JP2000288307A - Deaeration device and ultrasonic washing apparatus equipped therewith - Google Patents
Deaeration device and ultrasonic washing apparatus equipped therewithInfo
- Publication number
- JP2000288307A JP2000288307A JP11099545A JP9954599A JP2000288307A JP 2000288307 A JP2000288307 A JP 2000288307A JP 11099545 A JP11099545 A JP 11099545A JP 9954599 A JP9954599 A JP 9954599A JP 2000288307 A JP2000288307 A JP 2000288307A
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- JP
- Japan
- Prior art keywords
- liquid
- cylinder
- vacuum
- bubbles
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Degasification And Air Bubble Elimination (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、例えば界面活性剤
等が含まれる洗浄液中から溶解気体や混入気体を脱気す
る技術に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for degassing dissolved gas or mixed gas from a cleaning solution containing, for example, a surfactant.
【0002】[0002]
【従来の技術】従来、被洗浄物を洗浄液中に浸漬させ、
液中に超音波を放射して真空核の微小なキャビテーショ
ンを発生させ、このキャビテーションの衝撃力で被洗浄
物を洗浄するような超音波洗浄装置が知られており、こ
の際、キャビテーションの衝撃力を強化し、また伝播特
性を向上させるため、洗浄液中に溶解する気体や洗浄液
中に混入する気体を脱気するのが効果的であることが知
られている。この際、脱気手段として、中空糸脱気モジ
ュールを使用したり、または真空容器内で液体をシャワ
ー噴射等によって微細化し、液中の気体を真空引きで脱
気するような手段が知られている。2. Description of the Related Art Conventionally, an object to be cleaned is immersed in a cleaning liquid,
An ultrasonic cleaning device that emits ultrasonic waves into a liquid to generate minute cavitation of a vacuum nucleus and cleans an object to be cleaned with the impact force of the cavitation is known. It is known that it is effective to degas gas dissolved in the cleaning liquid or gas mixed in the cleaning liquid in order to enhance the gas diffusion property and improve the propagation characteristics. At this time, as the degassing means, a means for using a hollow fiber degassing module, or means for degassing the liquid in a vacuum vessel by shower injection or the like and degassing the gas in the liquid by evacuation is known. I have.
【0003】[0003]
【発明が解決しようとする課題】ところが、洗浄液に界
面活性剤等が含まれる場合、中空糸脱気モジュールでは
中空糸内面が親水性となって洗浄液がそのまま通過し、
結果として脱気することが出来ず、また真空脱気方式で
は減圧によって溶解気体等がシャボン玉のように膨れ上
がって、気体の周囲が薄い液体殻で包み込まれる泡にな
り、真空ポンプ側に液体が一緒に流れ込んでくるため脱
気が不可能になる。However, when the cleaning liquid contains a surfactant or the like, in the hollow fiber degassing module, the inner surface of the hollow fiber becomes hydrophilic and the cleaning liquid passes as it is,
As a result, it cannot be degassed, and in the vacuum degassing method, the dissolved gas expands like a soap bubble due to the reduced pressure, and the gas becomes bubbles wrapped in a thin liquid shell, and the liquid flows to the vacuum pump side. Degassing is impossible because of the flowing in together.
【0004】一方、真空脱気容器と真空ポンプとの間に
泡を集める真空の消泡容器を設け、この消泡容器に一定
量の泡が溜まった時点で、真空容器内を大気圧に戻して
泡を消し、液体だけを回収するような方法も考えられる
が、この方法では、大気圧に戻した際に気体が液体中に
再溶解する量も多く、充分な脱気効果を得ることが出来
ない。On the other hand, a vacuum defoaming container for collecting bubbles is provided between the vacuum degassing container and the vacuum pump, and when a certain amount of bubbles has accumulated in the defoaming container, the inside of the vacuum container is returned to atmospheric pressure. It is also conceivable to remove bubbles and collect only the liquid, but in this method, a large amount of gas is re-dissolved in the liquid when the pressure is returned to atmospheric pressure, and a sufficient degassing effect can be obtained. Can not.
【0005】そこで本発明は、例えば超音波洗浄装置等
において、真空状態で泡が発生する液体中から溶解気体
や混入気体を効果的に除去することを目的とする。Accordingly, an object of the present invention is to effectively remove dissolved gas and mixed gas from a liquid in which bubbles are generated in a vacuum state, for example, in an ultrasonic cleaning device or the like.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するため
本発明は、真空状態で泡が発生する液体中から溶解気体
等を除去するため、発熱体を収容した真空容器を設け、
この真空容器内に液体を導入し、泡を発熱体に接触させ
て破壊するようにした。In order to achieve the above object, the present invention provides a vacuum vessel containing a heating element for removing dissolved gases and the like from a liquid in which bubbles are generated in a vacuum state,
The liquid was introduced into the vacuum container, and the bubbles were brought into contact with the heating element to break them.
【0007】すなわち、真空容器中に洗浄液を導いて脱
気する際、溶解する気体や混入する気体が泡になるた
め、この泡を破壊して気体だけを真空ポンプで排出し、
液体を回収して例えば循環させる等によって再利用する
が、真空容器内の発熱体に泡を接触させて破壊するよう
にすれば、真空容器内を減圧状態に保ったまま泡を消す
ことが出来、回収した液体中に気体が再溶解する量を減
らすことが出来る。That is, when the cleaning liquid is introduced into the vacuum container and degassed, the dissolved gas and the mixed gas become bubbles. The bubbles are destroyed and only the gas is discharged by the vacuum pump.
The liquid is collected and reused, for example, by circulating it.However, if bubbles are brought into contact with the heating element in the vacuum vessel and destroyed, the bubbles can be eliminated while keeping the vacuum vessel in a reduced pressure state. In addition, the amount of gas re-dissolved in the recovered liquid can be reduced.
【0008】ここで発熱体としては、例えばヒータ等の
発熱線の周囲を樹脂被覆等で覆ったようなものが適用出
来、表面温度が50℃程度以上に加熱されるものであれ
ば、消泡は充分可能である。Here, as the heating element, for example, a heating element such as a heater in which the periphery of a heating wire is covered with a resin coating or the like can be applied. If the surface temperature is heated to about 50 ° C. or more, defoaming is performed. Is quite possible.
【0009】また請求項2では、前記真空容器内に、泡
のレベルを検知して発熱体に発熱信号を発するレベル検
知手段を設けるようにした。According to a second aspect of the present invention, the vacuum container is provided with a level detecting means for detecting a bubble level and generating a heat signal to the heating element.
【0010】このようにレベル検知手段によって発熱信
号を発するようにすれば、常時発熱体を発熱させること
に比べてより経済的である。[0010] The generation of the heat signal by the level detecting means is more economical than the case where the heat generator is constantly heated.
【0011】また請求項3では、超音波洗浄装置とし
て、超音波洗浄槽で洗浄に使用した液体を前記脱気装置
に送り込んで液体中の溶解気体等を除去し、再び超音波
洗浄槽に循環させるようにした。According to a third aspect of the present invention, as the ultrasonic cleaning apparatus, the liquid used for cleaning in the ultrasonic cleaning tank is sent to the deaerator to remove dissolved gas and the like in the liquid and circulated again to the ultrasonic cleaning tank. I tried to make it.
【0012】このように前記脱気装置を超音波洗浄装置
に適用すれば好適である。As described above, it is preferable to apply the deaerator to an ultrasonic cleaning device.
【0013】[0013]
【発明の実施の形態】本発明の実施の形態について添付
した図面に基づき説明する。ここで図1は超音波洗浄装
置のシステム構成図、図2は消泡筒内部の構成図であ
る。Embodiments of the present invention will be described with reference to the accompanying drawings. Here, FIG. 1 is a system configuration diagram of the ultrasonic cleaning apparatus, and FIG. 2 is a configuration diagram of the inside of the defoaming cylinder.
【0014】本発明に係る超音波洗浄装置は、例えば超
音波洗浄や、超音波バリ取り洗浄や、超音波研磨処理等
を行う装置において、清浄液中に超音波を放射した際、
強力な衝撃力のキャビテーションを発生させるため、洗
浄液中に溶解または混入する気体(主として空気)を有
効に除去することが出来るようにされ、特に真空状態に
おいて泡が発生しやすい水溶性洗浄剤等が含まれる洗浄
液に適用すれば効果的である。The ultrasonic cleaning apparatus according to the present invention is, for example, an apparatus for performing ultrasonic cleaning, ultrasonic deburring cleaning, ultrasonic polishing processing, etc., when radiating ultrasonic waves into a cleaning liquid.
In order to generate cavitation with strong impact force, gas (mainly air) dissolved or mixed in the cleaning liquid can be effectively removed, and especially water-soluble cleaning agents that easily generate bubbles in a vacuum state are used. It is effective if applied to the contained cleaning solution.
【0015】この超音波洗浄装置1は、図1に示すよう
に、水溶性洗浄剤等が含まれる洗浄液Sを貯留する超音
波洗浄槽2と、この超音波洗浄槽2に導出ライン3を介
して連結される脱気筒4と、この脱気筒4に接続ライン
5を介して連結される消泡筒6と、この消泡筒6に真空
引きライン7を介して連結される真空ポンプ8を備えて
おり、脱気筒4と消泡筒6には、リターンライン10の
一端側が接続され、リターンライン10の他端側は前記
超音波洗浄槽2に接続されている。As shown in FIG. 1, the ultrasonic cleaning apparatus 1 includes an ultrasonic cleaning tank 2 for storing a cleaning liquid S containing a water-soluble cleaning agent and the like, and a lead-out line 3 connected to the ultrasonic cleaning tank 2. A deaeration cylinder 4 connected to the deaeration cylinder 4 via a connection line 5 and a vacuum pump 8 connected to the deaeration cylinder 6 via a vacuum line 7. One end of a return line 10 is connected to the degassing cylinder 4 and the defoaming cylinder 6, and the other end of the return line 10 is connected to the ultrasonic cleaning tank 2.
【0016】そして、超音波洗浄槽2で被洗浄物を洗浄
した後、洗浄液Sを脱気筒4に送り込んで液中に含まれ
る気体を真空脱気し、液体をリターンライン10を通じ
て超音波洗浄槽2に戻すとともに、脱気筒4で発生した
泡を、本発明に係る脱気装置としての消泡筒6に送り込
み、この消泡筒6で減圧状態を保ったまま泡を破壊して
気体だけを真空ポンプ8で吸い込んで排出し、液体はリ
ターンライン10を通して超音波洗浄槽2に戻すように
している。After the object to be cleaned is cleaned in the ultrasonic cleaning tank 2, the cleaning liquid S is sent to the degassing cylinder 4 to degas the gas contained in the liquid, and the liquid is passed through the return line 10 through the ultrasonic cleaning tank 2. 2 and the bubbles generated in the degassing cylinder 4 are sent to a defoaming cylinder 6 as a degassing device according to the present invention. The liquid is sucked and discharged by the vacuum pump 8, and the liquid is returned to the ultrasonic cleaning tank 2 through the return line 10.
【0017】前記超音波洗浄槽2は、超音波発生器11
を備えた洗浄槽12と、この洗浄槽12の隣りに並設さ
れるオーバーフロー槽13を備えており、超音波発生器
11により洗浄槽12の洗浄液S中に超音波を放射して
微小な真空核からなるキャビテーションを発生させるよ
うにされ、また前記リターンライン10の複数の接続部
のうち、1ヵ所の接続部を洗浄液Sの液面附近にスリッ
ト状に開口させ、洗浄液Sの上層液をオーバーフロー槽
13に送り込むことが出来るようにしている。The ultrasonic cleaning tank 2 includes an ultrasonic generator 11
And an overflow tank 13 juxtaposed next to the cleaning tank 12. The ultrasonic generator 11 radiates ultrasonic waves into the cleaning liquid S in the cleaning tank 12 to generate a minute vacuum. Cavitation consisting of nuclei is caused to occur, and one of the plurality of connection portions of the return line 10 is opened like a slit near the liquid surface of the cleaning liquid S to overflow the upper layer liquid of the cleaning liquid S. It can be sent to the tank 13.
【0018】前記導出ライン3には、ノーマルクローズ
の電磁バルブ14を含む複数のバルブが配設され、必要
に応じて電磁バルブ14を開いて洗浄液Sを脱気筒4に
送り込むことが出来るようにされている。A plurality of valves including a normally closed electromagnetic valve 14 are disposed in the lead-out line 3. The electromagnetic valve 14 can be opened as required to feed the cleaning liquid S to the degassing cylinder 4. ing.
【0019】前記脱気筒4は、前記接続ライン5を通じ
て真空ポンプ8の吸引作用によって減圧可能とされ、例
えば洗浄液Sをフィルタやシャワー噴射等によって微細
化し、真空雰囲気化における接触面積を増やして液体内
部に含まれる気体を脱気出来るようにされている。The degassing cylinder 4 can be depressurized by the suction action of the vacuum pump 8 through the connection line 5. For example, the cleaning liquid S is finely divided by a filter or shower jet to increase the contact area in a vacuum atmosphere to increase the inside of the liquid. The gas contained in can be degassed.
【0020】前記接続ライン5は、脱気筒4で発生した
泡を吸引して消泡筒6に送り込むことが出来るような状
態で接続され、その途中には、ノーマルオープンの電磁
バルブ15が配設されている。The connection line 5 is connected in such a manner that bubbles generated in the degassing cylinder 4 can be sucked and sent to the defoaming cylinder 6, and a normally open electromagnetic valve 15 is provided in the middle thereof. Have been.
【0021】本発明の特徴部分である脱気装置としての
消泡筒6の内部には、図2に示すようなレベル検知手段
としての電極式のレベルゲージ16と、テフロンまたは
フッ素樹脂等の樹脂被覆で覆われた発熱線17が収容さ
れており、レベルゲージ16は、高さが異なる複数(実
施形態では3本)の検知バーから構成され、例えば所定
の2本の検知バーが泡の存在を検出すると、発熱線17
に電気信号を送るようにされている。そして発熱線17
は、レベルゲージ16から電気信号が供給されると、表
面温度が60〜120℃程度に加熱されるようになって
いる。そしてこの消泡筒6の比較的上位の箇所に前記真
空引きライン7が接続され、また下位の箇所に前記リタ
ーンライン10が接続されている。An electrode type level gauge 16 as a level detecting means as shown in FIG. 2 and a resin such as Teflon or fluorine resin are provided inside the defoaming cylinder 6 as a deaerator which is a characteristic part of the present invention. The heating wire 17 covered with the coating is accommodated, and the level gauge 16 is composed of a plurality of (three in the embodiment) detection bars having different heights. Is detected, the heating wire 17
To send electrical signals. And the heating wire 17
When an electric signal is supplied from the level gauge 16, the surface temperature is heated to about 60 to 120 ° C. The evacuation line 7 is connected to a relatively upper position of the defoaming cylinder 6, and the return line 10 is connected to a lower position.
【0022】前記リターンライン10の途中には、循環
ポンプ20が設けられ、また、この循環ポンプ20と前
記消泡筒6の間には、ノーマルクローズの電磁バルブ2
1が配設され、また循環ポンプ20と脱気筒4の間に
は、ノーマルオープンの電磁バルブ22が配設されてい
る。また前記真空引きライン7には、電磁三方弁が配設
されている。A circulation pump 20 is provided in the middle of the return line 10, and a normally closed electromagnetic valve 2 is provided between the circulation pump 20 and the defoaming cylinder 6.
1 is disposed, and a normally open electromagnetic valve 22 is disposed between the circulation pump 20 and the deaeration cylinder 4. The vacuum line 7 is provided with an electromagnetic three-way valve.
【0023】以上のように構成される超音波洗浄装置1
の作用等について説明する。まず、洗浄液Sの脱気を行
う時は、真空ポンプ8の作動により、脱気筒4と消泡筒
6の内部圧力をマイナス500mmHg以下に減圧す
る。The ultrasonic cleaning apparatus 1 configured as described above
The operation and the like of will be described. First, when the cleaning liquid S is degassed, the internal pressure of the degassing cylinder 4 and the defoaming cylinder 6 is reduced to minus 500 mmHg or less by the operation of the vacuum pump 8.
【0024】そして導出ライン3の電磁バルブ14を開
いてオーバーフロー槽13内の洗浄液Sを脱気筒4に導
入すると、溶解気体や混入気体(主として空気)がシャ
ボン玉状の泡になり、この泡は接続ライン5の電磁バル
ブ15を通して消泡筒6に導かれる。When the electromagnetic valve 14 of the outlet line 3 is opened and the cleaning liquid S in the overflow tank 13 is introduced into the degassing cylinder 4, the dissolved gas and the mixed gas (mainly air) become bubbles in the form of bubbles. It is guided to the defoaming cylinder 6 through the electromagnetic valve 15 of the connection line 5.
【0025】消泡筒6に導かれた泡が一定量に達する
と、レベルゲージ16が検知し、発熱線17に電気を供
給して60〜120℃程度に発熱させる。すると、この
発熱線17に接触する泡は直ちに破裂し、内部の気体は
真空ポンプ8に吸引されて外部に排出され、シャボン玉
の表面殻であった液体は破裂すると同時に下方に溜ま
る。そしてこの液体が一定量以上になると、リターンラ
イン10の電磁バルブ21が開かれて、循環ポンプ20
の作動により洗浄槽12に戻される。When the amount of the foam guided to the defoaming cylinder 6 reaches a certain amount, the level gauge 16 detects this and supplies electricity to the heating wire 17 to generate heat at about 60 to 120 ° C. Then, the bubbles in contact with the heating wire 17 burst immediately, the gas inside is sucked by the vacuum pump 8 and discharged to the outside, and the liquid which was the surface shell of the soap bubble bursts and collects below. When the liquid reaches a certain amount or more, the electromagnetic valve 21 of the return line 10 is opened and the circulating pump 20 is opened.
Is returned to the cleaning tank 12 by the operation of.
【0026】以上のような操作を連続的に行うことで、
洗浄剤に含まれる空気等の気体や、被洗浄物に付着して
洗浄液S中に混入してくる気体や、洗浄液S中に溶解す
る気体を効果的に除去することが出来、キャビテーショ
ンの衝撃力を向上させることが出来る。By performing the above operations continuously,
It is possible to effectively remove gas such as air contained in the cleaning agent, gas adhering to an object to be cleaned and entering into the cleaning solution S, and gas dissolving in the cleaning solution S. Can be improved.
【0027】尚、前記消泡筒6を使用して脱気したとこ
ろ、当初、洗浄剤(界面活性剤23%、ポリエキシエチ
レンアルキルエーテル、脂肪酸アルカノールアミド、直
鎖アルギルベンゼンスルホン酸ナトリウムの成分)5%
液、30リットルの洗浄液Sに空気が6〜8mg/リッ
トル含まれていたものを、30分で1〜2mg/リット
ルに減少させることが出来た。When degassing was carried out using the defoaming cylinder 6, components of a detergent (23% of a surfactant, polyethylene ethylene alkyl ether, fatty acid alkanolamide, and sodium linear argylbenzenesulfonate) were initially obtained. ) 5%
The liquid, which contained 6 to 8 mg / l of air in 30 liters of the washing liquid S, could be reduced to 1 to 2 mg / l in 30 minutes.
【0028】また、この消泡筒6を用いた超音波洗浄装
置1により、前記成分の洗浄剤5%液で、温度55℃、
超音波諸元25KHz、出力1W/cm2、1200W
の条件でナイフ類20本のバフ研磨除去を行ったとこ
ろ、2分で全数が合格した。これに対して、従来の超音
波洗浄装置で、同じ超音波諸元等でバフ研磨除去を行っ
たところ、5分では全数が不合格であり、10分で50
%が合格したにとどまった。この結果から、本発明の有
効性が確認された。The ultrasonic cleaning apparatus 1 using the defoaming cylinder 6 is used to prepare a 5% solution of the above-mentioned components at a temperature of 55 ° C.
Ultrasonic specifications 25KHz, output 1W / cm 2 , 1200W
When 20 knives were buffed and removed under the conditions described above, all of them passed in 2 minutes. On the other hand, when the conventional ultrasonic cleaning apparatus was used to perform buffing removal under the same ultrasonic specifications, all of the parts failed in 5 minutes, and failed in 50 minutes in 10 minutes.
Only passed%. From these results, the effectiveness of the present invention was confirmed.
【0029】尚、本発明は以上のような実施形態に限定
されるものではない。本発明の特許請求の範囲に記載し
た事項と実質的に同一の構成を有し、同一の作用効果を
奏するものは本発明の技術的範囲に属する。例えば発熱
体は、シーズプラグ形ヒータやその他の固体ヒータでも
良く、また超音波洗浄装置の使用目的等も任意である。The present invention is not limited to the above embodiment. Those having substantially the same configuration as those described in the claims of the present invention and exhibiting the same operation and effect belong to the technical scope of the present invention. For example, the heating element may be a sheathed plug type heater or another solid heater, and the purpose of use of the ultrasonic cleaning device is arbitrary.
【0030】[0030]
【発明の効果】以上のように本発明に係る脱気装置は、
発熱体を収容した真空容器を設け、この真空容器内に液
体を導入し、泡を発熱体に接触させて破壊するようにし
たため、真空容器内を減圧状態に保ったまま泡を消すこ
とが出来、回収した液体中に気体が再溶解する量を減ら
すことが出来る。この際、真空容器内にレベル検知手段
を設け、このレベル検知手段の検知により発熱体に発熱
させれば、より経済的である。またこのような脱気装置
を、超音波洗浄装置に組み込むようにすれば好適であ
る。As described above, the deaerator according to the present invention has the following features.
A vacuum vessel containing a heating element was provided, and liquid was introduced into the vacuum vessel, and the bubbles were brought into contact with the heating element to break them, so that the bubbles could be erased while keeping the inside of the vacuum vessel under reduced pressure. In addition, the amount of gas re-dissolved in the recovered liquid can be reduced. At this time, it is more economical if a level detecting means is provided in the vacuum vessel and the heating element is caused to generate heat by the detection of the level detecting means. It is preferable that such a deaerator is incorporated in an ultrasonic cleaning device.
【図1】超音波洗浄装置のシステム構成図FIG. 1 is a system configuration diagram of an ultrasonic cleaning apparatus.
【図2】消泡筒内部の構成図FIG. 2 is a configuration diagram of the inside of a defoaming cylinder.
1…超音波洗浄装置、6…消泡筒、16…レベルゲー
ジ、17…発熱線。Reference numeral 1 denotes an ultrasonic cleaning device, 6 denotes a defoaming cylinder, 16 denotes a level gauge, and 17 denotes a heating wire.
Claims (3)
気体等を除去するため、発熱体を収容した真空容器を設
け、この真空容器内に前記液体を導入し、泡を発熱体に
接触させて破壊するようにしたことを特徴とする脱気装
置。1. A vacuum container containing a heating element is provided for removing dissolved gas or the like from a liquid in which bubbles are generated in a vacuum state, and the liquid is introduced into the vacuum container to bring the bubbles into contact with the heating element. A degassing device characterized in that it is destroyed by letting it break.
記真空容器内には、泡のレベルを検知して前記発熱体に
発熱信号を発するレベル検知手段が設けられることを特
徴とする脱気装置。2. The degassing apparatus according to claim 1, wherein a level detecting means for detecting a level of bubbles and generating a heat signal to the heating element is provided in the vacuum vessel. Qi device.
求項1又は請求項2に記載の脱気装置に送り込んで液体
中の溶解気体等を除去し、再び超音波洗浄槽に循環させ
るようにしたことを特徴とする脱気装置を備えた超音波
洗浄装置。3. The liquid used for cleaning in the ultrasonic cleaning tank is sent to the degassing device according to claim 1 to remove dissolved gases and the like in the liquid, and circulated again in the ultrasonic cleaning tank. An ultrasonic cleaning apparatus provided with a deaerator characterized by the above.
Priority Applications (1)
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---|---|---|---|
JP09954599A JP3579612B2 (en) | 1999-04-07 | 1999-04-07 | Degassing device and ultrasonic cleaning device provided with the degassing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09954599A JP3579612B2 (en) | 1999-04-07 | 1999-04-07 | Degassing device and ultrasonic cleaning device provided with the degassing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000288307A true JP2000288307A (en) | 2000-10-17 |
JP3579612B2 JP3579612B2 (en) | 2004-10-20 |
Family
ID=14250163
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP09954599A Expired - Fee Related JP3579612B2 (en) | 1999-04-07 | 1999-04-07 | Degassing device and ultrasonic cleaning device provided with the degassing device |
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JP (1) | JP3579612B2 (en) |
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Cited By (9)
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CN1293928C (en) * | 2004-04-08 | 2007-01-10 | 杭州商学院 | Method for debubbling surface of pond and debubbling equipment |
WO2007102604A1 (en) * | 2006-03-09 | 2007-09-13 | Tokyo Electron Limited | Liquid treating device and method of defoaming treating liquid |
JP2007273958A (en) * | 2006-03-09 | 2007-10-18 | Tokyo Electron Ltd | Liquid treatment apparatus and method of defoaming treatment liquid |
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JP2017192941A (en) * | 2013-10-10 | 2017-10-26 | ドリーム ヒート トリーティング カンパニー,リミテッド | Waste water recycling and cleaning apparatus |
KR20160091317A (en) | 2013-11-29 | 2016-08-02 | 달톤 가부시키가이샤 | Degassing device and degassing method |
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