “E” indicating the completion of the priority setting is not set in the FA control table column of the progress file 90 in FIG. 11, the process returns to S5 as it is.

In S5, the reference information search unit 203
Based on the contents of the progress file 90, the reference information storage unit 3
The reference information (see FIG. 9) stored in 00 is searched, and the same processing as that of the product flow (5) in the production management device is executed.

Next, in S11, the priority change processing unit 210 determines whether or not the priority setting exists in the progress file 90. Since the priority control symbol "S" is not set in the FA control table column of the progress file 90 in FIG. 11, the process directly proceeds to S6, where the automatic transport process is performed by the transport device control unit 204, and the process is performed by the above-described production management device. After performing the same processing as the product flow (6), a lot arrival report is received from the transport device 4 to the transport device control unit 204.

Next, in S13, the forecast report processor 2
It is determined whether or not 11 is over the forecast time (S1).
3). This corresponds to “12” in the FA control table of the progress file 90 set in the progress file update process of S9.
The value of "0" is realized by the timer program in the forecast report processing unit incrementing "-1" every minute and detecting the time-over when the value of the forecast timer is "0". In this case, the process proceeds to the processing of transmitting processing conditions to the manufacturing apparatus in S7, and the processing of the main routine is performed.

If the forecast time is over in S13,
Proceeding to 14, the main report processing unit 212 determines whether the main report time is over. If the time is not over,
Proceeding to S15, the forecast report processing unit 211 performs a forecast report process, proceeds to the process of S7, and performs the above processes (8) and thereafter.

The above-mentioned forecast issuance processing is performed by the forecast issuance processing unit 21
1 is performed by writing necessary data in a data area referred to by the alarm unit 5 in the production management system. Then, the warning unit 5 issues a forecast report by confirming the data content.

If the main report time is over, the process proceeds to step S16, where the main report processing unit 212 performs the main report process, and
17, the lot progress stop unit 213 performs lot progress stop processing.

The main report processing by the main report processing unit 212 is as follows.
Only the data for the part that distinguishes between forecast and actual is different,
This processing is basically the same as the above-described forecast issuing processing.

The lot progress stop process by the lot progress stop unit 213 is a process of writing a stop symbol (for example, STOP) in the progress control column of the progress file 90.

After the lot progress stop processing in S17, the process proceeds to S18.
It is determined whether or not the priority setting is completed by the priority change processing unit 210. In this case, since the symbol “E” indicating the completion of the priority setting is not set in the FA control table column of the progress file 90, S5 The process returns to the reference information search process.

Then, in the reference information search process of S5, the progress control column of each progress file is searched, and those having STOP in the progress control column are excluded from the lot progress control, and The progress of the notified lot stops.

As described above, according to the first embodiment, the standard information and the FA control table of the progress file are defined from the completion of a specific process to the start of the next process for reasons such as quality retention. By setting the storage period,
The production management system can constantly monitor this storage period. Then, as appropriate, the forecast report processing, the main report processing,
In addition, by executing the lot progress stop processing, the manual monitoring processing and the lot stop processing by the conventional worker can be omitted, and the automatic monitoring of the production line is achieved.

Embodiment 2 (Summary of Second Embodiment) The production management system according to the second embodiment provides, for example, an item of an FA control table in the reference information and the progress file, and stores in the table from the completion of a specific process to the start of the next process. A storage period is set in between, and a priority is set for the product to preferentially progress during the storage period. Then, the lot with the priority setting is configured to be preferentially processed between the set processes.

(Structure of Embodiment 2) The hierarchical structure of the production management system of this embodiment is shown in FIG. 1, an example of the structure of the production management device is shown in FIG. 2, the control structure of the production management device is shown in FIG. The configuration is as shown in FIG.

(Control Operation of Second Embodiment) Next, the control operation of the second embodiment will be described with reference to the progress files of FIGS. 13 and 14 and the control flowchart of FIG.

The progress file 90 in FIG. 13 shows the contents when the progress file is updated in S9 in FIG. 12 at the time when the process in the step 23 is completed. Here, step 2
Since step 3 is completed, the current progress is step 31, and the data of the FA control table in step 23 is written based on the reference information in FIG.

Next, after the progress file 90 is updated in S9, the process proceeds to S18, where the priority change processing section 210
Determines whether or not the priority setting completion is set in the progress file 90. Here, the progress file 9 in FIG.
Since the priority setting completion symbol “E” is not set in the FA control table column of 0, the process returns to S5.

In S5, the reference information search unit 203
Based on the contents of the progress file 90, the reference information storage unit 3
The reference information (see FIG. 9) stored in 00 is searched, and the same processing as that of the product flow (5) in the production management device is executed.

Next, in S11, the priority change processing section 210 determines whether or not the priority setting exists in the progress file 90. Since the priority setting symbol "S" is set in the FA control table column of the progress file 90 in FIG. 13, the process proceeds to S12, where the priority change processing unit 210 performs the priority change processing of the corresponding lot.

Here, the priority change processing will be described with reference to FIGS. FIG. 15 is a diagram illustrating an example of a normal lot progress situation in which the priority change process is not performed, and FIG. 16 is a diagram illustrating an example of a lot progress status in the case where the priority change process is performed. In FIG. 15, step 2
Lot number 1 that has been processed by the 3m manufacturing equipment 3m
The lot of 2345 is put in the lot shelf 7A. The transfer from the lot shelf 7 to the transport device 4 is performed by the FIF
This is performed by an O (first in first out) method or the like. Further, the transfer by the transfer device 4, the transfer from the transfer device 4 to the lot shelf 7B, and the transfer from the lot shelf 7B to the manufacturing device 3n in the process 31 are also performed by a FIFO (first in first out) method or the like.

On the other hand, if the priority “S” is set in the progress file 90 of the lot number 12345, the priority change processing section 210 sends the lot shelf 7 constituting the transport system.
A, a command is issued to the transport device 4 and the lot shelf 7B, and as shown in FIG.
Transfer from lot shelf 7A to transfer device 4, transfer device 4
, Transfer from the transfer device 4 to the lot shelf 7B, and transfer from the lot shelf 7B to the manufacturing device 3n in the process 31 are instructed to be preferentially performed.

Next, the process proceeds to S6, where the automatic transfer process is performed by the transfer device control unit 204 in consideration of the priority change process, and a lot arrival report is received from the transfer device 4 to the transfer device control unit 204.

As described above, since the transfer instruction is issued to the transfer device 4 in descending order of priority, if the priority is changed in the direction of increasing the priority by the above-described priority change processing, the priority is changed. Priority processing is automatically performed for high lots.

Next, in S13, the forecast report processor 2
It is determined whether 11 is over the forecast time. this is,
The value of “150” in the FA control table of the progress file 90 set in the progress file update process in S9 is incremented by “−1” every minute by a timer program in the forecast report processing unit. Is realized by detecting the time over when the value of “.” Is “0”. S13
If the forecast time is not over, the process proceeds to processing for transmitting processing conditions to the manufacturing apparatus in S7, and the processing of the main routine is performed.

If the forecast time is over in S13,
Proceeding to 14, the main report processing unit 212 determines whether the main report time is over. This is because the timer program in the alarm processing unit increments the value of “300” in the FA control table of the progress file 90 set by the progress file update process in S9 by “−1” every minute. , Can be realized by detecting that the value of the timer is “0”. S
If the main report time is not over in S14, the process proceeds to S15, where the forecast report processing unit 211 performs the forecast report process, and S7.
Proceed to processing.

The above-mentioned forecast issuance processing is performed by the forecast issuance processing unit 21
1 by writing necessary data in a data area referenced by the alarm unit 5 in the production management system. Then, the alarm unit 5 confirms the data contents and issues a forecast report.

If the main report time is over, the process proceeds to step S16, where the main report processing unit 212 performs the main report process, and
17, the lot progress stop unit 213 performs lot progress stop processing.

The main report processing by the main report processing section 212 is as follows.
Only the data for the part that distinguishes between forecast and actual is different,
This processing is basically the same as the above-described forecast issuing processing.

The lot progress stop process by the lot progress stop unit 213 is a process of writing a stop symbol (for example, STOP) in the progress control column of the progress file 90.

After the lot progress stop processing in S17, the process proceeds to S18.
It is determined whether or not the priority setting is completed by the priority change processing unit 210. In this case, since the symbol “E” indicating the completion of the priority setting is not set in the FA control table column of the progress file 90, S5 The process returns to the reference information search process.

Then, in the reference information search process of S5, the progress control column of each progress file is searched, and those having STOP in the progress control column are excluded from the lot progress control, and The progress of the notified lot stops.

On the other hand, the main report processing and the lot progress stop processing are not performed, and the processing condition transmission processing to the manufacturing apparatus in S7 is performed.
When the machining completion report and the QC determination process of No. 8 have been executed, the process proceeds to S9, and the progress file 90 is updated to the content of FIG. 14 in the progress file update process of S9. Then, the process proceeds to S18, and in the process of determining whether the priority setting completion is set, the FA of the progress file 90 in FIG.
Since the priority setting completion symbol “E” is set in the control table column, the priority change processing unit 210 changes the lot to the original priority and completes the automatic priority processing during the storage period.

As described above, according to the second embodiment, the storage period is set in the reference information and the FA control table of the progress file, etc., and the priority for making the product progress preferentially in the storage period is set. , Priority set lots are processed preferentially, so if you want to progress a product in a specific lot only in a specific processing process section by express treatment, it can be processed automatically. Become.
That is, automation of a production line can be achieved in consideration of individual storage periods and priorities in each lot progress.

Embodiment 3 In the second embodiment, only the progress stop processing of the lot is performed when the main report time is over. That is, in the flowchart of FIG. 12, after performing the lot notification process in S16, the process proceeds to S17.
In the progress control column of the progress file, a stop symbol (for example, S
TOP) is written, and in the reference information search process of S5, the progress control column of each progress file is searched, and those having STOP in the progress control column are excluded from the lot progress control, and this report is issued. The lot progress was stopped.

In the present embodiment, if the present notification time is exceeded, the progress of the lot is automatically restarted again from the start step of the storage period, so that the progress of the lot whose storage period has been exceeded can be restored. Build a system that can do it.

FIG. 17 is a block diagram showing a control configuration of the production management device according to the present embodiment. The production management apparatus 2 according to this embodiment includes, in addition to the configuration shown in FIG. 8, a lot progress R processing unit 214 that automatically restarts the progress of the lot for which the main reporting time has exceeded from the start process of the storage period again. .

Next, the control operation of this embodiment will be described with reference to FIG.
Will be described with reference to the control flowchart of FIG.

The progress file 90 in FIG. 19 shows the contents when the process of updating the progress file in S9 of FIG. 18 is completed at the time when the process of the step 23 is completed. Here, step 2
Since step 3 is completed, the current progress is step 31, and the data of the FA control table in step 23 is written based on the reference information.

Next, the process proceeds to S18, where the priority change processing unit 2
10 determines whether or not the priority setting completion is set in the progress file 90. Here, since the symbol “E” indicating the completion of the priority setting is not set in the progress file of FIG. 18, the process returns to S5 as it is.

In S5, the reference information search unit 203
Based on the contents of the progress file 90, the reference information storage unit 3
The reference information stored in 00 is searched, and the same processing as the flow (5) of the product in the production management device is executed.

Next, in S11, the priority change processing section 210 determines whether or not a priority setting exists in the progress file 90. In the present embodiment, the symbol “RS” in the FA control table column of the progress file 90 in FIG. 19 means priority setting, and the process proceeds to S12, where the priority change processing unit 210 executes the priority change processing of the corresponding lot. Is performed. Here, the symbol “RS” in FIG. 19 means “priority setting” and also “lot progress reprocessing setting” described later.

Thereafter, the flow proceeds to S6, where the transport device controller 204
After carrying out the same process as in the flow (6) of the product in the production management device, a lot arrival report from the transport device 4 to the transport device control unit 204 is received.

Next, in S13, the forecast report processor 2
It is determined whether 11 is over the forecast time. If the forecast time is not over in S13, the process proceeds to the processing condition transmission processing to the manufacturing apparatus in S7, and the processing of the main routine is performed.

If the forecast time is over in S13, S
Proceeding to 14, the main report processing unit 212 determines whether the main report time is over. If it is not time for the main report time to expire in S14, the process proceeds to S15, where the preliminary report processing unit 211 performs a preliminary report process, proceeds to the process of S7, and performs the process of the main routine.

If the main report time is over, the process proceeds to S16, where the main report processing section 212 performs the main report process, and then proceeds to S20. In S20, the FA control table of the progress file 90 in FIG. 18 is checked to determine whether or not automatic processing is performed. That is, if the symbol “RS” indicating the lot progress reprocessing setting exists in S20, the process proceeds to S21 and proceeds to the lot progress R process by the lot progress R processing unit 214. In the lot progress R process of S21, the current progress of the progress file 90 of the lot is rewritten to “process 23” which is the start process of the storage period. Then, the process returns to the reference information search process in S5, and returns the lot to the process of the process 23, which is the start process of the storage period.

If it is determined in step S20 that the symbol “RS” indicating the lot progress reprocessing setting does not exist in the progress file, the process advances to step S17, and the lot progress stop unit 213 performs lot progress stop processing.

In the above example, the symbol “RS” in the column of automatic priority setting in the FA control table has the meaning of both “priority setting” and “lot progress reprocessing setting”. This can also be realized by providing a "lot progress reprocessing setting" column in the FA control table.

As described above, according to the third embodiment, the progress of a lot that has exceeded the storage period is automatically resumed from the start step of the storage period again by automatically resuming the progress of the lot whose main report time has exceeded the storage period. And the automation of the production management system taking into account the further storage period is achieved. The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the patent.

[0085]

According to the first and second aspects of the present invention,
For example, by setting the storage period specified for reasons such as quality retention between the completion of a specific process and the start of the next process in the FA control table of the reference information and the progress file, the storage period of the lot is always It becomes possible to monitor. Then, by executing the present notification process and the lot progress stop process, the monitoring of the artificial storage period and the lot stop process by the conventional worker can be omitted, and the automatic monitoring of the production line is achieved.

According to the third aspect of the present invention, the forecast issuance time is set within the storage period, and when the forecast issuance time has elapsed, the forecast issuance processing for notifying the end of the forecast issuance time of the lot is performed. With this configuration, it is possible to notify an operator of a warning before the storage period elapses.

According to the fourth and fifth aspects of the present invention, for example, the reference information and the FA control table of the progress file include:
The storage period and priority are set, and the lot with the priority set is processed preferentially. Can be processed.

According to the sixth aspect of the present invention, the progress of the lot whose storage period has elapsed has been returned to the start process of the storage period by automatically restarting the progress of the lot whose storage period has elapsed again from the start process of the storage period. Thus, the automation of the production management system can be achieved in consideration of the further storage period.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a hierarchical structure of a production management system according to the present invention.

FIG. 2 is a block diagram illustrating an example of a device configuration of a production management device according to the present invention.

FIG. 3 is a block diagram showing a control configuration of the production management device of the present invention.

FIG. 4 is a diagram showing a configuration of reference information of the present invention.

FIG. 5 is a diagram showing an example of a control condition table used in the present invention.

FIG. 6 is a flowchart showing a control operation of the production management system according to the present invention.

FIG. 7 is a configuration diagram showing an example of a progress file according to the present invention.

FIG. 8 is a block diagram showing a control configuration of the production management device according to the first and second embodiments of the present invention.

FIG. 9 is a diagram showing a configuration example of reference information used in the first and second embodiments.

FIG. 10 is a diagram showing a configuration example of a progress file for explaining the first embodiment;

FIG. 11 is a diagram illustrating a configuration example of a progress file for describing the first embodiment;

FIG. 12 is a flowchart showing a control operation of the production management system according to the first embodiment.

FIG. 13 is a diagram illustrating a configuration example of a progress file for describing Embodiment 2;

FIG. 14 is a diagram illustrating a configuration example of a progress file for explaining the second embodiment;

FIG. 15 is a configuration diagram illustrating a priority change process according to the second embodiment.

FIG. 16 is a configuration diagram for explaining a priority change process according to the second embodiment;

FIG. 17 is a block diagram showing a control configuration of a production management device according to a third embodiment of the present invention.

FIG. 18 is a flowchart showing a control operation of the production management system according to the third embodiment.

FIG. 19 is a diagram illustrating a configuration example of a progress file for describing Embodiment 3;

[Explanation of symbols]

1 factory management host computer, 2 production management device,
3 Manufacturing device, 4 transfer device, 5 alarm device, 6 lot, 7 lot shelf, 10 product name, 20 process name, 30
Control condition number, 31 Usable device, 32 Control condition, 33 Judgment condition, 40 Storage period start setting area, 5
0 Forecast issuing time setting area, 60 main issuing time setting area, 70 priority setting area, 80, 90 progress file, 100 reference information, 200 manufacturing instruction receiving section, 20
1 lot forming unit, 202 progress file creating unit, 20
3 Reference information search unit, 204 Transport device control unit, 205
Manufacturing device control unit, 206 QC determination unit, 207 Progress file update unit, 210 Priority change processing unit, 211
Forecast report processing section, 212 Main report processing section, 213 Lot progress stop section, 214 Lot progress R processing section, 300
Reference information storage unit, 301 progress file storage unit.

Continued on the front page (72) Inventor Ryuji Takechi 4-1-1 Mizuhara, Itami-shi, Hyogo Ryoden Semiconductor System Engineering Co., Ltd. (72) Inventor Yasuhiro Marume 4-1-1 Mizuhara, Itami-shi, Hyogo Ryoden Semiconductor System Inside Engineering Co., Ltd. (72) Inventor Takamasa Inobe 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsui Electric Co., Ltd. (72) Inventor Katsuya Ota 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsui Electric (72) Inventor Yasuhiro Sato 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term (reference) 3C042 RB38 RH05 RJ07 RJ11 RJ15 RL11 5B049 AA02 AA06 BB07 CC21 CC22 CC32 DD01 EE05 FF03 FF07 FF07

Claims (6)

[Claims] 1. A production management system for integrally controlling a plurality of manufacturing apparatuses and a transfer apparatus arranged between the manufacturing apparatuses, transferring products in lot units by the transfer apparatus, and processing the products by the manufacturing apparatus. A storage period is set between the completion of the processing of the specific process of the lot and the start of the processing of the next process, and when the storage period elapses, the reporting process for notifying the end of the storage period of the lot is performed, and A production management system for stopping the progress of the lot. 2. The system according to claim 1, further comprising: reference information defining processing conditions for each product; and a progress file created for each lot and representing a progress status of each lot. The reference information and a table in the progress file relate to the storage period. By providing an area for writing information and searching for information on the storage period written in the progress file of each lot, when the storage period has elapsed, this reporting process is performed and the progress of the lot is stopped. The production management system according to claim 1, wherein: 3. The method according to claim 1, further comprising: setting a forecast notification time within the storage period, and performing a forecast notification process for notifying the end of the forecast notification time of the lot when the forecast notification time has elapsed. The production management system according to claim 1. 4. A production management system for integrally controlling a plurality of manufacturing apparatuses and a transfer apparatus arranged between said manufacturing apparatuses, transferring products in lots by said transfer apparatus, and processing said products by said manufacturing apparatus. A storage period is set from the completion of the processing of the specific process of the lot to the start of the processing of the next process, and the priority for progressing the lot preferentially in the storage period is set. A production management system wherein lots are processed preferentially between setting processes. 5. A system comprising: reference information that defines processing conditions for each product; and a progress file that is created for each lot and indicates the progress of each lot by referring to the reference information. 5. The production management system according to claim 4, wherein an area for writing the information regarding the storage period and the priority is provided in a table within the lot, and a lot having a priority setting is preferentially processed between setting steps. 6. The production management according to claim 1, wherein when the storage period has elapsed, the progress of the lot is automatically restarted again from a start process of the storage period. system.