JP2000294355A - Ic socket - Google Patents

Ic socket

Info

Publication number
JP2000294355A
JP2000294355A JP11104219A JP10421999A JP2000294355A JP 2000294355 A JP2000294355 A JP 2000294355A JP 11104219 A JP11104219 A JP 11104219A JP 10421999 A JP10421999 A JP 10421999A JP 2000294355 A JP2000294355 A JP 2000294355A
Authority
JP
Japan
Prior art keywords
hole
contact
coil
electrodes
socket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11104219A
Other languages
Japanese (ja)
Other versions
JP4156125B2 (en
Inventor
Kenzo Suzuki
健三 鈴木
Toshimasa Hiroike
利昌 広池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Cosmos Electric Co Ltd
Original Assignee
Tokyo Cosmos Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Cosmos Electric Co Ltd filed Critical Tokyo Cosmos Electric Co Ltd
Priority to JP10421999A priority Critical patent/JP4156125B2/en
Publication of JP2000294355A publication Critical patent/JP2000294355A/en
Application granted granted Critical
Publication of JP4156125B2 publication Critical patent/JP4156125B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Connecting Device With Holders (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide low and stable connection resistance values by improving variations in the connection resistance values (conductor resistance values). SOLUTION: In this IC socket, a guide plate 15 is disposed on a printed wiring board 11 having contact electrodes 12 arranged/formed thereon at the same intervals as IC bumps, with an anisotropic conductive adhesive sheet 16 sandwiched therebetween. The guide plate 15 has through holes 17 positioned above the respective contact electrodes 12, and coil-shaped contacts 31 are housed in the respective through holes 17. Each coil-shaped contact 31 has a large-diameter part 32 in a projection part 34 projecting out of the through hole 17. When an IC is mounted (when it is pressed by the bumps), the large- diameter parts 32 surely make contact with through-hole electrodes 18, and therefore the through holes 17 stably function, together with the coil-shaped contacts 31, as connection conductors between the bumps and the contact electrodes 12.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明はIC本体の底面に
バンプが配列形成されてなる、いわゆるインナー面実装
タイプのICに使用されるソケットに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a socket used for a so-called inner surface mount type IC, in which bumps are arranged and formed on the bottom surface of an IC body.

【0002】[0002]

【従来の技術】図6はこの種のIC用のソケットとして
従来提案されている構成を示したものであり、図7はそ
の要部を拡大して示したものである。プリント配線基板
11の一面には複数の接点電極12が配列形成されてお
り、これら接点電極12の配列ピッチは装着されるIC
のバンプの配列ピッチと同一とされている。
2. Description of the Related Art FIG. 6 shows a configuration conventionally proposed as a socket for this type of IC, and FIG. 7 shows an enlarged view of a main part thereof. A plurality of contact electrodes 12 are arranged and formed on one surface of the printed wiring board 11, and the arrangement pitch of these contact electrodes 12 is determined by the IC to be mounted.
Is the same as the arrangement pitch of the bumps.

【0003】プリント配線基板11の他面には各接点電
極12とそれぞれ接続された端子電極13が形成されて
いる。各端子電極13はこの例では接点電極12に対し
てピッチが拡大されており、スルーホールが形成されて
ピン端子14が取り付けられたものとなっている。プリ
ント配線基板11の接点電極12が形成された面上には
ガイド板15が異方導電性接合材を挟んで配置される。
異方導電性接合材は加圧・加熱により導電接着作用を有
するもので、この例では異方導電性接合材として異方導
電性接着シート16が使用され、この異方導電性接着シ
ート16により、ガイド板15はプリント配線基板11
に接着固定されている。
[0005] On the other surface of the printed wiring board 11, terminal electrodes 13 connected to the respective contact electrodes 12 are formed. In this example, the pitch of each terminal electrode 13 is larger than that of the contact electrode 12, and a through hole is formed and a pin terminal 14 is attached. A guide plate 15 is disposed on the surface of the printed wiring board 11 on which the contact electrodes 12 are formed, with an anisotropic conductive bonding material interposed therebetween.
The anisotropic conductive bonding material has a conductive bonding action by pressurization and heating. In this example, an anisotropic conductive bonding sheet 16 is used as the anisotropic conductive bonding material. , The guide plate 15 is the printed wiring board 11
Adhesively fixed.

【0004】ガイド板15には複数のスルーホール17
が設けられており、これらスルーホール17は各接点電
極12上に位置するように配列形成されている。各スル
ーホール17の両端縁には図7に示したように電極(ス
ルーホール電極)18、19が形成されており、電極1
9は異方導電性接着シート16を介して対向する接点電
極12と導通される。
The guide plate 15 has a plurality of through holes 17.
These through holes 17 are arranged and formed so as to be located on the respective contact electrodes 12. Electrodes (through-hole electrodes) 18 and 19 are formed at both ends of each through-hole 17 as shown in FIG.
9 is electrically connected to the opposite contact electrode 12 via the anisotropic conductive adhesive sheet 16.

【0005】各スルーホール17にはコイル状接点21
が収容される。コイル状接点21は一端がスルーホール
17より突出され、他端は異方導電性接着シート16上
に位置されて異方導電性接着シート16に固定され、異
方導電性接着シート16を介して対向する接点電極12
と導通される。図7中、矢印22はこれらコイル状接点
21及び電極19と接点電極12との導通方向を示す。
[0005] Each through hole 17 has a coil-shaped contact 21.
Is accommodated. One end of the coil-shaped contact 21 protrudes from the through hole 17, and the other end is located on the anisotropic conductive adhesive sheet 16 and is fixed to the anisotropic conductive adhesive sheet 16, and is fixed via the anisotropic conductive adhesive sheet 16. Opposing contact electrode 12
Is conducted. In FIG. 7, an arrow 22 indicates the conduction direction between the coil-shaped contact 21 and the electrode 19 and the contact electrode 12.

【0006】なお、この例ではガイド板15を収容する
フレーム23がプリント配線基板11上に取り付けられ
ており、フレーム23に設けられた開口とガイド板15
の板面とによって構成された凹部24にICが位置決め
収容されるものとなっている。フレーム23の端縁に設
けられている軸受部25は図には示していないが、カバ
ー取り付け用に使用されるもので、この軸受部25を中
心としてカバーを回動自在に取り付けることができるも
のとなっている。また、フレーム23の他方の端縁に形
成されている突起26はカバーを引っかけてロックする
ために使用される。
In this example, a frame 23 accommodating the guide plate 15 is mounted on the printed wiring board 11, and an opening provided in the frame 23 and the guide plate 15
The IC is positioned and accommodated in the concave portion 24 formed by the plate surface. The bearing 25 provided at the edge of the frame 23 is not shown in the figure, but is used for attaching the cover, and the cover can be attached rotatably around the bearing 25. It has become. Further, a projection 26 formed on the other end of the frame 23 is used for hooking and locking the cover.

【0007】図8は上述したソケット27にIC28が
装着された時のコイル状接点21の様子を示したもので
あり、IC28のバンプ29によってコイル状接点21
は押圧され、これによりコイル状接点21はその弾性復
元力によりバンプ29と良好に接触するものとなってい
る。また、この際、コイル状接点21は押圧により湾曲
してスルーホール17の内壁(導電膜)と接触するた
め、スルーホール17もバンプ29と接点電極12との
間の接続導体として機能し、これによりバンプ29及び
接点電極12間の接続抵抗値(導体抵抗値)を低減でき
るものとなっている。
FIG. 8 shows the state of the coiled contact 21 when the IC 28 is mounted on the socket 27 described above.
Is pressed, whereby the coil-shaped contact 21 comes into good contact with the bump 29 by its elastic restoring force. At this time, since the coil-shaped contact 21 is bent by pressing and comes into contact with the inner wall (conductive film) of the through-hole 17, the through-hole 17 also functions as a connection conductor between the bump 29 and the contact electrode 12. Thereby, the connection resistance value (conductor resistance value) between the bump 29 and the contact electrode 12 can be reduced.

【0008】[0008]

【発明が解決しようとする課題】上述したように、図6
に示したソケット27においてはコイル状接点21をス
ルーホール17に収容することにより、接続抵抗値を低
減できるものとなっているものの、コイル状接点21と
スルーホール17との接触位置は一定ではなく、例えば
バンプ29の形状バラツキやコイル状接点21の寸法バ
ラツキ、あるいは異方導電性接着シート16へのコイル
状接点21の固定され具合等の要因によって接触位置が
図8に例示したようにP1 部となったり、あるいはP2
部になったりというようにバラツいてしまうものとなっ
ているため、このバラツキに伴い、接続抵抗値にバラツ
キが生じ、よってこのようなソケット27を使用したI
C検査においては、低電圧測定や高周波測定時に支障が
生じる恐れが有るものとなっていた。
As described above, FIG.
In the socket 27 shown in (1), although the coil-shaped contact 21 is accommodated in the through-hole 17, the connection resistance can be reduced, but the contact position between the coil-shaped contact 21 and the through-hole 17 is not fixed. For example, as shown in FIG. 8, the contact position is P 1 due to a variation in the shape of the bumps 29, a variation in the dimensions of the coiled contacts 21, or a condition in which the coiled contacts 21 are fixed to the anisotropic conductive adhesive sheet 16. Part or P 2
The connection resistance value varies due to the variation, and therefore, the I using the socket 27 using such a socket 27 may vary.
In the C inspection, there is a possibility that trouble may occur during low voltage measurement or high frequency measurement.

【0009】この発明の目的は上述した問題点に鑑み、
接続抵抗値(導体抵抗値)のバラツキを改善し、小さ
く、かつ安定した接続抵抗値が得られるようにしたIC
用ソケットを提供することにある。
In view of the above problems, an object of the present invention is to provide
An IC that improves the variation in connection resistance (conductor resistance) and enables a small and stable connection resistance to be obtained.
To provide sockets for

【0010】[0010]

【課題を解決するための手段】請求項1の発明によれ
ば、IC用ソケットは一面にICバンプの配列ピッチと
同一ピッチで複数の接点電極が配列形成され、他面にそ
れら接点電極とそれぞれ接続された複数の端子電極が形
成されたプリント配線基板と、そのプリント配線基板の
一面上に異方導電性接合材を挟んで配置され、複数の接
点電極上にそれぞれ位置する複数のスルーホールを有
し、それらスルーホールの両端縁に電極がそれぞれ形成
されてなるガイド板と、スルーホールにそれぞれ収容さ
れて、一端がそのスルーホールから突出され、他端が異
方導電性接合材に固定されたコイル状接点とを具備し、
コイル状接点がスルーホールより突出する突出部に、ス
ルーホールの内径より大径とされてスルーホール端縁の
上記電極と対向する大径部を有するものとされる。
According to the first aspect of the present invention, in the IC socket, a plurality of contact electrodes are formed on one surface at the same pitch as the arrangement pitch of the IC bumps, and on the other surface, these contact electrodes are respectively formed. A printed wiring board on which a plurality of connected terminal electrodes are formed, and a plurality of through-holes arranged on one surface of the printed wiring board with an anisotropic conductive bonding material interposed therebetween and located on a plurality of contact electrodes, respectively. A guide plate in which electrodes are formed at both ends of the through holes, and the guide plates are housed in the through holes, one end protrudes from the through holes, and the other end is fixed to the anisotropic conductive bonding material. And coiled contacts,
The projecting portion where the coil-shaped contact protrudes from the through-hole has a large-diameter portion having a diameter larger than the inner diameter of the through-hole and facing the electrode at the edge of the through-hole.

【0011】請求項2の発明では請求項1の発明におい
て、上記大径部が上記突出部の先端に設けられる。請求
項3の発明では請求項1の発明において、上記大径部が
上記突出部の中間に設けられる。
According to a second aspect of the present invention, in the first aspect of the present invention, the large-diameter portion is provided at a tip of the projecting portion. According to a third aspect of the present invention, in the first aspect of the present invention, the large diameter portion is provided in the middle of the projecting portion.

【0012】[0012]

【発明の実施の形態】この発明の実施の形態を図面を参
照して実施例により説明する。なお、図6〜8と対応す
る部分には同一符号を付し、その説明を省略する。図1
はこの発明の一実施例を示したものであり、図2はその
要部を拡大して示したものである。この例ではガイド板
15の各スルーホール17に配されるコイル状接点31
は図2に示したような形状を有するものとされ、即ち大
径部32と小径部33とを有する異径状とされる。
Embodiments of the present invention will be described with reference to the accompanying drawings. 6 to 8 are denoted by the same reference numerals, and description thereof will be omitted. FIG.
FIG. 1 shows an embodiment of the present invention, and FIG. 2 is an enlarged view of a main part thereof. In this example, a coil-shaped contact 31 arranged in each through hole 17 of the guide plate 15
Has a shape as shown in FIG. 2, that is, has a different diameter having a large diameter portion 32 and a small diameter portion 33.

【0013】大径部32はスルーホール17より突出す
る突出部34の先端に設けられており、この大径部32
の径はスルーホール17の内径より大とされてスルーホ
ール17の端縁に形成されている電極18と対向する大
きさとされる。なお、コイル状接点31は従来と同様、
異方導電性接着シート16上に位置されて、その基端が
固定されている。
The large diameter portion 32 is provided at the tip of a protruding portion 34 protruding from the through hole 17.
Is larger than the inner diameter of the through hole 17 and faces the electrode 18 formed at the edge of the through hole 17. In addition, the coil-shaped contact 31 is similar to the conventional one.
The base end is fixed on the anisotropic conductive adhesive sheet 16.

【0014】図3は上記のようなコイル状接点31を備
えたソケット35にIC28が装着された時のコイル状
接点31の様子を示したものであり、コイル状接点31
はバンプ29によって押圧されて圧縮され、その大径部
32が電極18に圧接された状態となる。つまり、この
例によれば大径部32が確実に電極18に接触し、コイ
ル状接点31とスルーホール17との接触位置が常にP
3 部となるため、従来のような接触位置のバラツキに起
因するソケットの接続抵抗値(導体抵抗値)のバラツキ
は解消され、各接点において極めて安定した接続抵抗値
が得られるものとなる。
FIG. 3 shows a state of the coiled contact 31 when the IC 28 is mounted on the socket 35 having the coiled contact 31 as described above.
Is pressed and compressed by the bump 29, and the large diameter portion 32 is pressed against the electrode 18. That is, according to this example, the large-diameter portion 32 reliably contacts the electrode 18, and the contact position between the coil-shaped contact 31 and the through hole 17 is always P
Since there are three parts, the variation in the connection resistance value (conductor resistance value) of the socket due to the variation in the contact position as in the related art is eliminated, and an extremely stable connection resistance value can be obtained at each contact.

【0015】さらに、コイル状接点31がP3 部でスル
ーホール17と導通するため、スルーホール17の全長
(全体)がバンプ29及び接点電極12間の接続導体と
して機能することになり、よって接続抵抗値の低減に対
し、スルーホール17を最も効果的に機能させることが
でき、接続抵抗値が小さく、かつ安定した良好な電気的
特性を有するソケットを得ることができる。
Furthermore, since the coil shaped contact 31 is electrically connected to the through hole 17 in the P 3 parts, will be the entire length of the through hole 17 (total) functions as a connection conductor between the bump 29 and contact electrodes 12, thus connecting The through hole 17 can function most effectively with respect to the reduction of the resistance value, and a socket having a small connection resistance value and stable and excellent electric characteristics can be obtained.

【0016】なお、数値例の一例を示せば、図6に示し
た従来のソケット27ではIC検査時の接続抵抗値は
0.05〜0.5Ωというようなバラツキがあったが、
この例によるソケット35では接続抵抗値は0.01〜
0.05Ω程度となり、大幅に改善された。図4はスル
ーホール17の電極18と圧接する大径部32を突出部
34の先端ではなく、突出部34の中間に設けるように
した例を示したものであり、このコイル状接点36を具
備するソケットにIC28が装着された時の状態を図5
に示す。
As an example of numerical values, the conventional socket 27 shown in FIG. 6 has a connection resistance value of 0.05 to 0.5 Ω at the time of IC inspection.
In the socket 35 according to this example, the connection resistance value is 0.01 to
It was about 0.05Ω, which was greatly improved. FIG. 4 shows an example in which the large-diameter portion 32 that is in pressure contact with the electrode 18 of the through hole 17 is provided not at the tip of the projection 34 but at the middle of the projection 34. FIG. 5 shows a state when the IC 28 is mounted on the socket to be mounted.
Shown in

【0017】この例においても図5に示したように、大
径部32がP3 部で電極18と確実に接触するため、小
さくかつ安定した接続抵抗値を得ることができる。な
お、このように大径部32を突出部34の中間に位置さ
せることにより、例えば突出部34の先端の小径部3
3’の径を対接するIC28のバンプ29の大きさに対
応して最適な大きさに選定することが可能となる。
[0017] As shown in FIG. 5 In this example, since the large-diameter portion 32 to reliably contact with the electrode 18 at the P 3 parts, it is possible to obtain a small and stable connection resistance value. By positioning the large-diameter portion 32 in the middle of the projection 34 in this manner, for example, the small-diameter portion 3 at the tip of the projection 34 is formed.
It is possible to select an optimum size corresponding to the size of the bump 29 of the IC 28 that contacts the diameter 3 '.

【0018】[0018]

【発明の効果】以上説明したようにこの発明によればコ
イル状接点の、スルーホールより突出する突出部にスル
ーホールより大径の大径部を設けたことにより、使用時
(IC装着時)にこの大径部が確実にスルーホール端縁
の電極と接触するため、従来のようにコイル状接点とス
ルーホールとの接触位置がバラツくといった問題は発生
せず、よってコイル状接点と共にスルーホールを接続導
体として安定に、かつ全長に渡って機能させることがで
きるため、接続抵抗値が小さく、かつ安定した良好な電
気的特性を有するIC用ソケットを得ることができる。
As described above, according to the present invention, the projecting portion of the coil-shaped contact, which protrudes from the through-hole, is provided with a large-diameter portion having a diameter larger than that of the through-hole. Since the large diameter portion surely comes into contact with the electrode at the edge of the through hole, the problem that the contact position between the coil-shaped contact and the through-hole is not different from the conventional case does not occur. Can be functioned stably as a connection conductor over the entire length, so that an IC socket having a small connection resistance value and stable and excellent electric characteristics can be obtained.

【0019】しかも、請求項3の発明では大径部を突出
部の中間に設けるようにしているため、ICバンプの大
きさに応じてコイル状接点の先端の径を選定することが
可能となる。
Further, in the third aspect of the present invention, since the large diameter portion is provided in the middle of the projecting portion, the diameter of the tip of the coil-shaped contact can be selected according to the size of the IC bump. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】請求項1の発明の実施例を示す断面図。FIG. 1 is a sectional view showing an embodiment of the invention of claim 1;

【図2】図1の要部拡大図。FIG. 2 is an enlarged view of a main part of FIG.

【図3】図1のソケットの使用時の状態を説明するため
の図。
FIG. 3 is a view for explaining a state when the socket of FIG. 1 is used.

【図4】請求項3の発明の実施例を説明するための図。FIG. 4 is a view for explaining an embodiment of the invention of claim 3;

【図5】図4のコイル状接点の使用時の状態を説明する
ための図。
FIG. 5 is a view for explaining a state when the coil-shaped contact of FIG. 4 is used.

【図6】従来提案されているIC用ソケットを示す断面
図。
FIG. 6 is a sectional view showing a conventionally proposed IC socket.

【図7】図6の要部拡大図。FIG. 7 is an enlarged view of a main part of FIG. 6;

【図8】図6のソケットの使用時の状態を説明するため
の図。
FIG. 8 is a view for explaining a state when the socket of FIG. 6 is used.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01R 13/24 H01R 13/24 Fターム(参考) 2G003 AA07 AG01 AG07 AG08 AG12 2G011 AA15 AB01 AB06 AB07 AC14 AE22 5E024 CA18 CB05 CB06 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01R 13/24 H01R 13/24 F term (Reference) 2G003 AA07 AG01 AG07 AG08 AG12 2G011 AA15 AB01 AB06 AB07 AC14 AE22 5E024 CA18 CB05 CB06

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 一面にICバンプの配列ピッチと同一ピ
ッチで複数の接点電極が配列形成され、他面にそれら接
点電極とそれぞれ接続された複数の端子電極が形成され
たプリント配線基板と、 そのプリント配線基板の上記一面上に異方導電性接合材
を挟んで配置され、上記複数の接点電極上にそれぞれ位
置する複数のスルーホールを有し、それらスルーホール
の両端縁に電極がそれぞれ形成されてなるガイド板と、 上記スルーホールにそれぞれ収容されて、一端がそのス
ルーホールから突出され、他端が上記異方導電性接合材
に固定されたコイル状接点とを具備し、 上記コイル状接点は上記スルーホールより突出する突出
部に、上記スルーホールの内径より大径とされてスルー
ホール端縁の上記電極と対向する大径部を有することを
特徴とするIC用ソケット
A printed wiring board having a plurality of contact electrodes arranged on one surface at the same pitch as the arrangement pitch of IC bumps, and a plurality of terminal electrodes connected to the contact electrodes on the other surface. The printed wiring board has a plurality of through-holes arranged on the one surface of the printed wiring board with an anisotropic conductive bonding material interposed therebetween and positioned on the plurality of contact electrodes, and electrodes are formed at both end edges of the through-holes, respectively. And a coil-shaped contact housed in the through-hole, one end protruding from the through-hole, and the other end fixed to the anisotropic conductive bonding material. Is characterized in that the projecting portion projecting from the through-hole has a large-diameter portion having a diameter larger than the inner diameter of the through-hole and facing the electrode at the edge of the through-hole. IC socket
【請求項2】 請求項1記載のIC用ソケットにおい
て、 上記大径部が上記突出部の先端に設けられていることを
特徴とするIC用ソケット。
2. The IC socket according to claim 1, wherein said large-diameter portion is provided at a tip of said projecting portion.
【請求項3】 請求項1記載のIC用ソケットにおい
て、 上記大径部が上記突出部の中間に設けられていることを
特徴とするIC用ソケット。
3. The IC socket according to claim 1, wherein the large-diameter portion is provided in the middle of the projecting portion.
JP10421999A 1999-04-12 1999-04-12 IC socket Expired - Fee Related JP4156125B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10421999A JP4156125B2 (en) 1999-04-12 1999-04-12 IC socket

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10421999A JP4156125B2 (en) 1999-04-12 1999-04-12 IC socket

Publications (2)

Publication Number Publication Date
JP2000294355A true JP2000294355A (en) 2000-10-20
JP4156125B2 JP4156125B2 (en) 2008-09-24

Family

ID=14374858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10421999A Expired - Fee Related JP4156125B2 (en) 1999-04-12 1999-04-12 IC socket

Country Status (1)

Country Link
JP (1) JP4156125B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100362707C (en) * 2002-07-09 2008-01-16 山一电机株式会社 Socket for semiconductor device
KR20200095113A (en) * 2019-01-31 2020-08-10 주식회사 이노글로벌 Test socket

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100362707C (en) * 2002-07-09 2008-01-16 山一电机株式会社 Socket for semiconductor device
KR20200095113A (en) * 2019-01-31 2020-08-10 주식회사 이노글로벌 Test socket
KR102147745B1 (en) * 2019-01-31 2020-08-25 주식회사 이노글로벌 Test socket

Also Published As

Publication number Publication date
JP4156125B2 (en) 2008-09-24

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