JP2000283114A - Fluid pressure actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid pressure actuator allowing no increase of a plane area of a fixed part not to increase an attachment space of the actuator, though attachment member insertion hole parts are formed in flat surfaces of the fixed part and sensor attachment groove parts are formed in side surfaces of the fixed part. SOLUTION: This fluid pressure actuator has a fixed part 1 provided with a cylinder 38, and a moving part 2 relatively movably connected to the fixed part 1 through guide mechanisms 5, while supply of compressed air into the cylinder 38 moves the moving part 2 relatively to the fixed part 1. An attachment member insertion hole part 8 formed in each flat surface of the fixed part 1 and a sensor attachment groove part 9 formed in each side surface of the fixed part 1 are crossed each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid pressure actuator in which a cylinder is built in a fixed portion of a linear guide device, and a moving portion is reciprocated by supplying compressed air to the cylinder.

[0002]

2. Description of the Related Art Conventionally, a fluid pressure actuator 51 shown in FIG. 9 has been known, but this actuator 51 has the following disadvantages (Japanese Patent Laid-Open No. 8-12841).
No. 0).

[0003] First, FIG. 9 (A) shows a plan view of the fluid pressure actuator 51. As can be seen from this figure, a sensor mounting groove 53 provided on a side surface of the fixing portion 52 is provided with a fixing portion 53. The mounting member 52 is provided at a position avoiding the holes 54 for insertion of the mounting member provided at the four corners of the plane. Therefore, since the groove forming portion 55 that forms the groove portion 53 is provided so as to protrude from the side surface of the fixing portion 52, the plane area of the fixing portion 52 becomes large and the mounting space is large. Generally, there is a demand for miniaturization of this type of fluid pressure actuator so as to reduce the plane area as much as possible, but the above configuration is contrary to this requirement.

FIG. 9 (B) shows a longitudinal section of the fluid pressure actuator 51. As can be seen from this figure, a screw-shaped adjusting member 57 for adjusting the stop position of the moving member 56 is fixed. 52 is provided separately above the body 58. Therefore, the distance L from the axis of the cylinder 59 provided inside the body 58 increases, and a large moment is generated by the thrust of the cylinder 59, and the table 60 of the moving unit 56 comes into contact with the adjustment member 57 and stops. Then, the table 60 is greatly inclined in the vertical direction due to the moment. Further, since the block 61 for supporting the adjusting member 57 is separately required, the manufacturing cost is high.

Further, since the linear member is fixed to the body 58 by caulking or the like as a guide mechanism for guiding the reciprocating movement of the moving portion 56, and the track surface is formed, the manufacturing cost is also high in this respect. When the linear member is fixed by caulking or the like, there is a concern that the linear member may be loosened due to an external force or the like, thereby deteriorating the operation accuracy.

[0006]

SUMMARY OF THE INVENTION In view of the above, the present invention provides a mounting member insertion hole provided on a flat surface of a fixed portion and a sensor mounting groove provided on a side surface of the fixed portion. Also, the flat area of the fixed part does not increase,
An object of the present invention is to provide a fluid pressure actuator in which the mounting space for the actuator does not increase.

It is another object of the present invention to provide a fluid pressure actuator capable of suppressing the moment generated by the thrust of the cylinder to a small value, thereby suppressing the inclination of the moving portion at the time of stop.

In addition, even when position detection is performed at two relatively close positions, a plurality of magnetic proximity sensors can be arranged in series in a single sensor mounting groove, so that a plurality of sensor mountings can be mounted on the same surface. It is an object of the present invention to provide a fluid pressure actuator which does not need to provide a groove for use.

It is still another object of the present invention to provide a fluid pressure actuator having a guide mechanism that does not loosen due to an external force or the like and does not degrade operation accuracy.

[0010]

In order to achieve the above object, a fluid pressure actuator according to claim 1 of the present invention comprises:
A fixed portion provided with a cylinder, and a moving portion connected to the fixed portion so as to be relatively displaceable via a guide mechanism, and supplies compressed air to the cylinder to move the moving portion relative to the fixed portion. A fluid pressure actuator for displacing,
A hole for mounting member insertion provided in the plane of the fixing portion,
A sensor mounting groove provided on a side surface of the fixing portion is provided so as to cross each other.

A fluid pressure actuator according to a second aspect of the present invention includes a fixed portion provided with a cylinder, and a moving portion connected to the fixed portion via a guide mechanism so as to be relatively displaceable. A fluid pressure actuator that supplies compressed air and relatively displaces the moving unit with respect to the fixed unit, wherein an adjusting member that adjusts a stop position of the moving unit includes the cylinder and the cylinder within a thickness of the fixed unit. It is characterized by being screwed into a screw hole provided side by side so as to be able to advance and retreat.

According to a third aspect of the present invention, there is provided a fluid pressure actuator including a fixed portion provided with a cylinder, and a moving portion connected to the fixed portion via a guide mechanism so as to be relatively displaceable. A fluid pressure actuator that supplies compressed air and relatively displaces the moving unit with respect to the fixed unit, wherein a permanent magnet that operates a magnetic proximity sensor that detects a position of the moving unit is inserted into the cylinder. The piston is mounted on both ends in the moving direction of the piston or both ends in the moving direction of the moving part or in the vicinity thereof.

According to a fourth aspect of the present invention, there is provided the fluid pressure actuator according to the first, second or third aspect, wherein the guide mechanism is disposed in a concave groove provided in the fixing portion. A pair of bearing races, a pair of bearing races disposed in a concave groove provided in the moving portion so as to face the concave groove, and a pair of the two to four bearing races are rotatably disposed. A rolling element, and an adjusting screw penetrating from a side surface of the moving portion to a bottom surface of one of the concave grooves.

In the fluid pressure actuator according to the first aspect of the present invention having the above structure, a mounting member insertion hole provided on a plane of the fixing portion, and a sensor mounting groove provided on a side surface of the fixing portion. Are provided so as to intersect each other, even if both the hole and the groove are provided in the fixed portion,
The flat area of the fixing portion does not increase as compared with the case where only the groove is provided. The groove can be formed at any position without avoiding the position of the hole.

Further, the present invention has the above-mentioned structure.
In the fluid pressure actuator, the adjusting member for adjusting the stop position of the moving portion is screwed into a screw hole provided side by side with the cylinder within the thickness of the fixed portion so as to be able to advance and retreat. Compared with the case where the cylinder is separately provided on the upper portion, the distance from the axis of the cylinder can be generally shortened, and thereby the moment generated by the thrust of the cylinder can be reduced.

Further, the present invention has the above configuration.
In the fluid pressure actuator, a permanent magnet that operates a magnetic proximity sensor that detects the position of the moving unit is attached to both ends of the moving direction of the piston inserted into the cylinder or both ends of the moving direction of the moving unit or in the vicinity thereof. Therefore, even when position detection is performed at two relatively close positions, a plurality of magnetic proximity sensors can be arranged in series in a single sensor mounting groove.

Further, in the fluid pressure actuator according to the fourth aspect of the present invention having the above-described structure, the guide mechanism includes a pair of bearing races disposed in the concave groove provided in the fixing portion, and the guide mechanism opposes the concave groove. A pair of bearing races arranged in a concave groove provided in the moving part, a rolling element rotatably arranged between two to four bearing races, and one concave from a side surface of the moving part. Since it has an adjustment screw penetrating the bottom of the groove, it is possible to assemble the bearing race and the ball without looseness by properly tightening the adjustment screw. Since there is no need to fix to the fixing part, the fixing does not loosen or come off.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a front view of a fluid pressure actuator according to the first embodiment, FIG.
3 is a side view, FIG. 4 is a sectional view taken along the line AA in FIG. 3, FIG. 5 is a sectional view taken along the line BCDDE in FIG. 4, and FIG.
FIG.

The fluid pressure actuator according to the present embodiment has a body (also referred to as a guide rail) 1 as a fixed portion and a table (also referred to as a slider) 2 as a moving portion. Concave grooves 3 extending in the axial direction are respectively provided on both outer side surfaces of the convex portion 1a provided on the upper surface over the entire length thereof, and the concave recesses 3 are arranged so as to straddle the body 1. A concave groove 4 corresponding to the concave groove 3 is provided on both inner side surfaces of the V-shaped table 2 over the entire length of the table 2, and between the concave grooves 3 and 4 facing each other. A guide mechanism 5 for guiding the movement of the table 2 is provided.

The body 1 and the table 2 are each formed of an aluminum alloy which is lightweight and has excellent corrosion resistance and workability. In particular, the body 1 has a through hole 11 formed substantially at the center of the wall thickness at the stage of the extruded material. In view of the above, it is preferable that the molding is made of a corrosion-resistant aluminum alloy such as A6063 having excellent extrudability. Since the table 2 has a portion where concentrated stress is generated, the table 2 is preferably formed of a high-strength aluminum alloy such as A7075 having excellent mechanical strength. Each of the body 1 and the table 2 has been formed into a cross-sectional shape at the stage of the extruded material, and thereafter, after (the rest), each is cut to a required length and easily processed by tapping or finishing. Molded into Also, since necessary heat treatment and surface treatment can be performed at the stage of the extruded material,
The production cost can be significantly reduced.

A required number of screw hole-shaped mounting portions 6 for connecting and mounting tools, jigs (both not shown) and the like are provided on the upper surface of the table 2, and the mounting portions 6 are provided on the plane of the body 1. A required number of mounting portions 7 for fixing the fluid pressure actuator to a predetermined portion of equipment (not shown) or the like are provided, and in the example of the drawing, the mounting portions 6 and 7 are each formed in a four-sided cross shape. Is provided. The latter mounting portion 7 on the side of the body 1 is provided with a hole 8 vertically penetrating the body 1 so that a mounting bolt (not shown) as a mounting member can be inserted from above. A groove (also referred to as a long groove) 9 for mounting a magnetic proximity sensor (not shown) is provided on each of both side surfaces of the body 1 over the entire length of the body 1. At a certain stage.

In the actuator,
The hole 8 provided on the plane of the body 1 and the groove 9 provided on the side surface of the body 1 are provided so as to intersect at right angles to each other. Are formed so as to overlap.

As shown in FIG. 5, in the hole 8 provided in the mounting portion 7, a relatively large diameter deep counterbore is provided from the upper end opening to the height position located below the groove 9. 8a
A stepped seating surface 8c on which the head of the mounting bolt is seated is provided at a boundary between the large diameter portion made of the deep counterbore 8a and the small diameter portion 8b below the large diameter portion. The head of the mounting bolt is housed in the deep counterbore 8a below the groove 9 in a state of being seated on the seating surface 8c, and its upper end is formed in the groove 9
The mounting bolt does not hinder the mounting of the sensor in the groove 9.

A female screw 8d is formed on the inner surface of the small diameter portion 8b. Therefore, for the hole 8 of the mounting portion 7,
Not only can the mounting bolt be inserted from above, but also the screwing from the bottom side of the body 1 is possible. Also, on the inner surface of the groove 9, projections 10 for preventing the sensor from falling off are provided in pairs at the top and bottom.

The body 1 has a through hole 11 over its entire length.
Is provided at the stage of the extruded material, and this through hole 1 is provided.
An opening 12 is provided above the top 1 so as to open on the upper surface of the projection 1a. The through-hole 11 and the opening 12 are elongated communicating portions 13 provided on the boundary wall between the two. Are communicated with each other via the. Male screw 14a at upper end
Is connected to the table 2 by being screwed into a female screw 2 a provided substantially perpendicularly to the upper surface of the table 2 at substantially the center of the table 2, penetrating vertically through the opening 12 and the communication portion 13. The lower end of the connecting member 14 is inserted and engaged with a slight play in an engaging hole 15a provided substantially at the center of the piston 15 in the axial direction. Piston 1
5, a pair of permanent magnets 16 are embedded at both ends.
The cover member 17 prevents the permanent magnet 16 from dropping off.
Since the magnetic proximity sensor mounted in the sensor mounting groove 9 detects the magnetism of the permanent magnet 16 and the magnetic proximity sensor can detect the magnetism of the separate permanent magnets 16, the position is relatively close to two points. Even when detection is performed, a plurality of magnetic proximity sensors can be arranged in series in the sensor mounting groove 9. Therefore, it is not necessary to provide a plurality of sensor mounting grooves 9 on the same surface. Instead of holding the permanent magnets 16 at both ends of the piston 15, the permanent magnets 16 may be arranged at the four bottom corners of the table 2 as shown in FIG.

The piston 15 is slidably disposed inside the through hole 11, and a pair of second pistons 18 are disposed at both ends of the piston 11 in a non-adhesive manner. Are provided with piston seals 19 respectively. Both ends of the through hole 11 are closed by closing members 20, respectively, and O-rings 21 are attached to the outer periphery of the closing members 20, respectively. Closing member 2
Numerals 0 are respectively fixed by retaining rings 22 for holes.

The inside of the through hole 11 is formed by a pair of cylinder chambers 23 by a piston 15 and a pair of second pistons 18.
A cylinder indicated by reference numeral 38 is provided inside the body 1. A pair of piping ports 24 are provided on the side surface of the body 1.
4 communicate with one of the cylinder chambers 23 via orifices (not shown). Therefore, one cylinder chamber 2 is connected through the piping port 24 and the orifice.
When compressed air, which is a working fluid pressure, is supplied to the cylinder 3 and the other cylinder chamber 23 is opened to the atmosphere, the pressure causes the piston 15 and the second piston 18 to be integrally formed in the through hole 1.
1 moves in the axial direction, and the table 2 follows the movement via the connecting member 14. When the connecting member 14 comes into contact with the peripheral edge of the communicating portion 13, the stroke ends and the movement stops, but the stop position can be changed by adjustment by the adjusting member 25.

That is, a pair of screw holes 26 are provided in the vertical thickness of the body 1 adjacent to the upper portion of the through hole 11 in parallel with the through hole 11, and each of the screw holes 26 has a bolt-like shape. The adjusting member 25 is screwed so as to be able to advance and retreat in the axial direction, and is fixed by a fixing nut 37. The distal end 25a of the adjusting member 25 protrudes from the opening 12 of the body 1, so that when the connecting member 14 comes into contact with the distal end 25a, the movement of the table 2 stops. A contact member 27 is attached to the outer periphery of the connecting member 14, and a cushioning member 28 made of a rubber-like elastic material is
Is attached. Therefore, when the contact member 27 comes into contact with the buffer member 28, the shock at the time of contact can be absorbed by the buffering action of the buffer member 28. The contact member 27 is formed of a hard material and has a required hardness by heat treatment. Therefore, when the stop position accuracy of the table 2 is required, the buffer member 2
Although the contact member 27 is brought into direct contact with the adjusting member 25 by removing the contact member 8, even if the metals are brought into contact with each other in this manner, no sag occurs.

Guide mechanism 5 for guiding the movement of table 2
Is configured as follows.

As shown in FIGS. 5 and 6, first, a pair of upper and lower rod-shaped bearing races 29 having a circular or substantially circular cross section are arranged at the bottom of the concave groove 3 on the body 1 side. Arc portions 3 each having a circular cross section provided at upper and lower corners of the concave groove 3 at a part of the peripheral surface thereof.
a slidably in contact with a. The diameter of the arc portion 3a is equal to the diameter of the bearing race 29 or slightly larger than the diameter of the bearing case 29. Therefore, in this contact structure in which the arc portions contact each other, the arc portion and the plane contact. As compared with the case, the stress generated in the contact portion is significantly reduced.

At the bottom of the concave groove 4 on the table 2 side, a pair of upper and lower rod-shaped bearing races 30 each having a substantially D-shaped cross section and having a flat portion 30a extending in the axial direction on a part of the peripheral surface are arranged. Each of the bearing races 30 is slidably in contact with a planar side wall 4a of the concave groove 4 at a part of an arc portion 30b on the peripheral surface thereof. Such an arc part 3
When contact is made between the contact portion 0b and the flat side wall portion 4a, concentrated stress may be generated at the contact portion. In this actuator, however, the table 2 is formed of a high-strength aluminum alloy and subjected to heat treatment such as T6. Therefore, the required mechanical strength is sufficiently ensured.

With the above arrangement, the bearing race 29,
A set of two balls 30 are arranged in a cross, and a required number of balls 31 as rolling elements are arranged in a row between the bearing races 29 and 30 so as to be able to roll freely. ing. The balls 31 are in contact with the peripheral surface of the bearing race 29 and the arc portion 30b of the bearing race 30, respectively.

Each of the bearing races 29 and 30 and the ball 31 are formed of a hard material such as high carbon chromium bearing steel or martensitic stainless steel in order to secure necessary strength, and are precision-processed by polishing after heat treatment. The finishing process has been performed to improve the accuracy and rigidity of the linear guide device. This guide mechanism 5
Is the centerless polished bearing race 29,3
Since the outer circumference of 0 is the track surface as it is,
Compared with the conventional example in which the track member is formed by fixing the linear member to the body, it is possible to greatly reduce the manufacturing cost.

A screw hole 32 is provided from one outer side surface of the table 2 toward the bottom surface of the concave groove 4 on the table 2 side. Adjustment screws 33 are screwed into the screw holes 32 so as to be able to advance and retreat in the axial direction. A flat portion 33 a is provided at the shaft end (tip) of the adjusting screw 33, and the flat portion 33 a is in contact with the flat portion 30 a provided on the outer periphery of the bearing race 30. Therefore, the contact state between the bearing races 29, 30 and the ball 31 can be adjusted by screwing or returning the adjusting screw 33.

A pan screw 34 is attached to each end of the bearing race 29 disposed at the bottom of the concave groove 3 on the body 1 side, and a plate-like end member 35 is attached to each end of the table 2. The bearing races 29, 30 and the ball 31 are prevented from falling off by the screws 36.

In the fluid pressure actuator having the above-described structure, the body 1 is fixed to a predetermined portion of a production facility or the like by inserting mounting bolts into holes 8 provided in a plane of the body 1, and a pipe is connected to a pipe port 24. To make the cylinder 38 operable, a magnetic proximity switch is attached to the groove 9 provided on the side surface of the body 1 and a predetermined wiring is provided so that the position of the table 2 can be detected. And the adjusting member 25 is further operated to adjust the stop position of the table 2. In this state, compressed air is supplied to the cylinder 38 to linearly reciprocate the table 2 and the work along the guide mechanism 5. Which is characterized in that the above-described configuration has the following operational effects.

That is, first, a mounting bolt insertion hole 8 provided on the plane of the body 1 and a sensor mounting groove 9 also provided on a side surface of the body 1 are provided so as to intersect each other. Therefore, even when both the hole 8 for inserting the mounting bolt and the groove 9 for attaching the sensor are provided in the body 1, the plane area of the body 1 is smaller than when only the groove 9 is provided. It is not necessary to provide the groove forming portion 55 in a protruding shape on the side surface of the fixing portion 52 unlike the above-described related art, so that the plane area of the body 1 is rather reduced as compared with the above-described related art. Is possible. Therefore, the planar shape of the actuator can be reduced in size, and its mounting space can be reduced.

A screw-shaped adjusting member 25 for adjusting the stop position of the table 2 has a cylinder 3 within the thickness of the body 1.
8 is screwed into the screw hole 26 provided side by side so as to be able to advance and retreat, so that the adjusting member 57 is provided separately above the fixing portion 52 as in the above-described conventional technique. It is possible to shorten the distance from. Therefore, the moment generated by the thrust of the cylinder 38 can be kept small, and the inclination of the table 2 at the time of stopping can be kept small. Further, since the distance from the contact surface of the contact member 27 attached to the connecting member 14 to the guide mechanism 5 is short, displacement due to bending of the member can be suppressed to a small value.

Further, the permanent magnet 16 for operating the magnetic proximity sensor for detecting the position of the table 2 is attached to both ends of the piston 15 inserted in the cylinder 38 or both ends of the table 2 or in the vicinity thereof. In addition, even when position detection is performed at two relatively close positions, a plurality of magnetic proximity sensors can be arranged in series in one sensor mounting groove 9. Therefore, it is not necessary to provide a plurality of sensor mounting grooves 9 on the same surface, and the actuator can be downsized from this point as well.

Further, a guide mechanism 5 arranged between the body 1 and the table 2 to guide the movement of the table 2 includes a pair of bearing races 29 arranged in the concave grooves 3 provided in the body 1; A pair of bearing races 30 arranged in a concave groove 4 provided in the table 2 so as to face the concave groove 3, and two to four bearing races 2;
Since the ball 31 is provided so as to be able to roll freely between 9 and 30 and the adjusting screw 33 penetrating from the side surface of the table 2 to the bottom surface of the one groove 4, the adjusting screw 33 is used. The bearing races 29, 30 can be tightened appropriately.
And the ball 31 can be assembled without looseness, and since the bearing race does not need to be fixed to the fixing portion by caulking or bonding as in the above-described prior art, the fixing does not loosen or come off. . Therefore, it is possible to provide an actuator including the guide mechanism 5 having excellent durability without deteriorating the operation accuracy of the guide mechanism 5.

The structure of the guide mechanism 5 may be as follows.

Second Embodiment As shown in FIG. 7, the adjusting screw 3 is arranged in the concave groove 4 on the table 2 side.
A pair of bearing races 30 to be combined with the third 3 is provided with a second flat portion 30c orthogonal to a flat portion 30a provided on a part of the peripheral surface thereof.
c is slidably brought into contact with the planar side wall 4a of the groove 4. With this configuration, the stress generated in the table 2 when a load is applied due to the weight of the work or the like is further reduced.
The table 2 can be made of a corrosion-resistant aluminum alloy, and the load that can be supported by the actuator can be increased. The other configurations and operational effects of the actuator according to the second embodiment are the same as those of the first embodiment.

Third Embodiment As shown in FIG. 8, the adjusting screw 3 is arranged in the concave groove 4 on the table 2 side.
A pair of bearing races 30 to be combined with the third 3 is provided with a second flat portion 30c orthogonal to a flat portion 30a provided on a part of the peripheral surface thereof.
c is slidably brought into contact with the planar side wall 4a of the groove 4. Further, flat portions 29a and 30d that are in contact with the balls 31 as rolling elements are provided on a part of the peripheral surfaces of all the bearing races 29 and 30, respectively. In this case, the load that can be supported by the actuator can be further increased, and the size of the actuator can be further reduced.

Further, common to the first to third embodiments, each guide mechanism 5 has the following features.

That is, first, the normal line of the contact portion between the bearing race 30 and the ball 31 arranged in the concave groove 4 on the table 2 side and the normal line of the contact portion between the bearing race 30 and the concave groove 4 intersect. Since the adjusting screw 33 and the bearing race 30 are in contact with each other above and below a horizontal line passing through the point where the adjusting screw 33 is formed, the flat portion 33a formed on the end face of the adjusting screw 33 facing the assembly part and the peripheral surface of the bearing race 30 Even if the flat portion 30a formed on the portion is not parallel to each other, the bearing race 30 is rotated by screwing the adjusting screw 33, and the flat portion 30a on the bearing race 30 follows the flat portion 33a on the adjusting screw 33 side. Face contact with each other.
Therefore, it is possible to prevent the contact portion from being set.

Further, since the same adjusting screw 33 is in contact with both of the pair of bearing races 30 arranged in the concave groove 4 on the table 2 side, it is arranged along the longitudinal direction of the concave groove 4. The relative position between the table 2 and the body 1 does not change due to the degree of screwing of the plurality of adjustment screws 33 that are present.

The other configurations and operational effects of the actuators according to the second and third embodiments are the same as those of the first embodiment.

[0049]

The present invention has the following effects.

That is, in the fluid pressure actuator according to the first aspect of the present invention having the above-described structure, the mounting member insertion hole provided on the plane of the fixing portion and the sensor mounting hole provided on the side surface of the fixing portion. Are provided so as to intersect with each other, even if both the mounting member insertion hole and the sensor mounting groove are provided in the fixed portion, compared to the case where only the groove is provided. Since the plane area of the fixing portion does not increase, and it is not necessary to provide a groove forming portion in a protruding shape on the side surface of the fixing portion as in the above-described conventional technology, the plane area of the fixing portion is reduced as compared with the above-described conventional technology. On the contrary, it is possible to reduce the size. Therefore, the planar shape of the actuator can be reduced in size, and its mounting space can be reduced.

Further, the present invention having the above-mentioned structure is described in claim 2 of the present invention.
In the fluid pressure actuator, the adjusting member for adjusting the stop position of the moving part is screwed into a screw hole provided in the thickness of the fixed part alongside the cylinder so as to be able to advance and retreat, as in the above-described prior art. The distance from the axis of the cylinder can be reduced as compared with the case where the adjusting member is separately provided above the fixed portion. Therefore, the moment generated by the thrust of the cylinder can be kept small, and the inclination of the table at the time of stopping can be kept small.

Further, the present invention has the above-mentioned structure.
In the fluid pressure actuator, a permanent magnet that operates a magnetic proximity sensor that detects the position of the moving unit is attached to both ends of the moving direction of the piston inserted into the cylinder or both ends of the moving direction of the moving unit or in the vicinity thereof. Therefore, even when position detection is performed at two relatively close positions, a plurality of magnetic proximity sensors can be arranged in series in a single sensor mounting groove. Therefore, there is no need to provide a plurality of sensor mounting grooves on the same surface, and the actuator can be downsized from this point as well.

Further, in the fluid pressure actuator according to the fourth aspect of the present invention having the above-described structure, the guide mechanism includes a pair of bearing races disposed in the concave groove provided in the fixing portion, and a pair of the bearing races facing the concave groove. A pair of bearing races arranged in a concave groove provided in the moving part, a rolling element rotatably arranged between two to four bearing races, and one concave from a side surface of the moving part. Since it has an adjustment screw disposed through the bottom surface of the groove, it is possible to assemble the bearing race and the rolling element without looseness by appropriately tightening the adjustment screw, and, as in the above-described prior art, Since it is not necessary to fix the bearing race to the fixing portion by caulking or bonding, the fixing does not loosen or come off. Therefore, it is possible to provide an actuator having a guide mechanism with excellent durability without deteriorating the operation accuracy of the guide mechanism.

[Brief description of the drawings]

FIG. 1 is a front view of a fluid pressure actuator according to a first embodiment of the present invention.

FIG. 2 is a plan view of the fluid pressure actuator.

FIG. 3 is a side view of the fluid pressure actuator.

FIG. 4 is a sectional view taken along line AA in FIG. 3;

FIG. 5 is a sectional view taken along line BCDDE in FIG. 4;

FIG. 6 is a partially enlarged view of FIG. 5;

FIG. 7 is a partial cross-sectional view of a fluid pressure actuator according to a second embodiment of the present invention.

FIG. 8 is a partial sectional view of a fluid pressure actuator according to a third embodiment of the present invention.

9A is a plan view of a hydraulic actuator according to a conventional example, and FIG. 9B is a longitudinal sectional view of a door hydraulic actuator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Body (fixed part) 1a Convex part 2 Table (moving part) 2a, 8d Female screw 3, 4 Concave groove 3a, 30b Arc part 4a Side wall part 5 Guide mechanism 6, 7 Mounting part 8 Hole part 9 Groove part 8a Deep counterbore 8b Small diameter portion 8c Seating surface 10 Projection 11 Through hole 12 Opening 13 Communication portion 14 Connecting member 14a Male screw 15 Piston 15a Engagement hole 16 Permanent magnet 17 Cover member 18 Second piston 19 Piston seal 20 Closing member 21 O-ring 22 For hole Retaining ring 23 Cylinder chamber 24 Piping port 25 Adjusting member 25a Tip 26, 32 Screw hole 27 Contact member 28 Buffering member 29, 30 Bearing race 29a, 30a, 30c, 30d, 33a Flat portion 31 Ball (rolling element) 33 Adjustment Screw 34, 36 Pan head screw 35 End member 37 Fixing nut 38 Cylinder

Claims (4)

[Claims] 1. A fixed part (1) provided with a cylinder (38).
And a moving part (2) connected to the fixed part (1) via a guide mechanism (5) so as to be relatively displaceable. The moving part (2) supplies compressed air to the cylinder (38). ) Relative to the fixing portion (1), wherein the mounting portion (1) is provided with a mounting member insertion hole (8) provided in a plane of the fixing portion (1). A fluid pressure actuator characterized in that a sensor mounting groove (9) provided on the side face of the (1) is provided so as to intersect with each other. 2. A fixed part (1) provided with a cylinder (38).
And a moving part (2) connected to the fixed part (1) via a guide mechanism (5) so as to be relatively displaceable. The moving part (2) supplies compressed air to the cylinder (38). ) Relative to the fixed portion (1), wherein the adjusting member (2) adjusts a stop position of the moving portion (2).
5) the cylinder (3) within the thickness of the fixed part (1).
8) A fluid pressure actuator characterized by being screwed into a screw hole (26) provided side by side so as to be able to advance and retreat. 3. A fixed part (1) provided with a cylinder (38).
And a moving part (2) connected to the fixed part (1) via a guide mechanism (5) so as to be relatively displaceable. The moving part (2) supplies compressed air to the cylinder (38). ) Relative to the fixed part (1), wherein the permanent magnet (16) for activating a magnetic proximity sensor for detecting the position of the moving part (2) is connected to the cylinder (38). A fluid pressure actuator, which is attached to both ends in the moving direction of the piston (15) inserted in the moving member, or both ends in the moving direction of the moving part (2) or in the vicinity thereof. 4. The hydraulic actuator according to claim 1, wherein the guide mechanism (5) has a pair of bearing races (29) arranged in a concave groove (3) provided in the fixing part (1). )
And the moving portion (1) so as to face the concave groove (3).
A pair of bearing races (30) arranged in the concave grooves (4) provided in the
9) The rolling element (3) which is disposed so as to freely roll between (30) and (30).
1) and an adjusting screw (33) penetrating from the side surface of the moving part (2) to the bottom surface of one of the concave grooves (4).